KR102669269B1 - Compound, latent base generator, photosensitive resin composition containing the compound, and cured product - Google Patents
Compound, latent base generator, photosensitive resin composition containing the compound, and cured product Download PDFInfo
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- KR102669269B1 KR102669269B1 KR1020207000839A KR20207000839A KR102669269B1 KR 102669269 B1 KR102669269 B1 KR 102669269B1 KR 1020207000839 A KR1020207000839 A KR 1020207000839A KR 20207000839 A KR20207000839 A KR 20207000839A KR 102669269 B1 KR102669269 B1 KR 102669269B1
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- 239000011342 resin composition Substances 0.000 title claims abstract description 44
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- 125000004432 carbon atom Chemical group C* 0.000 claims description 116
- 125000001931 aliphatic group Chemical group 0.000 claims description 56
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- 125000000623 heterocyclic group Chemical group 0.000 claims description 19
- 125000000449 nitro group Chemical group [O-][N+](*)=O 0.000 claims description 19
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- NIMLQBUJDJZYEJ-UHFFFAOYSA-N isophorone diisocyanate Chemical compound CC1(C)CC(N=C=O)CC(C)(CN=C=O)C1 NIMLQBUJDJZYEJ-UHFFFAOYSA-N 0.000 description 1
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- 239000000395 magnesium oxide Substances 0.000 description 1
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- WPBNNNQJVZRUHP-UHFFFAOYSA-L manganese(2+);methyl n-[[2-(methoxycarbonylcarbamothioylamino)phenyl]carbamothioyl]carbamate;n-[2-(sulfidocarbothioylamino)ethyl]carbamodithioate Chemical compound [Mn+2].[S-]C(=S)NCCNC([S-])=S.COC(=O)NC(=S)NC1=CC=CC=C1NC(=S)NC(=O)OC WPBNNNQJVZRUHP-UHFFFAOYSA-L 0.000 description 1
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- 125000000740 n-pentyl group Chemical group [H]C([H])([H])C([H])([H])C([H])([H])C([H])([H])C([H])([H])* 0.000 description 1
- 239000002116 nanohorn Substances 0.000 description 1
- MZYHMUONCNKCHE-UHFFFAOYSA-N naphthalene-1,2,3,4-tetracarboxylic acid Chemical compound C1=CC=CC2=C(C(O)=O)C(C(=O)O)=C(C(O)=O)C(C(O)=O)=C21 MZYHMUONCNKCHE-UHFFFAOYSA-N 0.000 description 1
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- 125000006501 nitrophenyl group Chemical group 0.000 description 1
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- 239000002736 nonionic surfactant Substances 0.000 description 1
- 125000001400 nonyl group Chemical group [H]C([*])([H])C([H])([H])C([H])([H])C([H])([H])C([H])([H])C([H])([H])C([H])([H])C([H])([H])C([H])([H])[H] 0.000 description 1
- 239000010680 novolac-type phenolic resin Substances 0.000 description 1
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- 125000002971 oxazolyl group Chemical group 0.000 description 1
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- 229910052698 phosphorus Inorganic materials 0.000 description 1
- 239000011574 phosphorus Substances 0.000 description 1
- IEQIEDJGQAUEQZ-UHFFFAOYSA-N phthalocyanine Chemical class N1C(N=C2C3=CC=CC=C3C(N=C3C4=CC=CC=C4C(=N4)N3)=N2)=C(C=CC=C2)C2=C1N=C1C2=CC=CC=C2C4=N1 IEQIEDJGQAUEQZ-UHFFFAOYSA-N 0.000 description 1
- 239000001007 phthalocyanine dye Substances 0.000 description 1
- 239000001739 pinus spp. Substances 0.000 description 1
- 229920003023 plastic Polymers 0.000 description 1
- 239000004033 plastic Substances 0.000 description 1
- 238000007747 plating Methods 0.000 description 1
- 229910052697 platinum Inorganic materials 0.000 description 1
- 229920005670 poly(ethylene-vinyl chloride) Polymers 0.000 description 1
- 229920003229 poly(methyl methacrylate) Polymers 0.000 description 1
- 229920002037 poly(vinyl butyral) polymer Polymers 0.000 description 1
- 229920002857 polybutadiene Polymers 0.000 description 1
- 229920000728 polyester Polymers 0.000 description 1
- 229920005906 polyester polyol Polymers 0.000 description 1
- 229920000570 polyether Polymers 0.000 description 1
- 229920000151 polyglycol Polymers 0.000 description 1
- 239000010695 polyglycol Substances 0.000 description 1
- 229920000642 polymer Polymers 0.000 description 1
- 239000004926 polymethyl methacrylate Substances 0.000 description 1
- 229920000137 polyphosphoric acid Polymers 0.000 description 1
- 150000007519 polyprotic acids Polymers 0.000 description 1
- 229920002223 polystyrene Polymers 0.000 description 1
- 239000004800 polyvinyl chloride Substances 0.000 description 1
- 229920000915 polyvinyl chloride Polymers 0.000 description 1
- 229910000027 potassium carbonate Inorganic materials 0.000 description 1
- CHWRSCGUEQEHOH-UHFFFAOYSA-N potassium oxide Chemical compound [O-2].[K+].[K+] CHWRSCGUEQEHOH-UHFFFAOYSA-N 0.000 description 1
- 229910001950 potassium oxide Inorganic materials 0.000 description 1
- 239000002244 precipitate Substances 0.000 description 1
- 229960000380 propiolactone Drugs 0.000 description 1
- 235000019260 propionic acid Nutrition 0.000 description 1
- 125000001436 propyl group Chemical group [H]C([*])([H])C([H])([H])C([H])([H])[H] 0.000 description 1
- 238000000746 purification Methods 0.000 description 1
- UBQKCCHYAOITMY-UHFFFAOYSA-N pyridin-2-ol Chemical compound OC1=CC=CC=N1 UBQKCCHYAOITMY-UHFFFAOYSA-N 0.000 description 1
- FYNROBRQIVCIQF-UHFFFAOYSA-N pyrrolo[3,2-b]pyrrole-5,6-dione Chemical class C1=CN=C2C(=O)C(=O)N=C21 FYNROBRQIVCIQF-UHFFFAOYSA-N 0.000 description 1
- 150000003242 quaternary ammonium salts Chemical class 0.000 description 1
- IUVKMZGDUIUOCP-BTNSXGMBSA-N quinbolone Chemical compound O([C@H]1CC[C@H]2[C@H]3[C@@H]([C@]4(C=CC(=O)C=C4CC3)C)CC[C@@]21C)C1=CCCC1 IUVKMZGDUIUOCP-BTNSXGMBSA-N 0.000 description 1
- IZMJMCDDWKSTTK-UHFFFAOYSA-N quinoline yellow Chemical class C1=CC=CC2=NC(C3C(C4=CC=CC=C4C3=O)=O)=CC=C21 IZMJMCDDWKSTTK-UHFFFAOYSA-N 0.000 description 1
- 150000003248 quinolines Chemical class 0.000 description 1
- 230000005855 radiation Effects 0.000 description 1
- 150000003254 radicals Chemical class 0.000 description 1
- 239000002994 raw material Substances 0.000 description 1
- 150000003839 salts Chemical class 0.000 description 1
- 229920006395 saturated elastomer Polymers 0.000 description 1
- 238000007650 screen-printing Methods 0.000 description 1
- 125000002914 sec-butyl group Chemical group [H]C([H])([H])C([H])([H])C([H])(*)C([H])([H])[H] 0.000 description 1
- 150000003346 selenoethers Chemical class 0.000 description 1
- 230000001235 sensitizing effect Effects 0.000 description 1
- RMAQACBXLXPBSY-UHFFFAOYSA-N silicic acid Chemical compound O[Si](O)(O)O RMAQACBXLXPBSY-UHFFFAOYSA-N 0.000 description 1
- 239000000377 silicon dioxide Substances 0.000 description 1
- 229910052709 silver Inorganic materials 0.000 description 1
- 239000004332 silver Substances 0.000 description 1
- 239000000600 sorbitol Substances 0.000 description 1
- 235000015096 spirit Nutrition 0.000 description 1
- 239000003381 stabilizer Substances 0.000 description 1
- 125000004079 stearyl group Chemical group [H]C([*])([H])C([H])([H])C([H])([H])C([H])([H])C([H])([H])C([H])([H])C([H])([H])C([H])([H])C([H])([H])C([H])([H])C([H])([H])C([H])([H])C([H])([H])C([H])([H])C([H])([H])C([H])([H])C([H])([H])C([H])([H])[H] 0.000 description 1
- PJANXHGTPQOBST-UHFFFAOYSA-N stilbene Chemical compound C=1C=CC=CC=1C=CC1=CC=CC=C1 PJANXHGTPQOBST-UHFFFAOYSA-N 0.000 description 1
- 235000021286 stilbenes Nutrition 0.000 description 1
- 238000003756 stirring Methods 0.000 description 1
- 229920003048 styrene butadiene rubber Polymers 0.000 description 1
- 239000000126 substance Substances 0.000 description 1
- 150000005846 sugar alcohols Polymers 0.000 description 1
- WGPCGCOKHWGKJJ-UHFFFAOYSA-N sulfanylidenezinc Chemical compound [Zn]=S WGPCGCOKHWGKJJ-UHFFFAOYSA-N 0.000 description 1
- 229910052717 sulfur Inorganic materials 0.000 description 1
- 125000004434 sulfur atom Chemical group 0.000 description 1
- 150000003467 sulfuric acid derivatives Chemical class 0.000 description 1
- 238000004381 surface treatment Methods 0.000 description 1
- 239000000454 talc Substances 0.000 description 1
- 229910052623 talc Inorganic materials 0.000 description 1
- 150000003505 terpenes Chemical class 0.000 description 1
- 125000000999 tert-butyl group Chemical group [H]C([H])([H])C(*)(C([H])([H])[H])C([H])([H])[H] 0.000 description 1
- 238000012360 testing method Methods 0.000 description 1
- YLQBMQCUIZJEEH-UHFFFAOYSA-N tetrahydrofuran Natural products C=1C=COC=1 YLQBMQCUIZJEEH-UHFFFAOYSA-N 0.000 description 1
- UFDHBDMSHIXOKF-UHFFFAOYSA-N tetrahydrophthalic acid Natural products OC(=O)C1=C(C(O)=O)CCCC1 UFDHBDMSHIXOKF-UHFFFAOYSA-N 0.000 description 1
- 229920002803 thermoplastic polyurethane Polymers 0.000 description 1
- 239000001017 thiazole dye Substances 0.000 description 1
- 150000003553 thiiranes Chemical group 0.000 description 1
- 239000010409 thin film Substances 0.000 description 1
- YODZTKMDCQEPHD-UHFFFAOYSA-N thiodiglycol Chemical compound OCCSCCO YODZTKMDCQEPHD-UHFFFAOYSA-N 0.000 description 1
- 229950006389 thiodiglycol Drugs 0.000 description 1
- 150000003568 thioethers Chemical class 0.000 description 1
- JOUDBUYBGJYFFP-FOCLMDBBSA-N thioindigo Chemical class S\1C2=CC=CC=C2C(=O)C/1=C1/C(=O)C2=CC=CC=C2S1 JOUDBUYBGJYFFP-FOCLMDBBSA-N 0.000 description 1
- NJRXVEJTAYWCQJ-UHFFFAOYSA-N thiomalic acid Chemical compound OC(=O)CC(S)C(O)=O NJRXVEJTAYWCQJ-UHFFFAOYSA-N 0.000 description 1
- NBOMNTLFRHMDEZ-UHFFFAOYSA-N thiosalicylic acid Chemical compound OC(=O)C1=CC=CC=C1S NBOMNTLFRHMDEZ-UHFFFAOYSA-N 0.000 description 1
- 229940103494 thiosalicylic acid Drugs 0.000 description 1
- 239000010936 titanium Substances 0.000 description 1
- 229910052719 titanium Inorganic materials 0.000 description 1
- OGIDPMRJRNCKJF-UHFFFAOYSA-N titanium oxide Inorganic materials [Ti]=O OGIDPMRJRNCKJF-UHFFFAOYSA-N 0.000 description 1
- DVKJHBMWWAPEIU-UHFFFAOYSA-N toluene 2,4-diisocyanate Chemical compound CC1=CC=C(N=C=O)C=C1N=C=O DVKJHBMWWAPEIU-UHFFFAOYSA-N 0.000 description 1
- 238000012546 transfer Methods 0.000 description 1
- 125000002023 trifluoromethyl group Chemical group FC(F)(F)* 0.000 description 1
- WFKWXMTUELFFGS-UHFFFAOYSA-N tungsten Chemical compound [W] WFKWXMTUELFFGS-UHFFFAOYSA-N 0.000 description 1
- 229910052721 tungsten Inorganic materials 0.000 description 1
- 239000010937 tungsten Substances 0.000 description 1
- 229940036248 turpentine Drugs 0.000 description 1
- 239000006097 ultraviolet radiation absorber Substances 0.000 description 1
- 125000002948 undecyl group Chemical group [H]C([*])([H])C([H])([H])C([H])([H])C([H])([H])C([H])([H])C([H])([H])C([H])([H])C([H])([H])C([H])([H])C([H])([H])C([H])([H])[H] 0.000 description 1
- 229930195735 unsaturated hydrocarbon Natural products 0.000 description 1
- 150000003672 ureas Chemical class 0.000 description 1
- 239000002966 varnish Substances 0.000 description 1
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Classifications
-
- C—CHEMISTRY; METALLURGY
- C07—ORGANIC CHEMISTRY
- C07D—HETEROCYCLIC COMPOUNDS
- C07D401/00—Heterocyclic compounds containing two or more hetero rings, having nitrogen atoms as the only ring hetero atoms, at least one ring being a six-membered ring with only one nitrogen atom
- C07D401/02—Heterocyclic compounds containing two or more hetero rings, having nitrogen atoms as the only ring hetero atoms, at least one ring being a six-membered ring with only one nitrogen atom containing two hetero rings
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Abstract
본 발명의 목적은 장파장의 자외선(특히, 365㎚)에 충분한 흡수를 나타내고, 만족할 수 있는 감도(염기 발생능)를 가지는 신규 화합물, 상기 화합물을 함유하는 잠재성 염기 발생제, 상기 화합물을 중합 개시제로서 함유하여 이루어지는 감광성 수지 조성물 및 그 경화물을 제공하는 것에 있다.
본 발명은 하기 일반식(I)로 나타내는 화합물을 제공한다. 더욱이, 본 발명은 상기 화합물을 함유하는 잠재성 염기 발생제, 상기 화합물을 포함하는 중합 개시제, 상기 중합 개시제(A) 및 감광성 수지(B)를 함유하는 감광성 수지 조성물, 그리고 그 경화물 및 그 제조 방법을 제공한다.
(식 중의 부호의 정의는 명세서를 참조.)
The object of the present invention is to develop a novel compound that exhibits sufficient absorption of long-wavelength ultraviolet rays (particularly, 365 nm) and has satisfactory sensitivity (base generation ability), a latent base generator containing the compound, and a polymerization initiator using the compound. The object is to provide a photosensitive resin composition containing and a cured product thereof.
The present invention provides a compound represented by the following general formula (I). Furthermore, the present invention provides a latent base generator containing the above compound, a polymerization initiator containing the above compound, a photosensitive resin composition containing the above polymerization initiator (A) and a photosensitive resin (B), and a cured product thereof and its preparation. Provides a method.
(Refer to the specification for definitions of symbols in the formula.)
Description
본 발명은 감광성 수지 조성물에 사용되는 중합 개시제로서 유용한 신규 화합물, 상기 화합물을 함유하는 잠재성 염기 발생제, 감광성 수지에 상기 화합물을 함유시켜 이루어지는 감광성 수지 조성물, 및 상기 감광성 수지 조성물의 경화물에 관한 것이다. The present invention relates to a novel compound useful as a polymerization initiator used in a photosensitive resin composition, a latent base generator containing the compound, a photosensitive resin composition formed by adding the compound to a photosensitive resin, and a cured product of the photosensitive resin composition. will be.
일반적으로, 감광성 수지 조성물은 감광성 수지에 광중합 개시제를 첨가한 것이며, 에너지 선(광) 조사에 의해 중합 경화 또는 현상시킬 수 있기 때문에, 광 경화성 잉크, 감광성 인쇄판, 각종 포토레지스트, 광 경화성 접착제 등에 사용되고 있다. In general, photosensitive resin compositions are made by adding a photopolymerization initiator to photosensitive resin, and can be polymerized, cured, or developed by irradiation with energy rays (light), so they are used in photocurable inks, photosensitive printing plates, various photoresists, photocurable adhesives, etc. there is.
광 중합 개시제는 에너지 선(광) 조사에 의해 발생하는 활성종의 차이로, 광 라디칼 발생제, 광 산 발생제, 광 염기 발생제로 나뉜다. 광 라디칼 발생제는 경화 속도가 빠르고 경화 후에 활성종이 잔존하지 않는 등의 장점이 있는 한편, 산소에 의한 경화 저해가 일어나기 때문에 박막의 경화에서는 산소를 차단하는 층 등을 마련해야 한다는 단점이 있다. 광 산 발생제는 산소에 의한 저해를 받지 않는다는 장점이 있는 한편, 활성종의 산이 잔존함으로써 금속기판을 부식시키거나 경화 후의 수지를 변성시키는 등의 단점이 있다. 광 염기 발생제는 상기 산소에 의한 경화 저해 및 잔존 활성종에 의한 부식과 같은 문제를 발생시키기 어렵기 때문에 주목받고 있는데, 대체로 광 산 발생제와 비교하면 저감도(저경화성)라는 문제가 있었다. 광 염기 발생제는 예를 들면 특허문헌 1~4 등에 의해 개시되어 있다. Photopolymerization initiators are divided into photoradical generators, photoacid generators, and photobase generators, depending on the active species generated by energy ray (light) irradiation. Photo radical generators have the advantage of having a fast curing speed and no active species remaining after curing. However, since curing is inhibited by oxygen, they have the disadvantage of having to provide a layer to block oxygen in the curing of thin films. While photoacid generators have the advantage of not being inhibited by oxygen, they have the disadvantage of corroding metal substrates or denaturing resin after curing due to residual acid of active species. Photobase generators are attracting attention because they are difficult to cause problems such as curing inhibition by oxygen and corrosion by remaining active species, but they generally have the problem of low sensitivity (low curing property) compared to photoacid generators. Photobase generators are disclosed, for example, in Patent Documents 1 to 4, etc.
따라서, 본 발명의 목적은 장파장의 자외선(특히, 365㎚)에 충분한 흡수를 나타내고, 만족할 수 있는 감도(염기 발생능)를 가지는 신규 화합물, 상기 화합물을 함유하는 잠재성 염기 발생제, 상기 화합물을 중합 개시제로서 함유하여 이루어지는 감광성 수지 조성물 및 그 경화물을 제공하는 것에 있다. Therefore, the object of the present invention is to provide a novel compound that exhibits sufficient absorption of long-wavelength ultraviolet rays (particularly, 365 nm) and has satisfactory sensitivity (base generation ability), a potential base generator containing the compound, and the compound. The object is to provide a photosensitive resin composition containing a polymerization initiator and a cured product thereof.
본 발명자는 예의 검토를 실시하고, 특정 구조를 가지는 화합물이 중합 개시제로서 높은 감도(염기 발생능)를 가지는 것을 지견했다. The present inventor conducted intensive studies and found that compounds having a specific structure have high sensitivity (base generation ability) as a polymerization initiator.
본 발명은 하기 [1]~[9]를 제공함으로써, 상기 목적을 달성한 것이다. The present invention achieves the above object by providing the following [1] to [9].
[1] 하기 일반식(I)로 나타내는 화합물. [1] A compound represented by the following general formula (I).
(식 중 R1은 수소 원자, 시아노기, 무치환 혹은 치환기를 가지고 있는 탄소 원자수 1~20의 지방족 탄화수소기 또는 무치환 혹은 치환기를 가지고 있는 탄소 원자수 6~20의 방향족 탄화수소기를 나타내고, (In the formula, R 1 represents a hydrogen atom, a cyano group, an unsubstituted or substituted aliphatic hydrocarbon group of 1 to 20 carbon atoms, or an unsubstituted or substituted aromatic hydrocarbon group of 6 to 20 carbon atoms,
R2, R4, R5, R6 및 R7은 각각 독립적으로, 수소 원자, 시아노기, 니트로기, -OR8, -COOR8, -CO-R8, -SR8, 할로겐 원자, 무치환 혹은 치환기를 가지고 있는 탄소 원자수 1~20의 지방족 탄화수소기, 무치환 혹은 치환기를 가지고 있는 탄소 원자수 6~20의 방향족 탄화수소기 또는 무치환 혹은 치환기를 가지고 있는 탄소 원자수 2~20의 복소환을 함유하는 기를 나타내며, R 2 , R 4 , R 5 , R 6 and R 7 are each independently hydrogen atom, cyano group, nitro group, -OR 8 , -COOR 8 , -CO-R 8 , -SR 8 , halogen atom, radish An aliphatic hydrocarbon group with 1 to 20 carbon atoms that is substituted or has a substituent, an aromatic hydrocarbon group with 6 to 20 carbon atoms that is unsubstituted or has a substituent, or a group with 2 to 20 carbon atoms that is unsubstituted or has a substituent. Indicates a group containing summons,
R3은 무치환 혹은 치환기를 가지고 있는 탄소 원자수 1~20의 지방족 탄화수소기, 무치환 혹은 치환기를 가지고 있는 탄소 원자수 6~20의 방향족 탄화수소기 또는 복소환을 함유하고 또한 무치환 혹은 치환기를 가지고 있는 탄소 원자수 2~20의 기를 나타내고, R 3 contains an unsubstituted or substituted aliphatic hydrocarbon group with 1 to 20 carbon atoms, an unsubstituted or substituted aromatic hydrocarbon group or heterocycle with 6 to 20 carbon atoms, and also contains an unsubstituted or substituted group. Represents a group having 2 to 20 carbon atoms,
R8은 수소 원자, 무치환 혹은 치환기를 가지고 있는 탄소 원자수 1~20의 지방족 탄화수소기, 무치환 혹은 치환기를 가지고 있는 탄소 원자수 6~20의 방향족 탄화수소기 또는 복소환을 함유하고 또한 무치환 혹은 치환기를 가지고 있는 탄소 원자수 2~20의 기를 나타내며, R 8 contains a hydrogen atom, an unsubstituted or substituted aliphatic hydrocarbon group with 1 to 20 carbon atoms, an unsubstituted or substituted aromatic hydrocarbon group with 6 to 20 carbon atoms or a heterocycle, and is also unsubstituted. Or it represents a group with 2 to 20 carbon atoms that has a substituent,
X1은 -NR11R12, 하기 (a) 또는 하기 (b)로 나타내는 기이며, X 1 is -NR 11 R 12 , a group represented by (a) or (b) below,
R11 및 R12는 각각 독립적으로, 수소 원자, 무치환 혹은 치환기를 가지고 있는 탄소 원자수 1~20의 지방족 탄화수소기 또는 무치환 혹은 치환기를 가지고 있는 탄소 원자수 6~20의 방향족 탄화수소기이거나, R 11 and R 12 are each independently a hydrogen atom, an unsubstituted or substituted aliphatic hydrocarbon group having 1 to 20 carbon atoms, or an unsubstituted or substituted aromatic hydrocarbon group having 6 to 20 carbon atoms, or
R11 및 R12가 서로 연결되어, 무치환 혹은 치환기를 가지고 또한 수소 원자, 질소 원자 및 탄소 원자로 이루어지는 탄소 원자수 1~20의 환, 또는 무치환 혹은 치환기를 가지고 또한 수소 원자, 산소 원자, 질소 원자 및 탄소 원자로 이루어지는 탄소 원자수 1~20의 환을 형성하고 있으며, R 11 and R 12 are connected to each other, and are unsubstituted or have a substituent and are a ring with 1 to 20 carbon atoms consisting of a hydrogen atom, a nitrogen atom and a carbon atom, or a ring that is unsubstituted or has a substituent and is also a hydrogen atom, an oxygen atom and a nitrogen atom. It forms a ring with 1 to 20 carbon atoms, consisting of an atom and a carbon atom,
n은 0 또는 1을 나타낸다.) n represents 0 or 1.)
(식 중 R13, R14, R15, R16, R17, R18, R19, R20, R21 및 R22는 각각 독립적으로, 수소 원자, 무치환 혹은 치환기를 가지고 있는 탄소 원자수 1~20의 지방족 탄화수소기 또는 무치환 혹은 치환기를 가지고 있는 탄소 원자수 6~20의 방향족 탄화수소기이거나, (In the formula, R 13 , R 14 , R 15 , R 16 , R 17 , R 18 , R 19 , R 20 , R 21 and R 22 are each independently a hydrogen atom or the number of unsubstituted or substituent carbon atoms It is an aliphatic hydrocarbon group of 1 to 20 carbon atoms or an aromatic hydrocarbon group of 6 to 20 carbon atoms that is unsubstituted or has a substituent, or
R13과 R14, R15와 R16, R17과 R18, R19와 R20 및 R21과 R22 중 적어도 한 세트가 서로 연결되어, 무치환 혹은 치환기를 가지고 또한 수소 원자, 질소 원자 및 탄소 원자로 이루어지는 탄소 원자수 1~20의 환, 또는 무치환 혹은 치환기를 가지고 또한 수소 원자, 산소 원자, 질소 원자 및 탄소 원자로 이루어지는 탄소 원자수 1~20의 환을 형성하고 있으며, At least one set of R 13 and R 14 , R 15 and R 16 , R 17 and R 18 , R 19 and R 20 and R 21 and R 22 is connected to each other, is unsubstituted or has a substituent, and also contains a hydrogen atom or a nitrogen atom. and a ring having 1 to 20 carbon atoms consisting of a carbon atom, or a ring having 1 to 20 carbon atoms that is unsubstituted or has a substituent and is made of a hydrogen atom, an oxygen atom, a nitrogen atom and a carbon atom,
*는 결합수(結合手)를 나타낸다.) * represents the number of combinations.)
[2] [1]에 있어서, 상기 일반식(I) 중의 R2, R3, R4, R5, R6 및 R7 중 적어도 하나가 니트로기, 벤조일기 또는 o-메틸벤조일기를 치환기로 가지고 있는 기인 화합물. [2] In [1], at least one of R 2 , R 3 , R 4 , R 5 , R 6 and R 7 in the general formula (I) is a nitro group, benzoyl group or o-methylbenzoyl group as a substituent. The underlying compound that has
[3] [1] 또는 [2]에 있어서, 상기 일반식(I) 중의 R2, R3, R4, R5, R6 및 R7 중 적어도 하나가 하기 일반식(II)로 나타내는 기인 화합물. [3] In [1] or [2], at least one of R 2 , R 3 , R 4 , R 5 , R 6 and R 7 in the general formula (I) is a group represented by the following general formula (II) compound.
(식 중 R25, R26, R27, R28 및 R29는 각각 독립적으로, 수소 원자, 시아노기, 니트로기, -OR30, -COOR30, -CO-R30, -SR30, 할로겐 원자, 무치환 혹은 치환기를 가지고 있는 탄소 원자수 1~20의 지방족 탄화수소기, 무치환 혹은 치환기를 가지고 있는 탄소 원자수 6~20의 방향족 탄화수소기 또는 복소환을 함유하고 또한 무치환 혹은 치환기를 가지고 있는 탄소 원자수 2~20의 기 또는 하기 일반식(III)으로 나타내는 기를 나타내며, (In the formula, R 25 , R 26 , R 27 , R 28 and R 29 are each independently hydrogen atom, cyano group, nitro group, -OR 30 , -COOR 30 , -CO-R 30 , -SR 30 , halogen Contains an atom, an aliphatic hydrocarbon group with 1 to 20 carbon atoms that is unsubstituted or has a substituent, an aromatic hydrocarbon group or heterocycle with 6 to 20 carbon atoms that is unsubstituted or has a substituent, and is also unsubstituted or has a substituent. Represents a group having 2 to 20 carbon atoms or a group represented by the following general formula (III),
R30은 무치환 혹은 치환기를 가지고 있는 탄소 원자수 1~20의 지방족 탄화수소기, 무치환 혹은 치환기를 가지고 있는 탄소 원자수 6~20의 방향족 탄화수소기 또는 복소환을 함유하고 또한 무치환 혹은 치환기를 가지고 있는 탄소 원자수 2~20의 기를 나타내고, R 30 contains an unsubstituted or substituted aliphatic hydrocarbon group with 1 to 20 carbon atoms, an unsubstituted or substituted aromatic hydrocarbon group or heterocycle with 6 to 20 carbon atoms, and also contains an unsubstituted or substituted group. Represents a group having 2 to 20 carbon atoms,
R25, R26, R27, R28 및 R29 중 적어도 하나가 니트로기, -CO-R30 또는 하기 일반식(III)으로 나타내는 기를 나타내며, At least one of R 25 , R 26 , R 27 , R 28 and R 29 represents a nitro group, -CO-R 30 or a group represented by the following general formula (III),
*는 결합수를 나타낸다.) * indicates the number of bonds.)
(식 중 R31은 무치환 혹은 치환기를 가지고 있는 탄소 원자수 1~20의 지방족 탄화수소기 또는 무치환 혹은 치환기를 가지고 있는 탄소 원자수 6~20의 방향족 탄화수소기를 나타내고, (In the formula, R 31 represents an aliphatic hydrocarbon group with 1 to 20 carbon atoms that is unsubstituted or has a substituent, or an aromatic hydrocarbon group with 6 to 20 carbon atoms that is unsubstituted or has a substituent,
X2는 -NR32R33, 하기 (a') 또는 하기 (b')로 나타내는 기이며, X 2 is -NR 32 R 33 , a group represented by (a') or (b') below,
R32 및 R33은 각각 독립적으로, 수소 원자, 무치환 혹은 치환기를 가지고 있는 탄소 원자수 1~20의 지방족 탄화수소기 또는 무치환 혹은 치환기를 가지고 있는 탄소 원자수 6~20의 방향족 탄화수소기이거나, R 32 and R 33 are each independently a hydrogen atom, an unsubstituted or substituted aliphatic hydrocarbon group having 1 to 20 carbon atoms, or an unsubstituted or substituted aromatic hydrocarbon group having 6 to 20 carbon atoms, or
R32 및 R33이 서로 연결되어, 무치환 혹은 치환기를 가지고 또한 수소 원자, 질소 원자 및 탄소 원자로 이루어지는 탄소 원자수 1~20의 환, 또는 무치환 혹은 치환기를 가지고 또한 수소 원자, 산소 원자, 질소 원자 및 탄소 원자로 이루어지는 탄소 원자수 1~20의 환을 형성하고 있으며, R 32 and R 33 are connected to each other, and are unsubstituted or have a substituent and are a ring with 1 to 20 carbon atoms consisting of a hydrogen atom, a nitrogen atom and a carbon atom, or a ring that is unsubstituted or has a substituent and is also a hydrogen atom, an oxygen atom and a nitrogen atom. It forms a ring with 1 to 20 carbon atoms, consisting of an atom and a carbon atom,
m은 0 또는 1을 나타내고, *는 결합수를 나타낸다.) m represents 0 or 1, and * represents the number of bonds.)
(식 중 R34, R35, R36, R37, R38, R39, R40, R41, R42 및 R43은 각각 독립적으로, 수소 원자, 무치환 혹은 치환기를 가지고 있는 탄소 원자수 1~20의 지방족 탄화수소기 또는 무치환 혹은 치환기를 가지고 있는 탄소 원자수 6~20의 방향족 탄화수소기이거나, (In the formula, R 34 , R 35 , R 36 , R 37 , R 38 , R 39 , R 40 , R 41 , R 42 and R 43 are each independently a hydrogen atom or the number of unsubstituted or substituent carbon atoms It is an aliphatic hydrocarbon group of 1 to 20 carbon atoms or an aromatic hydrocarbon group of 6 to 20 carbon atoms that is unsubstituted or has a substituent, or
R34와 R35, R36과 R37, R38과 R39, R40과 R41 및 R42와 R43 중 적어도 한 세트가 서로 연결되어, 무치환 혹은 치환기를 가지고 또한 수소 원자, 질소 원자 및 탄소 원자로 이루어지는 탄소 원자수 1~20의 환, 또는 무치환 혹은 치환기를 가지고 또한 수소 원자, 산소 원자, 질소 원자 및 탄소 원자로 이루어지는 탄소 원자수 1~20의 환을 형성하고 있으며, At least one set of R 34 and R 35 , R 36 and R 37 , R 38 and R 39 , R 40 and R 41 , and R 42 and R 43 is connected to each other, is unsubstituted or has a substituent, and also contains a hydrogen atom or a nitrogen atom. and a ring having 1 to 20 carbon atoms consisting of a carbon atom, or a ring having 1 to 20 carbon atoms that is unsubstituted or has a substituent and is made of a hydrogen atom, an oxygen atom, a nitrogen atom and a carbon atom,
*는 결합수를 나타낸다.) * indicates the number of bonds.)
[4] [1]~[3] 중 어느 한 항에 기재된 화합물을 포함하는 잠재성 염기 발생제.[4] A latent base generator containing the compound according to any one of [1] to [3].
[5] [1]~[3] 중 어느 한 항에 기재된 화합물을 포함하는 중합 개시제. [5] A polymerization initiator containing the compound according to any one of [1] to [3].
[6] [5]에 기재된 중합 개시제(A) 및 감광성 수지(B)를 함유하는 감광성 수지 조성물. [6] A photosensitive resin composition containing the polymerization initiator (A) and the photosensitive resin (B) according to [5].
[7] [6]에 있어서, 상기 감광성 수지(B)가 에폭시 수지 또는 페놀 수지인 감광성 수지 조성물. [7] The photosensitive resin composition according to [6], wherein the photosensitive resin (B) is an epoxy resin or a phenol resin.
[8] [6] 또는 [7]에 기재된 감광성 수지 조성물로부터 얻어지는 경화물. [8] A cured product obtained from the photosensitive resin composition according to [6] or [7].
[9] [6] 또는 [7]에 기재된 감광성 수지 조성물에 에너지 선을 조사하는 공정을 가지는 경화물의 제조 방법. [9] A method for producing a cured product comprising a step of irradiating an energy line to the photosensitive resin composition according to [6] or [7].
이하, 본 발명의 바람직한 실시형태에 대해 상세하게 설명한다. Hereinafter, preferred embodiments of the present invention will be described in detail.
본 발명의 신규 화합물은 상기 일반식(I)로 나타내는 카르바모일옥심 화합물이다. 상기 카르바모일옥심 화합물에는 옥심의 이중 결합에 의한 기하이성체가 존재하는데, 상기 일반식(I)은 이들을 구별한 것은 아니다. The novel compound of the present invention is a carbamoyloxime compound represented by the above general formula (I). The carbamoyl oxime compound has geometric isomers due to the double bond of the oxime, but the general formula (I) does not distinguish them.
즉, 본 명세서에서, 상기 일반식(I)로 나타내는 화합물, 그리고 후술할 상기 화합물의 바람직한 형태인 화합물 및 예시 화합물은 기하이성체의 혼합물 또는 어느 한쪽을 나타내며, 나타낸 구조의 이성체에 한정되는 것은 아니다. That is, in this specification, the compound represented by the general formula (I), and the compounds and exemplary compounds that are preferred forms of the compound described later represent a mixture of geometric isomers or one of them, and are not limited to isomers of the indicated structures.
한편, 일반식(I) 중의 R1~R8, R11~R22로 나타내는 기 중의 메틸렌기가 탄소 원자를 포함하는 기에 의해 치환되어 있는 경우, 그들의 탄소 원자수를 포함시킨 수가 규정의 탄소 원자수가 된다. On the other hand, when the methylene group in the group represented by R 1 to R 8 and R 11 to R 22 in the general formula (I) is substituted by a group containing a carbon atom, the number of carbon atoms included is the specified number of carbon atoms. do.
상기 일반식(I) 중의 R1~R8, R11~R22로 나타내는 무치환의 탄소 원자수 1~20의 지방족 탄화수소기로는 예를 들면, 메틸, 에틸, 프로필, 이소프로필, 부틸, 이소부틸, s-부틸, t-부틸, 아밀, 이소아밀, t-아밀, 헥실, 헵틸, 옥틸, 이소옥틸, 2-에틸헥실, t-옥틸, 노닐, 이소노닐, 데실, 이소데실, 운데실, 도데실, 테트라데실, 헥사데실, 옥타데실, 이코실, 시클로펜틸, 시클로헥실, 시클로헥실메틸 등을 들 수 있다. 또한, R1~R8, R11~R22는 이들 지방족 탄화수소기 중의 메틸렌기가 -O-, -COO-, -OCO-, -CO-, -CS-, -S-, -SO-, -SO2-, -NR-, -NR-CO-, -CO-NR-, -NR-COO-, -OCO-NR- 또는 -SiRR'-로 치환된 기여도 된다. 단, 이들 치환하는 2가의 기는 서로 이웃하지 않는 것으로 한다. Unsubstituted aliphatic hydrocarbon groups having 1 to 20 carbon atoms represented by R 1 to R 8 and R 11 to R 22 in the general formula (I) include, for example, methyl, ethyl, propyl, isopropyl, butyl, and iso. Butyl, s-butyl, t-butyl, amyl, isoamyl, t-amyl, hexyl, heptyl, octyl, isooctyl, 2-ethylhexyl, t-octyl, nonyl, isononyl, decyl, isodecyl, undecyl, Dodecyl, tetradecyl, hexadecyl, octadecyl, icosyl, cyclopentyl, cyclohexyl, cyclohexylmethyl, etc. are mentioned. In addition, R 1 to R 8 , R 11 to R 22 have methylene groups in these aliphatic hydrocarbon groups -O-, -COO-, -OCO-, -CO-, -CS-, -S-, -SO-, - Contributions substituted with SO 2 -, -NR-, -NR-CO-, -CO-NR-, -NR-COO-, -OCO-NR- or -SiRR'- are also possible. However, these substituted divalent groups are not adjacent to each other.
R 및 R'는 무치환의 지방족 탄화수소기이며, 무치환의 지방족 탄화수소기로는 상기의 R1~R8, R11~R22로 나타내는 무치환의 탄소 원자수 1~20의 지방족 탄화수소기로서 예시한 것과 동일한 기를 들 수 있다. R and R' are unsubstituted aliphatic hydrocarbon groups, and examples of the unsubstituted aliphatic hydrocarbon groups include unsubstituted aliphatic hydrocarbon groups having 1 to 20 carbon atoms represented by R 1 to R 8 and R 11 to R 22 above. You can use the same flag as the one mentioned above.
상기 일반식(I) 중의 R1~R8, R11~R22로 나타내는 무치환의 탄소 원자수 6~20의 방향족 탄화수소기로는 페닐, 나프틸, 페난트릴, 피렌일 및 비페닐, 그리고 지방족 탄화수소기에 의해 치환된 페닐, 나프틸, 페난트릴, 피렌일 및 비페닐 등을 들 수 있다. 또한, R1~R8, R11~R22는 이들 방향족 탄화수소기 중의 알킬렌 부분 또는 방향족환과 지방족 탄화수소기의 결합부의 메틸렌기가 -O-, -COO-, -OCO-, -CO-, -CS-, -S-, -SO-, -SO2-, -NR-, -NR-CO-, -CO-NR-, -NR-COO-, -OCO-NR- 또는 -SiRR'-로 치환된 기여도 된다. 단, 이들 치환하는 2가의 기는 서로 이웃하지 않는 것으로 한다. Unsubstituted aromatic hydrocarbon groups having 6 to 20 carbon atoms represented by R 1 to R 8 and R 11 to R 22 in the general formula (I) include phenyl, naphthyl, phenanthryl, pyrenyl, biphenyl, and aliphatic. Examples include phenyl, naphthyl, phenanthryl, pyrenyl, and biphenyl substituted by a hydrocarbon group. In addition, R 1 to R 8 and R 11 to R 22 are the alkylene portion of these aromatic hydrocarbon groups or the methylene group of the bonding portion between the aromatic ring and the aliphatic hydrocarbon group is -O-, -COO-, -OCO-, -CO-, - Substituted by CS-, -S-, -SO-, -SO 2 -, -NR-, -NR-CO-, -CO-NR-, -NR-COO-, -OCO-NR- or -SiRR'- It can also be a contribution. However, these substituted divalent groups are not adjacent to each other.
상기 지방족 탄화수소기로는 상기의 R1~R8, R11~R22로 나타내는 무치환의 탄소 원자수 1~20의 지방족 탄화수소기로서 예시한 것과 동일한 기를 들 수 있다. Examples of the aliphatic hydrocarbon group include the same groups as those exemplified as the unsubstituted aliphatic hydrocarbon groups having 1 to 20 carbon atoms represented by R 1 to R 8 and R 11 to R 22 .
R 및 R'는 무치환의 지방족 탄화수소기이며, 무치환의 지방족 탄화수소기로는 상기의 R1~R8, R11~R22로 나타내는 무치환의 탄소 원자수 1~20의 지방족 탄화수소기로서 예시한 것과 동일한 기를 들 수 있다. R and R' are unsubstituted aliphatic hydrocarbon groups, and examples of the unsubstituted aliphatic hydrocarbon groups include unsubstituted aliphatic hydrocarbon groups having 1 to 20 carbon atoms represented by R 1 to R 8 and R 11 to R 22 above. You can use the same flag as the one mentioned above.
R1~R8, R11~R22로 나타내는 치환기를 가지고 있는 탄소 원자수 1~20의 지방족 탄화수소기 및 R1~R8, R11~R22로 나타내는 치환기를 가지고 있는 탄소 원자수 6~20의 방향족 탄화수소기로는 상기에서 설명한 무치환체의 수소 원자가 불소 원자, 염소 원자, 브롬 원자, 요오드 원자, 시아노기, 니트로기, 수산기, 티올기, -COOH 또는 -SO2H로 치환되어 있는 것을 들 수 있다. An aliphatic hydrocarbon group having 1 to 20 carbon atoms and having substituents represented by R 1 to R 8 , R 11 to R 22 and 6 to 6 carbon atoms having substituents represented by R 1 to R 8 and R 11 to R 22 Examples of the aromatic hydrocarbon group of 20 include those in which the hydrogen atom of the unsubstituted product described above is substituted with a fluorine atom, a chlorine atom, a bromine atom, an iodine atom, a cyano group, a nitro group, a hydroxyl group, a thiol group, -COOH or -SO 2 H. You can.
R11 및 R12, R13과 R14, R15와 R16, R17과 R18, R19와 R20 및 R21과 R22, 그리고 R32와 R33, R34와 R35, R36과 R37, R38과 R39, R40과 R41 및 R42와 R43 중 적어도 한 세트가 서로 연결되어 형성하는, 탄소 원자수 1~20의 수소 원자, 질소 원자 및 탄소 원자로 이루어지는 환으로는, 결합되어 있는 질소 원자를 포함시킨 기로서, 피롤기, 피롤리딘기, 이미다졸기, 이미다졸리딘기, 이미다졸린기, 피라졸기, 피라졸리딘기, 피페리딘기, 피페라진기 등을 들 수 있고, 이들 환의 수소 원자는 불소 원자, 염소 원자, 브롬 원자, 요오드 원자, 시아노기, 니트로기, 수산기, 티올기, -COOH, -SO2H 또는 지방족 탄화수소기에 의해 치환되어 있어도 된다.R 11 and R 12 , R 13 and R 14 , R 15 and R 16 , R 17 and R 18 , R 19 and R 20 and R 21 and R 22 , and R 32 and R 33 , R 34 and R 35 , R 36 and R 37 , R 38 and R 39 , R 40 and R 41, and at least one set of R 42 and R 43 are linked together to form a ring consisting of a hydrogen atom, a nitrogen atom and a carbon atom with 1 to 20 carbon atoms. Examples include groups containing a bonded nitrogen atom, such as pyrrole group, pyrrolidine group, imidazole group, imidazolidine group, imidazoline group, pyrazole group, pyrazolidine group, piperidine group, piperazine group, etc. , and the hydrogen atom of these rings may be substituted by a fluorine atom, a chlorine atom, a bromine atom, an iodine atom, a cyano group, a nitro group, a hydroxyl group, a thiol group, -COOH, -SO 2 H, or an aliphatic hydrocarbon group.
상기 지방족 탄화수소기로는 상기의 R1~R8, R11~R22로 나타내는 무치환의 탄소 원자수 1~20의 지방족 탄화수소기로서 예시한 것과 동일한 기를 들 수 있다. Examples of the aliphatic hydrocarbon group include the same groups as those exemplified as the unsubstituted aliphatic hydrocarbon groups having 1 to 20 carbon atoms represented by R 1 to R 8 and R 11 to R 22 .
R11 및 R12, R13과 R14, R15와 R16, R17과 R18, R19와 R20 및 R21과 R22, 그리고 R32와 R33, R34와 R35, R36과 R37, R38과 R39, R40과 R41 및 R42와 R43 중 적어도 한 세트가 서로 연결되어 형성하는, 탄소 원자수 1~20의 수소 원자, 산소 원자, 질소 원자 및 탄소 원자로 이루어지는 환으로는, 결합되어 있는 질소 원자를 포함시킨 기로서, 모르폴린기, 옥사졸기, 옥사졸린기, 옥사디아졸기 등을 들 수 있고, 이들 환의 수소 원자는 불소 원자, 염소 원자, 브롬 원자, 요오드 원자, 시아노기, 니트로기, 수산기, 티올기, -COOH, -SO2H 또는 지방족 탄화수소기에 의해 치환되어 있어도 된다. R 11 and R 12 , R 13 and R 14 , R 15 and R 16 , R 17 and R 18 , R 19 and R 20 and R 21 and R 22 , and R 32 and R 33 , R 34 and R 35 , R At least one set of 36 and R 37 , R 38 and R 39 , R 40 and R 41 , and R 42 and R 43 is connected to each other to form a hydrogen atom, oxygen atom, nitrogen atom and carbon having 1 to 20 carbon atoms Rings made of atoms include groups containing a bonded nitrogen atom, such as morpholine group, oxazole group, oxazoline group, and oxadiazole group, and the hydrogen atoms of these rings are fluorine atom, chlorine atom, and bromine atom. , iodine atom, cyano group, nitro group, hydroxyl group, thiol group, -COOH, -SO 2 H or an aliphatic hydrocarbon group.
상기 지방족 탄화수소기로는 상기의 R1~R8, R11~R22로 나타내는 무치환의 탄소 원자수 1~20의 지방족 탄화수소기로서 예시한 것과 동일한 기를 들 수 있다. Examples of the aliphatic hydrocarbon group include the same groups as those exemplified as the unsubstituted aliphatic hydrocarbon groups having 1 to 20 carbon atoms represented by R 1 to R 8 and R 11 to R 22 .
상기 일반식(I) 중의, R2~R8로 나타내는 무치환의 탄소 원자수 2~20의 복소환을 함유하는 기로는 테트라하이드로푸란기, 디옥소라닐기, 테트라하이드로피라닐기, 모르폴릴푸란기, 티오펜기, 메틸티오펜기, 헥실티오펜기, 벤조티오펜기, 피롤기, 피롤리딘기, 이미다졸기, 이미다졸리딘기, 이미다졸린기, 피라졸기, 피라졸리딘기, 피페리딘기 및 피페라진기, 그리고 지방족 탄화수소기로 치환된 테트라하이드로푸란기, 디옥소라닐기, 테트라하이드로피라닐기, 모르폴릴푸란기, 티오펜기, 메틸티오펜기, 헥실티오펜기, 벤조티오펜기, 피롤기, 피롤리딘기, 이미다졸기, 이미다졸리딘기, 피라졸기, 피라졸리딘기, 피페리딘기 및 피페라진기 등을 들 수 있다. 또한, R2~R8은 이들 복소환을 함유하는 기 중의 알킬렌 부분 및 복소환과 알킬기의 결합부의 메틸렌기가 -O-, -COO-, -OCO-, -CO-, -CS-, -S-, -SO-, -SO2-, -NR-, -NR-CO-, -CO-NR-, -NR-COO-, -OCO-NR- 또는 -SiRR'-로 치환된 기여도 된다. 단, 이들 치환하는 2가의 기는 서로 이웃하지 않는 것으로 한다. In the general formula (I), groups containing unsubstituted heterocycles having 2 to 20 carbon atoms represented by R 2 to R 8 include tetrahydrofuran group, dioxoranyl group, tetrahydropyranyl group, and morpholylfuran group. , thiophene group, methylthiophene group, hexylthiophene group, benzothiophene group, pyrrole group, pyrrolidine group, imidazole group, imidazolidine group, imidazoline group, pyrazole group, pyrazolidine group, piperi Dean group and piperazine group, and tetrahydrofuran group, dioxoranyl group, tetrahydropyranyl group, morpholylfuran group, thiophene group, methylthiophene group, hexylthiophene group, benzothiophene group, substituted with aliphatic hydrocarbon group, Examples include pyrrole group, pyrrolidine group, imidazole group, imidazolidine group, pyrazole group, pyrazolidine group, piperidine group, and piperazine group. In addition, R 2 to R 8 represent the alkylene portion of the group containing these heterocycles and the methylene group of the bonding portion between the heterocycle and the alkyl group being -O-, -COO-, -OCO-, -CO-, -CS-, - Contributions substituted with S-, -SO-, -SO 2 -, -NR-, -NR-CO-, -CO-NR-, -NR-COO-, -OCO-NR- or -SiRR'- can also be made. However, these substituted divalent groups are not adjacent to each other.
한편, 본 명세서에서, "탄소 원자수 2~20의 복소환을 함유하는 기"에서의 "2~20"은 "복소환"이 아닌 "복소환을 함유하는 기"의 탄소 원자수를 규정한다. Meanwhile, in this specification, “2 to 20” in “a group containing a heterocycle having 2 to 20 carbon atoms” specifies the number of carbon atoms in the “group containing a heterocycle” rather than a “heterocycle”. .
상기 지방족 탄화수소기로는 상기의 R1~R8, R11~R22로 나타내는 무치환의 탄소 원자수 1~20의 지방족 탄화수소기로서 예시한 것을 들 수 있다. Examples of the aliphatic hydrocarbon group include those exemplified as the unsubstituted aliphatic hydrocarbon groups having 1 to 20 carbon atoms represented by R 1 to R 8 and R 11 to R 22 .
R 및 R'는 무치환의 지방족 탄화수소기이며, 무치환의 지방족 탄화수소기로는 상기의 R1~R8, R11~R22로 나타내는 무치환의 탄소 원자수 1~20의 지방족 탄화수소기로서 예시한 것과 동일한 기를 들 수 있다. R and R' are unsubstituted aliphatic hydrocarbon groups, and examples of the unsubstituted aliphatic hydrocarbon groups include unsubstituted aliphatic hydrocarbon groups having 1 to 20 carbon atoms represented by R 1 to R 8 and R 11 to R 22 above. You can use the same flag as the one mentioned above.
R2~R8로 나타내는 치환기를 가지고 있는 탄소 원자수 2~20의 복소환을 함유하는 기로는, 상기에서 설명한 무치환의 복소환을 함유하는 기의 수소 원자가 불소 원자, 염소 원자, 브롬 원자, 요오드 원자, 시아노기, 니트로기, 수산기, 티올기, -COOH 또는 -SO2H로 치환되어 있는 것을 들 수 있다. 한편, 치환되는 기가 탄소 원자를 포함하는 경우, 및 치환기를 가지는 경우에는 그들 탄소 원자수를 포함시킨 수가 규정의 탄소 원자수가 된다. As a group containing a heterocycle having 2 to 20 carbon atoms and having a substituent represented by R 2 to R 8 , the hydrogen atom of the group containing the unsubstituted heterocycle described above is a fluorine atom, a chlorine atom, a bromine atom, Examples include those substituted with an iodine atom, cyano group, nitro group, hydroxyl group, thiol group, -COOH or -SO 2 H. On the other hand, when the group to be substituted contains a carbon atom or has a substituent, the number of these carbon atoms is the specified number of carbon atoms.
상기 일반식(I)로 나타내는 신규 화합물로는 감광성 수지 조성물에 사용할 경우, UV 감도, 경화성이 뛰어난 점에서, X1이 -NR11R12로 나타내는 기이며, R11 또는 R12가 페닐기인 화합물, R11 및 R12가 탄소 원자수 1~20의 지방족 탄화수소기인 화합물, R11 및 R12가 서로 연결되어 수소 원자, 질소 원자 및 탄소 원자로 이루어지는 탄소 원자수 1~20의 환을 형성하고 있는 화합물, 또는 R11 및 R12가 서로 연결되어 수소 원자, 산소 원자, 질소 원자 및 탄소 원자로 이루어지는 탄소 원자수 1~20의 환을 형성하고 있는 화합물이 바람직하다. New compounds represented by the above general formula (I ) include compounds in which , a compound in which R 11 and R 12 are aliphatic hydrocarbon groups having 1 to 20 carbon atoms, and a compound in which R 11 and R 12 are connected to each other to form a ring having 1 to 20 carbon atoms consisting of a hydrogen atom, a nitrogen atom and a carbon atom. , or a compound in which R 11 and R 12 are linked to each other to form a ring having 1 to 20 carbon atoms consisting of a hydrogen atom, an oxygen atom, a nitrogen atom, and a carbon atom is preferable.
또한, UV 감도가 뛰어나고, 흡수 파장의 장파장화 및 수지에 대한 용해성이 뛰어난 점에서, R2, R3, R4, R5, R6 및 R7 중 적어도 하나가 니트로기, 시아노기, 수산기, 카르복실기 또는 티올기이거나, 혹은 이들 기를 치환기로서 가지고 있는 기인 화합물이 바람직하고, 니트로기 또는 니트로기를 치환기로서 가지고 있는 기인 화합물이 보다 바람직하며, 특히, R3이 니트로기를 치환기로서 가지고 있는 기인 화합물이 바람직하다. 니트로기를 치환기로서 가지고 있는 기로는 니트로페닐기가 바람직하다. In addition, because of excellent UV sensitivity, long absorption wavelength, and excellent solubility in resins, at least one of R 2 , R 3 , R 4 , R 5 , R 6 , and R 7 is a nitro group, cyano group, or hydroxyl group. , a carboxyl group or a thiol group, or a group compound having these groups as a substituent is preferable, a nitro group or a group compound having a nitro group as a substituent is more preferable, and in particular, a group compound in which R 3 has a nitro group as a substituent is more preferable. desirable. The group having a nitro group as a substituent is preferably a nitrophenyl group.
더욱이, 중합 개시제로 사용할 경우, 감도가 뛰어난 점에서, R2, R3, R4, R5, R6 및 R7 중 적어도 하나가 벤조일기, o-메틸벤조일기 또는 트리플루오로메틸기이거나, 이들 기를 치환기로서 가지고 있는 기인 화합물도 바람직하고, 특히, R3이 벤조일기를 치환기로서 가지고 있는 기인 화합물이 바람직하다. 벤조일기를 치환기로서 가지고 있는 기로는 벤조일페닐기가 바람직하다. Moreover, when used as a polymerization initiator, because of its excellent sensitivity, at least one of R 2 , R 3 , R 4 , R 5 , R 6 and R 7 is a benzoyl group, o-methylbenzoyl group or trifluoromethyl group, Compounds that are groups having these groups as substituents are also preferable, and in particular, compounds that are groups in which R 3 has a benzoyl group as a substituent are preferable. The group having a benzoyl group as a substituent is preferably a benzoylphenyl group.
상기 일반식(I) 중의 R2, R3, R4, R5, R6 및 R7 중 적어도 하나가 니트로기, 벤조일기 또는 o-메틸벤조일기를 치환기로서 가지고 있는 기인 화합물은 흡수 파장역이 장파장화(365㎚)되고, 중합 개시제로 사용할 경우, 감도가 뛰어나기 때문에 바람직하다. Compounds in which at least one of R 2 , R 3 , R 4 , R 5 , R 6 and R 7 in the general formula (I) has a nitro group, benzoyl group or o-methylbenzoyl group as a substituent have an absorption wavelength range. It is preferable because it has a long wavelength (365 nm) and has excellent sensitivity when used as a polymerization initiator.
본 발명에서는 이하의 화합물이, 감광성 수지 조성물에 사용할 경우의 UV 감도 및 경화성이 뛰어나고 또한 중합 개시제로 사용할 경우의 감도가 뛰어나기 때문에 바람직하다. In the present invention, the following compounds are preferred because they have excellent UV sensitivity and curability when used in a photosensitive resin composition, and also have excellent sensitivity when used as a polymerization initiator.
상기 일반식(I)에서, R1이 탄소 원자수 1~20의 지방족 탄화수소기이고, R2, R4, R5, R6 및 R7이 수소 원자이며, X1이 -NR11R12로 나타내는 기이고 또한 R11 및 R12가 탄소 원자수 1~20의 지방족 탄화수소기이거나, 또는 R11 및 R12가 서로 연결되어 수소 원자, 질소 원자 및 탄소 원자로 이루어지는 탄소 원자수 1~20의 환, 혹은 수소 원자, 산소 원자, 질소 원자 및 탄소 원자로 이루어지는 탄소 원자수 1~20의 환을 형성하고 있고, R3이 니트로기 또는 벤조일기를 치환기로서 가지고 있는 기인 화합물. In the general formula (I), R 1 is an aliphatic hydrocarbon group having 1 to 20 carbon atoms, R 2 , R 4 , R 5 , R 6 and R 7 are hydrogen atoms, and X 1 is -NR 11 R 12 and R 11 and R 12 are an aliphatic hydrocarbon group having 1 to 20 carbon atoms, or R 11 and R 12 are connected to each other and form a ring having 1 to 20 carbon atoms consisting of a hydrogen atom, a nitrogen atom and a carbon atom. , or a group compound that forms a ring with 1 to 20 carbon atoms consisting of a hydrogen atom, an oxygen atom, a nitrogen atom, and a carbon atom, and R 3 has a nitro group or benzoyl group as a substituent.
상기 일반식(I) 중의 R2, R3, R4, R5, R6 및 R7 중 적어도 하나가 상기 일반식(II)로 나타내는 기인 화합물은 흡수 파장역이 장파장화(365㎚)되고, 중합 개시제로 사용할 경우, 감도가 뛰어나기 때문에 바람직하다. The compound in which at least one of R 2 , R 3 , R 4 , R 5 , R 6 and R 7 in the general formula (I) is a group represented by the general formula (II) has a long absorption wavelength range (365 nm) When used as a polymerization initiator, it is preferable because it has excellent sensitivity.
일반식(II) 중 R25~R43으로 나타내는 탄소 원자수 1~20의 무치환 혹은 치환되어 있는 지방족 탄화수소기 및 탄소 원자수 6~20의 방향족 탄화수소기로는 상기의 R1~R8, R11~R22로 나타내는 무치환 혹은 치환되어 있는 탄소 원자수 1~20의 지방족 탄화수소기 및 무치환 혹은 치환되어 있는 탄소 원자수 6~20의 방향족 탄화수소기로서 예시한 것과 각각 동일한 기를 들 수 있다. In general formula (II), the unsubstituted or substituted aliphatic hydrocarbon group having 1 to 20 carbon atoms represented by R 25 to R 43 and the aromatic hydrocarbon group having 6 to 20 carbon atoms include R 1 to R 8 , R The same groups as those exemplified include unsubstituted or substituted aliphatic hydrocarbon groups having 1 to 20 carbon atoms and unsubstituted or substituted aromatic hydrocarbon groups having 6 to 20 carbon atoms, respectively, represented by 11 to R 22 .
일반식(II) 중 R25~R30으로 나타내는 탄소 원자수 2~20의 무치환 혹은 치환되어 있는 복소환을 함유하는 기로는 상기의 R2~R8로 나타내는 탄소 원자수 2~20의 무치환 혹은 치환되어 있는 복소환을 함유하는 기와 동일한 기를 들 수 있다. In general formula (II), the group containing an unsubstituted or substituted heterocycle having 2 to 20 carbon atoms represented by R 25 to R 30 includes the group containing 2 to 20 carbon atoms represented by R 2 to R 8 above. The same group as the group containing a substituted or substituted heterocycle can be mentioned.
상기 일반식(I) 중의 R2, R3, R4, R5, R6 및 R7 중 하나가 상기 일반식(II)로 나타내는 기이고, 그 밖의 것이 수소 원자, 무치환 혹은 치환기를 가지고 있는 탄소 원자수 1~6의 지방족 탄화수소기 또는 무치환 혹은 치환기를 가지고 있는 탄소 원자수 6~12의 방향족 탄화수소기인 화합물은 감도가 뛰어나고, 제조하기 쉬운 점에서 바람직하다. One of R 2 , R 3 , R 4 , R 5 , R 6 and R 7 in the general formula (I) is a group represented by the general formula (II), and the other is a hydrogen atom, unsubstituted or has a substituent. Compounds that are an aliphatic hydrocarbon group with 1 to 6 carbon atoms or an aromatic hydrocarbon group with 6 to 12 carbon atoms that are unsubstituted or have a substituted group are preferred because they have excellent sensitivity and are easy to produce.
상기 일반식(I) 중의 R1이 무치환 혹은 치환기를 가지고 있는 탄소 원자수 1~12의 지방족 탄화수소기 또는 무치환 혹은 치환기를 가지고 있는 탄소 원자수 6~12의 방향족 탄화수소기인 화합물은 제조하기 쉬운 점에서 바람직하다. Compounds in which R 1 in the general formula (I) is an unsubstituted or substituted aliphatic hydrocarbon group with 1 to 12 carbon atoms or an unsubstituted or substituted aromatic hydrocarbon group with 6 to 12 carbon atoms are easy to produce. It is desirable in that respect.
상기 일반식(I) 중의 n이 0인 화합물은 중합 개시제로 사용할 경우, 감도가 뛰어나기 때문에 바람직하다. A compound in which n in the general formula (I) is 0 is preferred because it has excellent sensitivity when used as a polymerization initiator.
상기 일반식(I) 중의 n이 1인 화합물은 중합 개시제로 사용할 경우, 투명성이 뛰어난 경화물이 얻어지기 때문에 바람직하다. The compound in which n in the general formula (I) is 1 is preferable because a cured product with excellent transparency can be obtained when used as a polymerization initiator.
상기 일반식(I)로 나타내는 신규 화합물 중 n이 0인 화합물의 구체예로는 이하의 화합물 No.1~No.74를 들 수 있다. 단, 본 발명은 이하의 화합물에 의해 하등의 제한을 받는 것이 아니다. Among the new compounds represented by the general formula (I), specific examples of compounds where n is 0 include the following compounds No. 1 to No. 74. However, the present invention is not limited in any way by the following compounds.
상기 일반식(I)로 나타내는 신규 화합물 중 n이 1인 화합물의 구체예로는 이하의 화합물 No.75~No.152를 들 수 있다. 단, 본 발명은 이하의 화합물에 의해 하등의 제한을 받는 것이 아니다. Among the new compounds represented by the general formula (I), specific examples of compounds where n is 1 include the following compounds No. 75 to No. 152. However, the present invention is not limited in any way by the following compounds.
상기 일반식(I)로 나타내는 본 발명의 카르바모일옥심 화합물은 특별히 한정되지 않지만, n=0인 경우, 하기 반응식 1에 따라, 이하의 방법에 의해 제조할 수 있다. The carbamoyloxime compound of the present invention represented by the general formula (I) is not particularly limited, but when n=0, it can be produced by the following method according to the following Scheme 1.
즉, 공지이며, 시판되고 있는 인돌 화합물 1과 할로겐화아릴 혹은, 할로겐화알킬 화합물을 반응시킴으로써 인돌 화합물 2를 얻는다. 이 인돌 화합물 2와 산클로라이드와 반응시킴으로써 케톤 화합물을 얻고, 케톤 화합물과 염산하이드록실아민을 반응시킴으로써 옥심 화합물을 얻는다. 이어서, 옥심 화합물에, 트리에틸아민 존재 하에서 클로로포름산4-니트로페닐 및 1급 혹은 2급 아민을 반응시킴으로써, 상기 일반식(I)로 나타내는 본 발명의 카르바모일옥심 화합물을 얻는다. That is, indole compound 2 is obtained by reacting a known and commercially available indole compound 1 with an aryl halide or alkyl halide compound. A ketone compound is obtained by reacting this indole compound 2 with acid chloride, and an oxime compound is obtained by reacting the ketone compound with hydroxylamine hydrochloride. Next, the carbamoyloxime compound of the present invention represented by the general formula (I) is obtained by reacting the oxime compound with 4-nitrophenyl chloroformate and a primary or secondary amine in the presence of triethylamine.
한편, 하기 반응식 1에서는 X1이 -NR11R12인 경우를 나타내고 있는데, 사용할 아민을 변경함으로써, X1이 상기 (a) 또는 (b)로 나타내는 기인 화합물도 제조할 수 있다. Meanwhile , Scheme 1 below shows the case where X 1 is -NR 11 R 12 , but by changing the amine to be used, a compound where
옥심 화합물 및 카르바모일옥심 화합물은 일본 등록특허공보 4223071호에 기재된 방법으로도 제조할 수 있다. Oxime compounds and carbamoyloxime compounds can also be produced by the method described in Japanese Patent Publication No. 4223071.
반응식 1 Scheme 1
(식 중 R1~R12는 상기 일반식(I)과 동일하다.) (In the formula, R 1 to R 12 are the same as the general formula (I) above.)
또한, 상기 일반식(I)에서 n=1인 화합물은 특별히 한정되지 않지만, 하기 반응식 2에 따라, 이하의 방법에 의해 제조할 수 있다. In addition, the compound with n = 1 in the general formula (I) is not particularly limited, but can be produced by the following method according to Scheme 2 below.
즉, 상기 인돌 화합물 2와 산클로라이드와 반응시킴으로써 케톤 화합물 2를 얻고, 케톤 화합물과 아질산이소부틸을 반응시킴으로써 옥심 화합물 2를 얻는다. 이어서, 옥심 화합물 2에, 트리에틸아민 존재 하에서 클로로포름산-4-니트로페닐 및 1급 혹은 2급 아민을 반응시킴으로써, 상기 일반식(I)로 나타내는 본 발명의 카르바모일옥심 화합물 2를 얻는다. That is, ketone compound 2 is obtained by reacting the indole compound 2 with acid chloride, and oxime compound 2 is obtained by reacting the ketone compound with isobutyl nitrite. Next, the carbamoyloxime compound 2 of the present invention represented by the general formula (I) is obtained by reacting the oxime compound 2 with 4-nitrophenyl chloroformate and a primary or secondary amine in the presence of triethylamine.
한편, 하기 반응식 2에서는 X1이 -NR11R12인 경우를 나타내고 있는데, 사용할 아민을 변경함으로써, X1이 상기 (a) 또는 (b)로 나타내는 기인 화합물도 제조할 수 있다. Meanwhile , Scheme 2 below shows the case where X 1 is -NR 11 R 12 , but by changing the amine to be used, a compound where
옥심 화합물 및 카르바모일옥심 화합물은 일본 등록특허공보 4223071호에 기재된 방법으로도 제조할 수 있다. Oxime compounds and carbamoyloxime compounds can also be produced by the method described in Japanese Patent Publication No. 4223071.
반응식 2 Scheme 2
(식 중 R1~R12는 상기 일반식(I)과 동일하다.) (In the formula, R 1 to R 12 are the same as the general formula (I) above.)
본 발명의 신규 화합물은 감광성 수지의 경화성이 뛰어난 점, 에너지 선에 대한 감도가 높은 점에서, 이하에서 설명하는 광 염기 발생제인 중합 개시제로서 알맞게 사용할 수 있는 것 외에 화학 증폭형 레지스트 등에 사용할 수 있다. The novel compound of the present invention has excellent curing properties of photosensitive resins and high sensitivity to energy rays, so it can be suitably used as a polymerization initiator, which is a photobase generator described below, and can also be used in chemically amplified resists, etc.
다음으로, 본 발명의 중합 개시제, 잠재성 염기 발생제 및 본 발명의 감광성 수지 조성물에 대해 설명한다. 한편, 특별히 설명하지 않는 점에 대해서는 본 발명의 신규 화합물에서의 설명이 적절히 적용된다. Next, the polymerization initiator of the present invention, the latent base generator, and the photosensitive resin composition of the present invention are explained. Meanwhile, for points not specifically explained, the description in the new compound of the present invention is appropriately applied.
<잠재성 염기 발생제> <Latent base generator>
본 발명의 잠재성 염기 발생제는 상기 일반식(I)로 나타내는 화합물을 적어도 1종 포함하고 있는 것이다. 중합 개시제 중에서의 상기 일반식(I)로 나타내는 화합물의 함유량은 바람직하게는 1~100질량%, 보다 바람직하게는 50~100질량%이다. The latent base generator of the present invention contains at least one compound represented by the above general formula (I). The content of the compound represented by the general formula (I) in the polymerization initiator is preferably 1 to 100% by mass, more preferably 50 to 100% by mass.
잠재성 염기 발생제란, 광 또는 열에 의해 염기를 발생시키는 것이며, 중합 개시제, 염기 촉매, pH 조정제로 사용할 수 있다. 본 발명에서는 조작성이 뛰어나기 때문에, 광을 조사함으로써 염기를 발생시키는 잠재성 광 염기 발생제가 보다 바람직하다. A latent base generator is one that generates a base by light or heat, and can be used as a polymerization initiator, base catalyst, or pH adjuster. In the present invention, a latent photobase generator that generates a base by irradiating light is more preferable because it has excellent operability.
<중합 개시제(A)> <Polymerization initiator (A)>
본 발명의 중합 개시제 및 본 발명의 감광성 수지 조성물에서, 중합 개시제(A)는 상기 일반식(I)로 나타내는 화합물을 적어도 1종 포함하고 있는 것이다. 중합 개시제 중에서의 상기 일반식(I)로 나타내는 화합물의 함유량은 바람직하게는 1~100질량%, 보다 바람직하게는 50~100질량%이다. In the polymerization initiator of the present invention and the photosensitive resin composition of the present invention, the polymerization initiator (A) contains at least one compound represented by the above general formula (I). The content of the compound represented by the general formula (I) in the polymerization initiator is preferably 1 to 100% by mass, more preferably 50 to 100% by mass.
본 발명의 감광성 수지 조성물에서, 중합 개시제(A)의 함유량은 감광성 수지(B) 100질량부에 대하여 바람직하게는 1~20질량부, 보다 바람직하게는 1~10질량부이다. 중합 개시제(A)의 함유량을 1질량부 이상으로 함으로써 감도 부족에 의한 경화 불량을 방지하기 쉽기 때문에 바람직하고, 20질량부 이하로 함으로써 광 조사 시 또는 가열 시의 휘발물을 억제할 수 있기 때문에 바람직하다. In the photosensitive resin composition of the present invention, the content of the polymerization initiator (A) is preferably 1 to 20 parts by mass, more preferably 1 to 10 parts by mass, based on 100 parts by mass of the photosensitive resin (B). It is preferable that the content of the polymerization initiator (A) is 1 part by mass or more because it is easy to prevent curing failure due to lack of sensitivity, and it is preferable that the content of the polymerization initiator (A) is 20 parts by mass or less because volatile substances can be suppressed when irradiated with light or heated. do.
<감광성 수지(B)> <Photosensitive resin (B)>
본 발명에서 사용되는 감광성 수지(B)는 음이온 중합성 관능기 또는 염기를 촉매로 하고 경화 온도가 저온화되는 수지를 나타내고, 자외선 등의 에너지 선을 조사함으로써 중합하여 경화하는 감광성 수지 또는 경화 온도가 저온화되는 경화 수지이다. 상기 음이온 중합성 관능기란, 자외선 등의 활성 에너지 선에 의해 광 염기 발생제로부터 발생하는 염기에 의해 중합할 수 있는 관능기를 의미하고, 예를 들면, 에폭시기, 에피설파이드기, 환상 모노머(δ-발레로락톤, ε-카프로락탐), 이소시아네이트와 알코올에 의한 우레탄 결합 형성의 촉매, (메타)아크릴기의 마이켈 부가 촉매, 실리콘 수지의 가교 반응의 촉매 등을 들 수 있다. 감광성 수지(B)로는 예를 들면, 에폭시 수지, 페놀 수지, 폴리아미드 수지, 폴리우레탄 수지, 나일론 수지, 폴리에스테르 수지, 실리콘 수지 등을 들 수 있다. 이들 수지는 단독으로 사용해도 되고, 2종 이상을 병용해도 된다. 그 중에서도 신속하게 반응이 진행되는 것이나 접착성이 양호하다는 점에서 에폭시 수지와 페놀 수지의 조합이 알맞다. The photosensitive resin (B) used in the present invention refers to a resin that uses an anionically polymerizable functional group or base as a catalyst and has a low curing temperature, and is a photosensitive resin that polymerizes and cures by irradiating energy rays such as ultraviolet rays or has a low curing temperature. It is a hardening resin that is converted to heat. The anionic polymerizable functional group refers to a functional group that can be polymerized by a base generated from a photobase generator by active energy rays such as ultraviolet rays, and includes, for example, an epoxy group, an episulfide group, and a cyclic monomer (δ-vale). Rolactone, ε-caprolactam), a catalyst for urethane bond formation by isocyanate and alcohol, a Michell addition catalyst of a (meth)acrylic group, and a catalyst for the crosslinking reaction of a silicone resin. Examples of the photosensitive resin (B) include epoxy resin, phenol resin, polyamide resin, polyurethane resin, nylon resin, polyester resin, and silicone resin. These resins may be used individually, or two or more types may be used together. Among them, the combination of epoxy resin and phenol resin is suitable because the reaction proceeds quickly and has good adhesiveness.
상기 에폭시 수지로는 예를 들면, 하이드로퀴논, 레조르신, 피로카테콜, 플로로글루시놀 등의 단핵 다가 페놀 화합물의 폴리글리시딜에테르 화합물; 디하이드록시나프탈렌, 비페놀, 메틸렌비스페놀(비스페놀F), 메틸렌비스(오르토크레졸), 에틸리덴비스페놀, 이소프로필리덴비스페놀(비스페놀A), 4,4'-디하이드록시벤조페논, 이소프로필리덴비스(오르토크레졸), 테트라브로모비스페놀A, 1,3-비스(4-하이드록시쿠밀벤젠), 1,4-비스(4-하이드록시쿠밀벤젠), 1,1,3-트리스(4-하이드록시페닐)부탄, 1,1,2,2-테트라(4-하이드록시페닐)에탄, 티오비스페놀, 설포비스페놀, 옥시비스페놀, 페놀노볼락, 오르토크레졸노볼락, 에틸페놀노볼락, 부틸페놀노볼락, 옥틸페놀노볼락, 레조르신노볼락, 테르펜페놀 등의 다핵 다가 페놀 화합물의 폴리글리시딜에테르 화합물; 에틸렌글리콜, 프로필렌글리콜, 부틸렌글리콜, 헥산디올, 폴리글리콜, 티오디글리콜, 글리세린, 트리메틸올프로판, 펜타에리트리톨, 소르비톨, 비스페놀A-에틸렌옥사이드 부가물 등의 다가 알코올류의 폴리글리시딜에테르; 말레산, 푸마르산, 이타콘산, 석신산, 글루타르산, 수베르산, 아디프산, 아젤라산, 세바스산, 다이머산, 트리머산, 프탈산, 이소프탈산, 테레프탈산, 트리멜리트산, 트리메스산, 피로멜리트산, 테트라하이드로프탈산, 헥사하이드로프탈산, 엔도메틸렌테트라하이드로프탈산 등의 지방족, 방향족 또는 지환족 다염기산의 글리시딜에스테르류, 및 글리시딜메타크릴레이트의 단독 중합체 또는 공중합체; N,N-디글리시딜아닐린, 비스(4-(N-메틸-N-글리시딜아미노)페닐)메탄, 디글리시딜오르토톨루이딘 등의 글리시딜아미노기를 가지는 에폭시 화합물; 비닐시클로헥센디에폭시드, 디시클로펜탄디엔디에폭사이드, 3,4-에폭시시클로헥실메틸-3,4-에폭시시클로헥산카르복실레이트, 3,4-에폭시-6-메틸시클로헥실메틸-6-메틸시클로헥산카르복실레이트, 비스(3,4-에폭시-6-메틸시클로헥실메틸)아디페이트 등의 환상 올레핀 화합물의 에폭시화물; 에폭시화폴리부타디엔, 에폭시화아크릴로니트릴-부타디엔 공중합물, 에폭시화스티렌-부타디엔 공중합물 등의 에폭시화 공역 디엔 중합체, 트리글리시딜이소시아누레이트 등의 복소환 화합물을 들 수 있다. 또한, 이들 에폭시 수지는 말단 이소시아네이트의 프리폴리머에 의해 내부 가교된 것 혹은 다가의 활성 수소 화합물(다가 페놀, 폴리아민, 카르보닐기 함유 화합물, 폴리인산에스테르 등)로 고분자량화된 것이어도 된다. Examples of the epoxy resin include polyglycidyl ether compounds of mononuclear polyhydric phenol compounds such as hydroquinone, resorcinol, pyrocatechol, and phloroglucinol; Dihydroxynaphthalene, biphenol, methylenebisphenol (bisphenol F), methylenebis(orthocresol), ethylidenebisphenol, isopropylidenebisphenol (bisphenol A), 4,4'-dihydroxybenzophenone, isopropylidenebis (orthocresol), tetrabromobisphenol A, 1,3-bis(4-hydroxycumylbenzene), 1,4-bis(4-hydroxycumylbenzene), 1,1,3-tris(4-hyde Roxyphenyl)butane, 1,1,2,2-tetra(4-hydroxyphenyl)ethane, thiobisphenol, sulfobisphenol, oxybisphenol, phenol novolak, orthocresol novolak, ethylphenol novolak, butylphenol novolak , polyglycidyl ether compounds of polynuclear polyhydric phenol compounds such as octylphenol novolak, resorcinol novolak, and terpene phenol; Polyglycidyl ethers of polyhydric alcohols such as ethylene glycol, propylene glycol, butylene glycol, hexanediol, polyglycol, thiodiglycol, glycerin, trimethylolpropane, pentaerythritol, sorbitol, and bisphenol A-ethylene oxide adducts. ; Maleic acid, fumaric acid, itaconic acid, succinic acid, glutaric acid, suberic acid, adipic acid, azelaic acid, sebacic acid, dimer acid, trimeric acid, phthalic acid, isophthalic acid, terephthalic acid, trimellitic acid, trimesic acid, glycidyl esters of aliphatic, aromatic, or cycloaliphatic polybasic acids such as pyromellitic acid, tetrahydrophthalic acid, hexahydrophthalic acid, and endomethylenetetrahydrophthalic acid, and homopolymers or copolymers of glycidyl methacrylate; Epoxy compounds having a glycidylamino group such as N,N-diglycidylaniline, bis(4-(N-methyl-N-glycidylamino)phenyl)methane, and diglycidyl orthotoluidine; Vinylcyclohexenediepoxide, dicyclopentanediene diepoxide, 3,4-epoxycyclohexylmethyl-3,4-epoxycyclohexanecarboxylate, 3,4-epoxy-6-methylcyclohexylmethyl-6- Epoxidized products of cyclic olefin compounds such as methylcyclohexanecarboxylate and bis(3,4-epoxy-6-methylcyclohexylmethyl)adipate; Epoxidized conjugated diene polymers such as epoxidized polybutadiene, epoxidized acrylonitrile-butadiene copolymer, and epoxidized styrene-butadiene copolymer, and heterocyclic compounds such as triglycidyl isocyanurate. In addition, these epoxy resins may be internally crosslinked with a terminal isocyanate prepolymer or may have a high molecular weight with a polyhydric active hydrogen compound (polyhydric phenol, polyamine, carbonyl group-containing compound, polyphosphoric acid ester, etc.).
상기 에폭시 수지 중에서는 경화성이 뛰어난 점에서, 글리시딜기를 가지는 것이 바람직하고, 2관능 이상의 글리시딜기를 가지는 것이 보다 바람직하다. Among the above-mentioned epoxy resins, those having a glycidyl group are preferable because of their excellent curability, and those having a bifunctional or higher glycidyl group are more preferable.
상기 페놀 수지로는 1분자 중에 2개 이상의 하이드록시기를 가지는 페놀 수지가 바람직하고, 일반적으로 공지의 것을 사용할 수 있다. 페놀 수지로는 예를 들면, 비스페놀A형 페놀 수지, 비스페놀E형 페놀 수지, 비스페놀F형 페놀 수지, 비스페놀S형 페놀 수지, 페놀노볼락 수지, 비스페놀A노볼락형 페놀 수지, 글리시딜에스테르형 페놀 수지, 아르알킬노볼락형 페놀 수지, 비페닐아르알킬형 페놀 수지, 크레졸노볼락형 페놀 수지, 다관능 페놀 수지, 나프톨 수지, 나프톨노볼락 수지, 다관능 나프톨 수지, 안트라센형 페놀 수지, 나프탈렌 골격 변성 노볼락형 페놀 수지, 페놀아르알킬형 페놀 수지, 나프톨아르알킬형 페놀 수지, 디시클로펜타디엔형 페놀 수지, 비페닐형 페놀 수지, 지환식 페놀 수지, 폴리올형 페놀 수지, 인 함유 페놀 수지, 중합성 불포화 탄화수소기 함유 페놀 수지 및, 수산기 함유 실리콘 수지류를 들 수 있는데, 특별히 제한되는 것은 아니다. 이들 페놀 수지는 1종을 단독으로 또는 2종 이상을 조합하여 사용할 수 있다. As the phenol resin, a phenol resin having two or more hydroxy groups per molecule is preferable, and generally known ones can be used. Phenol resins include, for example, bisphenol A type phenol resin, bisphenol E type phenolic resin, bisphenol F type phenol resin, bisphenol S type phenol resin, phenol novolak resin, bisphenol A novolak type phenolic resin, and glycidyl ester type. Phenol resin, aralkyl novolak type phenol resin, biphenyl aralkyl type phenol resin, cresol novolak type phenol resin, polyfunctional phenol resin, naphthol resin, naphthol novolak resin, polyfunctional naphthol resin, anthracene type phenol resin, naphthalene Skeletal-modified novolak-type phenol resin, phenol-aralkyl-type phenol resin, naphthol aralkyl-type phenol resin, dicyclopentadiene-type phenol resin, biphenyl-type phenol resin, alicyclic phenol resin, polyol-type phenol resin, phosphorus-containing phenol resin. , phenolic resins containing polymerizable unsaturated hydrocarbon groups, and silicone resins containing hydroxyl groups, but are not particularly limited. These phenol resins can be used individually or in combination of two or more types.
상기 폴리아미드 수지로는 산2무수물로는 에틸렌테트라카르복실산2무수물, 1,2,3,4-벤젠테트라카르복실산2무수물, 1,2,3,4-시클로헥산테트라카르복실산2무수물, 2,2',3,3'-벤조페논테트라카르복실산2무수물, 2,2,3,3-비페닐테트라카르복실산무수물, 1,4,5,8-나프탈렌테트라카르복실산2무수물, 디아민으로는 (o-, m- 혹은 p-)페닐렌디아민, (3,3'- 혹은 4,4'-)디아미노디페닐에테르, 디아미노벤조페논, (3,3'- 혹은 4,4'-)디아미노디페닐메탄 등을 원료로 하는 수지를 들 수 있다. Examples of the polyamide resin include acid dianhydride, ethylene tetracarboxylic dianhydride, 1,2,3,4-benzene tetracarboxylic dianhydride, and 1,2,3,4-cyclohexane tetracarboxylic acid dianhydride. Anhydride, 2,2',3,3'-benzophenonetetracarboxylic dianhydride, 2,2,3,3-biphenyltetracarboxylic anhydride, 1,4,5,8-naphthalenetetracarboxylic acid Dianhydrides and diamines include (o-, m- or p-)phenylenediamine, (3,3'- or 4,4'-)diaminodiphenyl ether, diaminobenzophenone, (3,3'- Alternatively, resins made from 4,4'-)diaminodiphenylmethane or the like can be mentioned.
상기 폴리우레탄 수지로는 디이소시아네이트로서, 톨릴렌디이소시아네이트, 헥사메틸렌디이소시아네이트, 디페닐메탄디이소시아네이트, 이소포론디이소시아네이트 등의 다관능 이소시아네이트와, 폴리에테르폴리올, 폴리에스테르폴리올, 폴리카보네이트폴리올 등의 폴리올(다관능 알코올)을 원료로 하는 수지 등을 들 수 있다. The polyurethane resin includes diisocyanates such as polyfunctional isocyanates such as tolylene diisocyanate, hexamethylene diisocyanate, diphenylmethane diisocyanate, and isophorone diisocyanate, and polyols such as polyether polyol, polyester polyol, and polycarbonate polyol. Resins made from (polyfunctional alcohol) as a raw material, etc. can be mentioned.
또한, 상기 나일론 수지로는 ε-카프로락탐, 라우릴락탐 등의 환상 모노머를 원료로 한 수지 등을 들 수 있다. In addition, examples of the nylon resin include resins made from cyclic monomers such as ε-caprolactam and lauryllactam.
또한, 상기 폴리에스테르 수지로는 δ-발레로락톤, β-프로피오락톤 등의 환상 모노머를 원료로 한 수지 등을 들 수 있다. In addition, examples of the polyester resin include resins made from cyclic monomers such as δ-valerolactone and β-propiolactone.
또한, 상기 실리콘 수지로는 메틸실리콘레진, 메틸/페닐실리콘레진, 유기 수지 변성 실리콘레진 등을 들 수 있다. In addition, examples of the silicone resin include methyl silicone resin, methyl/phenyl silicone resin, and organic resin-modified silicone resin.
<첨가제> <Additives>
본 발명의 감광성 수지 조성물에는 임의 성분으로서, 무기 화합물, 색재, 잠재성 에폭시 경화제, 연쇄 이동제, 증감제, 용제 등의 첨가제를 사용할 수 있다. In the photosensitive resin composition of the present invention, additives such as inorganic compounds, colorants, latent epoxy curing agents, chain transfer agents, sensitizers, and solvents can be used as optional components.
상기 무기 화합물로는 예를 들면, 산화니켈, 산화철, 산화이리듐, 산화티탄, 산화아연, 산화마그네슘, 산화칼슘, 산화칼륨, 실리카, 알루미나 등의 금속 산화물; 층상 점토광물, 밀로리블루, 탄산칼슘, 탄산마그네슘, 코발트계, 망간계, 유리 분말(특히 유리 프릿(glass frit)), 마이카, 탤크, 카올린, 페로시안화물, 각종 금속황산염, 황화물, 셀렌화물, 알루미늄실리케이트, 칼슘실리케이트, 수산화알루미늄, 백금, 금, 은, 구리 등을 들 수 있다. 이들 무기 화합물은 예를 들면, 충전제, 반사 방지제, 도전재, 안정제, 난연제, 기계적 강도 향상제, 특수파장 흡수제, 발잉크제 등으로 사용된다. Examples of the inorganic compounds include metal oxides such as nickel oxide, iron oxide, iridium oxide, titanium oxide, zinc oxide, magnesium oxide, calcium oxide, potassium oxide, silica, and alumina; Layered clay minerals, Milori blue, calcium carbonate, magnesium carbonate, cobalt-based, manganese-based, glass powder (especially glass frit), mica, talc, kaolin, ferrocyanide, various metal sulfates, sulfides, and selenides. , aluminum silicate, calcium silicate, aluminum hydroxide, platinum, gold, silver, copper, etc. These inorganic compounds are used as fillers, antireflection agents, conductive materials, stabilizers, flame retardants, mechanical strength improvers, special wavelength absorbers, ink repellent agents, etc., for example.
상기 색재로는 안료, 염료, 천연 색소 등을 들 수 있다. 이들 색재는 단독으로 또는 2종 이상을 혼합하여 사용할 수 있다. The coloring material may include pigments, dyes, natural pigments, etc. These colorants can be used individually or in combination of two or more types.
상기 안료로는 예를 들면, 니트로소 화합물; 니트로 화합물; 아조 화합물; 디아조 화합물; 크산텐 화합물; 퀴놀린 화합물; 안트라퀴논 화합물; 쿠마린 화합물; 프탈로시아닌 화합물; 이소인돌리논 화합물; 이소인돌린 화합물; 퀴나크리돈 화합물; 안탄트론 화합물; 페리논 화합물; 페릴렌 화합물; 디케토피롤로피롤 화합물; 티오인디고 화합물; 디옥사진 화합물; 트리페닐메탄 화합물; 퀴노프탈론 화합물; 나프탈렌테트라카르복실산; 아조 염료, 시아닌 염료의 금속착체 화합물; 레이크 안료; 퍼니스법, 채널법 또는 서멀법에 의해 얻어지는 카본 블랙, 혹은 아세틸렌 블랙, 케첸 블랙 또는 램프 블랙 등의 카본 블랙; 상기 카본 블랙을 에폭시 수지로 조정 또는 피복한 것, 상기 카본 블랙을 미리 수지 용액 중에서 분산 처리하고, 20~200㎎/g의 수지를 흡착시킨 것, 상기 카본 블랙을 산성 또는 알카리성 표면 처리한 것, 평균 입경이 8㎚ 이상이고 DBP 흡유량이 90㎖/100g 이하인 카본 블랙, 950℃에서의 휘발분 중의 CO 및 CO2로부터 산출된 전체 산소량이 표면적 100㎡당 9㎎ 이상인 카본 블랙; 흑연, 흑연화 카본 블랙, 활성탄, 탄소 섬유, 카본 나노 튜브, 카본 마이크로 코일, 카본 나노혼, 카본 에어로겔, 풀러렌; 아닐린 블랙, 피그먼트 블랙 7, 티탄 블랙; 산화크롬녹, 밀로리블루, 코발트녹, 코발트청, 망간계, 페로시안화물, 인산염군청, 감청, 울트라마린, 세룰리안 블루, 비리디언, 에메랄드그린, 황산연, 황색연, 아연황, 벵갈라(적색 산화철(III)), 카드뮴적, 합성 철흑, 엄버 등의 유기 또는 무기 안료를 사용할 수 있다. 이들 안료는 단독으로 혹은 복수를 혼합하여 사용할 수 있다. Examples of the pigment include nitroso compounds; nitro compounds; azo compounds; diazo compounds; xanthene compounds; quinoline compounds; anthraquinone compounds; coumarin compounds; phthalocyanine compounds; isoindolinone compounds; isoindoline compounds; quinacridone compounds; antanthrone compounds; Perinone compounds; perylene compounds; diketopyrrolopyrrole compounds; thioindigo compounds; dioxazine compounds; triphenylmethane compound; Quinophthalone compounds; naphthalenetetracarboxylic acid; Azo dye, metal complex compound of cyanine dye; lake pigment; Carbon black obtained by a furnace method, a channel method, or a thermal method, or carbon black such as acetylene black, Ketjen black, or lamp black; The carbon black is adjusted or coated with an epoxy resin, the carbon black is previously dispersed in a resin solution and 20 to 200 mg/g of the resin is adsorbed, the carbon black is subjected to an acidic or alkaline surface treatment, Carbon black with an average particle diameter of 8 nm or more and a DBP oil absorption of 90 ml/100 g or less, carbon black with a total oxygen amount calculated from CO and CO 2 in volatile components at 950°C of 9 mg or more per 100 m2 of surface area; Graphite, graphitized carbon black, activated carbon, carbon fiber, carbon nanotube, carbon microcoil, carbon nanohorn, carbon airgel, fullerene; Aniline Black, Pigment Black 7, Titanium Black; Chromium oxide rust, Milori blue, cobalt rust, cobalt blue, manganese, ferrocyanide, ultramarine phosphate, royal blue, ultramarine, cerulean blue, viridian, emerald green, lead sulfate, lead yellow, zinc sulfur, Bengala ( Organic or inorganic pigments such as red iron (III) oxide, cadmium red, synthetic iron black, and umber can be used. These pigments can be used individually or in combination.
상기 안료로는 시판의 안료를 사용할 수도 있고, 예를 들면, 피그먼트 레드 1, 2, 3, 9, 10, 14, 17, 22, 23, 31, 38, 41, 48, 49, 88, 90, 97, 112, 119, 122, 123, 144, 149, 166, 168, 169, 170, 171, 177, 179, 180, 184, 185, 192, 200, 202, 209, 215, 216, 217, 220, 223, 224, 226, 227, 228, 240, 254; 피그먼트 오렌지 13, 31, 34, 36, 38, 43, 46, 48, 49, 51, 52, 55, 59, 60, 61, 62, 64, 65, 71; 피그먼트 옐로우 1, 3, 12, 13, 14, 16, 17, 20, 24, 55, 60, 73, 81, 83, 86, 93, 95, 97, 98, 100, 109, 110, 113, 114, 117, 120, 125, 126, 127, 129, 137, 138, 139, 147, 148, 150, 151, 152, 153, 154, 166, 168, 175, 180, 185; 피그먼트 그린 7, 10, 36; 피그먼트 블루 15, 15:1, 15:2, 15:3, 15:4, 15:5, 15:6, 22, 24, 56, 60, 61, 62, 64; 피그먼트 바이올렛 1, 19, 23, 27, 29, 30, 32, 37, 40, 50 등을 들 수 있다. As the pigment, a commercially available pigment can be used, for example, Pigment Red 1, 2, 3, 9, 10, 14, 17, 22, 23, 31, 38, 41, 48, 49, 88, 90. , 97, 112, 119, 122, 123, 144, 149, 166, 168, 169, 170, 171, 177, 179, 180, 184, 185, 192, 200, 202, 209, 215, 216, 217, 2 20 , 223, 224, 226, 227, 228, 240, 254; Pigment Orange 13, 31, 34, 36, 38, 43, 46, 48, 49, 51, 52, 55, 59, 60, 61, 62, 64, 65, 71; Pigment yellow 1, 3, 12, 13, 14, 16, 17, 20, 24, 55, 60, 73, 81, 83, 86, 93, 95, 97, 98, 100, 109, 110, 113, 114 , 117, 120, 125, 126, 127, 129, 137, 138, 139, 147, 148, 150, 151, 152, 153, 154, 166, 168, 175, 180, 185; Pigment Green 7, 10, 36; Pigment Blue 15, 15:1, 15:2, 15:3, 15:4, 15:5, 15:6, 22, 24, 56, 60, 61, 62, 64; Pigment Violet 1, 19, 23, 27, 29, 30, 32, 37, 40, 50, etc. are mentioned.
상기 염료로는 아조 염료, 안트라퀴논 염료, 인디고이드 염료, 트리아릴메탄 염료, 크산텐 염료, 알리자린 염료, 아크리딘 염료, 스틸벤 염료, 티아졸 염료, 나프톨 염료, 퀴놀린 염료, 니트로 염료, 인다민 염료, 옥사진 염료, 프탈로시아닌 염료, 시아닌 염료 등의 염료 등을 들 수 있고, 이들은 복수를 혼합하여 사용해도 된다. The dyes include azo dyes, anthraquinone dyes, indigoid dyes, trialrylmethane dyes, xanthene dyes, alizarin dyes, acridine dyes, stilbene dyes, thiazole dyes, naphthol dyes, quinoline dyes, nitro dyes, and inda dyes. Dyes such as min dye, oxazine dye, phthalocyanine dye, and cyanine dye can be mentioned, and these may be used in combination.
상기 잠재성 에폭시 경화제로는 예를 들면, 디시안디아미드, 변성 폴리아민, 하이드라지드류, 4,4'-디아미노디페닐설폰, 3불화붕소아민 착염, 이미다졸류, 구아나민류, 이미다졸류, 우레아류 및 멜라민 등을 들 수 있다. Examples of the latent epoxy curing agent include dicyandiamide, modified polyamine, hydrazide, 4,4'-diaminodiphenylsulfone, boronamine trifluoride complex salt, imidazole, guanamine, and imidazole. , ureas, and melamine.
상기 연쇄 이동제 또는 증감제로는 일반적으로 황 원자 함유 화합물이 사용된다. 예를 들면 티오글리콜산, 티오말산, 티오살리실산, 2-메르캅토프로피온산, 3-메르캅토프로피온산, 3-메르캅토부티르산, N-(2-메르캅토프로피오닐)글리신, 2-메르캅토니코틴산, 3-[N-(2-메르캅토에틸)카르바모일]프로피온산, 3-[N-(2-메르캅토에틸)아미노]프로피온산, N-(3-메르캅토프로피오닐)알라닌, 2-메르캅토에탄설폰산, 3-메르캅토프로판설폰산, 4-메르캅토부탄설폰산, 도데실(4-메틸티오)페닐에테르, 2-메르캅토에탄올, 3-메르캅토-1,2-프로판디올, 1-메르캅토-2-프로파놀, 3-메르캅토-2-부탄올, 메르캅토페놀, 2-메르캅토에틸아민, 2-메르캅토이미다졸, 2-메르캅토벤조이미다졸, 2-메르캅토-3-피리디놀, 2-메르캅토벤조티아졸, 메르캅토아세트산, 트리메틸올프로판트리스(3-메르캅토프로피오네이트), 펜타에리트리톨테트라키스(3-메르캅토프로피오네이트) 등의 메르캅토 화합물, 상기 메르캅토 화합물을 산화하여 얻어지는 디설파이드 화합물, 요오드아세트산, 요오드프로피온산, 2-요오드에탄올, 2-요오드에탄설폰산, 3-요오드프로판설폰산 등의 요오드화알킬 화합물, 트리메틸올프로판트리스(3-메르캅토이소부티레이트), 부탄디올비스(3-메르캅토이소부티레이트), 헥산디티올, 데칸디티올, 1,4-디메틸메르캅토벤젠, 부탄디올비스티오프로피오네이트, 부탄디올비스티오글리콜레이트, 에틸렌글리콜비스티오글리콜레이트, 트리메틸올프로판트리스티오글리콜레이트, 부탄디올비스티오프로피오네이트, 트리메틸올프로판트리스티오프로피오네이트, 트리메틸올프로판트리스티오글리콜레이트, 펜타에리트리톨테트라키스티오프로피오네이트, 펜타에리트리톨테트라키스티오글리콜레이트, 트리스하이드록시에틸트리스티오프로피오네이트, 디에틸티옥산톤, 디이소프로필티옥산톤, 하기 화합물 No.C1, 트리메르캅토프로피온산트리스(2-하이드록시에틸)이소시아누레이트 등의 지방족 다관능 티올 화합물, 쇼와 덴코사 제품 카렌즈 MT BD1, PE1, NR1 등을 들 수 있다. As the chain transfer agent or sensitizer, a sulfur atom-containing compound is generally used. For example, thioglycolic acid, thiomalic acid, thiosalicylic acid, 2-mercaptopropionic acid, 3-mercaptopropionic acid, 3-mercaptobutyric acid, N-(2-mercaptopropionyl)glycine, 2-mercaptonicotinic acid, 3-mercaptopropionic acid. -[N-(2-mercaptoethyl)carbamoyl]propionic acid, 3-[N-(2-mercaptoethyl)amino]propionic acid, N-(3-mercaptopropionyl)alanine, 2-mercaptoethane Sulfonic acid, 3-mercaptopropanesulfonic acid, 4-mercaptobutanesulfonic acid, dodecyl(4-methylthio)phenyl ether, 2-mercaptoethanol, 3-mercapto-1,2-propanediol, 1- Mercapto-2-propanol, 3-mercapto-2-butanol, mercaptophenol, 2-mercaptoethylamine, 2-mercaptoimidazole, 2-mercaptobenzimidazole, 2-mercapto-3 -Mercapto compounds such as pyridinol, 2-mercaptobenzothiazole, mercaptoacetic acid, trimethylolpropanetris (3-mercaptopropionate), and pentaerythritol tetrakis (3-mercaptopropionate), Disulfide compounds obtained by oxidizing the above mercapto compounds, alkyl iodides such as iodoacetic acid, iodopropionic acid, 2-iodoethanol, 2-iodoethanesulfonic acid, and 3-iodopropanesulfonic acid, trimethylolpropane tris (3-mercap toisobutyrate), butanediolbis (3-mercaptoisobutyrate), hexanedithiol, decanedithiol, 1,4-dimethylmercaptobenzene, butanediol bisthiopropionate, butanediol bisthioglycolate, ethylene glycol bisthiol Oglycolate, Trimethylolpropane Tristioglycolate, Butanediol Bisthiopropionate, Trimethylolpropane Tristiopropionate, Trimethylolpropane Tristioglycolate, Pentaerythritol Tetrachistiopropionate, Pentaerythritol Tetra Kistioglycolate, trishydroxyethyltristhiopropionate, diethylthioxanthone, diisopropylthioxanthone, the following compound No.C1, trimercaptopropionic acid tris(2-hydroxyethyl)isocyanurate and aliphatic polyfunctional thiol compounds, such as Karenz MT BD1, PE1, and NR1 manufactured by Showa Denko.
상기 용제로는 통상 상기의 각 성분(중합 개시제(A) 및 감광성 수지(B) 등)을 용해 또는 분산할 수 있는 용제, 예를 들면, 메틸에틸케톤, 메틸아밀케톤, 디에틸케톤, 아세톤, 메틸이소프로필케톤, 메틸이소부틸케톤, 시클로헥사논, 2-헵타논 등의 케톤류; 에틸에테르, 디옥산, 테트라하이드로푸란, 1,2-디메톡시에탄, 1,2-디에톡시에탄, 디프로필렌글리콜디메틸에테르 등의 에테르계 용제; 아세트산메틸, 아세트산에틸, 아세트산-n-프로필, 아세트산이소프로필, 아세트산n-부틸, 아세트산시클로헥실, 락트산에틸, 석신산디메틸, 텍사놀 등의 에스테르계 용제; 에틸렌글리콜모노메틸에테르, 에틸렌글리콜모노에틸에테르 등의 셀로솔브계 용제; 메탄올, 에탄올, 이소- 또는 n-프로파놀, 이소- 또는 n-부탄올, 아밀알코올 등의 알코올계 용제; 에틸렌글리콜모노메틸아세테이트, 에틸렌글리콜모노에틸아세테이트, 프로필렌글리콜-1-모노메틸에테르-2-아세테이트, 디프로필렌글리콜모노메틸에테르아세테이트, 3-메톡시부틸아세테이트, 에톡시에틸프로피오네이트 등의 에테르에스테르계 용제; 벤젠, 톨루엔, 크실렌 등의 BTX계 용제; 헥산, 헵탄, 옥탄, 시클로헥산 등의 지방족 탄화수소계 용제; 테레빈유, D-리모넨, 피넨 등의 테르펜계 탄화수소유; 미네랄 스피릿, 스와졸 #310(코스모 마쓰야마 세키유(주)), 솔벳소 #100(엑손 가가쿠(주)) 등의 파라핀계 용제; 사염화탄소, 클로로포름, 트리클로로에틸렌, 염화메틸렌, 1,2-디클로로에탄 등의 할로겐화 지방족 탄화수소계 용제; 클로로벤젠 등의 할로겐화 방향족 탄화수소계 용제; 카르비톨계 용제; 아닐린; 트리에틸아민; 피리딘; 아세트산; 아세토니트릴; 이황화탄소; N,N-디메틸포름아미드; N,N-디메틸아세트아미드; N-메틸피롤리돈; 디메틸설폭시드; 물 등을 사용할 수 있고, 이들 용제는 1종으로 또는 2종 이상의 혼합 용제로 사용할 수 있다. The solvent is usually a solvent capable of dissolving or dispersing each of the components (polymerization initiator (A) and photosensitive resin (B), etc.), such as methyl ethyl ketone, methyl amyl ketone, diethyl ketone, acetone, Ketones such as methyl isopropyl ketone, methyl isobutyl ketone, cyclohexanone, and 2-heptanone; Ether solvents such as ethyl ether, dioxane, tetrahydrofuran, 1,2-dimethoxyethane, 1,2-diethoxyethane, and dipropylene glycol dimethyl ether; Ester solvents such as methyl acetate, ethyl acetate, n-propyl acetate, isopropyl acetate, n-butyl acetate, cyclohexyl acetate, ethyl lactate, dimethyl succinate, and Texanol; Cellosolv-based solvents such as ethylene glycol monomethyl ether and ethylene glycol monoethyl ether; Alcohol-based solvents such as methanol, ethanol, iso- or n-propanol, iso- or n-butanol, and amyl alcohol; Ether esters such as ethylene glycol monomethyl acetate, ethylene glycol monoethyl acetate, propylene glycol-1-monomethyl ether-2-acetate, dipropylene glycol monomethyl ether acetate, 3-methoxybutyl acetate, and ethoxyethyl propionate. System solvent; BTX-based solvents such as benzene, toluene, and xylene; Aliphatic hydrocarbon solvents such as hexane, heptane, octane, and cyclohexane; Terpene hydrocarbon oils such as turpentine, D-limonene, and pinene; Paraffin-based solvents such as mineral spirits, Swasol #310 (Cosmo Matsuyama Sekiyu Co., Ltd.), and Solvetso #100 (Exxon Chemical Co., Ltd.); Halogenated aliphatic hydrocarbon solvents such as carbon tetrachloride, chloroform, trichlorethylene, methylene chloride, and 1,2-dichloroethane; Halogenated aromatic hydrocarbon solvents such as chlorobenzene; Carbitol-based solvent; aniline; triethylamine; pyridine; acetic acid; acetonitrile; carbon disulfide; N,N-dimethylformamide; N,N-dimethylacetamide; N-methylpyrrolidone; dimethyl sulfoxide; Water and the like can be used, and these solvents can be used alone or as a mixed solvent of two or more kinds.
이들 중에서도 알칼리 현상성, 패터닝성, 제막(製膜)성, 용해성의 점에서, 케톤류 또는 에테르에스테르계 용제, 특히, 프로필렌글리콜-1-모노메틸에테르-2-아세테이트 또는 시클로헥사논이 바람직하게 사용된다. Among these, ketones or ether ester solvents, especially propylene glycol-1-monomethyl ether-2-acetate or cyclohexanone, are preferably used in terms of alkali developability, patterning properties, film forming properties, and solubility. do.
본 발명의 감광성 수지 조성물에서, 용제의 함유량은 특별히 제한되지 않고, 각 성분이 균일하게 분산 또는 용해되며, 또한 본 발명의 감광성 수지 조성물이 각 용도에 적합한 액상 내지 페이스트 형상을 보이는 양이면 되는데, 통상, 본 발명의 감광성 수지 조성물 중의 고형분(용제 이외의 전성분)의 양이 10~90질량%가 되는 범위에서 용제를 함유시키는 것이 바람직하다. In the photosensitive resin composition of the present invention, the content of the solvent is not particularly limited, and any amount is sufficient as long as each component is uniformly dispersed or dissolved and the photosensitive resin composition of the present invention exhibits a liquid or paste form suitable for each application. , it is preferable to contain the solvent in a range where the amount of solid content (all components other than the solvent) in the photosensitive resin composition of the present invention is 10 to 90 mass%.
또한, 본 발명의 감광성 수지 조성물은 유기 중합체를 사용함으로써, 경화물의 특성을 개선할 수도 있다. 상기 유기 중합체로는 예를 들면, 폴리스티렌, 폴리메틸메타크릴레이트, 메틸메타크릴레이트-에틸아크릴레이트 공중합체, 폴리(메타)아크릴산, 스티렌-(메타)아크릴산 공중합체, (메타)아크릴산-메틸메타크릴레이트 공중합체, 에틸렌-염화비닐 공중합체, 에틸렌-비닐 공중합체, 폴리염화비닐 수지, ABS 수지, 나일론 6, 나일론 66, 나일론 12, 우레탄 수지, 폴리카보네이트폴리비닐부티랄, 셀룰로오스에스테르, 폴리아크릴아미드, 포화 폴리에스테르, 페놀 수지, 페녹시 수지 등을 들 수 있다. Additionally, the photosensitive resin composition of the present invention can improve the properties of the cured product by using an organic polymer. Examples of the organic polymer include polystyrene, polymethyl methacrylate, methyl methacrylate-ethyl acrylate copolymer, poly(meth)acrylic acid, styrene-(meth)acrylic acid copolymer, and (meth)acrylic acid-methyl methacrylate. Crylate copolymer, ethylene-vinyl chloride copolymer, ethylene-vinyl copolymer, polyvinyl chloride resin, ABS resin, nylon 6, nylon 66, nylon 12, urethane resin, polycarbonate polyvinyl butyral, cellulose ester, polyacrylic Amide, saturated polyester, phenol resin, phenoxy resin, etc. can be mentioned.
상기 유기 중합체를 사용하는 경우, 그 사용량은 감광성 수지(B) 100질량부에 대하여, 바람직하게는 10~500질량부이다. When using the organic polymer, the amount used is preferably 10 to 500 parts by mass per 100 parts by mass of the photosensitive resin (B).
본 발명의 감광성 수지 조성물에는 더욱이 계면활성제, 실란 커플링제, 멜라민 화합물 등을 병용할 수 있다. Additionally, surfactants, silane coupling agents, melamine compounds, etc. can be used in combination with the photosensitive resin composition of the present invention.
상기 계면활성제로는 퍼플루오로알킬인산에스테르, 퍼플루오로알킬카르복실산염 등의 불소계 계면활성제; 고급지방산 알칼리염, 알킬설폰산염, 알킬황산염 등의 음이온계 계면활성제; 고급 아민 할로겐산염, 제4급 암모늄염 등의 양이온계 계면활성제; 폴리에틸렌글리콜알킬에테르, 폴리에틸렌글리콜지방산에스테르, 소르비탄지방산에스테르, 지방산모노글리세라이드 등의 비이온 계면활성제; 양성 계면활성제; 실리콘계 계면활성제 등의 계면활성제를 사용할 수 있고, 이들은 조합하여 사용해도 된다. The surfactant includes fluorine-based surfactants such as perfluoroalkyl phosphate ester and perfluoroalkyl carboxylate; Anionic surfactants such as higher fatty acid alkali salts, alkyl sulfonates, and alkyl sulfates; Cationic surfactants such as higher amine halide salts and quaternary ammonium salts; Nonionic surfactants such as polyethylene glycol alkyl ether, polyethylene glycol fatty acid ester, sorbitan fatty acid ester, and fatty acid monoglyceride; amphoteric surfactant; Surfactants such as silicone-based surfactants can be used, and these may be used in combination.
상기 실란 커플링제로는 예를 들면 신에쓰 가가꾸사 제품 실란 커플링제를 사용할 수 있고, 그 중에서도 KBE-9007, KBM-502, KBE-403 등의, 이소시아네이트기, 메타크릴로일기 또는 에폭시기를 가지는 실란 커플링제가 알맞게 사용된다. As the silane coupling agent, for example, a silane coupling agent manufactured by Shin-Etsu Chemical Co., Ltd. can be used, and among them, those having an isocyanate group, methacryloyl group, or epoxy group, such as KBE-9007, KBM-502, and KBE-403. A silane coupling agent is suitably used.
상기 멜라민 화합물로는 (폴리)메틸올멜라민, (폴리)메틸올글리콜우릴, (폴리)메틸올벤조구아나민, (폴리)메틸올우레아 등의 질소 화합물 중의 활성 메틸올기(CH2OH기)의 전부 또는 일부(적어도 2개)가 알킬에테르화된 화합물 등을 들 수 있다. The melamine compounds include active methylol groups (CH 2 OH groups) in nitrogen compounds such as (poly) methylol melamine, (poly) methylol glycoluril, (poly) methylol benzoguanamine, and (poly) methylol urea. and compounds in which all or part (at least two) are alkyl etherified.
여기서, 알킬에테르를 구성하는 알킬기로는 메틸기, 에틸기 또는 부틸기를 들 수 있고, 서로 동일해도 되고 달라도 된다. 또한, 알킬에테르화되어 있지 않은 메틸올기는 1분자 내에서 자기축합되어 있어도 되고, 2분자 사이에서 축합되어, 그 결과 올리고머 성분이 형성되어 있어도 된다. Here, the alkyl group constituting the alkyl ether may include a methyl group, an ethyl group, or a butyl group, and may be the same or different from each other. Additionally, the methylol group that is not alkyl etherified may be self-condensed within one molecule or may be condensed between two molecules, resulting in the formation of an oligomer component.
구체적으로는, 헥사메톡시메틸멜라민, 헥사부톡시메틸멜라민, 테트라메톡시메틸글리콜우릴, 테트라부톡시메틸글리콜우릴 등을 사용할 수 있다. Specifically, hexamethoxymethylmelamine, hexabutoxymethylmelamine, tetramethoxymethylglycoluril, tetrabutoxymethylglycoluril, etc. can be used.
이들 중에서도 용제에 대한 용해성, 감광성 수지 조성물로부터 결정 석출하기 어렵다는 점에서, 헥사메톡시메틸멜라민, 헥사부톡시메틸멜라민 등의 알킬에테르화된 멜라민이 바람직하다. Among these, alkyl etherified melamines such as hexamethoxymethylmelamine and hexabutoxymethylmelamine are preferable due to their solubility in solvents and difficulty in crystallizing from the photosensitive resin composition.
본 발명의 감광성 수지 조성물에서, (A) 중합 개시제 및 감광성 수지(B) 이외의 임의 성분(단, 무기 화합물, 색재, 및 용제는 제외함)의 사용량은 그 사용 목적에 따라 적절히 선택되고 특별히 제한되지 않지만, 바람직하게는 감광성 수지(B) 100질량부에 대하여 합계 50질량부 이하로 한다. In the photosensitive resin composition of the present invention, the amount of any component other than (A) the polymerization initiator and the photosensitive resin (B) (however, inorganic compounds, colorants, and solvents are excluded) is appropriately selected and specifically limited depending on the purpose of use. However, the total amount is preferably 50 parts by mass or less per 100 parts by mass of the photosensitive resin (B).
본 발명의 감광성 수지 조성물은 에너지 선을 조사하여 경화물로 할 수 있다. 상기 경화물은 용도에 따른 적절한 형상으로 형성된다. 예를 들면 막 형상의 경화물을 형성하는 경우에는 본 발명의 감광성 수지 조성물은 스핀 코터, 롤 코터, 바 코터, 다이 코터, 커튼 코터, 각종 인쇄, 침지 등의 공지의 수단으로, 소다 유리, 석영 유리, 반도체 기판, 금속, 종이, 플라스틱 등의 지지체 상에 적용할 수 있다. 또한, 일단 필름 등의 지지체 상에 실시한 후, 다른 지지체 상에 전사할 수도 있고, 그 적용 방법에 제한은 없다. The photosensitive resin composition of the present invention can be cured by irradiating energy rays. The cured product is formed into an appropriate shape depending on the intended use. For example, in the case of forming a film-like cured product, the photosensitive resin composition of the present invention can be used by known means such as spin coater, roll coater, bar coater, die coater, curtain coater, various printing, dipping, etc., using soda glass, quartz, etc. It can be applied to supports such as glass, semiconductor substrates, metal, paper, and plastic. Additionally, once it is applied on a support such as a film, it can be transferred onto another support, and there are no restrictions on the application method.
본 발명의 감광성 수지 조성물을 경화시킬 때에 사용되는 에너지 선의 광원으로는 초고압 수은 램프, 고압 수은 램프, 중압 수은 램프, 저압 수은 램프, 수은 증기 아크등, 크세논 아크등, 카본 아크등, 메탈할라이드 램프, 형광등, 텅스텐 램프, 엑시머 램프, 살균등, 발광 다이오드, CRT 광원 등으로부터 얻어지는 2000옹스트롬~7000옹스트롬의 파장을 가지는 전자파 에너지나 전자선, X선, 방사선 등의 고에너지 선을 이용할 수 있는데, 바람직하게는 파장 300~450㎚의 광을 발광하는 초고압 수은 램프, 수은 증기 아크등, 카본 아크등, 크세논 아크등 등이 이용된다. Light sources of energy rays used when curing the photosensitive resin composition of the present invention include ultra-high pressure mercury lamps, high-pressure mercury lamps, medium-pressure mercury lamps, low-pressure mercury lamps, mercury vapor arc lamps, xenon arc lamps, carbon arc lamps, metal halide lamps, Electromagnetic wave energy with a wavelength of 2000 angstroms to 7000 angstroms obtained from fluorescent lamps, tungsten lamps, excimer lamps, germicidal lamps, light-emitting diodes, CRT light sources, etc., or high-energy rays such as electron beams, X-rays, and radiation can be used, preferably Ultra-high pressure mercury lamps, mercury vapor arc lamps, carbon arc lamps, and xenon arc lamps that emit light with a wavelength of 300 to 450 nm are used.
더욱이, 노광 광원에 레이저광을 이용함으로써 마스크를 사용하지 않고, 컴퓨터 등의 디지털 정보로부터 직접 화상을 형성하는 레이저 직접 묘화법이, 생산성뿐만 아니라 해상성이나 위치 정밀도 등의 향상도 도모할 수 있기 때문에 유용하고, 그 레이저광으로는 340~430㎚ 파장의 광이 알맞게 사용되는데, 엑시머 레이저, 질소 레이저, 아르곤 이온 레이저, 헬륨 카드뮴 레이저, 헬륨 네온 레이저, 크립톤 이온 레이저, 각종 반도체 레이저 및 YAG 레이저 등의 가시로부터 적외 영역의 광을 발하는 것도 사용할 수 있다. 이들 레이저광을 사용하는 경우에는 바람직하게는, 가시로부터 적외의 상기 영역을 흡수하는 증감 색소가 첨가된다. Moreover, the laser direct drawing method, which creates an image directly from digital information such as on a computer without using a mask by using a laser light as the exposure light source, can improve not only productivity but also resolution and positioning accuracy. It is useful, and light with a wavelength of 340 to 430 nm is suitably used as the laser light, including excimer laser, nitrogen laser, argon ion laser, helium cadmium laser, helium neon laser, krypton ion laser, various semiconductor lasers, and YAG laser. Light that emits light in the visible to infrared range can also be used. When using these laser lights, a sensitizing dye that absorbs the above range from visible to infrared is preferably added.
또한, 본 발명의 감광성 수지 조성물의 경화에는 상기 에너지 선의 조사 후, 가열하는 것이 통상 필요하고, 40~150℃ 정도의 가열이 경화율의 점에서 바람직하다. In addition, curing the photosensitive resin composition of the present invention usually requires heating after irradiation of the above energy rays, and heating at about 40 to 150°C is preferable from the viewpoint of curing rate.
본 발명의 감광성 수지 조성물은 광 경화성 도료 또는 바니시; 광 경화성 접착제; 금속용 코팅제; 프린트 기판; 컬러 TV, PC 모니터, 휴대정보단말, 디지털카메라 등의 컬러 표시의 액정표시 소자에서의 컬러 필터; CCD 이미지 센서의 컬러 필터; 플라스마 표시 패널용 전극 재료; 분말 코팅; 인쇄 잉크; 인쇄판; 접착제; 치과용 조성물; 겔 코트; 전자공학용 포토레지스트; 전기 도금 레지스트; 에칭 레지스트; 드라이 필름; 땜납 레지스트; 다양한 표시 용도용의 컬러 필터를 제조하기 위한 혹은 플라스마 표시 패널, 전기발광 표시장치, 및 LCD의 제조 공정에서 그들의 구조를 형성하기 위한 레지스트; 전기 및 전자 부품을 봉입하기 위한 조성물; 솔더 레지스트; 자기(磁氣) 기록 재료; 미소(微小) 기계 부품; 도파로; 광 스위치; 도금용 마스크; 에칭 마스크; 컬러 시험계; 유리섬유 케이블 코팅; 스크린 인쇄용 스텐실; 스테레오리소그래피에 의해 삼차원 물체를 제조하기 위한 재료; 홀로그래피 기록용 재료; 화상 기록 재료; 미세 전자 회로; 탈색 재료; 화상 기록 재료를 위한 탈색 재료; 마이크로캡슐을 사용하는 화상 기록 재료용 탈색 재료; 인쇄 배선판용 포토레지스트 재료; UV 및 가시 레이저 직접 화상계용 포토레지스트 재료; 프린트 회로 기판의 순차 적층에서의 유전체층 형성에 사용하는 포토레지스트 재료 또는 보호막 등의 각종 용도에 사용할 수 있고, 그 용도에 특별히 제한은 없다. The photosensitive resin composition of the present invention can be used as a photocurable paint or varnish; light curable adhesive; Coating agent for metal; printed board; Color filters in color liquid crystal display devices such as color TVs, PC monitors, portable information terminals, and digital cameras; Color filter of CCD image sensor; Electrode materials for plasma display panels; powder coating; printing ink; printing plate; glue; Dental compositions; gel coat; Photoresist for electronics; electroplating resist; etching resist; dry film; solder resist; resists for manufacturing color filters for various display applications or for forming their structures in the manufacturing process of plasma display panels, electroluminescent displays, and LCDs; Compositions for encapsulating electrical and electronic components; solder resist; magnetic recording materials; Minor mechanical parts; waveguide; optical switch; Mask for plating; etching mask; color test system; Fiberglass cable coating; Stencils for screen printing; Materials for manufacturing three-dimensional objects by stereolithography; Materials for holographic recording; image recording material; microelectronic circuit; decolorizing materials; Decolorizing materials for image recording materials; Decolorizing materials for image recording materials using microcapsules; Photoresist materials for printed wiring boards; Photoresist materials for UV and visible laser direct imaging systems; It can be used for various purposes, such as a photoresist material or protective film used in forming a dielectric layer in sequential stacking of printed circuit boards, and there is no particular limitation on its use.
본 발명의 감광성 수지 조성물은 액정 표시 패널용 스페이서를 형성할 목적 및 수직 배향형 액정표시 소자용 돌기를 형성할 목적으로 사용할 수도 있다. 특히 수직 배향형 액정표시 소자용 돌기와 스페이서를 동시에 형성하기 위한 감광성 수지 조성물로서 유용하다. The photosensitive resin composition of the present invention can also be used for the purpose of forming spacers for liquid crystal display panels and protrusions for vertically aligned liquid crystal display elements. In particular, it is useful as a photosensitive resin composition for simultaneously forming protrusions and spacers for vertically aligned liquid crystal display devices.
상기의 액정표시 패널용 스페이서는 (1) 본 발명의 감광성 수지 조성물의 도막을 기판 상에 형성하는 공정, (2) 상기 도막에 소정 패턴 형상을 가지는 마스크를 통해 에너지 선(광)을 조사하는 공정, (3) 노광 후의 베이킹 공정, (4) 노광 후의 피막을 현상하는 공정, (5) 현상 후의 상기 피막을 가열하는 공정에 의해 바람직하게 형성된다. The spacer for the liquid crystal display panel includes (1) forming a coating film of the photosensitive resin composition of the present invention on a substrate, (2) irradiating energy lines (light) to the coating film through a mask having a predetermined pattern shape. , (3) a baking step after exposure, (4) a step of developing the film after exposure, and (5) a step of heating the film after development.
색재를 첨가한 본 발명의 감광성 수지 조성물은 컬러 필터에서의 RGB 등의 각 화소를 구성하는 레지스트나, 각 화소의 격벽을 형성하는 블랙 매트릭스용 레지스트로서 알맞게 사용된다. 더욱이, 발잉크제를 첨가하는 블랙 매트릭스용 레지스트의 경우, 프로파일 각이 50° 이상인 잉크젯 방식 컬러 필터용 격벽에 바람직하게 사용된다. 상기 발잉크제로는 불소계 계면활성제 및 불소계 계면활성제를 함유하는 조성물이 알맞게 사용된다. The photosensitive resin composition of the present invention to which a colorant is added is suitably used as a resist constituting each pixel such as RGB in a color filter or a resist for a black matrix forming a partition of each pixel. Moreover, in the case of a resist for a black matrix to which an ink repellent agent is added, it is preferably used for a partition wall for an inkjet color filter with a profile angle of 50° or more. As the ink repellent agent, a fluorine-based surfactant and a composition containing a fluorine-based surfactant are suitably used.
상기 잉크젯 방식 컬러 필터용 격벽에 사용할 경우, 본 발명의 감광성 수지 조성물로부터 형성된 격벽이 피전사체(被轉寫體) 상을 구획하고, 구획된 피전사체 상의 오목부에 잉크젯법에 의해 액적(液滴)을 부여하여 화상 영역을 형성하는 방법에 의해 광학소자가 제조된다. 이때, 상기 액적이 착색제를 함유하고, 상기 화상 영역이 착색되어 있는 것이 바람직하며, 그 경우에는 상기의 제조 방법에 의해 제작된 광학소자는 기판 상에 복수의 착색 영역으로 이루어지는 화소군과 상기 화소군의 각 착색 영역을 격리하는 격벽을 적어도 가지게 된다. When used in the partition for the inkjet color filter, the partition formed from the photosensitive resin composition of the present invention partitions the image of the transferred object, and droplets are deposited on the concave part of the divided object by the inkjet method. The optical element is manufactured by a method of forming an image area by providing ). At this time, it is preferable that the droplet contains a colorant and the image area is colored. In this case, the optical element manufactured by the above manufacturing method includes a pixel group consisting of a plurality of colored areas on a substrate and the pixel group. It has at least a partition wall that isolates each colored area.
본 발명의 감광성 수지 조성물은 보호막 또는 절연막용 조성물로도 사용할 수 있다. 이 경우, 자외선 흡수제, 알킬화 변성 멜라민 및/또는 아크릴 변성 멜라민, 분자 중에 알코올성 수산기를 함유하는 1 또는 2관능의 (메타)아크릴레이트 모노머 및/또는 실리카졸을 함유할 수 있다. The photosensitive resin composition of the present invention can also be used as a composition for a protective film or insulating film. In this case, it may contain an ultraviolet absorber, alkylation-modified melamine and/or acrylic-modified melamine, a mono- or bifunctional (meth)acrylate monomer containing an alcoholic hydroxyl group in the molecule, and/or silica sol.
상기 절연막은 박리 가능한 지지 기재 상에 절연 수지층이 마련된 적층체에서의 상기 절연 수지층에 사용되고, 상기 적층체는 알칼리 수용액에 의한 현상이 가능한 것이며, 절연 수지층의 막 두께가 10~100㎛인 것이 바람직하다. The insulating film is used for the insulating resin layer in a laminate in which the insulating resin layer is provided on a peelable support substrate, the laminate is capable of development with an aqueous alkaline solution, and the insulating resin layer has a film thickness of 10 to 100 μm. It is desirable.
본 발명의 감광성 수지 조성물은 무기 화합물을 함유시킴으로써 감광성 페이스트 조성물로 사용할 수 있다. 상기 감광성 페이스트 조성물은 플라스마 디스플레이 패널의 격벽 패턴, 유전체 패턴, 전극 패턴 및 블랙 매트릭스 패턴 등의 소성물 패턴을 형성하기 위해 사용할 수 있다. The photosensitive resin composition of the present invention can be used as a photosensitive paste composition by containing an inorganic compound. The photosensitive paste composition can be used to form fired patterns such as partition patterns, dielectric patterns, electrode patterns, and black matrix patterns of a plasma display panel.
실시예 Example
이하, 실시예 및 비교예를 들어 본 발명을 더 상세하게 설명하겠지만, 본 발명은 이들 실시예 등에 한정되는 것은 아니다. Hereinafter, the present invention will be described in more detail through examples and comparative examples, but the present invention is not limited to these examples.
〔제조예 1〕 옥심체 1의 합성 [Preparation Example 1] Synthesis of oxime 1
<단계 1> <Step 1>
200㎖의 4구 플라스크에 인돌을 1.0eq., 4-플루오로니트로벤젠 1.2eq., 탄산칼륨 3.0eq. 및 N,N-디메틸포름아미드(이론 수량(收量)의 500중량%)를 넣고, 20㎖/min의 질소 유통하 130℃에서 3시간 가열 교반했다. 실온까지 냉각 후, 이온 교환수 50g을 첨가하여 1시간 교반했다. 석출물을 여과 추출한 후, 50℃에서 항량까지 감압 건조하고, N-니트로페닐인돌을 수율 85%로 얻었다. In a 200 ml four-necked flask, add 1.0 eq. of indole, 1.2 eq. of 4-fluoronitrobenzene, and 3.0 eq. of potassium carbonate. and N,N-dimethylformamide (500% by weight of the theoretical amount) were added, and heated and stirred at 130°C for 3 hours under a nitrogen flow of 20 mL/min. After cooling to room temperature, 50 g of ion-exchanged water was added and stirred for 1 hour. After filtering and extracting the precipitate, it was dried under reduced pressure at 50°C to constant weight, and N-nitrophenylindole was obtained in a yield of 85%.
<단계 2> <Step 2>
200㎖의 4구 플라스크에 단계 1에서 얻어진 N-니트로페닐인돌 1.0eq., 염화알루미늄 2.5eq. 및 디클로로에탄(이론 수량의 500중량%)을 넣고, 빙욕상 5℃에서 교반을 실시했다. 거기에 미리스토일클로라이드 1.3eq.를 적하하여 첨가했다. 실온까지 승온 후, 3시간 교반하고, 이온 교환수 50g을 첨가하여 유기층을 분리했다. 유기층을 무수황산나트륨으로 건조 후, 용매를 증류 제거하고, 에탄올을 첨가하여 정석(晶析)을 실시했다. 여과하여 얻어진 결정을 50℃에서 항량까지 감압 건조하고, 케톤 화합물 1을 수율 65%로 얻었다. In a 200 ml four-necked flask, 1.0 eq. of N-nitrophenylindole obtained in step 1 and 2.5 eq. of aluminum chloride were added. and dichloroethane (500% by weight of the theoretical amount) were added, and stirring was performed at 5°C on an ice bath. 1.3eq. of myristoyl chloride was added dropwise thereto. After raising the temperature to room temperature, the mixture was stirred for 3 hours, 50 g of ion-exchanged water was added, and the organic layer was separated. After drying the organic layer with anhydrous sodium sulfate, the solvent was distilled off, ethanol was added, and crystallization was performed. The crystals obtained by filtration were dried under reduced pressure at 50°C to constant weight, and Ketone Compound 1 was obtained in a yield of 65%.
<단계 3> <Step 3>
100㎖의 4구 플라스크에 단계 2에서 얻어진 케톤 화합물을 1.0eq., 염산하이드록실아민 2.0eq. 및 피리딘(이론 수량의 200중량%)을 넣고, 20㎖/min의 질소 유통하 95℃에서 2.5시간 가열 교반했다. 실온까지 냉각 후, 이온 교환수 50g을 첨가하여 유기층을 분리했다. 유기층을 무수황산나트륨으로 건조 후, 용매를 증류 제거하고, 50℃에서 항량까지 감압 건조하여, 옥심체 1을 수율 88%로 얻었다. In a 100 mL four-necked flask, 1.0 eq. of the ketone compound obtained in step 2 and 2.0 eq. of hydroxylamine hydrochloride were added. and pyridine (200% by weight of the theoretical amount) were added, and heated and stirred at 95°C for 2.5 hours under a nitrogen flow of 20 mL/min. After cooling to room temperature, 50 g of ion-exchanged water was added to separate the organic layer. The organic layer was dried over anhydrous sodium sulfate, the solvent was distilled off, and the mixture was dried under reduced pressure at 50°C to constant weight to obtain oxime body 1 in a yield of 88%.
〔제조예 2〕 옥심체 2의 합성 [Preparation Example 2] Synthesis of oxime 2
제조예 1 중 <단계 1>의 4-플루오로니트로벤젠을 4-플루오로벤조페논으로, <단계 2>의 미리스토일클로라이드를 n-옥탄오일클로라이드로 바꾼 것 이외에는 동일한 조작을 실시하고, 옥심체 2를 전체 수율 11%로 얻었다. In Preparation Example 1, the same operation was performed except that the 4-fluoronitrobenzene in <Step 1> was replaced with 4-fluorobenzophenone and the myristoyl chloride in <Step 2> was replaced with n-octanoyl chloride, and the oxime Sieve 2 was obtained with an overall yield of 11%.
〔실시예 1〕 화합물 No.1의 합성 [Example 1] Synthesis of Compound No. 1
100㎖ 4구 플라스크에 질소 플로우하고, 옥심체 1을 1.0eq.와 디클로로메탄(이론 수량의 500중량%)과 트리에틸아민 2.0eq.를 첨가하고, 빙욕상 5℃에서 교반을 실시했다. 거기에 클로로포름산4-니트로페닐 1.1eq.를 디클로로메탄에 녹인 것을 적하하여 첨가했다. 적하 종료 후, 실온에서 30분 교반했다. 다시 빙욕상 5℃까지 냉각 후, 피페리딘 1.1eq.를 적하하여 첨가했다. 실온에서 3시간 교반하고, 감압하에서 용매를 증류 제거했다. 거기에 아세트산에틸과 5질량% NaOH 수용액을 첨가하여 유기층을 분리했다. 유기층을 이온 교환수로 3회 수세 후, 농축시켰다. 잔사에 메탄올을 첨가하여 정석을 실시하고, 화합물 No.1을 황색분상 화합물로서 수율 70%로 얻었다. 얻어진 고체의 TG-DTA(융점/℃), 1H-NMR을 분석했다. 결과를 〔표 1〕 및 〔표 2〕에 나타낸다. Nitrogen was flowed into a 100 mL four-necked flask, 1.0 eq. of oxime body 1, dichloromethane (500% by weight of theoretical quantity), and 2.0 eq. of triethylamine were added, and the mixture was stirred at 5°C on an ice bath. 1.1 eq. of 4-nitrophenyl chloroformate dissolved in dichloromethane was added dropwise thereto. After the dropwise addition was completed, the mixture was stirred at room temperature for 30 minutes. After cooling to 5°C on an ice bath again, 1.1 eq. of piperidine was added dropwise. The mixture was stirred at room temperature for 3 hours, and the solvent was distilled off under reduced pressure. Ethyl acetate and 5% by mass NaOH aqueous solution were added thereto, and the organic layer was separated. The organic layer was washed three times with ion-exchanged water and then concentrated. Methanol was added to the residue for crystallization, and compound No. 1 was obtained as a yellow powdery compound in a yield of 70%. TG-DTA (melting point/°C) and 1 H-NMR of the obtained solid were analyzed. The results are shown in [Table 1] and [Table 2].
〔실시예 2〕 화합물 No.2의 합성 [Example 2] Synthesis of Compound No.2
실시예 1에 기재된 옥심체 1을 옥심체 2로 바꾼 것 이외에는 실시예 1과 동일한 조작을 실시하고, 화합물 No.2를 수율 54%로 얻었다. 얻어진 고체의 TG-DTA(융점/℃), 1H-NMR을 분석했다. 결과를 〔표 1〕 및 〔표 2〕에 나타낸다. The same operation as in Example 1 was performed except that oxime body 1 described in Example 1 was replaced with oxime body 2, and compound No. 2 was obtained in a yield of 54%. TG-DTA (melting point/°C) and 1 H-NMR of the obtained solid were analyzed. The results are shown in [Table 1] and [Table 2].
〔제조예 3〕옥심체 3의 합성 [Production Example 3] Synthesis of oxime 3
제조예 1 중 <단계 1>의 4-플루오로니트로벤젠을 4-플루오로벤조페논으로, <단계 2>의 미리스토일클로라이드를 n-옥탄오일클로라이드로 바꾼 것 이외에는 동일한 조작을 실시하여, 케톤 화합물 2를 얻었다. In Preparation Example 1, the same operation was performed except that the 4-fluoronitrobenzene in <Step 1> was replaced with 4-fluorobenzophenone and the myristoyl chloride in <Step 2> was replaced with n-octanoyl chloride, producing a ketone. Compound 2 was obtained.
<단계 3> <Step 3>
100㎖ 4구 플라스크에 상기 케톤 화합물 2를 1.0eq., DMF(이론 수량의 300중량%), 염산 1.2eq.의 순서로 첨가하고, 빙욕상 5℃에서 교반을 실시했다. 거기에 아질산이소부틸 1.2eq.를 적하하여 첨가했다. 실온까지 승온 후, 6시간 교반했다. 그 후 이온 교환수 50g 및 아세트산에틸을 첨가하여 유기층을 분리했다. 유기층을 물로 3회 수세하고, 에바포레이터로 감압 농축하여 옥심체 3을 얻었다. 얻어진 옥심체 3은 정제하지 않고 다음 반응에 사용했다. 1.0 eq. of the above-mentioned ketone compound 2, DMF (300% by weight of theoretical quantity), and 1.2 eq. of hydrochloric acid were added to a 100 ml four-necked flask in this order, and stirred at 5°C on an ice bath. 1.2eq. of isobutyl nitrite was added dropwise thereto. After raising the temperature to room temperature, it was stirred for 6 hours. Afterwards, 50 g of ion-exchanged water and ethyl acetate were added to separate the organic layer. The organic layer was washed with water three times and concentrated under reduced pressure with an evaporator to obtain oxime body 3. The obtained oxime body 3 was used in the next reaction without purification.
〔실시예 3〕 화합물 No.75의 합성 [Example 3] Synthesis of Compound No.75
100㎖ 4구 플라스크에 질소 플로우하고, 옥심체 3을 1.0eq.와 디클로로메탄(이론 수량의 500중량%)과 트리에틸아민 2.0eq.를 첨가하고, 빙욕상 5℃에서 교반을 실시했다. 거기에 클로로포름산4-니트로페닐 1.1eq.를 디클로로메탄에 녹인 것을 적하하여 첨가했다. 적하 종료 후, 실온에서 30분 교반했다. 다시 빙욕상 5℃까지 냉각 후 피페리딘 1.1eq.를 적하하여 첨가했다. 실온에서 5시간 교반하고, 감압하에서 용매를 증류 제거했다. 거기에 아세트산에틸과 5질량% NaOH 수용액을 첨가하고, 유기층을 분리했다. 유기층을 이온 교환수로 3회 수세 후, 농축을 실시했다. 잔사에 메탄올을 첨가하여 정석을 실시하고, 화합물 No.75를 황색분상 화합물로서, 수율 30%로 얻었다. 얻어진 고체의 TG-DTA(융점/℃), 1H-NMR을 분석했다. 결과를 〔표 1〕 및 〔표 2〕에 나타낸다. Nitrogen was flowed into a 100 mL four-necked flask, 1.0 eq. of oxime 3, dichloromethane (500% by weight of theoretical quantity), and 2.0 eq. of triethylamine were added, and the mixture was stirred at 5°C on an ice bath. 1.1 eq. of 4-nitrophenyl chloroformate dissolved in dichloromethane was added dropwise thereto. After the dropwise addition was completed, the mixture was stirred at room temperature for 30 minutes. After cooling to 5°C on an ice bath again, 1.1 eq. of piperidine was added dropwise. The mixture was stirred at room temperature for 5 hours, and the solvent was distilled off under reduced pressure. Ethyl acetate and 5% by mass NaOH aqueous solution were added thereto, and the organic layer was separated. The organic layer was washed with ion-exchanged water three times and then concentrated. Methanol was added to the residue for crystallization, and compound No. 75 was obtained as a yellow powdery compound in a yield of 30%. TG-DTA (melting point/°C) and 1 H-NMR of the obtained solid were analyzed. The results are shown in [Table 1] and [Table 2].
〔실시예 4〕화합물 No.76의 합성 [Example 4] Synthesis of Compound No.76
실시예 3에 기재된 피페리딘을 모르폴린으로 바꾼 것 이외에는 실시예 3과 동일한 조작을 실시하여, 화합물 No.76을 수율 51%로 얻었다. 얻어진 고체의 TG-DTA(융점/℃), 1H-NMR을 분석했다. 결과를 〔표 1〕 및 〔표 2〕에 나타낸다. The same operation as in Example 3 was performed except that the piperidine described in Example 3 was replaced with morpholine, and compound No. 76 was obtained in a yield of 51%. TG-DTA (melting point/°C) and 1 H-NMR of the obtained solid were analyzed. The results are shown in [Table 1] and [Table 2].
〔실시예 5〕 화합물 No.77의 합성 [Example 5] Synthesis of Compound No.77
실시예 3에 기재된 피페리딘 1.1eq.를 피페라진 0.50eq.로 바꾼 것 이외에는 실시예 3과 동일한 조작을 실시하여, 화합물 No.77을 수율 43%로 얻었다. 얻어진 고체의 TG-DTA(융점/℃), 1H-NMR을 분석했다. 결과를 〔표 1〕 및 〔표 2〕에 나타낸다. The same operation as in Example 3 was performed except that 1.1 eq. of piperidine described in Example 3 was replaced with 0.50 eq. of piperazine, and compound No. 77 was obtained in a yield of 43%. TG-DTA (melting point/°C) and 1 H-NMR of the obtained solid were analyzed. The results are shown in [Table 1] and [Table 2].
〔실시예 6〕 화합물 No.152의 합성 [Example 6] Synthesis of Compound No. 152
실시예 3에 기재된 피페리딘을 디부틸아민으로 바꾼 것 이외에는 실시예 3과 동일한 조작을 실시하여, 화합물 No.152를 수율 38%로 얻었다. 얻어진 고체의 TG-DTA(융점/℃), 1H-NMR을 분석했다. 결과를 〔표 1〕 및 〔표 2〕에 나타낸다. The same operation as in Example 3 was performed except that the piperidine described in Example 3 was replaced with dibutylamine, and compound No. 152 was obtained in a yield of 38%. TG-DTA (melting point/°C) and 1 H-NMR of the obtained solid were analyzed. The results are shown in [Table 1] and [Table 2].
〔비교예 1〕 하기 비교 화합물 No.1을 사용했다. [Comparative Example 1] The following comparative compound No. 1 was used.
〔평가예 1~5 및 비교 평가예 1〕 광 분해능의 평가 [Evaluation Examples 1 to 5 and Comparative Evaluation Example 1] Evaluation of optical resolution
화합물 No.1, No.75, No.76, No.77, No.152 및 하기 비교 화합물 No.1을 아세토니트릴 용액 1.0×10-4㏖로 조정하여 뚜껑이 달린 석영 셀에 넣었다. 이 샘플에 초고압 수은 램프를 광원으로 하는 자외광을 100mJ/㎠, 500mJ/㎠, 1000mJ/㎠(365㎚에서의 적산광량)의 조건으로 조사하고, 분해성을 조사했다. 분해성의 평가에는 HPLC를 이용하여 미(未)조사 시의 피크를 0으로 하여 분해한 양을 %로 나타냈다. 결과를 〔표 3〕에 나타낸다. Compounds No. 1, No. 75, No. 76, No. 77, No. 152 and the following comparative compound No. 1 were adjusted to 1.0 × 10 -4 mol of acetonitrile solution and placed in a quartz cell with a lid. This sample was irradiated with ultraviolet light using an ultra-high pressure mercury lamp as a light source under the conditions of 100 mJ/cm2, 500 mJ/cm2, and 1000 mJ/cm2 (integrated light amount at 365 nm), and decomposition was examined. For evaluation of decomposability, HPLC was used, and the peak at the time of unirradiation was set as 0, and the amount of decomposition was expressed as a percentage. The results are shown in [Table 3].
HPLC: 히타치 하이테크놀로지사 제품, UV 검출기 Chrom master5430 HPLC: Hitachi High-Technology product, UV detector Chrom master5430
전개 용매: 아세토니트릴/물/아세트산암모늄 Development solvent: acetonitrile/water/ammonium acetate
=90/10/0.2(체적 비율) =90/10/0.2 (volume ratio)
유속: 1㎖/min Flow rate: 1㎖/min
칼럼: Inertsil ODS-2 Column: Inertsil ODS-2
칼럼 온도: 40℃ Column temperature: 40℃
검출: 254㎚ Detection: 254nm
상기 〔표 3〕의 결과로부터, 본 발명의 신규 화합물은 UV광에 대하여 높은 분해성을 가지고 있고, 따라서, 분해에 의해 발생하는 염기량이 많으며, 감광성 수지 조성물에서 고감도의 경화성을 나타내는 것이다. From the results in [Table 3], the new compound of the present invention has high decomposition ability to UV light, and therefore has a large amount of base generated by decomposition, and exhibits highly sensitive curability in the photosensitive resin composition.
〔실시예 7~12 및 비교예 1〕 감광성 조성물의 조제 [Examples 7 to 12 and Comparative Example 1] Preparation of photosensitive composition
〔표 4〕에 기재된 배합을 실시하고, 감광성 조성물 No.1~No.6 및 비교 감광성 조성물 No.1을 얻었다. 한편, 표 중의 배합의 수치는 질량부를 나타낸다. The formulations shown in [Table 4] were performed, and photosensitive compositions No. 1 to No. 6 and comparative photosensitive composition No. 1 were obtained. Meanwhile, the numerical values of the formulations in the table represent parts by mass.
또한, 표 중의 각 성분의 부호는 하기의 성분을 나타낸다. In addition, the symbol of each component in the table represents the following component.
A-1 화합물 No.1 A-1 Compound No.1
A-2 화합물 No.2 A-2 Compound No.2
A-3 화합물 No.75 A-3 Compound No.75
A-4 화합물 No.76 A-4 Compound No.76
A-5 화합물 No.77 A-5 Compound No.77
A-6 화합물 No.152 A-6 Compound No.152
A'-1 비교 화합물 No.1 A'-1 Comparative compound No.1
B-1 EPPN-201 B-1 EPPN-201
(페놀노볼락형 에폭시 수지, 에폭시 당량 193g/eq., 니뽄 가야쿠사 제품) (Phenol novolak type epoxy resin, epoxy equivalent weight 193g/eq., Nippon Kayaku company product)
B-2 TRR-5010G B-2TRR-5010G
(크레졸 노볼락형 페놀 수지, 수산기 당량 120g/eq., Mw=8,000, 아사히 유키자이 고교사 제품) (Cresol novolac type phenolic resin, hydroxyl equivalent weight 120g/eq., Mw=8,000, Asahi Yukizai Kogyo product)
C-1 FZ-2122 C-1 FZ-2122
(폴리에테르 변성 폴리실록산, 도레이 다우코닝사 제품) (Polyether-modified polysiloxane, Toray Dow Corning product)
D-1 시클로펜타논(용제) D-1 Cyclopentanone (solvent)
〔평가예 6~17, 그리고 비교 평가예 2 및 3〕 감광성 조성물 및 경화물의 평가 [Evaluation Examples 6 to 17, and Comparative Evaluation Examples 2 and 3] Evaluation of the photosensitive composition and cured product
감광성 조성물 No.1~No.6 및 비교 감광성 조성물 No.1 그리고 그들의 경화물에 대해, 선폭 감도, 경화물의 잔막률의 평가를 하기의 순서로 실시했다. 결과를 〔표 5〕에 병기한다. For photosensitive compositions No. 1 to No. 6, comparative photosensitive composition No. 1, and their cured products, line width sensitivity and residual film rate of the cured products were evaluated in the following order. The results are listed in [Table 5].
[평가 샘플의 제작 방법 및 평가 방법] [Method of producing and evaluating evaluation samples]
감광성 조성물 No.1~No.6 및 비교 감광성 조성물 No.1(도포량 약 2.0cc)을 각각 유리 기재에 스핀 코터(500rpm×2초→1800rpm×15초→slope×5초)로 도막하고, 핫 플레이트 상에서 프리베이킹을 했다(90℃×120초). Photosensitive compositions No. 1 to No. 6 and comparative photosensitive composition No. 1 (approximately 2.0 cc) were coated on a glass substrate with a spin coater (500 rpm × 2 seconds → 1800 rpm × 15 seconds → slope × 5 seconds), respectively, and hot coated. Prebaking was performed on the plate (90°C x 120 seconds).
그 후, 탑콘 노광기를 이용하여 자외광을 분할 노광했다(60, 120mJ/㎠, gap: 20㎛, 조도: 20.0mW/㎠). After that, the UV light was exposed in sections using a Topcon exposure machine (60, 120 mJ/cm2, gap: 20㎛, illuminance: 20.0mW/cm2).
노광 후, 핫 플레이트 상에서 포스트베이킹을 하고(120℃×5분), PGMEA로 현상하고(온도: 23℃, 200rpm×10초), IPA(이소프로필알코올) 세정했다(200rpm×10초→건조: 500rpm×5초). After exposure, post-baking was performed on a hot plate (120°C x 5 minutes), developed with PGMEA (temperature: 23°C, 200 rpm x 10 seconds), and washed with IPA (isopropyl alcohol) (200 rpm x 10 seconds → dried: 500 rpm × 5 seconds).
얻어진 샘플에 대해, 각 노광량에서의 마스크 개구 20㎛의 패턴의 선폭·잔막률을 측정했다. For the obtained sample, the line width and residual film ratio of the pattern with a mask opening of 20 μm at each exposure dose were measured.
상기 〔표 5〕의 결과로부터, 본 발명의 감광성 조성물은 비교 감광성 조성물과 비교하여 큰 선폭(고감도), 높은 잔막률(경화성이 높음)을 나타냈기 때문에, 본 발명의 화합물은 중합 개시제로서 뛰어난 것은 명백하다. From the results in [Table 5] above, the photosensitive composition of the present invention showed a large line width (high sensitivity) and a high residual film rate (high curability) compared to the comparative photosensitive composition. Therefore, the compound of the present invention is superior as a polymerization initiator. It's obvious.
〔실시예 13~15, 그리고 비교예 2 및 3〕 감광성 조성물의 조제 [Examples 13 to 15, and Comparative Examples 2 and 3] Preparation of photosensitive composition
〔표 6〕에 기재된 배합을 실시하고, 감광성 조성물 No.7~No.9, 그리고 비교 감광성 조성물 No.2 및 No.3을 얻었다. 한편, 표 중의 배합의 수치는 질량(g)을 나타낸다. The formulations shown in [Table 6] were performed, and photosensitive compositions No. 7 to No. 9 and comparative photosensitive compositions No. 2 and No. 3 were obtained. Meanwhile, the numerical values of the formulations in the table indicate mass (g).
또한, 표 중의 각 성분의 부호는 하기의 성분을 나타낸다. In addition, the symbol of each component in the table represents the following component.
A'-2 비교 화합물 No.2 A'-2 Comparative compound No.2
B-3 KR-300 B-3 KR-300
(메틸/페닐실리콘레진, 50% 크실렌 용액, 신에쓰 가가꾸 고교사 제품) (Methyl/phenyl silicone resin, 50% xylene solution, Shin-Etsu Chemical Co., Ltd. product)
B-4 테트라에톡시실란 B-4 tetraethoxysilane
〔평가예 18~20, 그리고 비교 평가예 4 및 5〕 감광성 조성물 및 경화물의 평가 [Evaluation Examples 18 to 20, and Comparative Evaluation Examples 4 and 5] Evaluation of the photosensitive composition and cured product
감광성 조성물 No.7~No.9, 비교 감광성 조성물 No.2 및 No.3 그리고 그들의 경화물에 대해, 택성(tackiness), 투명성의 평가를 하기의 순서로 실시했다. 결과를 〔표 7〕에 병기한다. Photosensitive compositions No. 7 to No. 9, comparative photosensitive compositions No. 2 and No. 3, and their cured products were evaluated for tackiness and transparency in the following procedures. The results are listed in [Table 7].
[평가 샘플의 제작 방법 및 평가 방법] [Method of producing and evaluating evaluation samples]
감광성 조성물 No.7~No.9 및 비교 감광성 조성물 No.2 및 No.3(도포량 약 4.0cc)을 각각 유리 기재에 스핀 코터(500rpm×2초→1800rpm×15초→slope×5초)로 도막하고, 핫 플레이트 상에서 프리베이킹을 했다(90℃×120초). Photosensitive compositions No.7 to No.9 and comparative photosensitive compositions No.2 and No.3 (approximately 4.0 cc) were applied to a glass substrate using a spin coater (500 rpm × 2 seconds → 1800 rpm × 15 seconds → slope × 5 seconds), respectively. It was coated and prebaked on a hot plate (90°C x 120 seconds).
그 후, 탑콘 노광기를 이용하여 자외광을 노광했다(1000mJ/㎠, gap: 20㎛, 조도: 20.0mW/㎠). Afterwards, it was exposed to ultraviolet light using a Topcon exposure machine (1000mJ/cm2, gap: 20㎛, illuminance: 20.0mW/cm2).
노광 후, 핫 플레이트 상에서 포스트 베이킹을 실시했다(120℃×5분). After exposure, post-baking was performed on a hot plate (120°C x 5 minutes).
얻어진 샘플에 대해, 표면을 면봉으로 문질러 끈끈함이 남는지 확인했다. 끈끈함이 남지 않는 것을 ○, 끈끈함이 남은 것을 ×로 했다. 평가가 ○인 화합물은 경화성이 높기 때문에 중합 개시제로서 바람직하다. For the obtained sample, the surface was rubbed with a cotton swab to check whether stickiness remained. Those with no stickiness remaining were rated as ○, and those with remaining stickiness were rated as ×. Compounds with an evaluation of ○ are preferable as polymerization initiators because they have high curability.
또한, 얻어진 샘플에 대해, 분광 광도계를 이용하여 자외·가시 흡수 스펙트럼을 측정하고 400㎚의 투과율을 비교했다. 투과율이 80% 이상인 화합물은 투명성이 높기 때문에 중합 개시제로서 바람직하고, 투과율이 80% 미만인 화합물은 투명성이 낮기 때문에 투명성이 요구되는 용도의 중합 개시제로서 바람직하지 않다. Additionally, for the obtained sample, the ultraviolet and visible absorption spectra were measured using a spectrophotometer, and the transmittance at 400 nm was compared. Compounds with a transmittance of 80% or more are preferable as polymerization initiators because they have high transparency, while compounds with a transmittance of less than 80% have low transparency and are therefore undesirable as polymerization initiators for applications requiring transparency.
분광 광도계: 히타치 하이테크사 제품 분광 광도계 U-3900 Spectrophotometer: Hitachi Hi-Tech Spectrophotometer U-3900
상기 〔표 7〕의 결과로부터, 본 발명의 화합물은 실리콘레진을 사용한 조성물에서 경화성 및 투명성이 뛰어난 중합 개시제인 것은 분명하다. From the results in [Table 7] above, it is clear that the compound of the present invention is a polymerization initiator with excellent curability and transparency in compositions using silicone resin.
〔실시예 16 및 17, 그리고 비교예 4〕 감광성 조성물의 조제 [Examples 16 and 17, and Comparative Example 4] Preparation of photosensitive composition
〔표 8〕에 기재된 배합을 실시하고, 감광성 조성물 No.10 및 No.11, 그리고 비교 감광성 조성물 No.4를 얻었다. 한편, 표 중의 배합의 수치는 질량(g)을 나타낸다. The formulations shown in [Table 8] were performed to obtain photosensitive compositions No. 10 and No. 11, and comparative photosensitive composition No. 4. Meanwhile, the numerical values of the formulations in the table indicate mass (g).
또한, 표 중의 각 성분의 부호는 하기의 성분을 나타낸다. In addition, the symbol of each component in the table represents the following component.
A'-3 비교 화합물 No.3 A'-3 Comparative compound No.3
B-5 PEMP B-5 PEMP
(4관능 티올 모노머, SC 유키카가쿠사 제품) (Tetrafunctional thiol monomer, SC product from Yuki Chemical Co., Ltd.)
〔평가예 21 및 22, 그리고 비교 평가예 6〕 감광성 조성물 및 경화물의 평가 [Evaluation Examples 21 and 22, and Comparative Evaluation Example 6] Evaluation of the photosensitive composition and cured product
감광성 조성물 No.10 및 No.11, 그리고 비교 감광성 조성물 No.4, 및 그들의 경화물에 대해, 감도의 평가를 하기의 순서로 실시했다. 결과를 〔표 9〕에 기재한다. Sensitivity was evaluated for photosensitive compositions No. 10 and No. 11, comparative photosensitive composition No. 4, and their cured products in the following procedure. The results are listed in [Table 9].
[평가 샘플의 제작 방법 및 평가 방법] [Method of producing and evaluating evaluation samples]
감광성 조성물 No.10 및 No.11, 그리고 비교 감광성 조성물 No.4(도포량 약 4.0cc)를 각각 유리 기재에 스핀 코터(500rpm×2초→1800rpm×15초→slope×5초)로 도막하고, 핫 플레이트 상에서 프리베이킹을 했다(90℃×120초). Photosensitive compositions No. 10 and No. 11, and comparative photosensitive composition No. 4 (coated amount of about 4.0 cc) were each coated on a glass substrate with a spin coater (500 rpm × 2 seconds → 1800 rpm × 15 seconds → slope × 5 seconds), Prebaking was performed on a hot plate (90°C x 120 seconds).
그 후, 스텝 타블렛을 도막 상에 놓고, LED 노광기를 이용하여 자외광(365㎚, 385㎚, 395㎚)을 노광했다(3000mJ/㎠, 조도: 20.0mW/㎠). After that, the step tablet was placed on the coating film and exposed to ultraviolet light (365 nm, 385 nm, 395 nm) using an LED exposure machine (3000 mJ/cm 2, illuminance: 20.0 mW/cm 2).
노광 후, 핫 플레이트 상에서 포스트베이킹을 실시하고(100℃×20분), PGMEA로 현상하고(30초), IPA(이소프로필알코올)로 세정했다(10초). After exposure, post-baking was performed on a hot plate (100°C x 20 minutes), developed with PGMEA (30 seconds), and washed with IPA (isopropyl alcohol) (10 seconds).
얻어진 샘플에 대해, 현상으로 막이 남은 단수를 기록했다. 단수가 5 이상인 감광성 수지 조성물은 감도가 뛰어나기 때문에 바람직하고, 단수가 10단 이상인 것은 특히 바람직하다. For the obtained sample, the number of stages in which the film remained after development was recorded. A photosensitive resin composition having 5 or more stages is preferable because it has excellent sensitivity, and a photosensitive resin composition having 10 or more stages is particularly preferable.
상기 〔표 9〕의 결과로부터, 본 발명의 화합물은 에폭시 수지 및 경화제에 티올을 사용한 조성물에서 경화성이 뛰어난 중합 개시제인 것은 분명하다. From the results in [Table 9] above, it is clear that the compound of the present invention is a polymerization initiator with excellent curing properties in compositions using thiol as an epoxy resin and curing agent.
〔실시예 18 및 19, 그리고 비교예 5〕 감광성 조성물의 조제 [Examples 18 and 19, and Comparative Example 5] Preparation of photosensitive composition
〔표 10〕에 기재된 배합을 실시하여, 감광성 조성물 No.12 및 No.13, 그리고 비교 감광성 조성물 No.5를 얻었다. 한편, 표 중의 배합의 수치는 질량(g)을 나타낸다. By carrying out the formulations shown in [Table 10], photosensitive compositions No. 12 and No. 13 and comparative photosensitive composition No. 5 were obtained. Meanwhile, the numerical values of the formulations in the table indicate mass (g).
또한, 표 중의 각 성분의 부호는 하기의 성분을 나타낸다. In addition, the symbol of each component in the table represents the following component.
B-6 폴리아믹산 B-6 polyamic acid
(N,N-디메틸아세트아미드 중에서 3,3',4,4'-비페닐테트라카르복실산2무수물과 비스(4-아미노페닐)에테르를 반응시켜 얻어진 것. 중량 평균 분자량은 약 10000.) (Obtained by reacting 3,3',4,4'-biphenyltetracarboxylic dianhydride and bis(4-aminophenyl)ether in N,N-dimethylacetamide. Weight average molecular weight is about 10000.)
D-2 NMP(용제) D-2 NMP (solvent)
〔평가예 23~26, 그리고 비교 평가예 7 및 8〕 감광성 조성물 및 경화물의 평가 [Evaluation Examples 23 to 26, and Comparative Evaluation Examples 7 and 8] Evaluation of the photosensitive composition and cured product
감광성 조성물 No.12 및 No.13, 그리고 비교 감광성 조성물 No.5, 및 그들의 경화물에 대해, 선폭 감도, 경화물의 잔막률의 평가를 하기의 순서로 실시했다. 결과를 〔표 11〕에 병기한다. For photosensitive compositions No. 12 and No. 13, comparative photosensitive composition No. 5, and their cured products, line width sensitivity and residual film rate of the cured products were evaluated in the following order. The results are listed in [Table 11].
[평가 샘플의 제작 방법 및 평가 방법] [Method of producing and evaluating evaluation samples]
감광성 조성물 No.12 및 No.13, 그리고 비교 감광성 조성물 No.5(도포량 약 4.0cc)를 각각 유리 기재에 스핀 코터(500rpm×2초→1800rpm×15초→slope×5초)로 도막하고, 핫 플레이트 상에서 프리베이킹을 했다(100℃×10분). Photosensitive compositions No. 12 and No. 13, and comparative photosensitive composition No. 5 (coated amount of about 4.0 cc) were each coated on a glass substrate with a spin coater (500 rpm × 2 seconds → 1800 rpm × 15 seconds → slope × 5 seconds), Prebaking was performed on a hot plate (100°C x 10 minutes).
그 후, 탑콘 노광기를 이용하여 자외광을 분할 노광했다(1000, 3000mJ/㎠, gap: 20㎛, 조도: 20.0mW/㎠). After that, the UV light was exposed separately using a Topcon exposure machine (1000, 3000mJ/cm2, gap: 20㎛, illuminance: 20.0mW/cm2).
노광 후, 핫 플레이트 상에서 포스트베이킹을 실시하고(100℃ 30분), IPA로 현상(온도: 23℃, 200rpm×10초 →건조: 500rpm×5초)한 후, 추가로 300℃에서 1시간 가열했다. After exposure, post-baking was performed on a hot plate (100°C for 30 minutes), developed with IPA (temperature: 23°C, 200 rpm x 10 seconds → drying: 500 rpm x 5 seconds), and then heated at 300°C for an additional hour. did.
얻어진 샘플에 대해, 각 노광량에서의 마스크 개구 20㎛의 패턴의 선폭·잔막률을 측정했다. For the obtained sample, the line width and residual film ratio of the pattern with a mask opening of 20 μm at each exposure dose were measured.
상기 〔표 12〕의 결과로부터, 본 발명의 화합물은 폴리아믹산을 사용한 수지 조성물에서 경화성이 뛰어난 중합 개시제인 것은 분명하다. From the results in [Table 12] above, it is clear that the compound of the present invention is a polymerization initiator with excellent curability in a resin composition using polyamic acid.
또한, 본 발명의 화합물은 열 염기 발생제로 사용할 수도 있다. Additionally, the compounds of the present invention can also be used as thermal base generators.
〔참고예 1〕 [Reference Example 1]
상기 감광성 조성물 No.11을 사용하여 상기와 동일한 방법으로 도막을 제작했다. 그 도막을 오븐을 이용하여 150℃에서 60분간 가열했다. 얻어진 막을 IPA로 현상한 바, 잔막률이 40.5%이고, 경화된 것을 확인할 수 있었다. A coating film was produced in the same manner as above using the photosensitive composition No. 11. The coating film was heated at 150°C for 60 minutes using an oven. When the obtained film was developed with IPA, it was confirmed that the film remaining rate was 40.5% and that it had been cured.
〔참고예 2〕 [Reference Example 2]
A-1(화합물 No.1)을 첨가하지 않은 조성물을 사용한 것 이외에는 참고예 1과 마찬가지로 하여 가열 및 현상을 한 바, 막은 남지 않았다. Heating and development were performed in the same manner as in Reference Example 1, except that a composition without the addition of A-1 (Compound No. 1) was used, and no film remained.
이들 결과로부터, 본 발명의 화합물은 열 염기 발생제로도 사용할 수 있는 것은 분명하다. From these results, it is clear that the compound of the present invention can also be used as a thermal base generator.
본 발명의 신규 화합물은 중합 개시제로 사용할 경우, 종래의 광 염기 발생제보다 효율적으로 염기를 발생시킬 수 있기 때문에, 낮은 노광량에서도 감광성 수지를 경화시킬 수 있다.When used as a polymerization initiator, the novel compound of the present invention can generate a base more efficiently than a conventional photobase generator, and thus can cure the photosensitive resin even at a low exposure amount.
Claims (9)
(식 중 R1은 시아노기, 무치환 혹은 치환기를 가지고 있는 탄소 원자수 1~20의 지방족 탄화수소기 또는 무치환 혹은 치환기를 가지고 있는 탄소 원자수 6~20의 방향족 탄화수소기를 나타내고,
R2, R4, R5, R6 및 R7은 각각 독립적으로, 수소 원자, 시아노기, 니트로기, -OR8, -COOR8, -CO-R8, -SR8, 할로겐 원자, 무치환 혹은 치환기를 가지고 있는 탄소 원자수 1~20의 지방족 탄화수소기, 무치환 혹은 치환기를 가지고 있는 탄소 원자수 6~20의 방향족 탄화수소기 또는 복소환을 함유하고 또한 무치환 혹은 치환기를 가지고 있는 탄소 원자수 2~20의 기를 나타내며,
R3은 무치환 혹은 치환기를 가지고 있는 탄소 원자수 1~20의 지방족 탄화수소기, 무치환 혹은 치환기를 가지고 있는 탄소 원자수 6~20의 방향족 탄화수소기 또는 복소환을 함유하고 또한 무치환 혹은 치환기를 가지고 있는 탄소 원자수 2~20의 기를 나타내고,
R8은 수소 원자, 무치환 혹은 치환기를 가지고 있는 탄소 원자수 1~20의 지방족 탄화수소기, 무치환 혹은 치환기를 가지고 있는 탄소 원자수 6~20의 방향족 탄화수소기 또는 복소환을 함유하고 또한 무치환 혹은 치환기를 가지고 있는 탄소 원자수 2~20의 기를 나타내며,
X1은 -NR11R12, 하기 (a) 또는 하기 (b)로 나타내는 기이고,
R11 및 R12는 각각 독립적으로, 수소 원자, 무치환 혹은 치환기를 가지고 있는 탄소 원자수 1~20의 지방족 탄화수소기 또는 무치환 혹은 치환기를 가지고 있는 탄소 원자수 6~20의 방향족 탄화수소기이거나,
R11 및 R12가 서로 연결되어, 무치환 혹은 치환기를 가지고 또한 수소 원자, 질소 원자 및 탄소 원자로 이루어지는 탄소 원자수 1~20의 환, 또는 무치환 혹은 치환기를 가지고 또한 수소 원자, 산소 원자, 질소 원자 및 탄소 원자로 이루어지는 탄소 원자수 1~20의 환을 형성하고 있으며,
n은 0 또는 1을 나타낸다.)
(식 중 R13, R14, R15, R16, R17, R18, R19, R20, R21 및 R22는 각각 독립적으로, 수소 원자, 무치환 혹은 치환기를 가지고 있는 탄소 원자수 1~20의 지방족 탄화수소기 또는 무치환 혹은 치환기를 가지고 있는 탄소 원자수 6~20의 방향족 탄화수소기이거나,
R13과 R14, R15와 R16, R17과 R18, R19와 R20 및 R21과 R22 중 적어도 한 세트가 서로 연결되어, 무치환 혹은 치환기를 가지고 또한 수소 원자, 질소 원자 및 탄소 원자로 이루어지는 탄소 원자수 1~20의 환, 또는 무치환 혹은 치환기를 가지고 또한 수소 원자, 산소 원자, 질소 원자 및 탄소 원자로 이루어지는 탄소 원자수 1~20의 환을 형성하고 있으며,
*는 결합수를 나타낸다.) A compound represented by the following general formula (I).
(In the formula, R 1 represents a cyano group, an unsubstituted or substituted aliphatic hydrocarbon group of 1 to 20 carbon atoms, or an unsubstituted or substituted aromatic hydrocarbon group of 6 to 20 carbon atoms,
R 2 , R 4 , R 5 , R 6 and R 7 are each independently hydrogen atom, cyano group, nitro group, -OR 8 , -COOR 8 , -CO-R 8 , -SR 8 , halogen atom, radish An aliphatic hydrocarbon group with 1 to 20 carbon atoms that is substituted or has a substituent, an aromatic hydrocarbon group with 6 to 20 carbon atoms that is unsubstituted or has a substituent, or a carbon atom that contains a heterocycle and is also unsubstituted or has a substituent. It represents the numbers 2 to 20,
R 3 contains an unsubstituted or substituted aliphatic hydrocarbon group with 1 to 20 carbon atoms, an unsubstituted or substituted aromatic hydrocarbon group or heterocycle with 6 to 20 carbon atoms, and also contains an unsubstituted or substituted group. Represents a group having 2 to 20 carbon atoms,
R 8 contains a hydrogen atom, an unsubstituted or substituted aliphatic hydrocarbon group with 1 to 20 carbon atoms, an unsubstituted or substituted aromatic hydrocarbon group with 6 to 20 carbon atoms or a heterocycle, and is also unsubstituted. Or it represents a group with 2 to 20 carbon atoms that has a substituent,
X 1 is -NR 11 R 12 , a group represented by (a) or (b) below,
R 11 and R 12 are each independently a hydrogen atom, an unsubstituted or substituted aliphatic hydrocarbon group having 1 to 20 carbon atoms, or an unsubstituted or substituted aromatic hydrocarbon group having 6 to 20 carbon atoms, or
R 11 and R 12 are connected to each other, and are unsubstituted or have a substituent and are a ring with 1 to 20 carbon atoms consisting of a hydrogen atom, a nitrogen atom and a carbon atom, or a ring that is unsubstituted or has a substituent and is also a hydrogen atom, an oxygen atom and a nitrogen atom. It forms a ring with 1 to 20 carbon atoms, consisting of an atom and a carbon atom,
n represents 0 or 1.)
(In the formula, R 13 , R 14 , R 15 , R 16 , R 17 , R 18 , R 19 , R 20 , R 21 and R 22 are each independently a hydrogen atom or the number of unsubstituted or substituent carbon atoms It is an aliphatic hydrocarbon group of 1 to 20 carbon atoms or an aromatic hydrocarbon group of 6 to 20 carbon atoms that is unsubstituted or has a substituent, or
At least one set of R 13 and R 14 , R 15 and R 16 , R 17 and R 18 , R 19 and R 20 and R 21 and R 22 is connected to each other, is unsubstituted or has a substituent, and also contains a hydrogen atom or a nitrogen atom. and a ring having 1 to 20 carbon atoms consisting of a carbon atom, or a ring having 1 to 20 carbon atoms that is unsubstituted or has a substituent and is made of a hydrogen atom, an oxygen atom, a nitrogen atom and a carbon atom,
* indicates the number of bonds.)
상기 일반식(I) 중의 R2, R3, R4, R5, R6 및 R7 중 적어도 하나가 니트로기, 벤조일기 또는 o-메틸벤조일기를 치환기로서 가지고 있는 기인 화합물. According to paragraph 1,
A compound in which at least one of R 2 , R 3 , R 4 , R 5 , R 6 and R 7 in the general formula (I) has a nitro group, benzoyl group or o-methylbenzoyl group as a substituent.
상기 일반식(I) 중의 R2, R3, R4, R5, R6 및 R7 중 적어도 하나가 하기 일반식(II)로 나타내는 기인 화합물.
(식 중 R25, R26, R27, R28 및 R29는 각각 독립적으로, 수소 원자, 시아노기, 니트로기, -OR30, -COOR30, -CO-R30, -SR30, 할로겐 원자, 무치환 혹은 치환기를 가지고 있는 탄소 원자수 1~20의 지방족 탄화수소기, 무치환 혹은 치환기를 가지고 있는 탄소 원자수 6~20의 방향족 탄화수소기 또는 복소환을 함유하고 또한 무치환 혹은 치환기를 가지고 있는 탄소 원자수 2~20의 기 또는 하기 일반식(III)으로 나타내는 기를 나타내고,
R30은 무치환 혹은 치환기를 가지고 있는 탄소 원자수 1~20의 지방족 탄화수소기, 무치환 혹은 치환기를 가지고 있는 탄소 원자수 6~20의 방향족 탄화수소기 또는 복소환을 함유하고 또한 무치환 혹은 치환기를 가지고 있는 탄소 원자수 2~20의 기를 나타내며,
R25, R26, R27, R28 및 R29 중 적어도 하나가 니트로기, -CO-R30 또는 하기 일반식(III)으로 나타내는 기를 나타내고,
*는 결합수를 나타낸다.)
(식 중 R31은 무치환 혹은 치환기를 가지고 있는 탄소 원자수 1~20의 지방족 탄화수소기 또는 무치환 혹은 치환기를 가지고 있는 탄소 원자수 6~20의 방향족 탄화수소기를 나타내고,
X2는 -NR32R33, 하기 (a') 또는 하기 (b')로 나타내는 기이며,
R32 및 R33은 각각 독립적으로, 수소 원자, 무치환 혹은 치환기를 가지고 있는 탄소 원자수 1~20의 지방족 탄화수소기 또는 무치환 혹은 치환기를 가지고 있는 탄소 원자수 6~20의 방향족 탄화수소기이거나,
R32 및 R33이 서로 연결되어, 무치환 혹은 치환기를 가지고 또한 수소 원자, 질소 원자 및 탄소 원자로 이루어지는 탄소 원자수 1~20의 환, 또는 무치환 혹은 치환기를 가지고 또한 수소 원자, 산소 원자, 질소 원자 및 탄소 원자로 이루어지는 탄소 원자수 1~20의 환을 형성하고 있으며,
m은 0 또는 1을 나타내고, *는 결합수를 나타낸다.)
(식 중 R34, R35, R36, R37, R38, R39, R40, R41, R42 및 R43은 각각 독립적으로, 수소 원자, 무치환 혹은 치환기를 가지고 있는 탄소 원자수 1~20의 지방족 탄화수소기 또는 무치환 혹은 치환기를 가지고 있는 탄소 원자수 6~20의 방향족 탄화수소기이거나,
R34와 R35, R36과 R37, R38과 R39, R40과 R41 및 R42와 R43 중 적어도 한 세트가 서로 연결되어, 무치환 혹은 치환기를 가지고 또한 수소 원자, 질소 원자 및 탄소 원자로 이루어지는 탄소 원자수 1~20의 환, 또는 무치환 혹은 치환기를 가지고 또한 수소 원자, 산소 원자, 질소 원자 및 탄소 원자로 이루어지는 탄소 원자수 1~20의 환을 형성하고 있으며,
*는 결합수를 나타낸다.) According to paragraph 1,
A compound in which at least one of R 2 , R 3 , R 4 , R 5 , R 6 and R 7 in the general formula (I) is a group represented by the following general formula (II).
(In the formula, R 25 , R 26 , R 27 , R 28 and R 29 are each independently hydrogen atom, cyano group, nitro group, -OR 30 , -COOR 30 , -CO-R 30 , -SR 30 , halogen Contains an atom, an aliphatic hydrocarbon group with 1 to 20 carbon atoms that is unsubstituted or has a substituent, an aromatic hydrocarbon group or heterocycle with 6 to 20 carbon atoms that is unsubstituted or has a substituent, and is also unsubstituted or has a substituent. Represents a group having 2 to 20 carbon atoms or a group represented by the following general formula (III),
R 30 contains an unsubstituted or substituted aliphatic hydrocarbon group with 1 to 20 carbon atoms, an unsubstituted or substituted aromatic hydrocarbon group or heterocycle with 6 to 20 carbon atoms, and also contains an unsubstituted or substituted group. Represents a group containing 2 to 20 carbon atoms,
At least one of R 25 , R 26 , R 27 , R 28 and R 29 represents a nitro group, -CO-R 30 or a group represented by the following general formula (III),
* indicates the number of bonds.)
(In the formula, R 31 represents an aliphatic hydrocarbon group with 1 to 20 carbon atoms that is unsubstituted or has a substituent, or an aromatic hydrocarbon group with 6 to 20 carbon atoms that is unsubstituted or has a substituent,
X 2 is -NR 32 R 33 , a group represented by (a') or (b') below,
R 32 and R 33 are each independently a hydrogen atom, an unsubstituted or substituted aliphatic hydrocarbon group having 1 to 20 carbon atoms, or an unsubstituted or substituted aromatic hydrocarbon group having 6 to 20 carbon atoms, or
R 32 and R 33 are connected to each other, and are unsubstituted or have a substituent and are a ring with 1 to 20 carbon atoms consisting of a hydrogen atom, a nitrogen atom and a carbon atom, or a ring that is unsubstituted or has a substituent and is also a hydrogen atom, an oxygen atom and a nitrogen atom. It forms a ring with 1 to 20 carbon atoms, consisting of an atom and a carbon atom,
m represents 0 or 1, and * represents the number of bonds.)
(In the formula, R 34 , R 35 , R 36 , R 37 , R 38 , R 39 , R 40 , R 41 , R 42 and R 43 are each independently a hydrogen atom or the number of unsubstituted or substituent carbon atoms It is an aliphatic hydrocarbon group of 1 to 20 carbon atoms or an aromatic hydrocarbon group of 6 to 20 carbon atoms that is unsubstituted or has a substituent, or
At least one set of R 34 and R 35 , R 36 and R 37 , R 38 and R 39 , R 40 and R 41 , and R 42 and R 43 is connected to each other, is unsubstituted or has a substituent, and also contains a hydrogen atom or a nitrogen atom. and a ring having 1 to 20 carbon atoms consisting of a carbon atom, or a ring having 1 to 20 carbon atoms that is unsubstituted or has a substituent and is made of a hydrogen atom, an oxygen atom, a nitrogen atom and a carbon atom,
* indicates the number of bonds.)
상기 감광성 수지(B)가 에폭시 수지 또는 페놀 수지인 감광성 수지 조성물. According to clause 6,
A photosensitive resin composition wherein the photosensitive resin (B) is an epoxy resin or a phenol resin.
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