KR19990041113A - Balance for carrying liquid crystal cell - Google Patents
Balance for carrying liquid crystal cell Download PDFInfo
- Publication number
- KR19990041113A KR19990041113A KR1019970061666A KR19970061666A KR19990041113A KR 19990041113 A KR19990041113 A KR 19990041113A KR 1019970061666 A KR1019970061666 A KR 1019970061666A KR 19970061666 A KR19970061666 A KR 19970061666A KR 19990041113 A KR19990041113 A KR 19990041113A
- Authority
- KR
- South Korea
- Prior art keywords
- storage chamber
- liquid crystal
- crystal cell
- chamber
- unit
- Prior art date
Links
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/677—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations
- H01L21/67703—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations between different workstations
- H01L21/67724—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations between different workstations by means of a cart or a vehicule
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
- B65G—TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
- B65G49/00—Conveying systems characterised by their application for specified purposes not otherwise provided for
- B65G49/05—Conveying systems characterised by their application for specified purposes not otherwise provided for for fragile or damageable materials or articles
- B65G49/06—Conveying systems characterised by their application for specified purposes not otherwise provided for for fragile or damageable materials or articles for fragile sheets, e.g. glass
- B65G49/068—Stacking or destacking devices; Means for preventing damage to stacked sheets, e.g. spaces
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/677—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations
- H01L21/67763—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations the wafers being stored in a carrier, involving loading and unloading
- H01L21/67766—Mechanical parts of transfer devices
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/677—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations
- H01L21/67763—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations the wafers being stored in a carrier, involving loading and unloading
- H01L21/67769—Storage means
-
- G—PHYSICS
- G02—OPTICS
- G02F—OPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
- G02F1/00—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
- G02F1/01—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour
- G02F1/13—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour based on liquid crystals, e.g. single liquid crystal display cells
- G02F1/1303—Apparatus specially adapted to the manufacture of LCDs
Landscapes
- Engineering & Computer Science (AREA)
- Physics & Mathematics (AREA)
- Condensed Matter Physics & Semiconductors (AREA)
- General Physics & Mathematics (AREA)
- Manufacturing & Machinery (AREA)
- Computer Hardware Design (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Power Engineering (AREA)
- Robotics (AREA)
- Handcart (AREA)
- Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)
Abstract
본 발명은 액정 셀 운반용 대차를 개시한다. 개시된 본 발명은, 액정 셀이 수납된 카세트는 보관 쳄버(1)에 반입된 상태로 운반된다. 보관 쳄버(1)에는 공기를 강제흡입함과 아울러 정화시키는 공기 청정 유니트(5)가 설치된다. 보관 쳄버(1)의 하부에 공기 청정 유니트(5)를 작동시키기 위한 배터리(21) 등이 설치되는 유니트 작동 쳄버(2)가 코일 스프링(4)에 의해 탄성적으로 연결된다. 유니트 작동 쳄버(2)의 하부에는 충격 흡수식 캐스터(6)가 설치되어, 노면으로부터 액정 셀로 가해지는 충격을 최소화시킬 수가 있다.The present invention discloses a liquid crystal cell transport cart. According to the disclosed invention, the cassette in which the liquid crystal cell is housed is transported in the storage chamber 1. The storage chamber 1 is provided with an air cleaning unit 5 for purifying and purifying air. The unit operation chamber 2, in which the battery 21 and the like for operating the air cleaning unit 5, is installed at the lower portion of the storage chamber 1, is elastically connected by the coil spring 4. A shock absorbing caster 6 is provided at the lower portion of the unit operation chamber 2 to minimize the impact applied to the liquid crystal cell from the road surface.
Description
본 발명은 액정 셀 운반용 대차(cart)에 관한 것으로서, 보다 구체적으로는 액정 셀을 어느 한 공정 라인에서 청정도(clean level)가 다른 후속 공정 라인으로 운반하기 위해 사용하는 대차에 관한 것이다.BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a cart for carrying a liquid crystal cell, and more particularly to a cart used to transport a liquid crystal cell from one process line to a subsequent process line with a different clean level.
일반적으로, 액정 셀을 제조하는데 있어서, 액정 셀을 제작하는 라인에서 TCP 본딩 공정 등이 실시되는 모듈 라인으로 액정 셀을 운반하는 작업이 필요하게 된다. 특히, 액정 셀 제작 라인과 모듈 라인의 청정도는 크게 다르다. 즉, 모듈 라인의 청정도가 제작 라인의 청정도보다 매우 높게 관리되고 있다.In general, in manufacturing a liquid crystal cell, an operation of transporting the liquid crystal cell from a line for producing a liquid crystal cell to a module line where a TCP bonding process or the like is performed is required. In particular, the cleanliness of the liquid crystal cell production line and the module line is greatly different. That is, the cleanliness of the module line is managed to be much higher than the cleanliness of the production line.
종래에는, 제작 라인에서 모듈 라인으로 액정 셀을 운반할 때, 액정 셀이 오염된 공기에 노출된 상태로 되어 있기 때문에, TCP 공정을 수행하기 전에 반드시 알콜과 와이퍼를 이용해서 액정 셀의 게이트 소스 부분을 세척하는 공정이 실행되어야 했다. 이로 인하여, 공정 시간이 길어지게 되어, 생산성이 저하되는 문제점이 있었다.Conventionally, when transporting a liquid crystal cell from a production line to a module line, since the liquid crystal cell is exposed to contaminated air, the gate source portion of the liquid crystal cell must be used with alcohol and a wiper before performing the TCP process. The process to wash the For this reason, process time becomes long and there existed a problem that productivity fell.
또한, 액정 셀을 오염된 공기에 노출된 상태로 운반하기 때문에, 액정 셀에 치명적인 미립자(particle)이 묻게 되어, 불량율이 높아진다는 문제점도 있었다.In addition, since the liquid crystal cell is transported in a state of being exposed to contaminated air, fatal particles are buried in the liquid crystal cell, so that there is a problem that the defective rate is increased.
특히, 액정 셀 운반중에, 종래에는 진동이 액정 셀로 직접 전달되는 것을 막을 수가 없기 때문에, 액정 셀이 파손되는 경우도 자주 발생되는 문제점이 있었다.In particular, during transport of the liquid crystal cell, there is a problem that often occurs when the liquid crystal cell is broken because vibration cannot be prevented from being directly transmitted to the liquid crystal cell.
상기와 같은 문제점을 해소하기 위해 안출된 본 발명은, 액정 셀을 오염된 공기에 노출되지 않으면서 정화된 공기만에 노출된 상태로 운반할 수 있도록 하여, 미립자에 의한 액정 셀의 손상과 이에 따른 세척 작업을 삭제할 수 있는 액정 셀 운반용 대차를 제공하는데 목적이 있다.The present invention devised to solve the above problems, it is possible to transport the liquid crystal cell exposed to purified air only without being exposed to contaminated air, damage to the liquid crystal cell by the fine particles and thus It is an object to provide a liquid crystal cell transport trolley which can eliminate the cleaning operation.
또한, 본 발명은 액정 셀 운반중에, 진동이 액정 셀로 전달되는 것을 최소화할 수 있도록 하여, 액정 셀의 파손을 방지할 수 있는 액정 셀 운반용 대차를 제공하는데 다른 목적이 있다.Further, another object of the present invention is to provide a liquid crystal cell transport cart that can minimize the transmission of vibration to the liquid crystal cell during transport of the liquid crystal cell, thereby preventing damage to the liquid crystal cell.
도 1은 본 발명에 따른 대차를 나타낸 정면도1 is a front view showing a bogie according to the present invention
도 2는 본 발명의 주요부인 공기 청정 유니트를 나타낸 도면2 is a view showing an air cleaning unit which is an essential part of the present invention.
도 3은 본 발명의 주요부인 충격 흡수식 캐스터를 나타낸 배면도Figure 3 is a rear view showing the shock absorbing caster which is an essential part of the present invention.
도 4는 본 발명의 동작 설명도4 is an operation explanatory diagram of the present invention.
- 도면의 주요 부분에 대한 부호의 설명 --Explanation of symbols for the main parts of the drawing-
1 - 보관 쳄버 2 - 유니트 작동 쳄버1-Storage chamber 2-Unit operating chamber
3 - 가이드 축 4 - 코일 스프링3-guide shaft 4-coil spring
5 - 공기 청정 유니트 6 - 충격 흡수식 캐스터5-Air Clean Units 6-Shock Absorbers
54 - 팬 56 - 메인 필터54-Fan 56-Main Filter
67 - 타이어 68 - 러버67-Tire 68-Rubber
상기와 같은 목적을 달성하기 위해 본 발명은 다음과 같은 구성을 갖는다.In order to achieve the above object, the present invention has the following configuration.
다수의 액정 셀이 적층된 카세트는 보관 쳄버내에 수납된다. 보관 쳄버내에는 카세트가 안치되는 베이스 플레이트가 슬라이더에 의해 서랍식으로 끼워진다. 보관 쳄버의 정면에는 도어가 힌지식으로 설치된다. 또한, 보관 쳄버의 상부면에는 공기 청정 유니트가 설치된다.A cassette in which a plurality of liquid crystal cells are stacked is stored in a storage chamber. In the storage chamber, a base plate on which a cassette is placed is fitted in a drawer type by a slider. The door is hinged on the front of the storage chamber. In addition, an air cleaning unit is installed on the upper surface of the storage chamber.
공기 청정 유니트는 보관 쳄버의 상부면에 설치되는 케이스, 케이스의 상부면에 설치된 흡입 슬릿판, 흡입 슬릿판을 통해 외기를 흡입하는 팬, 팬과 흡입 슬릿판 사이에 배치되어 입자가 큰 이물질을 우선적으로 제거하는 프리 필터, 팬의 후방에 배치되어 외기의 오염물질을 완전제거하는 메인 필터, 및 케이스의 하부면에 형성되고 보관 쳄버로 연통되어 정화된 공기가 배출되는 배출 슬릿판으로 구성된다.The air cleaning unit is placed between the case installed on the upper surface of the storage chamber, the suction slit plate installed on the upper surface of the case, the fan that sucks the outside air through the suction slit plate, and the fan and the suction slit plate to give priority to foreign particles with large particles. It is composed of a pre-filter to remove the air, the main filter disposed in the rear of the fan to completely remove the pollutants of the outside air, and the discharge slit plate formed on the lower surface of the case and communicated to the storage chamber to discharge the purified air.
보관 쳄버의 하부에 공기 청정 유니트를 작동시키는 구성 요소들이 설치되는 유니트 작동 쳄버가 연결된다. 유니트 작동 쳄버의 상부면 각 모서리에 가이드 축이 설치되고, 각 가이드 축은 보관 쳄버의 하부면에 상하 이동가능하게 끼워진다. 각 가이드 축의 외주에는 코일 스프링이 끼워진다. 유니트 작동 쳄버내에는 배터리와 재충전기, 및 인버터가 설치된다. 유니트 작동 쳄버의 하부면 각 모서리에는 충격 흡수식 캐스터가 설치된다.At the bottom of the storage chamber is connected the unit operating chamber in which the components for operating the air cleaning unit are installed. Guide shafts are installed at each corner of the upper surface of the unit operating chamber, and each guide shaft is fitted to the lower surface of the storage chamber so as to be movable up and down. Coil springs are fitted on the outer periphery of each guide shaft. The battery, recharger and inverter are installed in the unit operation chamber. Shock absorbing casters are installed at each corner of the lower surface of the unit operating chamber.
충격 흡수식 캐스터는 유니트 작동 쳄버의 하부면에 설치되는 플레이트, 플레이트에 360。 회전가능하게 끼워진 볼, 볼의 양측 외주에 설치된 프레임, 프레임에 힌지로 연결된 한 쌍의 렉(leg), 양 렉의 상부 내측면 사이에 개재된 러버, 각 렉의 하단에 핀으로 회전가능하게 연결된 휠, 및 휠의 외주에 끼워진 타이어로 구성된다.Shock-absorbing casters include plates installed on the lower surface of the unit operating chamber, balls rotatably fitted to the plate, frames mounted on the outer periphery of the ball, a pair of legs hinged to the frame, and the top of both racks. A rubber interposed between the inner surface, a wheel rotatably connected to the lower end of each rack by a pin, and a tire fitted to the outer circumference of the wheel.
상기된 본 발명의 구성에 의하면, 공기 청정 유니트에 의해 정화된 공기만이 보관 쳄버로 유입되게 되어, 보관 쳄버내의 액정 셀이 미립자와 같은 오염 물질로 오염되는 것이 방지되고, 또한 보관 쳄버는 코일 스프링에 의해 유니트 작동 쳄버에 연결됨과 아울러 유니트 작동 쳄버는 충격 흡수식 캐스터가 설치되어 있으므로, 노면으로부터 액정 셀로 전달되는 충격을 최소화시킬 수가 있게 된다.According to the configuration of the present invention described above, only the air purified by the air cleaning unit is introduced into the storage chamber, the liquid crystal cell in the storage chamber is prevented from being contaminated with contaminants such as fine particles, and the storage chamber is a coil spring It is connected to the unit operation chamber by means of the unit operation chamber, and the shock absorbing caster is installed, so that the impact transmitted from the road surface to the liquid crystal cell can be minimized.
이하, 본 발명의 바람직한 실시예를 첨부도면에 의거하여 상세히 설명한다.Hereinafter, preferred embodiments of the present invention will be described in detail with reference to the accompanying drawings.
도 1은 본 발명에 따른 대차를 나타낸 정면도이고, 도 2는 본 발명의 주요부인 공기 청정 유니트를 나타낸 도면이며, 도 3은 본 발명의 주요부인 충격 흡수식 캐스터를 나타낸 배면도이고, 도 4는 본 발명의 동작 설명도이다.1 is a front view showing a trolley according to the present invention, Figure 2 is a view showing an air cleaning unit which is a main part of the present invention, Figure 3 is a rear view showing a shock absorbing caster is a main part of the present invention, Figure 4 It is an explanatory view of the operation of the invention.
도 1에 도시된 바와 같이, 다수의 액정 셀은 카세트(C)에 적층되어 보관 쳄버(1)내에 수납된 상태로 운반된다. 보관 쳄버(1)는 장방형으로서, 2칸으로 구획되어 있다. 각 칸의 정면에는 도어(11)가 힌지식으로 설치된다. 보다 구체적으로, 각 도어(11)의 외측부가 보관 쳄버(1)에 힌지로 연결되어서, 이 힌지를 중심으로 회전개폐된다. 각 도어(11)의 내측에는 손잡이(15)가 설치된다.As shown in FIG. 1, a plurality of liquid crystal cells are stacked in a cassette C and transported in a storage chamber 1. The storage chamber 1 is rectangular and divided into two compartments. The door 11 is hingedly installed in front of each compartment. More specifically, the outer portion of each door 11 is connected to the storage chamber 1 by a hinge, so that the hinge is rotated about the hinge. A handle 15 is installed inside each door 11.
카세트(C)가 안치되는 베이스 플레이트(12)가 보관 쳄버(1)내 하부에 서랍식으로 끼워진다. 즉, 보관 쳄버(1)의 양측 내벽에는 슬라이더(13)가 설치되고, 이 슬라이더(13)에 베이스 플레이트(12)가 서랍식으로 끼워진다. 또한, 베이스 플레이트(12)상에는 카세트(C)를 지지하는 가이드 블럭(14)이 설치된다.The base plate 12, on which the cassette C is placed, is fitted in the bottom of the storage chamber 1 in a drawer type. That is, sliders 13 are provided on both inner walls of the storage chamber 1, and the base plate 12 is fitted in the slider 13 in a drawer type. In addition, a guide block 14 for supporting the cassette C is provided on the base plate 12.
보관 쳄버(1)의 상부면에 쳄버내로 정화된 공기만을 유입시키는 공기 청정 유니트(5)가 설치된다. 공기 청정 유니트(5)의 내부 구조가 도 2에 상세히 도시되어 있다.On the upper surface of the storage chamber 1, an air cleaning unit 5 for introducing only the purified air into the chamber is installed. The internal structure of the air cleaning unit 5 is shown in detail in FIG.
도시된 바와 같이, 보관 쳄버(1)의 상부면에 설치되는 케이스(51)의 상하부면은 개구된 형상이고, 특히 하부면은 보관 쳄버(1)의 내부로 연통된다. 상하 개구부에 각기 흡입 슬릿판(52)과 배출 슬릿판(57)이 설치된다. 즉, 외기는 흡입 슬릿판(52) 사이를 통해 흡입된 후, 정화 과정을 거쳐서 배출 슬릿판(57)을 통해 보관 쳄버(1)내로 유입된다.As shown, the upper and lower surfaces of the case 51 provided on the upper surface of the storage chamber 1 have an open shape, and in particular, the lower surface communicates with the interior of the storage chamber 1. The suction slit plate 52 and the discharge slit plate 57 are provided in the upper and lower openings, respectively. That is, the outside air is sucked through the suction slit plate 52 and then introduced into the storage chamber 1 through the discharge slit plate 57 through a purification process.
흡입 슬릿판(52)을 통해 외기를 강제흡입시키는 팬(54)이 흡입 슬릿판(52) 하부에 배치되어서, 베이스(55)상에 설치된다. 특히, 팬(54)으로 입자가 큰 이물질이 흡입되면, 팬(54)에 손상을 주게 되므로, 이를 방지하기 위한 프리 필터(53)가 팬(54)과 흡입 슬릿판(52) 사이에 배치된다. 팬(54)의 후방에 작은 크기의 입자도 여과하는 메인 필터(56)가 설치된다. 즉, 메인 필터(56)는 팬(54)과 배출 슬릿판(57) 사이에 배치된다.A fan 54 for forcibly sucking outside air through the suction slit plate 52 is disposed below the suction slit plate 52, and is installed on the base 55. In particular, when a large particle of foreign matter is sucked into the fan 54, the fan 54 is damaged, and thus a pre-filter 53 for preventing this is disposed between the fan 54 and the suction slit plate 52. . At the rear of the fan 54, a main filter 56 for filtering small particles is also provided. That is, the main filter 56 is disposed between the fan 54 and the discharge slit plate 57.
다시, 도 1에서, 공기 청정 유니트(5)를 작동시키는 장비들이 설치되는 유니트 작동 쳄버(2)가 보관 쳄버(1)의 하부에 연결된다. 유니트 작동 쳄버(2)는 보관 쳄버(1)의 표면적과 동일한 크기의 표면적을 갖는 장방 형상이다. 유니트 작동 쳄버(2)의 상부면 각 모서리에 가이드 축(3)이 설치되고, 각 가이드 축(3)이 보관 쳄버(1)의 하부면 각 모서리에 상하로 이동가능하게 끼워진다. 각 가이드 축(3)에는 코일 스프링(4)이 끼워진다. 이 코일 스프링(4)의 상하부가 보관 쳄버(1)의 하부면과 유니트 작동 쳄버(2)의 상부면에 맞대어져, 진동에 의해 신축되게 된다.Again, in Fig. 1, the unit operation chamber 2, in which equipment for operating the air cleaning unit 5 is installed, is connected to the lower part of the storage chamber 1. The unit operating chamber 2 is rectangular in shape with a surface area of the same size as the surface area of the storage chamber 1. Guide shafts 3 are provided at each corner of the upper surface of the unit operation chamber 2, and each guide shaft 3 is fitted to the corners of the lower surface of the storage chamber 1 so as to be movable up and down. Coil spring 4 is fitted to each guide shaft 3. The upper and lower portions of the coil spring 4 abut against the lower surface of the storage chamber 1 and the upper surface of the unit operation chamber 2, and are stretched and contracted by vibration.
한편, 유니트 작동 쳄버(2)내에는 공기 청정 유니트(5)를 작동시키기 위한 배터리(21)와 재충전기(22), 및 인버터(23)가 설치된다.On the other hand, in the unit operation chamber 2, the battery 21, the recharger 22, and the inverter 23 for operating the air cleaning unit 5 are provided.
또한, 유니트 작동 쳄버(2)의 하부면 각 모서리에 충격 흡수식 캐스터(6)가 설치된다. 충격 흡수식 캐스터(6)의 자세한 구조가 도 3에 도시되어 있다.In addition, shock absorbing casters 6 are provided at each corner of the lower surface of the unit operation chamber 2. The detailed structure of the shock absorbing caster 6 is shown in FIG.
도시된 바와 같이, 플레이트(61)가 유니트 작동 쳄버(2)의 하부면에 고정된다. 볼(62)이 플레이트(61)의 하부면에 360。 회전가능하게 끼워진다. 한 쌍의 프레임(63)이 볼(62)의 양측 외주에 고정된다. 한 쌍의 렉(64)이 힌지(65)에 의해 프레임(63)의 하부에 연결된다. 타이어(67)가 각 렉(64) 사이에 개재되어, 핀(66)으로 회전가능하게 연결된다. 특히, 타이어(67) 상부의 각 프레임(63) 사이 부분에, 타이어(67)가 노면으로부터 받는 충격을 완화시키는 러버(68)가 개재된다. 한편, 타이어(67)의 재질로는 충격 흡수가 가능한 우레탄인 것이 바람직하다.As shown, the plate 61 is fixed to the lower surface of the unit actuating chamber 2. Ball 62 is fitted to the lower surface of the plate 61 rotatably 360 °. A pair of frames 63 are fixed to both outer peripheries of the ball 62. A pair of racks 64 are connected to the bottom of the frame 63 by hinges 65. A tire 67 is interposed between each rack 64 to be rotatably connected to the pin 66. In particular, the rubber 68 which moderates the impact which the tire 67 receives from a road surface is interposed between the frames 63 of the upper part of the tire 67. As shown in FIG. On the other hand, the material of the tire 67 is preferably urethane capable of shock absorption.
다시, 도 1에서, 유니트 작동 쳄버(2)의 우측면에는, 유니트 작동 쳄버(2)을 전후진시키기 위해 작업자가 손으로 잡는 부분인 핸들(7)이 설치된다.Again, in Fig. 1, on the right side of the unit operating chamber 2, a handle 7, which is a part which is held by the worker by hand to advance the unit operating chamber 2, is provided.
이하, 상기와 같이 구성된 본 실시예의 동작을 도 4를 참고로 하여 상세히 설명한다.Hereinafter, the operation of the present embodiment configured as described above will be described in detail with reference to FIG. 4.
먼저, 액정 셀 제작 라인에서 다수의 액정 셀이 수납된 카세트(C)를 보관 쳄버(1)로 반입시키는 동작은 다음과 같다.First, in the liquid crystal cell production line, the operation of carrying the cassette C containing a plurality of liquid crystal cells into the storage chamber 1 is as follows.
손잡이(15)를 잡고 도어(11)를 앞으로 당기면, 도어(11)가 힌지를 중심으로 회전개방된다. 그런 다음, 베이스 플레이트(12)를 앞으로 당기면, 베이스 플레이트(12)가 슬라이더(13)를 따라 가이드되면서 앞으로 돌출된다. 이렇게 돌출된 베이스 플레이트(12)상에 카세트(C)를 가이드 블럭(14)으로 지지시키면서 안치시킨 후, 베이스 플레이트(12)를 안으로 민다. 그리고, 다시 도어(11)를 닫으면, 카세트(C)의 반입이 완료된다.Holding the handle 15 and pulling the door 11 forward, the door 11 is rotated and opened about the hinge. Then, when the base plate 12 is pulled forward, the base plate 12 is guided along the slider 13 and protrudes forward. After the cassette C is settled on the protruding base plate 12 with the guide block 14, the base plate 12 is pushed in. When the door 11 is closed again, the carrying in of the cassette C is completed.
그리고, 배터리(21)의 전력을 공기 청정 유니트(5)로 공급되게 하여, 공기 청정 유니트(5)를 작동시킨다. 이러한 상태에서, 핸들(7)을 밀어서 대차를 모듈 라인으로 운반하게 된다.Then, electric power of the battery 21 is supplied to the air cleaning unit 5 to operate the air cleaning unit 5. In this state, the handle 7 is pushed to carry the bogie to the module line.
이러한 운반중에, 외기는 팬(54)에 의해 흡입 슬릿판(52)을 통해 케이스(51)내로 강제흡입된다. 외기중 큰 크기의 입자는 프리 필터(53)에서 여과되고, 나머지 입자만이 프리 필터(53)를 통과하여 팬(54)으로 흡입된다. 따라서, 큰 입자에 의해 팬(54)이 파손되는 사태를 사전에 방지할 수가 있게 된다.During this conveyance, the outside air is forced into the case 51 through the suction slit plate 52 by the fan 54. Particles of large size in the outside air are filtered by the prefilter 53, and only the remaining particles pass through the prefilter 53 and are sucked into the fan 54. Therefore, the situation where the fan 54 is damaged by large particle | grains can be prevented beforehand.
흡입된 공기는 메인 필터(56)를 통과하면서, 오염 물질이 대부분 제거된 후, 배출 슬릿판(57)을 통해 보관 쳄버(1)로 유입된다. 따라서, 보관 쳄버(1)내의 액정 셀에는 정화된 공기만이 유입되게 되어, 액정 셀에 오염 물질이 묻게 되지 않게 된다.The sucked air passes through the main filter 56, and after most of the contaminants have been removed, enters the storage chamber 1 through the discharge slit plate 57. Therefore, only the purified air flows into the liquid crystal cell in the storage chamber 1, and contaminants do not get on the liquid crystal cell.
또한, 운반 중에, 노면으로부터 받는 진동이나 충격은 충격 흡수식 캐스터(6)에 의해 1차적으로 완화되고, 다시 코일 스프링(4)에 의해 2차에 걸쳐서 완화된 후, 보관 쳄버(1)로 전달된다.In addition, during transportation, vibrations or shocks received from the road surface are primarily alleviated by the shock absorbing caster 6, and are further alleviated by the coil spring 4 for two times before being transferred to the storage chamber 1. .
즉, 진동이나 충격은 충격 흡수식 캐스터(6)에 구비된 러버(68)의 신축 동작에 의해 완화된다. 이렇게 완화된 진동이나 충격은 유니트 작동 쳄버(2)에서 보관 쳄버(1)로 전달되는데, 이때 유니트 작동 쳄버(2)와 보관 쳄버(1) 사이에 배치된 코일 스프링(4)이 신축되는 동작에 의해 다시 한 번 완화되어진다. 따라서, 보관 쳄버(1)로 전달되는 진동이나 충격은 크게 완화된 상태가 된다.That is, the vibration and the impact are alleviated by the stretching operation of the rubber 68 provided in the shock absorbing caster 6. This damped vibration or shock is transmitted from the unit operating chamber (2) to the storage chamber (1), in which the coil spring (4) disposed between the unit operating chamber (2) and the storage chamber (1) is stretched. Is once again relaxed. Therefore, the vibration and shock transmitted to the storage chamber 1 are in a greatly relaxed state.
이러한 상태로 모듈 라인으로 대차를 이동시킨 다음, 상기의 반입 동작을 실시하여, 카세트를 대차에서 반출시킨다.After moving the trolley | bogie to a module line in this state, the above carry-out operation is performed and the cassette is taken out from a trolley | bogie.
상기된 바와 같이 본 발명에 의하면, 대차에 공기 청정 유니트(5)가 구비되어, 액정 셀로 정화된 공기만이 유입되도록 할 수가 있게 되므로써, 액정 셀에 오염된 물질이 묻게 되는 것을 방지할 수가 있다. 따라서, 거의 완성된 액정 셀에 오염 물질이 묻게 되어, 불량율이 높아지는 것을 방지할 수가 있다.According to the present invention as described above, the air purifying unit 5 is provided in the trolley so that only the air purified by the liquid crystal cell can be introduced, thereby preventing contamination of the liquid crystal cell with contamination. Therefore, contaminants can be deposited on the almost completed liquid crystal cell, thereby preventing the defective rate from increasing.
특히, 모듈 공정중의 하나인 TCP 공정 수행전에 세척 공정을 실시할 필요가 없게 되어, 액정 셀 공정 시간이 단축되는 효과가 있다.In particular, it is not necessary to perform the washing process before performing the TCP process, which is one of the module processes, thereby reducing the liquid crystal cell process time.
또한, 액정 셀 운반중에, 노면으로부터 받는 충격이 액정 셀로 전달되는 정도를 대폭 완화시킬 수가 있게 되므로써, 액정 셀이 운반중에 파손되는 사태도 방지할 수가 있다.In addition, since the impact received from the road surface is transmitted to the liquid crystal cell while the liquid crystal cell is transported, the situation in which the liquid crystal cell is damaged during transportation can be prevented.
한편, 본 발명은 상술한 특정의 바람직한 실시예에 한정되지 아니하며, 청구범위에서 청구하는 본 발명의 요지를 벗어남이 없이 당해 발명이 속하는 분야에서 통상의 지식을 가진 자라면 누구든지 다양한 변경 실시가 가능할 것이다.On the other hand, the present invention is not limited to the above-described specific preferred embodiments, and various changes can be made by those skilled in the art without departing from the gist of the invention claimed in the claims. will be.
Claims (5)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| KR1019970061666A KR100251351B1 (en) | 1997-11-21 | 1997-11-21 | Cart for transporting an lcd |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| KR1019970061666A KR100251351B1 (en) | 1997-11-21 | 1997-11-21 | Cart for transporting an lcd |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| KR19990041113A true KR19990041113A (en) | 1999-06-15 |
| KR100251351B1 KR100251351B1 (en) | 2000-04-15 |
Family
ID=19525233
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| KR1019970061666A KR100251351B1 (en) | 1997-11-21 | 1997-11-21 | Cart for transporting an lcd |
Country Status (1)
| Country | Link |
|---|---|
| KR (1) | KR100251351B1 (en) |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| KR20030063992A (en) * | 2002-01-25 | 2003-07-31 | 주식회사 대산 | Automatic cleaning system of carrier for liquid crystal display |
| KR100837639B1 (en) * | 2001-12-06 | 2008-06-12 | 엘지디스플레이 주식회사 | Keeping Rack Of The Battery To The Auto Guided Vehicle Battery |
-
1997
- 1997-11-21 KR KR1019970061666A patent/KR100251351B1/en not_active IP Right Cessation
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| KR100837639B1 (en) * | 2001-12-06 | 2008-06-12 | 엘지디스플레이 주식회사 | Keeping Rack Of The Battery To The Auto Guided Vehicle Battery |
| KR20030063992A (en) * | 2002-01-25 | 2003-07-31 | 주식회사 대산 | Automatic cleaning system of carrier for liquid crystal display |
Also Published As
| Publication number | Publication date |
|---|---|
| KR100251351B1 (en) | 2000-04-15 |
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| KR100774018B1 (en) | System for transporting substrate transport container, and method for maintaining clearness of a substrate using the same | |
| US5843196A (en) | Ultra-clean transport carrier | |
| US20020007986A1 (en) | Material delivery system for clean room-like environments | |
| EP0951050B1 (en) | Container for transporting precision substrates | |
| KR100251351B1 (en) | Cart for transporting an lcd | |
| US4929139A (en) | Passive electrostatic vacuum particle collector | |
| KR101732569B1 (en) | Transfer Vehicle with Air Cleaning Function | |
| KR101673919B1 (en) | Stacker robot for transfering cassette | |
| JP2004269214A (en) | Purified air circulating type storage equipment | |
| JPH07291133A (en) | Carriage device | |
| CN219904398U (en) | Transport vehicle for storing wafer carrying disc | |
| KR200385019Y1 (en) | Movable clean things cassette | |
| CN218904778U (en) | Derusting machine for metal processing | |
| KR101634578B1 (en) | Cart of movement type | |
| CN218613490U (en) | Movable polishing dust removal chamber | |
| CN213736443U (en) | Anti-static turnover box | |
| CN211653392U (en) | Roller production equipment and roller conveying device | |
| CN212098919U (en) | Roller conveying device and cleaning station combination | |
| JP4320936B2 (en) | Transport vehicle | |
| CN112476358B (en) | High-end intelligent chip protection platform with high balance protection and protection method thereof | |
| WO2022009884A1 (en) | Substrate processing module, substrate processing apparatus, and substrate manufacturing method | |
| CN115401563B (en) | Grinding and dust removing device for plate processing | |
| CN216501199U (en) | Dust absorption mechanism of light guide plate dot matrix marking equipment | |
| CN212448383U (en) | Cloth automatic packaging machine's discharge mechanism | |
| KR200410417Y1 (en) | Transfer cassette |
Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| A201 | Request for examination | ||
| E701 | Decision to grant or registration of patent right | ||
| GRNT | Written decision to grant | ||
| FPAY | Annual fee payment |
Payment date: 20121207 Year of fee payment: 14 |
|
| FPAY | Annual fee payment |
Payment date: 20131217 Year of fee payment: 15 |
|
| FPAY | Annual fee payment |
Payment date: 20141217 Year of fee payment: 16 |
|
| FPAY | Annual fee payment |
Payment date: 20151228 Year of fee payment: 17 |
|
| FPAY | Annual fee payment |
Payment date: 20161226 Year of fee payment: 18 |
|
| EXPY | Expiration of term |