KR19980037814A - Switch mode power supply with high breakdown voltage insulation - Google Patents

Switch mode power supply with high breakdown voltage insulation Download PDF

Info

Publication number
KR19980037814A
KR19980037814A KR1019960056624A KR19960056624A KR19980037814A KR 19980037814 A KR19980037814 A KR 19980037814A KR 1019960056624 A KR1019960056624 A KR 1019960056624A KR 19960056624 A KR19960056624 A KR 19960056624A KR 19980037814 A KR19980037814 A KR 19980037814A
Authority
KR
South Korea
Prior art keywords
power supply
mode power
switch mode
integrated circuit
switching element
Prior art date
Application number
KR1019960056624A
Other languages
Korean (ko)
Other versions
KR100192970B1 (en
Inventor
김수경
최형묵
Original Assignee
김광호
삼성전자 주식회사
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by 김광호, 삼성전자 주식회사 filed Critical 김광호
Priority to KR1019960056624A priority Critical patent/KR100192970B1/en
Publication of KR19980037814A publication Critical patent/KR19980037814A/en
Application granted granted Critical
Publication of KR100192970B1 publication Critical patent/KR100192970B1/en

Links

Classifications

    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L23/00Details of semiconductor or other solid state devices
    • H01L23/48Arrangements for conducting electric current to or from the solid state body in operation, e.g. leads, terminal arrangements ; Selection of materials therefor
    • H01L23/488Arrangements for conducting electric current to or from the solid state body in operation, e.g. leads, terminal arrangements ; Selection of materials therefor consisting of soldered or bonded constructions
    • H01L23/495Lead-frames or other flat leads
    • H01L23/49575Assemblies of semiconductor devices on lead frames
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L2224/00Indexing scheme for arrangements for connecting or disconnecting semiconductor or solid-state bodies and methods related thereto as covered by H01L24/00
    • H01L2224/01Means for bonding being attached to, or being formed on, the surface to be connected, e.g. chip-to-package, die-attach, "first-level" interconnects; Manufacturing methods related thereto
    • H01L2224/26Layer connectors, e.g. plate connectors, solder or adhesive layers; Manufacturing methods related thereto
    • H01L2224/31Structure, shape, material or disposition of the layer connectors after the connecting process
    • H01L2224/32Structure, shape, material or disposition of the layer connectors after the connecting process of an individual layer connector
    • H01L2224/321Disposition
    • H01L2224/32151Disposition the layer connector connecting between a semiconductor or solid-state body and an item not being a semiconductor or solid-state body, e.g. chip-to-substrate, chip-to-passive
    • H01L2224/32221Disposition the layer connector connecting between a semiconductor or solid-state body and an item not being a semiconductor or solid-state body, e.g. chip-to-substrate, chip-to-passive the body and the item being stacked
    • H01L2224/32245Disposition the layer connector connecting between a semiconductor or solid-state body and an item not being a semiconductor or solid-state body, e.g. chip-to-substrate, chip-to-passive the body and the item being stacked the item being metallic
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L2224/00Indexing scheme for arrangements for connecting or disconnecting semiconductor or solid-state bodies and methods related thereto as covered by H01L24/00
    • H01L2224/01Means for bonding being attached to, or being formed on, the surface to be connected, e.g. chip-to-package, die-attach, "first-level" interconnects; Manufacturing methods related thereto
    • H01L2224/42Wire connectors; Manufacturing methods related thereto
    • H01L2224/47Structure, shape, material or disposition of the wire connectors after the connecting process
    • H01L2224/48Structure, shape, material or disposition of the wire connectors after the connecting process of an individual wire connector
    • H01L2224/481Disposition
    • H01L2224/48135Connecting between different semiconductor or solid-state bodies, i.e. chip-to-chip
    • H01L2224/48137Connecting between different semiconductor or solid-state bodies, i.e. chip-to-chip the bodies being arranged next to each other, e.g. on a common substrate
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L2224/00Indexing scheme for arrangements for connecting or disconnecting semiconductor or solid-state bodies and methods related thereto as covered by H01L24/00
    • H01L2224/01Means for bonding being attached to, or being formed on, the surface to be connected, e.g. chip-to-package, die-attach, "first-level" interconnects; Manufacturing methods related thereto
    • H01L2224/42Wire connectors; Manufacturing methods related thereto
    • H01L2224/47Structure, shape, material or disposition of the wire connectors after the connecting process
    • H01L2224/48Structure, shape, material or disposition of the wire connectors after the connecting process of an individual wire connector
    • H01L2224/481Disposition
    • H01L2224/48151Connecting between a semiconductor or solid-state body and an item not being a semiconductor or solid-state body, e.g. chip-to-substrate, chip-to-passive
    • H01L2224/48221Connecting between a semiconductor or solid-state body and an item not being a semiconductor or solid-state body, e.g. chip-to-substrate, chip-to-passive the body and the item being stacked
    • H01L2224/48245Connecting between a semiconductor or solid-state body and an item not being a semiconductor or solid-state body, e.g. chip-to-substrate, chip-to-passive the body and the item being stacked the item being metallic
    • H01L2224/48247Connecting between a semiconductor or solid-state body and an item not being a semiconductor or solid-state body, e.g. chip-to-substrate, chip-to-passive the body and the item being stacked the item being metallic connecting the wire to a bond pad of the item
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L2224/00Indexing scheme for arrangements for connecting or disconnecting semiconductor or solid-state bodies and methods related thereto as covered by H01L24/00
    • H01L2224/01Means for bonding being attached to, or being formed on, the surface to be connected, e.g. chip-to-package, die-attach, "first-level" interconnects; Manufacturing methods related thereto
    • H01L2224/42Wire connectors; Manufacturing methods related thereto
    • H01L2224/47Structure, shape, material or disposition of the wire connectors after the connecting process
    • H01L2224/49Structure, shape, material or disposition of the wire connectors after the connecting process of a plurality of wire connectors
    • H01L2224/491Disposition
    • H01L2224/4911Disposition the connectors being bonded to at least one common bonding area, e.g. daisy chain
    • H01L2224/49111Disposition the connectors being bonded to at least one common bonding area, e.g. daisy chain the connectors connecting two common bonding areas, e.g. Litz or braid wires
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L2224/00Indexing scheme for arrangements for connecting or disconnecting semiconductor or solid-state bodies and methods related thereto as covered by H01L24/00
    • H01L2224/73Means for bonding being of different types provided for in two or more of groups H01L2224/10, H01L2224/18, H01L2224/26, H01L2224/34, H01L2224/42, H01L2224/50, H01L2224/63, H01L2224/71
    • H01L2224/732Location after the connecting process
    • H01L2224/73251Location after the connecting process on different surfaces
    • H01L2224/73265Layer and wire connectors
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L24/00Arrangements for connecting or disconnecting semiconductor or solid-state bodies; Methods or apparatus related thereto
    • H01L24/01Means for bonding being attached to, or being formed on, the surface to be connected, e.g. chip-to-package, die-attach, "first-level" interconnects; Manufacturing methods related thereto
    • H01L24/42Wire connectors; Manufacturing methods related thereto
    • H01L24/47Structure, shape, material or disposition of the wire connectors after the connecting process
    • H01L24/49Structure, shape, material or disposition of the wire connectors after the connecting process of a plurality of wire connectors
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L29/00Semiconductor devices adapted for rectifying, amplifying, oscillating or switching, or capacitors or resistors with at least one potential-jump barrier or surface barrier, e.g. PN junction depletion layer or carrier concentration layer; Details of semiconductor bodies or of electrodes thereof  ; Multistep manufacturing processes therefor
    • H01L29/66Types of semiconductor device ; Multistep manufacturing processes therefor
    • H01L29/68Types of semiconductor device ; Multistep manufacturing processes therefor controllable by only the electric current supplied, or only the electric potential applied, to an electrode which does not carry the current to be rectified, amplified or switched
    • H01L29/70Bipolar devices
    • H01L29/72Transistor-type devices, i.e. able to continuously respond to applied control signals
    • H01L29/739Transistor-type devices, i.e. able to continuously respond to applied control signals controlled by field-effect, e.g. bipolar static induction transistors [BSIT]
    • H01L29/7393Insulated gate bipolar mode transistors, i.e. IGBT; IGT; COMFET

Landscapes

  • Physics & Mathematics (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • General Physics & Mathematics (AREA)
  • Engineering & Computer Science (AREA)
  • Computer Hardware Design (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Power Engineering (AREA)
  • Metal-Oxide And Bipolar Metal-Oxide Semiconductor Integrated Circuits (AREA)
  • Lead Frames For Integrated Circuits (AREA)

Abstract

본 발명은 스위치 모드 전원 장치에 있어서, 특히 반도체 스위칭 소자와 상기 스위칭 소자를 제어하는 제어용 집적 회로를 하나의 리드 프레임에 탑재하여 형성된 패키지를 포함하는 스위치 모드 전원 장치에 있어서, 상기 제어용 집적 회로의 뒷면에 절연막이 형성된 것을 특징으로 한다.The present invention relates to a switch mode power supply comprising a package formed by mounting a semiconductor switching element and a control integrated circuit for controlling the switching element in one lead frame. An insulating film is formed on the film.

Description

고내압 절연 구조를 가지는 스위치 모드 전원 장치Switch mode power supply with high breakdown voltage insulation structure

본 발명은 스위치 모드 전원 장치에 관한 것으로서, 특히 반도체 스위칭 소자와 상기 스위칭 소자를 제어하는 제어용 집적 회로를 하나의 리드 프레임에 탑제하여 형성된 패키지를 포함하는 스위치 모드 전원 장치에 관한 것이다,The present invention relates to a switch mode power supply, and more particularly, to a switch mode power supply including a semiconductor switching element and a package formed by mounting a control integrated circuit for controlling the switching element in one lead frame.

최근에 전기·전자 분야에서 사용되는 전원 장치로서, 고효율·고기능의 스위치 모드 전원 장치가 대부분을 차지하고 있다. 스위치 모드 전원 장치에는 전력용 반도체 스위칭 소자와 이 스위치 소자를 제어하는 제어용 집적 회로가 필수적인데 최근까지는 상기 반도체 스위칭 소자와 제어용 집적 회로를 별도로 제작하여 왔다(도 1 및 도 2 참조). 이렇게 별도로 제작하게 되면 외부에 부가되는 부품의 숫자가 많아지게 되므로 전체 전원 장치의 제작 원가가 높아지게 된다.In recent years, as a power supply device used in the field of electric and electronic fields, a high efficiency and a high-performance switch mode power supply occupy most. In the switch mode power supply, a power semiconductor switching element and a control integrated circuit for controlling the switch element are essential. Until recently, the semiconductor switching element and the control integrated circuit have been manufactured separately (see FIGS. 1 and 2). If manufactured separately, the number of parts added to the outside increases the manufacturing cost of the entire power supply.

상기 문제를 해결하기 위하여, 도 3 및 도 4 와 같이 반도체 스위칭 소자(10)와 제어용 집적 회로(20)를 하나의 리드 프레임(30)에 탑재하여 하나의 패키지를 형성하는 기술이 알려져 있다. 반도체 스위칭 소자(10)를 리드 프레임(30)에 납땜하고, 제어용 집적 회로(20)를 리드 프레임(30)에 절연 물질을 이용하여 접착시킨다. 여기서 반도체 스위칭 소자(10)가 모스펫인 경우 드레인 단자가 납땜되며, 제어용 집적 회로(20)와 리드프레임(30) 상호간에는 고내압 절연이 요구되므로 절연 물질로서 절연 에폭시를 사용하게 된다. 이 때, 형성된 에폭시막(50)의 내부에 기포(51) 등이 형성될 수 있으며, 이에 의해서 절연이 파괴될 수 있다. 이런 불량은 전체 전원 장치의 동작을 멈추게 한다. 이 문제를 해결하기 위하여 에폭시막(50)과 제어용 집적 회로(20) 사이에 절연지(isolation sheet)를 삽입하는 방법이 있다. 그러나 이 방법은 기존의 반도체 공정 외에 별도의 공정을 요하는 단점이 있다.In order to solve the above problem, a technique of forming a package by mounting the semiconductor switching element 10 and the control integrated circuit 20 in one lead frame 30 as shown in FIGS. 3 and 4 is known. The semiconductor switching element 10 is soldered to the lead frame 30, and the control integrated circuit 20 is bonded to the lead frame 30 using an insulating material. In this case, when the semiconductor switching device 10 is a MOSFET, the drain terminal is soldered, and since the high breakdown voltage is required between the control integrated circuit 20 and the lead frame 30, an insulating epoxy is used as the insulating material. At this time, bubbles 51 and the like may be formed in the formed epoxy film 50, whereby insulation may be destroyed. This failure causes the entire power supply to stop working. In order to solve this problem, there is a method of inserting an isolation sheet between the epoxy film 50 and the control integrated circuit 20. However, this method has a disadvantage of requiring a separate process in addition to the conventional semiconductor process.

반도체 공정 기술의 발전에 따라 반도체 스위칭 소자와 제어용 집적 회로를 하나의 웨이퍼에서 하나의 칩으로 구현하는 스마트 전력 소자 제조 공정이 개발되어 이를 이용한 집적 회로가 출시되고 있다. 그러나, 아직 보편화되지 않은 기술이어서 널리 사용되지는 않고 있고, 집적 회로의 가격이 비싼 편이다.With the development of semiconductor process technology, a smart power device manufacturing process that implements a semiconductor switching device and an integrated control circuit in a single wafer has been developed and an integrated circuit using the same has been introduced. However, because it is not yet widely used, it is not widely used, and integrated circuits are expensive.

본 발명의 목적은 이와 같은 종래 기술의 문제점을 해결하기 위하여, 기존의 반도체 공정을 이용하여 제어용 집적 회로와 리드 프레임을 효과적으로 절연시킴으로써, 고내압 절연 구조를 가지는 스위치 모드 전원 장치를 제공하는 데 있다.SUMMARY OF THE INVENTION An object of the present invention is to provide a switch mode power supply device having a high breakdown voltage insulation structure by effectively isolating a control integrated circuit and a lead frame by using a conventional semiconductor process in order to solve such problems of the prior art.

상기 목적을 달성하기 위하여, 본 발명의 스위치 모드 전원 장치는 제어용 집적 회로의 뒷면에 절연막이 형성된 것을 특징으로 한다.In order to achieve the above object, the switch mode power supply of the present invention is characterized in that an insulating film is formed on the back of the control integrated circuit.

도 1 은 종래의 반도체 스위칭 소자 패키지의 일 예의 평면도.1 is a plan view of an example of a conventional semiconductor switching device package.

도 2 는 도 1 의 단면도.2 is a cross-sectional view of FIG.

도 3 은 종래 기술 및 본 발명에 있어서, 리드 프레임에 반도체 스위칭 소자와 제어용 집적 회로가 탑재된 패키지의 일 실시예의 평면도.3 is a plan view of one embodiment of a package in which a semiconductor switching element and a control integrated circuit are mounted in a lead frame in the prior art and the present invention;

도 4 는 종래 기술에 있어서 도 3 의 단면도.4 is a cross-sectional view of FIG. 3 in the prior art.

도 5 는 본 발명에 있어서 도 3 의 단면도.5 is a cross-sectional view of FIG. 3 in the present invention.

이하, 첨부 도면을 참조하여 본 발명을 보다 상세히 설명하고자 한다.Hereinafter, the present invention will be described in more detail with reference to the accompanying drawings.

도 3 은, 본 발명의 일 실시예로서, 다섯 개의 리드를 가진 패키지의 평면도를 도시한 것이며, 도 5 는 그 단면도를 도시한 것이다.FIG. 3 shows a top view of a package with five leads, as an embodiment of the invention, and FIG. 5 shows a cross sectional view thereof.

일반적으로 반도체 스위칭 소자(10)를 리드 프레임(30)에 납땜(40)하여 붙이게 되는 데, 이 때 납땜(40)된 리드 프레임(30)의 넓은 평면 부분을 힛 싱크(heat sink)라 한다. 반도체 스위칭 소자(10)가 모스펫인 경우에는 드레인 단자가 납땜되어 힛 싱크와 전기적으로 단락된다. 반도체 스위칭 소자(10)가 IGBT인 경우에는 리드 프레임(30)의 힛 싱크가 콜렉터에 연결되어 있다. 제어용 집적 회로(20)의 뒷면은 일반적으로 그라운드이므로 제어용 집적 회로(20)를 리드 프레임(30)에 납땜하여 붙이는 경우에는 제어용 집적 회로(30)의 그라운드와 힛 싱크가 전기적으로 단락된다. 그렇게 되면, 반도체 스위칭 소자(10)의 드레인 또는 콜렉터와 제어용 집적 회로(20)의 그라운드가 단락되어 스위칭 동작을 수행할 수 없게 된다. 이를 방지하기 위해서 제어용 집적 회로(20)와 리드 프레임(30)의 힛 싱크 사이를 에폭시와 같은 절연 접착 수지를 이용하여 전기적으로 절연시키게 된다. 이 때 본 발명에서는, 뒷면에 절연막(21)이 형성된 제어용 집적 회로(20)를 리드 프레임(30)에 접착시키게 된다. 이 절연막은 기존의 반도체 공정을 이용하여 웨이퍼의 뒷면에 미리 형성된다. 상기 절연막(21)으로서 실리콘 질화막, 실리콘 산화막, 또는 BCB(benzocyclobutane) 코팅막 등이 가능한 데, 실리콘 질화막 및 실리콘 산화막을 이용하는 경우에는 그 두께가 2μm 이상, BCB(benzocyclobutane) 코팅막을 이용하는 경우에는 그 두께가 10μm 이상이 되는 것이 적당하다.In general, the semiconductor switching element 10 is attached to the lead frame 30 by soldering 40. At this time, the wide planar portion of the soldered lead frame 30 is called a heat sink. When the semiconductor switching element 10 is a MOSFET, the drain terminal is soldered and electrically shorted with the heat sink. When the semiconductor switching element 10 is an IGBT, the heat sink of the lead frame 30 is connected to the collector. Since the back surface of the control integrated circuit 20 is generally ground, when soldering and attaching the control integrated circuit 20 to the lead frame 30, the ground and the heat sink of the control integrated circuit 30 are electrically shorted. In this case, the drain or the collector of the semiconductor switching element 10 and the ground of the control integrated circuit 20 are short-circuited so that a switching operation cannot be performed. In order to prevent this, the insulating circuit between the control integrated circuit 20 and the lead sink 30 is electrically insulated using an insulating adhesive resin such as epoxy. At this time, in the present invention, the control integrated circuit 20 having the insulating film 21 formed thereon is bonded to the lead frame 30. This insulating film is previously formed on the back side of the wafer using a conventional semiconductor process. As the insulating film 21, a silicon nitride film, a silicon oxide film, or a BCB (benzocyclobutane) coating film may be used. The thickness of the silicon nitride film and the silicon oxide film is 2 μm or more, and the thickness of the BCB (benzocyclobutane) coating film is used. It is suitable to become 10 micrometers or more.

반도체 스위칭 소자 및 제어용 집적 회로를 리드 프레임에 탑재한 후, 와이어 본딩(60)을 하게 되는 데, 도 3 에서는 일 실시예로서, 반도체 스위칭 소자(10)의 소오스(모스펫의 경우) 또는 에미터(IGBT의 경우)와 제어용 집적 회로(20)의 그라운드가 내부에서 와이어 본딩(60)되어 외부로 한 단자로 나와 있는 상태가 도시되어 있다.After the semiconductor switching element and the control integrated circuit are mounted in the lead frame, wire bonding 60 is performed. In FIG. 3, as an embodiment, a source (in case of a MOSFET) or an emitter ( In the case of the IGBT) and the ground of the control integrated circuit 20 is wire-bonded 60 therein and is shown as a terminal outward.

상기 절연막(21)이 형성된 패키지는 다음과 같은 장점이 있다.The package in which the insulating film 21 is formed has the following advantages.

첫째, 기존의 반도체 공정을 이용한다.First, the existing semiconductor process is used.

둘째, 절연막질이 매우 균일하고 상기 절연막 내부에 기포등이 형성되지 않는다.Second, the insulating film quality is very uniform and bubbles are not formed inside the insulating film.

셋째, 절연막이 형성된 경우의 절연 내압은, 절연막만에 의한 절연 내압과 에폭시만에 의한 절연 내압의 합이 되므로, 에폭시만에 의한 절연 내압보다 고내압을 얻을 수 있다.Third, since the dielectric breakdown voltage in the case where the insulating film is formed is the sum of the dielectric breakdown voltage only by the insulating film and the dielectric breakdown voltage only by the epoxy, it is possible to obtain a higher breakdown voltage than the dielectric breakdown voltage by only epoxy.

넷째, 에폭시막에 불량이 생기더라도 절연막만으로도 충분한 내압의 확보가 가능하다.Fourth, even if a defect occurs in the epoxy film, a sufficient breakdown voltage can be secured only by the insulating film.

본 발명은, 기존의 반도체 공정 외의 별도의 공정을 요하지 않으며, 에폭시막의 기포 등에 의한 절연 불량 문제를 해결함과 동시에 절연 내압의 증가를 가져올 수 있다.The present invention does not require a separate process other than the conventional semiconductor process, and solves the problem of poor insulation due to bubbles in the epoxy film, and at the same time, may increase the insulation breakdown voltage.

Claims (5)

반도체 스위칭 소자와 상기 스위칭 소자를 제어하는 제어용 집적 회로를 하나의 리드 프레임에 탑재하여 형성된 패키지를 포함하는 스위치 모드 전원 장치에 있어서, 상기 제어용 집적 회로의 뒷면에 절연막이 형성된 것을 특징으로 하는 스위치 모드 전원 장치.A switch mode power supply comprising a package formed by mounting a semiconductor switching element and a control integrated circuit for controlling the switching element in one lead frame, wherein the insulating film is formed on the back side of the control integrated circuit. Device. 제 1 항에 있어서, 상기 반도체 스위칭 소자는 모스펫 또는 IGBT인 것을 특징으로 하는 스위치 모드 전원 장치.The switch mode power supply according to claim 1, wherein the semiconductor switching element is a MOSFET or an IGBT. 제 1 항에 있어서, 상기 절연막은 실리콘 질화막, 실리콘 산화막, BCB(benzocyclobutane) 코팅막 중 어느 하나인 것을 특징으로 하는 스위치 모드 전원 장치.The switch mode power supply of claim 1, wherein the insulating film is any one of a silicon nitride film, a silicon oxide film, and a benzocyclobutane (BCB) coating film. 제 3 항에 있어서, 상기 실리콘 질화막 또는 상기 실리콘 산화막의 두께는 2μm 이상인 것을 특징으로 하는 스위치 모드 전원 장치.The switch mode power supply according to claim 3, wherein the silicon nitride film or the silicon oxide film has a thickness of 2 µm or more. 제 3 항에 있어서, 상기 BCB(benzocyclobutane) 코팅막의 두께는 10μm 이상인 것을 특징으로 하는 스위치 모드 전원 장치.The switch mode power supply of claim 3, wherein the BCB coating layer has a thickness of 10 μm or more.
KR1019960056624A 1996-11-22 1996-11-22 Switch mode power device with high breakdown voltage insulation structure KR100192970B1 (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
KR1019960056624A KR100192970B1 (en) 1996-11-22 1996-11-22 Switch mode power device with high breakdown voltage insulation structure

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
KR1019960056624A KR100192970B1 (en) 1996-11-22 1996-11-22 Switch mode power device with high breakdown voltage insulation structure

Publications (2)

Publication Number Publication Date
KR19980037814A true KR19980037814A (en) 1998-08-05
KR100192970B1 KR100192970B1 (en) 1999-06-15

Family

ID=19483174

Family Applications (1)

Application Number Title Priority Date Filing Date
KR1019960056624A KR100192970B1 (en) 1996-11-22 1996-11-22 Switch mode power device with high breakdown voltage insulation structure

Country Status (1)

Country Link
KR (1) KR100192970B1 (en)

Also Published As

Publication number Publication date
KR100192970B1 (en) 1999-06-15

Similar Documents

Publication Publication Date Title
US7884444B2 (en) Semiconductor device including a transformer on chip
US5767573A (en) Semiconductor device
KR960016239B1 (en) Semiconductor device
US7923827B2 (en) Semiconductor module for a switched-mode power supply and method for its assembly
KR20010030702A (en) Power semiconductor module and motor driving system employing the same
US10985110B2 (en) Semiconductor package having an electromagnetic shielding structure and method for producing the same
JPH06177295A (en) Hybrid integrated circuit
US10410996B2 (en) Integrated circuit package for assembling various dice in a single IC package
JP4816214B2 (en) Semiconductor device and manufacturing method thereof
EP1149419B1 (en) Multi-chip module for use in high-power applications
CN116981918A (en) Isolated temperature sensor device package
US6400035B1 (en) Microwave semiconductor device with improved heat discharge and electrical properties and manufacturing method thereof
JP3308713B2 (en) Electronics
KR100218259B1 (en) Semiconductor package having a high pressure insulation structure
KR19980037814A (en) Switch mode power supply with high breakdown voltage insulation
JP2004349300A (en) Semiconductor device and its manufacturing method
US6649978B2 (en) Semiconductor module having multiple semiconductor chips
US7087990B2 (en) Power semiconductor device
WO2022236665A1 (en) Semiconductor device
KR102228938B1 (en) Coupled semiconductor package
CN111971793B (en) Semiconductor module
JPH09283544A (en) Semiconductor device
JPH05267500A (en) Resin-sealed semiconductor device
JPH05109940A (en) Hybrid integrated circuit
JP3444840B2 (en) Semiconductor element substrate and semiconductor device using the same

Legal Events

Date Code Title Description
A201 Request for examination
E701 Decision to grant or registration of patent right
GRNT Written decision to grant
FPAY Annual fee payment

Payment date: 20131217

Year of fee payment: 16

FPAY Annual fee payment

Payment date: 20141222

Year of fee payment: 17

FPAY Annual fee payment

Payment date: 20160118

Year of fee payment: 18

EXPY Expiration of term