KR20220168131A - Image sensor including color separating lens array and electronic apparatus including the image sensor - Google Patents

Abstract

An image sensor according to an embodiment includes: a sensor substrate including a plurality of pixels for sensing light; a color separation lens array including a plurality of pixel-corresponding regions respectively facing the plurality of pixels, separating incident light by wavelength, and condensing light of different wavelength bands into the plurality of pixels; and a filter array disposed between the sensor substrate and the color separation lens array, in which a plurality of transparent areas and a plurality of filters of a single color are alternately arranged. The image sensor can effectively block crosstalk occurring during color separation.

Description

Image sensor including color separating lens array and electronic apparatus including the image sensor}

It relates to an image sensor having a color separation lens array capable of separating and condensing incident light by wavelength and an electronic device including the image sensor.

An image sensor typically detects the color of incident light using a color filter. However, since the color filter absorbs light of colors other than light of the corresponding color, light utilization efficiency may decrease. For example, when an RGB color filter is used, only 1/3 of the incident light is transmitted and the remaining 2/3 is absorbed, so the light utilization efficiency is only about 33%. Therefore, in the case of a color display device or color image sensor, most light loss occurs in the color filter. Accordingly, a method of efficiently separating colors without using a color filter in an image sensor is continuously being sought.

Provided is an image sensor having improved light utilization efficiency by using a color separation lens array capable of separating and condensing incident light by wavelength, and an electronic device including the image sensor.

An image sensor according to an embodiment includes a sensor substrate including a plurality of pixels that sense light: a plurality of pixel corresponding regions respectively facing the plurality of pixels, and each of the plurality of pixel corresponding regions includes one or more nanoposts. and a color separation lens array, wherein the at least one nanopost separates incident light by wavelength to form a phase distribution for condensing light of different wavelength bands to the plurality of pixels; and a filter array disposed between the sensor substrate and the color separation lens array, in which a plurality of transparent areas and a plurality of filters of a single color are alternately arranged.

The single color and arrangement position of the plurality of filters may be set to block crosstalk of light in a long wavelength band among a plurality of wavelength bands separated by the color separation lens array.

Each of the plurality of pixels may include a plurality of light-sensing cells for auto-focus control.

The plurality of pixels may include a plurality of green pixels sensing green light, a plurality of blue pixels sensing blue light, and a plurality of red pixels sensing red light.

The plurality of filters may be filters that block red light from being incident on the green pixel and the blue pixel.

The plurality of green pixels, blue pixels, and red pixels may be arranged in a Bayer pattern, and the plurality of filters are green filters and are disposed facing the green pixels, or the plurality of filters are cyan. It is a (cyan) filter and may be disposed to face the green pixel and the blue pixel, respectively.

The plurality of filters may be blue filters and may be disposed to face the blue pixels, or the plurality of filters may be cyan filters and may be disposed to face the green pixels and the blue pixels, respectively.

The plurality of pixels may include a cyan pixel, a magenta pixel, a yellow pixel, and a green pixel, the plurality of filters may be a cyan filter, and the cyan pixel, the It may be arranged to face each green pixel.

The plurality of green pixels, blue pixels, and red pixels may be arranged to exhibit a Bayer pattern shape by pixel binning.

The plurality of pixels may include a first pixel group and a second pixel group that are repeatedly arranged along one direction; and a third pixel group and a fourth pixel group that are repeatedly arranged along the other direction parallel to the one direction, wherein the first pixel group and the second pixel group include a plurality of red pixels that are alternately arranged, respectively. A plurality of green pixels are included, the third pixel group and the fourth pixel group each include a plurality of green pixels and blue pixels that are alternately arranged, and the color arrangement represented by the first to fourth pixel groups is a Bayer pattern Pixels may be combined in each of the first to fourth pixel groups so as to be formed.

The image sensor may operate in a mode in which pixels adjacent in a diagonal direction in each of the first to fourth groups are combined or in a mode in which pixels adjacent in a diamond direction are combined.

The image sensor may have different numbers of pixels combined in the two modes.

The image sensor may further include a spacer layer disposed between the filter array and the color separation lens array.

A thickness of the spacer layer may be smaller than a focal length of light having a center wavelength among a plurality of wavelength bands separated by the color separation lens array.

An electronic device according to an embodiment includes the above-described image sensor that converts an optical image into an electrical signal and a processor that controls an operation of the image sensor and stores and outputs a signal generated by the image sensor.

The above-described image sensor can increase both color separation efficiency and process efficiency by using a color separation lens array that separates incident light by wavelength and a single-color filter array that can effectively reduce crosstalk between adjacent pixels.

The above-described image sensor can improve auto-focus performance by using an auto-focus pixel having a plurality of light-sensing cells together.

The above-described image sensor may have a pixel arrangement advantageous to pixel binning by utilizing a single color filter array.

1 is a block diagram of an image sensor according to an exemplary embodiment.
2A and 2B are conceptual views illustrating a schematic structure and operation of a color separation lens array provided in an image sensor according to an embodiment.
3 is a plan view illustrating a color arrangement represented by a pixel array of an image sensor according to an exemplary embodiment.
4A and 4B are cross-sectional views showing a pixel array of an image sensor according to an exemplary embodiment from different cross-sections, respectively.
5A is a plan view showing an arrangement of pixel corresponding regions of a color separation lens array provided in an image sensor according to an embodiment, and FIG. 5B shows an exemplary shape and arrangement of nanoposts disposed in the color separation lens array of FIG. 5A. it is flat
5C is a plan view showing a filter arrangement of a filter array included in an image sensor according to an embodiment, and FIG. 5D is a plan view showing a pixel arrangement of a sensor substrate included in an image sensor according to an embodiment.
FIG. 6A shows the phase distribution of green light and blue light passing through the color separation lens array along line II′ of FIG. 5B, and FIG. 6C is a diagram showing phases of blue light passing through a color separation lens array at the center of corresponding pixel regions.
FIG. 6D exemplarily shows a traveling direction of green light incident to the first green light condensing area, and FIG. 6E is a diagram exemplarily showing an array of first green light condensing areas.
FIG. 6F exemplarily shows a traveling direction of blue light incident to the blue light condensing area, and FIG. 6G is a diagram exemplarily showing an array of blue light condensing areas.
FIG. 7A shows the phase distribution of red light and green light passing through the color separation lens array along line II-II′ of FIG. 5B, and FIG. FIG. 7C is a view showing the phase of the green light passing through the color separation lens array at the center of corresponding pixel regions.
FIG. 7D exemplarily shows a traveling direction of red light incident to the red light condensing area, and FIG. 7E is a diagram exemplarily showing an array of red light condensing areas.
FIG. 7F illustratively shows a traveling direction of green light incident to the second green light condensing area, and FIG. 7g is a view showing an array of second green light condensing areas exemplarily.
8A and 8B are plan and cross-sectional views of a pixel array of an image sensor according to another embodiment.
9 conceptually shows a pixel array of an image sensor according to another embodiment in relation to a pixel array and a filter array corresponding thereto.
10 conceptually shows a pixel array of an image sensor according to another embodiment in relation to a pixel array and a filter array corresponding thereto.
11 conceptually shows a pixel array of an image sensor according to another embodiment in relation to a pixel array and a filter array corresponding thereto.
12 conceptually shows a pixel array of an image sensor according to another embodiment in relation to a pixel array and a filter array corresponding thereto.
13A to 13C are plan views illustrating a pixel array of a pixel array of an image sensor, a color separation lens array, and a filter array corresponding thereto, according to another exemplary embodiment.
14A and 14B show high binning and low binning driving of the image sensors of FIGS. 13A to 13C .
15 is a block diagram schematically illustrating an electronic device including an image sensor according to embodiments.
FIG. 16 is a block diagram schematically illustrating a camera module included in the electronic device of FIG. 15 .

Hereinafter, an image sensor including a color separation lens array and an electronic device including the same will be described in detail with reference to the accompanying drawings. The described embodiments are merely illustrative, and various modifications are possible from these embodiments. In the following drawings, the same reference numerals denote the same components, and the size of each component in the drawings may be exaggerated for clarity and convenience of description.

Hereinafter, expressions described as “upper” or “upper” may include not only what is directly above/below/left/right in contact but also what is above/below/left/right in non-contact.

The terms first, second, etc. may be used to describe various components, but are used only for the purpose of distinguishing one component from another. These terms are not intended to limit the difference in material or structure of the components.

Singular expressions include plural expressions unless the context clearly dictates otherwise. In addition, when a certain component is said to "include", this means that it may further include other components without excluding other components unless otherwise stated.

In addition, terms such as "...unit" and "module" described in the specification mean a unit that processes one or more functions or operations, which may be implemented as hardware or software or a combination of hardware and software. there is.

The use of the term "above" and similar denoting terms may correspond to both singular and plural.

1 is a block diagram of an image sensor according to an exemplary embodiment.

Referring to FIG. 1 , an image sensor 1000 may include a pixel array 1100 , a timing controller 1010 , a row decoder 1020 , and an output circuit 1030 . The image sensor may be a charge coupled device (CCD) image sensor or a complementary metal oxide semiconductor (CMOS) image sensor.

The pixel array 1100 includes pixels arranged two-dimensionally along a plurality of rows and columns. The row decoder 1020 selects one row of the pixel array 1100 in response to a row address signal output from the timing controller 1010 . The output circuit 1030 outputs light-sensing signals in units of columns from a plurality of pixels arranged along the selected row. To this end, the output circuit 1030 may include a column decoder and an analog to digital converter (ADC). For example, the output circuit 1030 may include a plurality of ADCs respectively disposed for each column between the column decoder and the pixel array 1100 or one ADC disposed at an output terminal of the column decoder. The timing controller 1010, the row decoder 1020, and the output circuit 1030 may be implemented as one chip or separate chips. A processor for processing the video signal output through the output circuit 1030 may be implemented as a single chip together with the timing controller 1010 , the row decoder 1020 , and the output circuit 1030 .

The pixel array 1100 may include a plurality of pixels that sense light of different wavelengths. The arrangement of pixels may be implemented in various ways.

2A and 2B are conceptual views illustrating a schematic structure and operation of a color separation lens array provided in an image sensor according to an embodiment.

Referring to FIG. 2A , a Color Separating Lens Array (CSLA) may include a plurality of nanoposts (NPs) that differently change the phase of incident light Li according to an incident position. The color separation lens array (CSLA) can be partitioned in various ways. For example, a first pixel correspondence region R1 corresponding to the first pixel PX1 on which the first wavelength light L _λ1 included in the incident light Li is condensed, and a second pixel corresponding region R1 included in the incident light Li It may be partitioned into a second pixel correspondence region R2 corresponding to the second pixel PX2 on which the wavelength light L _λ2 is condensed. Each of the first and second pixel correspondence regions R1 and R2 may include one or more nanoposts NP and may be disposed to face the first and second pixels PX1 and PX2 , respectively. As another example, the color separation lens array CSLA includes a first wavelength condensing area L1 condensing the first wavelength light L _λ1 to the first pixel PX1 and the second wavelength light L _λ2 to the second pixel PX1. It may be partitioned into a second wavelength condensing region L2 condensing light on (PX2). The first wavelength condensing region L1 and the second wavelength condensing region L2 may partially overlap each other.

₁, L

₂)에 각각 다른 위상 분포(Phase Profile)를 형성하여, 제1 파장 광(L_λ1)을 제1 화소(PX1)에 집광하고, 제2 파장 광(L_λ2)을 제2 화소(PX2)로 집광할 수 있다. The color separation lens array CSLA includes light of first and second wavelengths L included in the incident light Li.

₁ ,L

₂ ) to form different phase distributions (Phase Profile), the first wavelength light (L _λ1 ) is focused on the first pixel (PX1), and the second wavelength light (L _λ2 ) is directed to the second pixel (PX2). can concentrate

₁, L

₂)이 각각 대응하는 제1 및 제2 화소(PX1, PX2)에 집광되도록 할 수 있다. 구체적으로, 색분리 렌즈 어레이(CSLA)를 통과한 제1 파장 광(L_λ1)은 제1 화소 대응 영역(R1)의 중심에서 가장 크고, 제1 화소 대응 영역(R1)의 중심에서 멀어지는 방향, 즉 제2 화소 대응 영역(R2) 방향으로 감소하는 위상 분포(PP1)를 가질 수 있다. 이러한 위상 분포는 볼록 렌즈, 예를 들면, 제1 파장 집광 영역(L1)에 배치된 중심부가 볼록한 마이크로 렌즈를 통과하여 한 지점으로 수렴하는 광의 위상 분포와 유사하며, 제1 파장 광(L_λ1)은 제1 화소(PX1)에 집광될 수 있다. 또한, 색분리 렌즈 어레이(CSLA)를 통과한 제2 파장 광(L_λ2)은 제2 화소 대응 영역(R2)의 중심에서 가장 크고, 제2 화소 대응 영역(R2)의 중심에서 멀어지는 방향, 즉 제1 화소 대응 영역(R1) 방향으로 감소하는 위상 분포(PP2)를 가져, 제2 파장 광(L_λ2)은 제2 화소(PX2)로 집광될 수 있다. For example, referring to FIG. 3B , the color separation lens array (CSLA) is positioned immediately after passing through the color separation lens array (CSLA), that is, at a position on the lower surface of the color separation lens array (CSLA), the first wavelength The light L _λ1 has a first phase distribution PP1 and the second wavelength light L _λ2 has a second phase distribution PP2, so that the first and second wavelength lights L

₁ ,L

₂ ) may be focused on the corresponding first and second pixels PX1 and PX2, respectively. Specifically, the first wavelength light (L _λ1 ) that has passed through the color separation lens array CSLA is largest at the center of the first pixel correspondence region R1 and moves away from the center of the first pixel correspondence region R1; That is, it may have a phase distribution PP1 that decreases in the direction of the second pixel correspondence region R2. This phase distribution is similar to the phase distribution of light passing through a convex lens, for example, a micro lens having a convex center disposed in the first wavelength condensing region L1 and converging to a point, and the first wavelength light L _λ1 may be focused on the first pixel PX1. In addition, the second wavelength light L _λ2 passing through the color separation lens array CSLA is largest at the center of the second pixel correspondence region R2 and is in a direction away from the center of the second pixel correspondence region R2, that is, Since the phase distribution PP2 decreases in the direction of the first pixel correspondence region R1 , the second wavelength light L _λ2 may be focused on the second pixel PX2 .

₁, L

₂)에 대해 서로 다른 위상 분포를 제공할 수 있다. 다시 말하면, 동일한 물질이라도 물질과 반응하는 빛의 파장에 따라 굴절률이 다르고 물질을 통과했을 때 빛이 겪는 위상지연도 파장마다 다르기 때문에 파장별로 다른 위상 분포가 형성될 수 있다. 예를 들면, 제1 화소 대응 영역(R1)의 제1 파장 광(L_λ1)에 대한 굴절률과 제1 화소 대응 영역(R1)의 제2 파장 광(L_λ2)에 대한 굴절률이 서로 다를 수 있고, 제1 화소 대응 영역(R1)을 통과한 제1 파장 광(L_λ1)이 겪는 위상지연과 제1 화소 대응 영역(R1)을 통과한 제2 파장 광(L_λ2)이 겪는 위상지연이 다를 수 있으므로, 이러한 빛의 특성을 고려하여 색분리 렌즈 어레이(CSLA)를 설계하면, 제1 및 제2 파장 광(L_λ1, L_λ2)에 대해 서로 다른 위상 분포를 제공하도록 할 수 있다. Since the refractive index of a material is different depending on the wavelength of the reacting light, as shown in FIG.

₁ ,L

₂ ) can provide different phase distributions. In other words, since the refractive index is different depending on the wavelength of light reacting with the material and the phase delay experienced by light when passing through the material is also different for each wavelength, different phase distributions can be formed for each wavelength. For example, the refractive index of the first pixel correspondence region R1 for the first wavelength light L _λ1 may be different from the refractive index of the first pixel correspondence region R1 for the second wavelength light L _λ2 . , The phase delay experienced by the first wavelength light L _λ1 passing through the first pixel corresponding region R1 and the phase delay experienced by the second wavelength light L _λ2 passing through the first pixel corresponding region R1 are different. Therefore, if the color separation lens array CSLA is designed in consideration of the characteristics of light, different phase distributions may be provided for the first and second wavelength lights L _λ1 and L _λ2 .

The color separation lens array CSLA includes nanoposts NPs arranged in a specific regularity so that first and second wavelength lights L _λ1 and L _λ2 have first and second phase distributions PP1 and PP2, respectively. can include Here, the rule is applied to parameters such as the shape, size (width, height), spacing, and arrangement of the nanoposts (NP), and these parameters are the phases to be implemented through the color separation lens array (CSLA). It can be determined according to the distribution (Phase Profile).

A rule for disposing the nanopost NP in the first pixel correspondence region R1 and a rule for disposing the second pixel correspondence region R2 may be different from each other. In other words, the size, shape, spacing and/or arrangement of the nanoposts NPs provided in the first pixel correspondence region R1 is the size and shape of the nanoposts NPs provided in the second pixel correspondence region R2. , spacing and/or arrangement.

The nanopost NP may have a shape dimension of a sub-wavelength. Here, the sub-wavelength means a wavelength smaller than the wavelength band of light to be branched. The nanopost NP may have, for example, a dimension smaller than a shorter wavelength among the first and second wavelengths. The nanopost NP may have a cylindrical shape having a cross-sectional diameter of a sub-wavelength. However, the shape of the nanopost (NP) is not limited thereto. When the incident light Li is visible light, the diameter of the cross section of the nanopost NP may be smaller than 400 nm, 300 nm, or 200 nm, for example. Meanwhile, the height of the nanopost NP may be 500 nm to 1500 nm, and the height may be greater than the diameter of the cross section. Although not shown, the nanopost NP may be a combination of two or more posts stacked in a height direction (Z direction).

The nanopost NP may be made of a material having a higher refractive index than surrounding materials. For example, the nanoposts (NPs) may include c-Si, p-Si, a-Si, and III-V compound semiconductors (GaP, GaN, GaAs, etc.), SiC, TiO2, SiN, and/or combinations thereof. can The nanoposts NP having a refractive index difference from surrounding materials may change the phase of light passing through the nanoposts NP. This is due to phase delay caused by the shape dimension of the sub-wavelength of the nanopost (NP), and the degree of phase delay is determined by the detailed shape dimension, arrangement type, etc. of the nanopost (NP). A material surrounding the nanopost NP may be made of a dielectric material having a lower refractive index than the nanopost NP. For example, the surrounding material may include SiO ₂ or air.

Area division of the color separation lens array (CSLA) and the shape and arrangement of the nanoposts (NPs) may be set to form a phase distribution that separates incident light according to wavelength and condenses it into a plurality of pixels PX1 and PX2. This wavelength separation may include, but is not limited to, color separation in the visible light band, and the wavelength band may extend to a range of visible light to infrared light, or various other ranges. The first wavelength (λ ₁ ) and the second wavelength (λ ₂ ) may be infrared to visible light wavelength bands, but are not limited thereto and may include various wavelength bands according to the arrangement rules of the array of the plurality of nanoposts (NPs). can In addition, although it is illustrated that two wavelengths are diverged and condensed, incident light may be diverged and condensed in three or more directions depending on the wavelength.

In addition, the color separation lens array (CSLA) has been described as an example in which the nanoposts (NPs) are arranged in a single layer, but the color separation lens array (CSLA) may have a stacked structure in which the nanoposts (NPs) are arranged in a plurality of layers. there is.

Meanwhile, wavelength separation by the color separation lens array (CSLA) may include crosstalk depending on design and process errors. That is, light other than the corresponding wavelength may be incident to the target pixel. The image sensor of the embodiment employs a filter array together with a color separation lens array having a structure that minimizes additional processes while maximizing color separation efficiency by reducing crosstalk. Such a filter array may be implemented in various ways suitable for a pixel array and a wavelength separation form of a color separation lens array (CSLA) corresponding thereto.

3 is a plan view illustrating a color arrangement represented by a pixel array of an image sensor according to an exemplary embodiment.

The illustrated pixel arrangement is an arrangement of a Bayer pattern generally adopted in the image sensor 1000 . As shown, one unit pattern includes four quadrant regions, and the first to fourth quadrants are each a blue pixel (B), a green pixel (G), a red pixel (R), and a green pixel. (G) can be These unit patterns are repeatedly arranged two-dimensionally along the first direction (X direction) and the second direction (Y direction). In other words, within the unit pattern in the form of a 2Х2 array, two green pixels (G) are arranged in one diagonal direction, and one blue pixel (B) and one red pixel (R) are arranged in the other diagonal direction, respectively. do. Looking at the overall pixel arrangement, a first row in which a plurality of green pixels (G) and a plurality of blue pixels (B) are alternately arranged along a first direction, a plurality of red pixels (R) and a plurality of green pixels (G) Second rows alternately arranged along the first direction are repeatedly arranged along the second direction.

The pixel array 1100 of the image sensor 1000 may include a color separation lens array that condenses light of a color corresponding to a specific pixel to correspond to such a color arrangement. That is, the wavelengths separated by the color separation lens array (CSLA) described in FIGS. 2A and 2B may be divided into regions, and the shape and arrangement of the nanoposts (NPs) may be set so that the wavelengths are red, green, and blue.

4A and 4B are cross-sectional views of the pixel array 1100 of the image sensor of FIG. 1 from different cross-sections. FIG. 5A is a plan view showing the arrangement of pixel corresponding regions of the color separation lens array 130 provided in the pixel array 1100, and FIG. 5B is an exemplary nanopost disposed in the color separation lens array 130 of FIG. 4A. It is a plan view showing the shape and arrangement. FIG. 5C is a plan view showing a filter arrangement of the filter array 170 included in the pixel array 1100, and FIG. 5D is a plan view showing a pixel arrangement of the sensor substrate 110 included in the pixel array 1100.

4A and 4B, the pixel array 1100 of the image sensor 1000 includes a sensor substrate 110 including a plurality of pixels 111, 112, 113, and 114 for sensing light, and a sensor substrate 110 ) and a color separation lens array 130 disposed on the filter array 170. A transparent spacer layer 120 may be disposed between the filter array 170 and the color separation lens array 130 .

The sensor substrate 110 may include first green pixels 111 , blue pixels 112 , red pixels 113 , and second green pixels 114 that convert light into electrical signals. As shown in FIGS. 4A, 4B, and 5D, the first green pixels 111 and the blue pixels 112 are alternately arranged along the first direction (X direction), and the positions in the Y direction are different in cross sections. Red pixels 113 and second green pixels 114 may be alternately arranged.

The pixel arrangement of the sensor substrate 110 shown in FIG. 5D is an arrangement of pixels corresponding to the color arrangement of the Bayer pattern shown in FIG. 3 . Hereinafter, the pixel arrangement of the image sensor may be interchangeably used with the same meaning as the pixel arrangement of the sensor substrate. The pixel arrangement of the sensor substrate 110 is for sensing incident light by dividing it into unit patterns such as a Bayer pattern. For example, the first and second green pixels 111 and 114 sense green light, and blue pixels ( 112 may sense blue light, and the red pixel 113 may sense red light. Although not shown, a separation film for cell separation may be further formed at the boundary between cells.

Referring to FIGS. 4A, 4B, 5A, and 5B, the color separation lens array 130 includes four pixel corresponding regions (corresponding to each of the pixels 111, 112, 113, 114) 131, 132, 133, 134). The first green pixel correspondence region 131 corresponds to the first green pixel 111 and may be disposed above the first green pixel 111, the blue pixel correspondence region 132 corresponds to the blue pixel 112, It may be disposed above the blue pixel 111, the red pixel correspondence region 133 corresponds to the red pixel 113 and may be disposed above the red pixel 111, and the second green pixel correspondence region 134 is It corresponds to the second green pixel 114 and may be disposed above the second green pixel 114 . That is, the pixel corresponding regions 131 , 132 , 133 , and 134 of the color separation lens array 130 may face each pixel 111 , 112 , 113 , and 114 of the sensor substrate 110 . The pixel correspondence areas 131, 132, 133, and 134 include a first row in which the first green pixel correspondence areas 131 and 132 are alternately arranged, the red pixel correspondence area, and the second green pixel correspondence area 133 , 134) may be two-dimensionally arranged along the first direction (X direction) and the second direction (Y direction) so that second rows in which alternately arranged second rows are alternately repeated. The color separation lens array 130 also includes a plurality of two-dimensionally arranged unit patterns like the sensor substrate 110, and each unit pattern includes pixel corresponding regions 131, 132, 133, and 134 arranged in a 2Х2 shape. ).

Meanwhile, the area of the color separation lens array 130 is described as including a green light condensing area condensing green light, a blue light condensing area condensing blue light, and a red light condensing area condensing red light, similar in concept to that described in FIG. 2A. It could be.

The color separation lens array 130 diverges and condenses green light to the first and second green pixels 111 and 114, diverts and condenses blue light to the blue pixel 112, and diverges red light to the red pixel 113. It may include nanoposts (NPs) whose size, shape, spacing, and/or arrangement are determined so as to condense light. Meanwhile, the thickness (Z direction) of the color separation lens array 130 may be similar to the height of the nanopost NP, and may be 500 nm to 1500 nm.

Referring to FIG. 5B , the pixel correspondence regions 131, 132, 133, and 134 may include cylindrical nanoposts (NPs) having circular cross sections, and at the center of each region, nanoposts (NPs having different cross-sections) NP) may be disposed, and nanoposts NP may also be disposed at the center of the boundary between pixels and at the intersection of the pixel boundary. A cross-sectional area of the nanoposts NP disposed at the boundary between pixels may be smaller than that of the nanoposts NP disposed at the center of the pixel.

Looking in detail at the arrangement of the nanoposts NP included in the pixel corresponding regions 131, 132, 133, and 134 constituting the unit pattern, the first green pixel corresponding region 131 among the nanoposts NPs The cross-sectional area of the nanopost disposed in the center and the nanopost disposed in the center of the second green pixel corresponding region 134 is the nanopost disposed in the center of the blue pixel corresponding region 132 or the center of the red pixel corresponding region 133 , and the cross-sectional area of the nanoposts disposed at the center of the blue pixel corresponding region 132 is greater than the cross-sectional area of the nanoposts disposed at the center of the red pixel corresponding region 133 . However, this is just one example, and nanoposts (NPs) of various shapes, sizes, and arrangements may be applied as needed.

The nanoposts NPs provided in the first and second green pixel corresponding regions 131 and 134 may have different distribution rules along the first direction (X direction) and the second direction (Y direction). For example, the nanoposts NPs disposed in the first and second green pixel corresponding regions 131 and 134 may have different size arrangements along the first direction (X direction) and the second direction (Y direction). there is.

On the other hand, the nanoposts NPs disposed in the blue pixel corresponding region 132 and the red pixel corresponding region 133 may have the same distribution rule along the first direction (X direction) and the second direction (Y direction). there is.

Meanwhile, the nanoposts p9 disposed at four corners of each of the pixel correspondence regions 131 , 132 , 133 , and 134 , ie, at positions where the four regions intersect, may have the same cross-sectional area.

This distribution is due to the arrangement of pixels in the Bayer pattern. The blue pixel 112 and the red pixel 113 are identical to the green pixels 111 and 114 in the first direction (X direction) and the second direction (Y direction), whereas the first green pixel 111 is different from each other in that adjacent pixels in the first direction (X direction) are blue pixels 112 and adjacent pixels in the second direction (Y direction) are red pixels 113, and the second green pixels 114 are different from each other in the first direction ( The pixels adjacent in the X direction) are red pixels 113 and the pixels adjacent in the second direction (Y direction) are blue pixels 114, which are different from each other. In addition, in the first and second green pixels 111 and 114, pixels adjacent in four diagonal directions are green pixels, and in the blue pixel 112, pixels adjacent in four diagonal directions are red pixels 113, which are the same as each other, and red pixels 112 are adjacent to each other. In the pixel 113, pixels adjacent in four diagonal directions are the same as the blue pixel 112. Therefore, in the blue and red pixel corresponding regions 132 and 133 corresponding to the blue pixel 112 and the red pixel 113, nanoposts NPs are arranged in a 4-fold symmetry form, In the first and second green pixel corresponding regions 131 and 134 , nanoposts NPs may be arranged in a 2-fold symmetry. In particular, the first and second green pixel correspondence regions 131 and 134 are rotated by 90 degrees relative to each other.

Although all of the nanoposts NPs shown in FIG. 5B have a symmetrical circular cross-sectional shape, some nanoposts having an asymmetrical cross-sectional shape may be included. For example, nanoposts having an asymmetric cross-sectional shape having different widths in the first direction (X direction) and in the second direction (Y direction) are employed in the first and second green pixel corresponding regions 131 and 134, Nanoposts having symmetrical cross-sectional shapes having the same width in the first direction (X direction) and in the second direction (Y direction) may be employed for the blue and red pixel corresponding regions 132 and 133 .

The arrangement rule of the nanoposts (NP) described above is an example for wavelength separation corresponding to the pixel arrangement, and is not limited to the illustrated pattern.

Referring to FIGS. 4A, 4B, and 5C , the filter array 170 includes a plurality of transparent areas BW and a plurality of filters GF of a single color. The plurality of filters GF may be green filters GF that transmit green light and absorb light of other colors. The green filter GF is disposed to face the green pixels 111 and 114 and also disposed to face the green pixel corresponding regions 131 and 134 of the color separation lens array 130 . The transparent area BW is disposed to face the red pixel 113 and the blue pixel 112, and is disposed to face the red pixel corresponding region 133 and the blue pixel corresponding region 132 of the color separation lens array 130. do. The transparent area BW may include, for example, a transparent resin material.

The filter array 170 is for reducing crosstalk that may occur in color separation by the color separation lens array 130 . Crosstalk means that light of a color other than the corresponding color is incident to a target pixel in a color separation operation. Since such crosstalk can occur particularly in long-wavelength light among the wavelength bands color-separated by the color separation lens array 130, the filter array 170 prevents light in the long-wavelength band from being incident to pixels other than the corresponding pixel. A single color and arrangement position of the filter employed in can be set. In the pixel arrangement of the Bayer pattern, since the ratio of the green pixels is 50% of the total, long-wavelength light can effectively reduce crosstalk by using the green filter GF.

The filter array 170 provided in the image sensor 1000 of the embodiment has nothing to do with light loss occurring when color expression is performed using only color filters. For the colors separated by the color separation lens array 130, since it serves to remove some crosstalk, the overall color purity can be increased with almost no decrease in light efficiency. In addition, using a color filter having all filter regions corresponding to red, green, and blue for this purpose is uneconomical in consideration of process, cost, and light efficiency. Since each of the red, green, and blue filter regions is made of a different material, deposition, photolithography, and etching processes are performed for each material. This is because, according to the trend of high-pixelization, in which the pixel size is reduced and the number is increased, such an elaborate additional process may increase cost and decrease yield. By the filter array 170 of the embodiment, reduction in light efficiency and additional processes can be minimized, crosstalk can be reduced, and color purity can be increased.

The spacer layer 120 is disposed between the sensor substrate 110 and the color separation lens array 130 to maintain a constant distance between the sensor substrate 110 and the color separation lens array 130 . The spacer layer 120 is a dielectric material having a lower refractive index than nanoposts (NP), such as materials transparent to visible light, such as SiO2 and siloxane-based spin on glass (SOG), and having low absorption in the visible light band. can be made of material. The thickness 120h of the spacer layer 120 may be selected within the range of ht - p ≤ h ≤ ht + p. Here, ht is a focal length of light having a central wavelength of a wavelength band in which the color separation lens array 130 diverges, and p is a pixel pitch. In an embodiment, the pixel pitch may be several μm or less, for example, 2 μm or less, 1.5 μm or less, 1 μm or less, or 0.7 μm or less. The pixel pitch may range from approximately 0.5 μm to 1.5 μm. The thickness of the spacer layer 120 may be designed based on, for example, 540 nm, which is the central wavelength of green light.

In the embodiment, since the filter array 170 is disposed between the sensor substrate 110 and the color separation lens array 130, the thickness of the spacer layer 120 is determined by considering the thickness of the filter array 170. Among the wavelength bands separated by the array 130, the focal length of the center wavelength of light may be set smaller than the focal length of the color separation lens array 130. For example, the thickness may be set smaller than the focal length of the green light by the color separation lens array 130 .

The spacer layer 120 may also support the nanoposts NP constituting the color separation lens array 130 . The spacer layer 120 may include a dielectric material having a refractive index smaller than that of the nanoposts NPs.

A region between the nanoposts NPs may include a dielectric having a lower refractive index than the nanoposts NPs, for example, air or SiO ₂ . Although not shown, a low refractive index protective layer covering the sides and tops of the nanoposts NPs may be further provided.

FIG. 6A shows phase distributions of green light and blue light passing through the color separation lens array 130 along the line II′ of FIG. 5B, and FIG. 6B shows pixel corresponding regions of green light passing through the color separation lens array 130 ( 131 , 132 , 133 , and 134 , and FIG. 6C shows the phase at the center of pixel corresponding regions 131 , 132 , 133 , and 134 of blue light passing through the color separation lens array 130 . The phase distribution of the green light and the blue light of FIG. 6A is similar to the phase distribution of the first and second wavelength lights exemplarily described in FIG. 2B.

Referring to FIGS. 6A and 6B , the green light passing through the color separation lens array 130 is greatest at the center of the first green pixel correspondence region 131 and is in a direction away from the center of the first green pixel correspondence region 131 . It may have a first green light phase distribution PPG1 that decreases to . Specifically, at a position immediately after passing through the color separation lens array 130, that is, at the lower surface of the color separation lens array 130 or the upper surface of the spacer layer 120, the phase of the green light is the first green pixel corresponding region. It is largest at the center of (131) and gradually decreases in the form of a concentric circle as it moves away from the center of the first green pixel correspondence region 131. It is minimum at the center and minimum at the junction between the first green pixel correspondence region 131 and the second green pixel correspondence region 134 in the diagonal direction. When the phase of light emitted from the center of the first green pixel corresponding region 131 of green light is set to be 2π as a standard, the phase is 0.9π to 1.1π at the center of the blue and red pixel corresponding regions 132 and 133, and the second green pixel Light having a phase of 2π at the center of the corresponding region 134 and a phase of 1.1π to 1.5π may be emitted from a contact point between the first green pixel corresponding region 131 and the second green pixel corresponding region 134 . Accordingly, a phase difference between green light passing through the center of the first green pixel correspondence region 131 and green light passing through the center of the blue and red pixel correspondence regions 132 and 133 may be 0.9π to 1.1π.

Meanwhile, the first green light phase distribution PPG1 does not mean that the phase delay amount of light passing through the center of the first green pixel correspondence region 131 is the greatest, and the phase of light passing through the first green pixel correspondence region 131 When is set to 2π, if the phase delay of light passing through other positions is greater and has a phase value greater than 2π, it may be a value remaining after removing 2nπ, that is, a wrapped phase distribution. For example, when the phase of light passing through the first green pixel correspondence region 131 is 2π, and the phase of light passing through the center of the blue pixel correspondence region 132 is 3π, in the blue pixel correspondence region 132 The phase of may be π remaining after removing 2π (in the case of n = 1) from 3π.

Referring to FIGS. 6A and 6C , the blue light passing through the color separation lens array 130 is largest at the center of the blue pixel corresponding region 132 and decreases in a direction away from the center of the blue pixel corresponding region 132. It can have a phase distribution (PPB). Specifically, the phase of the blue light at the position immediately after passing through the color separation lens array 130 is the largest at the center of the blue pixel correspondence region 132, and forms a concentric circle as the distance from the center of the blue pixel correspondence region 132 increases. , becomes minimum at the center of the first and second green pixel correspondence regions 131 and 134 in the X and Y directions, and becomes minimum at the center of the red pixel correspondence region 133 in the diagonal direction. . If the phase of blue light at the center of the blue pixel correspondence region 132 is 2π, the phase of the first and second green pixel correspondence regions 131 and 134 at the center may be, for example, 0.9π to 1.1π. , the phase at the center of the red pixel correspondence region 133 may be a smaller value than the phase at the center of the first and second green pixel correspondence regions 131 and 134, for example, 0.5π to 0.9π.

FIG. 6D exemplarily shows a traveling direction of green light incident to the first green light condensing area, and FIG. 6E exemplarily shows an array of the first green light condensing area.

The green light incident around the first green pixel correspondence region 131 is condensed to the first green pixel 111 by the color separation lens array 130, as shown in FIG. 6D, and the first green pixel 111 In addition to the first green pixel corresponding region 131, green light coming from the blue and red pixel corresponding regions 132 and 133 is incident. That is, the phase distribution of the green light described in FIGS. 6A and 6B is the center of the first green pixel correspondence region 131 and the adjacent two blue pixel correspondence regions 132 and two red pixel correspondence regions 133. The green light passing through the first green light concentrating region GL connected thereto is focused on the first green pixel 111 . Accordingly, as shown in FIG. 6E , the color separation lens array 130 may operate as a first green light condensing area GL1 array condensing green light into the first green pixel 111 . The area of the first green light condensing region GL1 is larger than that of the corresponding first green pixel 111, and may be, for example, 1.2 to 2 times larger.

FIG. 6F exemplarily shows a traveling direction of blue light incident to the blue light condensing area, and FIG. 6G exemplarily shows an array of blue light condensing areas.

Blue light is condensed into the blue pixel 112 by the color separation lens array 130 as shown in FIG. 6F , and blue light coming from the pixel corresponding regions 131 , 132 , 133 , and 134 is incident on the blue pixel 112 . The phase distribution of the blue light described above with reference to FIGS. 6A and 6C shows the blue light passing through the blue light condensing area BL made by connecting the centers of four adjacent red pixel corresponding areas 133 vertices to the blue pixel corresponding area 132. is focused on the blue pixel 112. Accordingly, as shown in FIG. 6G , the color separation lens array 130 may operate as a blue light condensing area BL array condensing blue light to a blue pixel. The area of the blue light collecting area BL is larger than that of the corresponding blue pixel 112, and may be, for example, 1.5 to 4 times larger. A portion of the blue light collecting area BL may overlap the first green light collecting area GL1 described above, the second green light collecting area GL2 and the red light collecting area RL, which will be described later.

FIG. 7A shows the phase distribution of red light and green light passing through the color separation lens array 130 along the line II-II′ of FIG. 5B, and FIG. 7c shows the phase at the center of the pixel corresponding regions 131, 132, 133, and 134 of the green light passing through the color separation lens array 130. see.

Referring to FIGS. 7A and 7B , the red light passing through the color separation lens array 130 is largest at the center of the red pixel corresponding region 133 and decreases in a direction away from the center of the red pixel corresponding region 133. It may have a phase distribution (PPR). Specifically, the phase of the red light at the position immediately after passing through the color separation lens array 130 is the largest at the center of the red pixel correspondence region 133, and forms a concentric circle as the distance from the center of the red pixel correspondence region 133 increases. , becomes minimum at the center of the first and second green pixel correspondence regions 131 and 134 in the X and Y directions, and becomes minimum at the center of the blue pixel correspondence region 132 in the diagonal direction. . If the phase of red light at the center of the red pixel correspondence region 133 is 2π, the phase of the first and second green pixel correspondence regions 131 and 134 at the center may be, for example, 0.9π to 1.1π. , The phase at the center of the blue pixel correspondence region 132 may be a smaller value than the phase at the center of the first and second green pixel correspondence regions 131 and 134, for example, 0.6π to 0.9π.

Referring to FIGS. 7A and 7C , the green light passing through the color separation lens array 130 is greatest at the center of the second green pixel corresponding region 134 and moves away from the center of the second green pixel corresponding region 134 . It may have a second green light phase distribution PPG2 that decreases to . Comparing the first green light phase distribution PPG1 of FIG. 6A with the second green light phase distribution PPG2 of FIG. 8 , the second green light phase distribution PPG2 extends the first green light phase distribution PPG1 in the X direction and the Y direction. It is equivalent to a parallel shift by 1 pixel pitch. That is, the first green light phase distribution PPG1 has the largest phase at the center of the first green pixel corresponding region 131, while the second green light phase distribution PPG2 has the largest phase at the center of the first green pixel corresponding region 131. The phase is the largest at the center of the second green pixel correspondence region 134, which is separated by one pixel pitch in the X and Y directions. Phase distributions of FIGS. 6B and 8C showing the phases at the centers of the pixel correspondence regions 131, 132, 133, and 134 may be the same. Once again, the phase distribution of green light based on the second green pixel corresponding region 134 is described. When the phase of light emitted from the center of the second green pixel corresponding region 134 is set to be 2π as a standard, blue and red The phase is 0.9π to 1.1π at the center of the pixel correspondence regions 132 and 133, the phase is 2π at the center of the first green pixel correspondence region 131, and the first green pixel correspondence region 131 and the second green pixel correspondence region ( 134), light having a phase of 1.1π to 1.5π may be emitted.

FIG. 7D exemplarily shows a traveling direction of red light incident to the red light condensing area, and FIG. 7E exemplarily shows an array of red light condensing areas.

The red light is condensed into the red pixel 113 by the color separation lens array 130 as shown in FIG. 7D , and the red light coming from the pixel corresponding regions 131, 132, 133, and 134 is incident on the red pixel 113. The phase distribution of the red light described above with reference to FIGS. 7A and 7B is the red light passing through the red light condensing region RL made by connecting the centers of four adjacent blue pixel corresponding regions 132 vertices to the red pixel corresponding region 133. is focused on the red pixel 113. Accordingly, as shown in FIG. 7E , the color separation lens array 130 may operate as a red light concentrating area RL array condensing red light to red pixels. The area of the red light collecting region RL is larger than that of the corresponding red pixel 113, and may be, for example, 1.5 to 4 times larger. A portion of the red light collecting area RL may overlap the first and second green light collecting areas GL1 and GL2 and the blue light collecting area BL.

Referring to FIGS. 7F and 7G , the green light incident around the second green pixel correspondence region 134 proceeds similarly to the green light incident around the first green pixel correspondence region 131, and is shown in FIG. 7F. As shown, light is focused on the second green pixel 114 . Accordingly, as shown in FIG. 7G , the color separation lens array 130 may operate as a second green light condensing area GL2 array condensing green light into the second green pixel 114 . The area of the second green light collecting region GL2 is larger than that of the corresponding second green pixel 114, and may be, for example, 1.2 to 2 times larger.

8A and 8B are plan and cross-sectional views of a pixel array of an image sensor according to another embodiment.

Referring to FIG. 8A , all or some of the pixels 111, 112, 113, and 114 of the sensor substrate 115 of the pixel array 1101 may include two or more light-sensing cells. Four or more light-sensing cells included in one pixel may share the light condensing area of the color separation lens array. When a plurality of light-sensing cells capable of independently detecting signals are included in one pixel, the resolution of the image sensor can be improved, and the image sensor (1000 ) and/or an auto focus function of a camera device including the image sensor 1000 may be implemented. A pixel including two or more light-sensing cells may be an auto-focus pixel. 8A shows that each of the pixels 111, 112, 113, and 114 includes four light-sensing cells, that is, the first green pixel 111 detects 1-1 to 1-4 green light. cells 111a, 111b, 111c, and 111d, the blue pixels 112 include first to fourth blue light sensing cells 112a, 112b, 112c, and 112d, and the red pixels 113 include first to fourth light sensing cells. The fourth red light sensing cells 113a, 113b, 113c, and 113d are included, and the second green pixel 114 includes the 2-1 to 2-4 green light sensing cells 114a, 114b, 114c, and 114d. show the case However, this is exemplary and is not limited thereto. An autofocus pixel may include, for example, 2 to 16 light-sensing cells. In order to accurately calculate a difference between output signals of two or more light-sensing cells included in one pixel, an auto-focus pixel may include a pixel internal separator for separating the light-sensing cells. Since the photo-sensing cells are separated from each other by the separation film inside the pixel, separate signals can be output.

FIG. 9B conceptually shows obtaining a signal necessary for focus adjustment using a pixel including a plurality of light-sensing cells sharing a light-concentrating area. As shown in FIG. 9B, among the lights incident in the direction A toward the blue light condensing area BL, the blue light is incident on the first light sensing cell 112a of the second pixel 112, and the blue light incident in the direction B. may be incident on the second light-sensing cell 112b. That is, the signal sensed by the first light-sensing cell 112a of the second pixel 112 indicates the amount of light incident in the direction A, and the second light-sensing cell 112b of the second pixel 112 detects One signal may represent the amount of light incident in the B direction. In this case, the difference between the signals detected by the first and second light sensing cells 112a and 112b can be clearly distinguished according to the traveling direction of the incident light, and the difference can be used as an auto focus control signal. As described above, since the thickness 120h of the spacer layer 120 is set based on the focal length of the condensing area of the color separation lens array 130, differences in light signals incident from different directions can be clearly distinguished. and autofocus performance can be improved.

Although the above-described two embodiments are exemplified in the form of having a pixel arrangement of a Bayer pattern, other pixel arrangements in various ways are possible. For example, an RGB method in which red pixels (R), green pixels (G), and blue pixels (B) constitute one unit pattern, magenta pixels, cyan pixels, and yellow pixels , and CYGM method in which green pixels constitute one unit pattern, RGBW method in which green pixels (G), red pixels (R), blue pixels (B), and white pixels (W) constitute one unit pattern arrangement is also possible. Also, the unit pattern may have a 3Х2 array form. In addition, pixels of the pixel array may be arranged in various ways according to color characteristics of the image sensor 1000 . A color separation lens array and a filter array may be provided to correspond to the arrangement of various pixels.

Hereinafter, embodiments of an image sensor including pixel arrays of various other methods and corresponding color separation lens arrays and filter arrays will be described.

9 conceptually shows a pixel array of an image sensor according to another embodiment in relation to a pixel array and a filter array corresponding thereto.

The pixel array 1102 of the image sensor includes a sensor substrate 110 having a pixel array in a Bayer pattern array, a color separation lens array 130 that separates incident light accordingly, and the sensor substrate 110 and the color separation lens array 130. ) and a filter array 171 disposed between. The pixel array 1102 of this embodiment includes the sensor substrate 110 and the color separation lens array 130 substantially the same as the pixel array 1101 described above, and the pixel array described above in the filter arrangement of the filter array 171. There is a difference from the filter array 170 of (1100).

The filter array 171 includes a plurality of cyan filters CF and a plurality of transparent regions BW. The cyan filter CF is disposed facing the green pixel G and the blue pixel B, respectively, and the transparent area BW is disposed facing the red pixel R.

The cyan filter (CF) is a filter that transmits green light and blue light and absorbs red light. As described above, crosstalk by the color separation lens array 139 may occur mainly in a long wavelength band, and by using the filter array 171, red light is incident to the green pixel (G) or the blue pixel (B). that can be prevented The cyan filter (CF) can be manufactured using a material exhibiting cyan color, and the process steps are reduced by 1/3 compared to the conventional manufacturing of color filters containing all of red, green, and blue, while maintaining high color separation. may indicate an improvement in efficiency.

10 conceptually shows a pixel array of an image sensor according to another embodiment in relation to a pixel array and a filter array corresponding thereto.

The image sensor pixel array 1103 of this embodiment is a color separation lens array 140 having a sensor substrate 116 having an RGB-type pixel array and corresponding pixel corresponding regions 141, 142, and 143 separating incident light. ) and a filter array 172 disposed between the sensor substrate 116 and the color separation lens array 140. The filter array 172 includes a plurality of blue filters (BF) and a transparent area (BW), the blue filter (BF) is disposed to face the blue pixel (B), and the transparent area (BW) is disposed to face the red pixel (R). ), and is disposed facing the green pixel (G).

11 conceptually shows a pixel array of an image sensor according to another embodiment in relation to a pixel array and a filter array corresponding thereto.

The image sensor pixel array 1104 of this embodiment is a color separation lens array 140 having a sensor substrate 116 having an RGB-type pixel array and corresponding pixel corresponding regions 141, 142, and 143 separating incident light. ) and a filter array 173 disposed between the sensor substrate 116 and the color separation lens array 140. The filter array 173 includes a plurality of cyan filters CF and a plurality of transparent regions BW. The cyan filter CF is disposed to face the blue pixel B and the green pixel GF, and the transparent area BW is disposed to face the red pixel R.

12 conceptually shows a pixel array of an image sensor according to another embodiment in relation to a pixel array and a filter array corresponding thereto.

The image sensor pixel array 1105 of this embodiment includes a sensor substrate 118 having a CMYG pixel array, and a color separation lens array having corresponding pixel corresponding regions 151, 152, 153, and 154 separating incident light. 150 and a filter array 173 disposed between the sensor substrate 118 and the color separation lens array 150. The plurality of pixels of the sensor substrate 118 include a cyan pixel (C), a magenta pixel (M), a yellow pixel (Y), and a green pixel (G). The filter array 173 includes a cyan filter CF and a transparent region BW. The cyan filter CF is disposed to face the cyan pixel C and the green pixel G, and the transparent area BW is disposed to face the magenta pixel M and the yellow pixel Y.

The auto focus control pixels described in FIGS. 8A and 8B may be applied to the pixel array described in FIGS. 9 to 12 . That is, some or all of the pixels may include a plurality of light-sensing cells, and a signal difference between the plurality of light-sensing cells included in the same pixel may be used as an auto-focus control signal.

13A to 13C are plan views illustrating a pixel array of a pixel array of an image sensor and a color separation lens array and filter array corresponding to the pixel array according to another exemplary embodiment.

The pixel array 1106 of this embodiment has a pixel array capable of representing a Bayer pattern shape by pixel binning using a single color filter array 170 .

Pixel binning is driving in which signals generated from a plurality of pixels are summed into a single signal under a specific circumstance. Such actuation may be used, for example, when the resolution of an output image of a camera employing an image sensor is lower than that of the image sensor, or to increase sensitivity when images are acquired at low light levels.

As shown in FIG. 13A , the plurality of pixels provided in the pixel array 1106 includes a first pixel group PXG1 and a second pixel group PXG2 in which red pixels R and green pixels B alternate. and a third pixel group PXG3 and a fourth pixel group PXG4 in which green pixels G and blue pixels B are alternately arranged. The first pixel group PXG1 and the second pixel group PXG2 are alternately and repeatedly arranged along the X direction, and the first pixel group PXG1 and the second pixel group PXG2 have red pixels R and green pixels as a whole. The red pixels R and the green pixels B in the first pixel group PXG1 and the second pixel group PXG2 are arranged so that the pixels G are alternated in the X direction and the Y direction. The third pixel group PXG3 and the fourth pixel group PXG4 are alternately and repeatedly arranged along the X direction in the next row. In the third pixel group PXG3 and the fourth pixel group PXG4 as a whole, the third pixel group PXG31 and the fourth pixel group are alternated in the X direction and the Y direction so that the green pixel G and the blue pixel B are alternated. The arrangement of green pixels (G) and blue pixels (B) in (PXG4) is set. The first to fourth pixel groups PXG1 , PXG2 , PXG3 , and PXG4 form a unit group, and a plurality of unit groups are repeatedly arranged two-dimensionally.

As shown in FIG. 13B, the color separation lens array 160 is also partitioned into regions corresponding to the pixel arrangement. That is, the first pixel correspondence group 161 and the second pixel correspondence group 162 in which the red pixel correspondence region 161a and the green pixel correspondence region 161b are alternated are included, and the green pixel correspondence region 163a and the green pixel correspondence region 163a are included. The pixel correspondence region 163b includes a third pixel correspondence group 163 and a fourth pixel correspondence group 163 which are alternated. The first to fourth pixel correspondence groups 161, 162, 163, and 164 form a unit group, and they are two-dimensionally repeatedly arranged.

As shown in FIG. 13C, in the filter array 170, the green filter GF facing the green pixel G, the red pixel R, and the transparent area BW corresponding to the blue pixel B are alternately arranged. In a form, it is substantially the same as the filter array 170 of the image sensor pixel array 1100 described with reference to FIGS. 4A, 4B, and 5C.

14A and 14B show high binning and low binning driving of the image sensors of FIGS. 13A to 13C.

Referring to FIG. 14A , signals of pixels adjacent in two diagonal directions within each pixel group PXG1 , PXG2 , PXG3 , and PXG4 are summed. Pixels adjacent to each other in the X-direction are combined, and as a whole, a color arrangement similar to a Bayer pattern is displayed.

14B shows a form in which pixels adjacent to each other in a diamond direction within each pixel group PXG1 , PXG2 , PXG3 , and PXG4 are combined. A smaller number of pixels than that of FIG. 14A is combined, and a color arrangement similar to the Bayer pattern in a form different from that of FIG. 14A can be displayed.

In the above description, the binning group is exemplified in units of 3x3, but binning groups may be set in various other forms such as 4x4 and 5x5, and pixel combinations are possible in various forms.

The image sensor 1000 including the pixel array 1100, 1101, 1102, 1103, 1104, 1105, and 1106 as described above separates colors using a color separation lens array, so that a conventional color filter , For example, since there is almost no light loss that occurs when color is expressed using an organic filter, a sufficient amount of light can be provided to the pixel even if the size of the pixel is reduced. In addition, since a single-color filter array having a structure capable of reducing crosstalk in a long-wavelength band that may be generated by a color separation lens array is provided, color separation efficiency can be further improved. Therefore, it is possible to manufacture an ultra-high resolution, ultra-small, and highly sensitive image sensor having hundreds of millions of pixels or more. Such ultra-high-resolution, ultra-small, and highly sensitive image sensors may be employed in various high-performance optical devices or high-performance electronic devices.

15 is a block diagram illustrating an example of an electronic device ED01 including an image sensor 1000. Referring to FIG. Referring to FIG. 15 , in a network environment ED00, an electronic device ED01 communicates with another electronic device ED02 through a first network ED98 (such as a short-distance wireless communication network) or a second network ED99. It is possible to communicate with another electronic device ED04 and/or server ED08 via (a long-distance wireless communication network, etc.). The electronic device ED01 may communicate with the electronic device ED04 through the server ED08. The electronic device (ED01) includes a processor (ED20), a memory (ED30), an input device (ED50), an audio output device (ED55), a display device (ED60), an audio module (ED70), a sensor module (ED76), and an interface (ED77). ), haptic module (ED79), camera module (ED80), power management module (ED88), battery (ED89), communication module (ED90), subscriber identification module (ED96), and/or antenna module (ED97). can In the electronic device ED01, some of these components (such as the display device ED60) may be omitted or other components may be added. Some of these components can be implemented as a single integrated circuit. For example, the sensor module ED76 (fingerprint sensor, iris sensor, illuminance sensor, etc.) may be implemented by being embedded in the display device ED60 (display, etc.).

The processor ED20 may execute software (program ED40, etc.) to control one or a plurality of other components (hardware, software components, etc.) of the electronic device ED01 connected to the processor ED20, and , various data processing or calculations can be performed. As part of data processing or calculation, processor ED20 loads commands and/or data received from other components (sensor module ED76, communication module ED90, etc.) into volatile memory ED32 and The command and/or data stored in ED32) may be processed, and the resulting data may be stored in non-volatile memory ED34. The processor (ED20) includes a main processor (ED21) (central processing unit, application processor, etc.) and a co-processor (ED23) (graphics processing unit, image signal processor, sensor hub processor, communication processor, etc.) that can operate independently or together with it. can include The auxiliary processor ED23 may use less power than the main processor ED21 and perform specialized functions.

The auxiliary processor ED23 takes the place of the main processor ED21 while the main processor ED21 is inactive (sleep state), or the main processor ED21 is active (application execution state). Together with the processor ED21, functions and/or states related to some of the components of the electronic device ED01 (display device ED60, sensor module ED76, communication module ED90, etc.) may be controlled. can The auxiliary processor ED23 (image signal processor, communication processor, etc.) may be implemented as part of other functionally related components (camera module ED80, communication module ED90, etc.).

The memory ED30 may store various data required by components (processor ED20, sensor module ED76, etc.) of the electronic device ED01. The data may include, for example, input data and/or output data for software (such as the program ED40) and commands related thereto. The memory ED30 may include a volatile memory ED32 and/or a non-volatile memory ED34.

The program ED40 may be stored as software in the memory ED30 and may include an operating system ED42, middleware ED44, and/or an application ED46.

The input device ED50 may receive a command and/or data to be used by a component (such as the processor ED20) of the electronic device ED01 from an external device (such as a user) of the electronic device ED01. The input device ED50 may include a microphone, mouse, keyboard, and/or a digital pen (stylus pen, etc.).

The sound output device ED55 may output sound signals to the outside of the electronic device ED01. The audio output device ED55 may include a speaker and/or a receiver. The speaker can be used for general purposes, such as multimedia playback or recording playback, and the receiver can be used to receive an incoming call. The receiver may be incorporated as a part of the speaker or implemented as an independent separate device.

The display device ED60 may visually provide information to the outside of the electronic device ED01. The display device ED60 may include a display, a hologram device, or a projector and a control circuit for controlling the device. The display device ED60 may include a touch circuitry set to detect a touch and/or a sensor circuit (such as a pressure sensor) set to measure the intensity of force generated by the touch.

The audio module ED70 may convert sound into an electrical signal or vice versa. The audio module ED70 acquires sound through the input device ED50, the sound output device ED55, and/or other electronic devices directly or wirelessly connected to the electronic device ED01 (such as the electronic device ED02). ) may output sound through a speaker and/or a headphone.

The sensor module ED76 detects the operating state (power, temperature, etc.) of the electronic device ED01 or the external environmental state (user state, etc.), and generates electrical signals and/or data values corresponding to the detected state. can do. The sensor module ED76 includes a gesture sensor, a gyro sensor, a pressure sensor, a magnetic sensor, an acceleration sensor, a grip sensor, a proximity sensor, a color sensor, an IR (Infrared) sensor, a biosensor, a temperature sensor, a humidity sensor, and/or an illuminance sensor. May contain sensors.

The interface ED77 may support one or a plurality of specified protocols that may be used to directly or wirelessly connect the electronic device ED01 to another electronic device (such as the electronic device ED02). The interface ED77 may include a high definition multimedia interface (HDMI), a universal serial bus (USB) interface, an SD card interface, and/or an audio interface.

The connection terminal ED78 may include a connector through which the electronic device ED01 may be physically connected to another electronic device (such as the electronic device ED02). The connection terminal ED78 may include an HDMI connector, a USB connector, an SD card connector, and/or an audio connector (such as a headphone connector).

The haptic module ED79 can convert electrical signals into mechanical stimuli (vibration, movement, etc.) or electrical stimuli that the user can perceive through tactile or kinesthetic senses. The haptic module ED79 may include a motor, a piezoelectric element, and/or an electrical stimulation device.

The camera module ED80 may capture still images and moving images. The camera module ED80 may include a lens assembly including one or a plurality of lenses, the image sensor 1000 of FIG. 1 , image signal processors, and/or flashes. A lens assembly included in the camera module ED80 may collect light emitted from a subject that is an image capture target.

The power management module ED88 may manage power supplied to the electronic device ED01. The power management module ED88 may be implemented as part of a Power Management Integrated Circuit (PMIC).

The battery ED89 may supply power to components of the electronic device ED01. The battery ED89 may include a non-rechargeable primary cell, a rechargeable secondary cell, and/or a fuel cell.

The communication module ED90 establishes a direct (wired) communication channel and/or a wireless communication channel between the electronic device ED01 and other electronic devices (electronic device ED02, electronic device ED04, server ED08, etc.); And it can support communication through the established communication channel. The communication module ED90 may include one or a plurality of communication processors that operate independently of the processor ED20 (application processor, etc.) and support direct communication and/or wireless communication. The communication module (ED90) includes a wireless communication module (ED92) (cellular communication module, short-range wireless communication module, GNSS (Global Navigation Satellite System, etc.) communication module) and/or a wired communication module (ED94) (LAN (Local Area Network) communication). module, power line communication module, etc.). Among these communication modules, the corresponding communication module is a first network (ED98) (a local area communication network such as Bluetooth, WiFi Direct, or IrDA (Infrared Data Association)) or a second network (ED99) (cellular network, Internet, or computer network (LAN). , WAN, etc.) to communicate with other electronic devices. These various types of communication modules may be integrated into one component (single chip, etc.) or implemented as a plurality of separate components (multiple chips). The wireless communication module ED92 uses the subscriber information (International Mobile Subscriber Identifier (IMSI), etc.) stored in the subscriber identification module ED96 within a communication network such as the first network ED98 and/or the second network ED99. The electronic device (ED01) can be identified and authenticated in .

The antenna module ED97 can transmit or receive signals and/or power to the outside (other electronic devices, etc.). The antenna may include a radiator made of a conductive pattern formed on a substrate (PCB, etc.). The antenna module ED97 may include one or a plurality of antennas. When a plurality of antennas are included, an antenna suitable for a communication method used in a communication network such as the first network ED98 and/or the second network ED99 is selected from among the plurality of antennas by the communication module ED90. can Signals and/or power may be transmitted or received between the communication module ED90 and other electronic devices through the selected antenna. In addition to the antenna, other parts (RFIC, etc.) may be included as part of the antenna module (ED97).

Some of the components are connected to each other through communication methods (bus, GPIO (General Purpose Input and Output), SPI (Serial Peripheral Interface), MIPI (Mobile Industry Processor Interface), etc.) and signal (command, data, etc.) ) are interchangeable.

Commands or data may be transmitted or received between the electronic device ED01 and the external electronic device ED04 through the server ED08 connected to the second network ED99. The other electronic devices ED02 and ED04 may be of the same or different type as the electronic device ED01. All or part of the operations executed in the electronic device ED01 may be executed in one or a plurality of other electronic devices ED02 , ED04 , and ED08 . For example, when the electronic device ED01 needs to perform a certain function or service, instead of executing the function or service itself, one or more other electronic devices perform some or all of the function or service. You can ask to do it. One or a plurality of other electronic devices receiving the request may execute additional functions or services related to the request and deliver the result of the execution to the electronic device ED01. To this end, cloud computing, distributed computing, and/or client-server computing technologies may be used.

FIG. 16 is a block diagram illustrating a camera module ED80 included in the electronic device of FIG. 15 . Referring to FIG. 16, the camera module ED80 includes a lens assembly 1110, a flash 1120, an image sensor 1000 (such as the image sensor 1000 of FIG. 1), an image stabilizer 1140, and a memory 1150. (buffer memory, etc.), and/or image signal processor 1160. The lens assembly 1110 may collect light emitted from a subject that is an image capture target. The camera module ED80 may include a plurality of lens assemblies 1110, and in this case, the camera module ED80 may be a dual camera, a 360 degree camera, or a spherical camera. Some of the plurality of lens assemblies 1110 may have the same lens properties (angle of view, focal length, auto focus, F number, optical zoom, etc.) or different lens properties. The lens assembly 1110 may include a wide-angle lens or a telephoto lens.

The flash 1120 may emit light used to enhance light emitted or reflected from a subject. The flash 1120 may include one or a plurality of light emitting diodes (Red-Green-Blue (RGB) LED, White LED, Infrared LED, Ultraviolet LED, etc.), and/or a Xenon Lamp. The image sensor 1000 may be the image sensor described in FIG. 1 , which includes any one of the pixel arrays 1100, 1101, 1102, 1103, 1104, 1105, and 1106 of the above-described embodiments. can be included An image corresponding to the subject may be obtained by converting light emitted or reflected from the subject and transmitted through the lens assembly 1110 into an electrical signal. The image sensor 1000 may include one or a plurality of sensors selected from among image sensors having different properties, such as an RGB sensor, a black and white (BW) sensor, an IR sensor, or a UV sensor. Each of the sensors included in the image sensor 1000 may be implemented as a Charged Coupled Device (CCD) sensor and/or a Complementary Metal Oxide Semiconductor (CMOS) sensor.

The image stabilizer 1140 moves one or a plurality of lenses or the image sensor 1000 included in the lens assembly 1110 in a specific direction in response to the movement of the camera module ED80 or the electronic device 1101 including the same. Alternatively, the operation characteristics of the image sensor 1000 may be controlled (adjustment of read-out timing, etc.) so that negative effects caused by motion may be compensated for. The image stabilizer 1140 detects movement of the camera module ED80 or electronic device ED01 by using a gyro sensor (not shown) or an acceleration sensor (not shown) disposed inside or outside the camera module ED80. can The image stabilizer 1140 may be implemented optically.

The memory 1150 may store some or all data of an image acquired through the image sensor 1000 for a next image processing task. For example, when a plurality of images are acquired at high speed, the acquired original data (Bayer-patterned data, high-resolution data, etc.) is stored in the memory 1150, only low-resolution images are displayed, and then selected (user selection, etc.) It can be used to cause the original data of the image to be passed to the image signal processor 1160. The memory 1150 may be integrated into the memory ED30 of the electronic device ED01 or configured as a separate memory operated independently.

The image signal processor 1160 may perform image processing on images acquired through the image sensor 1000 or image data stored in the memory 1150 . Image processing includes depth map generation, 3D modeling, panorama generation, feature point extraction, image synthesis, and/or image compensation (noise reduction, resolution adjustment, brightness adjustment, blurring, sharpening). , Softening, etc.). The image signal processor 1160 may perform control (exposure time control, read-out timing control, etc.) for components (such as the image sensor 1000) included in the camera module ED80. The image processed by the image signal processor 1160 is stored again in the memory 1150 for further processing or the external components of the camera module ED80 (memory ED30, display device ED60, electronic device ED02) , the electronic device ED04, the server ED08, etc.). The image signal processor 1160 may be integrated into the processor ED20 or configured as a separate processor that operates independently of the processor ED20. When the image signal processor 1160 is configured as a processor separate from the processor ED20, the image processed by the image signal processor 1160 undergoes additional image processing by the processor ED20 and then displays the display device ED60. can be displayed through

The electronic device ED01 may include a plurality of camera modules ED80 each having a different property or function. In this case, one of the plurality of camera modules ED80 may be a wide-angle camera and the other may be a telephoto camera. Similarly, one of the plurality of camera modules ED80 may be a front camera and the other may be a rear camera.

The image sensor 1000 according to embodiments may be applied to a mobile phone or smart phone, a tablet or smart tablet, a digital camera or camcorder, a notebook computer, a television or a smart television, and the like. For example, a smart phone or smart tablet may include a plurality of high resolution cameras each having a high resolution image sensor. Depth information of subjects in an image may be extracted using high-resolution cameras, out-focusing of the image may be adjusted, or subjects in the image may be automatically identified.

In addition, the image sensor 1000 may be applied to a smart refrigerator, a security camera, a robot, a medical camera, and the like. For example, a smart refrigerator may automatically recognize food in the refrigerator using an image sensor, and inform the user of the presence or absence of specific food, the type of food stored or shipped, etc. through a smartphone. The security camera can provide ultra-high resolution images and can recognize objects or people in the images even in a dark environment by using high sensitivity. A robot (a robot) can provide high-resolution images by being deployed in a disaster or industrial site that is inaccessible to humans. A medical camera can provide high-resolution images for diagnosis or surgery, and can dynamically adjust its field of view.

Also, the image sensor 1000 may be applied to vehicles. A vehicle may include a plurality of vehicle cameras disposed in various locations. Each vehicle camera may include an image sensor according to an embodiment. A vehicle may provide a driver with various information about the interior or surroundings of the vehicle using a plurality of vehicle cameras, and may automatically recognize an object or person in an image to provide information necessary for autonomous driving.

The image sensor including the above-described color separation lens array and the electronic device including the same have been described with reference to the embodiment shown in the drawings, but this is only an example, and various modifications may be made from this to those skilled in the art. and other equivalent embodiments are possible. Therefore, the disclosed embodiments should be considered from an illustrative rather than a limiting point of view. The scope of rights is shown in the claims rather than the foregoing description, and all differences within an equivalent scope should be construed as being included in the scope of rights.

1000 - image sensor
1100, 1101, 1102, 1103, 1104, 1105, 1106 - pixel array
110, 115, 116, 118 - sensor board
120 - spacer layer
130, 140, 150, 160 - color separation lens array
170, 171, 172, 173, 174 - filter array

Claims (19)

A sensor substrate including a plurality of light-sensing pixels:
It includes a plurality of pixel correspondence regions respectively facing the plurality of pixels, each of the plurality of pixel correspondence regions includes one or more nanoposts, and the one or more nanoposts separates incident light by wavelength to transmit light to the plurality of pixels. a color separation lens array forming a phase distribution that allows light of different wavelength bands to be condensed; and
and a filter array disposed between the sensor substrate and the color separation lens array, in which a plurality of transparent areas and a plurality of filters of a single color are alternately arranged. According to claim 1,
The plurality of filters
The image sensor, wherein the single color and arrangement position are set to block crosstalk of light in a long wavelength band among a plurality of wavelength bands separated by the color separation lens array. According to claim 1,
Each of the plurality of pixels includes a plurality of light-sensing cells for auto-focusing, the image sensor. According to claim 1,
The plurality of pixels
An image sensor including a plurality of green pixels sensing green light, a plurality of blue pixels sensing blue light, and a plurality of red pixels sensing red light. According to claim 4,
The plurality of filters
An image sensor that is a filter that blocks red light from entering the green pixel and the blue pixel. According to claim 4,
The plurality of green pixels, blue pixels, and red pixels are arranged in a Bayer pattern form, the image sensor. According to claim 6,
The plurality of filters are green filters and disposed to face the green pixels, the image sensor. According to claim 6,
The plurality of filters are cyan filters and are disposed to face the green pixel and the blue pixel, respectively. According to claim 4,
The plurality of filters are blue filters and disposed to face the blue pixels, the image sensor. According to claim 4,
The plurality of filters are cyan filters and are disposed to face the green pixel and the blue pixel, respectively. According to claim 1,
The plurality of pixels include a cyan pixel, a magenta pixel, a yellow pixel, and a green pixel. According to claim 11,
The plurality of filters are cyan filters and are disposed to face the cyan pixels and the green pixels, respectively. According to claim 4,
The plurality of green pixels, blue pixels, and red pixels
An image sensor, arranged to exhibit a Bayer pattern shape by pixel binning. According to claim 13,
The plurality of pixels
a first pixel group and a second pixel group that are repeatedly arranged along one direction; and
A third pixel group and a fourth pixel group are repeatedly arranged in a direction along another direction parallel to the one direction;
The first pixel group and the second pixel group each include a plurality of red pixels and a plurality of green pixels that are alternately arranged,
The third pixel group and the fourth pixel group each include a plurality of green pixels and blue pixels that are alternately arranged,
The image sensor of claim 1 , wherein pixels are combined in each of the first to fourth pixel groups such that the color arrangement represented by the first to fourth pixel groups has a Bayer pattern shape. 15. The method of claim 14,
Within each of the first to fourth groups
A mode in which pixels adjacent in the diagonal direction are combined, or
An image sensor operating in a mode in which adjacent pixels in a rhombic direction are combined. According to claim 15,
An image sensor in which the number of pixels combined in the two modes is different. According to claim 1,
The image sensor further comprises a spacer layer disposed between the filter array and the color separation lens array. 18. The method of claim 17,
The thickness of the spacer layer is
The image sensor according to claim 1 , wherein a focal length of light having a center wavelength among a plurality of wavelength bands separated by the color separation lens array is smaller than a focal length of the color separation lens array. The image sensor of claim 1 for converting an optical image into an electrical signal, and
An electronic device comprising: a processor controlling an operation of the image sensor and storing and outputting a signal generated by the image sensor.

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