KR19990002471A - Metal Film Deposition Equipment - Google Patents

Abstract

A metal film deposition apparatus is disclosed. The vapor deposition apparatus includes a vapor deposition tank provided with a frame, a diffusion tank of metal for mounting a panel on the top of which is mounted on the frame, and a vapor deposition film, and a turbo for connecting the vapor deposition tank with a connecting means to deposit the vapor part. It is characterized by including a pump, a rotary pump connected by the connecting means and the pipe member, which can improve the efficiency according to the deposition of the metal film, and the maintenance of the deposition apparatus is simple.

Description

Metal Film Deposition Equipment

The present invention relates to a deposition apparatus, and more particularly to a metal film deposition apparatus for depositing a metal film on the inner surface of the panel of the cathode ray tube.

In general, the cathode ray tube is formed on the surface of the fluorescent film formed on the inner surface of the panel to form an aluminum film, which is a metal film, to reflect the light emitted from the fluorescent film to improve the brightness of the image formed by emitting the fluorescent film.

1 shows an example of a conventional deposition apparatus for forming a deposition film on the surface of a fluorescent film.

The opening 11a of the square shape is formed on the table 11, and the packing member 11b which is in close contact with the edge of the panel 100 to be deposited is maintained at the edge of the opening 11a to maintain the airtight state. . In addition, a chamber 12 having the opening 11a as an outlet is fixedly installed on a lower surface of the table 11, and power is applied to a bottom surface of the chamber 12, and a metal piece supporting groove 13a for deposition is formed. A plurality of heaters 13 are provided. The lower part of the chamber 12 is provided with a vacuum means for evacuating the inside thereof, the vacuum means includes a rotary pump 14 and a diffusion pump 15 connected in parallel with the chamber. do.

As a conventional cathode ray tube deposition apparatus 10 configured as described above, in order to form an aluminum deposition film on the upper surface of the fluorescent film on the inner surface of the panel 100, the metal to be deposited on the heater 13 provided in the chamber 12, that is, aluminum Fit the piece. The inner surface of the panel 100 is seated on the upper surface of the table 11 so as to face the opening 11a so that the edge of the panel 100 is in close contact with the packing member 11b. In this state, the rotary pump 14 and the diffusion pump 16, which are the vacuum means, are operated to maintain the inside of the chamber 12 in a high vacuum, and a voltage is applied to the support of the heater 13. In this way, the aluminum seated on the heater 13 is evaporated and deposited on the inner surface of the panel 100 on which the fluorescent film is formed.

As described above, the aluminum deposition apparatus for forming an aluminum deposition film on the inner surface of the panel 100 uses a rotary pump 14 and a diffusion pump 15 as a means for maintaining the inside of the chamber 12 in a high vacuum. Since the silicone oil of the pump 15 is heated to induce a vacuum, it is necessary to periodically wash the oil and replenish the oil. In addition, there is a problem that the environment is contaminated by the oil flowing into the diffusion pump.

The present invention has been made to solve the above problems, and an object thereof is to provide a deposition apparatus for cathode ray tubes that can increase the vacuum degree of a chamber, which is a diffusion region of metal for forming a deposition film.

1 is a side cross-sectional view of a deposition apparatus of a conventional metal film deposition apparatus,

2 is a side view of a metal film deposition apparatus according to the present invention;

3 is a cross-sectional view of the connecting means,

Explanation of symbols for main parts of the drawings

32; Deposition Tank

33; Heater

41; Connection

45; Turbopump

46; Rotary pump

The present invention to achieve the above object,

A deposition tank provided on the frame, a panel mounted on the frame, and having a metal diffusion space for forming a deposition film, and a turbo pump connected to the deposition tank and connecting means for depositing the space; It is characterized by including a rotary pump connected by means and a pipe member.

In the present invention, the connecting means includes a vertical pipe part connected to the deposition tank, and a horizontal pipe part connected to the side of the vertical pipe part and coupled with the turbo pump.

Hereinafter, one preferred embodiment according to the present invention will be described with reference to the accompanying drawings.

2 and 3 illustrate an embodiment of a deposition apparatus for forming an aluminum deposition film with a metal film on the inner surface of the cathode ray tube panel 100.

As illustrated, a deposition tank 32 having a diffusion space of metal for forming a deposition film is provided at an upper portion of the frame 31, and a lower portion of the frame 31 is formed at a high vacuum. Vacuum pumping means 40 for maintaining is installed.

An opening 32b is formed on the upper surface of the deposition tank 32 to communicate with the space 32a, and a pad 32c for maintaining airtightness when the panel 100 is installed at an edge of the opening 32b. Is installed. In addition, a heater 33 for heating a metal for forming a deposition film, that is, aluminum, is provided on the bottom surface of the deposition tank 32.

The vacuum pumping means 40 is for maintaining the space in the deposition tank 32 at a high vacuum, the lower portion of the deposition tank 32, the connecting means 41 and the turbo pump connected by the connecting means (41) 45 and a rotary pump 46. Here, the connecting means 41 includes a vertical pipe part 42 connected to the deposition tank 32 and a horizontal pipe part 43 installed at the side of the vertical pipe part 42. The lower end of the vertical pipe portion 42 is sealed by a cover member 42a, and the horizontal pipe portion 43 is installed at a position spaced a predetermined distance from the lower end of the vertical pipe portion 42 and the turbo pump 45 Connected. The horizontal pipe portion 42 is connected to the turbo pump 45 and the rotary pump 46.

Referring to the operation of the metal film deposition apparatus of the cathode ray tube according to the present invention configured as described above are as follows.

First, in order to form an aluminum deposition film on the inner surface of the panel 100, the metal piece is seated in the metal piece supporting groove (not shown) of the heater 33, and then the inner surface of the panel 100 is deposited through the opening 32b. 32) to the bottom. In this state, the inside of the deposition tank 32 is made high vacuum and a predetermined potential is applied to the heater 33 to heat the heater 33 so that the aluminum pieces are melted and evaporated to be deposited on the inner surface of the panel 100. Do.

As described above, in the deposition process, the vacuum of the deposition tank operates the turbo pump 45 connected to the horizontal pipe portion 43 of the thermal coupling means, and the air pumped by the turbo pump 45 rotates the rotary pump 46. Exhaust by The pumping as described above may be exhausted to a high vacuum by using a turbo pump 45 after the first exhaust of the interior of the deposition tank 32 by a low vacuum by the rotary pump 46. In the process of vacuuming by the turbo pump 45 and the rotary pump 46, the horizontal pipe portion 43 with respect to the resin pipe portion 42 of the connecting means at a position spaced a predetermined distance from the end of the vertical pipe portion 42 Since it is installed, it is possible to prevent foreign matter flowing from the deposition tank 32 during the vacuum flow into the turbo pump 45 through the horizontal light portion 43.

Although the present invention has been described with reference to the above-described embodiment shown in the drawings, the present invention is not limited to the above-described examples and can be modified by those skilled in the art within the technical scope to which the present invention belongs.

The metal film deposition apparatus of the cathode ray tube according to the present invention configured as described above has the following effects.

first; By using the turbo pump without using the oil diffusion pump as in the prior art, the periodic cleaning is unnecessary and the oil need not be regularly replenished.

second; Using oils can reduce the pollution of the environment.

third; Since the horizontal pipe portion is installed at an intermediate portion spaced from the end of the vertical pipe portion of the connecting means by a predetermined distance, this portion serves as a filter for filtering foreign substances introduced into the turbo pump from the deposition tank. Therefore, there is no need to use a filter separately, and cleaning is easy by simply removing and combining the cover member.

fourth; The labor maneuver according to the management of the vacuum device can be reduced.

Claims (3)

A deposition tank provided on the frame, a panel mounted on the frame, and having a metal diffusion space for forming a deposition film, and a turbo pump connected to the deposition tank and connecting means for depositing the space; A metal film deposition apparatus comprising a rotary pump connected by means and a pipe member. The metal film deposition apparatus of claim 1, wherein the connection means comprises a vertical pipe portion connected to the deposition tank and a horizontal pipe portion connected to a side surface of the vertical tube portion and coupled to a turbo pump. The metal film deposition apparatus according to claim 1, wherein the horizontal tube portion is installed on the vertical tube portion on a side of the vertical tube portion spaced a predetermined distance from the end of the vertical tube portion.