KR19980012641U - Aluminum deposition equipment for cathode ray tube panel manufacturing - Google Patents
Aluminum deposition equipment for cathode ray tube panel manufacturing Download PDFInfo
- Publication number
- KR19980012641U KR19980012641U KR2019960026218U KR19960026218U KR19980012641U KR 19980012641 U KR19980012641 U KR 19980012641U KR 2019960026218 U KR2019960026218 U KR 2019960026218U KR 19960026218 U KR19960026218 U KR 19960026218U KR 19980012641 U KR19980012641 U KR 19980012641U
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- South Korea
- Prior art keywords
- aluminum
- ray tube
- cathode ray
- present
- diffusion
- Prior art date
Links
- 230000008021 deposition Effects 0.000 title claims abstract description 18
- 238000004519 manufacturing process Methods 0.000 title claims abstract description 10
- 229910052782 aluminium Inorganic materials 0.000 title abstract description 39
- XAGFODPZIPBFFR-UHFFFAOYSA-N aluminium Chemical compound [Al] XAGFODPZIPBFFR-UHFFFAOYSA-N 0.000 title abstract description 39
- 238000009792 diffusion process Methods 0.000 claims abstract description 21
- 239000010409 thin film Substances 0.000 abstract description 6
- 238000012423 maintenance Methods 0.000 abstract description 5
- 230000000694 effects Effects 0.000 description 4
- 238000005137 deposition process Methods 0.000 description 3
- OAICVXFJPJFONN-UHFFFAOYSA-N Phosphorus Chemical compound [P] OAICVXFJPJFONN-UHFFFAOYSA-N 0.000 description 2
- 239000011248 coating agent Substances 0.000 description 2
- 238000000576 coating method Methods 0.000 description 2
- 238000000034 method Methods 0.000 description 2
- RYGMFSIKBFXOCR-UHFFFAOYSA-N Copper Chemical compound [Cu] RYGMFSIKBFXOCR-UHFFFAOYSA-N 0.000 description 1
- 238000004891 communication Methods 0.000 description 1
- 229910052802 copper Inorganic materials 0.000 description 1
- 239000010949 copper Substances 0.000 description 1
- 239000010408 film Substances 0.000 description 1
- 238000010438 heat treatment Methods 0.000 description 1
- 150000002500 ions Chemical class 0.000 description 1
- 238000002844 melting Methods 0.000 description 1
- 230000008018 melting Effects 0.000 description 1
- 238000010309 melting process Methods 0.000 description 1
- 229910052751 metal Inorganic materials 0.000 description 1
- 239000002184 metal Substances 0.000 description 1
- 238000007740 vapor deposition Methods 0.000 description 1
Classifications
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J9/00—Apparatus or processes specially adapted for the manufacture, installation, removal, maintenance of electric discharge tubes, discharge lamps, or parts thereof; Recovery of material from discharge tubes or lamps
- H01J9/20—Manufacture of screens on or from which an image or pattern is formed, picked up, converted or stored; Applying coatings to the vessel
- H01J9/22—Applying luminescent coatings
- H01J9/227—Applying luminescent coatings with luminescent material discontinuously arranged, e.g. in dots or lines
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J2209/00—Apparatus and processes for manufacture of discharge tubes
- H01J2209/01—Generalised techniques
- H01J2209/012—Coating
- H01J2209/015—Machines therefor
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J29/00—Details of cathode-ray tubes or of electron-beam tubes of the types covered by group H01J31/00
- H01J29/02—Electrodes; Screens; Mounting, supporting, spacing or insulating thereof
- H01J29/10—Screens on or from which an image or pattern is formed, picked up, converted or stored
- H01J29/18—Luminescent screens
- H01J29/28—Luminescent screens with protective, conductive or reflective layers
Landscapes
- Engineering & Computer Science (AREA)
- Manufacturing & Machinery (AREA)
- Physical Vapour Deposition (AREA)
- Formation Of Various Coating Films On Cathode Ray Tubes And Lamps (AREA)
Abstract
본 고안은 음극선관 패널의 형광면 위에 형성되는 알루미늄 박막의 형성을 위하여 보트히터에서 제한된 시간동안 용융상태의 알루미늄이 확산되도록 한 음극선관 패널제조용 알루미늄 증착설비를 개시한다.The present invention discloses an aluminum deposition apparatus for manufacturing a cathode ray tube panel in which molten aluminum is diffused for a limited time in a boat heater to form an aluminum thin film formed on a fluorescent surface of a cathode ray tube panel.
본 고안은 알루미늄 증착을 위한 더미콘의 저면 중앙에 통공을 형성하고 그 하방에 보트히터를 설치하여 더미콘의 저면 중앙상방에 통공의 개폐를 제어할 수 있는 노즐판 등으로 된 제한 확산수단 및 습동수단을 설치하여서 된다.The present invention forms a through hole at the bottom center of the dummy cone for aluminum deposition and installs a boat heater under the bottom of the dummy cone. The means should be provided.
이에 따라 본 고안은 습동수단을 구동하여 제한확산수단의 노즐판에 형성된 확산공으로 최적의 시간동안 패널에 최적의 두께로 알루미늄 박막이 형성되도록 할 수 있는 것이어서 알루미늄의 불필요한 소모를 방지하고 진공펌프 전력비용을 절감하여 유지비용을 감소시키고 보수비용을 절약할 수 있게 되는 효과가 있다.Accordingly, the present invention is to enable the aluminum thin film to be formed on the panel with the optimal thickness by the diffusion hole formed in the nozzle plate of the limited diffusion means by driving the sliding means to prevent unnecessary consumption of aluminum and the power consumption of the vacuum pump By reducing the cost, maintenance costs can be reduced and maintenance costs can be saved.
Description
제 1 도는 종래의 음극선관 패널제조용 알루미늄 증착설비의 구조를 보인 종단면도.1 is a longitudinal sectional view showing the structure of a conventional aluminum deposition equipment for manufacturing a cathode ray tube panel.
제 2 도는 본 고안에 의한 음극선관 패널제조용 알루미늄 증착설비의 구조를 보인 종단면도.Figure 2 is a longitudinal sectional view showing the structure of the aluminum deposition equipment for manufacturing a cathode ray tube panel according to the present invention.
제 3 도는 본 고안에 의한 음극선관 패널제조용 알루미늄 증착설비의 작동을 보인 종단면도.Figure 3 is a longitudinal sectional view showing the operation of the aluminum deposition equipment for manufacturing a cathode ray tube panel according to the present invention.
제 4 도의 a, b, c는 본 고안에 의한 음극선관 패널제조용 알루미늄 증착설비의 습동 노즐구조를 예시한 종단면도.Figure 4 a, b, c is a longitudinal cross-sectional view illustrating a sliding nozzle structure of the aluminum deposition equipment for manufacturing a cathode ray tube panel according to the present invention.
*도면의 주요부분에 대한 부호의 설명** Description of the symbols for the main parts of the drawings *
1 : 진공펌프2 : 재치부1: vacuum pump 2: mounting part
4 더미콘5 : 통공4 dummy cone 5: through hole
6 : 보트히터8 : 습동수단6: boat heater 8: sliding means
9 : 확산공10 : 노즐판9 Diffusion Hole 10 Nozzle Plate
12 : 제한 확산수단12: limited diffusion means
본 고안은 음극선관 패널제조용 알루미늄 증착설비에 관한 것으로 더욱 상세히는 패널에 형성시킨 형광면위에 알루미늄 박막을 형성시키기 위한 알루미늄 증착설비에 관한 것이다.The present invention relates to an aluminum deposition apparatus for manufacturing a cathode ray tube panel, and more particularly, to an aluminum deposition apparatus for forming an aluminum thin film on the fluorescent surface formed on the panel.
주지하는 바와 같이 알루미늄 증착공정은 스크린 공정을 완료한 후 패널에 필름을 형성시키고 이어서 알루미늄 증착을 실시함으로써 형광면에서 발광되는 빛이 메탈백효과에 의하여 전방으로 100% 반사되도록 함으로써 휘도 향상효과를 얻고, 아울러 이온에 의한 형광면 손상을 방지하며, 형광면이 -전위로 대전되지 않도록 하였던 것이다.As is well known, the aluminum deposition process is performed by forming a film on the panel after completing the screen process and then performing aluminum deposition to obtain a brightness enhancement effect by reflecting light emitted from the fluorescent surface 100% forward by the metal back effect. In addition, to prevent damage to the fluorescent surface by ions, and to prevent the fluorescent surface is charged to -potential.
이러한 알루미늄 증착공정을 실시하기 위하여 종전에는 제 1 도로 도시한 바와 같이 설비를 사용하였던 것이다.In order to perform such an aluminum deposition process, a facility was used as shown in FIG.
이에서 확인되는 바와 같이 종래에는 주로 알루미늄 용융조를 구비한 보트 히터(101)와, 로터리 펌프와 확산펌프를 구비하여서 된 진공흡입수단 그리고 탄성질의 재치부(102)를 구비하여서 된 더미콘(104)을 사용하여 알루미늄 증착을 실시하였던 것이며, 이는 초기에는 로타리 펌프를 사용하여 더미콘(104) 내부를 중진공 상태로 한 후 확산펌프로 고진공상태로 하며 이어서 보트히터(101)를 가열하여 용융된 알루미늄이 확산되면서 패널(103)의 형광면을 덮도록 하여 증착시켰던 것이다.As can be seen from this, conventionally, the dummy heater 104 including a boat heater 101 mainly provided with an aluminum melting tank, a vacuum suction means provided with a rotary pump and a diffusion pump, and an elastic mounting part 102. Aluminum deposition was carried out using a), which was initially made into a medium vacuum state using a rotary pump to a high vacuum state using a diffusion pump, and then heated by the boat heater 101 to be molten aluminum. The deposition was performed by covering the fluorescent surface of the panel 103 while being diffused.
그러므로 이러한 증착과정에서 용융된 알루미늄의 확산범위가 불필요하게 넓게 되어 손실량이 많게 되는 문제점이 있으며, 아울러 불필요하게 더미콘의 내측에 증착된 알루미늄의 제거를 위하여 보수작업이 필요하게 되는 문제점이 있는 것이어서 이에 따른 보수 인원의 인건비 부담이 가중되었던 문제점이 있는 것이다.Therefore, there is a problem in that the diffusion range of the molten aluminum in the deposition process is unnecessarily wide, so there is a large amount of loss, and in addition, there is a problem that need to be repaired to remove the aluminum deposited inside the dummy cone unnecessarily. There is a problem that the labor cost burden of the maintenance personnel was increased.
또한 종래에는 보트히터(101)의 열에 의하여 발생된 가스가 더미콘(104) 내부에 존재하게 되어 고진공을 유지하기 어려우며 따라서 진공펌프의 용량을 과도하게 증가시켜야 하므로 시설비와 전력비용이 증가하게 되는 문제점이 있는 것이다.In addition, since the gas generated by the heat of the boat heater 101 is present in the dummy cone 104, it is difficult to maintain a high vacuum, and thus the facility cost and the power cost are increased because the capacity of the vacuum pump is excessively increased. Is there.
상술한 종래의 문제점을 감안하여 본 고안의 목적은 증착에 필요한 시간동안만 용융상태의 알루미늄이 진공상태의 더미콘 측으로 확산되어 증착되도록 함으로써 적량의 알루미늄이 최적의 시간동안 분출될 수 있도록 한 음극선관 제조용 알루미늄 증착설비를 제공하는 것이다.In view of the above-described conventional problems, an object of the present invention is to provide a suitable amount of aluminum to be ejected for an optimal time by allowing aluminum in a molten state to be diffused and deposited to a vacuum dummy cone side only for a time required for deposition. It is to provide an aluminum deposition equipment for manufacturing.
상술한 목적을 달성하기 위하여 본 고안은 진공펌프와 연결되고, 상방에 탄성질의 재치부를 구비하여서 된 더미콘에 있어서, 저면 중앙에 형성된 통공과, 그 하방에 접하여 설치된 보트히터와, 더미콘의 저면상방에 습동수단에 의하여 습동되며 확산공이 형성된 노즐판을 갖는 제한 확산수단으로 된 음극선관 패널제조용 알루미늄 증착설비를 제안한다.In order to achieve the above object, the present invention is connected to a vacuum pump, the dummy cone provided with an elastic mounting portion in the upper, the through-hole formed in the bottom center, the boat heater installed in contact with the bottom, the bottom of the dummy cone An aluminum vapor deposition apparatus for cathode ray tube panel manufacturing comprising a limited diffusion means having a nozzle plate formed by a sliding hole and slid upward by a sliding means is proposed.
상술한 구성에 의하여 보 고안은 최적의 시간동안 패널의 내측으로만 알루미늄을 확산시켜 증착시킬 수 있게 되므로 알루미늄의 손실량이 극소화되도록 할 수 있어서 원가 절감을 도모할 수 있으며, 패널 내측의 형광면을 제외한 여타의 면에는 알루미늄이 거의 부착되지 않으므로 불필요하게 부착된 알루미늄을 제거하기 위한 빈번한 정비보수가 불필요하게 되는 것이어서 인건비 절감에도 기여할 수 있게 되는 것이다.According to the above configuration, it is possible to diffuse and deposit aluminum only into the inside of the panel for the optimal time, thereby minimizing the loss of aluminum, thereby reducing the cost, and excluding the fluorescent surface inside the panel. Since almost no aluminum is attached to the surface of the surface, frequent maintenance for removing the unnecessary aluminum is unnecessary, thereby contributing to labor cost reduction.
또한 본 고안에서는 더미콘의 내부의 진공도가 알루미늄 용해과정에서 발생되는 가스에 의하여 저하될 우려가 없으므로 고진공도를 유지할 수 있게 되어 양호한 증착효과를 얻을 수 있음은 물론 진공 펌프의 가동에 필요한 전력을 절감할 수 있게 되는 것이어서 유지비 절감에도 기여할 수 있게 되는 유용한 효과가 있다.In addition, in the present design, since the degree of vacuum inside the dummy cone may not be lowered by the gas generated in the aluminum melting process, high vacuum may be maintained, thereby obtaining good deposition effect and reducing power required for operation of the vacuum pump. Being able to do so has a useful effect that can contribute to lower maintenance costs.
이하 첨부된 도면을 참조하여 본 고안을 더욱 구체적으로 설명한다.Hereinafter, the present invention will be described in more detail with reference to the accompanying drawings.
제 2 도 내지 제 3 도에서는 본 고안에 의한 알루미늄 증착설비의 구조를 단면도로 도시하였다.2 to 3 illustrate the structure of the aluminum deposition apparatus according to the present invention in a cross-sectional view.
이에서 볼 수 있는 바와 같이 본 고안은 로타리펌프와 확산펌프 등으로 구성된 진공펌프(1)와 연결되고, 상방에 돌기(3) 및 탄성질의 재치부(2)를 구비하여서 된 공지의 더미콘(4)에 있어서, 저면 중앙에 형성된 통공(5)과, 그 하방에 접하여 가열수단으로 설치된 보트히터(6)와, 더미콘(4)의 저면 상방에 솔레노이드 또는 에어실린더나 유압실린더 등 및 리턴 스프링(7) 등의 습동수단(8)에 이하여 습동되며 확산공(9)을 갖는 노즐판(10)과 노즐판(10)의 습동을 안내하기 위한 지지구(11)를 구비한 제한 확산수단(12)으로 된 것이며 미설명부호 13은 패널이다.As can be seen from this, the present invention is connected to a vacuum pump 1 composed of a rotary pump and a diffusion pump, etc., and is provided with a known dummy cone having a protrusion 3 and an elastic mounting part 2 thereon. In 4), the through-hole 5 formed in the center of the bottom face, the boat heater 6 provided in contact with the lower part by heating means, the solenoid or air cylinder, the hydraulic cylinder, etc. and return spring above the bottom face of the dummy cone 4 Limited diffusion means provided with a nozzle plate 10 which slides following the sliding means 8 such as (7) and the like and has a supporter 11 for guiding sliding of the nozzle plate 10. (12) and reference numeral 13 is a panel.
이와 같이 된 본 고안은 먼저 보트 히터에 알루미늄 리본을 얹고 재치부(2)에 패널(13)을 재치한 다음 로터리펌프에 의하여 1차 진공이 걸리도록 하여 더미콘(4)의 내부가 중진공 상태로 되도록 하는 것이다.According to the present invention, the aluminum ribbon is placed on the boat heater, the panel 13 is placed on the mounting unit 2, and the primary vacuum is applied by the rotary pump so that the inside of the dummy cone 4 is in a medium vacuum state. To make it possible.
이와 같이 한 후 확산펌프에 의하여 2차 진공이 걸리도록 하여 고진공상태가 되도록 하여 이때 보트히터(6)에 전원을 공급하여 알루미늄이 용융상태로 되도록 한 다음 습동수단(8)을 작동시켜 제한 확산수단(12)의 노즐판(10)이 습동되도록 함으로써 확산공(9)이 더미콘(4) 저면 중앙의 통공(5)과 연통되도록 한다.After this, the secondary vacuum is applied by the diffusion pump to obtain a high vacuum state. At this time, power is supplied to the boat heater 6 so that the aluminum is in a molten state, and then the sliding means 8 is operated to limit the diffusion means. By allowing the nozzle plate 10 of 12 to slide, the diffusion hole 9 is in communication with the through hole 5 in the center of the bottom surface of the dummy cone 4.
그 결과 용융상태의 알루미늄이 통공(5)과 확산공(9)을 통하여 고진공상태의 더미콘(4)측으로 확산되는 것이며, 그 결과 더미콘(4)의 상방에 재치되어 있는 패널(13)의 내면 형광체에 도포될 수 있는 것이다.As a result, the molten aluminum diffuses through the through hole 5 and the diffusion hole 9 toward the high-concentration dummy cone 4, and as a result, the panel 13 placed above the dummy cone 4 is disposed. It can be applied to the inner phosphor.
이어서 습동수단(8)에 의하여 습동되었던 노즐판(10)은 리턴 스프링(7)에 의하여 복귀될 수 있는 것이며, 따라서 통공(5)과 노즐판(10)의 확산공(9)이 다시 어긋나므로 통공(5)이 폐쇄된 상태로 되는 것이며 이러한 과정을 반복하여 패널(13)의 형광체 위에 소정두께의 알루미늄 박막이 형성될 수 있는 것이다.Subsequently, the nozzle plate 10 which has been slid by the sliding means 8 can be returned by the return spring 7, so that the through hole 5 and the diffusion hole 9 of the nozzle plate 10 are displaced again. The through hole 5 is in a closed state, and by repeating this process, an aluminum thin film having a predetermined thickness may be formed on the phosphor of the panel 13.
또한 본 고안은 제 4 동 a, b, c로 보인 바와 같이 노즐판(10)의 확산공(9) 단면을 변화시킴으로써 알루미늄 박막의 도포상태를 조절할 수 있게 된다. 즉 제 4 도 a로 보인 상태에서는 단면이 단순한 통공(5)으로 되어 있으므로 확산되는 각도가 중간정도로 되는 것이고, 제 4 도 b로 보인 상태에서는 바깥쪽의 직경이 안쪽의 직경보다 크므로 확산각도가 넓게 되는 것이며, 제 4 도 c로 보인 상태에서는 바깥쪽의 직경이 안쪽의 직경보다 작으므로 확산각도가 좁게 되는 것이다.In addition, the present invention can control the coating state of the aluminum thin film by changing the cross section of the diffusion hole 9 of the nozzle plate 10 as shown in the fourth copper a, b, c. That is, in the state shown in FIG. 4 a, the cross section is a simple through hole 5. Therefore, the angle of diffusion is about halfway. In the state shown in FIG. 4 b, the angle of diffusion is larger than the inside diameter. In the state shown in Fig. 4C, the outside diameter is smaller than the inside diameter, so that the diffusion angle is narrow.
이에 따라 패널(13)에 도포되는 알루미늄 박막의 두께 및 도포 범위를 조절할 수 잇게 되는 것이어서 알루미늄 소모량을 최소화하면서 최적의 증착상태를 얻을 수 있게 되는 것이다.Accordingly, it is possible to control the thickness and coating range of the aluminum thin film applied to the panel 13, so that the optimum deposition state can be obtained while minimizing the aluminum consumption.
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KR2019960026218U KR200159856Y1 (en) | 1996-08-28 | 1996-08-28 | Aluminum depositing equipment for manufacturing crt panel |
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KR2019960026218U KR200159856Y1 (en) | 1996-08-28 | 1996-08-28 | Aluminum depositing equipment for manufacturing crt panel |
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