KR102749767B1 - 약한 라벨링을 사용한 반도체 시편들에서의 결함들의 검출 - Google Patents

약한 라벨링을 사용한 반도체 시편들에서의 결함들의 검출 Download PDF

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KR102749767B1
KR102749767B1 KR1020210049665A KR20210049665A KR102749767B1 KR 102749767 B1 KR102749767 B1 KR 102749767B1 KR 1020210049665 A KR1020210049665 A KR 1020210049665A KR 20210049665 A KR20210049665 A KR 20210049665A KR 102749767 B1 KR102749767 B1 KR 102749767B1
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이라드 펠렉
란 슐레옌
보아즈 코헨
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어플라이드 머티리얼즈 이스라엘 리미티드
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    • G06V10/443—Local feature extraction by analysis of parts of the pattern, e.g. by detecting edges, contours, loops, corners, strokes or intersections; Connectivity analysis, e.g. of connected components by matching or filtering
    • G06V10/449—Biologically inspired filters, e.g. difference of Gaussians [DoG] or Gabor filters
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KR1020210049665A 2020-06-03 2021-04-16 약한 라벨링을 사용한 반도체 시편들에서의 결함들의 검출 Active KR102749767B1 (ko)

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US16/892,139 US11379972B2 (en) 2020-06-03 2020-06-03 Detecting defects in semiconductor specimens using weak labeling
US16/892,139 2020-06-03

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CN113763312B (zh) 2024-04-19
TW202147163A (zh) 2021-12-16
JP2021190716A (ja) 2021-12-13
CN118297906B (zh) 2025-07-29
US11379972B2 (en) 2022-07-05
US20210383530A1 (en) 2021-12-09
CN113763312A (zh) 2021-12-07
JP7633094B2 (ja) 2025-02-19
TWI864281B (zh) 2024-12-01
CN118297906A (zh) 2024-07-05
US20220301151A1 (en) 2022-09-22
US11790515B2 (en) 2023-10-17

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