KR102668683B1 - Image sensor including color separating lens array and electronic apparatus including the image sensor - Google Patents

Abstract

The disclosed image sensor includes a sensor substrate including a first pixel, a second pixel, a third pixel, and a fourth pixel; and a color separation lens array, wherein each first pixel includes a first focus signal area and a second focus signal area, each independently generating a focus signal, and the first focus signal area and the second focus signal area. Areas are arranged adjacent to each other in a first direction within the first pixel, and each fourth pixel includes a third focus signal area and a fourth focus signal area that each independently generate a focus signal, and the third focus signal area The focus signal area and the fourth focus signal area may be arranged adjacent to each other in a second direction different from the first direction within the fourth pixel.

Description

Image sensor including color separating lens array and electronic apparatus including the image sensor}

The disclosed embodiments relate to an image sensor having a color separation lens array capable of separating incident light by wavelength and concentrating it, and an electronic device including the image sensor.

Image sensors typically detect the color of incident light using a color filter. However, because the color filter absorbs light of colors other than the light of the corresponding color, light use efficiency may be reduced. For example, when using an RGB color filter, only 1/3 of the incident light is transmitted and the remaining 2/3 is absorbed, so the light use efficiency is only about 33%. Therefore, in the case of a color display device or color image sensor, most light loss occurs in the color filter.

An image sensor with improved light utilization efficiency using a color separation lens array that can separate incident light by wavelength and converge it, and an electronic device including the image sensor are provided.

Additionally, an image sensor capable of improving autofocus performance while including a color separation lens array and an electronic device including the image sensor are provided.

An image sensor according to an embodiment includes a plurality of first pixels that sense light of a first wavelength, a plurality of second pixels that sense light of a second wavelength different from the first wavelength, and a plurality of second pixels that sense light of a second wavelength different from the first wavelength. A sensor substrate including a plurality of third pixels that sense light of a third wavelength, and a plurality of fourth pixels that sense light of a first wavelength; and changing the phase of the light of the first wavelength to converge the light of the first wavelength to each of the first and fourth pixels, and changing the phase of the light of the second wavelength to focus the light of the second wavelength to each of the first and fourth pixels. A color separation lens array that focuses light on two pixels and changes the phase of the light of the third wavelength to focus the light of the third wavelength on each third pixel, wherein each first pixel is independently focused. It includes a first focus signal area and a second focus signal area that generate a signal, wherein the first focus signal area and the second focus signal area are arranged to be adjacent to each other in a first direction within the first pixel, and each The fourth pixel includes a third focus signal area and a fourth focus signal area that independently generate focus signals, and the third focus signal area and the fourth focus signal area are aligned in the first direction and within the fourth pixel. They may be arranged adjacent to each other in a second different direction.

The sensor substrate includes a plurality of unit patterns, and within each unit pattern, the first pixel and the fourth pixel are arranged along the first diagonal direction, and the second pixel and the third pixel are arranged along the first diagonal direction. It may be arranged along a different second diagonal direction.

Each first pixel includes a first light sensing cell and a second light sensing cell that independently sense light, and the first light sensing cell and the second light sensing cell move the first pixel in a second direction. It is arranged to divide, and the focus signal of the first focus signal area may be an output of the first light sensing cell and the focus signal of the second focus signal area may be an output of the second light sensing cell.

Each fourth pixel includes a third light sensing cell and a fourth light sensing cell that independently sense light, and the third light sensing cell and the fourth light sensing cell move the fourth pixel in the first direction. It is arranged to divide, and the focus signal of the third focus signal area may be an output of the third light sensing cell and the focus signal of the fourth focus signal area may be an output of the fourth light sensing cell.

Each first pixel includes a first light sensing cell, a second light sensing cell, a third light sensing cell, and a fourth light sensing cell that independently senses light, and the first to fourth light sensing cells are The first pixels are arranged in four quadrants divided into 2×2 arrays, and the focus signal in the first focus signal area is the sum of the output of the first light sensing cell and the output of the third light sensing cell. The focus signal of the second focus signal area may be the sum of the output of the second light sensing cell and the output of the fourth light sensing cell.

Each fourth pixel includes a fifth light sensing cell, a sixth light sensing cell, a seventh light sensing cell, and an eighth light sensing cell that independently sense light, and the fifth to eighth light sensing cells The fourth pixel is arranged in four quadrants divided into 2 × 2 arrays, and the focus signal of the third focus signal area is the sum of the output of the fifth light sensing cell and the output of the sixth light sensing cell. The focus signal of the 4 focus signal area may be the sum of the output of the seventh light sensing cell and the output of the eighth light sensing cell.

The sensor substrate further includes a pixel isolation film for separating the first to fourth pixels from each other, and each first pixel further includes a first cell isolation film for separating the first focus signal area and the second focus signal area from each other. Each fourth pixel may further include a second cell separator to separate the third focus signal area and the fourth focus signal area from each other.

The first cell separator may extend in a straight line along the second direction within the first pixel, and the second cell separator may extend in a straight line along the first direction within the fourth pixel.

In the first and fourth pixels located at the center of the sensor substrate, the first cell separator may be positioned to pass through the center of the first pixel, and the second cell separator may be positioned to pass through the center of the fourth pixel. .

In the first pixel located at the periphery of the sensor substrate in the first direction, the first cell separator is shifted in the first direction toward the center of the sensor substrate, and the first cell separator is shifted in the first direction toward the center of the sensor substrate, and the first pixel is located at the periphery of the sensor substrate in the second direction. At 4 pixels, the second cell separator may be shifted in the second direction toward the center of the sensor substrate.

Each of the first cell separator and the second cell separator includes a first direction separator extending in a straight line along the first direction and a second direction extending in a straight line along the second direction and intersecting the first direction separator. It may include a separator.

In the first and fourth pixels located at the center of the sensor substrate, an intersection point between the first direction separator and the second direction separator may be located at the center of the first or fourth pixel.

An intersection point between the first direction separator and the second direction separator in the first pixel and the fourth pixel located at the periphery of the sensor substrate in the first direction is shifted in the first direction toward the center of the sensor substrate, The intersection point between the first direction separator and the second direction separator in the first and fourth pixels located at the periphery of the sensor substrate in the second direction may be shifted in the second direction toward the center of the sensor substrate.

The height of the first and second cell separators may be smaller than the height of the pixel separator.

For example, the height of the first and second cell isolation films may be 1/4 to 1/2 of the height of the pixel isolation film.

Each second pixel includes a fifth focus signal area and a sixth focus signal area that independently generate focus signals, and the fifth focus signal area and the sixth focus signal area are adjacent to each other in the first diagonal direction. is disposed, and each third pixel includes a seventh focus signal area and an eighth focus signal area each independently generating a focus signal, and the seventh focus signal area and the eighth focus signal area are aligned in the first diagonal direction. can be placed adjacent to each other.

Each second pixel includes a first light sensing cell and a second light sensing cell that independently sense light, and the first light sensing cell and the second light sensing cell move the second pixel in the first diagonal direction. It is arranged to be divided into two, and the focus signal of the fifth focus signal area may be the output of the first light sensing cell and the focus signal of the sixth focus signal area may be the output of the second light sensing cell.

Each third pixel includes a third light sensing cell and a fourth light sensing cell that independently sense light, and the third light sensing cell and the fourth light sensing cell move the third pixel in the first diagonal direction. The focus signal of the seventh focus signal area may be the output of the third light sensing cell, and the focus signal of the eighth focus signal area may be the output of the fourth light sensing cell.

Each second pixel includes a first light sensing cell, a second light sensing cell, a third light sensing cell, and a fourth light sensing cell that independently senses light, and the first to fourth light sensing cells are The second pixels are arranged in four quadrants divided into 2 × 2 arrays, and the focus signal of the fifth focus signal area is the output of the second light sensing cell and the focus signal of the sixth focus signal area is the output of the second light sensing cell. It may be the output of the third light sensing cell, or the focus signal of the fifth focus signal area may be the output of the first light sensing cell and the focus signal of the sixth focus signal area may be the output of the fourth light sensing cell.

Each third pixel includes a fifth light sensing cell, a sixth light sensing cell, a seventh light sensing cell, and an eighth light sensing cell that independently senses light, and the seventh to eighth light sensing cells are The third pixel is arranged in four quadrants divided into 2×2 arrays, and the focus signal of the seventh focus signal area is the output of the sixth light sensing cell and the focus signal of the eighth focus signal area is the output of the sixth light sensing cell. It may be the output of the seventh light sensing cell, or the focus signal of the seventh focus signal area may be the output of the fifth light sensing cell and the focus signal of the eighth focus signal area may be the output of the eighth light sensing cell.

The sensor substrate further includes a pixel isolation film for separating the first to fourth pixels from each other, and each second pixel further includes a first cell isolation film for separating the fifth focus signal area and the sixth focus signal area from each other. Each third pixel may further include a second cell separator to separate the seventh focus signal area and the eighth focus signal area from each other.

The first cell separator and the second cell separator may extend in a straight line along the first diagonal direction.

In the second and third pixels located at the center of the sensor substrate, the first cell separator may be positioned to pass through the center of the second pixel, and the second cell separator may be positioned to pass through the center of the third pixel. .

In the second and third pixels located on the periphery of the sensor substrate in the second diagonal direction intersecting the first diagonal direction, the first and second cell isolation films are aligned in the second diagonal direction toward the center of the sensor substrate. Can be shifted in direction.

An electronic device according to another embodiment includes an image sensor that converts an optical image into an electrical signal; a processor that controls the operation of the image sensor and stores and outputs signals generated by the image sensor; and a lens assembly that provides light from a subject to the image sensor, wherein the image sensor includes: a plurality of first pixels that detect light of a first wavelength, and detect light of a second wavelength different from the first wavelength. A sensor substrate including a plurality of second pixels, a plurality of third pixels that sense light of a third wavelength different from the first and second wavelengths, and a plurality of fourth pixels that sense light of the first wavelength; and changing the phase of the light of the first wavelength to converge the light of the first wavelength to each of the first and fourth pixels, and changing the phase of the light of the second wavelength to focus the light of the second wavelength to each of the first and fourth pixels. A color separation lens array that focuses light on two pixels and changes the phase of the light of the third wavelength to focus the light of the third wavelength on each third pixel, wherein each first pixel is independently focused. It includes a first focus signal area and a second focus signal area that generate a signal, wherein the first focus signal area and the second focus signal area are arranged to be adjacent to each other in a first direction within the first pixel, and each The fourth pixel includes a third focus signal area and a fourth focus signal area that independently generate focus signals, and the third focus signal area and the fourth focus signal area are aligned in the first direction and within the fourth pixel. They may be arranged adjacent to each other in a second different direction.

Since the color separation lens array can separate and focus incident light by wavelength without absorbing or blocking it, it can improve the light use efficiency of the image sensor.

Additionally, the autofocus performance of image sensors and electronic devices can be improved by providing an autofocus signal with a high contrast ratio.

1 is a block diagram of an image sensor according to an embodiment.
FIG. 2 exemplarily shows a pixel arrangement of a pixel array of an image sensor.
3A and 3B are conceptual diagrams showing the schematic structure and operation of a color separation lens array according to an embodiment.
4A and 4B are schematic cross-sectional views showing different cross-sections of a pixel array of an image sensor according to an embodiment.
FIG. 5A is a plan view schematically showing the arrangement of pixels in the pixel array, FIG. 5B is a plan view exemplarily showing a plurality of nanoposts arranged in multiple regions of the color separation lens array, and FIG. 5C is a portion of FIG. 5B. is an enlarged plan view showing in detail, and FIGS. 5D and 5E are plan views showing various other exemplary forms of a color separation lens array.
Figure 6a shows the phase distribution of green light and blue light passing through the color separation lens array along the line Ⅰ-Ⅰ' of Figure 5b, and Figure 6b shows the phase at the center of the pixel corresponding areas of green light passing through the color separation lens array. 6C is a diagram showing the phase at the center of the pixel corresponding areas of blue light that has passed through the color separation lens array.
FIG. 6D exemplarily shows the direction of travel of green light incident on the first green light condensing area, and FIG. 6E is a diagram exemplarily showing the array of the first green light condensing area.
FIG. 6F exemplarily shows the direction of travel of blue light incident on the blue light condensing area, and FIG. 6G exemplarily shows an array of blue light condensing areas.
Figure 7a shows the phase distribution of red light and green light passing through the color separation lens array along the line II-II' of Figure 5b, and Figure 7b shows the phase at the center of the pixel corresponding areas of red light passing through the color separation lens array. 7C is a diagram showing the phase at the center of the pixel corresponding areas of green light that has passed through the color separation lens array.
FIG. 7D exemplarily shows the direction of travel of red light incident on the red light condensing area, and FIG. 7E is a diagram exemplarily showing an array of red light condensing areas.
FIG. 7F exemplarily shows the direction in which green light incident on the second green light collecting area moves, and FIG. 7G exemplarily shows the array of the second green light collecting area.
Figure 8a shows an example of the direction of dividing a photo-sensing cell into two to provide an auto-focus signal using a phase-detection auto-focus method, and Figure 8b shows the dividing direction of the photo-sensing cell. This is a graph showing an example of the contrast ratio change of the autofocus signal according to .
9A to 9C are plan views showing an exemplary structure of a pixel array of an image sensor having a dual cell structure to provide an autofocus signal using a phase detection autofocus method.
10A to 10C are plan views showing an exemplary structure of a pixel array of an image sensor having a tetra cell structure to provide an autofocus signal using a phase detection autofocus method.
11A and 11B are cross-sectional views showing an example structure of a pixel array of an image sensor showing a pixel isolation film and a cell isolation film.
FIGS. 12A and 12B are graphs showing the intensity change of the autofocus signal and the contrast ratio change of the autofocus signal according to the incident angle of light in a comparative example that does not consider the directionality of the color separation lens array, respectively.
FIGS. 13A and 13B are graphs showing the intensity change of the autofocus signal and the contrast ratio change of the autofocus signal according to the incident angle of light in an embodiment considering the directionality of the color separation lens array, respectively.
FIG. 14A is a cross-sectional view showing an exemplary structure of a pixel array at the center of an image sensor, and FIG. 14B is a cross-sectional view showing an exemplary structure of a pixel array at an edge of an image sensor.
Figure 15 is a plan view exemplarily showing the shift of a cell separator in a pixel array having a dual cell structure.
Figure 16 is a plan view exemplarily showing the shift of a cell separator in a pixel array having a tetra cell structure.
Figures 17a and 17b are graphs exemplarily showing the change in intensity of the autofocus signal and the change in contrast ratio of the autofocus signal according to the incident angle of light in a comparative example in which the cell separator is not shifted.
FIGS. 18A and 18B are graphs illustrating the change in intensity of the autofocus signal and the change in contrast ratio of the autofocus signal according to the incident angle of light in an embodiment in which the cell separator is shifted.
Figure 19 is a block diagram schematically showing an electronic device including an image sensor according to embodiments.
FIG. 20 is a block diagram schematically showing the camera module of FIG. 19.
21 to 30 are diagrams showing various examples of electronic devices to which image sensors are applied according to embodiments.

Hereinafter, an image sensor having a color separation lens array and an electronic device including the same will be described in detail with reference to the attached drawings. The described embodiments are merely illustrative, and various modifications are possible from these embodiments. In the following drawings, the same reference numerals refer to the same components, and the size of each component in the drawings may be exaggerated for clarity and convenience of explanation.

Hereinafter, the expressions described as “above” or “above” may include not only those directly above/below/left/right in contact, but also those above/below/left/right without contact.

Terms such as first, second, etc. may be used to describe various components, but are used only for the purpose of distinguishing one component from another component. These terms do not limit the difference in material or structure of the constituent elements.

Singular expressions include plural expressions unless the context clearly dictates otherwise. Additionally, when a part "includes" a certain component, this means that it may further include other components rather than excluding other components, unless specifically stated to the contrary.

In addition, terms such as "... unit" and "module" used in the specification refer to a unit that processes one or more functions or operations, which may be implemented as hardware or software, or as a combination of hardware and software. there is.

The use of the term “above” and similar referential terms may refer to both the singular and the plural.

The steps comprising the method may be performed in any suitable order unless explicitly stated that they must be performed in the order described. In addition, the use of all exemplary terms (e.g., etc.) is simply for explaining the technical idea in detail, and unless limited by the claims, the scope of rights is not limited by these terms.

1 is a schematic block diagram of an image sensor according to an embodiment. Referring to FIG. 1 , the image sensor 1000 may include a pixel array 1100, a timing controller 1010, a row decoder 1020, and an output circuit 1030. The image sensor may be a charge coupled device (CCD) image sensor or a complementary metal oxide semiconductor (CMOS) image sensor.

The pixel array 1100 includes pixels arranged two-dimensionally along a plurality of rows and columns. The row decoder 1020 selects one row of the pixel array 1100 in response to the row address signal output from the timing controller 1010. The output circuit 1030 outputs a light detection signal in column units from a plurality of pixels arranged along the selected row. To this end, the output circuit 1030 may include a column decoder and an analog to digital converter (ADC). For example, the output circuit 1030 may include a plurality of ADCs arranged for each column between the column decoder and the pixel array 1100, or one ADC arranged at the output terminal of the column decoder. Alternatively, the output circuit 1030 may simultaneously output light-sensing signals from the mode pixels of the pixel array 1100. The timing controller 1010, row decoder 1020, and output circuit 1030 may be implemented as one chip or as separate chips. A processor for processing an image signal output through the output circuit 1030 may be implemented as a single chip along with the timing controller 1010, the row decoder 1020, and the output circuit 1030.

The pixel array 1100 may include a plurality of pixels that sense light of different wavelengths. Array of pixels can be implemented in various ways. For example, FIG. 2 exemplarily shows a pixel arrangement of the pixel array 1100 of the image sensor 1000. In particular, Figure 2 shows a Bayer pattern that is generally adopted in the image sensor 1000. Referring to FIG. 2, one unit pattern includes four quadrant regions, and the first to fourth quadrants are blue pixel (B), green pixel (G), red pixel (R), and green pixel, respectively. It can be a pixel (G). Alternatively, one unit pattern may be called a pixel, and the first to fourth quadrants within the pixel may be called a blue sub-pixel, a green sub-pixel, a red sub-pixel, and a green sub-pixel, respectively. Hereinafter, for unification of terminology, the minimum unit that outputs an image signal for each color is called a pixel, and there are four pixels arranged adjacent to the first to fourth quadrants, namely, a blue pixel (B) and a green pixel (G). , it is explained that the red pixel (R) and green pixel (G) form a unit pattern. These unit patterns are arranged two-dimensionally and repeatedly along the first direction (X direction) and the second direction (Y direction). In other words, within a unit pattern in the form of a 2×2 array, two green pixels (G) are arranged diagonally on one side, and one blue pixel (B) and one red pixel (R) are placed diagonally on the other side. is placed. Looking at the overall pixel arrangement, a first row in which a plurality of green pixels (G) and a plurality of blue pixels (B) are alternately arranged along the first direction, and a plurality of red pixels (R) and a plurality of green pixels (G) are arranged alternately in the first direction. Second rows alternately arranged along the first direction are repeatedly arranged along the second direction. Below, the pixel array 1100 of the image sensor 1000 will be described as an example having a Bayer pattern, but the operating principle can be applied to other types of pixel arrays other than the Bayer pattern.

The image sensor 1000 may include a color separation lens array that focuses light of a color corresponding to a specific pixel in the pixel array 1100. Figures 3a and 3b are conceptual diagrams showing the structure and operation of a color separation lens array.

Referring to FIG. 3A, a color separating lens array (CSLA) may include a plurality of nanoposts (NPs) that change the phase of the incident light (Li) differently depending on the position within the individual pixel corresponding area, which will be described later. there is. A color separation lens array (CSLA) can be partitioned in a variety of ways. For example, a first pixel corresponding region R1 corresponding to the first pixel PX1 where the first wavelength light L _λ1 included in the incident light Li is focused, and a second pixel corresponding region R1 included in the incident light Li The wavelength light L _λ2 may be divided into a second pixel corresponding area R2 corresponding to the second pixel PX2 where the light is focused. The first and second pixel corresponding regions R1 and R2 may each include one or more nanoposts NP and may be disposed to face the first and second pixels PX1 and PX2, respectively. As another example, the color separation lens array (CSLA) has a first wavelength concentrating area (L1) that converges the first wavelength light (L _λ1 ) to the first pixel (PX1), and a second wavelength light (L _λ2 ) to the second pixel. It may be divided into a second wavelength concentrating area (L2) that focuses light on (PX2). Some areas of the first wavelength concentrating area L1 and the second wavelength concentrating area L2 may overlap.

The color separation lens array (CSLA) forms different phase profiles in the first and second wavelength lights (L _λ1 , L _λ2 ) included in the incident light (Li), thereby forming the first wavelength light (L _λ1 ) may be focused on the first pixel (PX1), and the second wavelength light (L _λ2 ) may be focused on the second pixel (PX2).

For example, referring to Figure 3b, the color separation lens array (CSLA) is positioned immediately after passing through the color separation lens array (CSLA), that is, at the lower surface position of the color separation lens array (CSLA), the first wavelength The light (L _λ1 ) has a first phase distribution (PP1) and the second wavelength light (L _λ2 ) has a second phase distribution (PP2), so that the first and second wavelength lights (L _λ1 , L _λ2 ) are Light can be focused on the corresponding first and second pixels PX1 and PX2, respectively. Specifically, the first wavelength light (L _λ1 ) passing through the color separation lens array (CSLA) is largest at the center of the first pixel corresponding area (R1), and moves away from the center of the first pixel corresponding area (R1), That is, the first phase distribution PP1 may decrease in the direction of the second pixel corresponding area R2. This phase distribution is similar to the phase distribution of light converging to one point through a convex lens, for example, a micro-lens with a convex center disposed in the first wavelength light collection area (L1), and the first wavelength light (L _λ1 ) may be focused on the first pixel (PX1). In addition, the second wavelength light (L _λ2 ) passing through the color separation lens array (CSLA) is largest at the center of the second pixel corresponding area (R2) and moves away from the center of the second pixel corresponding area (R2), that is, Since the second phase distribution PP2 decreases in the direction of the first pixel corresponding area R1, the second wavelength light L _λ2 can be focused on the second pixel PX2.

Since the refractive index of a material varies depending on the wavelength of light it responds to, the color separation lens array (CSLA) provides different phase distributions for the first and second wavelength lights (L _λ1 and L _λ2 ), as shown in Figure 3b. can do. In other words, even for the same material, the refractive index is different depending on the wavelength of light reacting with the material, and the phase delay experienced by light when passing through the material is also different for each wavelength, so a different phase distribution can be formed for each wavelength. For example, the refractive index of the first pixel corresponding area R1 for the first wavelength light (L _λ1 ) and the refractive index of the first pixel corresponding area R1 for the second wavelength light (L _λ2 ) may be different from each other. , the phase delay experienced by the first wavelength light (L _λ1 ) passing through the first pixel corresponding area (R1) and the phase delay experienced by the second wavelength light (L _λ2 ) passing through the first pixel corresponding area (R1) are different. Therefore, if the color separation lens array (CSLA) is designed considering these characteristics of light, it can provide different phase distributions for the first and second wavelength lights (L _λ1 and L _λ2 ).

The color separation lens array (CSLA) uses nanoposts (NPs) arranged in a specific rule so that the first and second wavelength lights (L _λ1 , L _λ2 ) have first and second phase distributions (PP1, PP2), respectively. It can be included. Here, the rule is applied to parameters such as the shape, size (width, height), spacing, and array type of the nanopost (NP), and these parameters determine the phase to be implemented through the color separation lens array (CSLA). It can be determined according to distribution.

The rules for arranging nanoposts (NPs) in the first pixel-corresponding region (R1) and the rules for arranging the second pixel-corresponding region (R2) may be different from each other. In other words, the size, shape, spacing, and/or arrangement of the nanoposts (NP) provided in the first pixel corresponding area (R1) are similar to the size and shape of the nanoposts (NP) provided in the second pixel corresponding area (R2). , spacing and/or arrangement may be different.

Nanoposts (NPs) may have a cross-sectional diameter of a sub-wavelength. Here, sub-wavelength refers to a wavelength smaller than the wavelength band of light that is the branching target. For example, the nanopost (NP) may have a smaller dimension than the shorter wavelength of the first wavelength or the second wavelength. When the incident light (Li) is visible light, the cross-sectional diameter of the nanopost (NP) may have a dimension smaller than 400 nm, 300 nm, or 200 nm, for example. Meanwhile, the height of the nanopost (NP) may be 500 nm to 1500 nm, and the height may be larger than the diameter of the cross section. Although not shown, a nanopost (NP) may be a combination of two or more posts stacked in a third direction, that is, the height direction (Z direction).

Nanoposts (NPs) may be made of a material with a higher refractive index than surrounding materials. For example, nanoposts (NPs) include c-Si, p-Si, a-Si, and III-V compound semiconductors (GaP, GaN, GaAs, etc.), SiC, TiO ₂ , SiN, and/or combinations thereof. can do. Nanoposts (NPs) that have a difference in refractive index from the surrounding material can change the phase of light passing through the nanoposts (NPs). This is due to phase delay caused by the sub-wavelength shape dimension of the nanopost (NP), and the degree of phase delay is determined by the detailed shape dimension and arrangement type of the nanopost (NP). The material surrounding the nanopost (NP) may be made of a dielectric material with a lower refractive index than the nanopost (NP). For example, the surrounding material may include SiO ₂ or air.

The first wavelength (λ1) and the second wavelength (λ2) may be in the infrared and visible light wavelength bands, but are not limited thereto and may operate at various wavelengths according to the arrangement rules of the array of a plurality of nanoposts (NPs). In addition, although two wavelengths are diverged and condensed as an example, the incident light may be diverged and condensed in three or more directions depending on the wavelength.

In addition, although the color separation lens array (CSLA) has a single layer as an example, the color separation lens array (CSLA) may have a structure in which multiple layers are stacked.

Below, an example in which the previously described color separation lens array (CSLA) is applied to the pixel array 1100 of the image sensor 1000 will be described in more detail.

FIGS. 4A and 4B are schematic cross-sectional views seen from different cross sections of the pixel array 1100 of the image sensor 1000 according to an embodiment, and FIG. 5A is a schematic diagram of a pixel in the pixel array 1100 of the image sensor 1000. It is a plan view schematically showing the arrangement, and FIG. 5B is a plan view exemplarily showing a plurality of nanoposts arranged in multiple regions of the color separation lens array in the pixel array 1100 of the image sensor 1000, and FIG. 5C is a plan view schematically showing the arrangement. This is a detailed plan view showing an enlarged portion of Figure 5b.

4A and 4B, the pixel array 1100 of the image sensor 1000 includes a sensor substrate 110 including a plurality of pixels 111, 112, 113, and 114 that sense light. ) may include a transparent spacer layer 120 disposed on the spacer layer 120, and a color separation lens array 130 disposed on the spacer layer 120. The sensor substrate 110 may include a first pixel 111, a second pixel 112, a third pixel 113, and a fourth pixel 114 that convert light into an electrical signal. As shown in FIG. 4A, the first pixels 111 and the second pixels 112 may be alternately arranged along the first direction (X direction). In a cross section where the Y-direction positions of the first pixel 111 and the second pixel 112 are different, the third pixel 113 and the fourth pixel 114 may be arranged alternately, as shown in FIG. 4B. . Although not shown, a pixel isolation layer may be further formed at the boundary between pixels to separate the pixels.

FIG. 5A shows the arrangement of pixels when the pixel array 1100 of the image sensor 1000 has a Bayer pattern arrangement as shown in FIG. 2 . This arrangement is for sensing incident light by dividing it into unit patterns such as Bayer patterns. For example, the first pixel 111 and the fourth pixel 114 are green pixels that sense green light, the second pixel 112 is a blue pixel that senses blue light, and the third pixel 113 is a blue pixel that senses red light. It may be a red pixel. Within the unit pattern in the form of a 2×2 array, the first pixel 111 and the fourth pixel 114, which are green pixels, are arranged in one diagonal direction, and the second pixels, which are blue pixels and red pixels, are arranged in the other diagonal direction, respectively. (112) and the third pixel 113 may be disposed.

Additionally, the pixel array 1100 of the image sensor 1000 may further include a color filter array 140 disposed between the sensor substrate 110 and the spacer layer 120. In this case, the color filter array 140 may be disposed on the sensor substrate 110, and the spacer layer 120 may be disposed on the color filter array 140. The color filter array 140 includes a first color filter 141 disposed on the first pixel 111, a second color filter 142 disposed on the second pixel 112, and a third pixel 113. It may include a third color filter 143 and a fourth color filter 144 disposed on the fourth pixel 114. For example, the first color filter 141 and the fourth color filter 144 are green color filters that transmit only green light, the second color filter 142 is a blue color filter that transmits only blue light, and the third color filter 143 ) may be a red color filter that transmits only red light. Since the light, which has already been color separated to a significant extent by the color separation lens array 130, proceeds toward the first to fourth pixels 111, 112, 113, and 114, even if the color filter array 140 is used, light loss is low. You can write it down. By using the color filter array 140, the color purity of the image sensor 1000 can be further improved. However, the color filter array 140 is not an essential component, and if the color separation efficiency of the color separation lens array 130 is sufficiently high, the color filter array 140 may be omitted.

The spacer layer 120 is disposed between the sensor substrate 110 and the color separation lens array 130 and serves to maintain a constant distance between the sensor substrate 110 and the color separation lens array 130. The spacer layer 120 is made of a material transparent to visible light, for example, SiO ₂ , siloxane-based spin on glass (SOG), etc., which has a lower refractive index than nanopost (NP) and has a low absorption rate in the visible light band. It may be made of dielectric material. The thickness (120h) of the spacer layer 120 may be determined based on the focal length of the light collected by the color separation lens array 130, for example, about 1/ of the focal length of the light with a reference wavelength (λ ₀ ). It could be 2. The focal length (f) of light with a reference wavelength (λ ₀ ) collected by the color separation lens array 130 is defined as n, where the refractive index of the spacer layer 120 with respect to the reference wavelength (λ ₀ ) is n, and the pitch of the pixel is p. When, it can be expressed as the following [Equation 1].

Assuming that the reference wavelength (λ ₀ ) is 540 nm, which is green light, the pitch of the pixels (111, 112, 113, and 114) is 0.8 μm, and the refractive index (n) of the spacer layer 120 at a wavelength of 540 nm is 1.46, green light The focal length (f), that is, the distance between the lower surface of the color separation lens array 130 and the point where green light converges, may be about 1.64 μm, and the thickness (120h) of the spacer layer 120 may be about 0.82 μm. You can. As another example, assuming that the reference wavelength (λ ₀ ) is 540 nm, which is green light, the pitch of the pixels (111, 112, 113, and 114) is 1.2 μm, and the refractive index (n) of the spacer layer 120 at a wavelength of 540 nm is 1.46. , the focal length (f) of the green light may be about 3.80 μm, and the thickness (120h) of the spacer layer 120 may be 1.90 μm. To express the thickness (120h) of the spacer layer 120 described above in other words, the thickness (120h) of the spacer layer 120 may be 70% to 120% of the pixel pitch when the pixel pitch is 0.5 μm to 0.9 μm. and, when the pixel pitch is 0.9 μm to 1.3 μm, it may be 110% to 180% of the pixel pitch.

The color separation lens array 130 is supported by the spacer layer 120 and is disposed between nanoposts (NPs) that change the phase of incident light and has a lower refractive index than the nanoposts (NPs). It may include a dielectric such as air or SiO ₂ .

Referring to FIG. 5B, the color separation lens array 130 may be divided into four pixel-corresponding areas (131, 132, 133, and 134) corresponding to each pixel (111, 112, 113, and 114) of FIG. 5A. . For example, the first pixel corresponding area 131 corresponds to the first pixel 111 and may be arranged vertically above the first pixel 111, and the second pixel corresponding area 132 corresponds to the second pixel 112. ) and may be disposed above the second pixel 112 in the vertical direction, and the third pixel corresponding area 133 corresponds to the third pixel 113 and may be disposed above the third pixel 113 in the vertical direction. The fourth pixel corresponding area 134 may correspond to the fourth pixel 114 and may be disposed on top of the fourth pixel 114 in the vertical direction. That is, the first to fourth pixel corresponding regions 131, 132, 133, and 134 of the color separation lens array 130 are the corresponding first to fourth pixels 111, 112, 113, and 114 of the sensor substrate 110. ) can be arranged to face vertically. The first to fourth pixel corresponding areas 131, 132, 133, and 134 are a first row and a third pixel corresponding area 133 in which the first pixel corresponding area 131 and the second pixel corresponding area 132 are arranged alternately. ) and fourth pixel corresponding areas 134 may be two-dimensionally arranged along the first direction (X direction) and the second direction (Y direction) so that second rows alternately repeat each other. The color separation lens array 130 also includes a plurality of unit patterns arranged two-dimensionally like the pixel array of the sensor substrate 110, and each unit pattern has pixel corresponding areas 131 and 132 arranged in a 2×2 shape. , 133, 134).

Meanwhile, the color separation lens array 130 may be divided into a green light concentrating area for concentrating green light, a blue light concentrating area for concentrating blue light, and a red light concentrating area for concentrating red light, similar to that described in FIG. 3B.

The color separation lens array 130 diverges and converges green light into the first and fourth pixels 111 and 114, diverges and condenses blue light into the second pixel 112, and diverges and condenses red light into the third pixel 113. It may include nanoposts (NPs) whose size, shape, spacing, and/or arrangement are determined so that the light is branched and concentrated. Meanwhile, the thickness of the color separation lens array 130 along the third direction (Z direction) may be similar to the height of the nanopost (NP) and may be 500 nm to 1500 nm.

Referring to FIG. 5B, the first to fourth pixel corresponding regions 131, 132, 133, and 134 may include cylindrical nanoposts (NPs) with a circular cross-section, and the cross-sectional areas at the center of each region are different from each other. Other nanoposts (NPs) may be placed, and nanoposts (NPs) may also be placed at the center of the border between pixels and at the intersection of the pixel border.

FIG. 5C shows in detail the arrangement of nanoposts (NPs) included in some regions of FIG. 5B, that is, pixel-corresponding regions 131, 132, 133, and 134 constituting the unit pattern. In Figure 5c, nanoposts (NPs) are numbered 1 to 5 depending on the size of the unit pattern cross section. Referring to FIG. 5C, among the nanoposts (NPs), the nanopost 1 with the largest cross-sectional size is placed at the center of the second pixel corresponding area 132, and the nanopost 5 with the smallest cross-sectional size is placed in the center of the second pixel corresponding area 132. Can be placed around the nanopost 1 and nanopost 3 and at the center of the first and fourth pixel corresponding regions 131 and 134. This is just one example, and nanoposts (NPs) of various shapes, sizes, and arrangements can be applied as needed.

Nanoposts (NPs) provided in the first and fourth pixel corresponding regions 131 and 134 may have different distribution rules along the first direction (X direction) and the second direction (Y direction). For example, nanoposts (NPs) disposed in the first and fourth pixel corresponding regions 131 and 134 may have different size arrangements along the first direction (X direction) and the second direction (Y direction). . As shown in FIG. 5C, among the nanoposts (NPs), a nanopost located at the boundary between the first pixel corresponding area 131 and the second pixel corresponding area 132 adjacent in the first direction (X direction) The cross-sectional area of (4) and the cross-sectional area of the nanoposts (5) located at the boundary with the third pixel corresponding area 133 adjacent in the second direction (Y direction) are different from each other. Likewise, the cross-sectional area of the nanopost 5 located at the boundary between the fourth pixel corresponding area 134 and the third pixel corresponding area 133 adjacent in the first direction (X direction) and the second direction (Y direction) The cross-sectional areas of the nanoposts 4 located at the boundary with the adjacent second pixel corresponding area 132 are different from each other.

On the other hand, nanoposts (NPs) arranged in the second pixel corresponding area 132 and the third pixel corresponding area 133 follow a symmetrical distribution rule along the first direction (X direction) and the second direction (Y direction). You can have it. As shown in FIG. 5C, among the nanoposts (NPs), the nanopost 4 located at the boundary between the second pixel corresponding area 132 and the pixel adjacent in the first direction (X direction) and the second direction (Y direction) The cross-sectional areas of the nanoposts 4 placed on the boundary between adjacent pixels in the first direction (X direction) are the same, and also in the third pixel corresponding area 133, the nanoposts 5 placed on the boundary between adjacent pixels in the first direction (X direction) ) and the cross-sectional areas of the nanoposts 5 located at the boundary between adjacent pixels in the second direction (Y direction) are the same.

This distribution is due to the arrangement of pixels in a Bayer pattern. In the second pixel 112 and the third pixel 113, the pixels adjacent to each other in the first direction (X direction) and the second direction (Y direction) are the same as green pixels, while the first pixel 111 is the same as the green pixel in the first direction (Y direction). The pixel adjacent in the (X direction) is a blue pixel and the pixel adjacent in the second direction (Y direction) is a red pixel, and the fourth pixel 114 is a pixel adjacent in the first direction (X direction) is a red pixel. The pixels adjacent to each other in two directions (Y direction) are different as blue pixels. In addition, the first and fourth pixels 111 and 114 have green pixels adjacent to each other in four diagonal directions, and the second pixel 112 has red pixels adjacent to each other in four diagonal directions, and the third pixel ( 113), the pixels adjacent to each other in four diagonal directions are the same as blue pixels. Accordingly, nanoposts (NPs) are arranged in the form of four-fold symmetry in the second and third pixel corresponding regions 132 and 133, and in the first and fourth pixel corresponding regions 131 and 134 Nanoposts (NPs) can be arranged in the form of 2-fold symmetry. In particular, the first pixel corresponding area 131 and the fourth pixel corresponding area 134 are rotated by 90 degrees with respect to each other.

Although the nanoposts (NPs) in FIGS. 5B and 5C are all shown as having a symmetrical circular cross-sectional shape, some nanoposts with an asymmetric cross-sectional shape may be included. For example, nanoposts having asymmetric cross-sectional shapes with different widths in the first direction (X direction) and the second direction (Y direction) are employed in the first and fourth pixel corresponding regions 131 and 134, and Nanoposts having a symmetrical cross-sectional shape with the same width in the first direction (X direction) and the second direction (Y direction) may be employed in the second and third pixel corresponding regions 132 and 133. The arrangement rule of the illustrated nanopost (NP) is an example and is not limited to the pattern shown.

The color separation lens array 130 shown in FIGS. 5B and 5C is an example, and the size and thickness of the color separation lens array, the color characteristics of the image sensor to which the color separation lens array will be applied, the pixel pitch, the color separation lens array and the image Depending on the distance between sensors, the angle of incidence of incident light, etc., various types of color separation lens arrays can be obtained through the above-described optimized design. Additionally, a color separation lens array can be implemented with various other patterns instead of nanoposts. For example, FIG. 5D is a plan view exemplarily showing the form of a unit pattern of a color separation lens array according to another embodiment that can be applied to a Bayer pattern image sensor, and FIG. 5E is a color separation view according to another embodiment. This is a plan view illustrating the shape of the unit pattern of the lens array.

Each of the first to fourth pixel corresponding areas 131a, 132a, 133a, and 134a of the color separation lens array 130a shown in FIG. 5D has been optimized into a digitized binary form in a 16×16 rectangular array, as shown in FIG. 5D. The unit pattern has the form of a 32×32 rectangular array. Alternatively, each of the first to fourth pixel corresponding areas 131b, 132b, 133b, and 134b of the color separation lens array 130b shown in FIG. 5E may be optimized in the form of a continuous curve that is not digitized.

FIG. 6A shows the phase distribution of green light and blue light that passed through the color separation lens array 130 along the line I-I' of FIG. 5B, and FIG. 6B shows the pixel corresponding area of green light that passed through the color separation lens array 130. The phase at the center of the fields 131, 132, 133, and 134 is shown, and FIG. 6C shows the phase at the center of the pixel corresponding areas 131, 132, 133, and 134 of the blue light that passed through the color separation lens array 130. see. In FIG. 6A, the color filter array 140 is omitted for convenience. The phase distribution of green light and blue light in FIG. 6A is similar to the phase distribution of the first and second wavelength lights illustratively illustrated in FIG. 3B.

Referring to FIGS. 6A and 6B, the green light passing through the color separation lens array 130 is largest at the center of the first pixel corresponding area 131 and decreases in a direction away from the center of the first pixel corresponding area 131. It may have a first green light phase distribution (PPG1). Specifically, at a position immediately after passing through the color separation lens array 130, that is, at the lower surface of the color separation lens array 130 or the upper surface of the spacer layer 120, the phase of green light is in the first pixel corresponding area ( 131), and gradually becomes smaller in a concentric circle as the distance from the center of the first pixel corresponding area 131 increases, so that the size of the second and third pixel corresponding areas 132 and 133 in the X and Y directions is largest. It becomes minimum at the center, and in the diagonal direction, it becomes minimum at the contact point between the first pixel corresponding area 131 and the fourth pixel corresponding area 134.

If the phase of green light is set to 2π based on the phase of light emitted from the center of the first pixel corresponding area 131, the phase is 0.9π to 1.1π at the center of the second and third pixel corresponding areas 132 and 133. Green light with a phase of 2π may be emitted from the center of the four-pixel corresponding area 134, and green light with a phase of 1.1π to 1.5π may be emitted from the contact point between the first pixel corresponding area 131 and the fourth pixel corresponding area 134. Accordingly, the phase difference between the green light passing through the center of the first pixel corresponding area 131 and the green light passing through the centers of the second and third pixel corresponding areas 132 and 133 may be 0.9π to 1.1π.

Meanwhile, the first green light phase distribution (PPG1) does not mean that the amount of phase delay of the light passing through the center of the first pixel corresponding area 131 is the largest, and the phase of the light passing through the first pixel corresponding area 131 is 2π. If the phase delay of the light passing through another location is greater and has a phase value greater than 2π, the value remaining after removing 2nπ, that is, it may be the distribution of the wrapped phase. For example, if the phase of light passing through the first pixel corresponding area 131 is 2π and the phase of light passing through the center of the second pixel corresponding area 132 is 3π, the second pixel corresponding area 132 The phase in can be the remaining π after removing 2π (in the case of n=1) from 3π.

Referring to FIGS. 6A and 6C, the blue light passing through the color separation lens array 130 is largest at the center of the second pixel corresponding area 132 and decreases in a direction away from the center of the second pixel corresponding area 132. It may have a blue light phase distribution (PPB). Specifically, the phase of blue light at the position immediately after passing through the color separation lens array 130 is greatest at the center of the second pixel corresponding area 132, and the farther away from the center of the second pixel corresponding area 132, the greater the phase of the blue light. It gradually becomes smaller in the form of a concentric circle, reaching a minimum at the center of the first and fourth pixel corresponding areas 131 and 134 in the X and Y directions, and at the center of the third pixel corresponding area 133 in the diagonal direction. It becomes. If the phase at the center of the second pixel corresponding area 132 of the blue light is 2π, the phase at the center of the first and fourth pixel corresponding areas 131 and 134 may be, for example, 0.9π to 1.1π, , the phase at the center of the third pixel corresponding area 133 may be a smaller value than the phase at the center of the first and fourth pixel corresponding areas 131 and 134, for example, 0.5π to 0.9π.

FIG. 6D exemplarily shows the direction of travel of green light incident on the first condensing area, and FIG. 6E exemplarily shows the array of the first condensing area.

Green light incident around the first pixel corresponding area 131 is condensed into the first pixel 111 by the color separation lens array 130, as shown in FIG. 6D, and the first pixel 111 has the first pixel 111. In addition to the pixel corresponding area 131, green light from the second and third pixel corresponding areas 132 and 133 is incident. That is, the phase distribution of green light described in FIGS. 6A and 6B is the distribution of the two second pixel corresponding areas 132 and two third pixel corresponding areas 133 adjacent to the first pixel corresponding area 131 on one side. Green light passing through the first green light collection area GL1 connected to the center is focused on the first pixel 111. Therefore, as shown in FIG. 6E, the color separation lens array 130 may operate as a first green light collection area GL1 array that focuses green light on the first pixel 111. The first green light collecting area GL1 has an area larger than the corresponding first pixel 111, and may be, for example, 1.2 to 2 times larger.

FIG. 6F exemplarily shows the direction in which blue light incident on the blue light condensing area progresses, and FIG. 6G exemplarily shows an array of blue light condensing areas.

Blue light is focused by the color separation lens array 130 into the second pixel 112 as shown in FIG. 6F, and blue light from the pixel corresponding areas 131, 132, 133, and 134 is incident on the second pixel 112. do. The phase distribution of blue light previously described in FIGS. 6A and 6C passes through the blue light collection area BL created by connecting the centers of the four third pixel corresponding areas 133 adjacent to each other with the vertices of the second pixel corresponding area 132. One blue light is focused on the second pixel 112. Therefore, as shown in FIG. 6G, the color separation lens array 130 may operate as a blue light concentrating area (BL) array that focuses blue light on the second pixel 112. The blue light condensing area BL may have a larger area than the corresponding second pixel 112, for example, 1.5 to 4 times larger. A portion of the blue light condensing area BL may overlap with the first green light concentrating area GL1 described above, the second green light concentrating area GL2 and the red light concentrating area RL described later.

FIG. 7A shows the phase distribution of red light and green light that passed through the color separation lens array 130 along the line II-II' of FIG. 5B, and FIG. 7B shows the pixel corresponding area of red light that passed through the color separation lens array 130. The phase at the center of the fields 131, 132, 133, and 134 is shown, and FIG. 7C shows the phase at the center of the pixel corresponding areas 131, 132, 133, and 134 of the green light that passed through the color separation lens array 130. see.

Referring to FIGS. 7A and 7B, the red light passing through the color separation lens array 130 is largest at the center of the third pixel corresponding area 133 and decreases in a direction away from the center of the third pixel corresponding area 133. It may have a red light phase distribution (PPR). Specifically, the phase of red light at the position immediately after passing through the color separation lens array 130 is greatest at the center of the third pixel corresponding area 133, and the farther away it is from the center of the third pixel corresponding area 133, the greater the phase of red light is. It gradually becomes smaller in the form of a concentric circle, reaching a minimum at the center of the first and fourth pixel corresponding areas 131 and 134 in the X and Y directions, and at the center of the second pixel corresponding area 132 in the diagonal direction. It becomes. If the phase of the red light at the center of the third pixel corresponding area 133 is 2π, the phase at the center of the first and fourth pixel corresponding areas 131 and 134 may be, for example, 0.9π to 1.1π. , the phase at the center of the second pixel corresponding area 132 may be a smaller value than the phase at the center of the first and fourth pixel corresponding areas 131 and 134, for example, 0.5π to 0.9π.

Referring to FIGS. 7A and 7C, the green light passing through the color separation lens array 130 is largest at the center of the fourth pixel corresponding area 134 and decreases in a direction away from the center of the fourth pixel corresponding area 134. It may have a second green light phase distribution (PPG2). Comparing the first green light phase distribution (PPG1) of FIG. 6A and the second green light phase distribution (PPG2) of FIG. 7A, the second green light phase distribution (PPG2) corresponds to the first green light phase distribution (PPG1) in the X and Y directions. It is equivalent to a parallel shift by 1 pixel pitch. That is, the first green light phase distribution (PPG1) has the largest phase at the center of the first pixel corresponding area 131, while the second green light phase distribution (PPG2) has the largest phase at the center of the first pixel corresponding area 131 in the and the phase is greatest at the center of the fourth pixel corresponding area 134, which is one pixel pitch away in the Y direction. The phase distributions of FIGS. 6B and 7C showing the phase at the centers of the pixel corresponding areas 131, 132, 133, and 134 may be the same. Once again, if we explain the phase distribution of green light based on the fourth pixel corresponding area 134, if we set 2π based on the phase of the light emitted from the center of the fourth pixel corresponding area 134 of green light, the second and third The phase is 0.9π to 1.1π at the center of the pixel corresponding areas 132 and 133, the phase is 2π at the center of the first pixel corresponding area 131, and the phase between the first pixel corresponding area 131 and the fourth pixel corresponding area 134 is 2π. Light with a phase of 1.1π to 1.5π can be emitted from the contact point.

FIG. 7D exemplarily shows the direction of travel of red light incident on the red light condensing area, and FIG. 7E exemplarily shows an array of red light condensing areas.

Red light is concentrated by the color separation lens array 130 into the third pixel 113 as shown in FIG. 7D, and red light from the pixel corresponding areas 131, 132, 133, and 134 is incident on the third pixel 113. do. The phase distribution of red light previously described in FIGS. 7A and 7B passes through the red light collection area RL created by connecting the centers of the four second pixel corresponding areas 132 adjacent to each other with the vertices of the third pixel corresponding area 133. One red light is focused on the third pixel 113. Therefore, as shown in FIG. 7E, the color separation lens array 130 may operate as a red light collection area (RL) array that focuses red light on the third pixel 113. The red light collecting area RL may have a larger area than the corresponding third pixel 113, for example, 1.5 to 4 times larger. A portion of the red light condensing area RL may overlap with the first and second green light concentrating areas GL1 and GL2 and the blue light concentrating area BL.

Referring to FIGS. 7F and 7G, the green light incident on the periphery of the fourth pixel corresponding area 134 proceeds similarly to that described for the green light incident on the periphery of the first pixel corresponding area 131, as shown in FIG. 7F. As shown, the light is concentrated into the fourth pixel 114. Therefore, as shown in FIG. 7G, the color separation lens array 130 may operate as a second green light collection area GL2 array that focuses green light on the fourth pixel 114. The second green light collecting area GL2 may have a larger area than the corresponding fourth pixel 114, and may be, for example, 1.2 to 2 times larger.

The color separation lens array 130 that satisfies the phase distribution and performance described above can be designed automatically through various computer simulation methods. For example, using nature-inspired algorithms such as genetic algorithm, particle swarm optimization algorithm, ant colony optimization, etc., or adjoint optimization. ) The structure of the pixel corresponding areas 131, 132, 133, and 134 can be optimized through a reverse engineering method based on an algorithm.

To design a color separation lens array, optimize the structure of the green, blue, red, and infrared pixel response areas while evaluating the performance of multiple candidate color separation lens arrays using evaluation factors such as color separation spectrum, optical efficiency, and signal-to-noise ratio. can do. For example, after determining the target numerical value for each evaluation factor in advance, the sum of the difference between the actual evaluation value of the candidate color separation lens array for a plurality of evaluation factors and the target numerical value is minimized. The structure of the blue, red and infrared pixel corresponding areas can be optimized. Alternatively, performance can be indexed for each evaluation factor, and the structure of the green, blue, red, and infrared pixel corresponding areas can be optimized so that the value representing the performance is maximized.

Meanwhile, all or part of the first to fourth pixels 111, 112, 113, and 114 of the pixel array 1100 may include two or more independent photosensing cells, and 2 included in one pixel More than one photo-sensing cell may share the light-collecting area of the color separation lens array 130. When a plurality of light-sensing cells capable of independently detecting light are included within one pixel, the resolution of the image sensor 1000 can be improved, and the difference in signals obtained from each light-sensing cell can be used to create an image. An autofocus function of a camera device including the sensor 1000 and/or the image sensor 1000 may be implemented.

For example, the phase-detection auto-focus method implements an auto-focus function by using the difference in intensity of light incident on two independent photo-sensing cells within one pixel. For example, when the focus of the camera's lens assembly is precisely located on the surface of the pixel array 1100, light passing through both edges of the lens assembly is concentrated at one point on the surface of the pixel array 1100. Then, the intensity of light incident on each of the two independent photo-sensing cells within the pixel becomes the same. However, when the focus of the lens assembly of the camera is not located on the surface of the pixel array 1100, each pixel of the pixel array 1100 has light that passes through one edge of the lens assembly and passes through the other edge. More people enter the company than Gwang. Also, in this case, the incident angle of light incident on each pixel of the pixel array 1100 is inclined more than the chief ray angle (CRA). Then, the intensity of light incident on each of the two independent photo-sensing cells within the pixel becomes different. Therefore, an autofocus function can be implemented by comparing two focus signals obtained from two independent photo-sensing cells within the pixel.

In the above-described phase detection autofocus method, autofocus performance can be improved as the contrast ratio between the two focus signals increases. In order to improve autofocus performance in the image sensor 1000 including the color separation lens array 130, the arrangement direction of the photo-sensing cells can be optimized to maximize the contrast ratio of the autofocus signal for each pixel. For example, Figure 8a shows an example of the direction of dividing one pixel into two photo-sensing cells to provide an auto-focus signal using the phase detection auto-focus method, and Figure 8b shows the direction of dividing the photo-sensing cells according to the division direction. This graph shows an example of the contrast ratio change of the autofocus signal.

Referring to FIG. 8A, one pixel (PX) can be divided into two independent light sensing cells (c1, c2). By changing the direction of dividing the pixel (PX), that is, the direction in which the two light sensing cells (c1, c2) are arranged, the direction in which the contrast ratio of the autofocus signal is maximized can be confirmed. In FIG. 8B, the graph marked 'Gb' is the result of measuring the contrast ratio of the autofocus signal for the first pixel 111, which is a green pixel, and the graph marked 'B' is the result of measuring the contrast ratio for the second pixel 112, which is a blue pixel. This is the result of measuring the contrast ratio of the autofocus signal, and the graph marked with 'R' is the result of measuring the contrast ratio of the autofocus signal for the third pixel 113, which is a red pixel, and the graph marked with 'Gr' is the result of measuring the contrast ratio for the green pixel. This is the result of measuring the contrast ratio of the autofocus signal for the fourth pixel 114. The azimuth angle (ϕ) represents the angle formed between the boundary line between the two light sensing cells (c1, c2) and the second direction (Y direction). The principal ray angle of the incident light incident on the pixel array 1100 was assumed to be 10°.

As can be seen in Figure 8b, in the first pixel 111, the contrast ratio of the autofocus signal is maximized around ϕ = 0° or 180°, and in the second and third pixels 112 and 113, the contrast ratio is ϕ = 45. The contrast ratio of the autofocus signal is maximized around ° or 135°, and in the fourth pixel 114, the contrast ratio of the autofocus signal is maximized around ϕ = 90° or 270°. This result is that the first pixel corresponding area 131 and the fourth pixel corresponding area 134 of the color separation lens array 130 are rotated 90 degrees with respect to each other, the second pixel corresponding area 132 and the fourth pixel corresponding area 134 are rotated 90 degrees with respect to each other. It can be inferred from the fact that the three-pixel corresponding areas 132 and 133 are four-way symmetrical. Therefore, when using the color separation lens array 130, the first pixel 111 is oriented in the second direction (Y direction), the second pixel 112 and the third pixel 113 are oriented diagonally, and the fourth pixel 111 is oriented diagonally. Autofocus performance can be improved by dividing the pixels 114 in the first direction (X direction).

For example, FIGS. 9A to 9C are plan views showing an exemplary structure of a pixel array of an image sensor having a dual cell structure to provide an autofocus signal using a phase detection autofocus method.

First, referring to FIG. 9A, the first pixel 111 includes a 1-1 light sensing cell 111a and a 1-2 light sensing cell that divides the first pixel 111 into two in the second direction (Y direction). (111b) may be included. In other words, the 1-1 light sensing cell 111a and the 1-2 light sensing cell 111b are arranged adjacent to each other in the first direction (X direction) within the first pixel 111. The second pixel 112 includes a 2-1 light sensing cell 112a and a 2-2 light sensing cell 112b that divide the second pixel 112 into two in a 45° diagonal direction, and the third pixel 113 may include a 3-1 light sensing cell 113a and a 3-2 light sensing cell 113b that are divided into two in the 45° diagonal direction of the third pixel 113. In other words, the 2-1 light sensing cell 112a and the 2-2 light sensing cell 112b are disposed adjacent to each other in a 135° diagonal direction within the second pixel 112, and the 3-1 light sensing cell The cell 113a and the 3-2 light sensing cell 113b are arranged adjacent to each other in a 135° diagonal direction within the third pixel 113. The fourth pixel 114 may include a 4-1 light sensing cell 114a and a 4-2 light sensing cell 114b that divide the fourth pixel 114 into two in the first direction (X direction). there is. In other words, the 4-1 light sensing cell 114a and the 4-2 light sensing cell 114b may be arranged adjacent to each other in the second direction (Y direction) within the fourth pixel 114.

The 1-1 light sensing cell 111a and the 1-2 light sensing cell 111b of the first pixel 111 can independently output light sensing signals, and the 1-1 light sensing cell 111a An autofocus signal can be obtained for the first pixel 111 using a phase detection autofocus method from the difference between the light sensing signal of and the light sensing signal of the 1-2 light sensing cell 111b. In this regard, the 1-1 light sensing cell 111a is the first focus signal area that generates the first focus signal of the first pixel 111, and the 1-2 light sensing cell 111b is the first pixel 111b. It may be a second focus signal area that generates the second focus signal of (111). In other words, the focus signal of the first focus signal area of the first pixel 111 is the output of the 1-1 light sensing cell 111a, and the focus signal of the second focus signal area of the first pixel 111 is the output of the first focus signal area of the first pixel 111. 1-2 This is the output of the optical sensing cell 111b, and the first focus signal area and the second focus signal area of the first pixel 111 can each independently generate focus signals. Additionally, the general image signal of the first pixel 111 can be obtained by adding the light sensing signal of the 1-1 light sensing cell 111a and the light sensing signal of the 1-2 light sensing cell 111b.

Likewise, each of the 2-1 light sensing cell 112a and the 2-2 light sensing cell 112b independently outputs a light sensing signal, and the first light sensing cell 112b generates the first focus signal of the second pixel 112. It becomes a focus signal area and a second focus signal area that generates the second focus signal of the second pixel 111. A general image signal of the second pixel 112 is obtained by adding the light sensing signal of the 2-1 light sensing cell 112a and the light sensing signal of the 2-2 light sensing cell 112b. Each of the 3-1 light sensing cell 113a and the 3-2 light sensing cell 112b independently outputs a light sensing signal, and generates a first focus signal of the third pixel 113. It becomes a second focus signal area that generates the second focus signal of the area and the third pixel 113. A general image signal of the third pixel 113 is obtained by adding the light sensing signal of the 3-1 light sensing cell 113a and the light sensing signal of the 3-2 light sensing cell 113b. In addition, each of the 4-1 light sensing cell 114a and the 4-2 light sensing cell 114b independently outputs a light sensing signal, and the first light sensing cell 114b generates the first focus signal of the fourth pixel 114. It becomes a focus signal area and a fourth focus signal area that generates the second focus signal of the fourth pixel 114. A general image signal of the fourth pixel 114 is obtained by adding the light sensing signal of the 4-1 light sensing cell 114a and the light sensing signal of the 4-2 light sensing cell 114b.

Referring to FIG. 9B, the configuration of the first pixel 111 and the fourth pixel 114 is the same as that described in FIG. 9A. In the case of FIG. 9B, the second pixel 112 includes a 2-1 light sensing cell 112a and a 2-2 light sensing cell 112b divided in a 135° diagonal direction, and the third pixel 113 includes a 3-1 light sensing cell 113a and a 3-2 light sensing cell 113b divided in a 135° diagonal direction. In other words, the 2-1 light sensing cell 112a and the 2-2 light sensing cell 112b are arranged adjacent to each other in the 45° diagonal direction within the second pixel 112, and the 3-1 light sensing cell The cell 113a and the 3-2 light sensing cell 113b may be arranged adjacent to each other in a 45° diagonal direction within the third pixel 113.

Referring to FIG. 9C, the configuration of the first pixel 111 and the fourth pixel 114 is the same as that described in FIG. 9A, and the 2-1 light sensing cell 112a and the second pixel 112 -2 The arrangement direction of the light sensing cell 112b and the arrangement direction of the 3-1 light sensing cell 113a and the 3-2 light sensing cell 112b of the third pixel 113 are the first pixel 111. The arrangement direction of the 1-1st light sensing cell 111a and the 1-2nd light sensing cell 111b is the same. In other words, the 2-1 light sensing cell 112a and the 2-2 light sensing cell 112b are arranged adjacent to each other in the first direction (X direction) within the second pixel 112, and the third- The first light sensing cell 113a and the third-second light sensing cell 113b are arranged adjacent to each other in the first direction (X direction) within the third pixel 113. As can be seen from the graph of FIG. 8B, in the case of the second pixel 112 and the third pixel 113, the change in contrast ratio of the autofocus signal according to the arrangement direction of the light sensing cells is similar to that of the first pixel 111 and the fourth pixel 111. It is small compared to the change in contrast ratio of the autofocus signal of the pixel 114. Therefore, for the convenience of the manufacturing process, the arrangement direction of the light sensing cells of the second pixel 112 and the third pixel 113 is the same as the arrangement direction of the light sensing cells of the first pixel 111 or the fourth pixel 114. can be matched. In FIG. 9C, the arrangement direction of the light sensing cells of the second pixel 112 and the third pixel 113 is shown to match the arrangement direction of the light sensing cells of the first pixel 111, but the fourth pixel 114 It is also possible to match the arrangement direction of the light sensing cells.

10A to 10C are plan views showing an exemplary structure of a pixel array of an image sensor having a tetra cell structure to provide an autofocus signal using a phase detection autofocus method.

Referring to FIG. 10A, the first pixel 111 is a 1-1 light sensing cell 111a that divides the first pixel 111 into four in the first direction (X direction) and the second direction (Y direction), It may include a 1-2 light sensing cell 111b, a 1-3 light sensing cell 111c, and a 1-4 light sensing cell 111d. The 1-1 light sensing cell (111a), the 1-2 light sensing cell (111b), the 1-3 light sensing cell (111c), and the 1-4 light sensing cell (111d) independently receive light sensing signals. can be output, and the first pixel 111 can be arranged in each quadrant divided into four quadrants in the form of a 2×2 array. In this case, the 1-1 light sensing cell 111a and the 1-3 light sensing cell 111c adjacent to each other in the second direction (Y direction) become the first focus signal area of the first pixel 111, The 1-2 light sensing cells 111b and 1-4 light sensing cells 111d adjacent to each other in the second direction (Y direction) become the second focus signal area of the first pixel 111. Therefore, the focus signal of the first focus signal area of the first pixel 111 is the sum of the output of the 1-1 light sensing cell 111a and the output of the 1-3 light sensing cell 111c, and the first pixel 111 The focus signal of the second focus signal area of 111 is the sum of the output of the 1-2 light sensing cell (111b) and the output of the 1-4th light sensing cell (111d). A general image signal of the first pixel 111 can be obtained by adding the outputs of the 1-1st light sensing cell 111a to the 1-4th light sensing cell 111d.

In addition, the second pixel 112 includes a 2-1 light sensing cell 112a and a 2-2 light sensing cell 112a, which divides the second pixel 112 into four in the first direction (X direction) and the second direction (Y direction). It may include a light sensing cell 112b, a 2-3 light sensing cell 112c, and a 2-4 light sensing cell 112d. The 2-1 light sensing cell (112a), the 2-2 light sensing cell (112b), the 2-3 light sensing cell (112c), and the 2-4 light sensing cell (112d) independently receive light sensing signals. can be output, and the second pixels 112 can be arranged in each quadrant divided into four quadrants in the form of a 2×2 array. In the case of the second pixel 112, the 2-2 light sensing cell 112b and the 2-3 light sensing cell 112c adjacent to each other in the 45° diagonal direction are each the first focus of the second pixel 112. It becomes a signal area and a second focus signal area. Therefore, the focus signal of the first focus signal area of the second pixel 112 is the output of the 2-2 light sensing cell 112b, and the focus signal of the second focus signal area of the second pixel 112 is the output of the second focus signal area of the second pixel 112. -3 becomes the output of the optical sensing cell (112c). A general image signal of the second pixel 112 can be obtained by adding the outputs of the 2-1st light sensing cell 112a to the 2-4th light sensing cell 112d.

In addition, the third pixel 113 includes a 3-1 light sensing cell 113a and a 3-2 light sensing cell 113a, which divides the third pixel 113 into four in the first direction (X direction) and the second direction (Y direction). It may include a light sensing cell 113b, a 3-3 light sensing cell 113c, and a 3-4 light sensing cell 113d. The 3-1 light sensing cell (113a), the 3-2 light sensing cell (113b), the 3-3 light sensing cell (113c), and the 3-4 light sensing cell (113d) independently receive light sensing signals. can be output, and the third pixel 113 can be arranged in each quadrant divided into four quadrants in the form of a 2×2 array. Like the second pixel 112, in the case of the third pixel 113, the 3-2 light sensing cell 113b and the 3-3 light sensing cell 113c are adjacent to each other in the 45° diagonal direction, respectively. These become the first focus signal area and the second focus signal area of the three pixels 113. Therefore, the focus signal in the first focus signal area of the third pixel 113 is the output of the 2-2 light sensing cell 113b, and the focus signal in the second focus signal area of the third pixel 113 is the output of the third focus signal area. -3 becomes the output of the optical sensing cell (113c). A general image signal of the third pixel 113 can be obtained by adding the outputs of the 3-1st light sensing cell 113a to the 3-4th light sensing cell 113d.

The fourth pixel 114 includes a 4-1 light sensing cell 114a and a 4-2 light sensing cell that divides the fourth pixel 114 into four in the first direction (X direction) and the second direction (Y direction). It may include a cell 114b, a 4-3 light sensing cell 114c, and a 4-4 light sensing cell 114d. The 4-1 light sensing cell (114a), the 4-2 light sensing cell (114b), the 4-3 light sensing cell (114c), and the 4-4 light sensing cell (114d) independently receive light sensing signals. can be output, and the fourth pixel 114 can be arranged in each quadrant divided into four quadrants in the form of a 2×2 array. In the case of the fourth pixel 114, the 1-1 light sensing cell 114a and the 1-2 light sensing cell 114b adjacent to each other in the first direction (X direction) are the first light sensing cells 114b of the fourth pixel 114. It becomes a focus signal area, and the 4-3 light sensing cells 114c and 4-4 light sensing cells 111d adjacent to each other in the first direction (X direction) are the second focus signal area of the fourth pixel 114. This happens. Therefore, the focus signal of the first focus signal area of the fourth pixel 114 is the sum of the output of the 4-1 light sensing cell 111a and the output of the 4-2 light sensing cell 114b, and the fourth pixel 114 The focus signal of the second focus signal area of 114 is the sum of the output of the 4-3 light sensing cell 114c and the output of the 4-4 light sensing cell 111d. A general image signal of the fourth pixel 114 can be obtained by adding the outputs of the 4-1st light sensing cell 114a to the 4-4th light sensing cell 114d.

Referring to FIG. 10B, the configuration of the first pixel 111 and the fourth pixel 114 is the same as that described in FIG. 10A. In the case of FIG. 10B, the 2-1st light sensing cell 112a and the 2-4th light sensing cell 112d adjacent to each other in a 135° diagonal direction are positioned in the first focus signal area and the second pixel 112, respectively. 2 This becomes the focus signal area. Therefore, the focus signal of the first focus signal area of the second pixel 112 is the output of the 2-1 light sensing cell 112a, and the focus signal of the second focus signal area of the second pixel 112 is the output of the second focus signal area of the second pixel 112. -4 becomes the output of the optical sensing cell (112d). Likewise, the 3-1st light sensing cell 113a and the 3-4th light sensing cell 113d adjacent to each other in the 135° diagonal direction are the first focus signal area and the second focus signal area of the third pixel 113, respectively. It becomes an area. Accordingly, the focus signal in the first focus signal area of the third pixel 113 is the output of the 3-1 light sensing cell 113a, and the focus signal in the second focus signal area of the third pixel 112 is the output of the third focus signal area. -4 becomes the output of the optical sensing cell (113d).

In the second pixel 112 and the third pixel 113, where the contrast ratio of the autofocus signal according to the arrangement direction of the focus signal areas is not large, the focus signal is sent in the same direction as the first pixel 111 or the fourth pixel 114. You can also configure areas. Referring to FIG. 10C, the 2-1 light sensing cell 112a and the 2-3 light sensing cell 112c adjacent to each other in the second direction (Y direction) are the first focus signal area of the second pixel 112. , the 2-2 light sensing cell 112b and the 2-4 light sensing cell 112d adjacent to each other in the second direction (Y direction) become the second focus signal area of the second pixel 112, The 3-1 light sensing cell 113a and the 3-3 light sensing cell 113c adjacent to each other in the second direction (Y direction) become the first focus signal area of the third pixel 113, and the second direction (Y direction) becomes the first focus signal area of the third pixel 113. The 3-2nd light sensing cell 113b and the 3-4th light sensing cell 113d adjacent to each other in the (Y direction) may become the second focus signal area of the third pixel 113. Therefore, the focus signal of the first focus signal area of the second pixel 112 is the sum of the output of the 2-1 light sensing cell 112a and the output of the 2-3 light sensing cell 112c, and the second pixel 112 The focus signal of the second focus signal area of 112 is the sum of the output of the 2-2 light sensing cell 112b and the output of the 2-4 light sensing cell 112d, and the third pixel 113 1 The focus signal of the focus signal area is the sum of the output of the 3-1 light sensing cell 113a and the output of the 3-3 light sensing cell 113c, and the focus signal of the 3rd pixel 113 is the sum of the output of the 3-1st light sensing cell 113a. The focus signal may be the sum of the output of the 3-2 light sensing cell 113b and the output of the 3-4 light sensing cell 113d.

FIGS. 11A and 11B are cross-sectional views showing an exemplary structure of a pixel array of an image sensor showing a pixel isolation film and a cell isolation film. FIG. 11A is a cross-sectional view taken along line A-A' of FIG. 10A, and FIG. 11B is a cross-sectional view taken along line B-B' of FIG. 10A. This is a cross-sectional view.

Referring to FIGS. 11A and 11B , the sensor substrate 110 may include a pixel isolation film 101 that separates the first to fourth pixels 111 to 114 from each other. 11A and 11B show only the pixel isolation film 101 separating the first pixel 111 and the second pixel 112 and the third pixel 113 and the fourth pixel 114, but the pixel isolation layer 101 is shown in different directions. In a cross section, the pixel isolation film 101 may further separate the first pixel 111 and the third pixel 113 and the second pixel 112 and the fourth pixel 114. This pixel isolation film 101 may extend in a third direction (Z direction) from the upper surface of the sensor substrate 110 to the lower surface of the photodiodes PD1 and PD2 below the sensor substrate 110.

Additionally, the sensor substrate 110 may further include a cell isolation film 102 to separate adjacent focus signal areas or adjacent optical sensing cells. The height of the cell isolation film 102 may be smaller than the height of the pixel isolation film 101. For example, the height of the cell isolation film 102 may be 1/4 to 1/2 that of the pixel isolation film 101. The cell separator 102 may extend in the third direction (Z direction) from the upper surface of the sensor substrate 110 to the middle portion of the interior of the light transmission layer 103 of the sensor substrate 110. The cell separator 102 can further improve the contrast ratio of the autofocus signal by reducing cross-talk between adjacent focus signal areas or adjacent optical sensing cells. However, since the cell separator 102 may absorb/reflect light and cause light loss, it may be omitted if necessary. For example, the cell isolation film 102 may not be disposed in the third pixel 113, which is a red pixel with relatively low quantum efficiency. Additionally, the cell separation membrane 102 may also be disposed in the embodiment shown in FIGS. 9A to 9C.

A plurality of photodiodes PD1, PD2, PD3, and PD4 may be disposed under the light transmission layer 103 of the sensor substrate 110. For example, four photodiodes PD1, PD2, PD3, and PD4 may be arranged to divide each of the first to fourth pixels 111, 112, 113, and 114 into four and may have the same area. The four photodiodes (PD1, PD2, PD3, and PD4) may respectively correspond to the four light sensing cells of the first to fourth pixels (111, 112, 113, and 114). 11A and 11B, each of the first to fourth pixels 111, 112, 113, and 114 is shown as including four photodiodes (PD1, PD2, PD3, and PD4), but is shown in FIGS. 9A to 9C. In the present embodiment, each of the first to fourth pixels 111, 112, 113, and 114 may include only two photodiodes PD1 and PD2.

FIGS. 12A and 12B are graphs showing the intensity change of the autofocus signal and the contrast ratio change of the autofocus signal according to the incident angle of light in a comparative example that does not consider the directionality of the color separation lens array 130, respectively. In FIG. 12A, the graphs indicated by 'Gb1' and 'Gb2' are two focus signals of the first pixel 111, and the graphs indicated by 'B1' and 'B2' are two focus signals of the second pixel 112. , the graphs indicated by 'R1' and 'R2' are the two focus signals of the third pixel 113, and the graphs indicated by 'Gr1' and 'Gr2' are the two focus signals of the fourth pixel 114, In 12b, the graph indicated by 'Gb' is the contrast ratio of the autofocus signal of the first pixel 111, the graph indicated by 'B' is the contrast ratio of the autofocus signal of the second pixel 112, and the graph indicated by 'R' is the contrast ratio of the autofocus signal of the third pixel 113, and the graph indicated by 'Gr' is the contrast ratio of the autofocus signal of the fourth pixel 114. Additionally, the angle indicated on the horizontal axis in FIGS. 12A and 12B represents the deviation from the principal ray angle of the incident light. Referring to FIGS. 12A and 12B, the focus signals are different between the first and fourth pixels 111 and 114, which are two green pixels.

FIGS. 13A and 13B are graphs showing exemplary changes in the intensity of an autofocus signal and changes in the contrast ratio of the autofocus signal depending on the angle of incidence of light in an embodiment considering the directionality of the color separation lens array 130. The graphs of FIGS. 13A and 13B only consider the directionality of the first and fourth pixels 111 and 114. It was assumed that the focus signal areas of the second and third pixels 112 and 113 were arranged identically to those of the first pixel 111, as shown in FIG. 9C. Referring to FIGS. 13A and 13B, among the focus signals of the first and fourth pixels 111 and 114, which are two green pixels, the focus signal converges to one value with a higher contrast ratio. In other words, the focus signal of the fourth pixel 114 indicated by 'Gr1' and 'Gr2' in FIG. 12A became the same as the focus signal of the first pixel 111 indicated by 'Gb1' and 'Gb2'. Additionally, in FIG. 12B, the contrast ratio of the autofocus signal of the fourth pixel 114 indicated by 'Gr' became the same as the contrast ratio of the autofocus signal of the first pixel 111 indicated by 'Gb'. This takes into account the directionality of the color separation lens array 130 and divides the fourth pixel 114 in a direction rotated 90 degrees (i.e., the first direction) with respect to the division direction (i.e., the second direction) of the first pixel 111. ) is the result of the 4-1 light sensing cell 114a and the 4-2 light sensing cell 114b being arranged to divide the light sensing cell 114b. Accordingly, the overall contrast ratio of the autofocus signal in the image sensor 1000 may be improved.

Meanwhile, the principal ray angle of the incident light passing from one point of the subject through the lens assembly of the camera and incident on the image sensor 1000, the pixel array 1100, or the sensor substrate 110 is the angle of the principal ray of the image sensor 1000, the pixel array 1100, and the ), or varies depending on the location on the sensor substrate 110. For example, the chief ray angle of incident light incident on the center of the image sensor 1000, the pixel array 1100, or the sensor substrate 110 is 0 degrees, and the chief ray angle gradually increases as the distance from the center increases. If the angle of the main ray changes, the contrast ratio of the autofocus signal may also change. Therefore, the position of the cell separator 102 can be adjusted in consideration of the chief ray angle.

FIG. 14A is a cross-sectional view showing an exemplary structure of a pixel array at the center of an image sensor, and FIG. 14B is a cross-sectional view showing an exemplary structure of a pixel array at an edge of an image sensor.

Referring to FIG. 14A, light at the center of the image sensor 1000 is incident perpendicularly to the surface of the pixel array 1100 at a chief ray angle of 0 degrees. In this case, the cell separator 102 may be located at the center of each pixel. For example, in the first pixel 111 located at the center of the image sensor 1000, the center of the pixel array 1100, or the center of the sensor substrate 110, the cell separator 102 is positioned at the center of the first pixel 111. Then, in the second pixel 112 located in the center of the image sensor 1000, the center of the pixel array 1100, or the center of the sensor substrate 110, the cell separator 102 is positioned at the center of the second pixel 112. It can be positioned to pass by.

Referring to FIG. 14B, light from the edge of the image sensor 1000 is obliquely incident on the surface of the pixel array 1100 at a chief ray angle greater than 0 degrees. In this case, the cell isolation film 102 in each pixel located at the edge of the image sensor 1000, the edge of the pixel array 1100, or the edge of the sensor substrate 110 is located at the center of the image sensor 1000, the pixel array ( It may be shifted toward the center of 1100) or toward the center of the sensor substrate 110.

In order to improve color separation efficiency and color purity, not only the cell separator 102 but also the color filter array 140 and the color separation lens array 130 may be shifted in the same direction as the cell separator 102. Additionally, when the color separation lens array 130 has a two-layer structure, the upper color separation lens array may be shifted more than the lower color separation lens array. For example, when the color separation lens array 130 includes a first color separation lens array 130a and a second color separation lens array 130b disposed on the first color separation lens array 130a, the second color separation lens array 130b is disposed on the first color separation lens array 130a. The color separation lens array 130b may be shifted further toward the center of the image sensor 1000, the center of the pixel array 1100, or the center of the sensor substrate 110 than the first color separation lens array 130a.

When the thickness of the light transmission layer 103 of the sensor substrate 110 is h1, the shift distance S1 of the cell separator 102 can be expressed by the following [Equation 2].

Here, θ is the principal ray angle of the incident light, and n _si is the refractive index of the light transmission layer 103.

Additionally, the shift distance S2 of the first color separation lens array 130a can be expressed as the following [Equation 3].

Here, h2 is the thickness of the color filter array 140 and the spacer layer 120, n _int is the average refractive index of the color filter array 140 and the spacer layer 120, and h3 is the first color separation lens array 130a. ) is the thickness. If the color filter array 140 is omitted, h2 is the thickness of the spacer layer 120 and n _int is the refractive index of the spacer layer 120.

Additionally, the shift distance S3 of the second color separation lens array 130b can be expressed as the following [Equation 4].

Here, n _oxide is the refractive index of the dielectric material surrounding the nanoposts in the first color separation lens array 130a.

The cell isolation film 102 is shifted within each pixel in the sensor substrate 110, but the position, size, and shape of the pixels remain the same. Additionally, the positions, sizes, and shapes of the plurality of photodiodes PD1 and PD2 disposed in the pixels may be maintained as is.

Figure 15 is a plan view exemplarily showing the shift of a cell separator in a pixel array having a dual cell structure. Referring to FIG. 15, the cell isolation film 102 of the first pixel 111 extends in a straight line along the second direction (Y direction), and the cell isolation film 102 of the second and third pixels 112 and 113 ) extends in a straight line along the first diagonal direction, and the cell separator 102 of the fourth pixel 114 extends in a straight line along the first direction (X direction). At the center of the sensor substrate 110, each of the cell isolation films 102 of the first to fourth pixels 111, 112, 113, and 114 is positioned at the center of the corresponding first to fourth pixels 111, 112, 113, and 114. It can be located so that it passes through .

In addition, the cell separator 102 is shifted in the first direction from the first pixel 111 located at the periphery of the sensor substrate 110 in the first direction toward the center of the sensor substrate 110, and is shifted in the second direction toward the sensor substrate 110. The cell separator 102 in the fourth pixel 114 located at the periphery of 110 may be shifted in the second direction toward the center of the sensor substrate 110. In addition, in the second and third pixels 112 and 113 located at the periphery of the sensor substrate 110 in the second diagonal direction intersecting the first diagonal direction, the cell separator 102 is directed toward the center of the sensor substrate 110. It may be shifted in the second diagonal direction. However, the cell isolation film 102 may not be shifted in the second and third pixels 112 and 113 located at the periphery of the sensor substrate 110 in the first diagonal direction.

Figure 16 is a plan view exemplarily showing the shift of a cell separator in a pixel array having a tetra cell structure. Referring to FIG. 16, in the case of the pixel array 1100 having a tetra cell structure, the cell separator 102 includes a first direction separator 102a extending in a straight line along the first direction and a straight line in the second direction. It may include a second direction separator 102b that extends and intersects the first direction separator 102a. At the center of the sensor substrate 110, the first direction separator 102a and the second direction separator 102b are arranged to pass through the center of each pixel. In other words, in each pixel located at the center of the sensor substrate 110, the intersection point between the first direction separator 102a and the second direction separator 102b is located at the center of each pixel.

The second direction separator 102b in each pixel located at the periphery of the sensor substrate 110 in the first direction is shifted in the first direction toward the center of the sensor substrate 110, and is shifted in the first direction toward the sensor substrate 110 in the second direction. The first direction separator 102a in each pixel located at the periphery may be shifted in the second direction toward the center of the sensor substrate 110. In other words, the intersection point between the first direction separator 102a and the second direction separator 102b in each pixel located at the periphery of the sensor substrate 110 in the first direction is the first direction toward the center of the sensor substrate 110. direction is shifted, and the intersection point between the first direction separator 102a and the second direction separator 102b at each pixel located at the periphery of the sensor substrate 110 in the second direction moves toward the center of the sensor substrate 110. Can be shifted in the second direction.

Figures 17a and 17b are graphs exemplarily showing the change in intensity of the autofocus signal and the change in contrast ratio of the autofocus signal according to the incident angle of light in a comparative example in which the cell separator is not shifted. 17A and 17B, the directionality of the color separation lens array 130 was not considered, and the principal ray angle of the incident light was assumed to be 30°. In FIG. 17A, the graphs indicated by 'Gb1' and 'Gb2' are two focus signals of the first pixel 111, and the graphs indicated by 'B1' and 'B2' are two focus signals of the second pixel 112. , the graphs indicated by 'R1' and 'R2' are the two focus signals of the third pixel 113, and the graphs indicated by 'Gr1' and 'Gr2' are the two focus signals of the fourth pixel 114, In 17b, the graph indicated by 'Gb' is the contrast ratio of the autofocus signal of the first pixel 111, the graph indicated by 'B' is the contrast ratio of the autofocus signal of the second pixel 112, and the graph indicated by 'R' is the contrast ratio of the autofocus signal of the third pixel 113, and the graph indicated by 'Gr' is the contrast ratio of the autofocus signal of the fourth pixel 114. Additionally, the angle indicated on the horizontal axis in FIGS. 17A and 17B represents the angle of incidence of incident light. Referring to FIGS. 17A and 17B, in the case of the comparative example, the two focus signals of each pixel do not show sufficient symmetry around the main ray angle of 30°.

FIGS. 18A and 18B are graphs illustrating the change in intensity of the autofocus signal and the change in contrast ratio of the autofocus signal according to the incident angle of light in an embodiment in which the cell separator is shifted. 18A and 18B, the directionality of the first and fourth pixels 111 and 114 was considered, and the cell separator 102 was shifted by 4 nm/CRA (°) considering the main ray angle of 30°. Referring to Figures 18a and 18b, it can be seen that symmetry around 30°, the main ray angle, is restored to some extent. Additionally, it can be seen that the contrast ratio of the autofocus signal also increases.

The image sensor 1000 including the pixel array 1100 described above has almost no light loss due to a color filter, for example, an organic color filter, so it can provide a sufficient amount of light to the pixel even if the size of the pixel becomes small. You can. Therefore, it is possible to produce an ultra-high-resolution, ultra-small, high-sensitivity image sensor with hundreds of millions of pixels or more. These ultra-high-resolution, ultra-small, high-sensitivity image sensors can be employed in various high-performance optical devices or high-performance electronic devices. These electronic devices include, for example, smart phones, mobile phones, cell phones, personal digital assistants (PDAs), laptops, PCs, various portable devices, home appliances, security cameras, medical cameras, automobiles, and the Internet of Things ( It may be, but is not limited to, an IoT (Internet of Things) device or other mobile or non-mobile computing device.

In addition to the image sensor 1000, the electronic device may further include a processor that controls the image sensor, for example, an application processor (AP), and runs an operating system or application program through the processor to run a plurality of hardware devices. Alternatively, software components can be controlled and various data processing and calculations can be performed. The processor may further include a Graphics Processing Unit (GPU) and/or an Image Signal Processor. If the processor includes an image signal processor, the image (or video) acquired by the image sensor can be stored and/or output using the processor. Additionally, the processor may independently receive two light detection signals from both edges spaced apart from each other within each pixel of the image sensor, and generate an autofocus signal based on the difference between the two light detection signals.

FIG. 19 is a block diagram illustrating an example of an electronic device ED01 including an image sensor 1000. Referring to FIG. 19, in a network environment (ED00), an electronic device (ED01) communicates with another electronic device (ED02) through a first network (ED98) (near-distance wireless communication network, etc.), or through a second network (ED99). It is possible to communicate with another electronic device (ED04) and/or a server (ED08) through (a long-distance wireless communication network, etc.). The electronic device ED01 can communicate with the electronic device ED04 through the server ED08. The electronic device (ED01) consists of a processor (ED20), memory (ED30), input device (ED50), audio output device (ED55), display device (ED60), audio module (ED70), sensor module (ED76), and interface (ED77). ), a haptic module (ED79), a camera module (ED80), a power management module (ED88), a battery (ED89), a communication module (ED90), a subscriber identity module (ED96), and/or an antenna module (ED97). You can. In the electronic device ED01, some of these components (such as the display device ED60) may be omitted or other components may be added. Some of these components can be implemented as one integrated circuit. For example, the sensor module ED76 (fingerprint sensor, iris sensor, illumination sensor, etc.) may be implemented by being embedded in the display device ED60 (display, etc.).

The processor ED20 may execute software (program ED40, etc.) to control one or a plurality of other components (hardware, software components, etc.) of the electronic device ED01 connected to the processor ED20. , various data processing or calculations can be performed. As part of data processing or computation, the processor (ED20) loads commands and/or data received from other components (sensor module (ED76), communication module (ED90), etc.) into volatile memory (ED32) and volatile memory (ED32). Commands and/or data stored in ED32) can be processed, and the resulting data can be stored in non-volatile memory (ED34). The processor (ED20) includes the main processor (ED21) (central processing unit, application processor, etc.) and an auxiliary processor (ED23) that can operate independently or together (graphics processing unit, image signal processor, sensor hub processor, communication processor, etc.). It can be included. The auxiliary processor (ED23) uses less power than the main processor (ED21) and can perform specialized functions.

The auxiliary processor (ED23) acts on behalf of the main processor (ED21) while the main processor (ED21) is in an inactive state (sleep state), or as the main processor (ED21) while the main processor (ED21) is in an active state (application execution state). Together with the processor (ED21), it is possible to control functions and/or states related to some of the components of the electronic device (ED01) (display device (ED60), sensor module (ED76), communication module (ED90), etc.) You can. The auxiliary processor (ED23) (image signal processor, communication processor, etc.) may also be implemented as part of other functionally related components (camera module (ED80), communication module (ED90), etc.).

The memory ED30 can store various data required by components (processor ED20, sensor module ED76, etc.) of the electronic device ED01. Data may include, for example, input data and/or output data for software (such as program ED40) and instructions related thereto. The memory ED30 may include a volatile memory ED32 and/or a non-volatile memory ED34. The non-volatile memory (ED32) may include an internal memory (ED36) fixedly mounted within the electronic device (ED01) and a removable external memory (ED38).

The program (ED40) may be stored as software in the memory (ED30) and may include an operating system (ED42), middleware (ED44), and/or applications (ED46).

The input device ED50 may receive commands and/or data to be used in components (processor ED20, etc.) of the electronic device ED01 from an external source (a user, etc.) of the electronic device ED01. The input device ED50 may include a microphone, mouse, keyboard, and/or digital pen (stylus pen, etc.).

The audio output device ED55 may output an audio signal to the outside of the electronic device ED01. The sound output device ED55 may include a speaker and/or a receiver. The speaker can be used for general purposes such as multimedia playback or recording playback, and the receiver can be used to receive incoming calls. The receiver can be integrated as part of the speaker or implemented as a separate, independent device.

The display device ED60 can visually provide information to the outside of the electronic device ED01. The display device ED60 may include a display, a hologram device, or a projector, and a control circuit for controlling the device. The display device ED60 may include a touch circuitry configured to detect a touch, and/or a sensor circuit configured to measure the intensity of force generated by the touch (such as a pressure sensor).

The audio module (ED70) can convert sound into electrical signals or, conversely, convert electrical signals into sound. The audio module (ED70) acquires sound through the input device (ED50), the sound output device (ED55), and/or another electronic device (electronic device (ED02), etc.) directly or wirelessly connected to the electronic device (ED01). ) can output sound through speakers and/or headphones.

The sensor module (ED76) detects the operating status (power, temperature, etc.) of the electronic device (ED01) or external environmental status (user status, etc.) and generates electrical signals and/or data values corresponding to the detected status. can do. The sensor module (ED76) includes a gesture sensor, gyro sensor, barometric pressure sensor, magnetic sensor, acceleration sensor, grip sensor, proximity sensor, color sensor, IR (Infrared) sensor, biometric sensor, temperature sensor, humidity sensor, and/or illuminance sensor. May include sensors.

The interface ED77 may support one or a plurality of designated protocols that can be used to directly or wirelessly connect the electronic device ED01 to another electronic device (such as the electronic device ED02). The interface ED77 may include a High Definition Multimedia Interface (HDMI), a Universal Serial Bus (USB) interface, an SD card interface, and/or an audio interface.

The connection terminal ED78 may include a connector through which the electronic device ED01 can be physically connected to another electronic device (such as the electronic device ED02). Connection terminals (ED78) may include an HDMI connector, USB connector, SD card connector, and/or audio connector (headphone connector, etc.)

The haptic module (ED79) can convert electrical signals into mechanical stimulation (vibration, movement, etc.) or electrical stimulation that the user can perceive through tactile or kinesthetic senses. The haptic module (ED79) may include a motor, a piezoelectric element, and/or an electrical stimulation device.

The camera module (ED80) can shoot still images and videos. The camera module ED80 may include a lens assembly including one or a plurality of lenses, the image sensor 1000 of FIG. 1, image signal processors, and/or flashes. The lens assembly included in the camera module (ED80) can collect light emitted from the subject that is the target of image capture.

The power management module ED88 can manage power supplied to the electronic device ED01. The power management module (ED88) may be implemented as part of a Power Management Integrated Circuit (PMIC).

Battery ED89 may supply power to components of electronic device ED01. The battery ED89 may include a non-rechargeable primary cell, a rechargeable secondary cell, and/or a fuel cell.

The communication module (ED90) establishes a direct (wired) communication channel and/or a wireless communication channel between the electronic device (ED01) and other electronic devices (electronic device (ED02), electronic device (ED04), server (ED08), etc.) and can support communication through established communication channels. The communication module (ED90) operates independently of the processor (ED20) (application processor, etc.) and may include one or more communication processors that support direct communication and/or wireless communication. The communication module (ED90) is a wireless communication module (ED92) (cellular communication module, short-range wireless communication module, GNSS (Global Navigation Satellite System, etc.) communication module) and/or a wired communication module (ED94) (LAN (Local Area Network) communication module, power line communication module, etc.). Among these communication modules, the corresponding communication module is the first network (ED98) (a short-range communication network such as Bluetooth, WiFi Direct, or IrDA (Infrared Data Association)) or the second network (ED99) (a cellular network, the Internet, or a computer network (LAN) , WAN, etc.) can communicate with other electronic devices. These various types of communication modules may be integrated into one component (such as a single chip) or may be implemented as a plurality of separate components (multiple chips). The wireless communication module (ED92) uses subscriber information (international mobile subscriber identifier (IMSI), etc.) stored in the subscriber identification module (ED96) to communicate within a communication network such as the first network (ED98) and/or the second network (ED99). You can check and authenticate the electronic device (ED01).

The antenna module (ED97) can transmit signals and/or power to or receive signals and/or power from the outside (such as other electronic devices). The antenna may include a radiator consisting of a conductive pattern formed on a substrate (PCB, etc.). The antenna module ED97 may include one or multiple antennas. When a plurality of antennas are included, an antenna suitable for a communication method used in a communication network such as the first network (ED98) and/or the second network (ED99) may be selected from among the plurality of antennas by the communication module (ED90). You can. Signals and/or power may be transmitted or received between the communication module ED90 and other electronic devices through the selected antenna. In addition to the antenna, other components (RFIC, etc.) may be included as part of the antenna module (ED97).

Some of the components are connected to each other through communication methods between peripheral devices (bus, GPIO (General Purpose Input and Output), SPI (Serial Peripheral Interface), MIPI (Mobile Industry Processor Interface), etc.) and signals (commands, data, etc.) ) can be interchanged.

Commands or data may be transmitted or received between the electronic device ED01 and an external electronic device ED04 through the server ED08 connected to the second network ED99. The other electronic devices ED02 and ED04 may be the same or different types of devices from the electronic device ED01. All or part of the operations performed in the electronic device ED01 may be executed in one or more of the other electronic devices ED02, ED04, and ED08. For example, when the electronic device (ED01) needs to perform a certain function or service, instead of executing the function or service itself, it performs part or all of the function or service to one or more other electronic devices. You can ask them to do it. One or more other electronic devices that have received the request may execute additional functions or services related to the request and transmit the results of the execution to the electronic device ED01. For this purpose, cloud computing, distributed computing, and/or client-server computing technologies may be used.

FIG. 20 is a block diagram illustrating the camera module ED80 of FIG. 19. Referring to FIG. 20, the camera module (ED80) includes a lens assembly (CM10), a flash (CM20), an image sensor 1000 (such as the image sensor 1000 in FIG. 1), an image stabilizer (CM40), and a memory (CM50). (buffer memory, etc.), and/or an image signal processor (CM60). The lens assembly (CM10) can collect light emitted from a subject that is the target of image capture. The camera module ED80 may include a plurality of lens assemblies CM10. In this case, the camera module ED80 may be a dual camera, a 360-degree camera, or a spherical camera. Some of the plurality of lens assemblies (CM10) may have the same lens properties (angle of view, focal length, autofocus, F number, optical zoom, etc.) or may have different lens properties. The lens assembly CM10 may include a wide-angle lens or a telephoto lens.

The flash (CM20) can emit light that is used to enhance light emitted or reflected from the subject. The flash CM20 may include one or a plurality of light emitting diodes (RGB (Red-Green-Blue) LED, White LED, Infrared LED, Ultraviolet LED, etc.), and/or a Xenon Lamp. The image sensor 1000 may be the image sensor described in FIG. 1 and can acquire an image corresponding to the subject by converting light emitted or reflected from the subject and transmitted through the lens assembly (CM10) into an electrical signal. . The image sensor 1000 may include one or more sensors selected from among image sensors with different properties, such as an RGB sensor, a black and white (BW) sensor, an IR sensor, or a UV sensor. Each sensor included in the image sensor 1000 may be implemented as a charged coupled device (CCD) sensor and/or a complementary metal oxide semiconductor (CMOS) sensor.

The image stabilizer (CM40) responds to the movement of the camera module (ED80) or the electronic device (CM01) including it, and moves one or more lenses or image sensors (1000) included in the lens assembly (CM10) in a specific direction. Alternatively, the operation characteristics of the image sensor 1000 can be controlled (adjustment of read-out timing, etc.) to compensate for the negative effects of movement. The image stabilizer (CM40) can detect the movement of the camera module (ED80) or the electronic device (ED01) using a gyro sensor (not shown) or an acceleration sensor (not shown) placed inside or outside the camera module (ED80). You can. The image stabilizer (CM40) may be implemented optically.

The memory CM50 can store part or all data of the image acquired through the image sensor 1000 for the next image processing task. For example, when multiple images are acquired at high speed, the acquired original data (Bayer-Patterned data, high-resolution data, etc.) is stored in memory (CM50), only low-resolution images are displayed, and then selected (user selection, etc.) It can be used to ensure that the original data of the image is transmitted to the image signal processor (CM60). The memory CM50 may be integrated into the memory ED30 of the electronic device ED01, or may be configured as a separate memory that operates independently.

The image signal processor CM60 may perform image processing on images acquired through the image sensor 1000 or image data stored in the memory CM50. Image processing includes depth map creation, 3D modeling, panorama creation, feature point extraction, image compositing, and/or image compensation (noise reduction, resolution adjustment, brightness adjustment, blurring, sharpening) , softening, etc.). The image signal processor CM60 may perform control (exposure time control, lead-out timing control, etc.) on components (such as the image sensor 1000) included in the camera module ED80. Images processed by the image signal processor (CM60) are stored back in the memory (CM50) for further processing or stored in external components of the camera module (ED80) (memory (ED30), display unit (ED60), electronics (ED02) , electronic device (ED04), server (ED08), etc.). The image signal processor (CM60) may be integrated into the processor (ED20) or may be configured as a separate processor that operates independently of the processor (ED20). If the image signal processor (CM60) is configured as a separate processor from the processor (ED20), the image processed by the image signal processor (CM60) undergoes additional image processing by the processor (ED20) and then is displayed on the display device (ED60). It can be displayed through

Additionally, the image signal processor CM60 may independently receive two focus signals from each pixel of the image sensor 1000 and generate an autofocus signal using a phase detection autofocus method from the difference between the two focus signals. The image signal processor CM60 may control the lens assembly CM10 so that the focus of the lens assembly CM10 is accurately aligned with the surface of the image sensor 1000 based on the autofocus signal.

The electronic device ED01 may include a plurality of camera modules ED80, each having different properties or functions. In this case, one of the plurality of camera modules (ED80) may be a wide-angle camera and the other may be a telephoto camera. Similarly, one of the plurality of camera modules ED80 may be a front camera and the other may be a rear camera.

The image sensor 1000 according to embodiments includes a mobile phone or smart phone 1100m shown in FIG. 21, a tablet or smart tablet 1200 shown in FIG. 22, and a digital camera or camcorder 1300 shown in FIG. 23. , can be applied to the laptop computer 1400 shown in FIG. 24 or the television or smart television 1500 shown in FIG. 25. For example, the smartphone 1100m or the smart tablet 1200 may include a plurality of high-resolution cameras each equipped with a high-resolution image sensor. Using high-resolution cameras, you can extract depth information of subjects in an image, adjust the outfocusing of an image, or automatically identify subjects in an image.

In addition, the image sensor 1000 may be used in the smart refrigerator 1600 shown in FIG. 26, the security camera 1700 shown in FIG. 27, the robot 1800 shown in FIG. 28, and the medical camera 1900 shown in FIG. 29. It can be applied to etc. For example, the smart refrigerator 1600 can automatically recognize food in the refrigerator using an image sensor and inform the user of the presence of specific food, the type of food received or shipped, etc., to the user through the smartphone. The security camera 1700 can provide ultra-high resolution images and, using high sensitivity, can recognize objects or people in the image even in a dark environment. The robot 1900 can provide high-resolution images when deployed at disaster or industrial sites that cannot be directly accessed by humans. The medical camera 1900 can provide high-resolution images for diagnosis or surgery and can dynamically adjust its field of view.

Additionally, the image sensor 1000 may be applied to the vehicle 2000 as shown in FIG. 30. The vehicle 2000 may include a plurality of vehicle cameras 2010, 2020, 2030, and 2040 arranged at various locations. Each vehicle camera 2010, 2020, 2030, and 2040 may include an image sensor according to an embodiment. The vehicle 2000 can provide the driver with various information about the inside or surroundings of the vehicle 2000 using a plurality of vehicle cameras (2010, 2020, 2030, 2040), and automatically recognizes objects or people in the image. It can provide information necessary for autonomous driving.

Although the image sensor having the above-described color separation lens array and the electronic device including the same have been described with reference to the embodiment shown in the drawings, this is merely illustrative, and those skilled in the art will understand various It will be understood that variations and equivalent other embodiments are possible. Therefore, the disclosed embodiments should be considered from an illustrative rather than a restrictive perspective. The scope of rights is indicated in the patent claims, not the foregoing description, and all differences within the equivalent scope should be interpreted as being included in the scope of rights.

101....Pixel separator 102....Cell separator
103.....Light transmission layer 110.....Sensor substrate
111, 112, 113, 114...Pixel 120...Spacer layer
130.....Color separation lens array
131, 132, 133, 134.....pixel corresponding area
140.....Color filter array
141, 142, 143, 144.....Color filter
1000.....Image sensor 1010.....Timing controller
1020.....Row decoder 1030.....Output circuit
1100.....pixel array

Claims (25)

A plurality of first pixels that sense light of a first wavelength, a plurality of second pixels that sense light of a second wavelength different from the first wavelength, and a plurality of pixels that sense light of a third wavelength different from the first and second wavelengths. A sensor substrate including a third pixel and a plurality of fourth pixels for detecting light of a first wavelength; and
By changing the phase of the light of the first wavelength, the light of the first wavelength is condensed into each of the first and fourth pixels, and by changing the phase of the light of the second wavelength, the light of the second wavelength is concentrated into each of the second pixels. A color separation lens array that focuses light on a pixel and changes the phase of the light on the third wavelength to focus the light on the third wavelength on each third pixel,
Each first pixel includes a first focus signal area and a second focus signal area that each independently generate a focus signal, and the first focus signal area and the second focus signal area are the first focus signal area within the first pixel. are arranged adjacent to each other in the direction,
Each fourth pixel includes a third focus signal area and a fourth focus signal area that independently generate focus signals, and the third focus signal area and the fourth focus signal area are the first focus signal areas within the fourth pixel. arranged to be adjacent to each other in a second direction different from the direction,
Each second pixel includes a fifth focus signal area and a sixth focus signal area that independently generate focus signals, and the fifth focus signal area and the sixth focus signal area are adjacent to each other in the first diagonal direction. are placed,
Each third pixel includes a seventh focus signal area and an eighth focus signal area that independently generate focus signals, and the seventh focus signal area and the eighth focus signal area are adjacent to each other in the first diagonal direction. An image sensor arranged to do so. According to claim 1,
The sensor substrate includes a plurality of unit patterns, and within each unit pattern, the first pixel and the fourth pixel are arranged along the first diagonal direction, and the second pixel and the third pixel are arranged along the first diagonal direction. An image sensor disposed along a second different diagonal direction. According to claim 1,
Each first pixel includes a first light sensing cell and a second light sensing cell that independently sense light, and the first light sensing cell and the second light sensing cell move the first pixel in a second direction. arranged to divide,
The focus signal of the first focus signal area is an output of the first light sensing cell, and the focus signal of the second focus signal area is an output of the second light sensing cell. According to clause 3,
Each fourth pixel includes a third light sensing cell and a fourth light sensing cell that independently sense light, and the third light sensing cell and the fourth light sensing cell move the fourth pixel in the first direction. arranged to divide,
The focus signal of the third focus signal area is an output of the third light sensing cell, and the focus signal of the fourth focus signal area is an output of the fourth light sensing cell. According to claim 1,
Each first pixel includes a first light sensing cell, a second light sensing cell, a third light sensing cell, and a fourth light sensing cell that independently senses light, and the first to fourth light sensing cells are The first pixels are arranged in four quadrants divided into 2 × 2 arrays,
The focus signal of the first focus signal area is the sum of the output of the first light sensing cell and the output of the third light sensing cell, and the focus signal of the second focus signal area is the sum of the output of the second light sensing cell and the output of the fourth light sensing cell. An image sensor is the sum of the output of the sensing cell. According to clause 5,
Each fourth pixel includes a fifth light sensing cell, a sixth light sensing cell, a seventh light sensing cell, and an eighth light sensing cell that independently sense light, and the fifth to eighth light sensing cells The fourth pixel is arranged in each quadrant divided into four quadrants in the form of a 2×2 array,
The focus signal of the third focus signal area is the sum of the output of the fifth light sensing cell and the output of the sixth light sensing cell, and the focus signal of the fourth focus signal area is the sum of the output of the seventh light sensing cell and the output of the eighth light sensing cell. An image sensor is the sum of the output of the sensing cell. According to claim 1,
The sensor substrate further includes a pixel isolation film that separates the first to fourth pixels from each other,
Each first pixel further includes a first cell separator for separating the first focus signal area and the second focus signal area from each other, and each fourth pixel separates the third focus signal area and the fourth focus signal area from each other. An image sensor further comprising a second cell separation membrane for separation. According to clause 7,
The first cell separator extends in a straight line along the second direction within the first pixel, and the second cell separator extends in a straight line along the first direction within the fourth pixel. . According to clause 8,
In the first and fourth pixels located at the center of the sensor substrate, the first cell separator is positioned to pass through the center of the first pixel, and the second cell separator is positioned to pass through the center of the fourth pixel. sensor. According to clause 9,
In the first pixel located at the periphery of the sensor substrate in the first direction, the first cell separator is shifted in the first direction toward the center of the sensor substrate, and the first cell separator is shifted in the first direction toward the center of the sensor substrate, and the first pixel is located at the periphery of the sensor substrate in the second direction. The image sensor wherein the second cell separator is shifted in the second direction toward the center of the sensor substrate at 4 pixels. According to clause 7,
Each of the first cell separator and the second cell separator includes a first direction separator extending in a straight line along the first direction and a second direction extending in a straight line along the second direction and intersecting the first direction separator. An image sensor comprising a separator. According to claim 11,
In the first and fourth pixels located at the center of the sensor substrate, an intersection point between the first direction separator and the second direction separator is located at the center of the first or fourth pixel. According to claim 12,
An intersection point between the first direction separator and the second direction separator in the first pixel and the fourth pixel located at the periphery of the sensor substrate in the first direction is shifted in the first direction toward the center of the sensor substrate, An image sensor, wherein an intersection point between the first direction separator and the second direction separator at the first and fourth pixels located at the periphery of the sensor substrate in the second direction is shifted in the second direction toward the center of the sensor substrate. . According to clause 7,
The image sensor wherein the heights of the first and second cell separators are smaller than the height of the pixel separators. According to claim 14,
The image sensor wherein the first and second cell separators have a height of 1/4 to 1/2 the height of the pixel separator. delete According to claim 1,
Each second pixel includes a first light sensing cell and a second light sensing cell that independently sense light, and the first light sensing cell and the second light sensing cell move the second pixel in the first diagonal direction. Arranged to be divided into two,
The focus signal of the fifth focus signal area is an output of the first light sensing cell, and the focus signal of the sixth focus signal area is an output of the second light sensing cell. According to claim 17,
Each third pixel includes a third light sensing cell and a fourth light sensing cell that independently sense light, and the third light sensing cell and the fourth light sensing cell move the third pixel in the first diagonal direction. It is arranged to be divided into two,
The focus signal of the seventh focus signal area is an output of the third light sensing cell, and the focus signal of the eighth focus signal area is an output of the fourth light sensing cell. According to claim 1,
Each second pixel includes a first light sensing cell, a second light sensing cell, a third light sensing cell, and a fourth light sensing cell that independently senses light, and the first to fourth light sensing cells are The second pixels are arranged in four quadrants divided into 2 × 2 arrays,
The focus signal of the fifth focus signal area is the output of the second light sensing cell and the focus signal of the sixth focus signal area is the output of the third light sensing cell, or the focus signal of the fifth focus signal area is the output of the third light sensing cell. The image sensor is the output of the first light sensing cell, and the focus signal of the sixth focus signal area is the output of the fourth light sensing cell. According to clause 19,
Each third pixel includes a fifth light sensing cell, a sixth light sensing cell, a seventh light sensing cell, and an eighth light sensing cell that independently senses light, and the seventh to eighth light sensing cells are The third pixel is arranged in four quadrants divided into 2 × 2 arrays,
The focus signal of the seventh focus signal area is the output of the sixth light sensing cell and the focus signal of the eighth focus signal area is the output of the seventh light sensing cell, or the focus signal of the seventh focus signal area is the output of the seventh light sensing cell. An image sensor, wherein the output of the fifth light sensing cell is the output of the eighth light sensing cell, and the focus signal of the eighth focus signal area is the output of the eighth light sensing cell. According to claim 1,
The sensor substrate further includes a pixel isolation film that separates the first to fourth pixels from each other,
Each second pixel further includes a first cell separator for separating the fifth focus signal area and the sixth focus signal area from each other, and each third pixel separates the seventh focus signal area and the eighth focus signal area from each other. An image sensor further comprising a second cell separation membrane for separation. According to claim 21,
The first cell separator and the second cell separator extend in a straight line along the first diagonal direction. According to clause 22,
In the second and third pixels located at the center of the sensor substrate, the first cell separator is positioned to pass through the center of the second pixel, and the second cell separator is positioned to pass through the center of the third pixel. sensor. According to clause 23,
In the second and third pixels located on the periphery of the sensor substrate in the second diagonal direction intersecting the first diagonal direction, the first and second cell isolation films are aligned in the second diagonal direction toward the center of the sensor substrate. Image sensor that is shifted in direction. An image sensor that converts optical images into electrical signals;
a processor that controls the operation of the image sensor and stores and outputs signals generated by the image sensor; and
It includes a lens assembly that provides light coming from a subject to the image sensor,
The image sensor is:
A plurality of first pixels that sense light of a first wavelength, a plurality of second pixels that sense light of a second wavelength different from the first wavelength, and a plurality of pixels that sense light of a third wavelength different from the first and second wavelengths. A sensor substrate including a third pixel and a plurality of fourth pixels for detecting light of a first wavelength; and
By changing the phase of the light of the first wavelength, the light of the first wavelength is condensed into each of the first and fourth pixels, and by changing the phase of the light of the second wavelength, the light of the second wavelength is concentrated into each of the second pixels. A color separation lens array that focuses light on a pixel and changes the phase of the light on the third wavelength to focus the light on the third wavelength on each third pixel,
Each first pixel includes a first focus signal area and a second focus signal area that each independently generate a focus signal, and the first focus signal area and the second focus signal area are the first focus signal area within the first pixel. are arranged adjacent to each other in the direction,
Each fourth pixel includes a third focus signal area and a fourth focus signal area that independently generate focus signals, and the third focus signal area and the fourth focus signal area are the first focus signal areas within the fourth pixel. arranged to be adjacent to each other in a second direction different from the direction,
Each second pixel includes a fifth focus signal area and a sixth focus signal area that independently generate focus signals, and the fifth focus signal area and the sixth focus signal area are adjacent to each other in the first diagonal direction. are placed,
Each third pixel includes a seventh focus signal area and an eighth focus signal area that independently generate focus signals, and the seventh focus signal area and the eighth focus signal area are adjacent to each other in the first diagonal direction. An electronic device arranged to do so.

Images