KR20220057410A - Image sensor including color separating lens array and electronic apparatus including the image sensor - Google Patents

Abstract

Disclosed are an image sensor having a color separation lens array, which comprises: a sensor substrate including a first pixel for sensing first wavelength light and a second pixel for sensing second wavelength light; and a color separation lens array for condensing the first wavelength light to the first pixel and condensing the second wavelength light to the second pixel among incident light. The color separation lens array includes: a first pixel corresponding region disposed at a position corresponding to the first pixel; and a second pixel corresponding region disposed at a position corresponding to the second pixel. The phase difference between the first wavelength light passing through the center of the first pixel corresponding region and the first wavelength light passing through the center of the second pixel corresponding region can be different from the phase difference between the second wavelength light passing through the center of the first pixel corresponding region and the second wavelength light passing through the center of the second pixel corresponding region. Therefore, the image sensor with improved light utilization efficiency and autofocus performance is provided.

Description

Image sensor including color separating lens array and electronic apparatus including the image sensor}

The present invention relates to an image sensor having a color separation lens array capable of separating and condensing incident light for each wavelength, and an electronic device including the image sensor.

The image sensor typically senses the color of incident light using a color filter. However, since the color filter absorbs light of a color other than the light of the corresponding color, light use efficiency may be reduced. For example, when an RGB color filter is used, since only 1/3 of incident light is transmitted and the remaining 2/3 is absorbed, the light utilization efficiency is only about 33%. Accordingly, in the case of a color display device or a color image sensor, most of the light loss occurs in the color filter.

Provided are an image sensor having improved light use efficiency and autofocusing performance by using a color separation lens array that can separate incident light for each wavelength and collect the light, and an electronic device including the image sensor.

An image sensor according to an exemplary embodiment may include a sensor substrate including a first pixel for sensing light of a first wavelength and a second pixel for sensing light of a second wavelength, and a first wavelength light among incident light a color separation lens array for condensing one pixel and condensing light of a second wavelength to a second pixel, wherein the color separation lens array includes a first pixel corresponding region and a second pixel disposed at positions corresponding to the first pixel a second pixel corresponding region disposed at a position corresponding to , the phase difference between the first wavelength light passing through the center of the first pixel corresponding region and the first wavelength light passing through the center of the second pixel corresponding region is It may be different from a phase difference between the second wavelength light passing through the center of the one-pixel-corresponding area and the second wavelength light passing through the center of the second pixel-corresponding area.

An image sensor according to another exemplary embodiment includes a sensor substrate including a first pixel for sensing light of a first wavelength and a second pixel for sensing light of a second wavelength, and a first wavelength light among incident lights. a color separation lens array including a first wavelength light condensing area for condensing to a pixel, and a second wavelength light condensing area for condensing light of a second wavelength to a second pixel, wherein an area of the first wavelength light converging area is larger than the area of the first pixel, the area of the second wavelength light collecting region is larger than the area of the second pixel, and the first focal length of the first wavelength light to the first wavelength light collecting area is in the second wavelength light collecting area It may be equal to the second focal length of the second wavelength light.

An image sensor according to another embodiment includes a sensor substrate including a first pixel for detecting light of a first wavelength and a second pixel for detecting light of a second wavelength, and a first wavelength light among incident lights. a color separation lens array including a first wavelength light condensing area for condensing the first pixel and a second wavelength light condensing area for condensing the second wavelength light onto a second pixel, the first wavelength light converging area The area of is larger than the area of the first pixel, the area of the second wavelength light collecting region is larger than the area of the second pixel, and the first wavelength light passing through the first wavelength light collecting area is the center of the first wavelength light collecting area has a phase distribution that is largest and decreases in a direction away from the center, and the second wavelength light that has passed through the second wavelength light collection region has a phase distribution that is greatest at the center of the second wavelength light collection region and decreases in a direction away from the center and the phase reduction rate of the light of the first wavelength may be different from that of the light of the second wavelength.

An image sensor according to another embodiment includes a sensor substrate including a first pixel for detecting light of a first wavelength and a second pixel for detecting light of a second wavelength, and a first wavelength light among incident lights. a color separation lens array including a first wavelength light condensing area for condensing the first pixel and a second wavelength light condensing area for condensing the second wavelength light onto a second pixel, the first wavelength light converging area The phase difference between the first wavelength light passing through the center of the first wavelength light and the first wavelength light passing through a position spaced apart by 1/2 the pixel pitch of the sensor substrate from the center of the first wavelength light converging region is that of the second wavelength light converging region It may be different from a phase difference between the second wavelength light passing through the center and the second wavelength light passing through a position spaced apart from the center of the second wavelength light converging region by 1/2 of the pixel pitch of the sensor substrate.

An electronic device according to an embodiment includes an image sensor that converts an optical image into an electrical signal, and a processor that controls operations of the image sensor, and stores and outputs a signal generated by the image sensor, wherein the image sensor includes a first A sensor substrate including a first pixel for sensing light of a wavelength, and a second pixel for sensing light of a second wavelength a color separation lens array including a region and a second wavelength light condensing region for condensing light of a second wavelength to a second pixel, wherein an area of the first wavelength light collecting region is larger than an area of the first pixel; The area of the two-wavelength light converging region is larger than the area of the second pixel, and the first focal length of the first wavelength light by the first wavelength light converging region is equal to the second focal length of the second wavelength light by the second wavelength light converging region and can be the same

Since the color separation lens array can separate and collect light by wavelength without absorbing or blocking incident light, the light use efficiency of the image sensor can be improved. In addition, the auto focus control performance may be improved by differently adjusting the focal length of the light collecting area included in the color separation lens array according to wavelengths.

1 is a block diagram of an image sensor according to an exemplary embodiment.
2A to 2C exemplarily show various pixel arrangements of a pixel array of an image sensor.
3A and 3B are conceptual views illustrating a schematic structure and operation of a color separation lens array according to an exemplary embodiment.
4A and 4B are diagrams for explaining the relationship between the wavelength and phase distribution of light and the focal length.
5A and 5B are schematic cross-sectional views viewed from different cross-sections of a pixel array of an image sensor according to an exemplary embodiment.
6A is a plan view schematically illustrating the arrangement of pixels in a pixel array, FIG. 6B is a plan view exemplarily illustrating a form in which a plurality of nanoposts are arranged in a plurality of regions of a color separation lens array, and FIG. 6C is a portion of FIG. 6B It is an enlarged and detailed plan view.
7A shows the phase distribution of green light and blue light passing through the color separation lens array along line I-I' of FIG. 6B, and FIG. 7B is the phase distribution of green light passing through the color separation lens array at the center of corresponding pixel regions. 7C is a view showing the phase at the center of the pixel-corresponding regions of the blue light passing through the color separation lens array.
7D exemplarily shows a traveling direction of green light incident to the first green light converging area, and FIG. 7E is a diagram illustrating an array of the first green light converging area.
FIG. 7F exemplarily shows a traveling direction of blue light incident to the blue light converging area, and FIG. 7G is a diagram exemplarily showing an array of the blue light converging area.
Fig. 8a shows the phase distribution of red light and green light passing through the color separation lens array along line II-II' of Fig. 6b, and Fig. 8b shows the phase at the center of the pixel corresponding regions of the red light passing through the color separation lens array. 8C is a view showing the phase at the center of the pixel-corresponding regions of green light passing through the color separation lens array.
FIG. 8D exemplarily shows a traveling direction of red light incident to the red light converging area, and FIG. 8E is a diagram exemplarily showing an array of the red light converging area.
8F exemplarily shows a traveling direction of green light incident to the second green light converging area, and FIG. 8G is a diagram illustrating an array of the second green light converging area.
9A to 9C are diagrams for explaining the relationship between a focal length of a light-converging area and an auto-focus function.
10 is a block diagram schematically illustrating an electronic device including an image sensor according to example embodiments.
11 is a block diagram schematically illustrating the camera module of FIG. 10 .
12 to 21 are views illustrating various examples of electronic devices to which image sensors are applied according to embodiments.

Hereinafter, an image sensor including a color separation lens array and an electronic device including the same will be described in detail with reference to the accompanying drawings. The described embodiments are merely exemplary, and various modifications are possible from these embodiments. In the following drawings, the same reference numerals refer to the same components, and the size of each component in the drawings may be exaggerated for clarity and convenience of description.

Hereinafter, the expression "upper" or "on" may include not only being directly above/below/left/right in contact, but also above/below/left/right in non-contact.

Terms such as first, second, etc. may be used to describe various components, but are used only for the purpose of distinguishing one component from other components. These terms do not limit the difference in the material or structure of the components.

The singular expression includes the plural expression unless the context clearly dictates otherwise. Also, when a part "includes" a certain component, it means that other components may be further included, rather than excluding other components, unless otherwise stated.

In addition, terms such as "...unit" and "module" described in the specification mean a unit that processes one or a plurality of functions or operations, which may be implemented as hardware or software, or a combination of hardware and software. there is.

The use of the term “above” and similar referential terms may be used in both the singular and the plural.

The steps constituting the method may be performed in any suitable order, unless expressly stated that they must be performed in the order described. In addition, the use of all exemplary terms (eg, etc.) is merely for describing the technical idea in detail, and unless limited by the claims, the scope of rights is not limited by these terms.

1 is a schematic block diagram of an image sensor according to an embodiment. Referring to FIG. 1 , the image sensor 1000 may include a pixel array 1100 , a timing controller 1010 , a row decoder 1020 , and an output circuit 1030 . The image sensor may be a charge coupled device (CCD) image sensor or a complementary metal oxide semiconductor (CMOS) image sensor.

The pixel array 1100 includes two-dimensionally arranged pixels along a plurality of rows and columns. The row decoder 1020 selects one row of the pixel array 1100 in response to a row address signal output from the timing controller 1010 . The output circuit 1030 outputs a light sensing signal from a plurality of pixels arranged along a selected row in column units. To this end, the output circuit 1030 may include a column decoder and an analog-to-digital converter (ADC). For example, the output circuit 1030 may include a plurality of ADCs respectively disposed for each column between the column decoder and the pixel array 1100 , or one ADC disposed at an output terminal of the column decoder. The timing controller 1010 , the row decoder 1020 , and the output circuit 1030 may be implemented as a single chip or as separate chips. A processor for processing an image signal output through the output circuit 1030 may be implemented as a single chip together with the timing controller 1010 , the row decoder 1020 , and the output circuit 1030 .

The pixel array 1100 may include a plurality of pixels for sensing light of different wavelengths. The arrangement of pixels may be implemented in various ways. For example, FIGS. 2A to 2C show various pixel arrangements of the pixel array 1100 of the image sensor 1000 .

First, FIG. 2A shows a Bayer pattern generally adopted in the image sensor 1000 . Referring to FIG. 2A , one unit pattern includes four quadrant regions, and the first to fourth quadrants have a blue pixel (B), a green pixel (G), a red pixel (R), and a green color, respectively. It may be a pixel (G). These unit patterns are two-dimensionally repeatedly arranged along the first direction (X direction) and the second direction (Y direction). In other words, two green pixels (G) are arranged in one diagonal direction in a unit pattern of a 2×2 array type, and one blue pixel (B) and one red pixel (R) are arranged in the other diagonal direction, respectively. is placed Looking at the overall pixel arrangement, a first row in which a plurality of green pixels (G) and a plurality of blue pixels (B) are alternately arranged in a first direction, and a plurality of red pixels (R) and a plurality of green pixels (G) Second rows alternately arranged along the first direction are repeatedly arranged along the second direction.

As the arrangement method of the pixel array 1100 , various arrangement methods other than the Bayer pattern are possible. For example, referring to FIG. 2B , a magenta pixel (M), a cyan pixel (C), a yellow pixel (Y), and a green pixel (G) are one unitized pattern. It is also possible to arrange the CYGM method constituting the Also, referring to FIG. 2C , an RGBW arrangement in which a green pixel (G), a red pixel (R), a blue pixel (B), and a white pixel (W) constitute one unit pattern is also possible. Also, although not shown, the unit pattern may have a 3×2 array shape. In addition, the pixels of the pixel array 1100 may be arranged in various ways according to color characteristics of the image sensor 1000 . Hereinafter, an example in which the pixel array 1100 of the image sensor 1000 has a Bayer pattern will be described, but the principle of operation may be applied to a pixel array other than the Bayer pattern.

The pixel array 1100 of the image sensor 1000 may include a color separation lens array for condensing light of a color corresponding to a specific pixel. 3A and 3B are conceptual views illustrating the structure and operation of a color separation lens array.

Referring to FIG. 3A , a color separation lens array (CSLA) may include a plurality of nanoposts NP that change the phase of incident light Li differently according to an incident position. The color separation lens array 1100 may be partitioned in various ways. For example, the first pixel-corresponding region R1 corresponding to the first pixel PX1 on which the first wavelength light L _λ1 included in the incident light Li is focused, and the second pixel-corresponding region R1 included in the incident light Li The wavelength light L _λ2 may be divided into a second pixel-corresponding region R2 corresponding to the second pixel PX2 on which the light L λ2 is focused. The first and second pixel-corresponding regions R1 and R2 may each include one or more nanoposts NP, and may be disposed to face the first and second pixels PX1 and PX2, respectively. As another example, the color separation lens array 1100 includes a first wavelength converging region L1 for condensing the first wavelength light L _λ1 to the first pixel PX1 and a second wavelength light L _λ2 for a second pixel It may be partitioned into a second wavelength converging region L2 condensing light to PX2 . A portion of the first wavelength converging region L1 and the second wavelength converging region L2 may overlap.

The color separation lens array CSLA forms different phase profiles in the first and second wavelength lights L _λ1 and L _λ2 included in the incident light Li, respectively, to form the first wavelength light L _λ1 . may be focused on the first pixel PX1 , and the second wavelength light L _λ2 may be focused on the second pixel PX2 .

For example, referring to FIG. 3B , the color separation lens array CSLA has a first wavelength at a position immediately after passing through the color separation lens array CSLA, that is, at a lower surface position of the color separation lens array CSLA. The light L _λ1 has the first phase distribution PP1 and the second wavelength light L _λ2 has the second phase distribution PP2 so that the first and second wavelength lights L _λ1 and L _λ2 are The light may be focused on the corresponding first and second pixels PX1 and PX2, respectively. Specifically, the first wavelength light (L _λ1 ) passing through the color separation lens array CSLA is greatest at the center of the first pixel correspondence region R1, and in a direction away from the center of the first pixel correspondence region R1 , that is, it may have a phase distribution PP1 that decreases in the direction of the second pixel corresponding region R2. Such a phase distribution is a convex lens, for example, a micro-convex center disposed in the first wavelength converging region L1. Similar to the phase distribution of light passing through the lens and converging to a point, the first wavelength light L _λ1 may be focused on the first pixel PX1. The two-wavelength light L _λ2 is greatest at the center of the second pixel-corresponding region R2 and decreases in a direction away from the center of the second pixel-corresponding region R2, that is, in the first pixel-corresponding region R1 direction. Due to the distribution PP2 , the second wavelength light L _λ2 may be focused on the second pixel PX2 .

Since the refractive index of a material appears differently depending on the wavelength of the light it reacts to, as shown in FIG. 3B , the color separation lens array CSLA provides different phase distributions for the first and second wavelength lights L _λ1 and L _λ2 . can do. In other words, even for the same material, a different phase distribution may be formed for each wavelength because the refractive index is different depending on the wavelength of the light reacting with the material, and the phase delay experienced by light when it passes through the material is also different for each wavelength. For example, the refractive index of the first wavelength light L _λ1 of the first pixel correspondence region R1 and the refractive index of the second wavelength light L _λ2 of the first pixel correspondence region R1 may be different from each other, , the phase delay experienced by the first wavelength light L _λ1 passing through the first pixel correspondence region R1 is different from the phase delay experienced by the second wavelength light L _λ2 passing through the first pixel correspondence region R1 Therefore, if the color separation lens array CSLA is designed in consideration of such characteristics of light, different phase distributions may be provided for the first and second wavelength lights L _λ1 and L _λ22 .

The color separation lens array (CSLA) is a nanopost (NP) arranged in a specific order so that the first and second wavelength lights (L _λ1 , L _λ2 ) have first and second phase distributions (PP1, PP2), respectively. may include Here, the rule is applied to parameters such as the shape, size (width, height), spacing, and arrangement of the nanoposts (NP), and these parameters are the phase to be implemented through the color separation lens array (CSLA). It may be determined according to the distribution (Phase Profile).

A rule for disposing the nanoposts NP in the first pixel-corresponding region R1 and a rule for disposing the nanoposts NP in the second pixel-corresponding region R2 may be different from each other. In other words, the size, shape, spacing, and/or arrangement of the nano-posts NP provided in the first pixel-corresponding region R1 is the size and shape of the nano-posts NP provided in the second pixel-corresponding region R2 . , spacing and/or arrangement may be different.

The nanopost NP may have a cross-sectional diameter of sub-wavelength. Here, the sub-wavelength refers to a wavelength smaller than the wavelength band of the branch light. The nanoposts NP may have a smaller dimension than, for example, a shorter wavelength of the first wavelength and the second wavelength. When the incident light Li is visible light, the diameter of the cross-section of the nanoposts NP may have a dimension smaller than, for example, 400 nm, 300 nm, or 200 nm. On the other hand, the height of the nano-post (NP) may be 500 nm to 1500 nm, the height may be greater than the diameter of the cross-section. Although not shown, the nanopost NP may be a combination of two or more posts stacked in the height direction (Z direction).

The nanopost (NP) may be made of a material having a higher refractive index than that of a surrounding material. For example, nanoposts (NPs) may include c-Si, p-Si, a-Si and III-V compound semiconductors (GaP, GaN, GaAs, etc.), SiC, TiO2, SiN, and/or combinations thereof. can The nanopost NP having a refractive index difference from that of the surrounding material may change the phase of light passing through the nanopost NP. This is due to a phase delay caused by the shape dimension of the sub-wavelength of the nanopost (NP), and the degree of the phase delay is determined by the detailed shape dimension, arrangement, and the like of the nanopost (NP). The material surrounding the nanoposts (NP) may be made of a dielectric material having a lower refractive index than that of the nanoposts (NP). For example, the surrounding material may include SiO2 or air.

The first wavelength λ1 and the second wavelength λ2 may be infrared and visible wavelength bands, but are not limited thereto, and may operate at various wavelengths according to the arrangement rule of the array of the plurality of nanoposts NP. In addition, although the example in which two wavelengths are diverged and condensed has been exemplified, incident light may be converged by being diverged in three or more directions according to wavelengths.

In addition, although the case where the color separation lens array CSLA is one layer has been described as an example, the color separation lens array CSLA may have a structure in which a plurality of layers are stacked. For example, the first layer can be designed to focus visible light on a specific pixel, and the second layer can be designed to focus infrared light on other pixels.

4A and 4B are diagrams for explaining the relationship between the wavelength and phase distribution of light and the focal length.

Referring to FIG. 4A , first to third focal lengths f1 , f2 , and f3 of three different wavelengths of light having the same phase distribution are illustrated. That is, at the position immediately after the 540 nm, 450 nm, and 630 nm wavelength light passes through the first to third wavelength light collecting regions L1, L2, and L3 of the color separation lens array, each of the light collecting regions L1, L2, and L3 When the phase distribution is 2π at the center and decreases to π in the direction away from the center, focal lengths for each wavelength are shown. Specifically, 540 nm light is collected at a first focal length f1 by a first phase distribution PPa that decreases from 2π to π, and 450 nm light has a second phase distribution equal to the first phase distribution PPa (PPa). PPb) at a second focal length f2 longer than the first focal length f1, and 630 nm light is collected at a first focal length f2 by a third phase distribution PPc equal to the first phase distribution PPa. f1) may be collected at a shorter third focal length f3. In other words, when the phase distributions are the same, the focal length may be inversely proportional to the wavelength. Accordingly, in order for each of the light collecting regions L1, L2, and L3 to have the same focal length for incident light of different wavelengths, the color separation lens array 130 provides a phase distribution with a different phase reduction rate in the X direction for each wavelength. shall.

FIG. 4B is a diagram for explaining a phase distribution of a light collecting area such that incident light of different wavelengths has the same focal length.

Referring to FIG. 4B , the phase distributions PPa, PPb', and PPc' of three different wavelengths of light having the same focal length are shown. The first phase distribution PPa of the 540 nm wavelength light of FIG. 4B is the same as that described in FIG. 4A , and the 540 nm wavelength light has a first focal length f1.

The 450 nm light of FIG. 4B may have a second 'focal length f2' that is shorter than the second focal length f2 of FIG. 4A . In order to reduce the focal length, the second 'phase distribution PPb' may be greater than the X-direction phase reduction rate compared to the second phase distribution PPb of FIG. 4A . In other words, the second phase distribution PPb of FIG. 4A is 2π at the center of the second light collecting region L2 and decreases by π in a direction away from the center by π, whereas the second phase distribution PPb′ of FIG. 4B is 2π. ) may be 2π at the center of the second light collecting area L2 and may decrease by 1.2π to 0.8π in a direction away from the center. As the reduction rate of the second 'phase distribution PPb' increases, the second' focal length f2' of the second wavelength converging region L2' for the light of the second wavelength of FIG. 4B may be shortened, The second focal length f2' may be designed to be equal to the first focal length f1.

Meanwhile, the 630 nm light of FIG. 4B may have a third focal length f3 ′ longer than the third focal length f3 of FIG. 4A . In order to increase the focal length, the phase reduction rate in the X-direction from the center of the light collecting area may be reduced. can be small In other words, the third phase distribution PPc of FIG. 4A is 2π at the center of the third wavelength converging region L3 and decreases by π to π in the direction away from the center, whereas the third phase distribution PPc of FIG. 4B is 2π. ') is 2π at the center of the third wavelength converging region L3 and may decrease only by 0.8π up to 1.2π in a direction away from the center. As the phase reduction rate of the 3' phase distribution PPc' becomes smaller than that of the third phase distribution PPc, the 3' focal length of the 3' wavelength condensing region L3' for the light of the third wavelength of FIG. 4B (f3') may be increased, and the third focal length f3' may be designed to be equal to the first focal length f1.

Hereinafter, an example in which the aforementioned color separation lens array 130 is applied to the pixel array 1100 of the image sensor 1000 will be described in more detail.

5A and 5B are schematic cross-sectional views viewed from different cross-sections of the pixel array 1100 of the image sensor 1000 according to an exemplary embodiment, and FIG. 6A is a diagram of a pixel in the pixel array 1100 of the image sensor 1000 according to an exemplary embodiment. It is a plan view schematically showing the arrangement, and FIG. 6B is a plan view exemplarily showing a form in which a plurality of nanoposts are arranged in a plurality of regions of a color separation lens array in the pixel array 1100 of the image sensor 1000, and FIG. 6C is It is a plan view showing a part of FIG. 6B in detail by magnifying it.

5A and 5B , the pixel array 1100 of the image sensor 1000 includes a sensor substrate 110 including a plurality of pixels 111 , 112 , 113 , and 114 sensing light, and a sensor substrate 110 . ), a transparent spacer layer 120 disposed on the spacer layer 120 , and a color separation lens array 130 disposed on the spacer layer 120 .

The sensor substrate 110 may include a first green pixel 111 , a blue pixel 112 , a red pixel 113 , and a second green pixel 114 that convert light into an electrical signal, and the first green pixel In a cross section in which (111) and blue pixels 112 are alternately arranged in the first direction (X-direction) and the positions of Y-directions are different, as shown in FIG. 5B , the red pixel 113 and the second green pixel ( 114) may be alternately arranged. FIG. 6A shows the arrangement of pixels when the pixel array 1100 of the image sensor 1000 has a Bayer pattern arrangement as shown in FIG. 2A . This arrangement is for sensing incident light by dividing it into a unit pattern such as a Bayer pattern. For example, the first and second green pixels 111 and 114 sense green light, and the blue pixel 112 senses blue light. and the red pixel 113 may sense red light. Although not shown, a separator for cell separation may be further formed at the cell boundary.

Referring to FIG. 6A , all or part of the pixels 111 , 112 , 113 , and 114 may include two or more photo-sensing cells, and a pixel including two or more photo-sensing cells may be an auto-focus pixel. there is. The logic circuit of the image sensor 1000 uses the difference between signals obtained from each photo-sensing cell included in the auto-focus pixel to automatically focus the image sensor 1000 and/or the camera device including the image sensor 1000 . function can be implemented. In order to accurately calculate a difference between output signals of two or more photo-sensing cells included in one pixel, the auto-focus pixel may include an internal separation film for separating the photo-sensing cells. Since the photo-sensing cells are separated from each other by the internal separation film of the pixel, a separate signal can be output. 5A and 5B, when all of the green, blue, and red pixels 111, 112, 113, and 114 include two photo-sensing cells, for example, the first green pixel 111 is 1-1 and 1-2 green light detection cells 111a and 111b are included, the blue pixel 112 includes first and second blue light detection cells 112a and 112b, and the red pixel 113 includes the first and second blue light detection cells 112a and 112b. A case in which first and second red light sensing cells 113a and 113b are included and the second green pixel 114 includes 2-1 and 2-2 green light sensing cells 114a and 114b will be described as an example.

0의 파장에 대한 스페이서층(120)의 굴절률을 n, 화소의 피치를 p라고 할 때, 다음의 [수학식 1]로 표시될 수 있다.The spacer layer 120 is disposed between the sensor substrate 110 and the color separation lens array 130 to maintain a constant distance between the sensor substrate 110 and the color separation lens array 130 . The spacer layer 120 is a dielectric material that is transparent to visible light, for example, SiO2, siloxane-based spin on glass (SOG), etc., has a lower refractive index than nanoposts (NP) and has a low absorption in the visible light band. It can be made of material. The thickness h of the spacer layer 120 may be selected within the range of ht - p ≤ h ≤ ht + p. Here, the theoretical thickness ht of the spacer layer 120 is

When the refractive index of the spacer layer 120 with respect to the wavelength of 0 is n and the pixel pitch is p, it can be expressed by the following [Equation 1].

The theoretical thickness ht of the spacer layer 120 may mean a focal length at which light having a wavelength of λ 0 is focused on the upper surfaces of the pixels 111 , 112 , 113 and 114 by the color separation lens array 130 . there is. λ0 may be a reference wavelength for determining the thickness h of the spacer layer 120 , and the thickness of the spacer layer 120 may be designed based on 540 nm, which is the central wavelength of green light.

The color separation lens array 130 is supported by the spacer layer 120 , is disposed between the nanoposts NP and the nanoposts NP that change the phase of incident light, and has a refractive index lower than that of the nanoposts NP. a dielectric such as air or SiO2.

Referring to FIG. 6B , the color separation lens array 130 may be divided into four regions 131 , 132 , 133 , and 134 corresponding to the pixels 111 , 112 , 113 , and 114 of FIG. 6A . The first green pixel-corresponding region 131 corresponds to the first green pixel 111 and may be disposed on the first green pixel 111 , the blue pixel-corresponding region 132 corresponds to the blue pixel 112 , and It may be disposed on the blue pixel 111 , the red pixel-corresponding region 133 may correspond to the red pixel 113 and may be disposed on the red pixel 111 , and the second green pixel-corresponding region 134 may include: It corresponds to the second green pixel 114 and may be disposed on the second green pixel 114 . That is, the pixel corresponding regions 131 , 132 , 133 , and 134 of the color separation lens array 130 may be disposed to face each of the pixels 111 , 112 , 113 , and 114 of the sensor substrate 110 . The pixel-corresponding regions 131 , 132 , 133 , and 134 include a first row in which the first green pixel-corresponding regions and the blue pixel-corresponding regions 131 and 132 are alternately arranged, and the red pixel-corresponding region and the second green pixel-corresponding region 133 . , 134) may be two-dimensionally arranged along the first direction (X-direction) and the second direction (Y-direction) so that the second rows alternately repeated with each other. The color separation lens array 130 also includes a plurality of two-dimensionally arranged unit patterns like the sensor substrate 110 , and each unit pattern has pixel-corresponding regions 131 , 132 , and 133 arranged in a 2×2 shape. , 134).

Meanwhile, the color separation lens array 130 may be divided into a green light condensing area for condensing green light, a blue light condensing area for condensing blue light, and a red light condensing area for condensing red light, similar to that described with reference to FIG. 3B .

In the color separation lens array 130 , green light is branched and condensed to the first and second green pixels 111 and 114 , blue light is branched to and collected by the blue pixel 112 , and red light is branched to the red pixel 113 . It may include nanoposts (NPs) having a size, shape, spacing, and/or arrangement so as to be condensed. Meanwhile, the thickness (Z direction) of the color separation lens array 130 may be similar to the height of the nanoposts NP, and may be 500 nm to 1500 nm.

Referring to FIG. 6B , the pixel-corresponding regions 131 , 132 , 133 , and 134 may include cylindrical nanoposts NP having a circular cross-section, and at the center of each region, nanoposts having different cross-sectional areas ( NP) may be disposed, and nanoposts NP may also be disposed at the intersection of the center on the boundary line between pixels and the boundary line between pixels. A cross-sectional area of the nanoposts NP disposed at the boundary between pixels may be smaller than that of the nanoposts NP disposed at the center of the pixel.

FIG. 6C shows the arrangement of the nanoposts NP included in the partial area of FIG. 6B , that is, the pixel corresponding areas 131 , 132 , 133 , and 134 constituting the unit pattern in detail. In FIG. 6c , the nanoposts (NPs) are indicated by p1 to p9 according to detailed positions. Referring to FIG. 6C , among the nanoposts NP, the nanopost p1 disposed in the center of the first green pixel corresponding area 131 and the nanopost disposed in the center of the second green pixel corresponding area 134 . The cross-sectional area of (p4) is larger than the cross-sectional area of the nanoposts p2 disposed in the center of the blue pixel-corresponding region 132 or the nanoposts p3 disposed in the center of the red pixel-corresponding region 133, and the blue pixel-corresponding region The cross-sectional area of the nano-posts p2 disposed at the center of 132 is larger than the cross-sectional area of the nano-posts p3 disposed at the center of the red pixel-corresponding region 133 . However, this is only an example, and nanoposts (NPs) of various shapes, sizes, and arrangements may be applied as needed.

The nanoposts NPs provided in the first and second green pixel-corresponding regions 131 and 134 may have different distribution rules in the first direction (X-direction) and the second direction (Y-direction). For example, the nanoposts NPs disposed in the first and second green pixel corresponding regions 131 and 134 may have different size arrangements along the first direction (X direction) and the second direction (Y direction). there is. As shown in FIG. 6C , among the nanoposts NPs, the nanoposts positioned at the boundary between the first green pixel corresponding region 131 and the blue pixel corresponding region 132 adjacent in the first direction (X direction). The cross-sectional area of the nanoposts p6 positioned at the boundary between the red pixel-corresponding region 133 adjacent in the second direction (Y direction) and the cross-sectional area of (p5) are different from each other. Similarly, in the second direction (Y direction) and the cross-sectional area of the nanopost p7 positioned at the boundary between the second green pixel corresponding region 134 and the red pixel corresponding region 133 adjacent in the first direction (X direction) The cross-sectional areas of the nanoposts p8 positioned at the boundary with the adjacent blue pixel-corresponding region 132 are different from each other.

On the other hand, the nanoposts NPs disposed in the blue pixel-corresponding region 132 and the red pixel-corresponding region 133 may have a symmetrical distribution rule in the first direction (X-direction) and the second direction (Y-direction). there is. As shown in FIG. 6C , among the nanoposts NP, the nanopost p5 and the second direction (Y direction) disposed at the boundary between the blue pixel correspondence region 132 and the pixels adjacent in the first direction (X direction) and the second direction (Y direction) ), the cross-sectional areas of the nanoposts p8 placed at the boundary between adjacent pixels are the same as each other, and also in the red pixel corresponding region 133 , the nanoposts p7 placed at the boundary between adjacent pixels in the first direction (X direction) and The cross-sectional areas of the nanoposts p6 lying at the boundary between pixels adjacent in the second direction (Y direction) are the same.

Meanwhile, the nanoposts p9 disposed at four corners of each of the pixel-corresponding regions 131 , 132 , 133 , and 134 , that is, at positions where the four regions intersect, have the same cross-sectional area.

This distribution is due to the pixel arrangement of the Bayer pattern. In both the blue pixel 112 and the red pixel 113 , pixels adjacent in the first direction (X direction) and the second direction (Y direction) are the same as green pixels 111 and 114 , while the first green pixel 111 is the same as the first green pixel 111 . A pixel adjacent in the first direction (X-direction) is the blue pixel 112 , the pixel adjacent in the second direction (Y-direction) is the red pixel 113 , and the second green pixel 114 is different from each other in the first direction ( A pixel adjacent in the X direction is a red pixel 113 , and a pixel adjacent in the second direction (Y direction) is a blue pixel 114 . In the first and second green pixels 111 and 114 , pixels adjacent in four diagonal directions are green pixels, and in the blue pixel 112 , pixels adjacent in four diagonal directions are the same as red pixels 113 . In the pixel 113 , pixels adjacent in four diagonal directions are the same as the blue pixel 112 . Accordingly, in the blue and red pixel corresponding regions 132 and 133 corresponding to the blue pixel 112 and the red pixel 113 , the nanoposts NP are arranged in the form of 4-fold symmetry, and the second In the first and second green pixel corresponding regions 131 and 134 , the nanoposts NPs may be arranged in the form of 2-fold symmetry. In particular, the first and second green pixel corresponding regions 131 and 134 are rotated by 90 degrees with respect to each other.

Although the nanoposts NP of FIGS. 6B and 6C are all shown to have a symmetrical circular cross-sectional shape, some nanoposts having an asymmetrical cross-sectional shape may be included. For example, nanoposts having asymmetric cross-sectional shapes having different widths in the first direction (X direction) and the second direction (Y direction) are employed in the first and second green pixel corresponding regions 131 and 134 , Nanoposts having a symmetrical cross-sectional shape having the same width in the first direction (X-direction) and the second direction (Y-direction) may be employed in the blue and red pixel-corresponding regions 132 and 133 .

The arrangement rule of the nanoposts (NP) described above is an example, and is not limited to the illustrated pattern.

FIG. 7A shows the phase distributions of green light and blue light passing through the color separation lens array 130 along line I-I' of FIG. 6B , and FIG. 7B is a pixel-corresponding region of green light passing through the color separation lens array 130 . The phases at the centers of the fields 131 , 132 , 133 and 134 are shown, and FIG. 7C shows the phases at the centers of the pixel-corresponding regions 131 , 132 , 133 , and 134 of the blue light passing through the color separation lens array 130 . see. The phase distributions of the green light and the blue light of FIG. 7A are similar to the phase distributions of the light of the first and second wavelengths exemplarily described with reference to FIG. 3B .

Referring to FIGS. 7A and 7B , the green light passing through the color separation lens array 130 is greatest at the center of the first green pixel corresponding area 131 , and in a direction away from the center of the first green pixel corresponding area 131 . It may have a phase distribution that decreases to . Specifically, at a position immediately after passing through the color separation lens array 130 , that is, on the lower surface of the color separation lens array 130 or the upper surface of the spacer layer 120 , the phase of green light is the first green pixel corresponding region It is largest at the center of 131 and gradually decreases in the form of concentric circles as it moves away from the center of the first green pixel correspondence region 131 , and in the X and Y directions, the blue and red pixel correspondence regions 132 and 133 are formed. It becomes the minimum at the center and becomes the minimum at the contact point of the 1st green pixel correspondence area|region 131 and the 2nd green pixel correspondence area|region 134 in the diagonal direction. If the phase of green light emitted from the center of the first green pixel-corresponding region 131 is set to be 2π, the center of the blue and red pixel-corresponding regions 132 and 133 has a phase of 0.9π to 1.1π, and the second green pixel corresponds to the phase. Light having a phase of 2π from the center of the region 134 and having a phase of 1.1 π to 1.5 π may be emitted from a contact point between the first green pixel-corresponding region 131 and the second green pixel-corresponding region 134 . Meanwhile, the first green light phase distribution PPG1 does not mean that the phase delay amount of light passing through the center of the first green pixel corresponding region 131 is the largest, and the phase of light passing through the first green pixel corresponding region 131 . When is set to 2π, if the phase delay of light passing through another position is larger and has a phase value greater than 2π, it may be a value remaining after removing 2nπ, that is, a distribution of a wrapped phase. For example, if the phase of light passing through the first green pixel corresponding region 131 is 2π, and the phase of light passing through the center of the blue pixel corresponding region 132 is 3π, then in the blue pixel corresponding region 132 . The phase of may be the remaining π after removing 2π (when n=1) from 3π.

Referring to FIGS. 7A and 7C , the blue light passing through the color separation lens array 130 is greatest at the center of the blue pixel-corresponding region 132 and decreases in phase away from the center of the blue pixel-corresponding region 132 . can have a distribution. Specifically, the phase of blue light at a position immediately after passing through the color separation lens array 130 is greatest at the center of the blue pixel corresponding region 132 , and has a concentric circle shape as it moves away from the center of the blue pixel corresponding region 132 . gradually decreases, and becomes a minimum at the center of the first and second green pixel correspondence areas 131 and 134 in the X and Y directions, and becomes a minimum at the center of the red pixel correspondence area 133 in the diagonal direction. . If the phase of blue light at the center of the blue pixel-corresponding region 132 is 2π, the phase at the center of the first and second green pixel-corresponding regions 131 and 134 may be, for example, 0.5π to 0.9π, , a phase at the center of the red pixel-corresponding region 133 may be a value smaller than a phase at the center of the first and second green pixel-corresponding regions 131 and 134 , for example, 0.2π to 0.8π.

The phase distribution PPB of the blue light is different from the first phase distribution PPG1 of the green light described above, because, as described in FIGS. 3A and 3B , the focal length of the blue light by the color separation lens array 130 is changed to the green light. This is because the color separation lens array 130 is designed to be similar to the focal length of . When the thickness of the spacer layer 120 is determined based on the focal length of the green light, the green light and the blue light can be focused at the same distance by adjusting the focal length of the blue light to be similar to the focal length of the green light, and thus, the blue pixel 112 When ) is an auto-focus pixel including two or more photo-sensing cells, auto-focus control performance may be improved. The corrected focal length of the blue light may be 90% to 110% or 95% to 105% of the focal length of the green light.

Comparing the first phase distribution PPG1 of the green light and the phase distribution PPB of the blue light, the phase of the green light passing through the center of the first green pixel corresponding area 131 and the green light passing through the center of the blue pixel corresponding area 132 are compared. The phase difference of one green light may be smaller than the phase difference between the phase of the blue light passing through the center of the blue pixel corresponding area 132 and the blue light passing through the center of the first green pixel corresponding area 131 , for example, It can be as small as 0.1 pi to 0.6 pi.

In other words, the first phase distribution (PPG1) of the green light and the phase distribution (PPB) of the blue light by the color separation lens array 130 are different from each other, and the phase reduction rate for the X direction of the blue light with respect to the X direction of the green light greater than the phase reduction rate.

In addition, the phase difference between the phase of green light passing through the center of the first green pixel corresponding region 131 and the green light passing through the center of the blue pixel corresponding region 132 is the difference between the phases of green light passing through the center of the blue pixel corresponding region 132 . The phase difference between the phase of the blue light and the blue light passing through the center of the first green pixel corresponding region 131 may be 60% to 90%.

7D exemplarily shows a traveling direction of green light incident to the first green light converging region, and FIG. 7E exemplarily shows an array of the first green light converging region.

As shown in FIG. 7D , the green light incident around the first green pixel-corresponding region 131 is condensed to the first green pixel 111 by the color separation lens array 130 , and the first green pixel 111 . In addition to the first green pixel-corresponding region 131 , green light coming from the blue and red pixel-corresponding regions 132 and 133 is incident on the . That is, the phase distribution of green light described with reference to FIGS. 7A and 7B is the center of two blue pixel-corresponding regions 132 and two red pixel-corresponding regions 133 adjacent to the first green pixel-corresponding region 131 while having one side facing each other. The green light passing through the first green light converging region GL1 connected to , is condensed onto the first green pixel 111 . Accordingly, as illustrated in FIG. 7E , the color separation lens array 130 may operate as an array of the first green light collecting area GL1 condensing green light to the first green pixel 111 . The first green light converging area GL1 has an area larger than that of the corresponding first green pixel 111 , and may be, for example, 1.2 times to 2 times larger than that of the corresponding first green pixel 111 .

7F exemplarily shows a traveling direction of blue light incident to the blue light converging region, and FIG. 7G exemplarily shows an array of the blue light converging region.

The blue light is focused to the blue pixel 112 by the color separation lens array 130 as shown in FIG. 7F , and the blue light from the pixel corresponding regions 131 , 132 , 133 and 134 is incident to the blue pixel 112 . The phase distribution of the blue light described in FIGS. 7A and 7C has the blue light passing through the blue light collecting area BL made by connecting the centers of the four adjacent red pixel corresponding areas 133 with vertices facing the blue pixel corresponding area 132 . is focused on the blue pixel 112 . Accordingly, as shown in FIG. 7G , the color separation lens array 130 may operate as a blue light converging area BL array for condensing blue light to the blue pixel 112 . The blue light collecting area BL has a larger area than the corresponding blue pixel 112 , and may be, for example, 1.5 to 4 times larger. A partial area of the blue light collecting area BL may overlap the first and second green light collecting areas GL1 and GL2 and the red light collecting area RL.

Comparing the phase distribution of green light passing through the first green light converging area GL1 and the phase distribution of blue light passing through the blue light converging area BL, the green light passing through the center of the first green light converging area GL1 and the second 1 A position spaced apart from the center of the green light collecting region GL1 by the pixel pitch of the sensor substrate, for example, a phase difference of green light passing through the center of the blue pixel corresponding region 132 is the center of the blue light collecting region BL A position spaced apart by the pixel pitch of the sensor substrate from the center of the blue light passing through and the blue light collecting area BL, for example, may be smaller than a phase difference between the blue light passing through the center of the first green light corresponding area 131 . Similarly, green light passing through the center of the first green light collecting area GL1 and 1/2 of the pixel pitch of the sensor substrate 110 from the center of the first green light collecting area GL1 (ie, half of the pixel pitch) The phase difference of the green light passing through the center of the tangent line of the first green pixel corresponding region 131 and the blue pixel corresponding region 132, for example, is the same as the phase difference of the green light passing through the center of the blue light collecting region BL. A position spaced apart by 1/2 of the pixel pitch of the sensor substrate 110 from the center of the blue light and blue light collecting area BL, for example, the first green pixel corresponding area 131 and the blue pixel corresponding area 132 . It may be smaller than the phase difference of the blue light passing through the center of the tangent line.

FIG. 8A shows the phase distributions of red light and green light passing through the color separation lens array 130 along line II-II' of FIG. 6B , and FIG. 8B is a pixel-corresponding region of red light passing through the color separation lens array 130 . The phases at the centers of the fields 131 , 132 , 133 and 134 are shown, and FIG. 8C shows the phases at the centers of the pixel-corresponding regions 131 , 132 , 133 and 134 of the green light passing through the color separation lens array 130 . see.

Referring to FIGS. 8A and 8B , the red light passing through the color separation lens array 130 is greatest at the center of the red pixel corresponding region 133 , and the phase decreases in a direction away from the center of the red pixel corresponding region 133 . can have a distribution. Specifically, the phase of red light at a position immediately after passing through the color separation lens array 130 is greatest at the center of the red pixel corresponding area 133 , and has a concentric circle shape as it moves away from the center of the red pixel corresponding area 133 . gradually decreases, and becomes a minimum at the center of the first and second green pixel correspondence areas 131 and 134 in the X and Y directions, and becomes a minimum at the center of the blue pixel correspondence area 132 in the diagonal direction. . If the phase of the red light at the center of the red pixel-corresponding region 133 is 2π, the phase at the center of the first and second green pixel-corresponding regions 131 and 134 may be, for example, 1.1π to 1.5π, , a phase at the center of the blue pixel-corresponding region 132 may be a value smaller than a phase at the center of the first and second green pixel-corresponding regions 131 and 134 , for example, 1.3π to 0.9π.

The phase distribution (PPR) of the red light is different from the first phase distribution (PPG1) of the green light described above, because as described in FIGS. 3A and 3B , the focal length of the red light by the color separation lens array 130 is changed to the green light. This is because the color separation lens array 130 is designed to be similar to the focal length of . When the thickness of the spacer layer 120 is determined based on the focal length of the green light, the focal length of the red light is also adjusted to be similar to the focal length of the green light, so that the green light and the red light can be focused at the same distance. In the case of an auto-focus pixel including two or more photo-sensing cells, auto-focusing performance may be improved. The corrected focal length of the red light may be 90% to 110% or 95% to 105% of the focal length of the green light.

Referring to FIGS. 8A and 8C , the green light passing through the color separation lens array 130 is greatest at the center of the second green pixel corresponding area 134 , and in a direction away from the center of the second green pixel corresponding area 134 . It may have a phase distribution that decreases to . Comparing the first phase distribution PPG1 of the green light of FIG. 7A and the second phase distribution PPG2 of the green light of FIG. 8A , the second phase distribution PPG2 of the green light is the first phase distribution PPG1 of the green light X It is equivalent to a parallel movement by one pixel pitch in the direction and the Y direction. That is, the first phase distribution PPG1 of the green light has the largest phase at the center of the first green pixel correspondence area 131 , while the second phase distribution PPG2 of the green light corresponds to the first green pixel correspondence area 131 . The phase is greatest at the center of the second green pixel correspondence region 131 that is separated by one pixel pitch in the X and Y directions from the center. The phase distributions of FIGS. 7B and 8C showing phases at the centers of the pixel corresponding regions 131 , 132 , 133 , and 134 may be the same. Once again, when the phase distribution of green light is described with reference to the second green pixel corresponding region 134 , if 2π is set as the reference phase of the light emitted from the center of the second green pixel corresponding region 131 of green light, blue and red The phase is 0.9π to 1.1π at the center of the pixel corresponding regions 132 and 133, the phase is 2π at the center of the first green pixel corresponding region 131, and the first green pixel corresponding region 131 and the second green pixel corresponding region ( 134), light having a phase of 1.1 π to 1.5 π may be emitted.

Comparing the phase distribution PPR of the red light and the second phase distribution PPG2 of the green light, the phase of the green light passing through the center of the second green pixel corresponding region 134 and the phase of the green light passing through the center of the red pixel corresponding region 133 are compared. A phase difference of one green light may be greater than a phase difference between a phase of red light passing through the center of the red pixel correspondence area 133 and a phase difference of red light passing through the center of the second green pixel correspondence area 134 , for example, It can be as large as 0.1 pi to 0.5 pi.

In other words, the second phase distribution (PPG2) of the green light and the phase distribution (PPR) of the red light by the color separation lens array 130 are different from each other, and the phase reduction rate for the X direction of the green light is the X direction of the red light. greater than the phase reduction rate.

In addition, the phase difference between the phase of green light passing through the center of the second green pixel corresponding region 134 and the green light passing through the center of the red pixel corresponding region 133 is the difference between the phases of the green light passing through the center of the red pixel corresponding region 133 . The phase difference between the phase of the red light and the red light passing through the center of the second green pixel corresponding region 134 may be 110% to 150%.

FIG. 8D exemplarily shows the propagation direction of the red light incident to the red light converging area, and FIG. 8E exemplarily shows the array of the red light converging area.

The red light is focused to the red pixel 113 by the color separation lens array 130 as shown in FIG. 8D , and the red light from the pixel corresponding regions 131 , 132 , 133 and 134 is incident to the red pixel 113 . The red light passing through the red light converging region RL formed by connecting the centers of the four adjacent blue pixel-corresponding regions 133 with the red pixel-corresponding region 133 and the red pixel-corresponding region 133 having vertices in the phase distribution described above in FIGS. 8A and 8B . is focused on the red pixel 113 . Accordingly, as shown in FIG. 8E , the color separation lens array 130 may operate as a red light converging region RL array for condensing red light to a red pixel. The red light converging region RL has a larger area than the corresponding red pixel 113 , and may be, for example, 1.5 to 4 times larger than that of the corresponding red pixel 113 . A portion of the red light collecting area RL may overlap the first and second green light collecting areas GL1 and GL2 and the blue light collecting area BL.

8F exemplarily shows a traveling direction of green light incident to the second green light converging area, and FIG. 8G exemplarily shows an array of the second green light converging area.

8F and 8G , the green light incident around the second green pixel corresponding area 134 proceeds similarly to that described for the green light incident around the first green pixel corresponding area 131, and in FIG. 8F As illustrated, the light is focused on the second green pixel 114 . Accordingly, as shown in FIG. 8G , the color separation lens array 130 may operate as an array of the second green light collecting area GL2 condensing green light to the second green pixel 114 . The second green light converging area GL2 has an area larger than that of the corresponding second green pixel 114 , and may be, for example, 1.2 times to 2 times larger than that of the corresponding second green pixel 114 .

Comparing the phase distribution of the green light passing through the second green light converging region GL2 and the phase distribution of the red light passing through the red light converging region RL, the green light passing through the center of the second green light converging region GL2 and the second 2 A position spaced apart by the pixel pitch of the sensor substrate 110 from the center of the green light collecting region GL2, for example, a phase difference of green light passing through the center of the red pixel corresponding region 133 is ), a position spaced apart from the center of the red light collecting region RL by the pixel pitch of the sensor substrate 110, for example, the phase difference between the red light passing through the center of the red light and the red light passing through the second green light corresponding region 134 . can be large Similarly, the green light passing through the center of the second green light collecting area GL2 and the center of the second green light collecting area GL2 are spaced apart by 1/2 of the pixel pitch of the sensor substrate (ie, half of the pixel pitch). The position, for example, the phase difference between the green light passing through the center of the tangent of the second green pixel corresponding region 131 and the red pixel corresponding region 133 is the red light passing through the center of the red light collecting region RL and the red light A position spaced apart from the center of the light collecting region RL by 1/2 of the pixel pitch of the sensor substrate, for example, passing through the center of the tangent line of the second green pixel corresponding region 134 and the red pixel corresponding region 133 . It may be greater than the phase difference of red light.

9A to 9C are diagrams for explaining the relationship between a focal length of a light-converging area and an auto-focus function.

As briefly described above, a signal necessary for focus adjustment can be obtained by using a pixel including two or more photo-sensing cells sharing a light-converging area. Specifically, the photo-sensing cells, for example, the first photo-sensing cells 111a, 112a, 113a, and 114a, disposed on either side of the two photo-sensing cells that are included in one pixel and share the light collecting area, are The image sensor 1000 is focused by analyzing the difference between the detected signal and the signal detected by the light sensing cells disposed on the other side, for example, the second light sensing cells 111b, 112b, 113b, 114b. You can provide information so that In this case, when the focal lengths of the light collecting areas GL1 , GL2 , BL and RL are similar to the distance between the color separation lens array 130 and the sensor substrate 110 , that is, the thickness of the spacer layer 120 , the first Signals between the photo-sensing cells 111a, 112a, 113a, and 114a and the second photo-sensing cells 111b, 112b, 113b, and 114b are clearly distinguished, so that auto-focus control performance may be improved.

FIG. 9A shows an example in which the focal length f of the blue light collecting area BL matches the thickness 120h of the spacer layer 120 . Referring to FIG. 9A , light having a wavelength of 450 nm that is incident in the A direction toward the blue light converging region BL is incident on the first light sensing cell 112a of the second pixel 112 and is incident in the B direction. may be incident on the second light sensing cell 112b. That is, the signal sensed by the first photo-sensing cell 112a of the second pixel 112 represents the amount of light incident in the A direction, and is sensed by the second photo-sensing cell 112b of the second pixel 112 . One signal may represent the amount of light incident in the B direction. In this case, a difference between signals sensed by the first and second light sensing cells 112a and 112b may be clearly distinguished according to the traveling direction of the incident light.

9B shows an example in which the focal length fa of the blue light collecting area BL is longer than the thickness 120h of the spacer layer 120 . 3A to 3B, the thickness 120h of the spacer layer 120 is determined based on the focal length of the green light, and the phase distribution of the blue light collecting area BL is the green light collecting area GL1, In case of the same design as GL2), it may occur because the focal length of the blue light is longer than the focal length of the green light. Referring to FIG. 9B , light having a wavelength of 450 nm incident in the A direction toward the blue light converging region BL is transmitted to the first light sensing cell 112a as well as the first light sensing cell 112a of the second pixel 112 . Part of the light is incident on the second photo-sensing cell 112b in the vicinity, and the light incident in the B direction is also incident on the first photo-sensing cell 112a around the second photo-sensing cell 112b. As such, when the focal length of the blue light converging region BL is greater than the thickness of the spacer layer 120, the difference in the signal for each light sensing cell according to the propagation direction of the incident light is ambiguous, and the focusing performance may be deteriorated. there is.

FIG. 9C shows an example in which the focal length fb of the blue light collecting area BL is shorter than the thickness 120h of the spacer layer 120 . 3A to 3B, the thickness 120h of the spacer layer 120 is determined based on the focal length of the green light, and the phase distribution of the red light collecting region RL is the green light collecting region GL1, In case of the same design as GL2), it may occur because the focal length of the red light is shorter than the focal length of the green light. Referring to FIG. 9C , the light having a wavelength of 450 nm incident in the A direction toward the blue light converging region BL is transmitted to the first light sensing cell 112a of the second pixel 112 as well as the first light sensing cell 112a. Part of the light is incident on the second photo-sensing cell 112b in the vicinity, and the light incident in the B direction is also incident on the first photo-sensing cell 112a around the second photo-sensing cell 112b. As such, even when the focal length of the blue light converging region BL is not only greater than the thickness of the spacer layer 120 but also small, the difference in the signal for each light sensing cell according to the propagation direction of the incident light is ambiguous, so that the focusing performance may be reduced. can That is, the detection signals of the first photo-sensing cells 111a, 112a, 113a, and 114a and the second photo-sensing cells 111b, 112b, 113b, and 114b may not be clearly distinguished according to the incident direction.

Since the image sensor 1000 including the pixel array 1100 described above has almost no light loss due to a color filter, for example, an organic color filter, it is possible to provide a sufficient amount of light to the pixel even if the size of the pixel is small. can Therefore, it is possible to manufacture an ultra-high-resolution, ultra-small, high-sensitivity image sensor having hundreds of millions of pixels or more. Such an ultra-high-resolution, ultra-small, and high-sensitivity image sensor may be employed in various high-performance optical devices or high-performance electronic devices. Such electronic devices are, for example, smart phones, mobile phones, cell phones, personal digital assistants (PDA), laptops, PCs, various portable devices, home appliances, security cameras, medical cameras, automobiles, and Internet of Things (IoT). It may be an Internet of Things (IoT) device or other mobile or non-mobile computing device, but is not limited thereto.

In addition to the image sensor 1000 , the electronic device may further include a processor for controlling the image sensor, for example, an application processor (AP), and a plurality of hardware devices by driving an operating system or an application program through the processor. Alternatively, the software components may be controlled, and various data processing and operations may be performed. The processor may further include a graphic processing unit (GPU) and/or an image signal processor. When the processor includes an image signal processor, the image (or image) acquired by the image sensor may be stored and/or output by using the processor.

10 is a block diagram illustrating an example of the electronic device ED01 including the image sensor 1000 . Referring to FIG. 10 , in a network environment ED00, an electronic device ED01 communicates with another electronic device ED02 through a first network ED98 (such as a short-range wireless communication network) or a second network ED99. It is possible to communicate with another electronic device ED04 and/or the server ED08 through (a long-distance wireless communication network, etc.). The electronic device ED01 may communicate with the electronic device ED04 through the server ED08. Electronic device ED01 includes processor ED20, memory ED30, input device ED50, sound output device ED55, display device ED60, audio module ED70, sensor module ED76, interface ED77 ), a haptic module (ED79), a camera module (ED80), a power management module (ED88), a battery (ED89), a communication module (ED90), a subscriber identity module (ED96), and/or an antenna module (ED97). can In the electronic device ED01 , some of these components (eg, the display device ED60 ) may be omitted or other components may be added. Some of these components may be implemented as one integrated circuit. For example, the sensor module ED76 (fingerprint sensor, iris sensor, illuminance sensor, etc.) may be implemented by being embedded in the display device ED60 (display, etc.).

The processor ED20 may control one or a plurality of other components (hardware, software components, etc.) of the electronic device ED01 connected to the processor ED20 by executing software (eg, a program ED40 ). , various data processing or operations can be performed. As part of data processing or operation, processor ED20 loads commands and/or data received from other components (sensor module ED76, communication module ED90, etc.) into volatile memory ED32, and The commands and/or data stored in the ED32 may be processed, and the resulting data may be stored in the non-volatile memory ED34. The processor ED20 includes a main processor ED21 (central processing unit, application processor, etc.) and a secondary processor ED23 (graphics processing unit, image signal processor, sensor hub processor, communication processor, etc.) that can be operated independently or together. may include The auxiliary processor ED23 may use less power than the main processor ED21 and may perform a specialized function.

The auxiliary processor ED23 is configured to replace the main processor ED21 while the main processor ED21 is in the inactive state (sleep state) or to the main processor ED21 while the main processor ED21 is in the active state (the application execution state). Together with the processor ED21, functions and/or states related to some of the components of the electronic device ED01 (display device ED60, sensor module ED76, communication module ED90, etc.) may be controlled. can The auxiliary processor ED23 (image signal processor, communication processor, etc.) may be implemented as a part of other functionally related components (camera module ED80, communication module ED90, etc.).

The memory ED30 may store various data required by components of the electronic device ED01 (such as the processor ED20 and the sensor module ED76). The data may include, for example, input data and/or output data for software (such as a program ED40) and instructions related thereto. The memory ED30 may include a volatile memory ED32 and/or a nonvolatile memory ED34.

The program ED40 may be stored as software in the memory ED30 and may include an operating system ED42, middleware ED44, and/or an application ED46.

The input device ED50 may receive a command and/or data to be used by a component (eg, the processor ED20 ) of the electronic device ED01 from outside the electronic device ED01 (eg, a user). The input device ED50 may include a microphone, a mouse, a keyboard, and/or a digital pen (such as a stylus pen).

The sound output device ED55 may output a sound signal to the outside of the electronic device ED01 . The sound output device ED55 may include a speaker and/or a receiver. The speaker can be used for general purposes such as multimedia playback or recording playback, and the receiver can be used to receive an incoming call. The receiver may be integrated as a part of the speaker or may be implemented as an independent separate device.

The display device ED60 may visually provide information to the outside of the electronic device ED01. The display device ED60 may include a display, a hologram device, or a projector and a control circuit for controlling the corresponding device. The display device ED60 may include a touch circuitry configured to sense a touch, and/or a sensor circuitry configured to measure the intensity of force generated by the touch (such as a pressure sensor).

The audio module ED70 may convert a sound into an electric signal or, conversely, convert an electric signal into a sound. The audio module ED70 obtains a sound through the input device ED50 or other electronic device (electronic device ED02, etc.) directly or wirelessly connected to the sound output device ED55 and/or the electronic device ED01. ) through the speaker and/or headphones.

The sensor module ED76 detects an operating state (power, temperature, etc.) of the electronic device ED01 or an external environmental state (user state, etc.), and generates an electrical signal and/or data value corresponding to the sensed state. can do. The sensor module ED76 may include a gesture sensor, a gyro sensor, a barometric pressure sensor, a magnetic sensor, an acceleration sensor, a grip sensor, a proximity sensor, a color sensor, an IR (Infrared) sensor, a biometric sensor, a temperature sensor, a humidity sensor, and/or an illuminance sensor. It may include a sensor.

The interface ED77 may support one or a plurality of designated protocols that may be used to directly or wirelessly connect the electronic device ED01 to another electronic device (eg, the electronic device ED02). The interface ED77 may include a High Definition Multimedia Interface (HDMI), a Universal Serial Bus (USB) interface, an SD card interface, and/or an audio interface.

The connection terminal ED78 may include a connector through which the electronic device ED01 may be physically connected to another electronic device (eg, the electronic device ED02 ). The connection terminal ED78 may include an HDMI connector, a USB connector, an SD card connector, and/or an audio connector (such as a headphone connector).

The haptic module ED79 may convert an electrical signal into a mechanical stimulus (vibration, movement, etc.) or an electrical stimulus that the user can perceive through tactile or kinesthetic sense. The haptic module ED79 may include a motor, a piezoelectric element, and/or an electrical stimulation device.

The camera module ED80 may capture still images and moving images. The camera module ED80 may include a lens assembly including one or a plurality of lenses, the image sensor 1000 of FIG. 1 , image signal processors, and/or flashes. The lens assembly included in the camera module ED80 may collect light emitted from a subject, which is an image capturing object.

The power management module ED88 may manage power supplied to the electronic device ED01 . The power management module ED88 may be implemented as a part of a Power Management Integrated Circuit (PMIC).

The battery ED89 may supply power to a component of the electronic device ED01 . The battery ED89 may include a non-rechargeable primary cell, a rechargeable secondary cell, and/or a fuel cell.

Communication module ED90 establishes a direct (wired) communication channel and/or wireless communication channel between the electronic device ED01 and other electronic devices (electronic device ED02, electronic device ED04, server ED08, etc.); and performing communication through an established communication channel. The communication module ED90 may include one or a plurality of communication processors that operate independently of the processor ED20 (eg, an application processor) and support direct communication and/or wireless communication. The communication module ED90 includes a wireless communication module ED92 (a cellular communication module, a short-range wireless communication module, a Global Navigation Satellite System (GNSS, etc.) communication module) and/or a wired communication module ED94 (Local Area Network (LAN) communication). module, power line communication module, etc.). Among these communication modules, the corresponding communication module is a first network (ED98) (local area communication network such as Bluetooth, WiFi Direct, or IrDA (Infrared Data Association)) or a second network (ED99) (cellular network, Internet, or computer network (LAN) , WAN, etc.) through a telecommunication network) and may communicate with other electronic devices. These various types of communication modules may be integrated into one component (single chip, etc.) or implemented as a plurality of components (plural chips) separate from each other. The wireless communication module ED92 uses the subscriber information (such as International Mobile Subscriber Identifier (IMSI)) stored in the subscriber identification module ED96 within a communication network such as the first network ED98 and/or the second network ED99. can check and authenticate the electronic device ED01.

The antenna module ED97 may transmit or receive signals and/or power to the outside (eg, other electronic devices). The antenna may include a radiator having a conductive pattern formed on a substrate (PCB, etc.). The antenna module ED97 may include one or a plurality of antennas. When a plurality of antennas are included, an antenna suitable for a communication method used in a communication network such as the first network ED98 and/or the second network ED99 is selected from among the plurality of antennas by the communication module ED90. can A signal and/or power may be transmitted or received between the communication module ED90 and another electronic device through the selected antenna. In addition to the antenna, other components (such as RFIC) may be included as a part of the antenna module ED97.

Some of the components are connected to each other through communication methods between peripheral devices (bus, GPIO (General Purpose Input and Output), SPI (Serial Peripheral Interface), MIPI (Mobile Industry Processor Interface), etc.) and signals (commands, data, etc.) ) are interchangeable.

The command or data may be transmitted or received between the electronic device ED01 and the external electronic device ED04 through the server ED08 connected to the second network ED99. The other electronic devices ED02 and ED04 may be of the same type as or different from those of the electronic device ED01. All or some of the operations performed in the electronic device ED01 may be executed in one or a plurality of devices among the other electronic devices ED02, ED04, and ED08. For example, when the electronic device ED01 needs to perform a function or service, part or all of the function or service is performed to one or a plurality of other electronic devices instead of executing the function or service by itself. you can ask to One or a plurality of other electronic devices receiving the request may execute an additional function or service related to the request, and transmit a result of the execution to the electronic device ED01. To this end, cloud computing, distributed computing, and/or client-server computing technologies may be used.

11 is a block diagram illustrating the camera module ED80 of FIG. 10 . Referring to FIG. 11 , the camera module ED80 includes a lens assembly 1110 , a flash 1120 , an image sensor 1000 (such as the image sensor 1000 of FIG. 1 ), an image stabilizer 1140 , and a memory 1150 . (such as a buffer memory), and/or an image signal processor 1160 . The lens assembly 1110 may collect light emitted from a subject, which is an image capturing object. The camera module ED80 may include a plurality of lens assemblies 1110 . In this case, the camera module ED80 may be a dual camera, a 360 degree camera, or a spherical camera. Some of the plurality of lens assemblies 1110 may have the same lens property (angle of view, focal length, auto focus, F number, optical zoom, etc.) or may have different lens properties. The lens assembly 1110 may include a wide-angle lens or a telephoto lens.

The flash 1120 may emit light used to enhance light emitted or reflected from the subject. The flash 1120 may include one or a plurality of light emitting diodes (RGB (Red-Green-Blue) LED, White LED, Infrared LED, Ultraviolet LED, etc.), and/or a Xenon Lamp. The image sensor 1000 may be the image sensor described with reference to FIG. 1 , and by converting light emitted or reflected from the subject and transmitted through the lens assembly 1110 into an electrical signal, an image corresponding to the subject may be obtained. . The image sensor 1000 may include one or a plurality of sensors selected from image sensors having different properties, such as an RGB sensor, a black and white (BW) sensor, an IR sensor, or a UV sensor. Each of the sensors included in the image sensor 1000 may be implemented as a CCD (Charged Coupled Device) sensor and/or a CMOS (Complementary Metal Oxide Semiconductor) sensor.

The image stabilizer 1140 responds to the movement of the camera module ED80 or the electronic device 1101 including the same, and moves one or a plurality of lenses or the image sensor 1000 included in the lens assembly 1110 in a specific direction. Alternatively, by controlling the operating characteristics of the image sensor 1000 (adjustment of read-out timing, etc.), a negative effect due to movement may be compensated. The image stabilizer 1140 detects the movement of the camera module ED80 or the electronic device ED01 using a gyro sensor (not shown) or an acceleration sensor (not shown) disposed inside or outside the camera module ED80. can The image stabilizer 1140 may be optically implemented.

The memory 1150 may store some or all data of an image acquired through the image sensor 1000 for a subsequent image processing operation. For example, when a plurality of images are acquired at high speed, the acquired original data (Bayer-Patterned data, high-resolution data, etc.) is stored in the memory 1150, only the low-resolution image is displayed, and then selected (user selection, etc.) It may be used to transmit the original data of the image to the image signal processor 1160 . The memory 1150 may be integrated into the memory ED30 of the electronic device ED01 or may be configured as a separate memory operated independently.

The image signal processor 1160 may perform image processing on an image acquired through the image sensor 1000 or image data stored in the memory 1150 . Image processing includes depth map generation, 3D modeling, panorama generation, feature point extraction, image synthesis, and/or image compensation (noise reduction, resolution adjustment, brightness adjustment, blurring, sharpening) , softening (Softening, etc.) may be included. The image signal processor 1160 may perform control (exposure time control, readout timing control, etc.) on components (such as the image sensor 1000 ) included in the camera module ED80 . The image processed by the image signal processor 1160 is stored back in the memory 1150 for further processing or external components of the camera module ED80 (memory ED30, display device ED60, electronic device ED02) , the electronic device ED04, the server ED08, etc.). The image signal processor 1160 may be integrated into the processor ED20 or configured as a separate processor operated independently of the processor ED20 . When the image signal processor 1160 is configured with the processor ED20 and a separate processor, the image processed by the image signal processor 1160 is subjected to additional image processing by the processor ED20 and then displayed on the display device ED60. can be displayed through

The electronic device ED01 may include a plurality of camera modules ED80 each having different properties or functions. In this case, one of the plurality of camera modules ED80 may be a wide-angle camera and the other may be a telephoto camera. Similarly, one of the plurality of camera modules ED80 may be a front camera and the other may be a rear camera.

The image sensor 1000 according to the embodiments includes the mobile phone or smart phone 1200 shown in FIG. 12 , the tablet or smart tablet 1300 shown in FIG. 13 , and the digital camera or camcorder 1400 shown in FIG. 14 . , may be applied to the notebook computer 1500 shown in FIG. 15 or the television or smart television 1600 shown in FIG. 16 . For example, the smart phone 1200 or the smart tablet 1300 may include a plurality of high-resolution cameras each having a high-resolution image sensor mounted thereon. Using high-resolution cameras, it is possible to extract depth information of subjects in an image, adjust out-focusing of an image, or automatically identify subjects in an image.

In addition, the image sensor 1000 is a smart refrigerator 1700 shown in FIG. 17 , a security camera 1800 shown in FIG. 18 , a robot 1900 shown in FIG. 19 , and a medical camera 2000 shown in FIG. 20 ). etc. can be applied. For example, the smart refrigerator 1700 may automatically recognize food in the refrigerator using an image sensor, and inform the user of the presence of specific food, the type of food put on or shipped out, and the like through the smartphone. The security camera 1800 may provide an ultra-high-resolution image and may recognize an object or a person in the image even in a dark environment by using high sensitivity. The robot 1900 may provide a high-resolution image by being input at a disaster or industrial site that cannot be directly accessed by a person. The medical camera 2000 may provide a high-resolution image for diagnosis or surgery, and may dynamically adjust a field of view.

Also, the image sensor 1000 may be applied to the vehicle 2100 as shown in FIG. 21 . The vehicle 2100 may include a plurality of vehicle cameras 2110 , 2120 , 2130 , and 2140 disposed in various positions. Each of the vehicle cameras 2110 , 2120 , 2130 , and 2140 may include an image sensor according to an embodiment. The vehicle 2100 can provide the driver with various information about the inside or the surroundings of the vehicle 2100 by using a plurality of vehicle cameras 2110, 2120, 2130, and 2140, and automatically recognizes objects or people in the image. It can provide information necessary for autonomous driving.

Although the image sensor having the above-described color separation lens array and the electronic device including the same have been described with reference to the embodiment shown in the drawings, this is only an example, and those of ordinary skill in the art can use various It will be understood that modifications and equivalent other embodiments are possible. Therefore, the disclosed embodiments are to be considered in an illustrative rather than a restrictive sense. The scope of rights is indicated in the claims rather than the above description, and all differences within the scope of equivalents should be construed as being included in the scope of rights.

Claims (34)

a first pixel for sensing light of a first wavelength; and
a second pixel for sensing second wavelength light
A sensor substrate comprising a; and
a color separation lens array for condensing light of a first wavelength among incident lights on the first pixel and light with a second wavelength on the second pixel;
including,
The color separation lens array,
a first pixel-corresponding region disposed at a position corresponding to the first pixel; and
a second pixel-corresponding region disposed at a position corresponding to the second pixel;
including,
The phase difference between the first wavelength light passing through the center of the first pixel-corresponding area and the first wavelength light passing through the center of the second pixel-corresponding area is the second wavelength light passing through the center of the first pixel-corresponding area. and the phase difference of the second wavelength light passing through the center of the second pixel-corresponding region is different,
image sensor. According to claim 1,
The first pixel includes 2 to 16 photo-sensing cells for sensing light of a first wavelength,
image sensor. 3. The method of claim 2,
The second pixel includes 2 to 16 light sensing cells for sensing light of a second wavelength,
image sensor. According to claim 1,
The first wavelength light passing through the first pixel-corresponding region has a phase distribution that decreases in a direction away from the center of the first pixel-corresponding region;
The second wavelength light passing through the second pixel-corresponding region has a phase distribution that decreases in a direction away from the center of the second pixel-corresponding region;
image sensor. 5. The method of claim 4,
the first wavelength is longer than the second wavelength;
The phase difference between the first wavelength light passing through the center of the first pixel-corresponding area and the first wavelength light passing through the center of the second pixel-corresponding area is the second wavelength light passing through the center of the first pixel-corresponding area. and the phase difference of the second wavelength light passing through the center of the second pixel-corresponding region is smaller than that of
image sensor. 5. The method of claim 4,
the first wavelength is longer than the second wavelength;
The phase difference between the first wavelength light passing through the center of the first pixel-corresponding area and the first wavelength light passing through the center of the first pixel-corresponding area is the second wavelength light passing through the center of the second pixel-corresponding area and 60% to 90% of the phase difference of the second wavelength light passing through the center of the second pixel-corresponding region,
image sensor. 5. The method of claim 4,
the first wavelength is longer than the second wavelength;
A phase difference between the first wavelength light passing through the center of the first pixel-corresponding region and the first wavelength light passing through the center of the second pixel-corresponding region is 0.9π to 1.1π,
A phase difference between the second wavelength light passing through the center of the first pixel-corresponding region and the second wavelength light passing through the center of the second pixel-corresponding region is 1.1π to 1.5π,
image sensor. 5. The method of claim 4,
the first wavelength is shorter than the second wavelength;
The phase difference between the first wavelength light passing through the center of the first pixel-corresponding area and the first wavelength light passing through the center of the second pixel-corresponding area is equal to the second wavelength light passing through the center of the first pixel-corresponding area and greater than the phase difference of the second wavelength light passing through the center of the second pixel-corresponding region;
image sensor. 5. The method of claim 4,
the first wavelength is shorter than the second wavelength;
The phase difference between the first wavelength light passing through the center of the first pixel-corresponding area and the first wavelength light passing through the center of the second pixel-corresponding area is the second wavelength light passing through the center of the first pixel-corresponding area and 110% to 150% of the phase difference of the second wavelength light passing through the center of the second pixel-corresponding area;
image sensor. 5. The method of claim 4,
the first wavelength is shorter than the second wavelength;
A phase difference between the first wavelength light passing through the center of the first pixel-corresponding region and the first wavelength light passing through the center of the second pixel-corresponding region is 0.9π to 1.1π,
A phase difference between the second wavelength light passing through the center of the first pixel-corresponding region and the second wavelength light passing through the center of the second pixel-corresponding region is 0.6π to 0.9π,
image sensor. a first pixel for sensing light of a first wavelength; and
a second pixel for sensing second wavelength light
A sensor substrate comprising a;
a first wavelength light converging region for condensing light of a first wavelength among the incident lights to the first pixel; and
A second wavelength light converging region for condensing the second wavelength light to the second pixel
A color separation lens array comprising;
including,
an area of the first wavelength light converging region is larger than an area of the first pixel;
an area of the second wavelength light converging region is larger than an area of the second pixel;
A second focal length of the second wavelength light by the second wavelength light collecting region is 90% to 100% of the first focal length of the first wavelength light by the first wavelength light collecting region,
image sensor. 12. The method of claim 11,
The first pixel includes 2 to 16 photo-sensing cells for sensing light of a first wavelength,
image sensor. 13. The method of claim 12,
The second pixel includes 2 to 16 light sensing cells for sensing light of a second wavelength,
image sensor. 12. The method of claim 11,
The first wavelength light passing through the first wavelength light collecting region has a phase retardation profile that decreases in a direction away from the center of the first wavelength light collecting region,
The second wavelength light passing through the second wavelength light collecting region has a phase retardation profile that decreases in a direction away from the center of the second wavelength light collecting region,
image sensor. 15. The method of claim 14,
The first wavelength light collecting region and the second wavelength light collecting region partially overlap each other,
image sensor. 16. The method of claim 15,
The second focal length is the same as the first focal length;
image sensor. a first pixel for sensing light of a first wavelength; and
a second pixel for sensing second wavelength light
A sensor substrate comprising a;
a first wavelength light converging region for condensing light of a first wavelength among the incident lights to the first pixel; and
a second wavelength light converging region for condensing second wavelength light to the second pixel
A color separation lens array comprising;
including,
an area of the first wavelength light converging region is larger than an area of the first pixel;
an area of the second wavelength light converging region is larger than an area of the second pixel;
The first wavelength light passing through the first wavelength light converging region has a largest phase distribution at the center of the first wavelength light converging area and decreasing in a direction away from the center,
The second wavelength light passing through the second wavelength light converging area has a phase distribution that is greatest at the center of the second wavelength light converging area and decreases in a direction away from the center,
The phase reduction rate of the light of the first wavelength is different from the phase reduction rate of the light of the second wavelength;
image sensor. 18. The method of claim 17,
The first pixel includes 2 to 16 photo-sensing cells for sensing light of a first wavelength,
image sensor. 19. The method of claim 18,
The second pixel includes 2 to 16 light sensing cells for sensing light of a second wavelength,
image sensor. 18. The method of claim 17,
The first wavelength is longer than the second wavelength, and the phase decrease rate of the light of the first wavelength is smaller than the phase decrease rate of the light of the second wavelength;
image sensor. 18. The method of claim 17,
the first wavelength is shorter than the second wavelength, and the phase reduction rate of the light of the first wavelength is greater than the phase reduction rate of the light of the second wavelength;
image sensor. 18. The method of claim 17,
The first wavelength light collecting region and the second wavelength light collecting region partially overlap each other,
image sensor. a first pixel for sensing light of a first wavelength; and
a second pixel for sensing second wavelength light
A sensor substrate comprising a;
a first wavelength light converging region for condensing light of a first wavelength among the incident lights to the first pixel; and
A second wavelength light converging region for condensing the second wavelength light to the second pixel
A color separation lens array comprising;
including,
A phase difference between the first wavelength light passing through the center of the first wavelength light collecting area and the first wavelength light passing through a position spaced apart by 1/2 the pixel pitch of the sensor substrate from the center of the first wavelength light collecting area Is,
A phase difference between the second wavelength light passing through the center of the second wavelength light collecting area and the second wavelength light passing through a position spaced apart by 1/2 of the pixel pitch of the sensor substrate from the center of the second wavelength light collecting area different from,
image sensor. 24. The method of claim 23,
The first pixel includes 2 to 16 photo-sensing cells for sensing light of a first wavelength,
image sensor. 25. The method of claim 24,
The second pixel includes 2 to 16 light sensing cells for sensing light of a second wavelength,
image sensor. 24. The method of claim 23,
an area of the first wavelength light converging region is larger than an area of the first pixel;
an area of the second wavelength light converging region is larger than an area of the second pixel;
image sensor. 24. The method of claim 23,
the first wavelength is longer than the second wavelength;
A phase difference between the first wavelength light passing through the center of the first wavelength light collecting area and the first wavelength light passing through a position spaced apart by 1/2 the pixel pitch of the sensor substrate from the center of the first wavelength light collecting area Is,
A phase difference between the second wavelength light passing through the center of the second wavelength light collecting area and the second wavelength light passing through a position spaced apart by 1/2 of the pixel pitch of the sensor substrate from the center of the second wavelength light collecting area lesser,
image sensor. 24. The method of claim 23,
the first wavelength is shorter than the second wavelength;
A phase difference between the first wavelength light passing through the center of the first wavelength light collecting area and the first wavelength light passing through a position spaced apart by 1/2 the pixel pitch of the sensor substrate from the center of the first wavelength light collecting area Is,
A phase difference between the second wavelength light passing through the center of the second wavelength light collecting area and the second wavelength light passing through a position spaced apart by 1/2 of the pixel pitch of the sensor substrate from the center of the second wavelength light collecting area greater than,
image sensor. an image sensor that converts an optical image into an electrical signal; and
A processor for controlling the operation of the image sensor and storing and outputting a signal generated by the image sensor,
The image sensor is
a first pixel for sensing light of a first wavelength; and
a second pixel for sensing second wavelength light
A sensor substrate comprising a;
a first wavelength light converging region for condensing light of a first wavelength among the incident lights to the first pixel; and
A second wavelength light converging region for condensing the second wavelength light to the second pixel
A color separation lens array comprising;
including,
an area of the first wavelength light converging region is larger than an area of the first pixel;
an area of the second wavelength light converging region is larger than an area of the second pixel;
A second focal length of the second wavelength light by the second wavelength light converging region is 90% to 110% of the first focal length of the first wavelength light by the first wavelength light collecting region,
electronic device. 30. The method of claim 29,
The first pixel includes 2 to 16 photo-sensing cells for sensing light of a first wavelength,
electronic device. 31. The method of claim 30,
The second pixel includes 2 to 16 light sensing cells for sensing light of a second wavelength,
electronic device. 30. The method of claim 29,
The first wavelength light passing through the first wavelength light collecting region has a phase retardation profile that decreases in a direction away from the center of the first wavelength light collecting region,
The second wavelength light passing through the second wavelength light collecting region has a phase retardation profile that decreases in a direction away from the center of the second wavelength light collecting region,
electronic device. 33. The method of claim 32,
The first wavelength light collecting region and the second wavelength light collecting region partially overlap each other,
electronic device. 34. The method of claim 33,
The second focal length is the same as the first focal length;
electronic device.

Images