KR19980043943A - Manufacturing method of blue light emitting diode - Google Patents
Manufacturing method of blue light emitting diode Download PDFInfo
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- KR19980043943A KR19980043943A KR1019960061924A KR19960061924A KR19980043943A KR 19980043943 A KR19980043943 A KR 19980043943A KR 1019960061924 A KR1019960061924 A KR 1019960061924A KR 19960061924 A KR19960061924 A KR 19960061924A KR 19980043943 A KR19980043943 A KR 19980043943A
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- gallium nitride
- nitride layer
- light emitting
- blue light
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- 238000004519 manufacturing process Methods 0.000 title claims abstract description 18
- 238000010438 heat treatment Methods 0.000 claims abstract description 18
- 238000000034 method Methods 0.000 claims description 7
- 239000000758 substrate Substances 0.000 claims description 7
- JMASRVWKEDWRBT-UHFFFAOYSA-N Gallium nitride Chemical compound [Ga]#N JMASRVWKEDWRBT-UHFFFAOYSA-N 0.000 abstract description 36
- 229910002601 GaN Inorganic materials 0.000 abstract description 34
- 239000007769 metal material Substances 0.000 abstract 3
- 238000000151 deposition Methods 0.000 abstract 1
- 238000005530 etching Methods 0.000 abstract 1
- 238000010030 laminating Methods 0.000 abstract 1
- PXHVJJICTQNCMI-UHFFFAOYSA-N nickel Substances [Ni] PXHVJJICTQNCMI-UHFFFAOYSA-N 0.000 description 7
- 239000011651 chromium Substances 0.000 description 5
- 229910052751 metal Inorganic materials 0.000 description 5
- 239000002184 metal Substances 0.000 description 5
- 238000001020 plasma etching Methods 0.000 description 4
- 239000010936 titanium Substances 0.000 description 4
- IJGRMHOSHXDMSA-UHFFFAOYSA-N Atomic nitrogen Chemical compound N#N IJGRMHOSHXDMSA-UHFFFAOYSA-N 0.000 description 2
- VYZAMTAEIAYCRO-UHFFFAOYSA-N Chromium Chemical compound [Cr] VYZAMTAEIAYCRO-UHFFFAOYSA-N 0.000 description 2
- 238000005229 chemical vapour deposition Methods 0.000 description 2
- 239000011777 magnesium Substances 0.000 description 2
- 229910052594 sapphire Inorganic materials 0.000 description 2
- 239000010980 sapphire Substances 0.000 description 2
- 239000004065 semiconductor Substances 0.000 description 2
- FYYHWMGAXLPEAU-UHFFFAOYSA-N Magnesium Chemical compound [Mg] FYYHWMGAXLPEAU-UHFFFAOYSA-N 0.000 description 1
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 description 1
- RTAQQCXQSZGOHL-UHFFFAOYSA-N Titanium Chemical compound [Ti] RTAQQCXQSZGOHL-UHFFFAOYSA-N 0.000 description 1
- 229910052782 aluminium Inorganic materials 0.000 description 1
- XAGFODPZIPBFFR-UHFFFAOYSA-N aluminium Chemical compound [Al] XAGFODPZIPBFFR-UHFFFAOYSA-N 0.000 description 1
- 229910052804 chromium Inorganic materials 0.000 description 1
- 238000007796 conventional method Methods 0.000 description 1
- 230000008878 coupling Effects 0.000 description 1
- 238000010168 coupling process Methods 0.000 description 1
- 238000005859 coupling reaction Methods 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- WABPQHHGFIMREM-UHFFFAOYSA-N lead(0) Chemical compound [Pb] WABPQHHGFIMREM-UHFFFAOYSA-N 0.000 description 1
- 229910052749 magnesium Inorganic materials 0.000 description 1
- 229910052759 nickel Inorganic materials 0.000 description 1
- 229910052757 nitrogen Inorganic materials 0.000 description 1
- 230000003287 optical effect Effects 0.000 description 1
- 125000002524 organometallic group Chemical group 0.000 description 1
- 229910052710 silicon Inorganic materials 0.000 description 1
- 239000010703 silicon Substances 0.000 description 1
- 229910052719 titanium Inorganic materials 0.000 description 1
- 238000007740 vapor deposition Methods 0.000 description 1
Classifications
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L33/00—Semiconductor devices having potential barriers specially adapted for light emission; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof
- H01L33/0004—Devices characterised by their operation
- H01L33/0008—Devices characterised by their operation having p-n or hi-lo junctions
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L33/00—Semiconductor devices having potential barriers specially adapted for light emission; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof
- H01L33/36—Semiconductor devices having potential barriers specially adapted for light emission; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof characterised by the electrodes
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2933/00—Details relating to devices covered by the group H01L33/00 but not provided for in its subgroups
- H01L2933/0008—Processes
- H01L2933/0016—Processes relating to electrodes
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- Engineering & Computer Science (AREA)
- Manufacturing & Machinery (AREA)
- Computer Hardware Design (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Power Engineering (AREA)
- Led Devices (AREA)
Abstract
N형 전극의 표면을 평탄하게 할 수 있도록 한 청색 발광 다이오드의 제조방법에 관한 것으로 N형 전극의 표면이 거칠게 되어 리드 와이어를 형성하기 위한 와이어 본딩이 잘 되지 않는 문제점을 해결하기 위하여 기판 전면에 N형 질화 갈륨층, P형 질화 갈륨층의 순서로 적층하고 N형 질화 갈륨층이 노출되도록 일부 영역을 식각하여 일정 온동서 1차 열처리 하고 P형 질화 갈륨층상의 일정영역에 P형 금속물질을 적층하여 P형 전극을 먼저 형성하고 일정 온도에서 2차 열처리한 다음 N형 질화 갈륨층상의 일정 영역에 N형 금속물질을 적층하여 N형 전극을 형성하고 고온의 열처리를 추가로 수행하지 않으므로 청색 발광 다이오드의 동작 특성 및 신뢰성을 향상시킬 수 있다.The present invention relates to a method of manufacturing a blue light emitting diode that makes the surface of an N-type electrode flat. To solve the problem that the surface of the N-type electrode becomes rough and wire bonding for forming lead wires is not easy, Laminate in order of the gallium nitride layer and the p-type gallium nitride layer, and etching a portion of the region to expose the N-type gallium nitride layer by heat treatment for a predetermined temperature, and then depositing a P-type metal material on a predetermined region on the P-type gallium nitride layer. P-type electrode is formed first, and second heat treatment is performed at a predetermined temperature, and then an N-type metal material is formed by laminating an N-type metal material in a predetermined region on the N-type gallium nitride layer. It can improve the operation characteristics and reliability.
Description
본 발명은 N형 전극의 표면을 평탄하게 할 수 있도록 한 청색 발광 다이오드의 제조방법에 관한 것이다.The present invention relates to a method of manufacturing a blue light emitting diode in which the surface of an N-type electrode can be made flat.
일반적으로 발광 다이오드(Light Emitting Diode)는 주입된 전자와 정공이 재결합할 때 과잉 에너지를 빛으로 방출하는 다이오드이고 GaAsP등을 이용한 적색 발광 다이오드, GaP를 이용한 녹색 발광 다이오드 등이 있으며 모두 저전압 소전력으로 동작하는 장점을 지닌 소자로써 소형의 숫자 문자 표시소자, 광결합 소자용광원으로 사용된다. 이러한 발광 다이오드는 전류 전압간에 선형적 특성을 갖도록 하기 위하여 전극을 이루는 금속과 반도체간에 비 정류성 접촉인 저항성 접촉(Ohmic Contact)을 이룬다. 이때 금속과 반도체가 저항성 접촉을 이루기 위해서는 고온의 열처리 공정이 필요하고 이 열처리 공정이 전극의 표면에 영향을 미칠 수 있다.Generally, light emitting diodes are diodes that emit excess energy as light when the injected electrons and holes recombine, and there are red light emitting diodes using GaAsP and green light emitting diodes using GaP. This device has the advantage of being used as a light source for small number character display device and optical coupling device. Such light emitting diodes form ohmic contacts, which are non-rective contacts, between the metal constituting the electrode and the semiconductor so as to have a linear characteristic between current and voltage. In this case, a high temperature heat treatment process is required for the metal and the semiconductor to make an ohmic contact, and the heat treatment process may affect the surface of the electrode.
이하 종래의 기술에 따른 청색 발광 다이오드의 제조 방법을 첨부한 도면을 참조하여 설명하면 다음과 같다.Hereinafter, a method of manufacturing a blue light emitting diode according to the related art will be described with reference to the accompanying drawings.
도 1a 내지 도 1d는 종래의 기술에 따른 청색 발광 다이오드의 제조공정을 보여주는 공정단면도이다.1A to 1D are cross-sectional views illustrating a manufacturing process of a blue light emitting diode according to the related art.
종래의 기술에 따른 청색 발광 다이오드의 제조 방법은 도 1a와 같이 사파이어 기판(11)의 전면에 유기금속 기상증착법(MOCVD)(Metal Organic Chemical Vapor Deposition)으로 N형 질화 갈륨(GaN)층(12)을 형성하고 N형 질화 갈륨층(12)의 전면에 유기금속 기상증착법으로 P형 질화 갈륨층(13)을 형성한다. 이때, N형 질화 갈륨층(12)은 질화 갈륨에 실리콘(Si)을 도핑(Doping)한 것이고 P형 질화 갈륨층(13)은 질화 갈륨에 마그네슘(Mg)을 도핑한 것이다. 이어서 도 1b와 같이 N형 질화 갈륨층(12)의 일부 영역이 노출되도록 N형 질화 갈륨층(12) 및 P형 질화 갈륨층(13)의 일정 영역을 반응성 이온 식각(RIE)(Reactive Ion Etching) 방법으로 제거한다. 그리고 도 1c와 같이 노출된 N형 질화 갈륨층(12)상의 일부 영역에 Ti(14), Al(15), Ni(16), Au(17)을 차례로 적층하여 N형 전극을 형성하고, 850℃~950℃의 온도에서 열처리한다. 이때 N형 전극과 N형 질화 갈륨층(12)이 저항성 접촉을 이루게 된다. 이어서 도 1d와 같이 P형 질화 갈륨층(13)상의 일정영역에 Cr(18), Ni(19), Au(20)을 차례로 적층하여 P형 전극을 형성하고, 500℃~600℃의 온도에서 열처리하여 청색 발광 다이오드의 제조를 완료한다. 이때 P형 전극과 P형 질화 갈륨층(13)이 저항성 접촉을 이루게 된다.The conventional method of manufacturing a blue light emitting diode according to the related art is an N-type gallium nitride (GaN) layer 12 by metal organic chemical vapor deposition (MOCVD) on the front surface of the sapphire substrate 11 as shown in FIG. 1A. The P-type gallium nitride layer 13 is formed on the entire surface of the N-type gallium nitride layer 12 by an organometallic vapor deposition method. In this case, the N-type gallium nitride layer 12 is doped with silicon (Si) in the gallium nitride (P) gallium nitride layer 13 is doped with magnesium (Mg) in gallium nitride. Subsequently, a portion of the N-type gallium nitride layer 12 and the P-type gallium nitride layer 13 is exposed to reactive ion etching (RIE) so that a portion of the N-type gallium nitride layer 12 is exposed as shown in FIG. 1B. ) To remove it. 1C, Ti (14), Al (15), Ni (16), and Au (17) are sequentially stacked on a portion of the exposed N-type gallium nitride layer 12 to form an N-type electrode, as shown in FIG. 1C. Heat treatment at a temperature of ℃ ~ 950 ℃. At this time, the N-type electrode and the N-type gallium nitride layer 12 are in ohmic contact. Subsequently, Cr (18), Ni (19), and Au (20) are sequentially stacked in a predetermined region on the P-type gallium nitride layer 13 to form a P-type electrode, as shown in FIG. 1D. Heat treatment is completed to manufacture the blue light emitting diode. At this time, the P-type electrode and the P-type gallium nitride layer 13 are in ohmic contact.
종래의 기술에 따른 청색 발광 다이오드의 제조방법은 N형 전극을 형성한 다음 약 900℃의 고온 열처리를 수행하므로 N형 전극의 표면이 거칠어지는 볼 업(Ball Up) 현상이 발생하여 N형 전극 표면에 리드 와이어(Lead Wire)를 형성하기 위한 와이어 본딩(Wire Bonding)이 잘되지 않는 문제점이 있다.In the manufacturing method of the blue light emitting diode according to the prior art, since the N-type electrode is formed and then a high temperature heat treatment is performed at about 900 ° C., the surface of the N-type electrode becomes rough, a ball up phenomenon occurs, and thus the surface of the N-type electrode There is a problem in that wire bonding for forming lead wires is poor.
따라서 본 발명은 이러한 종래의 문제점을 해결하기 위하여 안출한 것으로서 N형 전극의 표면을 평탄하게 할 수 있도록 한 청색 발광 다이오드의 제조 방법을 제공함에 그 목적이 있다.Accordingly, an object of the present invention is to provide a method of manufacturing a blue light emitting diode, which is designed to solve such a conventional problem and to flatten the surface of an N-type electrode.
도 1a 내지 도 1d는 종래의 기술에 따른 청색 다이오드의 제조공정을 보여주는 공정단면도이고,1A to 1D are cross-sectional views illustrating a manufacturing process of a blue diode according to the related art.
도 2a 내지 도 2d는 본 발명에 따른 청색 발광 다이오드의 제조공정을 보여주는 공정단면도이다.2A through 2D are cross-sectional views illustrating a manufacturing process of a blue light emitting diode according to the present invention.
*도면의 주요 부분에 대한 부호의 설명** Description of the symbols for the main parts of the drawings *
21:기판22:N형 질화 갈륨층21: Substrate 22: N-type gallium nitride layer
23:P형 질화 갈륨층24:Ti(타이타늄)23: P type gallium nitride layer 24: Ti (titanium)
25:Al(알루미늄)26:Ni(니켈)25: Al (aluminum) 26: Ni (nickel)
27:Au(금)28:Cr(크롬)27: Au (Fri) 28: Cr (Chrome)
29:Ni30:Au29: Ni30: Au
본 발명은 기판 전면에 N형 및 P형 에피층을 형성하고 N형 에피층의 일부 영역이 노출되도록 N형 및 P형 에피층을 일정 깊이로 제거하여 노출된 N형 에피층에 1차 열처리를 먼저 수행하고, P형 에피층의 일정영역에 P형 전극을 형성하여 기판 전면에 2차 열처리한 다음 노출된 N형 에피층의 일정 영역에 N형 전극을 형성하고 별도의 열처리 공정을 수행하지 않으므로 N형 전극의 표면이 평탄화됨을 특징으로 한다.The present invention forms the N-type and P-type epitaxial layers on the entire surface of the substrate, and removes the N-type and P-type epitaxial layers to a predetermined depth so that a portion of the N-type epitaxial layer is exposed to the first heat treatment. First, the P-type electrode is formed in a predetermined region of the P-type epi layer, and the second heat treatment is performed on the entire surface of the substrate. Then, the N-type electrode is formed in the predetermined region of the exposed N-type epi layer, and a separate heat treatment process is not performed. The surface of the N-type electrode is characterized in that the planarization.
이하 본 발명에 따른 청색 발광 다이오드의 제조방법을 첨부한 도면을 참조하여 설명하면 다음과 같다.Hereinafter, a method of manufacturing a blue light emitting diode according to the present invention will be described with reference to the accompanying drawings.
도 2a 내지 도 2d는 본 발명에 따른 청색 발광 다이오드의 제조 공정을 보여주는 공정 단면도이다.2A to 2D are cross-sectional views illustrating a manufacturing process of a blue light emitting diode according to the present invention.
본 발명에 따른 청색 발광 다이오드의 제조 공정은 도 2a와 같이 사파이어 기판(21)의 전면에 유기금속 기상증착법(MOCVD)(Metal Orgaic Chemical Vapor Deposition)으로 N형 질화 갈륨(GaN) 층(22)을 형성하고 N형 질화 갈륨층(22)의 전면에 동일한 방법으로 P형 질화 갈륨층(23)을 형성한다. 이어서 도 2b와 같이 N형 질화 갈륨층(22)의 일부 영역이 노출되도록 N형 질화 갈륨층(22) 및 P형 질화 갈륨층(23)의 일정 영역을 반응성 이온 식각(RIE)(Reactive Ion Etching)하여 제거하고 850℃~950℃의 온도에서 열처리한다. 그리고 도 2c와 같이 P형 질화 갈륨층(13)상의 일정영역에 Cr(28), Ni(29), Au(30)을 차례로 적층하여 P형 전극을 형성하고 500℃~600℃의 온도에서 열처리한다. 이때 500℃~600℃ 온도의 열처리에 의해 P형 제1 금속층(28)을 이루는 크롬(Cr)이 용융(Melting)되어 일종의 전자층을 형성하게 되고 이로 인하여 P형 전극과 P형 질화 갈륨층은 저항성 접촉을 이루게 된다. 이어서 도 2d와 같이 노출된 N형 질화 갈륨층(22)상의 일부 영역에 Ti(24), Al(25), Ni(26), Au(27)을 차례로 적층하여 N형 전극을 형성하고 청색 발광 다이오드의 제조를 완료한다. 이때 도 2b에서 실시한 고온(850℃~950℃)의 열처리로 인해 N형 질화 갈륨층(GaN)(22)의 원자간 결합이 해제되면서 질소(N+)가 기화되어 N형 질화 갈륨층(22)의 표면에는 전자(Ga-)가 다수 존재하게 되고 전자층이 형성되어 N형 질화 갈륨층(22)과 N형 전극이 저항성 접촉을 이루기 위한 조건은 이미 갖추어져 있으므로 N형 질화 갈륨층(22)상에 N형 전극을 형성후 별도의 열처리 공정을 수행하지 않아도 N형 질화 갈륨층(22)과 N형 전극은 저항성 접촉을 이루게 된다.In the manufacturing process of the blue light emitting diode according to the present invention, an N-type gallium nitride (GaN) layer 22 is formed on the entire surface of the sapphire substrate 21 by MOCVD (Metal Orgaic Chemical Vapor Deposition). The P-type gallium nitride layer 23 is formed on the entire surface of the N-type gallium nitride layer 22 in the same manner. Next, as shown in FIG. 2B, certain regions of the N-type gallium nitride layer 22 and the P-type gallium nitride layer 23 are exposed to a portion of the N-type gallium nitride layer 22 to be reactive ion etching (RIE). ) To remove and heat treatment at a temperature of 850 ℃ ~ 950 ℃. As shown in FIG. 2C, Cr (28), Ni (29), and Au (30) are sequentially stacked in a predetermined region on the P-type gallium nitride layer 13 to form a P-type electrode, and then heat-treated at a temperature of 500 ° C. to 600 ° C. do. At this time, chromium (Cr) forming the P-type first metal layer 28 is melted by heat treatment at a temperature of 500 ° C. to 600 ° C. to form a kind of electronic layer. Thus, the P-type electrode and the P-type gallium nitride layer are An ohmic contact is made. Subsequently, Ti (24), Al (25), Ni (26), and Au (27) are sequentially stacked on a portion of the exposed N-type gallium nitride layer 22 as shown in FIG. 2D to form an N-type electrode, and emit blue light. Complete the manufacture of the diode. At this time, due to the high temperature (850 ° C. to 950 ° C.) heat treatment performed in FIG. 2B, the atomic bonding of the N-type gallium nitride layer (GaN) 22 is released, and nitrogen (N + ) is vaporized to form the N-type gallium nitride layer 22. ), A large number of electrons (Ga − ) exist on the surface of the N-type gallium nitride layer, and an electron layer is formed so that the N-type gallium nitride layer 22 and the N-type electrode have ohmic contact. After the N-type electrode is formed on the N-type gallium nitride layer 22 and the N-type electrode are in ohmic contact even without a separate heat treatment process.
본 발명에 따른 청색 발광 다이오드의 제조방법은 N형 전극의 표면을 평탄하게 형성할 수 있고 N형 전극의 표면상에 리드 와이어를 형성하기 위한 와이어 본딩이 잘 되게 하므로 청색 발광 다이오드의 신뢰성 및 동작 특성을 향상시킬 수 있는 효과가 있다.The method of manufacturing a blue light emitting diode according to the present invention can form the surface of the N-type electrode flat and the wire bonding for forming the lead wire on the surface of the N-type electrode is well, so the reliability and operation characteristics of the blue light emitting diode There is an effect to improve.
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