KR20230051072A - Image sensor including color separating lens array and electronic apparatus including the image sensor - Google Patents

Abstract

A disclosed image sensor includes: a color separating lens array including a plurality of first pixel corresponding regions respectively corresponding to a plurality of first pixels and a plurality of second pixel corresponding regions respectively corresponding to a plurality of second pixels. Each of the plurality of first pixel corresponding regions and the plurality of second pixel corresponding regions includes a plurality of nanoposts. At least one of the shapes, widths, and arrangements of the plurality of nanoposts in the plurality of first pixel corresponding regions may change according to a position in an azimuth direction in a periphery part surrounding the center of the color separating lens array.

Description

Image sensor including color separating lens array and electronic apparatus including the image sensor}

Disclosed embodiments relate to an image sensor having a color separation lens array capable of separating and condensing incident light by wavelength and an electronic device including the image sensor.

An image sensor typically detects the color of incident light using a color filter. However, since the color filter absorbs light of colors other than light of the corresponding color, light utilization efficiency may decrease. For example, when an RGB color filter is used, only 1/3 of the incident light is transmitted and the remaining 2/3 is absorbed, so the light utilization efficiency is only about 33%. Therefore, in the case of a color display device or color image sensor, most light loss occurs in the color filter.

Provided is an image sensor having improved light utilization efficiency by using a color separation lens array capable of separating and condensing incident light by wavelength, and an electronic device including the image sensor.

In addition, an image sensor having improved color purity is provided.

An image sensor according to an embodiment includes a sensor substrate including a plurality of first pixels sensing light of a first wavelength and a plurality of second pixels sensing light of a second wavelength different from the first wavelength; and a color separation lens array including a plurality of first pixel corresponding regions respectively corresponding to the plurality of first pixels and a plurality of second pixel corresponding regions respectively corresponding to the plurality of second pixels, A first pixel correspondence region and a plurality of second pixel correspondence regions change the phase of light of the first wavelength to condense the light of the first wavelength to each first pixel and change the phase of the light of the second wavelength configured to condense light of the second wavelength into respective second pixels, wherein each of the plurality of first pixel corresponding regions and the plurality of second pixel corresponding regions includes a plurality of nanoposts; At least one of the shape, width, and arrangement of the plurality of nanoposts in the plurality of first pixel correspondence regions may be determined according to an azimuth angle of the plurality of nanoposts in the peripheral portion surrounding the center portion.

The plurality of nanoposts of the first pixel correspondence region include first nanoposts and second nanoposts disposed at different positions in the first pixel correspondence region, and the color separation is performed on the surface of the color separation lens array. The width of the first nanoposts of the first pixel corresponding region located apart from the center of the lens array by a first distance in a first direction is perpendicular to the first direction from the center of the color separation lens array on the surface of the color separation lens array. The width may be different from that of the first nanoposts of the first pixel correspondence region, which are spaced apart by a first distance in one second direction.

The width of the second nanoposts of the first pixel corresponding region located on the surface of the color separation lens array by a first distance in a first direction from the center of the color separation lens array is the width of the color separation lens array on the surface of the color separation lens array. It may be the same as the width of the second nanoposts of the first pixel correspondence region, which is located away from the center of the separation lens array by a first distance in a second direction.

The width of the first nanoposts of the first pixel correspondence region located on the surface of the color separation lens array by a first distance in the direction of 45 degrees between the first and second directions from the center of the color separation lens array is The width of the first nanopost of the first pixel corresponding region located in the center of the color separation lens array may be larger than that of the first nanopost.

The width of the second nanoposts of the first pixel corresponding region located on the surface of the color separation lens array by a first distance in the direction of 45 degrees from the center of the color separation lens array is the width of the second nanopost located at the center of the color separation lens array It may be larger than the width of the second nanopost in the first pixel correspondence region.

The width of the first nanoposts of the first pixel corresponding region located on the surface of the color separation lens array by a second distance greater than the first distance in a direction of 45 degrees from the center of the color separation lens array is is larger than a width of a first nanopost of the first pixel corresponding region located away from the center of the color separation lens array by a first distance in a direction of 45 degrees on the surface of the color separation lens array, and the color separation lens array on the surface of the color separation lens array The width of the second nanoposts of the first pixel correspondence region, which is located at a distance of 45 degrees from the center of the center by a second distance greater than the first distance, is 45 degrees from the center of the color separation lens array on the surface of the color separation lens array. It may be greater than the width of the second nanoposts of the first pixel correspondence region located apart from each other by a first distance in the direction.

The arrangement of a plurality of nanoposts in the first pixel corresponding region located on the surface of the color separation lens array by a first distance in a first direction from the center of the color separation lens array provides the color separation lens array on the surface of the color separation lens array. It may be different from the arrangement of the plurality of nanoposts in the first pixel correspondence region spaced apart from the center of the separation lens array by a first distance in a second direction perpendicular to the first direction.

Positions of the first pixel corresponding region and the second pixel corresponding region at the center of the color separation lens array coincide with positions of the corresponding first and second pixels, respectively, and the second pixel corresponding region at the periphery of the color separation lens array. The area corresponding to 1 pixel and the area corresponding to the second pixel may be shifted toward the center of the color separation lens array with respect to the first pixel and the second pixel, respectively.

The degree to which the first pixel correspondence area and the second pixel correspondence area at the periphery of the color separation lens array are shifted with respect to the corresponding first and second pixels, respectively, from the center of the color separation lens array to the first pixel The distance between the corresponding area and the second pixel corresponding area may increase as the distance increases.

The sensor substrate further includes a plurality of third pixels sensing light of a third wavelength different from the first and second wavelengths and a plurality of fourth pixels sensing light of the first wavelength, and the color separation lens array comprises: and a plurality of third pixel correspondence regions corresponding to the third pixel and a plurality of fourth pixel correspondence regions corresponding to the fourth pixel, wherein the plurality of third pixel correspondence regions and the plurality of fourth pixel correspondence regions are included. Each includes a plurality of nanoposts, and the plurality of first pixel corresponding regions, the plurality of second pixel corresponding regions, the plurality of third pixel corresponding regions, and the plurality of fourth pixel corresponding regions correspond to the light of the first wavelength. By changing the phase, the light of the first wavelength is condensed into each of the first and fourth pixels, and by changing the phase of the light of the second wavelength, the light of the second wavelength is condensed into each of the second pixels, It may be configured to condense the light of the third wavelength to each third pixel by changing the phase of the light of the third wavelength.

The plurality of first pixel correspondence regions and the plurality of fourth pixel correspondence regions are disposed adjacent to each other in a first diagonal direction, and the plurality of second pixel correspondence regions and the plurality of third pixel correspondence regions are disposed adjacent to each other in a first diagonal direction. It may be disposed adjacent to each other in a second diagonal direction crossing the.

At least one of the shapes, widths, and arrangements of the plurality of nanoposts in the plurality of fourth pixel corresponding regions may change according to positions in the azimuth direction in the periphery surrounding the center of the color separation lens array.

The plurality of nanoposts of the first pixel correspondence region include first nanoposts and second nanoposts disposed at different positions in the first pixel correspondence region, and the plurality of nanoposts of the fourth pixel correspondence region includes third nanoposts and fourth nanoposts disposed at different positions in the fourth pixel corresponding region, and includes a first direction on the surface of the color separation lens array in a first direction from the center of the color separation lens array. The width of the first nanoposts of the first pixel corresponding region spaced apart by a distance may be spaced apart by a first distance from the center of the color separation lens array on the surface of the color separation lens array in a second direction perpendicular to the first direction. of the fourth pixel correspondence region, which is different from the width of the first nanopost of the first pixel correspondence region and is located apart from the center of the color separation lens array by a first distance on the surface of the color separation lens array in a first direction; A width of the third nanoposts may be different from a width of the third nanoposts of the fourth pixel corresponding region located on the surface of the color separation lens array and spaced apart from the center of the color separation lens array by a first distance in a second direction. there is.

The width of the second nanoposts of the first pixel corresponding region located on the surface of the color separation lens array by a first distance in a first direction from the center of the color separation lens array is the width of the color separation lens array on the surface of the color separation lens array. It is equal to the width of the second nanopost of the first pixel correspondence region, which is located apart from the center of the separation lens array by a first distance in a second direction, and is located on the surface of the color separation lens array and is located away from the center of the color separation lens array. The width of the fourth nanopost of the fourth pixel corresponding region, which is spaced apart by a first distance in one direction, is the width of the fourth nanopost, which is spaced apart by a first distance in a second direction from the center of the color separation lens array on the surface of the color separation lens array. It may be the same as the width of the fourth nanopost of the fourth pixel correspondence region.

A width of the first nanoposts in the region corresponding to the first pixel at the center of the color separation lens array may be the same as a width of the third nanoposts in the region corresponding to the fourth pixel.

The width of the first nanopost of the first pixel correspondence region, which is spaced apart from the center of the color separation lens array by a first distance in a first direction, is located apart from the center of the color separation lens array by a first distance in a first direction. It may be different from the width of the third nanopost of the fourth pixel corresponding region.

The width of the first nanopost of the first pixel corresponding region, which is spaced apart from the center of the color separation lens array by a first distance in a second direction, is spaced apart from the center of the color separation lens array by a first distance in a second direction. It may be different from the width of the third nanopost of the fourth pixel corresponding region.

The width of the first nanopost of the first pixel corresponding region, which is spaced apart from the center of the color separation lens array by a first distance in a first direction, is spaced apart from the center of the color separation lens array by a first distance in a second direction. It may be the same as the width of the third nanopost of the fourth pixel corresponding region.

The first nanoposts of the first pixel correspondence area are disposed at edges along the second direction within the first pixel correspondence area, and the third nanoposts of the fourth pixel correspondence area are disposed in the fourth pixel correspondence area. It may be disposed at an edge along the first direction.

The width of the first nanoposts of the first pixel correspondence region located on the surface of the color separation lens array by a first distance in the direction of 45 degrees between the first and second directions from the center of the color separation lens array is It is larger than the width of the first nanopost of the first pixel corresponding region located at the center of the color separation lens array, and is located apart from the center of the color separation lens array by a first distance in a direction of 45 degrees from the center of the color separation lens array on the surface of the color separation lens array. A width of the third nanoposts of the fourth pixel corresponding region may be greater than a width of the fourth nanoposts of the fourth pixel corresponding region located in the center of the color separation lens array.

The width of the first nanoposts of the first pixel corresponding region located on the surface of the color separation lens array by a second distance greater than the first distance in a direction of 45 degrees from the center of the color separation lens array is is larger than a width of a first nanopost of the first pixel corresponding region located away from the center of the color separation lens array by a first distance in a direction of 45 degrees on the surface of the color separation lens array, and the color separation lens array on the surface of the color separation lens array The width of the third nanopost of the fourth pixel corresponding region located at a distance of a second distance in the direction of 45 degrees from the center of the color separation lens array is a first distance in the direction of 45 degrees from the center of the color separation lens array on the surface of the color separation lens array. may be greater than the width of the third nanoposts of the fourth pixel correspondence region spaced apart from each other by .

The width of the second nanoposts of the first pixel corresponding region, which is located on the surface of the color separation lens array and is separated from the center of the color separation lens array by a second distance greater than the first distance in a direction of 45 degrees, is is larger than the width of the second nanoposts of the first pixel corresponding region located apart from the center of the color separation lens array by a first distance in the direction of 45 degrees on the surface of the color separation lens array, and the color separation lens array on the surface of the color separation lens array The width of the fourth nanopost of the fourth pixel corresponding region located at a distance of a second distance in the direction of 45 degrees from the center of the color separation lens array is a first distance in the direction of 45 degrees from the center of the color separation lens array on the surface of the color separation lens array. may be greater than the width of the fourth nanopost of the fourth pixel correspondence region spaced apart from each other by .

For example, the width of the first nanoposts of the first pixel corresponding region located on the surface of the color separation lens array and spaced apart from the center of the color separation lens array by a second distance in a direction of 45 degrees is the width of the first nanopost of the color separation lens array. It may be 5% to 15% larger than the width of the first nanopost of the first pixel corresponding region located in the center.

While the azimuth angle increases from 0 degrees to 45 degrees, the width of the first nanoposts of the first pixel correspondence region disposed away from the center of the color separation lens array by a first distance is fixed, and the fourth pixel correspondence region While the width of the third nanopost of gradually decreases and the azimuth angle increases from 45 degrees to 90 degrees, the first portion of the first pixel correspondence region disposed apart from the center of the color separation lens array by a first distance. The width of the nanoposts gradually increases, and the width of the third nanoposts of the fourth pixel corresponding region may be fixed.

Nanoposts of the first pixel correspondence region and the fourth pixel correspondence region may be symmetrically arranged in an angular range of ±45 degrees based on azimuth angles of 0 degrees, 90 degrees, 180 degrees, and 270 degrees.

The arrangement of a plurality of nanoposts in the first pixel corresponding region located on the surface of the color separation lens array by a first distance in a first direction from the center of the color separation lens array provides the color separation lens array on the surface of the color separation lens array. It is different from the arrangement of a plurality of nanoposts in the first pixel correspondence region located apart from the center of the separation lens array by a first distance in a second direction perpendicular to the first direction, and the color separation on the surface of the color separation lens array The arrangement of the plurality of nanoposts in the fourth pixel corresponding region spaced apart from the center of the lens array by a first distance in a first direction is arranged on the surface of the color separation lens array in a second direction from the center of the color separation lens array. It may be different from the arrangement of the plurality of nanoposts in the fourth pixel correspondence region spaced apart by 1 distance.

The arrangement of a plurality of nanoposts in the first pixel corresponding region located on the surface of the color separation lens array by a first distance in a first direction from the center of the color separation lens array provides the color separation lens array on the surface of the color separation lens array. It is the same as the arrangement of the plurality of nanoposts in the fourth pixel corresponding region, which is located apart from the center of the separation lens array by a first distance in a second direction, and is located on the surface of the color separation lens array from the center of the color separation lens array. The arrangement of the plurality of nanoposts in the fourth pixel corresponding region spaced apart by a first distance in one direction may include the array of nanoposts spaced apart by a first distance in a second direction from the center of the color separation lens array on the surface of the color separation lens array. It may be the same as the arrangement of the plurality of nanoposts in the first pixel correspondence region.

For example, the light of the first wavelength may be green light, the light of the second wavelength may be blue light, and the light of the third wavelength may be red light.

An image sensor according to another embodiment includes a plurality of unit pixel groups including a first pixel sensing green light, a second pixel sensing blue light, a third pixel sensing red light, and a fourth pixel sensing green light, respectively. A sensor substrate comprising a; and a first pixel correspondence area, a second pixel correspondence area, a third pixel correspondence area, and a fourth pixel correspondence area respectively corresponding to the first pixel, the second pixel, the third pixel, and the fourth pixel. and a color separation lens array including a plurality of pixel correspondence groups, wherein the first pixel correspondence area, the second pixel correspondence area, the third pixel correspondence area, and the fourth pixel correspondence area determine a phase of the green light among incident light. change the phase of the blue light to focus on the first pixel and the fourth pixel, change the phase of the blue light to focus on the second pixel, and change the phase of the red light to focus on the third pixel; Each of the fourth pixel correspondence regions includes a plurality of nanoposts, the plurality of pixel correspondence groups include a center group located at the center of the color separation lens array and a plurality of peripheral groups outside the center of the color separation lens array; , The plurality of peripheral groups include a first peripheral group and a second peripheral group having the same chief ray angle and different azimuthal angles, and the first pixel correspondence region of the first peripheral group corresponds to the first pixel of the second peripheral group. The regions are different from each other in at least one of the shape, width, and arrangement of the plurality of nanoposts, and the region corresponding to the fourth pixel of the first peripheral group and the region corresponding to the fourth pixel of the second peripheral group have the shape of the plurality of nanoposts. At least one of , width, and arrangement may be different from each other.

The plurality of nanoposts of the first pixel correspondence region include first nanoposts and second nanoposts disposed at different positions in the first pixel correspondence region, and the plurality of nanoposts of the fourth pixel correspondence region includes third nanoposts and fourth nanoposts disposed at different positions within the fourth pixel correspondence area, the first peripheral group has an azimuth angle of 0 degrees from a reference line passing through the center of the image sensor, A width of a first nanopost of a first pixel correspondence region in the first peripheral group may be smaller than a width of a third nanopost of a fourth pixel correspondence region in the first peripheral group.

The plurality of nanoposts of the first pixel correspondence region include first nanoposts and second nanoposts disposed at different positions in the first pixel correspondence region, and the plurality of nanoposts of the fourth pixel correspondence region includes a third nanopost and a fourth nanopost disposed at different positions within the fourth pixel correspondence area, the second peripheral group has an azimuthal angle of 90 degrees from a reference line passing through the center of the image sensor, A width of the first nanoposts of the first pixel correspondence region in the second peripheral group may be greater than a width of the third nanoposts of the fourth pixel correspondence region in the second peripheral group.

The plurality of nanoposts of the first pixel correspondence region include first nanoposts and second nanoposts disposed at different positions in the first pixel correspondence region, and the plurality of nanoposts of the fourth pixel correspondence region includes third nanoposts and fourth nanoposts disposed at different positions within the fourth pixel corresponding region, and the plurality of peripheral groups have the same chief ray angle as the first and second peripheral groups, and A third peripheral group having an azimuth angle different from those of the first and second peripheral groups, the third peripheral group having an azimuth angle of 45 degrees from a reference line passing through a center of the image sensor, and a first pixel in the third peripheral group The width of the first nanoposts of the corresponding region and the width of the third nanoposts of the corresponding region of the fourth pixel in the third peripheral group are equal to each other, and the width of the first nanoposts of the corresponding region of the first pixel in the third peripheral group is equal to each other. The width and the width of the third nanoposts of the fourth pixel corresponding region in the third peripheral group may be greater than the widths of corresponding nanoposts in the central group.

An electronic device according to another embodiment includes an image sensor that converts an optical image into an electrical signal; a processor controlling an operation of the image sensor and storing and outputting a signal generated by the image sensor; and a lens assembly configured to provide light coming from a subject to the image sensor, wherein the image sensor: detects a plurality of first pixels for detecting light of a first wavelength and light of a second wavelength different from the first wavelength. a sensor substrate including a plurality of second pixels; and a color separation lens array including a plurality of first pixel corresponding regions respectively corresponding to the plurality of first pixels and a plurality of second pixel corresponding regions respectively corresponding to the plurality of second pixels, A first pixel correspondence region and a plurality of second pixel correspondence regions change the phase of light of the first wavelength to condense the light of the first wavelength to each first pixel and change the phase of the light of the second wavelength configured to condense light of the second wavelength into respective second pixels, wherein each of the plurality of first pixel corresponding regions and the plurality of second pixel corresponding regions includes a plurality of nanoposts; At least one of the shape, width, and arrangement of the plurality of nanoposts in the plurality of first pixel correspondence regions may be determined according to an azimuth angle of the plurality of nanoposts in the peripheral portion surrounding the center portion.

Since the color separation lens array can separate and collect incident light by wavelength without absorbing or blocking incident light, the light utilization efficiency of the image sensor can be improved.

In addition, light utilization efficiency at the periphery of the image sensor may be improved by considering light obliquely incident to the periphery of the image sensor.

In addition, color purity can be further improved at the periphery of the image sensor by changing the shape, width, and arrangement of the nanoposts of the color separation lens array according to positions in the azimuth direction at the periphery of the image sensor.

1 is a block diagram of an image sensor according to an exemplary embodiment.
2A to 2C illustratively show various pixel arrangements of the pixel array of the image sensor.
3A and 3B are conceptual views illustrating a schematic structure and operation of a color separation lens array according to an exemplary embodiment.
4A and 4B are schematic cross-sectional views showing different cross-sections of a pixel array of an image sensor according to an exemplary embodiment.
FIG. 5A is a plan view schematically showing the arrangement of pixels in a pixel array, FIG. 5B is a plan view exemplarily showing a form in which a plurality of nanoposts are arranged in a plurality of areas of a color separation lens array, and FIGS. 5C to 5F are color separation lens arrays. It is a plan view illustratively showing various other types of separation lens arrays.
FIG. 6A shows the phase distribution of green light and blue light passing through the color separation lens array along line I-I' in FIG. 5B, and FIG. FIG. 6C is a diagram showing a phase of blue light passing through a color separation lens array at the center of corresponding pixel regions.
FIG. 6D exemplarily shows a traveling direction of green light incident to the first green light condensing area, and FIG. 6E is a diagram exemplarily showing an array of first green light condensing areas.
FIG. 6F exemplarily shows a traveling direction of blue light incident to the blue light condensing area, and FIG. 6G is a diagram exemplarily showing an array of blue light condensing areas.
FIG. 7A shows the phase distribution of red light and green light passing through the color separation lens array along the line II-II′ of FIG. 5B, and FIG. FIG. 7C is a view showing the phase of the green light passing through the color separation lens array at the center of corresponding pixel regions.
FIG. 7D exemplarily shows a traveling direction of red light incident to the red light condensing area, and FIG. 7E is a diagram exemplarily showing an array of red light condensing areas.
FIG. 7F illustratively shows a traveling direction of green light incident to the second green light condensing area, and FIG. 7g is a view showing an array of second green light condensing areas exemplarily.
8A to 8C are plan views exemplarily showing changes in the arrangement shape of nanoposts of a color separation lens array in consideration of a change in chief ray angle according to a position on an image sensor.
9 is a cross-sectional view showing a schematic structure of a pixel array of an image sensor according to another embodiment.
10 is a plan view exemplarily showing a shift shape of two-dimensionally arrayed nanoposts in consideration of a change in chief ray angle in a color separation lens array.
11A and 11B are plan views illustratively illustrating a change in width of a nanopost according to a position on an image sensor according to another embodiment.
12 is a plan view defining an azimuth direction in an image sensor or color separation lens array.
13A to 13C are plan views illustratively showing changes in arrangement form of nanoposts of a color separation lens array according to azimuthal positions on an image sensor according to an exemplary embodiment.
14A to 14D are plan views illustratively showing changes in arrangement form of nanoposts of a color separation lens array according to azimuthal positions on an image sensor according to another embodiment.
FIG. 15A shows a case in which the chief ray angle is not considered, FIG. 15B shows a case in which the nanoposts are shifted in consideration of the chief ray angle, and FIG. In this case, it is a graph showing the spectral distribution of light incident on each pixel of the image sensor as an example.
16 is a block diagram schematically illustrating an electronic device including an image sensor according to example embodiments.
FIG. 17 is a block diagram schematically illustrating the camera module of FIG. 16 .
18 to 27 are diagrams illustrating various examples of electronic devices to which image sensors according to embodiments are applied.

Hereinafter, an image sensor including a color separation lens array and an electronic device including the same will be described in detail with reference to the accompanying drawings. The described embodiments are merely illustrative, and various modifications are possible from these embodiments. In the following drawings, the same reference numerals denote the same components, and the size of each component in the drawings may be exaggerated for clarity and convenience of description.

Hereinafter, expressions described as “upper” or “upper” may include not only what is directly above/below/left/right in contact but also what is above/below/left/right in non-contact.

The terms first, second, etc. may be used to describe various components, but are used only for the purpose of distinguishing one component from another. These terms are not intended to limit the difference in material or structure of the components.

Singular expressions include plural expressions unless the context clearly dictates otherwise. In addition, when a certain component is said to "include", this means that it may further include other components without excluding other components unless otherwise stated.

In addition, terms such as "...unit" and "module" described in the specification mean a unit that processes one or more functions or operations, which may be implemented as hardware or software or a combination of hardware and software. there is.

The use of the term "above" and similar denoting terms may correspond to both singular and plural.

Steps comprising a method may be performed in any suitable order, unless expressly stated that they must be performed in the order described. In addition, the use of all exemplary terms (for example, etc.) is simply for explaining technical ideas in detail, and the scope of rights is not limited due to these terms unless limited by claims.

1 is a schematic block diagram of an image sensor according to an exemplary embodiment. Referring to FIG. 1 , an image sensor 1000 may include a pixel array 1100 , a timing controller 1010 , a row decoder 1020 , and an output circuit 1030 . The image sensor may be a charge coupled device (CCD) image sensor or a complementary metal oxide semiconductor (CMOS) image sensor.

The pixel array 1100 includes pixels arranged two-dimensionally along a plurality of rows and columns. The row decoder 1020 selects one row of the pixel array 1100 in response to a row address signal output from the timing controller 1010 . The output circuit 1030 outputs light-sensing signals in units of columns from a plurality of pixels arranged along the selected row. To this end, the output circuit 1030 may include a column decoder and an analog to digital converter (ADC). For example, the output circuit 1030 may include a plurality of ADCs respectively disposed for each column between the column decoder and the pixel array 1100 or one ADC disposed at an output terminal of the column decoder. The timing controller 1010, the row decoder 1020, and the output circuit 1030 may be implemented as one chip or separate chips. A processor for processing the video signal output through the output circuit 1030 may be implemented as a single chip together with the timing controller 1010 , the row decoder 1020 , and the output circuit 1030 .

The pixel array 1100 may include a plurality of pixels that sense light of different wavelengths. The arrangement of pixels may be implemented in various ways. For example, FIGS. 2A to 2C show various pixel arrangements of the pixel array 1100 of the image sensor 1000 .

First, FIG. 2A shows a Bayer pattern generally adopted in the image sensor 1000 . Referring to FIG. 2A , one unit pixel group includes four quadrant regions, and the first to fourth quadrants include a blue pixel (B), a green pixel (G), a red pixel (R), It may be a green pixel (G). These unit pixel groups are two-dimensionally repeatedly arranged along the first direction (X direction) and the second direction (Y direction). In other words, within the unit pixel group in the form of a 2×2 array, two green pixels (G) are disposed in one diagonal direction, and one blue pixel (B) and one red pixel (R) are disposed in the other diagonal direction, respectively. ) is placed. Looking at the overall pixel arrangement, a first row in which a plurality of green pixels (G) and a plurality of blue pixels (B) are alternately arranged along a first direction, a plurality of red pixels (R) and a plurality of green pixels (G) Second rows alternately arranged along the first direction are repeatedly arranged along the second direction.

As the arrangement method of the pixel array 1100, various arrangement methods other than Bayer are possible. For example, referring to FIG. 2B , a magenta pixel (M), a cyan pixel (C), a yellow pixel (Y), and a green pixel (G) constitute one unit pixel group. It is also possible to arrange the CYGM scheme constituting . Also, referring to FIG. 2C , an RGBW type arrangement in which a green pixel (G), a red pixel (R), a blue pixel (B), and a white pixel (W) constitute one unit pixel group is also possible. Also, although not shown, a unit pixel group may have a 3×2 array shape. In addition, pixels of the pixel array 1100 may be arranged in various ways according to color characteristics of the image sensor 1000 . Below, an example in which the pixel array 1100 of the image sensor 1000 has Bayer is described, but the operating principle can be applied to other types of pixel arrays other than Bayer.

The pixel array 1100 of the image sensor 1000 may include a color separation lens array condensing light of a color corresponding to a specific pixel. 3A and 3B are conceptual views showing the structure and operation of a color separation lens array.

Referring to FIG. 3A , a color separating lens array (CSLA) may include a plurality of nanoposts (NP) that differently change the phase of incident light Li according to an incident position. The color separation lens array (CSLA) can be partitioned in various ways. For example, a first pixel correspondence region R1 corresponding to the first pixel PX1 on which the first wavelength light L _λ1 included in the incident light Li is condensed, and a second pixel corresponding region R1 included in the incident light Li It may be partitioned into a second pixel correspondence region R2 corresponding to the second pixel PX2 on which the wavelength light L _λ2 is condensed. Each of the first and second pixel correspondence regions R1 and R2 may include one or more nanoposts NP and may be disposed to face the first and second pixels PX1 and PX2 , respectively. As another example, the color separation lens array CSLA includes a first wavelength condensing area L1 condensing the first wavelength light L _λ1 to the first pixel PX1 and the second wavelength light L _λ2 to the second pixel PX1. It may be partitioned into a second wavelength condensing region L2 condensing light on (PX2). The first wavelength condensing region L1 and the second wavelength condensing region L2 may partially overlap each other.

The color separation lens array CSLA forms different phase profiles on the first and second wavelength lights L _λ1 and L _λ2 included in the incident light Li, so that the first wavelength light L _λ1 may be focused on the first pixel PX1 , and light of the second wavelength L _λ2 may be focused on the second pixel PX2 .

For example, referring to FIG. 3B , the color separation lens array (CSLA) is positioned immediately after passing through the color separation lens array (CSLA), that is, at a position on the lower surface of the color separation lens array (CSLA), the first wavelength The light L _λ1 has a first phase distribution PP1 and the second wavelength light L _λ2 has a second phase distribution PP2, so that the first and second wavelength lights L _λ1 and L _λ2 are Light may be focused on corresponding first and second pixels PX1 and PX2 , respectively. Specifically, the first wavelength light (L _λ1 ) that has passed through the color separation lens array CSLA is largest at the center of the first pixel correspondence region R1 and moves away from the center of the first pixel correspondence region R1; That is, it may have a first phase distribution PP1 that decreases in the direction of the second pixel correspondence region R2. This phase distribution is similar to the phase distribution of light passing through a convex lens, for example, a micro lens having a convex center disposed in the first wavelength condensing region L1 and converging to a point, and the first wavelength light L _λ1 may be focused on the first pixel PX1. In addition, the second wavelength light L _λ2 passing through the color separation lens array CSLA is largest at the center of the second pixel correspondence region R2 and is in a direction away from the center of the second pixel correspondence region R2, that is, Since the second phase distribution PP2 decreases in the direction of the first pixel correspondence region R1 , the second wavelength light L _λ2 may be focused on the second pixel PX2 .

Since the refractive index of a material is different depending on the wavelength of the reacting light, the color separation lens array (CSLA) provides different phase distributions for the first and second wavelength lights L _λ1 and L _λ2 , as shown in FIG. 3B. can do. In other words, since the refractive index is different depending on the wavelength of light reacting with the material and the phase delay experienced by light when passing through the material is also different for each wavelength, different phase distributions can be formed for each wavelength. For example, the refractive index of the first pixel correspondence region R1 for the first wavelength light L _λ1 may be different from the refractive index of the first pixel correspondence region R1 for the second wavelength light L _λ2 . , The phase delay experienced by the first wavelength light L _λ1 passing through the first pixel corresponding region R1 and the phase delay experienced by the second wavelength light L _λ2 passing through the first pixel corresponding region R1 are different. Therefore, if the color separation lens array CSLA is designed in consideration of the characteristics of light, different phase distributions may be provided for the first and second wavelength lights L _λ1 and L _λ2 .

The color separation lens array CSLA includes nanoposts NPs arranged in a specific regularity so that first and second wavelength lights L _λ1 and L _λ2 have first and second phase distributions PP1 and PP2, respectively. can include Here, the rule is applied to parameters such as the shape, size (width, height), spacing, and arrangement of the nanoposts (NP), and these parameters are the phases to be implemented through the color separation lens array (CSLA). It can be determined according to the distribution.

A rule for disposing the nanopost NP in the first pixel correspondence region R1 and a rule for disposing the second pixel correspondence region R2 may be different from each other. In other words, the size, shape, spacing and/or arrangement of the nanoposts NPs provided in the first pixel correspondence region R1 is the size and shape of the nanoposts NPs provided in the second pixel correspondence region R2. , spacing and/or arrangement.

The nanopost NP may have a cross-sectional diameter of a sub-wavelength. Here, the sub-wavelength means a wavelength smaller than the wavelength band of light to be branched. The nanopost NP may have, for example, a dimension smaller than a shorter wavelength among the first and second wavelengths. When the incident light Li is visible light, the diameter of the cross section of the nanopost NP may be smaller than 400 nm, 300 nm, or 200 nm, for example. Meanwhile, the height of the nanopost NP may be 500 nm to 1500 nm, and the height may be greater than the diameter of the cross section. Although not shown, the nanopost NP may be a combination of two or more posts stacked in a third direction, that is, a height direction (Z direction).

The nanopost NP may be made of a material having a higher refractive index than surrounding materials. For example, nanoposts (NPs) include c-Si, p-Si, a-Si, and III-V compound semiconductors (GaP, GaN, GaAs, etc.), SiC, TiO ₂ , SiN, and/or combinations thereof. can do. The nanoposts NP having a refractive index difference from surrounding materials may change the phase of light passing through the nanoposts NP. This is due to phase delay caused by the shape dimension of the sub-wavelength of the nanopost (NP), and the degree of phase delay is determined by the detailed shape dimension, arrangement type, etc. of the nanopost (NP). A material surrounding the nanopost NP may be made of a dielectric material having a lower refractive index than the nanopost NP. For example, the surrounding material may include SiO ₂ or air.

The first wavelength λ1 and the second wavelength λ2 may be in infrared and visible ray wavelength bands, but are not limited thereto and may operate at various wavelengths according to an array rule of a plurality of nanoposts NPs. In addition, although it is illustrated that two wavelengths are diverged and condensed, incident light may be diverged and condensed in three or more directions depending on the wavelength.

In addition, although the case where the color separation lens array CSLA is one layer has been described as an example, the color separation lens array CSLA may have a structure in which a plurality of layers are stacked.

Hereinafter, an example in which the aforementioned color separation lens array (CSLA) is applied to the pixel array 1100 of the image sensor 1000 will be described in detail.

4A and 4B are schematic cross-sectional views seen from different cross sections of the pixel array 1100 of the image sensor 1000 according to an exemplary embodiment, and FIG. 5A is a cross-sectional view of pixels in the pixel array 1100 of the image sensor 1000. FIG. 5B is a plan view schematically showing the arrangement, and FIG. 5B is a plan view showing an exemplary arrangement of a plurality of nanoposts in a plurality of regions of a color separation lens array in the pixel array 1100 of the image sensor 1000.

4A and 4B, the pixel array 1100 of the image sensor 1000 includes a sensor substrate 110 including a plurality of pixels 111, 112, 113, and 114 for sensing light, and a sensor substrate 110 ), a transparent spacer layer 120 disposed on the spacer layer 120, and a color separation lens array 130 disposed on the spacer layer 120. The sensor substrate 110 may include a first pixel 111 , a second pixel 112 , a third pixel 113 , and a fourth pixel 114 that convert light into electrical signals. As shown in FIG. 4A , the first pixels 111 and the second pixels 112 may be alternately arranged along the first direction (X direction). In the cross section where the positions of the first pixel 111 and the second pixel 112 in the Y direction are different, as shown in FIG. 4B , the third pixel 113 and the fourth pixel 114 may be alternately arranged. . Although not shown, a pixel separator for separating pixels may be further formed at the boundary between the pixels.

FIG. 5A shows an arrangement of pixels when the pixel array 1100 of the image sensor 1000 has a Bayer pattern arrangement as shown in FIG. 2 . This arrangement is for sensing incident light by dividing it into unit pixel groups such as a Bayer pattern. Referring to FIG. 5A , the sensor substrate 110 may include a plurality of unit pixel groups that are two-dimensionally arranged. Each of the plurality of unit pixel groups may include a first pixel 111 , a second pixel 112 , a third pixel 113 , and a fourth pixel 114 . For example, the first pixel 111 and the fourth pixel 114 are green pixels for sensing green light, the second pixel 112 is a blue pixel for sensing blue light, and the third pixel 113 is for sensing red light. It may be a red pixel. In the unit pixel group in the form of a 2×2 array, a first pixel 111 and a fourth pixel 114, which are green pixels, are disposed in one diagonal direction, and a second pixel 111, which is a blue pixel and a red pixel, respectively, in the other diagonal direction. A pixel 112 and a third pixel 113 may be disposed.

Also, the pixel array 1100 of the image sensor 1000 may further include a color filter array 140 disposed between the sensor substrate 110 and the spacer layer 120 . In this case, the color filter array 140 may be disposed on the sensor substrate 110 and the spacer layer 120 may be disposed on the color filter array 140 . The color filter array 140 includes a first color filter 141 disposed on the first pixel 111, a second color filter 142 disposed on the second pixel 112, and a third color filter 113 disposed on the A third color filter 143 and a fourth color filter 144 disposed on the fourth pixel 114 may be included. For example, the first color filter 141 and the fourth color filter 144 are green color filters that transmit only green light, the second color filter 142 is a blue color filter that transmits only blue light, and the third color filter 143 ) may be a red color filter that transmits only red light. Since the light that has already been color-separated to a considerable extent by the color separation lens array 130 travels toward the first to fourth pixels 111, 112, 113, and 114, even if the color filter array 140 is used, light loss is can write Color purity of the image sensor 1000 can be further improved by using the color filter array 140 . However, the color filter array 140 is not an essential component, and if the color separation efficiency of the color separation lens array 130 is sufficiently high, the color filter array 140 may be omitted.

The spacer layer 120 is disposed between the sensor substrate 110 and the color separation lens array 130 to maintain a constant distance between the sensor substrate 110 and the color separation lens array 130 . The spacer layer 120 has a lower absorption rate in the visible light band while having a lower refractive index than nanoposts (NP), such as materials transparent to visible light, such as SiO ₂ and siloxane-based spin on glass (SOG). It may be made of a dielectric material. The thickness 120h of the spacer layer 120 may be determined based on the focal length of light condensed by the color separation lens array 130, for example, about 1/ of the focal length of light of the reference wavelength (λ ₀ ). It can be selected within 2-fold to about 1.5-fold. The focal length (f) of the light of the reference wavelength (λ ₀ ) condensed by the color separation lens array 130 is defined as the refractive index of the spacer layer 120 for the reference wavelength (λ ₀ ) and the pixel pitch as p. When, it can be expressed by the following [Equation 1].

Assuming that the reference wavelength (λ ₀ ) is 540 nm, which is green light, the pitch of the pixels 111, 112, 113, and 114 is 0.8 μm, and the refractive index (n) of the spacer layer 120 is 1.46 at a wavelength of 540 nm, green light The focal length f of , that is, the distance between the lower surface of the color separation lens array 130 and the point where the green light converges may be about 1.64 μm, and the thickness 120h of the spacer layer 120 may be about 0.82 μm to about 0.82 μm. It can be selected within about 2.46 μm.

The color separation lens array 130 is supported by the spacer layer 120, and includes nanoposts NPs that change the phase of incident light and is disposed between the nanoposts NPs and has a lower refractive index than the nanoposts NPs. dielectric, such as air or SiO ₂ .

Referring to FIG. 5B , the color separation lens array 130 may be partitioned into four pixel correspondence regions 131, 132, 133, and 134 corresponding to the pixels 111, 112, 113, and 114 of FIG. 5A. . For example, the first pixel correspondence region 131 corresponds to the first pixel 111 and may be disposed above the first pixel 111 in a vertical direction, and the second pixel correspondence region 132 corresponds to the second pixel 112 ) and may be disposed above the second pixel 112 in the vertical direction, and the third pixel corresponding region 133 corresponds to the third pixel 113 and is disposed above the third pixel 113 in the vertical direction. The fourth pixel correspondence region 134 may correspond to the fourth pixel 114 and may be disposed above the fourth pixel 114 in a vertical direction. That is, the first to fourth pixel corresponding regions 131 , 132 , 133 , and 134 of the color separation lens array 130 correspond to the corresponding first to fourth pixels 111 , 112 , 113 , and 114 of the sensor substrate 110 . ) and may be disposed facing in the vertical direction.

The first to fourth pixel correspondence regions 131 , 132 , 133 , and 134 include a first row and a third pixel correspondence region 133 in which the first pixel correspondence region 131 and the second pixel correspondence region 132 are alternately arranged. ) and the fourth pixel correspondence region 134 may be alternately arranged in a two-dimensional arrangement along the first direction (X direction) and the second direction (Y direction) so that the second rows are alternately repeated. In addition, the first pixel correspondence region 131 and the fourth pixel correspondence region 134 are disposed adjacent to each other in a first diagonal direction, and the second pixel correspondence region 132 and the third pixel correspondence region 133 are disposed adjacent to each other in a first diagonal direction. They may be disposed adjacent to each other in a second diagonal direction crossing the first diagonal direction. The color separation lens array 130 also includes a plurality of unit pixel groups arranged two-dimensionally like the pixel array of the sensor substrate 110, and each unit pixel group is arranged in a 2×2 shape. , 132, 133, 134).

Meanwhile, the color separation lens array 130 may be divided into a green light condensing area condensing green light, a blue light condensing area condensing blue light, and a red light condensing area condensing red light, similarly to that described in FIG. 3B.

In the first to fourth pixel corresponding regions 131, 132, 133, and 134 of the color separation lens array 130, green light is diverged to the first and fourth pixels 111 and 114 and focused, and the second pixel ( 112), the blue light is diverted and collected, and the size, shape, spacing, and/or arrangement of the nanoposts (NPs) are determined such that the red light is diverged and collected to the third pixel 113. Meanwhile, the thickness of the color separation lens array 130 along the third direction (Z direction) may be similar to the height of the nanopost NP and may be 500 nm to 1500 nm.

Referring to FIG. 5B , the first to fourth pixel-corresponding regions 131, 132, 133, and 134 may include cylindrical nano-posts (NPs) having circular cross-sections, and cross-sectional areas at the center of each region are different from each other. Other nanoposts NPs may be disposed, and nanoposts NPs may also be disposed at the center of the boundary between pixels and the intersection of the pixel boundary.

The arrangement of the nanoposts (NP) may be various arrangements other than the arrangement shown in FIG. 5B. For example, FIGS. 5C to 5D show different arrangements of nanoposts (NPs) in the first to fourth pixel corresponding regions 131 , 132 , 133 , and 134 of the color separation lens array 130 . The arrangement principle of the nanoposts (NPs) described above may also be applied to the first to fourth pixel corresponding regions 131, 132, 133, and 134 of the color separation lens array 130 shown in FIGS. 5C to 5D.

Although all of the nanoposts NPs of FIGS. 5B to 5D are illustrated as having a symmetrical circular cross-sectional shape, some nanoposts having an asymmetrical cross-sectional shape may also be included. For example, nanoposts having an asymmetric cross-sectional shape having different widths in the first direction (X direction) and in the second direction (Y direction) are employed in the first and fourth pixel correspondence regions 131 and 134, and Nanoposts having symmetrical cross-sectional shapes having the same width in the first direction (X direction) and in the second direction (Y direction) may be employed in the second and third pixel correspondence regions 132 and 133 . The arrangement rule of the illustrated nanoposts (NP) is an example, and is not limited to the illustrated pattern.

The color separation lens array 130 shown in FIGS. 5B to 5D is exemplary, and the size and thickness of the color separation lens array, color characteristics of an image sensor to which the color separation lens array is to be applied, pixel pitch, color separation lens array and image Depending on the distance between the sensors, the incident angle of incident light, etc., various types of color separation lens arrays may be obtained through the above optimization design. In addition, a color separation lens array may be implemented with various other patterns instead of nanoposts. For example, FIG. 5E is a plan view illustrating a shape of a corresponding group of pixels of a color separation lens array according to another embodiment applicable to a Bayer pattern type image sensor, and FIG. 5F is a plan view illustrating a color separation lens array according to another embodiment. It is a plan view illustratively showing the shape of the pixel corresponding group of the separation lens array.

Each of the first to fourth pixel corresponding regions 131a, 132a, 133a, and 134a of the color separation lens array 130a shown in FIG. 5E is optimized in a digitized binary form in a 16×16 rectangular arrangement, and FIG. The pixel correspondence group has a shape consisting of a 32×32 rectangular arrangement. Alternatively, each of the first to fourth pixel corresponding regions 131b, 132b, 133b, and 134b of the color separation lens array 130b shown in FIG. 5F may be optimized in a non-digitized continuous curve shape.

FIG. 6A shows the phase distribution of green light and blue light passing through the color separation lens array 130 along the line Ⅰ-I' in FIG. 5B, and FIG. 6C shows the phase at the center of the pixel corresponding regions 131, 132, 133, and 134 of the blue light passing through the color separation lens array 130. see. In FIG. 6A , the color filter array 140 is omitted for convenience. The phase distribution of the green light and the blue light of FIG. 6A is similar to the phase distribution of the first and second wavelength lights exemplarily described in FIG. 3B.

Referring to FIGS. 6A and 6B , the green light passing through the color separation lens array 130 is greatest at the center of the first pixel correspondence region 131 and decreases in a direction away from the center of the first pixel correspondence region 131 . may have a first green light phase distribution PPG1. Specifically, the phase of the green light at the position right after passing through the color separation lens array 130, that is, the lower surface of the color separation lens array 130 or the upper surface of the spacer layer 120, is the first pixel corresponding region ( 131), and gradually decreases in a concentric circle shape as the distance from the center of the first pixel correspondence region 131 increases, and the second and third pixel correspondence regions 132 and 133 in the X and Y directions respectively. It is minimum at the center and minimum at the junction between the first pixel correspondence region 131 and the fourth pixel correspondence region 134 in the diagonal direction.

If the phase of the green light is determined to be 2π based on the phase of the light emitted from the center of the first pixel correspondence region 131, the phase is 0.9π to 1.1π at the center of the second and third pixel correspondence regions 132 and 133. Green light having a phase of 2π at the center of the 4-pixel correspondence region 134 and a phase of 1.1π to 1.5π at the junction between the first pixel correspondence region 131 and the fourth pixel correspondence region 134 may be emitted. Accordingly, a phase difference between green light passing through the center of the first pixel correspondence region 131 and green light passing through the center of the second and third pixel correspondence regions 132 and 133 may be 0.9π to 1.1π.

Meanwhile, the first green light phase distribution PPG1 does not mean that the phase delay amount of light passing through the center of the first pixel correspondence area 131 is the greatest, and the phase of light passing through the first pixel correspondence area 131 is 2π. If it is determined that the phase delay of light passing through other positions is larger and has a phase value greater than 2π, it may be a value remaining after removing 2nπ, that is, a wrapped phase distribution. For example, when the phase of light passing through the first pixel correspondence region 131 is 2π, if the phase of light passing through the center of the second pixel correspondence region 132 is 3π, the second pixel correspondence region 132 The phase at may be π remaining after removing 2π (when n = 1) from 3π.

Referring to FIGS. 6A and 6C , blue light passing through the color separation lens array 130 is greatest at the center of the second pixel correspondence area 132 and decreases in a direction away from the center of the second pixel correspondence area 132 . It may have a blue light phase distribution (PPB) that Specifically, the phase of the blue light at a position immediately after passing through the color separation lens array 130 is greatest at the center of the second pixel correspondence region 132 and is farther away from the center of the second pixel correspondence region 132. It gradually decreases in the form of concentric circles, becomes minimum at the center of the first and fourth pixel correspondence regions 131 and 134 in the X and Y directions, and becomes minimum at the center of the third pixel correspondence region 133 in the diagonal direction. becomes If the phase of the blue light at the center of the second pixel correspondence region 132 is 2π, the phases of the first and fourth pixel correspondence regions 131 and 134 may be, for example, 0.9π to 1.1π. , The phase at the center of the third pixel correspondence region 133 may be a smaller value than the phase at the center of the first and fourth pixel correspondence regions 131 and 134, for example, 0.5π to 0.9π.

FIG. 6D exemplarily shows a traveling direction of green light incident to the first condensing area, and FIG. 6E exemplarily shows an array of the first condensing area.

The green light incident around the first pixel correspondence region 131 is focused on the first pixel 111 by the color separation lens array 130 as shown in FIG. 6D, and the first pixel 111 has the first In addition to the pixel correspondence region 131 , green light from the second and third pixel correspondence regions 132 and 133 is incident. That is, the phase distribution of the green light described in FIGS. 6A and 6B is the distribution of the first pixel correspondence region 131 and two second pixel correspondence regions 132 and two third pixel correspondence regions 133 adjacent to each other. The green light passing through the first green light concentrating area GL1 connected at the center is focused on the first pixel 111 . Accordingly, as shown in FIG. 6E , the color separation lens array 130 may operate as a first green light condensing area GL1 array condensing green light into the first pixel 111 . The area of the first green light condensing region GL1 is larger than that of the corresponding first pixel 111, and may be, for example, 1.2 to 2 times larger.

FIG. 6F exemplarily shows a traveling direction of blue light incident to the blue light condensing area, and FIG. 6G exemplarily shows an array of blue light condensing areas.

Blue light is condensed to the second pixel 112 by the color separation lens array 130 as shown in FIG. do. The phase distribution of the blue light described above with reference to FIGS. 6A and 6C passes through the blue light concentrating area BL formed by connecting the centers of four adjacent third pixel corresponding areas 133 vertices to the second pixel corresponding area 132 . One blue light is focused on the second pixel 112 . Accordingly, as shown in FIG. 6G , the color separation lens array 130 may operate as a blue light condensing area BL array condensing blue light to the second pixel 112 . The area of the blue light collecting area BL is larger than that of the corresponding second pixel 112, and may be, for example, 1.5 to 4 times larger. A portion of the blue light collecting area BL may overlap the first green light collecting area GL1 described above, the second green light collecting area GL2 and the red light collecting area RL, which will be described later.

FIG. 7A shows the phase distribution of green light and blue light passing through the color separation lens array 130 along the line II-II′ of FIG. 5B, and FIG. 7c shows the phase at the center of the pixel corresponding regions 131, 132, 133, and 134 of the green light passing through the color separation lens array 130. see.

Referring to FIGS. 7A and 7B , red light passing through the color separation lens array 130 is greatest at the center of the third pixel correspondence area 133 and decreases in a direction away from the center of the third pixel correspondence area 133 . It may have a red light phase distribution (PPR) that Specifically, the phase of the red light at the position immediately after passing through the color separation lens array 130 is the largest at the center of the third pixel correspondence region 133 and is farther away from the center of the third pixel correspondence region 133. It gradually decreases in the form of concentric circles, becomes minimum at the center of the first and fourth pixel correspondence regions 131 and 134 in the X and Y directions, and becomes minimum at the center of the second pixel correspondence region 132 in the diagonal direction. becomes If the phase of the red light at the center of the third pixel correspondence region 133 is 2π, the phase of the red light at the center of the first and fourth pixel correspondence regions 131 and 134 may be, for example, 0.9π to 1.1π. , the phase at the center of the second pixel correspondence region 132 may be a smaller value than the phase at the center of the first and fourth pixel correspondence regions 131 and 134, for example, 0.6π to 0.9π.

Referring to FIGS. 7A and 7C , the green light passing through the color separation lens array 130 is greatest at the center of the fourth pixel corresponding region 134 and decreases in a direction away from the center of the fourth pixel corresponding region 134 . may have a second green light phase distribution PPG2. Comparing the first green light phase distribution PPG1 of FIG. 6A and the second green light phase distribution PPG2 of FIG. 7A , the second green light phase distribution PPG2 shows the first green light phase distribution PPG1 in the X direction and the Y direction. It is equivalent to a parallel shift by 1 pixel pitch. That is, the first green light phase distribution PPG1 has the largest phase at the center of the first pixel correspondence region 131, while the second green light phase distribution PPG2 has the highest phase at the center of the first pixel correspondence region 131 in the X direction. and the largest phase at the center of the fourth pixel correspondence region 134 separated by 1 pixel pitch in the Y direction. Phase distributions of FIGS. 6B and 7C showing phases at the centers of the pixel correspondence regions 131, 132, 133, and 134 may be the same. Once again, the phase distribution of green light based on the fourth pixel corresponding region 134 is described. If the phase of light emitted from the center of the fourth pixel corresponding region 134 of green light is set to 2π as a reference, the second and third At the center of the pixel correspondence regions 132 and 133, the phase is 0.9π to 1.1π, at the center of the first pixel correspondence region 131, the phase is 2π, and between the first pixel correspondence region 131 and the fourth pixel correspondence region 134. Light having a phase of 1.1π to 1.5π may be emitted from the contact point.

FIG. 7D exemplarily shows a traveling direction of red light incident to the red light condensing area, and FIG. 7E exemplarily shows an array of red light condensing areas.

Red light is condensed into the third pixel 113 by the color separation lens array 130 as shown in FIG. do. The phase distribution of the red light described above with reference to FIGS. 7A and 7B passes through the red light concentrating region RL formed by connecting the centers of four adjacent second pixel corresponding regions 132 vertices to the third pixel corresponding region 133. One red light is focused on the third pixel 113 . Accordingly, as shown in FIG. 7E , the color separation lens array 130 may operate as a red light condensing area RL array condensing red light to the third pixel 113 . The area of the red light collecting region RL is larger than that of the corresponding third pixel 113, and may be, for example, 1.5 to 4 times larger. A portion of the red light collecting area RL may overlap the first and second green light collecting areas GL1 and GL2 and the blue light collecting area BL.

Referring to FIGS. 7F and 7G , the green light incident around the fourth pixel correspondence area 134 proceeds in a similar manner to the green light incident around the first pixel correspondence area 131, as shown in FIG. 7F. As such, light is focused on the second pixel 114 . Accordingly, as shown in FIG. 7G , the color separation lens array 130 may operate as a second green light condensing area GL2 array condensing green light to the fourth pixel 114 . The area of the second green light condensing region GL2 is larger than that of the corresponding fourth pixel 114, and may be, for example, 1.2 to 2 times larger.

The color separation lens array 130 satisfying the above-described phase distribution and performance can be designed automatically through various computer simulation methods. For example, using nature-inspired algorithms such as genetic algorithms, particle swarm optimization algorithms, ant colony optimization, etc. or adjoint optimization ) algorithm, the structures of the pixel correspondence regions 131, 132, 133, and 134 may be optimized.

For the design of the color separation lens array 130, while evaluating the performance of a plurality of candidate color separation lens arrays with evaluation factors such as color separation spectrum, light efficiency, signal-to-noise ratio, etc. structure can be optimized. For example, after determining target numerical values for each evaluation element in advance, the structure of green, blue, red, and infrared pixel correspondence areas is minimized by minimizing the sum of differences from the target numerical values for a plurality of evaluation elements. can be optimized. Alternatively, performance may be indexed for each evaluation factor, and structures of green, blue, red, and infrared pixel correspondence regions may be optimized so that a value representing performance is maximized.

Meanwhile, an incident angle of light incident on the image sensor 1000 is generally defined as a chief ray angle (CRA). A chief ray means a ray incident on the image sensor 1000 from a point of a subject passing through the center of an objective lens. The chief ray angle means an angle between the chief ray and the optical axis of the objective lens, and is generally the same as the incident angle of the chief ray incident on the image sensor 1000 . For example, a chief ray of light departing from a point on the optical axis of the objective lens is perpendicularly incident to the center of the image sensor 1000, and in this case, the chief ray angle is 0 degrees. As the starting point is further away from the optical axis of the objective lens, the angle of the chief ray increases and is incident on the edge of the image sensor 1000 . From the point of view of the image sensor 1000, the chief ray angle of light incident on the center of the image sensor 1000 is 0 degrees, and the chief ray angle of incident light increases toward the edge of the image sensor 1000.

However, the above-described color separation lens array 130 may generally have directionality with respect to incident light. In other words, the color separation lens array 130 operates efficiently for light incident within a specific angular range, but the color separation performance of the color separation lens array 130 deteriorates when the incident angle becomes farther from the specific angular range. Therefore, if all nanoposts (NPs) of the color separation lens array 130 have the same arrangement in the entire area of the image sensor 1000, the color separation efficiency is not uniform in the entire area of the image sensor 1000 and the image sensor Color separation efficiency may vary depending on the area of (1000). As a result, the quality of an image provided by the image sensor 1000 may deteriorate. Accordingly, the arrangement form of the nanoposts NPs of the color separation lens array 130 may be differently designed in consideration of the chief ray angle of the incident light, which varies depending on the position on the image sensor 1000 .

8A to 8C are plan views exemplarily showing changes in the arrangement shape of the nanoposts (NPs) of the color separation lens array 130 in consideration of the change in chief ray angle according to the position on the image sensor 1000. In particular, FIG. 8A shows the position of the nanopost NP disposed in the center of the image sensor 1000, and FIG. 8B shows the position of the nanopost NP disposed between the center and the edge of the image sensor 1000. , FIG. 8C shows the position of the nanoposts NP disposed on the edge of the image sensor 1000. 8A to 8C are not intended to limit a specific arrangement of the nanoposts NPs, but are merely intended to conceptually describe a relative positional change of the nanoposts NPs according to positions on the image sensor 1000.

As shown in FIGS. 8A to 8C , from the center to the edge of the image sensor 1000, a first pixel correspondence area, a second pixel correspondence area, a third pixel correspondence area, and a The 4-pixel correspondence area may be shifted farther from the corresponding pixels. For example, the first to fourth pixel corresponding regions 131 and 132 of the color separation lens array 130 are located in the center of the image sensor 1000, the center of the color separation lens array 130, or the center of the sensor substrate 110. , 133, and 134 may coincide with positions of the first to fourth pixels 111, 112, 113, and 114 corresponding thereto. Further, first to fourth pixel corresponding regions of the color separation lens array 130 ( 131 , 132 , 133 , and 134 may be further shifted from positions of the first to fourth pixels 111 , 112 , 113 , and 114 respectively corresponding thereto. The degree to which the first to fourth pixel corresponding regions 131 , 132 , 133 , and 134 of the color separation lens array 130 are shifted may be determined by a chief ray angle of light incident on the color separation lens array 130 . In particular, the first to fourth pixel corresponding regions 131 and 132 of the color separation lens array 130 are located at the periphery of the image sensor 1000, the periphery of the color separation lens array 130, or the periphery of the sensor substrate 110. , 133, and 134 are shifted toward the center of the image sensor 1000 with respect to the first to fourth pixels 111, 112, 113, and 114 corresponding thereto, respectively.

Hereinafter, the center of the image sensor 1000 is referred to as the center of the image sensor 1000 for convenience, but since the image sensor 1000, the color separation lens array 130, and the sensor substrate 110 are disposed facing each other, the center of the image sensor 1000 is It may also mean the center of the color separation lens array 130 or the center of the sensor substrate 110 . Similarly, hereinafter, the periphery/edge of the image sensor 1000 may mean the periphery/edge of the color separation lens array 130 or the periphery/edge of the sensor substrate 110 .

9 is a cross-sectional view showing a schematic structure of a pixel array of an image sensor 1000 according to another exemplary embodiment. Referring to FIG. 9 , the pixel array 1100a may include a color separation lens array 130 having nanoposts (NPs) stacked in two stages. The nanoposts NP may include first-stage nanoposts NP1 disposed on the spacer layer 120 and second-stage nanoposts NP2 disposed on the first-stage nanoposts NP1 . The second-stage nanoposts NP2 may be shifted along the light gradient direction with respect to the first-stage nanoposts NP1. For example, when light incident on the color separation lens array 130 is inclined from right to left, the second-stage nanoposts NP2 may be shifted to the right relative to the first-stage nanoposts NP1. . Conversely, when light incident on the color separation lens array 130 is inclined from left to right, the second-stage nanoposts NP2 may shift to the left relative to the first-stage nanoposts NP1. In other words, the second-stage nanopost NP2 may be shifted toward the center of the image sensor 1000 relative to the first-stage nanopost NP1 . From the center of the image sensor 1000 to the left edge, the second-stage nanoposts NP2 shift more to the right with respect to the first-stage nanoposts NP1, and from the center to the right edge of the image sensor 1000, the second-stage nanoposts NP2 shift further to the right. The second stage nanopost NP2 is further shifted to the left relative to the first stage nanopost NP1. Therefore, the shift distance of the second-stage nanopost NP2 is greater than the shift distance of the corresponding first-stage nanopost NP1.

Similarly, the third pixel corresponding region 133 and the fourth pixel corresponding region 134 of the color separation lens array 130 correspond to the image sensor ( 1000) may be shifted toward the center. For example, from the center to the left edge of the image sensor 1000, the third pixel corresponding region 133 and the fourth pixel corresponding region 134 of the color separation lens array 130 are respectively corresponding to the third pixel ( 113) and further shifted to the right for the fourth pixel 114. Although not shown, the first pixel corresponding area and the second pixel corresponding area disposed on different cross sections of the color separation lens array 130 also correspond to the center of the image sensor 1000 with respect to the corresponding first and second pixels. shifted towards the direction

In particular, the third pixel corresponding region 133 and the fourth pixel corresponding region 134 of the color separation lens array 130 emit red light at the center of the corresponding third pixel 113 and fourth pixel 114, respectively. and can be shifted to collect green light. The distance s by which the third pixel corresponding region 133 and the fourth pixel corresponding region 134 of the color separation lens array 130 are shifted may be determined by, for example, Equation 2 below.

In Equation 2, d is the shortest straight line distance or interval between the lower surface of the color separation lens array 130 and the upper surface of the sensor substrate 110, and CRA' is the incident angle of light incident on the sensor substrate 110. In addition, CRA' may be determined by Equation 3 below.

In Equation 3, CRA is an incident angle of light incident on the color separation lens array 130, that is, a chief ray angle, and n is a refractive index of a material disposed between the color separation lens array 130 and the sensor substrate 110. Therefore, the distance s at which the third pixel corresponding region 233 and the fourth pixel corresponding region 134 of the color separation lens array 130 are shifted from the corresponding pixel is the amount of light incident on the color separation lens array 130 It can be determined by the chief ray angle and the refractive index of the material disposed between the color separation lens array 130 and the sensor substrate 110 .

In addition, the third color filter 143 and the fourth color filter 144 of the color filter array 140 also correspond to the third pixel corresponding region 233 and the fourth pixel corresponding region 134 of the color separation lens array 130. can be shifted in the same way as For example, the third color filter 143 and the fourth color filter 144 of the color filter array 140 correspond to the image sensor 1000 for the third pixel 113 and the fourth pixel 114 respectively. ) can be shifted towards the center of The distance by which the third color filter 143 and the fourth color filter 144 of the color filter array 140 are shifted is the distance between the third pixel correspondence region 233 and the fourth pixel of the color separation lens array 130 corresponding to the shift distance. It may be less than the distance that the correspondence area 134 is shifted. Although not shown, the first color filter and the second color filter disposed on different end surfaces of the color filter array 140 are also directed toward the center of the image sensor 1000 with respect to the corresponding first and second pixels. shifted

FIG. 10 is a plan view exemplarily showing a shift shape of two-dimensionally arrayed nanoposts in consideration of a change in chief ray angle in the color separation lens array 130. Referring to FIG. Referring to FIG. 10 , a plurality of pixel correspondence groups include a center group disposed at the center of the image sensor 1000 or the color separation lens array 130 and a center group outside the center of the image sensor 1000 or the color separation lens array 130. or a plurality of periphery groups arranged in a periphery outside the center. In the center of the image sensor 1000 , first to fourth pixel corresponding regions of the center group of the color separation lens array 130 are not shifted with respect to corresponding pixels. Also, in the center of the image sensor 1000, the second-stage nanoposts NP2 are not shifted relative to the first-stage nanoposts NP1. In addition, the first to fourth pixel corresponding regions of the plurality of peripheral groups of the color separation lens array 130 at the periphery of the image sensor 1000 are shifted toward the center of the image sensor 1000, and the second stage nanopost (NP2) is also shifted toward the center of the image sensor 1000 with respect to the first stage nanopost (NP1). Accordingly, the entire area of the color separation lens array 130 may be smaller than the entire area of the pixel array 1100a of the image sensor 1000 or the entire area of the sensor substrate 110 .

11A and 11B are plan views illustrating a change in width of a nanopost according to a position on an image sensor 1000 according to another embodiment. FIG. 11A shows the width of the nanoposts NP of the color separation lens array 130 at the center of the image sensor 1000, and FIG. The width of the post NP' is shown as an example. In the embodiment shown in FIG. 11B, the position of the nanopost NP' is shifted with respect to the corresponding pixel, and the second-stage nanopost NP2' is moved to the corresponding first-stage nanopost NP1'. The width of the nanoposts (NP') was changed with further shifting of the . As shown in FIG. 11B , the width of the nanopost NP′ may increase toward the periphery of the image sensor 1000 . In other words, the width of the nanoposts NP' at the periphery of the image sensor 1000 may be greater than the width of the nanoposts NP at the center of the image sensor 1000 . For example, the width of the nanoposts NP' at the edge of the image sensor 1000 may be about 5% to about 15% greater than the width of the nanoposts NP at the center of the image sensor 1000. there is.

Here, the change in width is the number of nanoposts disposed at the same position in the same region among the plurality of first pixel corresponding regions, second pixel corresponding region, third pixel corresponding region, and fourth pixel corresponding region of the color separation lens array 130. width is compared. For example, the width of the nanopost disposed in the center of the first pixel corresponding region of the color separation lens array 130 in the center of the image sensor 1000 and the color separation lens array 130 in the periphery of the image sensor 1000 It is possible to compare the widths of the nanoposts disposed in the center of the first pixel corresponding region of . Nanoposts disposed in different pixel-corresponding regions of the color separation lens array 130 or nanoposts disposed at different positions within the same pixel-corresponding region are not subject to comparison in width.

As described above, in consideration of light obliquely incident on the periphery of the image sensor 1000, the plurality of color separation lens arrays 130 are formed at the periphery of the image sensor 1000 or the periphery of the color separation lens array 130. Light use efficiency in the periphery of the image sensor 1000 may be improved by shifting the pixel correspondence regions, shifting the nanoposts of the two-stage structure relative to each other, or changing the width of the nanoposts. In addition, uniform color characteristics may be secured in the center and the periphery of the image sensor 1000 .

Meanwhile, light utilization efficiency and color characteristics of the image sensor 1000 may vary not only according to the angle of the chief ray of incident light but also according to the position in the azimuthal direction. 12 is a plan view defining an azimuthal direction of pixels or nanoposts in the image sensor 1000 or the color separation lens array 130 . Referring to FIG. 12 , the azimuth direction of the pixel or nanopost is from the reference line on the surface of the image sensor 1000 or the color separation lens array 130 to the surface of the image sensor 1000 or the color separation lens array 130. It will be defined as a direction that rotates counterclockwise. The reference line is a line in a first direction (X direction) passing through the center of the image sensor 1000 or the color separation lens array 130 . In addition, the azimuth angle φ of the pixel or nanopost is defined as an angle in a counterclockwise direction from the reference line. For example, the azimuth angle of any one point (eg, point B1 in FIG. 12 ) of the periphery of the image sensor 1000 is the azimuth of the point (eg, B1) of the periphery from the center (eg, origin) of the image sensor 1000 . is the angle in the counterclockwise direction between the line segment extending toward and the reference line (eg, the x-axis).

Also, referring to FIG. 12 , when the chief ray angles of the incident light incident on the pixels of the periphery are the same, that is, the pixels of the periphery are disposed at the same distance from the center of the image sensor 1000 or the color separation lens array 130. In this case, the arrangement of neighboring pixels is changed according to the azimuthal angles of the pixels. For example, when viewed from the point of view of light traveling along the first direction (X direction) and incident on point 'A1', a blue pixel B11 and a second green pixel Gr11 are formed on the left and right sides of the light traveling direction, respectively. On the other hand, when viewed from the point of view of the light traveling along the second direction (Y direction) and entering the point 'B1', the second green pixel Gr21 and the red pixel R21 are respectively on the left and right sides in the direction of light propagation. Located. Point 'A1' and point 'B1' have the same chief ray angle, but their azimuth angles differ by 90 degrees. In addition, when viewed from the viewpoint of the light traveling along the first direction (X direction) and incident on the point 'A2', the first green pixel Gb11 and the red pixel R11 are located on the left and right sides of the light traveling direction, respectively. On the other hand, from the point of view of the light traveling along the second direction (Y direction) and incident on the point 'B2', which has the same principal ray angle as the point 'A2' and has a different azimuth angle of 90 degrees, the left and right sides of the light traveling direction are blue, respectively. A pixel B21 and a first green pixel Gb21 are positioned.

Since the blue pixel B and the red pixel R have a four-way symmetric arrangement of neighboring pixels, the effect of the change in azimuth may be relatively small. For example, four sides of the blue pixel B are in contact with the green pixels Gb and Gr, four vertices are in contact with the red pixel R, and four sides of the red pixel R are in contact with the green pixels Gb and Gb. Gr) and four vertexes are in contact with the blue pixel (B). On the other hand, the blue pixel B is in contact with two facing sides of the first and second green pixels Gb and Gr, and the red pixel R is in contact with the other two facing sides. Accordingly, the first and second green pixels Gb and Gr may be relatively affected by a change in azimuth because the arrangement of neighboring pixels is two-way symmetrical.

In view of this, arrangement of nanoposts in the first pixel corresponding region 131 and the fourth pixel corresponding region 134 of the color separation lens array 130 corresponding to the first and second green pixels Gb and Gr Depending on the direction of this azimuth, it may vary slightly. For example, the shapes and widths of the plurality of nanoposts of the plurality of first and fourth pixel corresponding regions 131 and 134 according to positions in the azimuth direction in the periphery surrounding the center of the color separation lens array 130. , at least one of the arrangement types may change.

13A to 13C are plan views exemplarily showing changes in the arrangement shape of the nanoposts of the color separation lens array 130 according to the azimuthal position on the image sensor 1000 according to an embodiment, in FIG. 13A the chief ray angle is 0 In the center of the image sensor 1000 or in the center of the color separation lens array 130, nanoposts of pixel corresponding regions of the center group of the color separation lens array 130 are arranged, and FIG. 13B shows a chief ray angle of 35 degrees. 13c shows the arrangement of nanoposts of the pixel corresponding regions of the first peripheral group of the color separation lens array 130 at a position where the azimuth angle is 0 degrees, and FIG. 13c shows a color separation lens at a position where the chief ray angle is 35 degrees and the azimuth angle is 90 degrees. An array form of nanoposts of pixel corresponding regions of the second peripheral group of the array 130 is shown. Among the plurality of peripheral groups, the first peripheral group in FIG. 13B and the second peripheral group in FIG. 13C may have the same chief ray angle (eg, 35 degrees) and different azimuthal angles (eg, 0 degrees and 90 degrees). In FIGS. 13A to 13C , for convenience, the shift of pixel corresponding regions and the change in width of nanoposts in the periphery of the color separation lens array 130 are not applied, and only the change of some nanoposts according to the azimuthal angle is shown.

In the examples shown in FIGS. 13A to 13C , the first pixel correspondence region 131 includes a plurality of nanoposts disposed at different locations within the first pixel correspondence region 131 . For example, the first pixel correspondence region 131 includes two first nanoposts 131A disposed at a boundary portion adjacent to the second pixel correspondence region 132 in a first direction (X direction) and other positions. It may include a plurality of second nano-posts disposed on. In addition, the fourth pixel correspondence region 134 is disposed at two third nanoposts 134A disposed at a boundary portion adjacent to the third pixel correspondence region 133 in the first direction (X direction) and at other positions. It may include a plurality of fourth nanoposts.

Referring to FIGS. 13A and 13B , the width of the first nanopost 131A among the nanoposts in the first pixel correspondence region 131 may gradually decrease as the chief ray angle increases in a state where the azimuth angle is 0 degrees. When the chief ray angle reaches 35 degrees, the width of the first nanoposts 131A becomes 0, so that the first nanoposts 131A adjacent to the second pixel corresponding region 132 in the first pixel corresponding region 131 disappear. can In other words, the width of the first nanoposts 131A of the first pixel corresponding region 131 gradually decreases from the center of the color separation lens array 130 toward the periphery along the first direction (X direction), and In the first pixel correspondence region 131 at the edge (X direction), the first nanopost 131A does not exist. On the other hand, the width of the third nanopost 134A among the nanoposts in the fourth pixel correspondence region 134 does not change when the azimuth angle is 0 degrees.

Referring to FIGS. 13B and 13C , when the azimuth angle gradually increases in a state where the chief ray angle is 35 degrees, the width of the first nanopost 131A among the nanoposts in the first pixel correspondence region 131 gradually increases, Among the nanoposts in the fourth pixel correspondence region 134, the width of the third nanopost 134A may gradually decrease. Also, when the chief ray angle is 35 degrees and the azimuth angle is 90 degrees, the width of the third nanopost 134A of the fourth pixel correspondence region 134 is 0, and the first nanopost 134A of the first pixel correspondence region 131 is The post 131A may have the same width as the first nanopost 131A of the first pixel corresponding region 131 in the center of the color separation lens array 130 .

In addition, the width of the third nanoposts 134A of the fourth pixel correspondence region 134 gradually decreases from the center of the color separation lens array 130 toward the periphery along the second direction (Y direction), and in the second direction ( Y direction) in the fourth pixel correspondence region 134 at the edge, the third nanopost 134A does not exist. On the other hand, the width of the first nanopost 131A of the first pixel correspondence region 131 does not change when the azimuth angle is 90 degrees. When the azimuth angle gradually decreases in a state where the chief ray angle is 35 degrees, the width of the third nanoposts 134A of the fourth pixel correspondence region 134 gradually increases, and the first nanoposts 131A of the first pixel correspondence region 131 ) may gradually decrease.

Accordingly, the first nanoposts 131A of the first pixel correspondence region 131 located apart from the center of the color separation lens array 130 by a predetermined distance in the first direction (X direction) on the surface of the color separation lens array 130 The width of ) is the first nanopost of the first pixel correspondence region 131 located apart from the center of the color separation lens array 130 by a predetermined distance in the second direction (Y direction) on the surface of the color separation lens array 130 It may be different from the width of (131A). Similarly, the third nanoposts of the fourth pixel correspondence region 134 located apart from the center of the color separation lens array 130 by a predetermined distance in the first direction (X direction) on the surface of the color separation lens array 130 ( 134A) is the third nanoparticle of the fourth pixel correspondence region 134 located apart from the center of the color separation lens array 130 by a predetermined distance in the second direction (Y direction) on the surface of the color separation lens array 130 . It may be different from the width of the post 134A.

In addition, the first nanoposts of the first pixel correspondence region 131 located on the surface of the color separation lens array 130 by a first distance from the center of the color separation lens array 130 in a first direction (X direction) 131A) is a first pixel corresponding region (a distance from the center of the color separation lens array 130 on the surface of the color separation lens array 130 in a first direction (X direction) by a second distance different from the first distance). 131) may be different from the width of the first nanopost 131A. On the other hand, the third nanoposts of the fourth pixel correspondence region 134 located apart from the center of the color separation lens array 130 by a first distance in a first direction (X direction) on the surface of the color separation lens array 130 ( 134A) is the third width of the fourth pixel correspondence region 134 located apart from the center of the color separation lens array 130 by a second distance in the first direction (X direction) on the surface of the color separation lens array 130 . It may be the same as the width of the nanopost (134A).

In addition, the third nanoposts of the fourth pixel correspondence region 134 located apart from the center of the color separation lens array 130 by a first distance in the second direction (Y direction) on the surface of the color separation lens array 130 ( 134A) is the third width of the fourth pixel correspondence region 134 located apart from the center of the color separation lens array 130 by a second distance in a second direction (Y direction) on the surface of the color separation lens array 130 . It may be different from the width of the nanopost (134A). On the other hand, the first nanoposts of the first pixel correspondence region 131 located apart from the center of the color separation lens array 130 by a first distance in the second direction (Y direction) on the surface of the color separation lens array 130 ( 131A) is the first width of the first pixel correspondence region 131 located apart from the center of the color separation lens array 130 by a second distance in the second direction (Y direction) on the surface of the color separation lens array 130 . It may be the same as the width of the nanopost (131A).

In the first pixel correspondence region 131, the widths of the second nanoposts disposed at different positions from the first nanoposts 131A may be constant regardless of the change in the azimuth angle. In addition, the widths of the remaining fourth nanoposts disposed at different positions from the third nanoposts 134A in the fourth pixel correspondence region 134 may be constant regardless of the change in the azimuth angle. In other words, on the surface of the color separation lens array 130, within the first pixel corresponding regions 131 that are the same distance from the center 130 of the color separation lens array 130, except for the first nanoposts 131A. Among the second nanoposts, the widths of the nanoposts corresponding to each other may be the same regardless of the change in azimuth angle, and on the surface of the color separation lens array 130 at the same distance from the center 130 of the color separation lens array 130. Among the fourth nanoposts excluding the third nanoposts 134A in the fourth pixel correspondence regions 134 , widths of nanoposts corresponding to each other may be the same regardless of a change in azimuth angle. For example, the second nanoparticles of the first pixel correspondence region 131 located apart from the center of the color separation lens array 130 by a predetermined distance in a first direction (X direction) on the surface of the color separation lens array 130 . The width of any one of the posts is the first pixel corresponding region 131 located apart from the center of the color separation lens array 130 by a predetermined distance in the second direction (Y direction) on the surface of the color separation lens array 130. ) It may be the same as the width of the corresponding nanopost among the second nanoposts. In addition, among the fourth nanoposts of the fourth pixel correspondence region 134 located apart from the center of the color separation lens array 130 by a predetermined distance in the first direction (X direction) on the surface of the color separation lens array 130 The width of any one nanopost is the width of the fourth pixel correspondence region 134 located on the surface of the color separation lens array 130 by a predetermined distance from the center of the color separation lens array 130 in the second direction (Y direction). Among the fourth nanoposts, the width may be the same as that of the corresponding nanopost.

As a result, a plurality of nanoposts of the first pixel correspondence region 131 located apart from the center of the color separation lens array 130 by a predetermined distance in the first direction (X direction) on the surface of the color separation lens array 130 The arrangement of a plurality of nanoposts of the first pixel corresponding region 131 located on the surface of the color separation lens array 130 by a predetermined distance from the center of the color separation lens array 130 in the second direction (Y direction) is different from the arrangement of In addition, the plurality of nanoposts of the fourth pixel corresponding region 134 located on the surface of the color separation lens array 130 by a predetermined distance from the center of the color separation lens array 130 in the first direction (X direction). The arrangement is of a plurality of nanoposts of the fourth pixel corresponding region 134 located apart from the center of the color separation lens array 130 by a predetermined distance in the second direction (Y direction) on the surface of the color separation lens array 130. differs from the array.

In particular, the arrangement of the plurality of nanoposts in the first pixel correspondence region 131 and the arrangement of the plurality of nanoposts in the fourth pixel correspondence region 134 at positions having the same chief ray angle and a different azimuth angle of 90 degrees may be the same. there is. For example, the arrangement of the plurality of nanoposts in the first pixel correspondence region 131 at a position where the chief ray angle is 35 degrees and the azimuth angle is 0 degrees corresponds to a fourth pixel at a position where the chief ray angle is 35 degrees and the azimuth angle is 90 degrees. The same as the arrangement of the plurality of nanoposts in the region 134, and the arrangement of the plurality of nanoposts in the fourth pixel corresponding region 134 at a position where the chief ray angle is 35 degrees and the azimuth angle is 0 degrees, the chief ray angle is 35 degrees It may be the same as the arrangement of the plurality of nanoposts in the first pixel correspondence region 131 at a position where the azimuthal angle is 90 degrees. This is because a plurality of nanoposts are arranged in a two-way symmetry in the first and fourth pixel correspondence regions 131 and 134, and the first pixel correspondence region 131 and the fourth pixel correspondence region 134 are mutually related to each other. It can be attributed to the fact that it is rotated 90 degrees with respect to .

On the other hand, although not shown, when the azimuth angle is further increased beyond 90 degrees, nanoposts in the first pixel correspondence region 131 are adjacent to the second pixel correspondence region 132 until the azimuth angle reaches 180 degrees. The width of the nanopost 131A gradually decreases, and the width of the nanopost 134A adjacent to the third pixel corresponding region 133 among the nanoposts in the fourth pixel corresponding region 134 gradually increases. Therefore, the nanoposts of the first pixel corresponding region 131 and the fourth pixel corresponding region 134 in the color separation lens array 130 are arranged symmetrically with respect to azimuth angles of 0 degrees, 90 degrees, 180 degrees, and 270 degrees. can have

13A to 13C , each of the first to fourth pixel correspondence regions 131, 132, 133, and 134 includes nanoposts arranged in a 3×3 array, and the nanoposts are located in the first pixel correspondence region 131. The width of two nanoposts 131A adjacent to the second pixel corresponding region 132 among the posts and the width of two nanoposts 131A adjacent to the third pixel corresponding region 133 among the nanoposts in the fourth pixel corresponding region 134 Although it has been described that the width of the post 134A changes according to the change in azimuth, this is merely an example and is not necessarily limited thereto. In the first to fourth pixel correspondence regions 131, 132, 133, and 134, the arrangement form and number of nanoposts may be variously selected, and the position of the nanoposts whose width changes according to the change in azimuth angle, the position of the nanoposts, A method for changing the width may also be variously selected.

14A to 14D are planes exemplarily showing changes in the arrangement shape of the nanoposts of the color separation lens array 130 according to the azimuthal position on the image sensor according to another embodiment. In the center of (1000) or the center of the color separation lens array 130, the arrangement of nanoposts of the pixel corresponding regions of the center group of the color separation lens array 130 is shown, and FIG. 14c shows the arrangement of nanoposts of the pixel corresponding regions of the first peripheral group of the color separation lens array 130 at the position of 0 degree, and FIG. 14c shows the arrangement of the color separation lens array (130 ) shows the arrangement of nanoposts of the pixel correspondence regions of the second peripheral group of ), and FIG. 14d shows the pixel correspondence region of the third peripheral group of the color separation lens array 130 at a position where the chief ray angle is 34.9 degrees and the azimuth angle is 45 degrees. shows an array of nanoposts. Among the plurality of peripheral groups, the first peripheral group in FIG. 14B, the second peripheral group in FIG. 14C, and the third peripheral group in FIG. 14D have the same chief ray angle (eg, 34.9 degrees) and different azimuth angles (eg, 0 degrees and 90 degrees). , and 45 degrees). In FIGS. 14A to 14D , for convenience, the shift of pixel corresponding regions and the change in width of nanoposts in the periphery of the color separation lens array 130 are not applied, and only changes in some nanoposts according to a change in azimuth angle are shown.

In the examples shown in FIGS. 14A to 14D , each of the first to fourth pixel correspondence regions 131 , 132 , 133 , and 134 may include nanoposts arranged in a 4×4 array. In the case of the first and fourth pixel correspondence regions 131 and 134, nanoposts are not disposed at four corners, and in the case of the second and third pixel correspondence regions 132 and 133, all regions of the 4×4 array Nanoposts are placed on the field. For example, the first pixel correspondence region 131 includes four first nanoparticles disposed at an edge portion adjacent to the third pixel correspondence region 133 in the second direction (Y direction) within the first pixel correspondence region 131 . The post 131B and a plurality of second nanoposts disposed at other positions may be included. The second nanoposts may include four nanoposts adjacent to the second pixel corresponding region 132 in the first direction (X direction) and four nanoposts disposed in the center. The fourth pixel correspondence region 134 includes four third nanoposts disposed at an edge portion adjacent to the third pixel correspondence region 133 in the first direction (X direction) within the fourth pixel correspondence region 134 ( 134B) and a plurality of fourth nanoposts disposed at other positions. The fourth nanoposts may include four nanoposts adjacent to the second pixel corresponding region 132 in the second direction (Y direction) and four nanoposts disposed in the center.

Referring to FIG. 14A , in the center of the color separation lens array 130 where the chief ray angle and the azimuth angle are 0 degrees, the width W1 of a first nanopost 131B among nanoposts in the first pixel corresponding region 131 is The width W2 of the third nanopost 134B among the nanoposts in the fourth pixel correspondence region 134 may be equal to 100 nm.

Referring to FIG. 14B, as the chief ray angle increases in a state where the azimuth angle is 0 degrees, the width W1 of the first nanopost 131B of the first pixel correspondence region 131 and the third width W1 of the fourth pixel correspondence region 134 are A width W2 of the nanopost 134B may gradually increase. In other words, from the center of the color separation lens array 130 to the periphery along the first direction (X direction), the width W1 of the first nanopost 131B of the first pixel correspondence region 131 and the fourth pixel The width W2 of the third nanopost 134B of the corresponding region 134 gradually increases. Although not shown for convenience, widths of the remaining nanoposts in the first and fourth pixel correspondence regions 131 and 134 may also increase as the chief ray angle increases. When the azimuthal angle is 34.9 degrees, the width W1 of the first nanopost 131B of the first pixel correspondence region 131 is 110 nm, and the third nanopost 134B of the fourth pixel correspondence region 134 The width W2 of may be 130 nm. Accordingly, the width W2 of the third nanoposts 134B of the fourth pixel correspondence region 134 may increase more than the width W1 of the first nanoposts 131B of the first pixel correspondence region 131. can In other words, the width W1 of the first nanopost 131B of the first pixel correspondence region 131 in the first peripheral group having an azimuth angle of 0 degrees is equal to the width W1 of the fourth pixel correspondence region 134 in the first peripheral group. It may be smaller than the width W2 of the nanopost 134B. The increase in the width W1 of the first nanopost 131B of the first pixel correspondence region 131 is simply due to the increase in the chief ray angle along the first direction (X direction), and the fourth pixel correspondence region 134 It can be seen that the increase in the width W2 of the third nanoposts 134B of is taken into account the directionality of the color separation lens array 130 with respect to the azimuthal angle.

Referring to FIG. 14C , when the azimuth angle increases in a state where the chief ray angle is 34.9 degrees, the width W1 of the first nanopost 131B among the nanoposts in the first pixel correspondence region 131 increases, and the fourth pixel A width W2 of a third nanopost 134B among nanoposts in the corresponding region 134 may decrease. For example, when the chief ray angle is 34.9 degrees and the azimuth angle is 90 degrees, the width W1 of the first nanopost 131B of the first pixel correspondence region 131 is 130 nm, and the fourth pixel correspondence region 134 The width W2 of the third nanopost 134B of ) may be 110 nm.

In other words, the width W1 of the first nanopost 131B of the first pixel correspondence region 131 and the fourth pixel of the first pixel corresponding region 131 are measured from the center of the color separation lens array 130 toward the periphery along the second direction (Y direction). The width W2 of the third nanopost 134B of the corresponding region 134 gradually increases, and in particular, the width W1 of the first nanopost 131B of the first pixel corresponding region 131 corresponds to the fourth pixel. It may increase more than the width W2 of the third nanopost 134B of the region 134 . In other words, the width W1 of the first nanopost 131B of the first pixel correspondence region 131 in the second peripheral group having an azimuthal angle of 90 degrees is equal to the width W1 of the fourth pixel correspondence region 134 in the second peripheral group. The increase in the width W1 of the first nanopost 131B of the first pixel correspondence region 131 may be greater than the width W2 of the nanopost 134B. Directionality is considered, and it can be seen that the increase in the width W2 of the third nanopost 134B of the fourth pixel correspondence region 134 is simply due to an increase in the chief ray angle along the second direction (Y direction).

Although not shown, when the azimuth angle increases from 90 degrees to 180 degrees in a state where the chief ray angle is 34.9 degrees, the width W1 of the first nanoposts 131B among the nanoposts in the first pixel corresponding region 131 is again After gradually decreasing, the width W2 of the third nanopost 134B among the nanoposts in the fourth pixel correspondence region 134 may gradually increase again. When the chief ray angle is 34.9 degrees and the azimuth angle is 180 degrees, the width W1 of the first nanopost 131B of the first pixel correspondence region 131 is 110 nm and the third nanopost 131B of the fourth pixel correspondence region 134 is A width W2 of the nanopost 134B may be 130 nm.

Accordingly, the first nanoposts of the first pixel correspondence region 131 located apart from the center of the color separation lens array 130 by a predetermined distance in the first direction (X direction) on the surface of the color separation lens array 130 ( 131B) is the first width of the first pixel correspondence region 131 located apart from the center of the color separation lens array 130 by a predetermined distance in the second direction (Y direction) on the surface of the color separation lens array 130 . It may be different from the width of the nanopost (131B). In particular, the width of the first nanopost 131B of the first pixel correspondence region 131 located at the edge in the second direction (Y direction) from the center of the color separation lens array 130 is the edge in the first direction (X direction). It may be larger than the width of the first nanopost 131B of the first pixel correspondence region 131 located thereon. In addition, the third nanoposts of the fourth pixel correspondence region 134 located apart from the center of the color separation lens array 130 by a predetermined distance in the first direction (X direction) on the surface of the color separation lens array 130 ( 134B) is the third width of the fourth pixel correspondence region 134 located apart from the center of the color separation lens array 130 by a predetermined distance in the second direction (Y direction) on the surface of the color separation lens array 130 . It may be different from the width of the nanopost (134B). In particular, the width of the third nanoposts 134B of the fourth pixel corresponding region 134 located at the edge in the first direction (X direction) from the center of the color separation lens array 130 is the edge in the second direction (Y direction). It may be larger than the width of the third nanopost 134B of the fourth pixel correspondence region 134 located thereon.

In addition, the width of the first nanopost 131B of the first pixel correspondence region 131 located apart from the center of the color separation lens array 130 by a predetermined distance in the first direction (X direction) is the color separation lens array ( 130) is different from the width of the third nanopost 134B of the fourth pixel correspondence region 134 located apart from the center by a predetermined distance in the first direction (X direction). The width of the first nanoposts 131B of the first pixel correspondence region 131 located apart from the center of the color separation lens array 130 by a predetermined distance in the second direction (Y direction) is the width of the color separation lens array 130 It is different from the width of the third nanopost 134B of the fourth pixel correspondence region 134 located apart from the center of the second direction (Y direction) by a predetermined distance.

As a result, the array of the plurality of nanoposts in the first pixel correspondence region 131 disposed in the first direction (X direction) from the center of the color separation lens array 130 is arranged in the second direction (Y direction). It is different from the arrangement of the plurality of nanoposts of the one-pixel correspondence region 131, and the plurality of fourth pixel correspondence regions 134 disposed in the first direction (X direction) from the center of the color separation lens array 130. The arrangement of the nanoposts is different from the arrangement of the plurality of nanoposts in the fourth pixel correspondence region 134 disposed in the second direction (Y direction). In addition, the arrangement of the plurality of nanoposts in the first pixel correspondence region 131 and the arrangement of the plurality of nanoposts in the fourth pixel correspondence region 134 at positions having the same chief ray angle and a different azimuth angle of 90 degrees may be the same. there is. For example, the width of the first nanopost 131B of the first pixel corresponding region 131 located apart from the center of the color separation lens array 130 by a predetermined distance in the first direction (X direction) is the color separation lens The width is the same as that of the third nanoposts 134B of the fourth pixel correspondence region 134 located away from the center of the array 130 by a predetermined distance in the second direction (Y direction).

Referring to FIG. 14D , a first element in a third peripheral group disposed at a predetermined distance from the center of the color separation lens array 130 in a direction of 45 degrees between the first direction (X direction) and the second direction (Y direction). The width W1 of the first nanopost 131B of the pixel correspondence region 131 and the width W2 of the third nanopost 134B of the fourth pixel correspondence region 134 in the third peripheral group may be the same. there is. Even when the azimuth angles are 135 degrees, 225 degrees, and 315 degrees, the width W1 of the first nanopost 131B of the first pixel correspondence region 131 and the third nanopost 134B of the fourth pixel correspondence region 134 ) may have the same width W2. For example, when the chief ray angle is 34.9 degrees and the azimuth angle is 45 degrees, the width W1 of the first nanopost 131B of the first pixel correspondence region 131 and the third nanopost of the fourth pixel correspondence region 134 are The width W2 of post 134B may be 110 nm.

Accordingly, it can be seen that the width of the nanoposts of the first pixel correspondence region 131 and the fourth pixel correspondence region 134 generally increases in the azimuth direction of 45 degrees considering only the chief ray angle. For example, the first portion of the first pixel correspondence region 131 in the third peripheral group located on the surface of the color separation lens array 130 by a predetermined distance from the center of the color separation lens array 130 in a direction of 45 degrees. The width of the nanopost 131B may be greater than the width of the first nanopost 131B of the first pixel corresponding region 131 in the center group located at the center of the color separation lens array 130, The width of the third nanopost 134B of the fourth pixel corresponding region 134 in the third peripheral group located at a predetermined distance in the direction of 45 degrees from the center 130 is It may be larger than the width of the third nanopost 134B of the fourth pixel correspondence region 134 in the center group. In addition, the width of the second nanopost of the first pixel corresponding region 131 in the third peripheral group located away from the center of the color separation lens array 130 by a predetermined distance in the direction of 45 degrees is the color separation lens array 130 In the third peripheral group, which is larger than the width of the second nanopost of the first pixel correspondence region 131 in the center group located at the center of the color separation lens array and is spaced apart by a predetermined distance in the direction of 45 degrees from the center 130 of the color separation lens array. A width of the fourth nanopost of the fourth pixel correspondence region 134 may be greater than a width of the fourth nanopost of the fourth pixel correspondence region 134 in the center group located at the center of the color separation lens array 130 .

In the azimuthal direction of 45 degrees, widths of the nanoposts of the first pixel correspondence region 131 and the fourth pixel correspondence region 134 may gradually increase as the chief ray angle increases. For example, a first portion of the first pixel correspondence region 131 spaced apart from the center of the color separation lens array 130 by a second distance greater than the first distance in a direction of 45 degrees from the center of the color separation lens array 130 on the surface of the color separation lens array 130 . The width of the nanoposts 131B is greater than the width of the first nanoposts 131B of the first pixel corresponding region 131 located away from the center of the color separation lens array 130 by a first distance in the direction of 45 degrees, and The width of the third nanoposts 134B of the fourth pixel correspondence region 134 located away from the center of the separation lens array 130 by a second distance in the direction of 45 degrees is 45 degrees from the center of the color separation lens array 130. It is larger than the width of the third nanoposts 134B of the fourth pixel correspondence region 134 spaced apart by the first distance in the direction. In addition, the width of the second nanopost of the first pixel corresponding region 131 located apart from the center of the color separation lens array 130 by a second distance greater than the first distance in the direction of 45 degrees is the width of the second nanopost of the color separation lens array 130 is larger than the width of the second nanopost of the first pixel corresponding region 131 located apart from the center by a first distance in the direction of 45 degrees from the center of the color separation lens array 130 by a second distance in the direction of 45 degrees from the center of the color separation lens array 130 The width of the fourth nanopost of the fourth pixel correspondence region 134 is the fourth nanopost of the fourth pixel correspondence region 134 located apart from the center of the color separation lens array 130 by a first distance in the direction of 45 degrees. greater than the width of For example, the width of the first nanoposts 131B of the first pixel correspondence region 131 located apart from the center of the color separation lens array 130 by a distance at which the chief ray angle is 34.9 degrees in the direction of 45 degrees is the color separation lens array ( 130) may be 5% to 15% larger than the width of the first nanopost 131B of the first pixel correspondence region 131 located in the center.

On the other hand, while the azimuth angle increases from 0 degree to 45 degrees, the chief ray angle of the first pixel correspondence region 131 disposed at the same position (that is, disposed at the same distance from the center of the color separation lens array 130) The width of the first nanopost 131B is fixed, and the width of the third nanopost 134B of the fourth pixel corresponding region 134 disposed at the same position as the chief ray angle gradually decreases. Further, while the azimuth angle increases from 45 degrees to 90 degrees, the width of the first nanopost 131B of the first pixel corresponding region 131 disposed at the same position as the chief ray angle increases gradually, and the chief ray angle is the same. The width of the third nanopost 134B of the fourth pixel correspondence region 134 disposed at the location is fixed. Although not shown, while the azimuth angle increases from 90 degrees to 135 degrees, the width of the first nanopost 131B of the first pixel correspondence region 131 disposed at the same position as the chief ray angle gradually decreases, and the chief ray angle gradually decreases. The width of the third nanopost 134B of the fourth pixel correspondence region 134 disposed at the same angle may be fixed. In addition, while the azimuth angle increases from 135 degrees to 180 degrees, the width of the first nanopost 131B of the first pixel correspondence region 131 disposed at the same position as the chief ray angle is fixed, and the position where the chief ray angle is the same A width of the third nanopost 134B of the fourth pixel correspondence region 134 disposed on may gradually increase.

Accordingly, nanoposts of the first pixel correspondence region 131 and the fourth pixel correspondence region 134 may be symmetrically arranged with respect to the azimuth angle of 0 degree in the range between the azimuth angle of 45 degrees and -45 degrees. In addition, the first pixel corresponds to 90 degrees in the azimuth range between 45 degrees and 135 degrees, 180 degrees in the azimuth range between 135 degrees and 225 degrees, and 270 degrees in the azimuth range between 225 degrees and 315 degrees. The nanoposts of the region 131 and the fourth pixel corresponding region 134 may be symmetrically arranged. In other words, the nanoposts of the first pixel correspondence region 131 and the fourth pixel correspondence region 134 are symmetrically arranged in an angular range of ±45 degrees based on the azimuth angles of 0 degrees, 90 degrees, 180 degrees, and 270 degrees. can

FIG. 15A shows a case in which the chief ray angle is not considered, FIG. 15B shows a case in which the nanoposts are shifted in consideration of the chief ray angle, and FIG. In this case, it is a graph showing the spectral distribution of light incident on each pixel of the image sensor 1000 as an example.

In FIG. 15A, the graphs indicated by 'Gb', 'B', 'R', and 'Gr' show the first to fourth pixels 111, 112, and 113 disposed in the center of the image sensor 1000 having a chief ray angle of 0 degree. , 114), and the graphs indicated by 'Gb1', 'B1', 'R1', and 'Gr1' are the first ray disposed at the periphery of the image sensor 1000 having a chief ray angle of 35 degrees. to the fourth pixels 111, 112, 113, and 114 respectively. Referring to FIG. 15A , when the chief ray angle is not considered at all, the spectrum distribution of light incident on the first to fourth pixels 111, 112, 113, and 114 disposed in the periphery of the image sensor 1000 is There is a large difference from the spectrum distribution of light incident on the first to fourth pixels 111, 112, 113, and 114 disposed at the center of (1000). Accordingly, it can be seen that the color separation property is deteriorated in the periphery of the color separation lens array 130 having a large chief ray angle.

In addition, the graphs indicated by 'Gb2', 'B2', 'R2', and 'Gr2' in FIG. 15B show the peripheral portion of the image sensor 1000 having a chief ray angle of 35 degrees when the nanoposts are shifted in consideration of the chief ray angle. This is a spectrum distribution of light incident on the first to fourth pixels 111, 112, 113, and 114, respectively. Referring to FIG. 15B, when the nanoposts are shifted in consideration of the chief ray angle, the spectrum distribution of light incident on the first to fourth pixels 111, 112, 113, and 114 disposed in the periphery of the image sensor 1000 is relatively similar to the spectrum distribution of light incident on the first to fourth pixels 111, 112, 113, and 114 disposed at the center of the image sensor 1000. However, a characteristic difference occurs in the spectrum of green light incident on each of the green pixels, i.e., the first pixel 111 and the fourth pixel 114. This is due to the fact that the pixel arrangement around the green pixel varies according to the azimuthal direction.

In the graphs indicated by 'Gb3', 'B3', 'R3', and 'Gr3' in FIG. 15C, the chief ray angle is 35 when the nanoposts are shifted considering the chief ray angle and the arrangement of the nanoposts is changed considering the azimuthal direction. It is a spectrum distribution of light incident on each of the first to fourth pixels 111, 112, 113, and 114 disposed in the periphery of the image sensor 1000. Referring to FIG. 15C , when the arrangement of the nanoposts is changed in consideration of the azimuth direction, the first to fourth pixels 111, 112, 113, and 114 in the center and periphery of the image sensor 1000 even when the chief ray angle is 35 degrees. ), it can be confirmed that the spectral distribution of the incident light is maintained almost constant.

The image sensor 1000 including the pixel array 1100 described above can provide a sufficient amount of light to the pixels even if the size of the pixels is reduced because there is almost no light loss due to a color filter, for example, an organic color filter. can Therefore, it is possible to manufacture an ultra-high resolution, ultra-small, and highly sensitive image sensor having hundreds of millions of pixels or more. Such ultra-high-resolution, ultra-small, and highly sensitive image sensors may be employed in various high-performance optical devices or high-performance electronic devices. Such electronic devices include, for example, smart phones, mobile phones, cell phones, personal digital assistants (PDAs), laptops, PCs, various portable devices, home appliances, security cameras, medical cameras, automobiles, and the Internet of Things (IoT). It may be an Internet of Things (IoT) device or other mobile or non-mobile computing device, but is not limited thereto.

In addition to the image sensor 1000, the electronic device may further include a processor that controls the image sensor, for example, an application processor (AP), and runs an operating system or application program through the processor to generate a plurality of hardware Alternatively, software components may be controlled, and various data processing and calculations may be performed. The processor may further include a graphic processing unit (GPU) and/or an image signal processor. When the image signal processor is included in the processor, an image (or video) acquired by the image sensor may be stored and/or output using the processor.

16 is a block diagram illustrating an example of an electronic device ED01 including an image sensor 1000. Referring to FIG. Referring to FIG. 16 , in a network environment ED00, an electronic device ED01 communicates with another electronic device ED02 through a first network ED98 (such as a short-distance wireless communication network) or a second network ED99. It is possible to communicate with another electronic device ED04 and/or server ED08 via (a long-distance wireless communication network, etc.). The electronic device ED01 may communicate with the electronic device ED04 through the server ED08. The electronic device (ED01) includes a processor (ED20), a memory (ED30), an input device (ED50), an audio output device (ED55), a display device (ED60), an audio module (ED70), a sensor module (ED76), and an interface (ED77). ), haptic module (ED79), camera module (ED80), power management module (ED88), battery (ED89), communication module (ED90), subscriber identification module (ED96), and/or antenna module (ED97). can In the electronic device ED01, some of these components (such as the display device ED60) may be omitted or other components may be added. Some of these components can be implemented as a single integrated circuit. For example, the sensor module ED76 (fingerprint sensor, iris sensor, illuminance sensor, etc.) may be implemented by being embedded in the display device ED60 (display, etc.).

The processor ED20 may execute software (program ED40, etc.) to control one or a plurality of other components (hardware, software components, etc.) of the electronic device ED01 connected to the processor ED20, and , various data processing or calculations can be performed. As part of data processing or calculation, processor ED20 loads commands and/or data received from other components (sensor module ED76, communication module ED90, etc.) into volatile memory ED32 and The command and/or data stored in ED32) may be processed, and the resulting data may be stored in non-volatile memory ED34. The processor (ED20) includes a main processor (ED21) (central processing unit, application processor, etc.) and a co-processor (ED23) (graphics processing unit, image signal processor, sensor hub processor, communication processor, etc.) that can operate independently or together with it. can include The auxiliary processor ED23 may use less power than the main processor ED21 and perform specialized functions.

The auxiliary processor ED23 takes the place of the main processor ED21 while the main processor ED21 is inactive (sleep state), or the main processor ED21 is active (application execution state). Together with the processor ED21, functions and/or states related to some of the components of the electronic device ED01 (display device ED60, sensor module ED76, communication module ED90, etc.) may be controlled. can The auxiliary processor ED23 (image signal processor, communication processor, etc.) may be implemented as part of other functionally related components (camera module ED80, communication module ED90, etc.).

The memory ED30 may store various data required by components (processor ED20, sensor module ED76, etc.) of the electronic device ED01. The data may include, for example, input data and/or output data for software (such as the program ED40) and commands related thereto. The memory ED30 may include a volatile memory ED32 and/or a non-volatile memory ED34. The non-volatile memory ED34 may include a built-in memory ED36 fixedly mounted in the electronic device ED01 and a removable external memory ED38.

The program ED40 may be stored as software in the memory ED30, and may include an operating system ED42, middleware ED44, and/or an application ED46.

The input device ED50 may receive a command and/or data to be used by a component (such as the processor ED20) of the electronic device ED01 from an external device (such as a user) of the electronic device ED01. The input device ED50 may include a microphone, mouse, keyboard, and/or a digital pen (stylus pen, etc.).

The sound output device ED55 may output sound signals to the outside of the electronic device ED01. The audio output device ED55 may include a speaker and/or a receiver. The speaker can be used for general purposes, such as multimedia playback or recording playback, and the receiver can be used to receive an incoming call. The receiver may be incorporated as a part of the speaker or implemented as an independent separate device.

The display device ED60 may visually provide information to the outside of the electronic device ED01. The display device ED60 may include a display, a hologram device, or a projector and a control circuit for controlling the device. The display device ED60 may include a touch circuitry set to detect a touch and/or a sensor circuit (such as a pressure sensor) set to measure the intensity of force generated by the touch.

The audio module ED70 may convert sound into an electrical signal or vice versa. The audio module ED70 acquires sound through the input device ED50, the sound output device ED55, and/or other electronic devices directly or wirelessly connected to the electronic device ED01 (such as the electronic device ED02). ) may output sound through a speaker and/or a headphone.

The sensor module ED76 detects the operating state (power, temperature, etc.) of the electronic device ED01 or the external environmental state (user state, etc.), and generates electrical signals and/or data values corresponding to the detected state. can do. The sensor module ED76 includes a gesture sensor, a gyro sensor, a pressure sensor, a magnetic sensor, an acceleration sensor, a grip sensor, a proximity sensor, a color sensor, an IR (Infrared) sensor, a biosensor, a temperature sensor, a humidity sensor, and/or an illuminance sensor. May contain sensors.

The interface ED77 may support one or a plurality of specified protocols that may be used to directly or wirelessly connect the electronic device ED01 to another electronic device (such as the electronic device ED02). The interface ED77 may include a high definition multimedia interface (HDMI), a universal serial bus (USB) interface, an SD card interface, and/or an audio interface.

The connection terminal ED78 may include a connector through which the electronic device ED01 may be physically connected to another electronic device (such as the electronic device ED02). The connection terminal ED78 may include an HDMI connector, a USB connector, an SD card connector, and/or an audio connector (such as a headphone connector).

The haptic module ED79 can convert electrical signals into mechanical stimuli (vibration, movement, etc.) or electrical stimuli that the user can perceive through tactile or kinesthetic senses. The haptic module ED79 may include a motor, a piezoelectric element, and/or an electrical stimulation device.

The camera module ED80 may capture still images and moving images. The camera module ED80 may include a lens assembly including one or a plurality of lenses, the image sensor 1000 of FIG. 1 , image signal processors, and/or flashes. A lens assembly included in the camera module ED80 may collect light emitted from a subject that is an image capture target.

The power management module ED88 may manage power supplied to the electronic device ED01. The power management module ED88 may be implemented as part of a Power Management Integrated Circuit (PMIC).

The battery ED89 may supply power to components of the electronic device ED01. The battery ED89 may include a non-rechargeable primary cell, a rechargeable secondary cell, and/or a fuel cell.

The communication module ED90 establishes a direct (wired) communication channel and/or a wireless communication channel between the electronic device ED01 and other electronic devices (electronic device ED02, electronic device ED04, server ED08, etc.); And it can support communication through the established communication channel. The communication module ED90 may include one or a plurality of communication processors that operate independently of the processor ED20 (application processor, etc.) and support direct communication and/or wireless communication. The communication module (ED90) includes a wireless communication module (ED92) (cellular communication module, short-range wireless communication module, GNSS (Global Navigation Satellite System, etc.) communication module) and/or a wired communication module (ED94) (LAN (Local Area Network) communication). module, power line communication module, etc.). Among these communication modules, the corresponding communication module is a first network (ED98) (a local area communication network such as Bluetooth, WiFi Direct, or IrDA (Infrared Data Association)) or a second network (ED99) (cellular network, Internet, or computer network (LAN). , WAN, etc.) to communicate with other electronic devices. These various types of communication modules may be integrated into one component (single chip, etc.) or implemented as a plurality of separate components (multiple chips). The wireless communication module ED92 uses the subscriber information (International Mobile Subscriber Identifier (IMSI), etc.) stored in the subscriber identification module ED96 within a communication network such as the first network ED98 and/or the second network ED99. The electronic device (ED01) can be identified and authenticated in .

The antenna module ED97 can transmit or receive signals and/or power to the outside (other electronic devices, etc.). The antenna may include a radiator made of a conductive pattern formed on a substrate (PCB, etc.). The antenna module ED97 may include one or a plurality of antennas. When a plurality of antennas are included, an antenna suitable for a communication method used in a communication network such as the first network ED98 and/or the second network ED99 is selected from among the plurality of antennas by the communication module ED90. can Signals and/or power may be transmitted or received between the communication module ED90 and other electronic devices through the selected antenna. In addition to the antenna, other parts (RFIC, etc.) may be included as part of the antenna module (ED97).

Some of the components are connected to each other through communication methods (bus, GPIO (General Purpose Input and Output), SPI (Serial Peripheral Interface), MIPI (Mobile Industry Processor Interface), etc.) and signal (command, data, etc.) ) are interchangeable.

Commands or data may be transmitted or received between the electronic device ED01 and the external electronic device ED04 through the server ED08 connected to the second network ED99. The other electronic devices ED02 and ED04 may be of the same or different type as the electronic device ED01. All or part of the operations executed in the electronic device ED01 may be executed in one or a plurality of other electronic devices ED02 , ED04 , and ED08 . For example, when the electronic device ED01 needs to perform a certain function or service, instead of executing the function or service itself, one or more other electronic devices perform some or all of the function or service. You can ask to do it. One or a plurality of other electronic devices receiving the request may execute additional functions or services related to the request and deliver the result of the execution to the electronic device ED01. To this end, cloud computing, distributed computing, and/or client-server computing technologies may be used.

FIG. 17 is a block diagram illustrating the camera module ED80 of FIG. 16 . Referring to FIG. 17, the camera module ED80 includes a lens assembly CM10, a flash CM20, an image sensor 1000 (such as the image sensor 1000 of FIG. 1), an image stabilizer CM40, and a memory CM50. (buffer memory, etc.), and/or an image signal processor (CM60). The lens assembly CM10 may collect light emitted from a subject, which is an image capturing target. The camera module ED80 may include a plurality of lens assemblies CM10. In this case, the camera module ED80 may be a dual camera, a 360-degree camera, or a spherical camera. Some of the plurality of lens assemblies CM10 may have the same lens properties (angle of view, focal length, auto focus, F number, optical zoom, etc.) or different lens properties. The lens assembly CM10 may include a wide-angle lens or a telephoto lens.

The flash CM20 may emit light used to enhance light emitted or reflected from a subject. The flash CM20 may include one or a plurality of light emitting diodes (Red-Green-Blue (RGB) LED, White LED, Infrared LED, Ultraviolet LED, etc.), and/or a Xenon Lamp. The image sensor 1000 may be the image sensor described in FIG. 1 , and may obtain an image corresponding to the subject by converting light emitted or reflected from the subject and transmitted through the lens assembly CM10 into an electrical signal. . The image sensor 1000 may include one or a plurality of sensors selected from among image sensors having different properties, such as an RGB sensor, a black and white (BW) sensor, an IR sensor, or a UV sensor. Each of the sensors included in the image sensor 1000 may be implemented as a Charged Coupled Device (CCD) sensor and/or a Complementary Metal Oxide Semiconductor (CMOS) sensor.

The image stabilizer CM40 moves one or a plurality of lenses or the image sensor 1000 included in the lens assembly CM10 in a specific direction in response to the movement of the camera module ED80 or the electronic device CM01 including the same. Alternatively, the operation characteristics of the image sensor 1000 may be controlled (adjustment of read-out timing, etc.) so that negative effects caused by motion may be compensated for. The image stabilizer CM40 detects the movement of the camera module ED80 or the electronic device ED01 by using a gyro sensor (not shown) or an acceleration sensor (not shown) disposed inside or outside the camera module ED80. can The image stabilizer CM40 may be implemented optically.

The memory CM50 may store some or all data of an image acquired through the image sensor 1000 for a next image processing task. For example, when a plurality of images are acquired at high speed, the acquired original data (Bayer-patterned data, high-resolution data, etc.) is stored in the memory (CM50), only low-resolution images are displayed, and then selected (user selection, etc.) It can be used to cause the original data of the image to be passed to the Image Signal Processor (CM60). The memory CM50 may be integrated into the memory ED30 of the electronic device ED01 or configured as a separate memory operated independently.

The image signal processor CM60 may perform image processing on images acquired through the image sensor 1000 or image data stored in the memory CM50. Image processing includes depth map generation, 3D modeling, panorama generation, feature point extraction, image synthesis, and/or image compensation (noise reduction, resolution adjustment, brightness adjustment, blurring, sharpening). , Softening, etc.). The image signal processor CM60 may perform control (exposure time control, read-out timing control, etc.) for components included in the camera module ED80 (image sensor 1000, etc.). The images processed by the image signal processor (CM60) are stored back in the memory (CM50) for further processing or the external components of the camera module (ED80) (memory (ED30), display unit (ED60), electronic unit (ED02)) , the electronic device ED04, the server ED08, etc.). The image signal processor CM60 may be integrated into the processor ED20 or configured as a separate processor that operates independently of the processor ED20. When the image signal processor CM60 is configured as a separate processor from the processor ED20, the image processed by the image signal processor CM60 undergoes additional image processing by the processor ED20 and then displays the display device ED60. can be displayed through

The electronic device ED01 may include a plurality of camera modules ED80 each having a different property or function. In this case, one of the plurality of camera modules ED80 may be a wide-angle camera and the other may be a telephoto camera. Similarly, one of the plurality of camera modules ED80 may be a front camera and the other may be a rear camera.

The image sensor 1000 according to the embodiments includes a mobile phone or smart phone 1100m shown in FIG. 18, a tablet or smart tablet 1200 shown in FIG. 19, and a digital camera or camcorder 1300 shown in FIG. , can be applied to the notebook computer 1400 shown in FIG. 21 or the television or smart television 1500 shown in FIG. 22. For example, the smart phone 1100m or the smart tablet 1200 may include a plurality of high resolution cameras each having a high resolution image sensor. Depth information of subjects in an image may be extracted using high-resolution cameras, out-focusing of the image may be adjusted, or subjects in the image may be automatically identified.

In addition, the image sensor 1000 includes the smart refrigerator 1600 shown in FIG. 23, the security camera 1700 shown in FIG. 24, the robot 1800 shown in FIG. 25, and the medical camera 1900 shown in FIG. 26. etc. can be applied. For example, the smart refrigerator 1600 may automatically recognize food in the refrigerator using an image sensor, and inform the user of the presence or absence of specific food, the type of food that has been stored or shipped to the user through a smartphone. The security camera 1700 can provide ultra-high resolution images and can recognize objects or people in the images even in a dark environment by using high sensitivity. The robot 1800 may provide a high-resolution image when deployed in a disaster or industrial site to which a person cannot directly approach. The medical camera 1900 can provide high resolution images for diagnosis or surgery and can dynamically adjust the field of view.

Also, the image sensor 1000 may be applied to the vehicle 2000 as shown in FIG. 27 . The vehicle 2000 may include a plurality of vehicle cameras 2010, 2020, 2030, and 2040 disposed in various locations. Each of the vehicle cameras 2010, 2020, 2030, and 2040 may include an image sensor according to an embodiment. The vehicle 2000 may use a plurality of vehicle cameras 2010, 2020, 2030, and 2040 to provide the driver with various information about the interior or surroundings of the vehicle 2000, and automatically recognize objects or people in the image to Information necessary for autonomous driving can be provided.

Although the image sensor including the above-described color separation lens array and the electronic device including the same have been described with reference to the embodiment shown in the drawings, this is merely an example, and those having ordinary knowledge in the art can learn various things from this. It will be appreciated that other embodiments that are equivalent and modified are possible. Therefore, the disclosed embodiments should be considered from an illustrative rather than a limiting point of view. The scope of rights is shown in the claims rather than the foregoing description, and all differences within an equivalent scope should be construed as being included in the scope of rights.

110.....Sensor board
111, 112, 113, 114.....pixels
120.....spacer layer
130.....Color Separation Lens Array
131, 132, 133, 134...... pixel correspondence area
140.....Color filter array
141, 142, 143, 144.....color filter
1000..... Image sensor
1010.....timing controller
1020.....raw decoder
1030.....Output circuit
1100......Pixel Array

Claims (20)

a sensor substrate including a plurality of first pixels sensing light of a first wavelength and a plurality of second pixels sensing light of a second wavelength different from the first wavelength; and
A color separation lens array including a plurality of first pixel corresponding regions respectively corresponding to the plurality of first pixels and a plurality of second pixel corresponding regions respectively corresponding to the plurality of second pixels;
The plurality of first pixel correspondence areas and the plurality of second pixel correspondence areas change the phase of the light of the first wavelength to condense the light of the first wavelength to each first pixel and adjust the phase of the light of the second wavelength. It is configured to condense light of the second wavelength to each second pixel by changing the
Each of the plurality of first pixel correspondence regions and the plurality of second pixel correspondence regions includes a plurality of nanoposts,
At least one of the shape, width, and arrangement of the plurality of nanoposts of the plurality of first pixel correspondence regions is determined according to the azimuth angle of the plurality of nanoposts in the peripheral portion surrounding the center of the color separation lens array. Image sensor. According to claim 1,
The plurality of nanoposts of the first pixel correspondence region include first nanoposts and second nanoposts disposed at different positions in the first pixel correspondence region;
The width of the first nanoposts of the first pixel corresponding region located on the surface of the color separation lens array by a first distance in a first direction from the center of the color separation lens array is the width of the color separation lens array on the surface of the color separation lens array. A width different from a width of a first nanopost of the first pixel corresponding region located apart from the center of the separation lens array by a first distance in a second direction perpendicular to the first direction, the image sensor. According to claim 2,
The width of the second nanoposts of the first pixel corresponding region located on the surface of the color separation lens array by a first distance in a first direction from the center of the color separation lens array is the width of the color separation lens array on the surface of the color separation lens array. An image sensor having the same width as a second nanopost of the first pixel corresponding region located away from the center of the separation lens array by a first distance in a second direction. According to claim 2,
The width of the first nanoposts of the first pixel correspondence region located on the surface of the color separation lens array by a first distance in the direction of 45 degrees between the first and second directions from the center of the color separation lens array is An image sensor having a width greater than a width of a first nanopost of the first pixel correspondence region located at the center of the color separation lens array. According to claim 1,
Positions of the first pixel corresponding region and the second pixel corresponding region at the center of the color separation lens array coincide with positions of the corresponding first and second pixels, respectively, and the second pixel corresponding region at the periphery of the color separation lens array. 1 pixel corresponding region and 2nd pixel corresponding region are shifted toward the center of the color separation lens array with respect to the first pixel and the second pixel corresponding thereto, respectively. According to claim 5,
The degree to which the first pixel correspondence area and the second pixel correspondence area at the periphery of the color separation lens array are shifted with respect to the corresponding first and second pixels, respectively, from the center of the color separation lens array to the first pixel An image sensor that becomes larger as the distance between the corresponding area and the second pixel corresponding area increases. According to claim 1,
The sensor substrate further includes a plurality of third pixels sensing light of a third wavelength different from the first and second wavelengths and a plurality of fourth pixels sensing light of the first wavelength,
The color separation lens array further includes a plurality of third pixel correspondence regions corresponding to the third pixel and a plurality of fourth pixel correspondence regions corresponding to the fourth pixel;
Each of the plurality of third pixel corresponding regions and the plurality of fourth pixel corresponding regions includes a plurality of nanoposts,
The plurality of first pixel corresponding regions, the plurality of second pixel corresponding regions, the plurality of third pixel corresponding regions, and the plurality of fourth pixel corresponding regions change the phase of the light of the first wavelength to change the phase of the light of the first wavelength. is condensed into each of the first and fourth pixels, the phase of the light of the second wavelength is changed to condense the light of the second wavelength into each of the second pixels, and the phase of the light of the third wavelength is changed to It is configured to condense light of a third wavelength into each third pixel,
The plurality of first pixel correspondence regions and the plurality of fourth pixel correspondence regions are disposed adjacent to each other in a first diagonal direction, and the plurality of second pixel correspondence regions and the plurality of third pixel correspondence regions are disposed adjacent to each other in a first diagonal direction. are disposed adjacent to each other in a second diagonal direction crossing the
Shapes, widths, and arrangements of the plurality of nanoposts of the plurality of fourth pixel corresponding regions according to the azimuth angles of the plurality of nanoposts of the plurality of fourth pixel corresponding regions in the peripheral portion surrounding the center of the color separation lens array At least one of which changes, the image sensor. According to claim 7,
The plurality of nanoposts of the first pixel correspondence region include first nanoposts and second nanoposts disposed at different positions in the first pixel correspondence region;
The plurality of nanoposts of the fourth pixel correspondence region include third nanoposts and fourth nanoposts disposed at different positions in the fourth pixel correspondence region;
The width of the first nanoposts of the first pixel corresponding region located on the surface of the color separation lens array by a first distance in a first direction from the center of the color separation lens array is the width of the color separation lens array on the surface of the color separation lens array. different from the width of the first nanoposts of the first pixel corresponding region located apart from the center of the separation lens array by a first distance in a second direction perpendicular to the first direction;
The width of the third nanoposts of the fourth pixel corresponding region located on the surface of the color separation lens array by a first distance in a first direction from the center of the color separation lens array is the width of the color separation lens array on the surface of the color separation lens array. A width different from a width of a third nanopost of the fourth pixel corresponding region located away from the center of the separation lens array by a first distance in a second direction, the image sensor. According to claim 8,
A width of the first nanoposts of the first pixel corresponding region at the center of the color separation lens array is equal to a width of a third nanopost of the fourth pixel corresponding region. According to claim 9,
The width of the first nanopost of the first pixel correspondence region, which is spaced apart from the center of the color separation lens array by a first distance in a first direction, is located apart from the center of the color separation lens array by a first distance in a first direction. Different from the width of the third nanopost of the fourth pixel correspondence region, the image sensor. According to claim 10,
The width of the first nanopost of the first pixel corresponding region, which is spaced apart from the center of the color separation lens array by a first distance in a second direction, is spaced apart from the center of the color separation lens array by a first distance in a second direction. Different from the width of the third nanopost of the fourth pixel correspondence region, the image sensor. According to claim 9,
The width of the first nanopost of the first pixel corresponding region, which is spaced apart from the center of the color separation lens array by a first distance in a first direction, is spaced apart from the center of the color separation lens array by a first distance in a second direction. An image sensor having the same width as the third nanopost of the fourth pixel correspondence region. According to claim 8,
The first nanoposts of the first pixel correspondence area are disposed at edges along the second direction within the first pixel correspondence area, and the third nanoposts of the fourth pixel correspondence area are disposed in the fourth pixel correspondence area. An image sensor disposed at an edge along the first direction. According to claim 8,
The width of the first nanoposts of the first pixel corresponding region located on the surface of the color separation lens array by a second distance greater than the first distance in a direction of 45 degrees from the center of the color separation lens array is the width of the color separation lens 5% to 15% larger than the width of the first nanopost of the first pixel corresponding region located in the center of the array, the image sensor. According to claim 8,
While the azimuth angle increases from 0 degrees to 45 degrees, the width of the first nanoposts of the first pixel correspondence region disposed away from the center of the color separation lens array by a first distance is fixed, and the fourth pixel correspondence region The width of the third nanopost gradually decreases,
While the azimuth angle increases from 45 degrees to 90 degrees, the width of the first nanoposts of the first pixel correspondence area disposed apart from the center of the color separation lens array by a first distance gradually increases, and the fourth pixel correspondence wherein the width of the third nanopost of the region is fixed. a sensor substrate including a plurality of unit pixel groups each including a first pixel sensing green light, a second pixel sensing blue light, a third pixel sensing red light, and a fourth pixel sensing green light; and
A plurality of pixels each including a first pixel correspondence region, a second pixel correspondence region, a third pixel correspondence region, and a fourth pixel correspondence region respectively corresponding to the first pixel, second pixel, third pixel, and fourth pixel. A color separation lens array including pixel correspondence groups of
The first pixel correspondence area, the second pixel correspondence area, the third pixel correspondence area, and the fourth pixel correspondence area change the phase of the green light among the incident light and focus the light to the first pixel and the fourth pixel, and It is configured to change the phase to focus light to the second pixel and change the phase of the red light to focus light to the third pixel;
Each of the first to fourth pixel correspondence regions includes a plurality of nanoposts,
The plurality of pixel correspondence groups include a center group located at the center of the color separation lens array and a plurality of peripheral groups outside the center of the color separation lens array;
the plurality of peripheral groups include a first peripheral group and a second peripheral group having the same chief ray angle and different azimuthal angles;
The first pixel correspondence region of the first peripheral group and the first pixel correspondence region of the second peripheral group are different from each other in at least one of the shape, width, and arrangement of the plurality of nanoposts, and the fourth pixel correspondence region of the first peripheral group The pixel correspondence region and the fourth pixel correspondence region of the second peripheral group are different from each other in at least one of the shape, width, and arrangement of the plurality of nanoposts. According to claim 16,
The plurality of nanoposts of the first pixel correspondence region include first nanoposts and second nanoposts disposed at different positions in the first pixel correspondence region;
The plurality of nanoposts of the fourth pixel correspondence region include third nanoposts and fourth nanoposts disposed at different positions in the fourth pixel correspondence region;
The first peripheral group has an azimuth angle of 0 degrees from a reference line passing through the center of the image sensor,
wherein a width of a first nanopost of a first pixel correspondence region in the first peripheral group is smaller than a width of a third nanopost of a fourth pixel correspondence region in the first peripheral group. According to claim 16,
The plurality of nanoposts of the first pixel correspondence region include first nanoposts and second nanoposts disposed at different positions in the first pixel correspondence region;
The plurality of nanoposts of the fourth pixel correspondence region include third nanoposts and fourth nanoposts disposed at different positions in the fourth pixel correspondence region;
The second peripheral group has an azimuth angle of 90 degrees from a reference line passing through the center of the image sensor,
wherein a width of a first nanopost of a first pixel correspondence region in the second peripheral group is greater than a width of a third nanopost of a fourth pixel correspondence region in the second peripheral group. According to claim 16,
The plurality of nanoposts of the first pixel correspondence region include first nanoposts and second nanoposts disposed at different positions in the first pixel correspondence region;
The plurality of nanoposts of the fourth pixel correspondence region include third nanoposts and fourth nanoposts disposed at different positions in the fourth pixel correspondence region;
the plurality of peripheral groups further includes a third peripheral group having the same chief ray angle as the first and second peripheral groups and a different azimuthal angle from the first and second peripheral groups;
The third peripheral group has an azimuth angle of 45 degrees from a reference line passing through the center of the image sensor,
A width of a first nanopost in a first pixel correspondence region in the third peripheral group is equal to a width of a third nanopost in a fourth pixel correspondence region in the third peripheral group;
A width of the first nanoposts of the first pixel correspondence region in the third peripheral group and a width of the third nanoposts of the fourth pixel correspondence region in the third peripheral group are greater than the widths of the corresponding nanoposts of the central group. , image sensor. an image sensor that converts an optical image into an electrical signal;
a processor controlling an operation of the image sensor and storing and outputting a signal generated by the image sensor; and
A lens assembly providing light from a subject to the image sensor;
The image sensor:
a sensor substrate including a plurality of first pixels sensing light of a first wavelength and a plurality of second pixels sensing light of a second wavelength different from the first wavelength; and
A color separation lens array including a plurality of first pixel corresponding regions respectively corresponding to the plurality of first pixels and a plurality of second pixel corresponding regions respectively corresponding to the plurality of second pixels;
The plurality of first pixel correspondence areas and the plurality of second pixel correspondence areas change the phase of the light of the first wavelength to condense the light of the first wavelength to each first pixel and adjust the phase of the light of the second wavelength. It is configured to condense light of the second wavelength to each second pixel by changing the
Each of the plurality of first pixel correspondence regions and the plurality of second pixel correspondence regions includes a plurality of nanoposts,
An electronic device in which at least one of the shape, width, and arrangement of the plurality of nanoposts of the plurality of first pixel corresponding regions is determined according to the azimuthal direction of the plurality of nanoposts in the peripheral portion surrounding the center of the color separation lens array. .

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