KR19990022076A - 기판상에 정전기적으로 재료를 증착하고 유지하기 위한 장치 - Google Patents

기판상에 정전기적으로 재료를 증착하고 유지하기 위한 장치 Download PDF

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Publication number
KR19990022076A
KR19990022076A KR1019970708555A KR19970708555A KR19990022076A KR 19990022076 A KR19990022076 A KR 19990022076A KR 1019970708555 A KR1019970708555 A KR 1019970708555A KR 19970708555 A KR19970708555 A KR 19970708555A KR 19990022076 A KR19990022076 A KR 19990022076A
Authority
KR
South Korea
Prior art keywords
trace
collection
dielectric layer
substrate
deposition material
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Ceased
Application number
KR1019970708555A
Other languages
English (en)
Korean (ko)
Inventor
티모시 알렌 플레처
Original Assignee
윌리암 제이. 버크
사르노프 코포레이션
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by 윌리암 제이. 버크, 사르노프 코포레이션 filed Critical 윌리암 제이. 버크
Publication of KR19990022076A publication Critical patent/KR19990022076A/ko
Ceased legal-status Critical Current

Links

Classifications

    • BPERFORMING OPERATIONS; TRANSPORTING
    • B05SPRAYING OR ATOMISING IN GENERAL; APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
    • B05BSPRAYING APPARATUS; ATOMISING APPARATUS; NOZZLES
    • B05B5/00Electrostatic spraying apparatus; Spraying apparatus with means for charging the spray electrically; Apparatus for spraying liquids or other fluent materials by other electric means
    • B05B5/025Discharge apparatus, e.g. electrostatic spray guns
    • GPHYSICS
    • G03PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03GELECTROGRAPHY; ELECTROPHOTOGRAPHY; MAGNETOGRAPHY
    • G03G17/00Electrographic processes using patterns other than charge patterns, e.g. an electric conductivity pattern; Processes involving a migration, e.g. photoelectrophoresis, photoelectrosolography; Processes involving a selective transfer, e.g. electrophoto-adhesive processes; Apparatus essentially involving a single such process
    • AHUMAN NECESSITIES
    • A61MEDICAL OR VETERINARY SCIENCE; HYGIENE
    • A61MDEVICES FOR INTRODUCING MEDIA INTO, OR ONTO, THE BODY; DEVICES FOR TRANSDUCING BODY MEDIA OR FOR TAKING MEDIA FROM THE BODY; DEVICES FOR PRODUCING OR ENDING SLEEP OR STUPOR
    • A61M15/00Inhalators
    • A61M15/0028Inhalators using prepacked dosages, one for each application, e.g. capsules to be perforated or broken-up
    • A61M15/0045Inhalators using prepacked dosages, one for each application, e.g. capsules to be perforated or broken-up using multiple prepacked dosages on a same carrier, e.g. blisters
    • AHUMAN NECESSITIES
    • A61MEDICAL OR VETERINARY SCIENCE; HYGIENE
    • A61MDEVICES FOR INTRODUCING MEDIA INTO, OR ONTO, THE BODY; DEVICES FOR TRANSDUCING BODY MEDIA OR FOR TAKING MEDIA FROM THE BODY; DEVICES FOR PRODUCING OR ENDING SLEEP OR STUPOR
    • A61M15/00Inhalators
    • A61M15/0028Inhalators using prepacked dosages, one for each application, e.g. capsules to be perforated or broken-up
    • A61M15/0045Inhalators using prepacked dosages, one for each application, e.g. capsules to be perforated or broken-up using multiple prepacked dosages on a same carrier, e.g. blisters
    • A61M15/0046Inhalators using prepacked dosages, one for each application, e.g. capsules to be perforated or broken-up using multiple prepacked dosages on a same carrier, e.g. blisters characterized by the type of carrier
    • A61M15/0048Inhalators using prepacked dosages, one for each application, e.g. capsules to be perforated or broken-up using multiple prepacked dosages on a same carrier, e.g. blisters characterized by the type of carrier the dosages being arranged in a plane, e.g. on diskettes
    • AHUMAN NECESSITIES
    • A61MEDICAL OR VETERINARY SCIENCE; HYGIENE
    • A61MDEVICES FOR INTRODUCING MEDIA INTO, OR ONTO, THE BODY; DEVICES FOR TRANSDUCING BODY MEDIA OR FOR TAKING MEDIA FROM THE BODY; DEVICES FOR PRODUCING OR ENDING SLEEP OR STUPOR
    • A61M15/00Inhalators
    • A61M15/02Inhalators with activated or ionised fluids, e.g. electrohydrodynamic [EHD] or electrostatic devices; Ozone-inhalators with radioactive tagged particles
    • A61M15/025Bubble jet droplet ejection devices
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B05SPRAYING OR ATOMISING IN GENERAL; APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
    • B05BSPRAYING APPARATUS; ATOMISING APPARATUS; NOZZLES
    • B05B12/00Arrangements for controlling delivery; Arrangements for controlling the spray area
    • B05B12/16Arrangements for controlling delivery; Arrangements for controlling the spray area for controlling the spray area
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B05SPRAYING OR ATOMISING IN GENERAL; APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
    • B05BSPRAYING APPARATUS; ATOMISING APPARATUS; NOZZLES
    • B05B5/00Electrostatic spraying apparatus; Spraying apparatus with means for charging the spray electrically; Apparatus for spraying liquids or other fluent materials by other electric means
    • B05B5/08Plant for applying liquids or other fluent materials to objects
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B41PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41JTYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/385Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by selective supply of electric current or selective application of magnetism to a printing or impression-transfer material
    • B41J2/41Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by selective supply of electric current or selective application of magnetism to a printing or impression-transfer material for electrostatic printing
    • B41J2/415Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by selective supply of electric current or selective application of magnetism to a printing or impression-transfer material for electrostatic printing by passing charged particles through a hole or a slit
    • B41J2/4155Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by selective supply of electric current or selective application of magnetism to a printing or impression-transfer material for electrostatic printing by passing charged particles through a hole or a slit for direct electrostatic printing [DEP]
    • AHUMAN NECESSITIES
    • A61MEDICAL OR VETERINARY SCIENCE; HYGIENE
    • A61MDEVICES FOR INTRODUCING MEDIA INTO, OR ONTO, THE BODY; DEVICES FOR TRANSDUCING BODY MEDIA OR FOR TAKING MEDIA FROM THE BODY; DEVICES FOR PRODUCING OR ENDING SLEEP OR STUPOR
    • A61M15/00Inhalators
    • A61M15/02Inhalators with activated or ionised fluids, e.g. electrohydrodynamic [EHD] or electrostatic devices; Ozone-inhalators with radioactive tagged particles

Landscapes

  • Health & Medical Sciences (AREA)
  • Engineering & Computer Science (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • Veterinary Medicine (AREA)
  • Hematology (AREA)
  • Public Health (AREA)
  • General Health & Medical Sciences (AREA)
  • Animal Behavior & Ethology (AREA)
  • Heart & Thoracic Surgery (AREA)
  • Bioinformatics & Cheminformatics (AREA)
  • Pulmonology (AREA)
  • Anesthesiology (AREA)
  • Biomedical Technology (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Electrochemistry (AREA)
  • General Physics & Mathematics (AREA)
  • Physics & Mathematics (AREA)
  • Molecular Biology (AREA)
  • Chemical & Material Sciences (AREA)
  • Application Of Or Painting With Fluid Materials (AREA)
  • Electrostatic Spraying Apparatus (AREA)
  • Medical Preparation Storing Or Oral Administration Devices (AREA)
  • Physical Vapour Deposition (AREA)
  • Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)
KR1019970708555A 1995-06-06 1996-06-06 기판상에 정전기적으로 재료를 증착하고 유지하기 위한 장치 Ceased KR19990022076A (ko)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
US08/467,647 US5669973A (en) 1995-06-06 1995-06-06 Apparatus for electrostatically depositing and retaining materials upon a substrate
US8/467,647 1995-06-06

Publications (1)

Publication Number Publication Date
KR19990022076A true KR19990022076A (ko) 1999-03-25

Family

ID=23856546

Family Applications (1)

Application Number Title Priority Date Filing Date
KR1019970708555A Ceased KR19990022076A (ko) 1995-06-06 1996-06-06 기판상에 정전기적으로 재료를 증착하고 유지하기 위한 장치

Country Status (10)

Country Link
US (1) US5669973A (enExample)
EP (1) EP0830212B1 (enExample)
JP (1) JPH11507293A (enExample)
KR (1) KR19990022076A (enExample)
AT (1) ATE248026T1 (enExample)
AU (1) AU696179B2 (enExample)
CA (1) CA2223168A1 (enExample)
DE (1) DE69629681T2 (enExample)
ES (1) ES2203708T3 (enExample)
WO (1) WO1996039256A1 (enExample)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR20210052707A (ko) * 2019-10-30 2021-05-11 삼성전자주식회사 극자외선 노광 시스템

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US5647347A (en) * 1994-10-21 1997-07-15 Glaxo Wellcome Inc. Medicament carrier for dry powder inhalator
US7008668B2 (en) 1995-05-09 2006-03-07 Phoqus Pharmaceuticals Limited Powder coating composition for electrostatic coating of pharmaceutical substrates
EP0824344B1 (en) 1995-05-09 2005-04-20 Phoqus Pharmaceuticals Limited Powder coating composition for electrostatic coating of pharmaceutical substrates
DE19758730B4 (de) * 1996-04-09 2004-03-04 Delsys Pharmaceutical Corp. Verfahren zum Herstellen einer pharmazeutischen Zusammensetzung
BR9709174A (pt) * 1996-04-25 1999-08-03 Schuckmann Alfred Von Inalador
GB9623634D0 (en) 1996-11-13 1997-01-08 Bpsi Holdings Inc Method and apparatus for the coating of substrates for pharmaceutical use
US6237590B1 (en) * 1997-09-18 2001-05-29 Delsys Pharmaceutical Corporation Dry powder delivery system apparatus
CA2322437A1 (en) 1998-03-04 1999-09-10 Joseph T. Mcginn Medicament dry powder inhaler dispensing device
US6287595B1 (en) 1998-06-10 2001-09-11 Delsys Pharmaceuticals Corporation Biomedical assay device
US6063194A (en) 1998-06-10 2000-05-16 Delsys Pharmaceutical Corporation Dry powder deposition apparatus
CN1312709A (zh) 1998-06-10 2001-09-12 德尔西斯药品公司 药用制品及其制备方法和装置
US6149774A (en) * 1998-06-10 2000-11-21 Delsys Pharmaceutical Corporation AC waveforms biasing for bead manipulating chucks
SE512386C2 (sv) * 1998-07-30 2000-03-06 Microdrug Ag Förfarande och anordning för klassificering av elektrostatiskt laddat pulverformigt material
AU752391B2 (en) * 1998-10-14 2002-09-19 Delsys Pharmaceutical Corporation Electrostatic sensing chuck using area matched electrodes
US6378518B1 (en) 1998-10-30 2002-04-30 Richard George Miekka Method for producing uniform small doses of finely divided substances
US6146685A (en) * 1998-11-05 2000-11-14 Delsys Pharmaceutical Corporation Method of deposition a dry powder and dispensing device
US6372246B1 (en) 1998-12-16 2002-04-16 Ortho-Mcneil Pharmaceutical, Inc. Polyethylene glycol coating for electrostatic dry deposition of pharmaceuticals
US6923979B2 (en) * 1999-04-27 2005-08-02 Microdose Technologies, Inc. Method for depositing particles onto a substrate using an alternating electric field
US6428809B1 (en) 1999-08-18 2002-08-06 Microdose Technologies, Inc. Metering and packaging of controlled release medication
SE517806C2 (sv) * 1999-11-11 2002-07-16 Microdrug Ag Doseringsanordning för inhalator
US6458426B1 (en) * 1999-11-23 2002-10-01 The Trustees Of Princeton University Method for depositing a patterned layer of material over a substrate
SE9904705D0 (sv) * 1999-12-21 1999-12-21 Astra Ab An inhalation device
GB0002305D0 (en) 2000-02-01 2000-03-22 Phoqus Limited Power material for electrostatic application
AU2001277268A1 (en) * 2000-07-11 2002-01-21 Delsys Pharmaceutical Corporation Substrates for powder deposition containing conductive domains
US6588457B2 (en) 2001-05-30 2003-07-08 Richard A. Fotland Method for packaging uniform small doses of finely divided substances
US20070087048A1 (en) * 2001-05-31 2007-04-19 Abrams Andrew L Oral dosage combination pharmaceutical packaging
US6844048B2 (en) 2001-07-11 2005-01-18 Sarnoff Corporation Substrates for powder deposition containing conductive domains
US6686207B2 (en) 2001-10-12 2004-02-03 Massachusetts Institute Of Technology Manipulating micron scale items
DE10217929A1 (de) * 2002-04-22 2003-11-06 Sixp Ag Vorrichtung zur Ausgabe von Tabletten
NZ527833A (en) * 2003-08-26 2006-06-30 Darren John Blade Application of powder paint using dielectric brush to charge powder, and rotating screen
GB0330171D0 (en) * 2003-12-30 2004-02-04 Phoqus Pharmaceuticals Ltd Method and apparatus for the application of powder material to substrates
GB0407312D0 (en) 2004-03-31 2004-05-05 Phoqus Pharmaceuticals Ltd Method and apparatus for the application of powder material to substrates
US8130005B2 (en) * 2006-12-14 2012-03-06 Formfactor, Inc. Electrical guard structures for protecting a signal trace from electrical interference
US20090087483A1 (en) * 2007-09-27 2009-04-02 Sison Raymundo A Oral dosage combination pharmaceutical packaging
US8439033B2 (en) 2007-10-09 2013-05-14 Microdose Therapeutx, Inc. Inhalation device
CN102665807A (zh) 2010-01-05 2012-09-12 微剂量治疗技术公司 吸入设备和方法

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* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR20210052707A (ko) * 2019-10-30 2021-05-11 삼성전자주식회사 극자외선 노광 시스템

Also Published As

Publication number Publication date
ATE248026T1 (de) 2003-09-15
EP0830212A1 (en) 1998-03-25
AU696179B2 (en) 1998-09-03
ES2203708T3 (es) 2004-04-16
EP0830212B1 (en) 2003-08-27
EP0830212A4 (en) 1999-04-21
WO1996039256A1 (en) 1996-12-12
JPH11507293A (ja) 1999-06-29
DE69629681T2 (de) 2004-02-26
CA2223168A1 (en) 1996-12-12
US5669973A (en) 1997-09-23
AU6260296A (en) 1996-12-24
DE69629681D1 (de) 2003-10-02

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