KR19980042137A - 웨이퍼 레벨 콘택 시트의 이용 방법 - Google Patents

웨이퍼 레벨 콘택 시트의 이용 방법 Download PDF

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Publication number
KR19980042137A
KR19980042137A KR1019970058293A KR19970058293A KR19980042137A KR 19980042137 A KR19980042137 A KR 19980042137A KR 1019970058293 A KR1019970058293 A KR 1019970058293A KR 19970058293 A KR19970058293 A KR 19970058293A KR 19980042137 A KR19980042137 A KR 19980042137A
Authority
KR
South Korea
Prior art keywords
conductive
axis
copper
layer
wafer
Prior art date
Application number
KR1019970058293A
Other languages
English (en)
Korean (ko)
Inventor
존제이.버드나이티스
Original Assignee
존에스.캠벨
더블유.엘.고어앤드어소시에이츠,인코오포레이티드
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by 존에스.캠벨, 더블유.엘.고어앤드어소시에이츠,인코오포레이티드 filed Critical 존에스.캠벨
Publication of KR19980042137A publication Critical patent/KR19980042137A/ko

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Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
    • G01R1/00—Details of instruments or arrangements of the types included in groups G01R5/00 - G01R13/00 and G01R31/00
    • G01R1/02—General constructional details
    • G01R1/04—Housings; Supporting members; Arrangements of terminals
    • G01R1/0408—Test fixtures or contact fields; Connectors or connecting adaptors; Test clips; Test sockets
    • G01R1/0491—Test fixtures or contact fields; Connectors or connecting adaptors; Test clips; Test sockets for testing integrated circuits on wafers, e.g. wafer-level test cartridge
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
    • G01R31/00—Arrangements for testing electric properties; Arrangements for locating electric faults; Arrangements for electrical testing characterised by what is being tested not provided for elsewhere
    • G01R31/28—Testing of electronic circuits, e.g. by signal tracer
    • G01R31/2851—Testing of integrated circuits [IC]
    • G01R31/2855—Environmental, reliability or burn-in testing
    • G01R31/286—External aspects, e.g. related to chambers, contacting devices or handlers
    • G01R31/2863—Contacting devices, e.g. sockets, burn-in boards or mounting fixtures

Landscapes

  • Engineering & Computer Science (AREA)
  • Computer Hardware Design (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Environmental & Geological Engineering (AREA)
  • General Engineering & Computer Science (AREA)
  • Testing Of Individual Semiconductor Devices (AREA)
  • Testing Or Measuring Of Semiconductors Or The Like (AREA)
  • Measuring Leads Or Probes (AREA)
KR1019970058293A 1996-11-08 1997-11-06 웨이퍼 레벨 콘택 시트의 이용 방법 KR19980042137A (ko)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
US74557596A 1996-11-08 1996-11-08
US8/745,575 1996-11-08

Publications (1)

Publication Number Publication Date
KR19980042137A true KR19980042137A (ko) 1998-08-17

Family

ID=24997293

Family Applications (1)

Application Number Title Priority Date Filing Date
KR1019970058293A KR19980042137A (ko) 1996-11-08 1997-11-06 웨이퍼 레벨 콘택 시트의 이용 방법

Country Status (2)

Country Link
JP (1) JPH10246751A (ja)
KR (1) KR19980042137A (ja)

Families Citing this family (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP3980801B2 (ja) 1999-09-16 2007-09-26 株式会社東芝 三次元構造体およびその製造方法
JP2003059611A (ja) * 2001-08-15 2003-02-28 Sumitomo Electric Ind Ltd 異方性導電シートおよびその製造方法

Also Published As

Publication number Publication date
JPH10246751A (ja) 1998-09-14

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Legal Events

Date Code Title Description
WITN Withdrawal due to no request for examination