KR19990022076A - 기판상에 정전기적으로 재료를 증착하고 유지하기 위한 장치 - Google Patents
기판상에 정전기적으로 재료를 증착하고 유지하기 위한 장치 Download PDFInfo
- Publication number
- KR19990022076A KR19990022076A KR1019970708555A KR19970708555A KR19990022076A KR 19990022076 A KR19990022076 A KR 19990022076A KR 1019970708555 A KR1019970708555 A KR 1019970708555A KR 19970708555 A KR19970708555 A KR 19970708555A KR 19990022076 A KR19990022076 A KR 19990022076A
- Authority
- KR
- South Korea
- Prior art keywords
- trace
- collection
- dielectric layer
- substrate
- deposition material
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Ceased
Links
- 239000000758 substrate Substances 0.000 title claims abstract description 60
- 239000000463 material Substances 0.000 title claims abstract description 56
- 238000000151 deposition Methods 0.000 title description 22
- 239000003814 drug Substances 0.000 claims description 34
- 230000008021 deposition Effects 0.000 claims description 33
- 239000000843 powder Substances 0.000 claims description 27
- 239000007788 liquid Substances 0.000 claims description 16
- 238000000034 method Methods 0.000 claims description 11
- 239000011159 matrix material Substances 0.000 claims description 4
- 238000000605 extraction Methods 0.000 claims 2
- 239000003795 chemical substances by application Substances 0.000 claims 1
- 229940079593 drug Drugs 0.000 description 11
- 239000000976 ink Substances 0.000 description 10
- 239000004020 conductor Substances 0.000 description 3
- 150000002500 ions Chemical class 0.000 description 3
- 239000006199 nebulizer Substances 0.000 description 3
- 239000000123 paper Substances 0.000 description 3
- 239000011248 coating agent Substances 0.000 description 2
- 238000000576 coating method Methods 0.000 description 2
- 239000010419 fine particle Substances 0.000 description 2
- 210000004072 lung Anatomy 0.000 description 2
- 238000012423 maintenance Methods 0.000 description 2
- 230000007246 mechanism Effects 0.000 description 2
- 230000008569 process Effects 0.000 description 2
- 238000010521 absorption reaction Methods 0.000 description 1
- 230000002411 adverse Effects 0.000 description 1
- PNEYBMLMFCGWSK-UHFFFAOYSA-N aluminium oxide Inorganic materials [O-2].[O-2].[O-2].[Al+3].[Al+3] PNEYBMLMFCGWSK-UHFFFAOYSA-N 0.000 description 1
- 239000011111 cardboard Substances 0.000 description 1
- 230000008859 change Effects 0.000 description 1
- 239000002801 charged material Substances 0.000 description 1
- 239000003989 dielectric material Substances 0.000 description 1
- 238000004924 electrostatic deposition Methods 0.000 description 1
- 230000005686 electrostatic field Effects 0.000 description 1
- 239000004744 fabric Substances 0.000 description 1
- 239000012212 insulator Substances 0.000 description 1
- 238000012986 modification Methods 0.000 description 1
- 230000004048 modification Effects 0.000 description 1
- 239000002245 particle Substances 0.000 description 1
- 230000003252 repetitive effect Effects 0.000 description 1
- 230000004044 response Effects 0.000 description 1
- 238000000427 thin-film deposition Methods 0.000 description 1
- 229910021654 trace metal Inorganic materials 0.000 description 1
Classifications
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B05—SPRAYING OR ATOMISING IN GENERAL; APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
- B05B—SPRAYING APPARATUS; ATOMISING APPARATUS; NOZZLES
- B05B5/00—Electrostatic spraying apparatus; Spraying apparatus with means for charging the spray electrically; Apparatus for spraying liquids or other fluent materials by other electric means
- B05B5/025—Discharge apparatus, e.g. electrostatic spray guns
-
- G—PHYSICS
- G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
- G03G—ELECTROGRAPHY; ELECTROPHOTOGRAPHY; MAGNETOGRAPHY
- G03G17/00—Electrographic processes using patterns other than charge patterns, e.g. an electric conductivity pattern; Processes involving a migration, e.g. photoelectrophoresis, photoelectrosolography; Processes involving a selective transfer, e.g. electrophoto-adhesive processes; Apparatus essentially involving a single such process
-
- A—HUMAN NECESSITIES
- A61—MEDICAL OR VETERINARY SCIENCE; HYGIENE
- A61M—DEVICES FOR INTRODUCING MEDIA INTO, OR ONTO, THE BODY; DEVICES FOR TRANSDUCING BODY MEDIA OR FOR TAKING MEDIA FROM THE BODY; DEVICES FOR PRODUCING OR ENDING SLEEP OR STUPOR
- A61M15/00—Inhalators
- A61M15/0028—Inhalators using prepacked dosages, one for each application, e.g. capsules to be perforated or broken-up
- A61M15/0045—Inhalators using prepacked dosages, one for each application, e.g. capsules to be perforated or broken-up using multiple prepacked dosages on a same carrier, e.g. blisters
-
- A—HUMAN NECESSITIES
- A61—MEDICAL OR VETERINARY SCIENCE; HYGIENE
- A61M—DEVICES FOR INTRODUCING MEDIA INTO, OR ONTO, THE BODY; DEVICES FOR TRANSDUCING BODY MEDIA OR FOR TAKING MEDIA FROM THE BODY; DEVICES FOR PRODUCING OR ENDING SLEEP OR STUPOR
- A61M15/00—Inhalators
- A61M15/0028—Inhalators using prepacked dosages, one for each application, e.g. capsules to be perforated or broken-up
- A61M15/0045—Inhalators using prepacked dosages, one for each application, e.g. capsules to be perforated or broken-up using multiple prepacked dosages on a same carrier, e.g. blisters
- A61M15/0046—Inhalators using prepacked dosages, one for each application, e.g. capsules to be perforated or broken-up using multiple prepacked dosages on a same carrier, e.g. blisters characterized by the type of carrier
- A61M15/0048—Inhalators using prepacked dosages, one for each application, e.g. capsules to be perforated or broken-up using multiple prepacked dosages on a same carrier, e.g. blisters characterized by the type of carrier the dosages being arranged in a plane, e.g. on diskettes
-
- A—HUMAN NECESSITIES
- A61—MEDICAL OR VETERINARY SCIENCE; HYGIENE
- A61M—DEVICES FOR INTRODUCING MEDIA INTO, OR ONTO, THE BODY; DEVICES FOR TRANSDUCING BODY MEDIA OR FOR TAKING MEDIA FROM THE BODY; DEVICES FOR PRODUCING OR ENDING SLEEP OR STUPOR
- A61M15/00—Inhalators
- A61M15/02—Inhalators with activated or ionised fluids, e.g. electrohydrodynamic [EHD] or electrostatic devices; Ozone-inhalators with radioactive tagged particles
- A61M15/025—Bubble jet droplet ejection devices
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B05—SPRAYING OR ATOMISING IN GENERAL; APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
- B05B—SPRAYING APPARATUS; ATOMISING APPARATUS; NOZZLES
- B05B12/00—Arrangements for controlling delivery; Arrangements for controlling the spray area
- B05B12/16—Arrangements for controlling delivery; Arrangements for controlling the spray area for controlling the spray area
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B05—SPRAYING OR ATOMISING IN GENERAL; APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
- B05B—SPRAYING APPARATUS; ATOMISING APPARATUS; NOZZLES
- B05B5/00—Electrostatic spraying apparatus; Spraying apparatus with means for charging the spray electrically; Apparatus for spraying liquids or other fluent materials by other electric means
- B05B5/08—Plant for applying liquids or other fluent materials to objects
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
- B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
- B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
- B41J2/385—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by selective supply of electric current or selective application of magnetism to a printing or impression-transfer material
- B41J2/41—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by selective supply of electric current or selective application of magnetism to a printing or impression-transfer material for electrostatic printing
- B41J2/415—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by selective supply of electric current or selective application of magnetism to a printing or impression-transfer material for electrostatic printing by passing charged particles through a hole or a slit
- B41J2/4155—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by selective supply of electric current or selective application of magnetism to a printing or impression-transfer material for electrostatic printing by passing charged particles through a hole or a slit for direct electrostatic printing [DEP]
-
- A—HUMAN NECESSITIES
- A61—MEDICAL OR VETERINARY SCIENCE; HYGIENE
- A61M—DEVICES FOR INTRODUCING MEDIA INTO, OR ONTO, THE BODY; DEVICES FOR TRANSDUCING BODY MEDIA OR FOR TAKING MEDIA FROM THE BODY; DEVICES FOR PRODUCING OR ENDING SLEEP OR STUPOR
- A61M15/00—Inhalators
- A61M15/02—Inhalators with activated or ionised fluids, e.g. electrohydrodynamic [EHD] or electrostatic devices; Ozone-inhalators with radioactive tagged particles
Landscapes
- Health & Medical Sciences (AREA)
- Engineering & Computer Science (AREA)
- Life Sciences & Earth Sciences (AREA)
- Veterinary Medicine (AREA)
- Hematology (AREA)
- Public Health (AREA)
- General Health & Medical Sciences (AREA)
- Animal Behavior & Ethology (AREA)
- Heart & Thoracic Surgery (AREA)
- Bioinformatics & Cheminformatics (AREA)
- Pulmonology (AREA)
- Anesthesiology (AREA)
- Biomedical Technology (AREA)
- Chemical Kinetics & Catalysis (AREA)
- Electrochemistry (AREA)
- General Physics & Mathematics (AREA)
- Physics & Mathematics (AREA)
- Molecular Biology (AREA)
- Chemical & Material Sciences (AREA)
- Application Of Or Painting With Fluid Materials (AREA)
- Electrostatic Spraying Apparatus (AREA)
- Medical Preparation Storing Or Oral Administration Devices (AREA)
- Physical Vapour Deposition (AREA)
- Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)
Applications Claiming Priority (2)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| US08/467,647 US5669973A (en) | 1995-06-06 | 1995-06-06 | Apparatus for electrostatically depositing and retaining materials upon a substrate |
| US8/467,647 | 1995-06-06 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| KR19990022076A true KR19990022076A (ko) | 1999-03-25 |
Family
ID=23856546
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| KR1019970708555A Ceased KR19990022076A (ko) | 1995-06-06 | 1996-06-06 | 기판상에 정전기적으로 재료를 증착하고 유지하기 위한 장치 |
Country Status (10)
| Country | Link |
|---|---|
| US (1) | US5669973A (enExample) |
| EP (1) | EP0830212B1 (enExample) |
| JP (1) | JPH11507293A (enExample) |
| KR (1) | KR19990022076A (enExample) |
| AT (1) | ATE248026T1 (enExample) |
| AU (1) | AU696179B2 (enExample) |
| CA (1) | CA2223168A1 (enExample) |
| DE (1) | DE69629681T2 (enExample) |
| ES (1) | ES2203708T3 (enExample) |
| WO (1) | WO1996039256A1 (enExample) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| KR20210052707A (ko) * | 2019-10-30 | 2021-05-11 | 삼성전자주식회사 | 극자외선 노광 시스템 |
Families Citing this family (37)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| RU2193453C2 (ru) * | 1994-10-04 | 2002-11-27 | Проктер энд Гэмбл Компани | Электростатическое распыление дисперсного материала |
| US5647347A (en) * | 1994-10-21 | 1997-07-15 | Glaxo Wellcome Inc. | Medicament carrier for dry powder inhalator |
| US7008668B2 (en) | 1995-05-09 | 2006-03-07 | Phoqus Pharmaceuticals Limited | Powder coating composition for electrostatic coating of pharmaceutical substrates |
| EP0824344B1 (en) | 1995-05-09 | 2005-04-20 | Phoqus Pharmaceuticals Limited | Powder coating composition for electrostatic coating of pharmaceutical substrates |
| DE19758730B4 (de) * | 1996-04-09 | 2004-03-04 | Delsys Pharmaceutical Corp. | Verfahren zum Herstellen einer pharmazeutischen Zusammensetzung |
| BR9709174A (pt) * | 1996-04-25 | 1999-08-03 | Schuckmann Alfred Von | Inalador |
| GB9623634D0 (en) | 1996-11-13 | 1997-01-08 | Bpsi Holdings Inc | Method and apparatus for the coating of substrates for pharmaceutical use |
| US6237590B1 (en) * | 1997-09-18 | 2001-05-29 | Delsys Pharmaceutical Corporation | Dry powder delivery system apparatus |
| CA2322437A1 (en) | 1998-03-04 | 1999-09-10 | Joseph T. Mcginn | Medicament dry powder inhaler dispensing device |
| US6287595B1 (en) | 1998-06-10 | 2001-09-11 | Delsys Pharmaceuticals Corporation | Biomedical assay device |
| US6063194A (en) | 1998-06-10 | 2000-05-16 | Delsys Pharmaceutical Corporation | Dry powder deposition apparatus |
| CN1312709A (zh) | 1998-06-10 | 2001-09-12 | 德尔西斯药品公司 | 药用制品及其制备方法和装置 |
| US6149774A (en) * | 1998-06-10 | 2000-11-21 | Delsys Pharmaceutical Corporation | AC waveforms biasing for bead manipulating chucks |
| SE512386C2 (sv) * | 1998-07-30 | 2000-03-06 | Microdrug Ag | Förfarande och anordning för klassificering av elektrostatiskt laddat pulverformigt material |
| AU752391B2 (en) * | 1998-10-14 | 2002-09-19 | Delsys Pharmaceutical Corporation | Electrostatic sensing chuck using area matched electrodes |
| US6378518B1 (en) | 1998-10-30 | 2002-04-30 | Richard George Miekka | Method for producing uniform small doses of finely divided substances |
| US6146685A (en) * | 1998-11-05 | 2000-11-14 | Delsys Pharmaceutical Corporation | Method of deposition a dry powder and dispensing device |
| US6372246B1 (en) | 1998-12-16 | 2002-04-16 | Ortho-Mcneil Pharmaceutical, Inc. | Polyethylene glycol coating for electrostatic dry deposition of pharmaceuticals |
| US6923979B2 (en) * | 1999-04-27 | 2005-08-02 | Microdose Technologies, Inc. | Method for depositing particles onto a substrate using an alternating electric field |
| US6428809B1 (en) | 1999-08-18 | 2002-08-06 | Microdose Technologies, Inc. | Metering and packaging of controlled release medication |
| SE517806C2 (sv) * | 1999-11-11 | 2002-07-16 | Microdrug Ag | Doseringsanordning för inhalator |
| US6458426B1 (en) * | 1999-11-23 | 2002-10-01 | The Trustees Of Princeton University | Method for depositing a patterned layer of material over a substrate |
| SE9904705D0 (sv) * | 1999-12-21 | 1999-12-21 | Astra Ab | An inhalation device |
| GB0002305D0 (en) | 2000-02-01 | 2000-03-22 | Phoqus Limited | Power material for electrostatic application |
| AU2001277268A1 (en) * | 2000-07-11 | 2002-01-21 | Delsys Pharmaceutical Corporation | Substrates for powder deposition containing conductive domains |
| US6588457B2 (en) | 2001-05-30 | 2003-07-08 | Richard A. Fotland | Method for packaging uniform small doses of finely divided substances |
| US20070087048A1 (en) * | 2001-05-31 | 2007-04-19 | Abrams Andrew L | Oral dosage combination pharmaceutical packaging |
| US6844048B2 (en) | 2001-07-11 | 2005-01-18 | Sarnoff Corporation | Substrates for powder deposition containing conductive domains |
| US6686207B2 (en) | 2001-10-12 | 2004-02-03 | Massachusetts Institute Of Technology | Manipulating micron scale items |
| DE10217929A1 (de) * | 2002-04-22 | 2003-11-06 | Sixp Ag | Vorrichtung zur Ausgabe von Tabletten |
| NZ527833A (en) * | 2003-08-26 | 2006-06-30 | Darren John Blade | Application of powder paint using dielectric brush to charge powder, and rotating screen |
| GB0330171D0 (en) * | 2003-12-30 | 2004-02-04 | Phoqus Pharmaceuticals Ltd | Method and apparatus for the application of powder material to substrates |
| GB0407312D0 (en) | 2004-03-31 | 2004-05-05 | Phoqus Pharmaceuticals Ltd | Method and apparatus for the application of powder material to substrates |
| US8130005B2 (en) * | 2006-12-14 | 2012-03-06 | Formfactor, Inc. | Electrical guard structures for protecting a signal trace from electrical interference |
| US20090087483A1 (en) * | 2007-09-27 | 2009-04-02 | Sison Raymundo A | Oral dosage combination pharmaceutical packaging |
| US8439033B2 (en) | 2007-10-09 | 2013-05-14 | Microdose Therapeutx, Inc. | Inhalation device |
| CN102665807A (zh) | 2010-01-05 | 2012-09-12 | 微剂量治疗技术公司 | 吸入设备和方法 |
Family Cites Families (37)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US2408143A (en) * | 1944-01-15 | 1946-09-24 | William C Huebner | Apparatus for multicolor printing with electro lines of force |
| US3854043A (en) * | 1970-04-07 | 1974-12-10 | Konishiroku Photo Ind | X-ray color electrophotography |
| US3831606A (en) * | 1971-02-19 | 1974-08-27 | Alza Corp | Auto inhaler |
| US3971377A (en) * | 1974-06-10 | 1976-07-27 | Alza Corporation | Medicament dispensing process for inhalation therapy |
| DE2502251A1 (de) * | 1975-01-17 | 1976-07-22 | Schering Ag | Vorrichtung zur inhalation pulverfoermiger feststoffe |
| US4197289A (en) * | 1975-12-15 | 1980-04-08 | Hoffmann-La Roche Inc. | Novel dosage forms |
| US4160257A (en) * | 1978-07-17 | 1979-07-03 | Dennison Manufacturing Company | Three electrode system in the generation of electrostatic images |
| USRE30401E (en) * | 1978-07-07 | 1980-09-09 | Illinois Tool Works Inc. | Gasless ion plating |
| US4628227A (en) * | 1980-10-06 | 1986-12-09 | Dennison Manufacturing Company | Mica-electrode laminations for the generation of ions in air |
| LU85034A1 (fr) * | 1982-10-08 | 1985-06-19 | Glaxo Group Ltd | Dispositifs en vue d'administrer des medicaments a des patients |
| US4538163A (en) * | 1983-03-02 | 1985-08-27 | Xerox Corporation | Fluid jet assisted ion projection and printing apparatus |
| US4570630A (en) * | 1983-08-03 | 1986-02-18 | Miles Laboratories, Inc. | Medicament inhalation device |
| GB8328808D0 (en) * | 1983-10-28 | 1983-11-30 | Riker Laboratories Inc | Inhalation responsive dispensers |
| DE3345722A1 (de) * | 1983-12-17 | 1985-06-27 | Boehringer Ingelheim KG, 6507 Ingelheim | Inhalator |
| GB2178965B (en) * | 1985-07-30 | 1988-08-03 | Glaxo Group Ltd | Devices for administering medicaments to patients |
| US5031610A (en) * | 1987-05-12 | 1991-07-16 | Glaxo Inc. | Inhalation device |
| US4918468A (en) * | 1988-11-14 | 1990-04-17 | Dennison Manufacturing Company | Method and apparatus for charged particle generation |
| US5176132A (en) * | 1989-05-31 | 1993-01-05 | Fisons Plc | Medicament inhalation device and formulation |
| US5014076A (en) * | 1989-11-13 | 1991-05-07 | Delphax Systems | Printer with high frequency charge carrier generation |
| US5027136A (en) * | 1990-01-16 | 1991-06-25 | Dennison Manufacturing Company | Method and apparatus for charged particle generation |
| US4992807A (en) * | 1990-05-04 | 1991-02-12 | Delphax Systems | Gray scale printhead system |
| JP2627689B2 (ja) * | 1990-06-14 | 1997-07-09 | 株式会社リコー | 現像装置 |
| US5115803A (en) * | 1990-08-31 | 1992-05-26 | Minnesota Mining And Manufacturing Company | Aerosol actuator providing increased respirable fraction |
| US5328539A (en) * | 1990-11-28 | 1994-07-12 | H. B. Fuller Licensing & Financing Inc. | Radio frequency heating of thermoplastic receptor compositions |
| US5186164A (en) * | 1991-03-15 | 1993-02-16 | Puthalath Raghuprasad | Mist inhaler |
| AU650953B2 (en) * | 1991-03-21 | 1994-07-07 | Novartis Ag | Inhaler |
| US5243970A (en) * | 1991-04-15 | 1993-09-14 | Schering Corporation | Dosing device for administering metered amounts of powdered medicaments to patients |
| US5278588A (en) * | 1991-05-17 | 1994-01-11 | Delphax Systems | Electrographic printing device |
| US5327883A (en) * | 1991-05-20 | 1994-07-12 | Dura Pharmaceuticals, Inc. | Apparatus for aerosolizing powdered medicine and process and using |
| US5161524A (en) * | 1991-08-02 | 1992-11-10 | Glaxo Inc. | Dosage inhalator with air flow velocity regulating means |
| GB9123953D0 (en) * | 1991-11-12 | 1992-01-02 | Minnesota Mining & Mfg | Inhalation device |
| DE4211475A1 (de) * | 1991-12-14 | 1993-06-17 | Asta Medica Ag | Pulverinhalator |
| US5239993A (en) * | 1992-08-26 | 1993-08-31 | Glaxo Inc. | Dosage inhalator providing optimized compound inhalation trajectory |
| WO1994008552A2 (en) * | 1992-10-19 | 1994-04-28 | Dura Pharmaceuticals, Inc. | Dry powder inhaler |
| SE9203743D0 (sv) * | 1992-12-11 | 1992-12-11 | Astra Ab | Efficient use |
| US5437271A (en) * | 1993-04-06 | 1995-08-01 | Minnesota Mining And Manufacturing Company | Deagglomerators for dry powder inhalers |
| TW402506B (en) * | 1993-06-24 | 2000-08-21 | Astra Ab | Therapeutic preparation for inhalation |
-
1995
- 1995-06-06 US US08/467,647 patent/US5669973A/en not_active Expired - Lifetime
-
1996
- 1996-06-06 KR KR1019970708555A patent/KR19990022076A/ko not_active Ceased
- 1996-06-06 DE DE69629681T patent/DE69629681T2/de not_active Expired - Fee Related
- 1996-06-06 AU AU62602/96A patent/AU696179B2/en not_active Ceased
- 1996-06-06 ES ES96921360T patent/ES2203708T3/es not_active Expired - Lifetime
- 1996-06-06 EP EP96921360A patent/EP0830212B1/en not_active Expired - Lifetime
- 1996-06-06 CA CA002223168A patent/CA2223168A1/en not_active Abandoned
- 1996-06-06 WO PCT/US1996/009439 patent/WO1996039256A1/en not_active Ceased
- 1996-06-06 AT AT96921360T patent/ATE248026T1/de not_active IP Right Cessation
- 1996-06-06 JP JP9501758A patent/JPH11507293A/ja not_active Ceased
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| KR20210052707A (ko) * | 2019-10-30 | 2021-05-11 | 삼성전자주식회사 | 극자외선 노광 시스템 |
Also Published As
| Publication number | Publication date |
|---|---|
| ATE248026T1 (de) | 2003-09-15 |
| EP0830212A1 (en) | 1998-03-25 |
| AU696179B2 (en) | 1998-09-03 |
| ES2203708T3 (es) | 2004-04-16 |
| EP0830212B1 (en) | 2003-08-27 |
| EP0830212A4 (en) | 1999-04-21 |
| WO1996039256A1 (en) | 1996-12-12 |
| JPH11507293A (ja) | 1999-06-29 |
| DE69629681T2 (de) | 2004-02-26 |
| CA2223168A1 (en) | 1996-12-12 |
| US5669973A (en) | 1997-09-23 |
| AU6260296A (en) | 1996-12-24 |
| DE69629681D1 (de) | 2003-10-02 |
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| PA0105 | International application |
Patent event date: 19971128 Patent event code: PA01051R01D Comment text: International Patent Application |
|
| PG1501 | Laying open of application | ||
| N231 | Notification of change of applicant | ||
| PN2301 | Change of applicant |
Patent event date: 19990708 Comment text: Notification of Change of Applicant Patent event code: PN23011R01D |
|
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