KR19980020918U - Wafer Transfer Device - Google Patents
Wafer Transfer Device Download PDFInfo
- Publication number
- KR19980020918U KR19980020918U KR2019960034182U KR19960034182U KR19980020918U KR 19980020918 U KR19980020918 U KR 19980020918U KR 2019960034182 U KR2019960034182 U KR 2019960034182U KR 19960034182 U KR19960034182 U KR 19960034182U KR 19980020918 U KR19980020918 U KR 19980020918U
- Authority
- KR
- South Korea
- Prior art keywords
- wafer
- transfer
- holder
- wafer holder
- detector
- Prior art date
Links
- 239000004065 semiconductor Substances 0.000 claims abstract description 11
- 238000000034 method Methods 0.000 claims abstract description 6
- 238000004519 manufacturing process Methods 0.000 abstract description 10
- 230000003252 repetitive effect Effects 0.000 abstract 1
- 230000015556 catabolic process Effects 0.000 description 1
- 230000007257 malfunction Effects 0.000 description 1
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/677—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations
- H01L21/67703—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations between different workstations
- H01L21/67706—Mechanical details, e.g. roller, belt
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/67005—Apparatus not specifically provided for elsewhere
- H01L21/67242—Apparatus for monitoring, sorting or marking
- H01L21/67259—Position monitoring, e.g. misposition detection or presence detection
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- Engineering & Computer Science (AREA)
- Physics & Mathematics (AREA)
- Condensed Matter Physics & Semiconductors (AREA)
- General Physics & Mathematics (AREA)
- Manufacturing & Machinery (AREA)
- Computer Hardware Design (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Power Engineering (AREA)
- Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)
Abstract
본 고안은 웨이퍼 이송장치에 관한 것으로, 반도체 소자 제조공정 중 웨이퍼를 공정간 이동시킬 경우, 웨이퍼 하부면과 접촉하여 웨이퍼를 이송시키는 웨이퍼 홀더의 상부면 또는 선단부 전면에 감지기를 설치하여 웨이퍼 존재의 유, 무를 확인한 후 웨이퍼 이송운동이 진행되도록 하여 종래의 일정한 순서에 의해 반복적으로 이송운동됨에 의해 웨이퍼 파손 및 장비의 고장등을 방지할 수 있고, 또한 웨이퍼 홀더가 이송장치의 이송오류로 인한 장비내에서의 벽면등과의 충돌로 장비의 파손 등을 방지하도록 하여 반도체 소자 제조에 따른 제조수율을 향상시킬 수 있다.The present invention relates to a wafer transfer device. When a wafer is moved between processes during a semiconductor device manufacturing process, a detector is installed on the upper surface of the wafer holder or on the front surface of the front end of the wafer holder to contact the lower surface of the wafer to transfer the wafer. The wafer transfer movement can be progressed by checking the presence of the wafer, and the wafer movement can be prevented by the repetitive transfer movement according to the conventional order. In addition, the wafer holder can be used in the equipment due to the transfer error of the transfer apparatus. It is possible to prevent the damage of the equipment due to the collision with the wall surface of the can improve the manufacturing yield according to the semiconductor device manufacturing.
Description
본 고안은 웨이퍼 이송장치에 관한 것으로, 특히 반도체 소자 제조공정 웨이퍼를 공정간 이송할 경우, 웨이퍼 하부면과 접촉하는 웨이퍼 홀더의 상부면 및 선단부에 감지기를 설치하여 웨이퍼 이송오류에 따른 웨이퍼 또는 장비의 파손을 방지하도록 하여 반도체 소자 제조에 따른 제조수율을 향상시킬 수 있는 웨이퍼 이송장치에 관한 것이다.The present invention relates to a wafer transfer device. In particular, in the case of transferring a wafer during a semiconductor device manufacturing process, a detector is installed at an upper surface and a tip of a wafer holder that comes into contact with the lower surface of the wafer so that the wafer or equipment may be damaged due to a wafer transfer error. The present invention relates to a wafer transfer apparatus capable of preventing breakage and improving a manufacturing yield according to semiconductor device manufacturing.
일반적으로 반도체 소자 제조에 사용되는 장비는 각 공정단계별로 웨이퍼를 이송시키기 위한 웨이퍼 이송장치가 구비되어 있다.In general, the equipment used for manufacturing a semiconductor device is equipped with a wafer transfer device for transferring the wafer for each process step.
상기 종래의 웨이퍼 이송장치에 있어서는, 웨이퍼가 보관되어 있는 장소에서 웨이퍼의 존재를 확인하는 과정 없이 일정순서에 의해 웨이퍼를 이송하도록 구성되어 있다.In the conventional wafer transfer apparatus, the wafer is transferred in a predetermined order without a process of confirming the existence of the wafer at the place where the wafer is stored.
따라서 상기와 같은 종래의 이송방식에 있어서는, 웨이퍼가 보관된 장소에서 웨이퍼가 없거나 웨이퍼의 위치가 변경되었을 때에도 여전히 이송장치의 작동부재들이 일정한 순서에 의해 동일한 반복운동이 수행되므로 전송되는 웨이퍼가 손상되거나 또는 장비가 고장나게 되는 경우가 발생된다.Therefore, in the conventional transfer method as described above, even when there is no wafer at the place where the wafer is stored or the position of the wafer is changed, since the same repeating motion is performed in the same order in the operating members of the transfer device, the transferred wafer is damaged or Or equipment breakdown occurs.
또한 장비의 고장등으로 반도체 웨이퍼 이송장치가 일정 경로 이외의 경로로 움직일 경우에는 웨이퍼 이송장치 전체가 손상을 입게되는 문제점이 있다.In addition, when the semiconductor wafer transfer apparatus moves in a path other than a predetermined path due to a malfunction of the equipment, there is a problem that the entire wafer transfer apparatus is damaged.
따라서 본 고안은 상기의 문제점을 해결하기 위하여 웨이퍼 이송장치의 소정위치에 감지기를 설치하여 웨이퍼 이송오류에 따른 웨이퍼 또는 장비의 파손을 방지하여 반도체 소자 제조에 따른 생산수율을 향상시킬 수 있는 웨이퍼 이송장치를 제공함에 그 목적이 있다.Therefore, the present invention provides a wafer transfer device that can improve the production yield according to semiconductor device manufacturing by installing a detector at a predetermined position of the wafer transfer device to prevent the damage of the wafer or equipment due to the wafer transfer error in order to solve the above problems. The purpose is to provide.
도 1은 본 고안의 기술에 따른 웨이퍼 이송장치의 개략도1 is a schematic view of a wafer transfer apparatus according to the technology of the present invention
*도면의 주요 부분에 대한 부호의 설명** Description of the symbols for the main parts of the drawings *
1:웨이퍼3:웨이퍼 홀더1: Wafer 3: Wafer holder
5,7:작동부재9:제어회로부5, 7: operating member 9: control circuit
11,13:감지기15:연결라인11,13: detector 15: connection line
상기 목적을 달성하기 위한 본 고안의 웨이퍼 이송장치에 의하면, 웨이퍼 하부면과 접촉하여 웨이퍼를 소정위치로 옮기는 웨이퍼 홀더와, 상기 웨이퍼 홀더와 연결되어 웨이퍼 홀더를 공정수행 영역으로 이동하게 하는 다수개의 작동부재와, 상기 웨이퍼 홀더 및 상기 작동부재의 이동운동을 제어하는 제어부로 구성되는 반도체 웨이퍼 이송장치에 있어서, 상기 웨이퍼 홀더의 상부면과 전면부에 웨이퍼의 존재유무를 확인하고 이송장치내의 벽면과의 충돌을 피하기 위한 감지기가 구비되어 있는 것을 특징으로 한다.According to the wafer transfer apparatus of the present invention for achieving the above object, a plurality of operations for moving the wafer holder in contact with the lower surface of the wafer to a predetermined position and the wafer holder connected to the wafer holder to move the process area A semiconductor wafer transfer device comprising a member, and a control unit for controlling movement of the wafer holder and the operation member, the semiconductor wafer transfer apparatus comprising: checking the presence or absence of a wafer on an upper surface and a front surface of the wafer holder, It is characterized in that the detector is provided to avoid the collision.
이하 첨부된 도면을 참조하여 본 고안의 상세한 설명을 하기로 한다.Hereinafter, the present invention will be described in detail with reference to the accompanying drawings.
도 1은 본 고안의 기술에 따른 웨이퍼 이송장치를 도시한 도면이다.1 is a view showing a wafer transfer apparatus according to the technology of the present invention.
상기 도면에 도시된 바와 같이, 본 고안의 웨이퍼 이송장치는 웨이퍼(1) 하부면과 접촉하되 웨이퍼 이송시는 웨이퍼를 고정시키는 웨이퍼 홀더(3)와, 상기 웨이퍼 홀더(3)와 연결되어 웨이퍼 홀더(3)를 임의의 위치로 자유롭게 이동시키는 작동부재(7) 및 상기 작동부재(7)의 운동을 제어하는 제어부(9)로 구성된다.As shown in the figure, the wafer transfer device of the present invention is in contact with the lower surface of the wafer 1, but the wafer holder (3) for fixing the wafer during wafer transfer, and the wafer holder 3 is connected to the wafer holder An operating member 7 for freely moving (3) to an arbitrary position, and a control unit 9 for controlling the movement of the operating member (7).
이 때 상기 웨이퍼(1)와 접촉하는 본 고안의 웨이퍼 홀더(3) 상단부에는 웨이퍼(1) 존재 유무룰 감지하여 웨이퍼 이송진행 여부를 결정하게 하는 감지기(11)가 구비된다. 즉, 상기 웨이퍼 홀더(11)의 상부에 웨이퍼(1)가 존재하지 않을 경우에는 감지기(11)에서 그 사실을 파악하여 웨이퍼 이송장치의 작동부재(7)의 이송운동을 정지시키고 웨이퍼(1)가 존재할 경우는 웨이퍼 이송운동이 그대로 진행되도록 한다.At this time, the upper end of the wafer holder 3 of the present invention in contact with the wafer 1 is provided with a detector 11 for detecting the presence of the wafer (1) to determine whether the wafer transfer proceeds. That is, when the wafer 1 does not exist in the upper portion of the wafer holder 11, the sensor 11 detects the fact and stops the transfer movement of the operating member 7 of the wafer transfer device, and the wafer 1 If is present, the wafer transfer motion is allowed to proceed as it is.
여기서 상기 웨이퍼 홀더(3) 상부면에 장착되는 감지기(11)는 웨이퍼 홀더(3) 상부면으로 부터 돌출되어 나오지 않도록 하여 웨이퍼(1)와의 접촉에 따른 영향을 주지 않도록 한다.Here, the detector 11 mounted on the upper surface of the wafer holder 3 may not protrude from the upper surface of the wafer holder 3 so as not to affect the contact with the wafer 1.
또한 상기 웨이퍼 홀더(3)의 선단부에도 역시 감지기(13)를 부착하여 웨이퍼 홀더(3)가 소정 반도체 장비의 벽에 부딪힐 경우, 상기 감지기(13)의 인식에 의해 이송장치의 각 작동부재(7) 운동을 조절하도록 한다. 즉 이송장치의 오류로 이송장치가 장비의 벽등에 부딛치기 전에 감지기(13)가 먼저 벽과의 거리를 감지해 작동부재(7) 자체의 움직임을 정지시킨다.In addition, the detector 13 is also attached to the tip of the wafer holder 3 so that when the wafer holder 3 hits the wall of the semiconductor device, each operating member of the transfer device may be recognized by the recognition of the detector 13. 7) Adjust your exercise. That is, before the transfer device hits the wall of the equipment due to the error of the transfer device, the detector 13 first detects the distance to the wall to stop the movement of the operating member 7 itself.
한편, 상기 웨이퍼 홀더(3) 상부와 선단부에 각각 설치된 감지기(11,13)에 연결된 웨이퍼 이송장치 작동부재(7)의 이송운동을 제어하는 감지기 조정회로(미도시)는 작동부재 제어부(9)내에 설치되도록 하되, 전선 등을 이용하여 웨이퍼(1)와 접촉이 이뤄지지 않는 부위에 설치되도록 한다.On the other hand, the detector adjustment circuit (not shown) for controlling the transfer movement of the wafer transfer device operating member 7 connected to the detectors 11 and 13 respectively installed on the top and the front end of the wafer holder 3, the operating member control unit 9 It is to be installed in, but to be installed in a portion that is not in contact with the wafer (1) using an electric wire or the like.
이 때 상기 감지기 조정회로는 소프트웨어로도 조작이 가능하도록 하고, 하드웨어적으로 회로를 설계해서 조정이 되도록 할 수도 있다.In this case, the sensor adjustment circuit can be operated by software, and the circuit can be designed and adjusted by hardware.
이상 상술한 바와 같이, 본 고안의 기술에 따른 웨이퍼 이송장치는 웨이퍼와 접촉되는 웨이퍼 홀더 전면부 및 선단부에 감지기를 구비하고, 상기 감지기의 감지에 의해 웨이퍼 이송 작동부재의 이송운동을 제어하는 제어부를 구비함으로써, 조래의 웨이퍼 이송장치에 있어서 웨이퍼 이송시 일정한 순서에 의해 기계적으로 웨이퍼를 이송시키지 않고 직접 감지기에 의해 웨이퍼의 존재 유무를 감지함에 의해 웨이퍼를 이동함으로써 불필요한 운동을 없애 제조공정의 효율을 기할 수 있다.As described above, the wafer transfer apparatus according to the technology of the present invention includes a control unit having a detector at a front end portion and a front end of a wafer holder in contact with the wafer, and controlling a transfer movement of the wafer transfer operation member by sensing the detector. In the conventional wafer transfer apparatus, the wafer is moved by detecting the presence of the wafer by a direct detector without mechanically transferring the wafer in a certain order during wafer transfer, thereby eliminating unnecessary movement to increase the efficiency of the manufacturing process. Can be.
Claims (4)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| KR2019960034182U KR19980020918U (en) | 1996-10-17 | 1996-10-17 | Wafer Transfer Device |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| KR2019960034182U KR19980020918U (en) | 1996-10-17 | 1996-10-17 | Wafer Transfer Device |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| KR19980020918U true KR19980020918U (en) | 1998-07-15 |
Family
ID=53979311
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| KR2019960034182U KR19980020918U (en) | 1996-10-17 | 1996-10-17 | Wafer Transfer Device |
Country Status (1)
| Country | Link |
|---|---|
| KR (1) | KR19980020918U (en) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| KR100538265B1 (en) * | 1998-08-05 | 2006-05-17 | 삼성전자주식회사 | Wafer transfer chuck assembly for horizontal diffusion equipment and chuck control device using same |
-
1996
- 1996-10-17 KR KR2019960034182U patent/KR19980020918U/en not_active Application Discontinuation
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| KR100538265B1 (en) * | 1998-08-05 | 2006-05-17 | 삼성전자주식회사 | Wafer transfer chuck assembly for horizontal diffusion equipment and chuck control device using same |
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