KR102649969B1 - Liquid supply apparatus, coating apparatus, aging apparatus, and liquid supply method - Google Patents

Abstract

[Project] Provide a technology that can appropriately determine the lifespan or degree of aging of filters used for filtration of high-viscosity treatment liquids.
[Solution] The liquid supply unit 10 is a device that supplies a high-viscosity processing liquid. The liquid supply unit 10 includes a supply tank 11, a liquid supply port 19, a first liquid supply pipe 12 and a second liquid supply pipe 14, a pressurizing mechanism 15, and a second filter F2. ) and a measurement module 174. The liquid supply unit 10 is capable of storing a high-viscosity processing liquid. The liquid supply port 19 supplies the processing liquid to the supplier. The first liquid supply pipe 12 and the second liquid supply pipe 14 connect the supply tank 11 and the liquid supply port 19. The pressurizing mechanism 15 sends the processing liquid from the supply tank 11 toward the liquid supply port 19. The second filter F2 is disposed in the second liquid supply pipe 14 and filters the treatment liquid. The measurement module 174 measures the amount of particles in the processing liquid that passed through the second filter (F2) at a position downstream from the second filter (F2).

Description

Liquid supply device, applicator, aging device, and liquid supply method {LIQUID SUPPLY APPARATUS, COATING APPARATUS, AGING APPARATUS, AND LIQUID SUPPLY METHOD}

The present invention relates to a liquid supply device, a coating device, an aging device, and a liquid supply method.

Conventionally, substrates for precision electronic devices, such as glass substrates for liquid crystal displays, semiconductor substrates, glass substrates for PDPs, glass substrates for photomasks, substrates for color filters, substrates for recording disks, substrates for solar cells, and substrates for electronic paper, are rectangular. In the manufacturing process of glass substrates, flexible substrates for film liquid crystals, and substrates for organic EL (hereinafter simply referred to as “substrates”), a coating device is used to apply a liquid such as photoresist to the surface of the substrate. About the conventional coating device, it is described in patent document 1, for example. The coating device of Patent Document 1 discharges a coating liquid from a slit die having a slit-shaped discharge port to a substrate adsorbed and held on a stage movable in the horizontal direction.

Japanese Patent Publication No. 2017-23990

In this type of coating device, a filter may be used to remove foreign substances contained in the coating liquid before discharging and applying the treatment liquid. Since it has been difficult to specify the appropriate replacement time for filters that filter high-viscosity treatment liquids, replacement of the filter is performed, for example, when the usage time or the total flow rate reaches a certain value. For this reason, if the period of use of the filter is shorter than its original lifespan, the cost of the filter becomes relatively expensive. Additionally, when the usage time of the filter is longer than the original lifespan, there is a possibility that application defects may occur due to the inability to sufficiently purify the treatment liquid. Therefore, there is a need for technology that can easily determine the lifespan of a filter.

Additionally, new filters are generally cleaned in advance with a cleaning liquid. However, when a processing liquid with a higher viscosity than the cleaning liquid is passed through the cleaning agent filter, dust (particles) may escape from the filter. For this reason, so-called aging, which involves flowing a high-viscosity treatment liquid through the filter, has sometimes been performed. However, since it is not easy to determine whether the filter is in a state suitable for filtration of a high-viscosity treatment liquid, aging is completed at the stage when aging has been performed for a certain period of time. Therefore, when the aging time is not sufficient, there is a possibility that dust released from the filter may be mixed into the treatment liquid as the filter is applied to the coating device, resulting in coating defects. Therefore, there is a demand for technology that can easily determine the degree of aging of the filter.

The purpose of the present invention is to provide a technology that can appropriately determine the lifespan or degree of aging of a filter applied to the filtration of a high-viscosity treatment liquid.

In order to solve the above problem, the first aspect is a liquid supply device for supplying a processing liquid, comprising a tank capable of storing a high-viscosity processing liquid, a liquid supply port for supplying the processing liquid, and a liquid supply connecting the tank and the liquid supply port. a liquid delivery pipe, a liquid delivery unit that sends the treatment liquid from the tank toward the liquid supply port through the liquid delivery pipe, a filter disposed in the liquid delivery pipe and filtering the treatment liquid, and a filter located downstream of the filter. At a position on the side, a measuring unit is provided to measure the amount of particles in the processing liquid that has passed through the filter.

The second aspect is the liquid supply device of the first aspect, further comprising a measurement pipe connected to the liquid delivery pipe at a position downstream of the filter in the liquid delivery pipe, and the measurement unit includes the measurement pipe. The amount of particles in the treatment liquid inside is measured.

The third aspect is the liquid supply device of the second aspect, and further includes an on-off valve that turns on and off the flow of the processing liquid from the liquid delivery pipe to the measurement pipe.

The fourth aspect is the liquid supply device of the second or third aspect, wherein the inner area of the measurement pipe is smaller than the inner area of the liquid delivery pipe.

The fifth aspect is the liquid supply device according to any one of the second to fourth aspects, and further includes a liquid delivery pump disposed in the liquid delivery pipe and pumping the treatment liquid.

A sixth aspect is the liquid supply device of the fifth aspect, wherein the measuring pipe is connected to the liquid delivery pipe at a position downstream of the liquid delivery pump in the liquid delivery pipe.

A seventh aspect is the liquid supply device of the fifth aspect, wherein the measuring pipe is connected to the liquid delivery pipe at a position upstream of the liquid delivery pump in the liquid delivery pipe.

The eighth aspect is the liquid supply device of any one of the second to seventh aspects, and is disposed on an upstream side of the measuring unit, and further includes a degassing module for degassing the treatment liquid.

The ninth aspect is the liquid supply device of the eighth aspect, wherein the degassing module is disposed in the measuring pipe.

A tenth aspect is the liquid supply device of any one of the first to ninth aspects, comprising: a determination unit that determines the state of the filter based on the amount of particles measured by the measurement unit; and a determination result output by the determination unit. An output unit that outputs to the outside is additionally provided.

An eleventh aspect is an application device for applying a processing liquid to an object, comprising the supply device of any one of the first to tenth aspects, and a nozzle for discharging the processing liquid supplied from the liquid supply port of the supply device. do.

A twelfth aspect is an aging device for treating a filter with a high-viscosity treatment liquid, comprising: a first tank capable of storing the treatment liquid; a second tank capable of storing the treatment liquid; and the first tank and the second tank are arranged in parallel. A first liquid delivery pipe and a second liquid delivery pipe connected to each other, a first liquid delivery unit that delivers liquid from the first tank to the second tank through the first liquid delivery pipe, and a first liquid delivery section that delivers liquid to the second tank through the second liquid delivery pipe. A second liquid delivery unit that delivers liquid from the tank to the first tank, a control unit that alternately operates the first liquid delivery unit and the second liquid delivery unit, and a filter mounting unit that mounts a filter to filter the treated liquid flowing through the first liquid delivery pipe. and a measuring unit that measures the amount of particles in the processing liquid that has passed through the filter.

The thirteenth aspect is a liquid supply method for supplying a high-viscosity treatment liquid to a supplier, comprising: a) a process of sending the treatment liquid from a tank to the supplier, and b) the process liquid sent from the tank to the supplier by the process a). It includes a step of filtering with a filter, and c) measuring the amount of particles in the treatment liquid that passed through the filter by step b).

According to the liquid supply device of the first aspect, the life of the filter or the degree of aging of the filter can be easily determined based on the amount of particles contained in the processing liquid that has passed through the filter.

According to the liquid supply device of the second aspect, since it is installed in the branch pipe, influence on the supply pipe can be suppressed.

According to the liquid supply device of the third aspect, liquid delivery from the liquid delivery pipe to the measurement pipe can be turned on and off.

According to the liquid supply device of the fourth aspect, the amount of particles can be measured with a small amount of processing liquid.

According to the liquid supply device of the fifth aspect, the processing liquid can be sent to the liquid supply port using the liquid delivery pump.

According to the liquid supply device of the sixth aspect, the liquid can be supplied to the measuring pipe by a liquid feeding pump.

According to the liquid supply device of the seventh aspect, the treatment liquid sent to the supplier can also be sent to the measurement pipe.

According to the liquid supply device of the eighth aspect, it is possible to prevent the measurement of the particle amount from being hindered by air bubbles.

According to the liquid supply device of the ninth aspect, degassing is performed with respect to the measurement unit through a measurement pipe closer to the liquid delivery pipe. For this reason, the amount of particles can be measured with fewer bubbles than in the case of degassing through the liquid delivery pipe.

According to the liquid supply device of the tenth aspect, a determination result of the filter state based on the amount of particles in the processing liquid is output to the outside. For this reason, the operator can easily determine the status of the filter.

According to the coating device of the 11th aspect, the high-viscosity treatment liquid filtered through the filter of the liquid supply device can be applied to the object.

According to the aging device of the twelfth aspect, it is possible to easily determine the aging of the filter based on the measurement result of the particle amount.

According to the liquid supply method of the thirteenth aspect, the life of the filter or the degree of aging of the filter can be easily determined based on the amount of particles contained in the treatment liquid that has passed through the filter.

1 is a diagram showing the configuration of an application device according to the first embodiment.
FIG. 2 is a cross-sectional view showing the structure of the degassing module shown in FIG. 1.
Figure 3 is a perspective view of the application unit shown in Figure 1.
Figure 4 is a block diagram showing the connection of the first control unit and each part in the applicator.
Figure 5 is a diagram showing the configuration of an application device according to the second embodiment.
Fig. 6 is a diagram showing the configuration of an aging device according to the third embodiment.
FIG. 7 is a cross-sectional view of the first mounting portion shown in FIG. 6 and the first filter mounted on the first mounting portion.

BEST MODE FOR CARRYING OUT THE INVENTION Embodiments of the present invention will be described below with reference to the accompanying drawings. In addition, the components described in this embodiment are merely examples and are not intended to limit the scope of the present invention to these only. In the drawings, for ease of understanding, the dimensions or number of each part may be exaggerated or simplified as necessary.

<1. First embodiment>

FIG. 1 is a diagram showing the configuration of the coating device 1 according to the first embodiment. The coating device 1 is applied, for example, to the manufacturing process of polyimide film, which becomes the base material of a flexible display. In the polyimide film manufacturing process, varnish, which is a high-viscosity treatment liquid containing a polyimide precursor (polyamic acid), is applied to the upper surface of the glass carrier substrate C in the coating device 1. After that, the varnish is subjected to processing such as heating, reducing pressure, and firing in another device.

As shown in FIG. 1, the applicator 1 of this embodiment has a liquid supply unit 10 (liquid supply device), an application unit 20, and a first control unit 30. Hereinafter, each configuration of the coating device 1 will be described.

The liquid supply unit 10 is a device that supplies a high-viscosity treatment liquid to the application unit 20, which is the supplier. The liquid supply unit 10 includes a supply tank 11, a first liquid supply pipe 12, a degassing tank 13, a second liquid supply pipe 14, a pressurizing mechanism 15, a pressure reducing mechanism 16, and a measuring mechanism. We have (17).

The supply tank 11 is a container that stores the varnish before supply. The varnish stored in the supply tank 11 may be unused or may be recycled once used. As described above, varnish is a high viscosity treatment liquid. The viscosity of varnish is, for example, about 1000 to 10000 cP (1 to 10 Pa·s). In the following description, “high viscosity” refers to a viscosity of 1000 cP (1 Pa·s) or more. In addition, the high-viscosity treatment liquid supplied by the liquid supply unit 10 is not limited to varnish containing a polyimide precursor, and may be a high-viscosity treatment liquid other than varnish. In the following description, the side close to the supply tank 11 is called the upstream side, and the side opposite to the supply tank 11 is called the downstream side.

The liquid supply unit 10 has one supply tank 11, but may have a plurality of supply tanks 11. In that case, the plurality of supply tanks 11 may be connected to the first liquid supply pipe 12 in a switchable manner.

The first liquid supply pipe 12 is a pipe connecting the supply tank 11 and the degassing tank 13. The upstream end of the first liquid supply pipe 12 is connected to the supply tank 11. The downstream end of the first liquid supply pipe 12 is connected to the degassing tank 13. Additionally, on the path of the first liquid supply pipe 12, a first liquid supply valve V11 and a first filter F1 are installed. When the first liquid supply valve V11 and the first pressure valve V21 described later are opened, the pressure of the gas supplied from the pressurizing mechanism 15 causes the varnish in the supply tank 11 to be compressed into the first liquid supply pipe 12. ) and is sent to the degassing tank (13). At that time, the varnish is filtered by the first filter F1. Thereby, the fine dust contained in the varnish is collected and removed by the first filter F1.

Additionally, in the example of FIG. 1, the liquid supply unit 10 has one first filter F1. However, the liquid supply unit 10 may have a plurality of first filters F1. In that case, a plurality of first filters F1 may be connected in parallel on the path of the first liquid supply pipe 12.

The degassing tank 13 is a container for reducing the amount of gas dissolved in the varnish. A pressure reducing mechanism 16 described later is connected to the degassing tank 13. When the pressure reducing valve V23 of the pressure reducing mechanism 16 is opened and the pressure reducing pump 162 is operated, the internal space of the degassing tank 13 is depressurized, and the atmospheric pressure in the degassing tank 13 becomes a negative pressure lower than atmospheric pressure. . As a result, the dissolved gas contained in the varnish in the degassing tank 13 becomes bubbles. Additionally, a stirring mechanism 131 is installed within the degassing tank 13. When the stirring mechanism 131 is rotated, the varnish in the degassing tank 13 is stirred, and air bubbles in the varnish rise toward the liquid level of the varnish. The air bubbles after levitation are removed by being sucked from the degassing tank 13 to the pressure reducing mechanism 16. As a result, the dissolved amount of gas in the varnish is reduced.

In this way, in the coating device 1 of the present embodiment, the dissolved gas contained in the varnish before application is removed in advance. As a result, when the varnish applied to the carrier substrate C is heated and fired in a subsequent process, it is possible to prevent bubbles from being generated in the varnish.

Additionally, in the example of FIG. 1, the liquid supply unit 10 has one degassing tank 13. However, the liquid supply unit 10 may have a plurality of degassing tanks 13. In that case, a plurality of degassing tanks 13 may be switchably connected between the first liquid supply pipe 12 and the second liquid supply pipe 14.

The second liquid supply pipe 14 is a pipe connecting the degassing tank 13 and the application unit 20. The upstream end of the second liquid supply pipe 14 is connected to the lower part of the degassing tank 13. The downstream end of the second liquid supply pipe 14 is connected to the third liquid supply pipe 23 of the application unit 20. Additionally, a second liquid supply valve V12, a second filter F2, and an assist pump P1 are disposed in the second liquid supply pipe 14.

When the pressure reducing valve V23 is closed and the second water supply valve V12 and the second pressurizing valve V22 described later are opened, the pressure of the gas supplied from the pressurizing mechanism 15 causes the gas inside the degassing tank 13 to The varnish passes through the second liquid supply pipe 14 and is sent to the slit nozzle 22 of the application unit 20. The pressurizing mechanism 15 is an example of a liquid delivery unit that sends a high-viscosity processing liquid from the supply tank 11 toward the liquid supply port 19. Additionally, by driving the assist pump P1, the liquid delivery force of the varnish is assisted. The assist pump P1 is an example of a liquid delivery pump.

The assist pump P1 may be, for example, a fixed-quantity discharge pump that discharges a fixed amount of liquid per time. In this case, the amount of varnish that the assist pump P1 sends per time may be, for example, the same as the amount of varnish that the slit nozzle 22 applies to one carrier substrate C. In addition, the assist pump P1 is preferably a so-called tube flammable pump that discharges the treatment liquid in the tube by applying fluid pressure to the outer peripheral surface of the shrinkable tube. By employing a tube flammable pump, it is possible to suppress the generation of particles within the assist pump (P1) by discharging varnish.

The second filter F2 is a filter with a smaller (closer) pore diameter than the first filter F1. The varnish flowing through the second liquid supply pipe 14 is filtered by the second filter F2. Thereby, the fine dust contained in the varnish is collected and removed by the second filter F2.

The liquid supply unit 10 has one second filter F2, but may have a plurality of second filters F2. In this case, a plurality of second filters F2 may be connected in parallel on the path of the second liquid supply pipe 14.

The pressurizing mechanism 15 is a mechanism that supplies pressure for liquid delivery to the supply tank 11 and the degassing tank 13. As shown in FIG. 1, the pressurization mechanism 15 has a high-pressure gas supply source 151, a pressurization pipe 152, a regulator 153, a first pressurization valve V21, and a second pressurization valve V22. . The high-pressure gas supply source 151 is filled with high-pressure gas (for example, nitrogen). The upstream end of the pressurization pipe 152 is connected to the high-pressure gas supply source 151. The regulator 153 is installed on the path of the pressurization pipe 152. The downstream end of the pressurization pipe 152 is divided into two and connected to the supply tank 11 and the degassing tank 13, respectively. The first pressurization valve V21 and the second pressurization valve V22 are respectively installed in the two pressurization pipes 152 after branching.

The gas supplied from the high-pressure gas supply source 151 is pressure-adjusted by the regulator 153 to a predetermined pressure higher than atmospheric pressure. When the second pressurization valve V22 is closed and the first pressurization valve V21 is opened, the gas at the predetermined pressure is supplied from the pressurization pipe 152 to the supply tank 11. As a result, the varnish is pushed out from the supply tank 11 to the first liquid supply pipe 12. Additionally, when the first pressurization valve V21 is closed and the second pressurization valve V22 is opened, the gas at the predetermined pressure is supplied from the pressurization pipe 152 to the degassing tank 13. As a result, the varnish is pushed out from the degassing tank 13 to the second liquid supply pipe 14.

The pressure reducing mechanism 16 is a mechanism for reducing the pressure inside the degassing tank 13. As shown in FIG. 1, the pressure reduction mechanism 16 has a pressure reduction pipe 161, a pressure reduction pump 162, and a pressure reduction valve V23. One end of the pressure reduction pipe 161 is connected to the degassing tank 13. The other end of the pressure reducing pipe 161 is connected to the exhaust line within the factory. The pressure reducing valve V23 and the pressure reducing pump 162 are installed on the path of the pressure reducing pipe 161. When the pressure reduction valve V23 is opened and the pressure reduction pump 162 is operated, the gas in the degassing tank 13 passes through the pressure reduction pipe 161 and is sucked into the exhaust line. As a result, the atmospheric pressure in the degassing tank 13 decreases.

＜Measuring instrument＞

The measuring device 17 is a device for measuring the amount of particles in the varnish. As shown in FIG. 1 , the measuring instrument 17 includes a measuring pipe 171, an opening/closing valve 172, a degassing module 173, and a measuring module 174.

The measurement pipe 171 is connected to a position downstream of the assist pump P1 among the second liquid supply pipes 14. The on-off valve 172 is installed in the measurement pipe 171. The open/close valve 172 turns on and off the delivery of the varnish liquid from the second liquid supply pipe 14 to the measurement module 174 by opening and closing the measurement pipe 171. A switching valve 18 is installed in the second liquid supply pipe 14. The switching valve 18 is located downstream from the position where the measuring pipe 171 in the second liquid supply pipe 14 is connected. The switching valve 18 turns on and off the liquid supply toward the liquid supply port 19. The opening/closing valve 172 and the switching valve 18 are switched between an open state and a closed state based on a control signal from the first control unit 30.

The degassing module 173 is a device that removes air bubbles (microbubbles) present in the varnish flowing through the measurement pipe 171. The degassing module 173 is installed in the measurement pipe 171 and is located between the on-off valve 172 and the measurement module 174.

The measurement module 174 is located downstream from the degassing module 173. The measurement module 174 measures the amount of minute particles contained in the varnish. The measurement module 174 is a particle counter that measures the size and number of particles. The measurement module 174 is configured to measure the amount of particles by irradiating light to the varnish and detecting the light scattered from the particles with a sensor. Additionally, the measurement module 174 may be configured to measure the size and number of particles by irradiating light to the varnish and detecting light blocking by the particles with a sensor.

The size of the particles measured by the measurement module 174 is, for example, 10 μm or less, and more preferably, 5 μm or less. It is configured so that the number can be counted for each particle size.

When measuring the amount of particles with the measurement module 174, the opening/closing valve 172 is opened and the switching valve 18 is closed. Afterwards, by driving the assist pump P1, the varnish flows from the second liquid supply pipe 14 to the measurement pipe 171 and is sent to the degassing module 173. Then, the varnish degassed by the degassing module 173 is sent to the measurement module 174.

As shown in FIG. 1, the end of the measurement pipe 171 is connected to a drainage line. The varnish that has passed the measurement module 174 is sent to the drain line and discarded. Additionally, a pipe may be provided to return the varnish that has passed through the measurement module 174 back to the second liquid supply pipe 14 or the like.

The inner area of the measurement pipe 171 is smaller than the inner area of the second liquid supply pipe 14. For this reason, the amount of varnish sent to the measurement pipe 171 can be reduced. As a result, the amount of particles can be measured with a small amount of varnish, so the amount of varnish consumed can be reduced. In addition, when the measurement module 174 is configured to measure the particle amount using a small amount of varnish, the particle amount can be appropriately measured by the measurement module 174 by reducing the inner area of the measurement pipe 171. You can.

FIG. 2 is a cross-sectional view showing the structure of the degassing module 173 shown in FIG. 1. The degassing module 173 is a so-called hollow fiber membrane degassing module. As shown in FIG. 2 , the degassing module 173 has a cylindrical casing 41, a plurality of hollow fiber membranes 42, and a pressure reducing mechanism 43.

The casing 41 has an inlet 411, an outlet 412, and two exhaust ports 413. The inlet 411 is installed at one end of the casing 41, and the outlet 412 is installed at the other end of the casing 41. The degassing module 173 is connected to the measurement pipe 171 through the inlet 411 and the outlet 412. The exhaust port 413 is installed on the side of the casing 41 and is connected to the pressure reducing mechanism 43.

The hollow fiber membrane 42 is a thin, cylindrical membrane. One end of all hollow fiber membranes 42 is connected to the inlet 411 in a flow path. In addition, the other ends of all hollow fiber membranes 42 are each connected to the outlet 412 as a flow path. As a result, when a flow of varnish occurs in the measuring pipe 171, the varnish is supplied to the hollow fiber membrane 42 from the inlet 411 and the varnish is discharged from the outlet 412.

Since this hollow fiber membrane 42 is used for degassing, it is formed of a gas permeable membrane that does not allow liquid to pass through but also allows gas to pass through. The inner diameter of the hollow fiber membrane 42 used in the degassing module 173 is 0.5 mm to 3 mm. Additionally, the number of hollow fiber membranes 42 used in the degassing module 173 is approximately 100 to 1000. Additionally, the inner diameter and number of hollow fiber membranes 42 used in the degassing module 173 may be appropriately changed depending on the type or flow rate of the varnish.

The pressure reduction mechanism 43 includes a pressure reduction pipe 431 and a pressure reduction pump 432. One end of the pressure reducing pipe 431 is branched into two and connected to the exhaust port 413 of the casing 41. Additionally, the other end of the pressure reduction pipe 431 is connected to the pressure reduction pump 432. When the pressure reduction pump 432 is driven, gas is sucked in from the space within the casing 41 through the pressure reduction pipe 431 and the two exhaust ports 413. As a result, the atmospheric pressure in the space within the casing 41 decreases. That is, the atmospheric pressure of the space outside the hollow fiber membrane 42 decreases. Furthermore, in the example of FIG. 2, there were two exhaust ports 413, but there may be one exhaust port 413 or three or more exhaust ports 413.

In this way, by making the outside space of the hollow fiber membrane 42 a lower pressure than the inside of the hollow fiber membrane 42, bubbles in the liquid passing through the inside of the hollow fiber membrane 42 or gas dissolved in the liquid are It can be discharged to the space outside the hollow fiber membrane 42. Thereby, the liquid in the hollow fiber membrane 42 can be degassed.

As shown in FIG. 1, the downstream end of the second liquid supply pipe 14 serves as the liquid supply port 19. The liquid supply port 19 is connected to the third liquid supply pipe 23 of the application unit 20. The liquid supply port 19 supplies varnish to the application unit 20, which is the supply source.

FIG. 3 is a perspective view of the application unit 20 shown in FIG. 1. 1 and 3, the application unit 20 includes a stage 21, a slit nozzle 22, a third liquid supply pipe 23, a nozzle holding portion 24, and a travel mechanism 25. have In addition, hereinafter, for convenience of explanation, the moving direction of the slit nozzle 22 in the application unit 20 is called the "front-back direction", and the horizontal direction orthogonal to the front-back direction is called "left-right direction."

The stage 21 is a substantially rectangular parallelepiped holding table on which the carrier substrate C is placed and held. The stage 21 is formed of, for example, a piece of stone. The upper surface of the stage 21 serves as a flat substrate holding surface 211. A plurality of vacuum suction holes (not shown) are provided on the substrate holding surface 211. When the carrier substrate C is placed on the substrate holding surface 211, the lower surface of the carrier substrate C is attracted to the substrate holding surface 211 by the suction force of the vacuum suction hole. Thereby, the carrier substrate C is fixed on the stage 21 in a horizontal position. Additionally, a plurality of lift pins (not shown) are installed inside the stage 21. When unloading the carrier substrate C from the stage 21, a plurality of lift pins protrude on the substrate holding surface 211. As a result, the carrier substrate C is separated from the substrate holding surface 211.

The slit nozzle 22 is a nozzle that discharges varnish. The slit nozzle 22 has a nozzle body 221 extending in the left and right directions. At the lower end of the nozzle body 221, a slit-shaped discharge port 223 extending in the left and right directions is provided. The discharge port 223 faces the upper surface of the carrier substrate C placed on the stage 21.

The third liquid supply pipe 23 is a pipe for supplying varnish to the slit nozzle 22. The upstream end of the third liquid supply pipe 23 is connected to the liquid supply port 19 described above. The downstream end of the third liquid supply pipe 23 is connected to the slit nozzle 22. Additionally, a main pump P2 is installed on the path of the third liquid supply pipe 23. When the main pump P2 is operated, the varnish supplied from the second liquid supply pipe 14 is introduced into the slit nozzle 22. Then, the varnish is discharged from the discharge port 223 of the slit nozzle 22 toward the upper surface of the carrier substrate C.

The nozzle holding portion 24 is a mechanism for holding the slit nozzle 22 above the substrate holding surface 211 . The nozzle holding portion 24 has a bridge portion 241 extending in the left and right directions above the stage 21 and a pair of support portions 242 that support both ends of the bridge portion 241. Additionally, the nozzle holding portion 24 has a lifting mechanism 243. When the lifting mechanism 243 is operated, the height of the bridge portion 241 changes. Thereby, the height of the slit nozzle 22 can be adjusted.

The traveling mechanism 25 is a mechanism for moving the slit nozzle 22 in the front-back direction. The traveling mechanism 25 has a pair of rails 251 and a pair of linear motors 252. A pair of rails 251 extends in the front-back direction near the left and right sides of the stage 21. The pair of rails 251 functions as a linear guide that regulates the moving direction of the pair of supports 242 in the front-back direction. The pair of linear motors 252 move the pair of supports 242 in the front-back direction along the rail 251 by magnetic power. As a result, the slit nozzle 22 moves in the front-back direction together with the nozzle holding portion 24.

When performing the application process, the application unit 20 discharges varnish from the discharge port 223 while moving the slit nozzle 22 in the front-back direction above the carrier substrate C. As a result, varnish is applied to the upper surface of the carrier substrate C.

FIG. 4 is a block diagram showing the connection of the first control unit 30 and each part within the applicator 1. The first control unit 30 has a processor 31 such as a CPU, a memory 32 such as RAM, and a storage unit 33 such as a hard disk drive. The first control unit 30 is electrically connected to application units 20 such as the lift pin, the traveling mechanism 25, and the main pump P2, respectively. In addition, the first control unit 30 is electrically connected to the valve, the assist pump P1, the pressure reducing pump 162, and the moving mechanism 244 installed in the liquid supply unit 10. The first control unit 30 temporarily reads the computer program or data stored in the storage unit 33 into the memory 32, and causes the processor 31 to perform calculation processing based on the computer program and data. By doing so, the operation of each part within the applicator 1 is controlled. As a result, the coating process on the carrier substrate C progresses. The first control unit 30 is electrically connected to a display 311 that displays images and an input device 312. The input device 312 is a mouse, keyboard, or touch panel.

The first control unit 30 includes the above-mentioned stirring mechanism 131, regulator 153, pressure reducing pump 162, first water supply valve (V11), second water supply valve (V12), and first pressure valve (V21). , the second pressure valve V22, the assist pump P1, the measurement module 174, etc., are electrically connected to each part in the liquid supply unit 10. In addition, the first control unit 30 is also electrically connected to each part in the application unit 20, such as the lift pin, main pump P2, lifting mechanism 243, and linear motor 252. there is.

The first control unit 30 temporarily reads the computer program or data stored in the storage unit 33 into the memory 32, and causes the processor 31 to perform calculation processing based on the computer program and data. By doing so, the operation of each part within the applicator 1 is controlled. As a result, the coating process on the carrier substrate C progresses.

For example, the first control unit 30 performs life determination processing to determine the lifespan of the second filter F2 based on the particle amount measured by the measurement module 174. Specifically, the first control unit 30 determines whether the particle amount exceeds a preset threshold. Then, when the first control unit 30 determines through the lifespan determination process that the particle amount exceeds the threshold, it determines that the second filter F2 has reached its lifespan. The first control unit 30 is an example of a determination unit.

When the first control unit 30 determines that the second filter F2 has reached its lifespan through life determination processing, it may cause the display 311 to display an image. The image that the first control unit 30 causes the display 311 to display may be, for example, an image indicating that the second filter F2 has reached the end of its life, or an image urging replacement of the second filter F2. It can be a burn. By making such a display, the operator can determine that the second filter F2 is in a state that needs to be replaced. The display 311 functions as an output unit that outputs the decision result of the first control unit 30. Additionally, the output unit is not limited to the display 311, and may be, for example, a lamp that displays a warning, a speaker that emits a warning sound, or a printer that outputs printed matter.

If the measurement module 174 can measure the number of particles for each size, a threshold may be set in advance for each particle size. In this case, when the first control unit 30 determines that the particle amount exceeds the threshold for some or all of the sizes of all particles, it may determine that the second filter F2 has reached its lifespan.

＜Aging＞

As high-viscosity varnish passes through the new second filter (F2), there is a risk that foreign substances may escape from the second filter (F2). For this reason, in the liquid supply unit 10, the second filter F2 may be aged by passing varnish through the new second filter F2. When aging the second filter F2, the varnish may be discarded by connecting the liquid supply port 19 to the discharge line. Additionally, the varnish discharged from the liquid supply port 19 may be returned to the upstream side of the second filter F2 and allowed to pass through the second filter F2 again.

While aging the second filter F2, the first control unit 30 causes the measurement module 174 to measure the amount of particles in the varnish. Then, the first control unit 30 performs aging determination processing based on the particle amount measured by the measurement module 174. Specifically, the first control unit 30 determines whether the particle amount measured by the measurement module 174 is below a predetermined threshold. The first control unit 30 determines that aging is complete when the particle amount is below a predetermined threshold. When determining that aging has been completed, the first control unit 30 causes the display 311 to display an image indicating that aging of the second filter F2 has been completed. By performing this display, the operator can determine that the aging of the second filter F2 has been completed.

＜Effect＞

As described above, in the liquid supply unit 10, it can be appropriately determined whether the second filter F2 has reached the end of its life based on the particle amount measurement results. Therefore, the occurrence of defects in the product can be suppressed by using the second filter F2 whose service life has exceeded its life.

In addition, when aging the second filter F2 in the liquid supply unit 10, it can be appropriately determined whether aging should be completed based on the particle amount. Accordingly, excessive aging of the second filter F2 or insufficient aging of the second filter F2 can be suppressed.

Additionally, in the liquid supply unit 10, the particle amount is measured by the measurement module 174 disposed on the measurement pipe 171. For this reason, compared to the case where the particle amount is measured by taking out the varnish to the outside, the work burden related to measuring the particle amount can be reduced. Additionally, when removing the varnish from the device to the outside, there is a risk that the varnish itself may be contaminated by particles from the outside during removal or measurement, resulting in a decrease in measurement accuracy. However, by in-lining, this risk is eliminated. can be reduced.

＜2. Second embodiment>

Next, the second embodiment will be described. In addition, in the following description, elements having the same function as elements already explained may be given the same symbol or a symbol with an alphabet character added thereto, and detailed description may be omitted.

FIG. 5 is a diagram showing the configuration of 1A of coating devices according to the second embodiment. The applicator 1A has substantially the same structure as the applicator 1 shown in FIG. 1 . However, in the applicator 1A, the upstream end of the measurement pipe 171 of the measurement instrument 17 is connected to the second filter F2 and the assist pump P1 in the second liquid supply pipe 14. It is connected to a location in between. In the application device 1A, when measuring the amount of particles, the pressurizing mechanism 15 pressurizes the supply tank 11, so that the varnish in the second liquid supply pipe 14 is sent to the measurement pipe 171. In this case, while the varnish required for measuring the particle amount is sent to the measurement pipe 171, the amount of varnish required for application to the carrier substrate C can be sent by the assist pump P1. Therefore, the particle amount can be measured without stopping the application process. Additionally, when measuring the amount of particles, the supply of varnish to the slit nozzle 22 may be stopped by controlling the opening/closing valve 172 and the switching valve 18.

＜3. Third embodiment>

FIG. 6 is a diagram showing the configuration of the aging device 2 according to the third embodiment. The aging device 2 is a device for aging the second filter F2 mounted on the liquid supply unit 10 of the applicator 1. As shown in FIG. 6, the aging device 2 includes a first tank 51, a second tank 52, a piping section 60, a pressurizing mechanism 70, and a second control section 80. there is.

The first tank 51 and the second tank 52 are containers that store high-viscosity varnish for aging the first filter F1 and the second filter F2. The first tank 51 and the second tank 52 are separate tanks. In addition, the first tank 51 and the second tank 52 are pressure-resistant sealed containers that can withstand pressurization by a pressurizing mechanism 70, which will be described later. The first tank 51 is connected to the varnish supply source 54 through a supply pipe 53. When the supply valve V30 installed on the path of the supply pipe 53 is opened, the varnish is supplied from the varnish source 54 to the first tank 51 through the supply pipe 53.

The varnish supplied from the varnish supply source 54 is the same treatment liquid as the varnish used in the application devices 1 and 1A. Accordingly, the viscosity of the varnish supplied from the varnish supply source 54 is the same as the viscosity of the varnish used in the application device 1. Additionally, aging may be performed using a high viscosity treatment liquid different from that of varnish.

The piping section 60 has a first main pipe 61, a second main pipe 62, a first branch pipe 63, and a second branch pipe 64. One end of the first main pipe (61) is connected to the lower part of the first tank (51). One end of the first branch pipe 63 and one end of the second branch pipe 64 are respectively connected to the other end of the first main pipe 61. The other end of the first branch pipe 63 and the other end of the second branch pipe 64 are respectively connected to one end of the second main pipe 62. The other end of the second main pipe (62) is connected to the lower part of the second tank (52). That is, the first branch pipe 63 and the second branch pipe 64 extend in parallel between the first tank 51 and the second tank 52. The first branch pipe 63 is an example of the first liquid delivery pipe in the present invention. The second branch pipe 64 is an example of the second liquid delivery pipe in the present invention.

A switching valve V31 and a switching valve V32 are installed in the first branch pipe 63. The first branch pipe 63 has a first mounting portion 65 on which the first filter F1 can be mounted between the switching valve V31 and the switching valve V32. A switching valve V33 and a switching valve V34 are installed in the second branch pipe 64. The second branch pipe 64 has a second mounting portion 66 on which the second filter F2 can be mounted between the switching valve V33 and the switching valve V34.

The pressurizing mechanism 70 is a mechanism that supplies pressure for liquid delivery to the first tank 51 and the second tank 52. As shown in FIG. 6, the pressurization mechanism 70 has a high-pressure gas supply source 71, a pressurization pipe 72, a regulator 73, a switching valve V35, and a switching valve V36. The high-pressure gas supply source 71 is filled with high-pressure gas (for example, nitrogen). The upstream end of the pressurization pipe 72 is connected to the high-pressure gas supply source 71. The regulator 73 is installed on the path of the pressurization pipe 72. The downstream end of the pressurizing pipe 72 is divided into two and connected to the first tank 51 and the second tank 52, respectively. The switching valve V35 and the switching valve V36 are respectively installed in the two branched pressurized pipes 72.

The gas supplied from the high-pressure gas supply source 71 is pressure-adjusted by the regulator 73 to a predetermined pressure higher than atmospheric pressure. When the switching valve V36 is closed and the switching valve V35 is opened, the gas at the predetermined pressure is supplied from the pressurizing pipe 72 to the first tank 51. As a result, the varnish is pushed out from the first tank 51 to the first main pipe 61. Additionally, when the switching valve V35 is closed and the switching valve V36 is opened, the gas at the predetermined pressure is supplied from the pressurizing pipe 72 to the second tank 52. As a result, the varnish is pushed out from the second tank 52 to the second main pipe 62. The pressurizing mechanism 70 has the functions of a first liquid delivery unit for sending varnish from the first tank 51 to the second tank 52 and a second liquid delivery unit for sending varnish from the second tank 52 to the first tank 51. It also functions as a liquid delivery unit.

FIG. 7 is a cross-sectional view of the first mounting portion 65 shown in FIG. 6 and the first filter F1 mounted on the first mounting portion 65. In addition, the structure of the first filter F1 and the first mounting portion 65 is not limited to that shown in FIG. 7, and may have a structure different from that of FIG. 7. As shown in Fig. 7, the first mounting portion 65 has a holder 650 to which the first filter F1 can be connected.

The first filter F1 has a housing 91, a filter cartridge 92, and a cover 93. The housing 91 is a cylindrical housing extending in the vertical direction. The filter cartridge 92 is accommodated inside the housing 91. The cover 93 covers the outer surface of the housing 91. The cover 93 is made of a material with higher rigidity than the housing 91, such as metal. Thereby, deformation of the housing 91 is suppressed.

The filter cartridge 92 has a filter body 921 and an upper cover 922. The filter body 921 has a cylindrical outer shape extending in the vertical direction. The filter body 921 is formed of resin fibers such as polypropylene, polyethylene, and polytetrafluoroethylene (PTFE). However, the filter body 921 may be formed of a material other than resin. The upper cover 922 covers the upper part of the filter body 921.

An inlet 911 and an outlet 912 are formed at the bottom of the housing 91. The inlet 911 communicates with the space inside the housing 91 and the space outside the filter cartridge 92. The outlet 912 communicates with the inner space of the filter cartridge 92 among the inner spaces of the housing 91.

The holder 650 has an inlet connection hole 651 and an outflow connection hole 652. The inflow connection hole 651 and the outflow connection hole 652 are respectively through holes that penetrate the holder 650 in the vertical direction. The inlet connection hole 651 is connected to the first branch pipe 63 on the upstream side. The outflow connection hole 652 is connected to the first branch pipe 63 on the downstream side. Additionally, when the first filter F1 is mounted on the first mounting portion 65, the inlet port 911 described above is connected to the inlet connection hole 651, and the outlet port 912 described above is connected to the outlet connection hole 652. ) is connected to.

Accordingly, when varnish flows through the first branch pipe 63, the varnish is introduced into the interior of the housing 91 from the inlet connection hole 651 through the inlet 911. Then, the varnish passes through the filter main body 921 as shown by the broken line arrow in FIG. 7 . In addition, the varnish that has passed through the filter main body 921 flows from the inside of the filter main body 921 through the outlet 912 and the outlet connection hole 652 and flows out into the first branch pipe 63 on the downstream side. .

Additionally, as shown in FIG. 7, a first exhaust pipe 94 is connected to the upper part of the housing 91. The air bubbles collected in the upper part of the housing 91 pass through the first exhaust pipe 94 and are discharged to the exhaust line within the factory. Additionally, a second exhaust pipe 95 is connected to the upper part of the filter cartridge 92. The air bubbles collected at the top of the filter cartridge 92 pass through the second exhaust pipe 95 and are discharged to the exhaust line within the factory.

Since the structures of the second mounting portion 66 and the second filter F2 are equivalent to the structures of the first mounting portion 65 and the first filter F1, redundant description will be omitted.

As shown in FIG. 6 , the aging device 2 has a measuring mechanism 17 . The measuring instrument 17 is provided with a measuring pipe 171, an opening/closing valve 172, a degassing module 173, and a measuring module 174, like the measuring instrument 17 shown in FIG. 1 . The measurement pipe 171 is connected to a position between the switching valve V31 and the first mounting portion 65 in the first branch pipe 63. The measurement module 174 measures the amount of particles in the varnish within the measurement pipe 171. The measurement module 174 is electrically connected to the second control unit 80 and transmits the particle amount measurement result to the second control unit 80.

Additionally, the position where the measurement pipe 171 is connected may be between the first mounting portion 65 and the switching valve V32 in the first branch pipe 63. In addition, the position where the measurement pipe 171 is connected is between the switching valve V33 and the second mounting portion 66 in the second branch pipe 64, or between the second mounting portion 66 and the switching valve ( V34) It can be between. Additionally, the measurement pipe 171 may be the first main pipe 61 or the second main pipe 62.

The second control unit 80 is a means for controlling the operation of each part within the aging device 2. The second control unit 80 has a processor such as CPU, memory such as RAM, and a storage unit such as a hard disk drive. In addition, the second control unit 80 is electrically connected to each part in the aging device 2, such as the supply valve V30, the switching valves V31 to V36, the opening/closing valve 172, and the regulator 73. It is connected to .

The second control unit 80 temporarily reads the computer program or data stored in the storage unit into the memory, and causes the processor to perform calculation processing based on the computer program and data, thereby Controls the operation of the unit. As a result, aging (cleaning treatment) of the first filter F1 and the second filter F2 progresses.

＜Operation of aging device＞

When aging the first filter F1 and the second filter F2 in the aging device 2, the operator mounts the new first filter F1 on the first mounting portion 65, A new second filter (F2) is mounted on the second mounting portion (66).

With the first filter (F1) and the second filter (F2) installed, the second control unit (80) opens the supply valve (V30) from the varnish source 54 to the first tank 51, Supply varnish for cleaning. When a predetermined amount of varnish is stored in the first tank 51, the second control unit 80 closes the supply valve V30.

Next, the second control unit 80 opens the switching valves V31 and V32 and the switching valve V35, so that high-pressure gas is supplied from the pressurizing pipe 72 to the first tank 51. As a result, the varnish in the first tank 51 is pushed out into the first main pipe 61. Then, as shown by the broken line arrow A1 in FIG. 6, the varnish is sent from the first main pipe 61 to the second tank 52 through the first branch pipe 63 and the second main pipe 62. Varnish passes through the first filter (F1). For this reason, when initial dust is present on the downstream surface of the first filter F1, the initial dust leaves the downstream surface of the first filter F1 and is placed in the second tank 52 together with the varnish. ) flows.

Subsequently, the second control unit 80 closes the switching valves V31, V32, and V35 and opens the switching valves V33, V34, and V36. Then, high-pressure gas is supplied from the pressurization pipe 72 to the second tank 52. As a result, the varnish in the second tank 52 is pushed out into the second main pipe 62. Then, as shown by the broken line arrow A2 in FIG. 6, the varnish is sent from the second main pipe 62 to the first tank 51 through the second branch pipe 64 and the first main pipe 61. Varnish passes through the second filter (F2). For this reason, the dust that escapes from the first filter F1 is received by the upstream surface of the second filter F2. Since the hole diameter of the second filter F2 is sufficiently smaller than the particle size of the dust leaving the first filter F1, it is difficult for the dust to pass through the second filter F2. In addition, when initial dust adheres to the downstream surface of the second filter F2, the initial dust leaves the downstream surface of the second filter F2, and together with the varnish, the first tank ( 51).

When the second control unit 80 completes the delivery of the varnish from the second tank 52 to the first tank 51, it starts sending the varnish from the first tank 51 to the second tank 52 again. do. In this way, the second control unit 80 alternately and repeatedly performs liquid delivery from the first tank 51 to the second tank 52 and liquid delivery from the second tank 52 to the first tank 51 .

Dust leaving the second filter F2 is received on the upstream surface of the first filter F1. Since the hole diameter of the first filter F1 is sufficiently smaller than the particle size of the dust leaving the second filter F2, it is difficult for the dust to pass through the first filter F1.

The second control unit 80 causes the measurement module 174 of the measurement mechanism 17 to measure the particle amount on a regular basis while aging is in progress. In detail, the second control unit 80 opens the on-off valve 172 while the varnish is flowing in the first branch pipe 63, thereby removing a portion of the varnish flowing through the first branch pipe 63. It is sent to the measurement module 174 of the measurement pipe 171. Then, the measurement module 174 measures the amount of particles in the varnish and transmits the measured amount of particles to the second control unit 80.

The second control unit 80 performs aging determination processing based on the particle amount transmitted by the measurement module 174. Specifically, the second control unit 80 determines whether the particle amount measured by the measurement module 174 is below the threshold indicating that aging is complete. When determining that the particle amount is below a predetermined threshold, the second control unit 80 determines that aging for the first filter F1 and the second filter F2 is complete.

When the second control unit 80 determines that aging is complete, it stops the operation of the aging device 2. As a result, the operator can remove the aged first filter F1 from the first mounting part 65 and the aged second filter F2 from the second mounting part 66. Additionally, when the second control unit 80 determines that aging has been completed, the second control unit 80 may cause the display to display an image indicating that aging has been completed.

＜4. Modification example>

Although the embodiments have been described above, the present invention is not limited to the above, and various modifications are possible.

In the first to third embodiments, the degassing module 173 may be operated in a state in which no degassing is performed (i.e., the pressure reduction pump 432 is off). By doing this, for example, the unexpected generation of bubbles can be detected by the measurement module 174. Additionally, in the first to third embodiments, it is not essential that the measuring device 17 includes the degassing module 173, and the degassing module 173 may be omitted.

In the application devices 1 and 1A according to the first and second embodiments, life judgment or aging judgment is performed on the second filter F2, but life judgment or aging judgment is also performed on the first filter F1. You can do it. In this case, the measuring mechanism 17 may be additionally installed on the downstream side of the first filter F1. Specifically, the measurement pipe 171 of the measurement instrument 17 may be connected to a position between the first filter F1 and the degassing tank 13 in the first liquid supply pipe 12. As a result, the varnish of the first liquid supply pipe 12 that has passed through the first filter F1 can be sent to the measurement module 174 through the measurement pipe 171. Therefore, the amount of particles in the varnish that passed through the first filter (F1) can be measured. Based on the particle amount measured in this way, the first control unit 30 may determine the lifespan or aging of the first filter F1.

Although this invention has been described in detail, the above description is, in all respects, illustrative and does not limit the invention thereto. It is construed that countless modifications not illustrated may be contemplated without departing from the scope of this invention. Each configuration described in each of the above-mentioned embodiments and each modification can be appropriately combined or omitted as long as they do not contradict each other.

1, 1A: Applicator 10: Liquid supply unit
11: Supply tank 12: First liquid supply pipe
13: Degassing tank 14: Second liquid supply pipe
15: pressurizing device 17: measuring device
171: measuring pipe 172: open/close valve
173: Degassing module 174: Measurement module
19: Liquid supply port 2: Aging device
20: application unit 22: slit nozzle
223: discharge port 30: first control unit
311: display 51: first tank
52: second tank 54: varnish source
61: 1st main pipe 62: 2nd main pipe
63: first branch pipe 65: first mounting portion
70: Pressurizing mechanism F1: First filter
F2: Second filter P1: Assist pump

Claims (16)

A liquid supply device that supplies treatment liquid,
A tank capable of storing a high-viscosity treatment liquid with a viscosity of 1000 cP or more,
a liquid supply port for supplying the treatment liquid;
a liquid supply pipe connecting the tank and the liquid supply port;
a liquid delivery unit that sends the processing liquid from the tank toward the liquid supply port through the liquid delivery pipe;
a filter disposed in the liquid delivery pipe and filtering the treatment liquid;
a measuring unit that measures the amount of particles in the processing liquid that has passed through the filter at a position downstream from the filter;
A control unit that determines whether the particle amount measured by the measurement unit exceeds a threshold.
Equipped with
The measuring unit counts the number of particles of 10 μm or less, which are dust that escapes from the filter, for each of a plurality of sizes,
For each of the plurality of sizes of the particles, the threshold is set in advance,
The liquid supply device wherein the control unit determines whether the particle exceeds the threshold for each of the plurality of sizes. In claim 1,
A measurement pipe connected to the liquid delivery pipe is further provided at a position downstream of the filter in the liquid delivery pipe,
The liquid supply device wherein the measuring unit measures the amount of particles in the processing liquid within the measuring pipe. In claim 2,
A liquid supply device further comprising an on/off valve that turns on and off the flow of the processing liquid from the liquid delivery pipe to the measurement pipe. In claim 2 or claim 3,
A liquid supply device wherein the inner area of the measurement pipe is smaller than the inner area of the liquid delivery pipe. In claim 2 or claim 3,
A liquid supply device disposed in the liquid delivery pipe and further comprising a liquid delivery pump that pumps the treatment liquid. In claim 5,
The liquid supply device wherein the measurement pipe is connected to the liquid delivery pipe at a position downstream of the liquid delivery pump in the liquid delivery pipe. In claim 5,
The liquid supply device wherein the measurement pipe is connected to the liquid delivery pipe at a position upstream of the liquid delivery pump in the liquid delivery pipe. In claim 2 or claim 3,
A liquid supply device disposed upstream of the measuring unit and further comprising a degassing module for degassing the treatment liquid. In claim 8,
A liquid supply device wherein the degassing module is disposed in the measuring pipe. The method according to any one of claims 1 to 3,
a determination unit that determines the state of the filter based on the particle amount measured by the measurement unit;
An output unit that outputs the decision result output by the decision unit to the outside.
A liquid supply device additionally provided with. An application device for applying a treatment liquid to a target, comprising:
The supply device according to any one of claims 1 to 3,
A nozzle that discharges the processing liquid supplied from the liquid supply port of the supply device.
An applicator comprising: An aging device that treats a filter with a high-viscosity treatment liquid with a viscosity of 1000 cP or more,
a first tank capable of storing a treatment liquid;
a second tank capable of storing the treatment liquid;
A first liquid delivery pipe and a second liquid delivery pipe connecting the first tank and the second tank in parallel,
a first liquid delivery unit that delivers liquid from the first tank to the second tank through the first liquid delivery pipe;
a second liquid delivery unit that delivers liquid from the second tank to the first tank through the second liquid delivery pipe;
a control unit that alternately operates the first liquid delivery unit and the second liquid delivery unit;
a filter mounting portion for mounting a filter to filter the treatment liquid flowing through the first liquid delivery pipe;
Measuring unit that measures the amount of particles in the processing liquid that passed through the filter
Equipped with
The control unit determines whether the particle amount measured by the measuring unit exceeds a threshold,
The measuring unit counts the number of particles of 10 μm or less, which are dust that escapes from the filter, for each of a plurality of sizes,
For each of the plurality of sizes of the particles, the threshold is set in advance,
The control unit determines whether the particle exceeds the threshold for each of the plurality of sizes. An aging device that treats a filter with a high-viscosity treatment liquid with a viscosity of 1000 cP or more,
a first tank capable of storing a treatment liquid;
a second tank capable of storing the treatment liquid;
A first liquid delivery pipe and a second liquid delivery pipe connecting the first tank and the second tank in parallel,
a first liquid delivery unit that delivers liquid from the first tank to the second tank through the first liquid delivery pipe;
a second liquid delivery unit that delivers liquid from the second tank to the first tank through the second liquid delivery pipe;
a control unit that alternately operates the first liquid delivery unit and the second liquid delivery unit;
a filter mounting portion for mounting a filter to filter the treatment liquid flowing through the first liquid delivery pipe;
Measuring unit that measures the amount of particles in the processing liquid that passed through the filter
Equipped with
The measuring unit counts the number of particles of 10 μm or less, which are dust that escapes from the filter, for each of a plurality of sizes,
The control unit determines whether the particle amount measured by the measuring unit exceeds the threshold, and if the particle amount measured by the measuring unit falls below the threshold, determines that aging is complete, and provides the determination result. An aging device that is displayed on a display. A liquid supply method for supplying a high-viscosity treatment liquid with a viscosity of 1000 cP or more to a supplier,
a) A process of sending the treated liquid from the tank to the supplier,
b) a process of filtering the treatment liquid sent from the tank to a supplier by the process a) with a filter;
c) a step of measuring the amount of particles in the treatment liquid that passed through the filter by step b);
d) a process of determining whether the particle amount measured by process c) exceeds a threshold
Including,
In the step c), the number of particles of 10 μm or less, which is dust that has escaped from the filter, is counted for each of a plurality of sizes,
In the step d), the threshold value is set in advance for each of the plurality of sizes of the particle, and it is determined whether the threshold value is exceeded for each of the plurality of sizes of the particle. An aging method in which a filter is treated with a high-viscosity treatment liquid having a viscosity of 1000 cP or more,
A) a process of alternately sending the treatment liquid from the first tank to the second tank and sending the treatment liquid from the second tank to the first tank;
B) By process A), from the first tank A process of filtering the treatment liquid sent to the second tank with a filter;
C) a step of measuring the amount of particles in the treatment liquid that passed through the filter by step B),
D) a process for determining whether the particle amount measured by process C) exceeds a threshold
Including,
In the step C), the number of particles of 10 μm or less, which are dust that has escaped from the filter, is counted for each of a plurality of sizes,
In the step D), the threshold is set in advance for each of the plurality of sizes of the particle, and it is determined whether the threshold is exceeded for each of the plurality of sizes of the particle. An aging method in which a filter is treated with a high-viscosity treatment liquid having a viscosity of 1000 cP or more,
A) a process of alternately sending the treatment liquid from the first tank to the second tank and sending the treatment liquid from the second tank to the first tank;
B) By process A), from the first tank A process of filtering the treatment liquid sent to the second tank with a filter;
C) a step of measuring the amount of particles in the treatment liquid that passed through the filter by step B),
D) a process for determining whether the particle amount measured by process C) exceeds a threshold
Including,
In the step C), the number of particles of 10 μm or less, which are dust that has escaped from the filter, is counted for each of a plurality of sizes,
An aging method in which, in the step D), when the particle amount measured in the step C) is less than the threshold, it is determined that aging is complete, and the judgment result is displayed on a display.