CN219904398U - Transport vehicle for storing wafer carrying disc - Google Patents

Abstract

The utility model relates to a transport vehicle for storing wafer carrying trays, which comprises a box body, a plurality of placing components, an air purifying device, a power supply and a travelling mechanism, wherein a partition plate is arranged in the box body so as to divide the box body into a first space and a second space which are isolated from each other; the plurality of groups of placing components are uniformly arranged in the first space at intervals along the vertical direction, and each group of placing components respectively comprises two fixing plates which are oppositely arranged on the inner walls of the two sides of the box body; the air purifying device is integrated on the box body and used for purifying the air in the first space; the power supply is accommodated in the second space and is used for supplying power to the air purifying device; the travelling mechanism is arranged at the bottom of the box body. Through the technical scheme, the transport vehicle can effectively avoid the pollution of the wafer in the transport process, and meanwhile, the transport efficiency of the wafer is improved.

Description

Transport vehicle for storing wafer carrying disc

Technical Field

The present disclosure relates to the field of semiconductor storage and transportation technology, and in particular, to a transport vehicle for storing wafer carriers.

Background

With the rapid development of the chip and semiconductor industries, the requirement for the cleanliness of the wafer surface is higher and higher, and in order to manufacture the product efficiently and reliably, strict pollution control on the production process is required. For example, in the process of patterning a substrate, which is a front-end process of a chip, the integrity of the pattern affects the qualification rate of the product and has a great influence on the performance of LEDs grown thereon, however, during the production of the patterned substrate, there are often phenomena of handling and waiting, and conventionally, the wafer is usually transported by a single wafer box or a wafer boat, but this method cannot realize the isolation of the wafer from other small particles suspended in the air, which easily pollute the wafer, and result in missing or incomplete patterns after etching, especially in the stage of waiting for etching, so that the degree of pollution during the production process is controlled and minimized, and the cleanliness of handling and waiting is required to be controlled.

Disclosure of Invention

The purpose of the present disclosure is to provide a transport vehicle for storing wafer carrying trays, which can effectively avoid the wafer from being polluted in the transfer process, and simultaneously improve the transfer efficiency of the wafer.

To achieve the above object, the present disclosure provides a carrier vehicle for wafer-carrying disc storage, the carrier vehicle comprising: the box body is internally provided with a partition plate so as to divide the box body into a first space and a second space which are isolated from each other; the plurality of placing components are uniformly arranged in the first space at intervals along the vertical direction, and each group of placing components respectively comprises two fixing plates which are oppositely arranged on the inner walls of the two sides of the box body; an air purifying device integrated on the case for purifying air in the first space; a power supply accommodated in the second space for supplying power to the air cleaning device; and the travelling mechanism is arranged at the bottom of the box body.

Optionally, the spacing between the groups of the placement components in the vertical direction is 9 mm-12 mm.

Optionally, the distance between the two opposite fixing plates is 370 mm-420 mm.

Optionally, the box body is hinged with a first box door for opening or closing the first space.

Optionally, the air purifying device includes a filter mounted to a first side of the case opposite to the first door.

Optionally, the case includes a handle, the handle is fixed in any one of two sides adjacent to the first side, a switch is provided on the handle, and the switch is electrically connected with the air purification device, so as to be used for controlling the opening and closing of the air purification device.

Optionally, the placement assembly includes a fastener, and the two fixing plates are respectively fixed to inner surfaces of two side walls adjacent to the first door by the fastener.

Optionally, the transport vehicle includes a display panel, and the display panel is integrally disposed on the first door.

Optionally, the box body is hinged with a second box door for opening or closing the second space.

Optionally, the travelling mechanism comprises a motor and a travelling wheel, the motor is electrically connected with the power supply and fixedly installed in the second space, and the travelling wheel is fixedly installed at the bottom of the box body and is in transmission connection with the motor.

Through above-mentioned technical scheme, in the transport vechicle that is used for wafer carrying disc to deposit that this disclosure provided, the box is divided into first space and the second space of mutual isolation through the division board, be provided with the subassembly of placing that supplies wafer carrying disc to deposit in the first space, and the integrated air purification device that is provided with on the box is used for purifying the air in the first space, like this, when the carrying disc that holds the wafer is placed in first space and is transported through this transport vechicle, the box can protect the wafer to a certain extent not receive outside pollution source pollution or external force damage, and air purification device can provide the clean air after the purification for first space is inside, in order to avoid dust in the air, granule etc. to contact and attach at the wafer surface, in order to further avoid the wafer to suffer the pollution in the transportation process. In addition, the quantity of placing the subassembly in the first space is a plurality of and the bottom half is provided with running gear, can effectively improve the transportation efficiency of wafer.

Additional features and advantages of the present disclosure will be set forth in the detailed description which follows.

Drawings

The accompanying drawings are included to provide a further understanding of the disclosure, and are incorporated in and constitute a part of this specification, illustrate the disclosure and together with the description serve to explain, but do not limit the disclosure. In the drawings:

FIG. 1 is a schematic diagram of a transport vehicle for wafer carrier storage according to an embodiment of the present disclosure;

fig. 2 is a schematic structural diagram of a carrier vehicle for storing wafer carriers according to an embodiment of the present disclosure.

Description of the reference numerals

1-a box body; 11-a first space; 12-a second space; 13-a first door; 14-a second door; 15-handle; 2-dividing plates; 3-fixing plates; 41-a filter; 42-switching; 5-power supply; 6-a display panel; 71-an electric motor; 72-travelling wheels.

Detailed Description

Specific embodiments of the present disclosure are described in detail below with reference to the accompanying drawings. It should be understood that the detailed description and specific examples, while indicating and illustrating the disclosure, are not intended to limit the disclosure.

In the present disclosure, unless otherwise stated, terms such as "inner and outer" are used to refer to "inner and outer" with respect to the outline of the corresponding component itself. Furthermore, the terms "first," "second," and the like, as used in this disclosure, are used for distinguishing one element from another and not for sequential or importance. Furthermore, in the following description, when referring to the drawings, the same reference numerals in different drawings denote the same or similar elements unless otherwise explained. The foregoing definitions are provided for the purpose of illustrating and explaining the present disclosure and should not be construed as limiting the present disclosure.

In accordance with an embodiment of the present disclosure, and with reference to fig. 1-2, there is provided a carrier for wafer-carrying tray storage, the carrier comprising: the air purifier comprises a box body 1, a plurality of placing components, an air purifying device, a power supply 5 and a travelling mechanism, wherein a partition plate 2 is arranged inside the box body 1 to divide the box body 1 into a first space 11 and a second space 12 which are isolated from each other; the plurality of groups of placing components are uniformly arranged in the first space 11 at intervals along the vertical direction, and each group of placing components respectively comprises two fixing plates 3 which are oppositely arranged on the inner walls of the two sides of the box body 1; an air purifying device is integrated on the case 1 for purifying air in the first space 11; the power supply 5 is accommodated in the second space 12 and is used for supplying power to the air purifying device; the travelling mechanism is arranged at the bottom of the box body 1.

Through the above technical scheme, in the transport vehicle for storing the wafer carrier provided by the disclosure, the box 1 is divided into the first space 11 and the second space 12 isolated from each other through the partition plate 2, the placement component for storing the wafer carrier is arranged in the first space 11, and the air purifying device is arranged on the box 1 to be used for purifying the air in the first space 11, so, when the carrier containing the wafer is placed in the first space 11 and transported by the transport vehicle, the box 1 can protect the wafer from being polluted by external pollution sources or damaged by external force to a certain extent, and the air purifying device can provide purified clean air for the interior of the first space 11 so as to avoid dust, small particles and the like in the air to contact with the wafer and be attached to the surface of the wafer, thereby further avoiding the wafer from being polluted in the transportation process. In addition, the quantity of placing components in the first space 11 is a plurality of and the bottom of the box body 1 is provided with a travelling mechanism, so that the transfer efficiency of the wafer can be effectively improved.

In the carrier vehicle for storing wafer carrier trays provided in the present disclosure, the spacing between the plurality of groups of placement assemblies in the vertical direction may be appropriately set according to the height of the carrier tray carrying the wafer, which is not particularly limited in the present disclosure. As an exemplary embodiment, the spacing of the plurality of sets of placement members in the vertical direction may be 9mm to 12mm, such as 9.5mm, 10mm, 10.5mm, 11mm, 11.5mm, etc., which is not particularly limited by the present disclosure.

In the carrier vehicle for storing wafer carriers provided in the present disclosure, the distance between the two opposite fixing plates 3 may be set arbitrarily according to the size of the wafer carrier, which is not particularly limited in the present disclosure. As an exemplary embodiment, the distance between the opposite fixing plates 3 may be 370mm to 420mm, for example, 380mm, 390mm, 400mm, 410mm, etc., which is not particularly limited by the present disclosure.

In other embodiments, the opposite extending sides of the two fixing plates 3 may be connected together in any suitable manner, for example, the opposite extending sides of the two fixing plates 3 are connected by a connecting rod, or the two fixing plates 3 are integrally formed, so that the fixing plate can be suitable for a wafer carrier disc with any specification, and the application range of the carrier vehicle is enlarged, which is not particularly limited in the disclosure.

In the carrier vehicle for storing wafer carriers provided in the present disclosure, as an exemplary embodiment, referring to fig. 2, a case 1 may be hinged with a first door 13 for opening or closing a first space 11, and when the placement of a wafer carrier is completed, the first space 11 may be sealed by closing the first door 13; when a wafer carrier is desired, the wafer carrier may be removed by opening the first door 13. Further, the first door 13 may be hinged to either side of the first space 11 and may be opened and closed in any direction, which is not particularly limited by the present disclosure.

In the carrier vehicle for wafer-carrying tray storage provided in the present disclosure, as an exemplary embodiment, referring to fig. 2, the air cleaning device may include a filter 41, and the filter 41 may be provided with a high-efficiency filter screen having a filtering efficiency of 99.97%, and may be a filter medium that is most effective for contaminants such as smoke, dust, and bacteria while allowing air to enter, and may be capable of blocking the passage of fine particles of a micrometer scale.

Wherein the filter 41 may be mounted at any suitable position on the case 1, which is not particularly limited by the present disclosure. As an exemplary example, referring to fig. 1, the filter 41 may be installed at a first side of the cabinet 1 opposite to the first door 13, and in other embodiments, the filter 41 may be installed at any side adjacent to the first door 13, which is not particularly limited in this disclosure.

In the carrier vehicle for wafer-carrying tray storage provided in the present disclosure, as an exemplary embodiment, referring to fig. 1, the case 1 may further include a handle 15 to facilitate a worker to push the carrier vehicle to walk to any desired position. The handle 15 may be fixed at any suitable position on the case 1 for the purpose of facilitating the operation of the staff, which is not particularly limited in the present disclosure. As an exemplary embodiment, the handle 15 may be fixed to either one of two sides adjacent to the first side. In addition, the handle 15 can be further provided with a switch 42, and the switch 42 can be electrically connected with the air purifying device for controlling the opening and closing of the air purifying device, so that when a worker grasps the handle 15 to push the transport vehicle to transport the wafer carrier, the air purifying device can be opened or closed at any time according to whether the wafer carrier is stored in the transport vehicle or not, and the air purifying device has a certain energy-saving effect.

In the carrier vehicle for storing wafer carriers provided in the present disclosure, the two fixing plates 3 may be fixed on the inner wall of the case 1 by any suitable means, which is not particularly limited in the present disclosure. As an exemplary embodiment, the placement unit may include fasteners (not shown) by which the two fixing plates 3 may be fixed to the inner surfaces of the two sidewalls adjacent to the first door 13, respectively, and in other embodiments, the two fixing plates 3 may be fixed to the inner wall of the case 1 by welding, riveting, or clamping, etc., which is not particularly limited in the present disclosure.

In the carrier vehicle for storing wafer carriers provided in the present disclosure, as an exemplary embodiment, referring to fig. 1, the carrier vehicle may include a display panel 6, where the display panel 6 may be integrally disposed on a first door 13, and the display panel 6 may display the electric quantity of the power supply 5 and the purifying efficiency of the air purifying device in real time, so that a worker may replace the power supply 5 or adjust the air purifying device in time.

In the carrier vehicle for wafer carrier storage provided in the present disclosure, as an exemplary embodiment, referring to fig. 2, the case 1 may be hinged with a second door 14 for opening or closing the second space 12, so that when a need of replacement of the power source 5 occurs or any need of opening the second space 12 such as a failure of the motor 71 located in the second space 12 occurs, a corresponding operation may be performed by opening the second door 14. In addition, the second door 14 may be hinged to either side of the second space 12 and may be opened and closed in any direction, which is not particularly limited by the present disclosure.

In the carrier vehicle for storing wafer carriers provided in the present disclosure, as an exemplary embodiment, referring to fig. 2, the travelling mechanism may include a motor 71 and a travelling wheel 72, the motor 71 is electrically connected with the power source 5 and may be fixedly installed in the second space 12, and the travelling wheel 72 may be fixedly installed at the bottom of the case 1 and is in transmission connection with the motor 71, so, when a worker needs to transport the carrier vehicle, the travelling mechanism is set so that the worker can directly push the carrier vehicle to any desired position without using other transport devices to realize the transportation of the carrier vehicle, thereby improving the transportation efficiency of the wafer carriers.

Wherein, as an exemplary embodiment, the motor 71 may provide the transport vehicle with a power of at least 0.5m/s and at most not more than 1.5m/s, and the power source 5 may be selected as a reusable charging power source 5 for providing electricity to the display panel 6, the air cleaning device and the motor 71 without contaminating the air environment in the first space 11.

In summary, when the carrier vehicle for storing wafer carriers provided by the present disclosure is used, firstly, the switch 42 arranged on the handle 15 is used to enable the power supply 5 to start to supply power to the air purification device and the motor 71, then the air purification device starts to work and provide clean air for the first space 11, then the first box door 13 is opened, a plurality of carriers carrying wafers are sequentially placed on the placement component, the first box door 13 is closed, finally, the travelling direction of the carrier vehicle is controlled by the handle 15, the carrier vehicle can be transported to any required position according to actual needs, and after the wafer carriers are taken out, the connection between the power supply 5 and the air purification device and the motor 71 is disconnected through the switch 42, so that the storage and transportation are completed.

The preferred embodiments of the present disclosure have been described in detail above with reference to the accompanying drawings, but the present disclosure is not limited to the specific details of the above embodiments, and various simple modifications may be made to the technical solutions of the present disclosure within the scope of the technical concept of the present disclosure, and all the simple modifications belong to the protection scope of the present disclosure.

In addition, the specific features described in the foregoing embodiments may be combined in any suitable manner, and in order to avoid unnecessary repetition, the present disclosure does not further describe various possible combinations.

Moreover, any combination between the various embodiments of the present disclosure is possible as long as it does not depart from the spirit of the present disclosure, which should also be construed as the disclosure of the present disclosure.

Claims (10)

1. A carrier vehicle for storing wafer carriers, the carrier vehicle comprising:

the box body is internally provided with a partition plate so as to divide the box body into a first space and a second space which are isolated from each other;

the plurality of placing components are uniformly arranged in the first space at intervals along the vertical direction, and each group of placing components respectively comprises two fixing plates which are oppositely arranged on the inner walls of the two sides of the box body;

an air purifying device integrated on the case for purifying air in the first space;

a power supply accommodated in the second space for supplying power to the air cleaning device; and

the travelling mechanism is arranged at the bottom of the box body.

2. The carrier vehicle for wafer carrier storage of claim 1 wherein the plurality of sets of placement modules are spaced apart by 9mm to 12mm in a vertical direction.

3. The carrier vehicle for wafer carrier storage of claim 1, wherein a distance between opposing ones of said fixed plates is between 370mm and 420mm.

4. The carrier vehicle for wafer carrier storage of claim 1, wherein the housing is hinged with a first door for opening or closing the first space.

5. The carrier vehicle for wafer boat storage of claim 4, wherein said air cleaning apparatus comprises a filter mounted to a first side of said housing opposite said first door.

6. The carrier vehicle for wafer carrier storage of claim 5, wherein the housing includes a handle secured to either of two sides adjacent the first side, the handle having a switch disposed thereon, the switch being electrically connected to the air cleaning device for controlling opening and closing of the air cleaning device.

7. The carrier vehicle for wafer carrier storage of claim 4, wherein the placement assembly includes fasteners by which the two securing plates are secured to the inner surfaces of the two side walls adjacent the first door, respectively.

8. The carrier vehicle for wafer boat storage of claim 5, comprising a display panel integrally disposed on the first door.

9. The carrier vehicle for wafer carrier storage of claim 1, wherein the housing is hinged with a second door for opening or closing the second space.

10. The carrier vehicle for wafer carrier storage of any of claims 1-9, wherein the travel mechanism includes a motor electrically connected to the power source and fixedly mounted in the second space, and a travel wheel fixedly mounted at a bottom of the housing and drivingly connected to the motor.