KR102648439B1 - Function evaluation system - Google Patents

Abstract

A performance evaluation system, particularly an electrostatic chuck evaluation system, is disclosed. The evaluation system includes a measuring device for measuring the performance of the pijin body and a fixing device for fixing the pijin body and the measuring device. Here, a plurality of measuring terminals are formed in the measuring device, the measuring terminals contact the piston body, and the contact state between the measuring terminals and the piston body is maintained by the fixing device during performance measurement.

Description

Performance Evaluation System{FUNCTION EVALUATION SYSTEM}

The present invention relates to performance evaluation systems, particularly electrostatic chuck evaluation systems.

Currently, in order to evaluate and diagnose an electrostatic chuck, an operator manually measures the heating electrode resistance component in an external environment after separating the electrostatic chuck from the chamber. This method can be very time consuming.

Additionally, the accuracy of resistance component measurement results may decrease depending on the measurement environment, which may lead to incorrect judgments.

KR 10-2008-0038059 A

The present invention provides a performance evaluation system, particularly an electrostatic chuck evaluation system.

Accreditation information

- Assignment identification number: G14AICT06T10002

- Name of ministry: Gyeonggi-do

- Research management specialized organization: Next Generation Convergence Technology Research Institute

- Research project name: Materials, parts, and equipment industry self-reliance research support project

- Research project name: Development of PVD Sputter and Electrostatic Chuck (ESC) for system semiconductor manufacturing

- Contribution rate: 100%

- Host organization: Myongji University Industry-Academic Cooperation Foundation

- Research period: 2020-06-01 ~ 2022-12-31

In order to achieve the above-described object, the evaluation system according to an embodiment of the present invention includes a measuring device for measuring the performance of the pidjin group; and a fixing device for fixing the piston body and the measuring device. Here, a plurality of measuring terminals are formed in the measuring device, the measuring terminals contact the piston body, and the contact state between the measuring terminals and the piston body is maintained by the fixing device during performance measurement.

A measuring device used in an evaluation system according to an embodiment of the present invention includes a circuit board; At least one electronic component formed on one side of the circuit board; a connection portion additionally formed on one surface of the circuit board; and measurement terminals formed on the other side of the circuit board. Here, in order to evaluate the performance of the oscillating entity, the measurement terminals contact the oscillating entity, and a measuring device is electrically connected to the connection to measure the performance of the oscillating entity.

The fixing device used in the evaluation system according to an embodiment of the present invention includes a lower fixing device supporting the pijin body; and an upper fixing device that supports the piston body and a measuring device placed on the piston body. Here, the upper fixing device and the lower fixing device fix the pulled object and the measuring device while the terminal of the measuring device is in contact with the pulled object.

The performance evaluation system according to the present invention contacts the measuring terminals of the measuring device with the pulsating object, for example, an electrostatic chuck, and then fixes the pulsating object and the measuring device using a fixing device, thereby stably and without error. Performance can be evaluated.

Figure 1 is a diagram schematically showing the combined structure of an electrostatic chuck, a measuring device, and a fixing device according to an embodiment of the present invention.
Figure 2 is a diagram showing the exploded structure of an electrostatic chuck, a measuring device, and a fixing device according to an embodiment of the present invention.
Figure 3 is a diagram showing a measuring device according to an embodiment of the present invention.
Figure 4 is a diagram showing the arrangement of an electrostatic chuck and a measuring device according to an embodiment of the present invention.
Figure 5 is a diagram illustrating a performance evaluation system according to an embodiment of the present invention.

As used herein, singular expressions include plural expressions unless the context clearly dictates otherwise. In this specification, terms such as “consists of” or “comprises” should not be construed as necessarily including all of the various components or steps described in the specification, and some of the components or steps may be included in the specification. It may not be included, or it should be interpreted as including additional components or steps. In addition, terms such as "... unit" and "module" used in the specification refer to a unit that processes at least one function or operation, which may be implemented as hardware or software, or as a combination of hardware and software. .

The present invention relates to a performance evaluation system, which can easily evaluate and diagnose the presence or absence of abnormalities in a piston body, especially an electrostatic chuck, in a semiconductor process or display process.

Currently, electrostatic chucks are used to precisely control the temperature distribution of wafers in semiconductor or display processes. Since the electrostatic chuck is directly exposed to plasma and the temperature of the electrostatic chuck continuously rises and falls, the performance of the electrostatic chuck deteriorates after a certain period of time. It decreases. Therefore, when the process is performed more than a certain number of times or over a certain period of time, it is necessary to evaluate and diagnose the performance of the electrostatic chuck.

The performance evaluation system can evaluate the performance of such electrostatic chucks quickly and without error.

According to one embodiment, the performance evaluation system may evaluate the performance of the electrostatic chuck and a measuring device for measuring its performance using a measuring device while the electrostatic chuck and a measuring device for measuring its performance are stably fixed with a fixing device.

In particular, there are many measurement points in an electrostatic chuck, and previously, people measured the measurement points one by one with a measuring device. As a result, performance evaluation took a long time and the possibility of errors occurring depending on the measurement environment was high.

Accordingly, the evaluation system of the present invention can quickly evaluate the performance of the electrostatic chuck by bringing the measurement terminals of the measurement device into contact with the measurement points of the electrostatic chuck and then selecting the measurement terminals according to a preset program, and the electrostatic chuck and the measurement Since the electrostatic chuck is measured after the device is stably fixed, measurement errors may not occur.

Hereinafter, various embodiments of the present invention will be described in detail with reference to the attached drawings.

Figure 1 is a diagram schematically showing the combined structure of an electrostatic chuck, a measuring device, and a fixing device according to an embodiment of the present invention, and Figure 2 is a diagram schematically showing a combination structure of an electrostatic chuck, a measuring device, and a fixing device according to an embodiment of the present invention. It is a drawing showing an exploded structure, and Figure 3 is a drawing showing a measuring device according to an embodiment of the present invention. FIG. 4 is a diagram showing the arrangement of an electrostatic chuck and a measuring device according to an embodiment of the present invention, and FIG. 5 is a diagram showing a performance evaluation system according to an embodiment of the present invention.

1 to 7, the performance evaluation system of this embodiment can evaluate the performance of various devices, especially electrostatic chucks located in a chamber in a semiconductor process or display process, and includes a measuring device 110 and an upper fixing device 112. ), a lower fixing device 114, a measuring device 500, and a data collector (computing device, 502). Hereinafter, for convenience of explanation, it will be assumed that the pidgin unit is an electrostatic chuck.

The measurement device 110 is a device for measuring the performance of the electrostatic chuck 100, and may include a circuit board 300, a plurality of measurement terminals 302, and electronic components as shown in FIG. 3. The electronic components may be formed on the circuit board 300, and measurement terminals (eg, probes, 302) may be formed in a protruding form on the lower surface of the circuit board 300.

According to one embodiment, the measurement terminals 302 are formed at positions corresponding to measurement points of the electrostatic chuck 100, as shown in FIG. 5, and may be one-to-one matched with the measurement points. However, since the matching of the measurement terminals 302 and the measurement points must be maintained correctly without being distorted during measurement, the electrostatic chuck 100 and the measurement device 110 may be fixed using a fixing device as described later. You can.

The electronic components may include a connection unit 310, a trigger unit 312, a control unit 314, a power supply unit 316, a multiplexer 318 for selecting a measurement location, and a plurality of sensors. That is, various electronic components can be formed on the circuit board 300, and are not limited to the above electronic components. Additionally, there are no restrictions on the location of the electronic components.

The connection part 310 is a part that is electrically connected to the measuring device 500, and as a result, the measuring device 500 and the measurement device 110 can be electrically connected through the connecting part 310. Of course, although only one connection part 310 is shown in FIG. 3, a plurality of connection parts may exist.

In this connected state, the measuring device 500 can measure the resistance component, capacitor component, inductor component, electrostatic power abnormality state, temperature distribution, and degree of helium gas leakage of the heating electrode resistance of the electrostatic chuck 100. In this case, the measuring device 500 may directly measure some characteristics of the electrostatic chuck 100 through the connecting portion 310, but may also receive the measurement results measured by the measuring device 110 through the connecting portion 310. there is. Of course, the measurement results measured by the measurement device 110 may be provided to the measurement device 500 through an element other than the connection unit 310 or wirelessly.

For example, the measurement device 500 supplies power to the connection unit 310, the measurement terminal 302, and a specific measurement point of the electrostatic chuck 100, and the power is supplied to other measurement terminals 302 and the connection unit 310. It can flow to the measuring device 500 through . In this case, the measuring device 500 can measure the resistance of the heating electrode resistance through the flow of power.

The sensor includes at least one temperature sensor for measuring the temperature distribution of the electrostatic chuck 100, at least one DC voltage measurement sensor for measuring the electrostatic power abnormality state of the electrostatic chuck 100, and the electrostatic chuck 100. There may be one or more helium gas detection sensors to measure the helium gas leakage state. Data measured by these sensors may be provided to the measurement device 500 or data collector 502 through the connection unit 310. Meanwhile, the sensor is not limited to the sensors mentioned above, and an appropriate sensor will be used depending on the organization being investigated.

The trigger unit 312 may serve to trigger the operation of the measurement device 110.

The control unit 314 can control the operation of electronic components such as the sensor and multiplexer 318.

The power supply unit 316 can supply power to the electronic components.

According to one embodiment, the remaining portion of the circuit board 300, excluding the measurement terminal 302 that requires electrical contact, may be insulated and coated with a material with a high insulating constant, such as epoxy or an oxide film. This is to prevent unnecessary electrical connections between electronic components.

Meanwhile, electronic components capable of performing the function of the measuring device 500 may be formed on the circuit board 300, in which case the measurement by the electronic components of the circuit board 300 without the measuring device 500 is performed. Data may also be provided directly to data collector 502.

In order to accurately measure the electrostatic chuck 100, the electrostatic chuck 100 and the measuring device 110 must be matched to the desired position and then not move for accurate measurement. Therefore, the evaluation system of this embodiment can stably fix the electrostatic chuck 100 and the measuring device 110 using a fixing device.

Looking first at the structure of the electrostatic chuck 100, the lower portion 100a of the electrostatic chuck 100 is, for example, a ceramic plate, and may have a width smaller than the body as shown in FIG. 4. That is, a step may exist between the body and the lower part 100a.

In order to fix the electrostatic chuck 100 of this structure, a hole 202 is formed in the center of the lower fixing device 114, and the part (recessed part, 210) adjacent to the hole 202 has a lower height than the other parts. You can. That is, a step may exist between the part 210 and other parts.

In this structure, the lower part 100a of the electrostatic chuck 100 is inserted into the hole 202 of the lower fixing device 114, and the lower outer portion of the lower surface of the electrostatic chuck 100 is the lower part of the lower fixing device 114, That is, it can be placed on the waist. As a result, the electrostatic chuck 100 can be stably supported by the lower fixing device 114.

The upper fixing device 112 has a hole 200 in the center, and as shown in FIG. 1, a plurality of protrusions 120 may protrude toward the center of the upper fixing device 112. The hole 200 is formed to connect the measuring device 500 to the measuring device 110.

After the measuring device 110 is placed on the electrostatic chuck 100, pressure is initially applied to the measuring device 110 using the protrusions 120 to prevent the measuring device 110 from moving. At this time, the measurement terminals 302 are in contact with measurement points on the electrostatic chuck 100. That is, the measurement device 110 may be supported by the upper fixing device 112 with the measurement terminals 302 in physical contact with the electrostatic chuck 100.

In this way, while the electrostatic chuck 100 is primarily supported by the upper fixing device 112 and the lower fixing device 114, a secondary fixing means can be used for secure fixation.

Specifically, as shown in FIG. 2, the support member 222 may be located between the upper fixing device 112 and the lower fixing device 114, and the fastening member 220 is attached to the upper fixing device 112. By inserting the lower adjustment device 114 into the hole through the hole and the hole of the support member 222, the upper fixing device 112 and the lower fixing device 114 can be strongly fastened. As a result, additional pressure is applied from the fixing devices 112 and 114 to the electrostatic chuck 100 and the measuring device 110, so that the electrostatic chuck 100 is stably fixed in a state matched to the measuring device 110. You can. At this time, the support member 222 is arranged outside the electrostatic chuck 100 and the measuring device 110.

That is, after the electrostatic chuck 100 is supported by the lower fixture 114 and the measuring device 110 is placed on the electrostatic chuck 100, the upper fixture 112 is connected to the measuring device 110 and the electrostatic chuck 110. Apply pressure to first fix the electrostatic chuck 100 and the measuring device 110, and then fasten the upper fixing member 112 and the lower fixing member 114 using the fastening device 220 to secure the electrostatic chuck 100. And the measuring device 110 can be secondarily fixed. If fixed in this way, the arrangement of the electrostatic chuck 100 and the measuring device 110 can be maintained as set during performance evaluation of the electrostatic chuck 100.

In summary, the performance evaluation system of this embodiment can evaluate the performance of the electrostatic chuck 100 using the measuring device 500 while the electrostatic chuck 100 and the measuring device 110 are stably fixed.

According to another embodiment, the measurement device 110 of the performance evaluation system may be mounted in the chamber to monitor the performance of the electrostatic chuck 100, for example, the heating electrode resistance component, in real time. When a change in the heating electrode resistance component is detected, the control unit of the measuring device 110 may heat or cool a certain portion to compensate for the heating electrode resistance. For this purpose, the measuring device 110 may include a separate heater or cooler.

According to another embodiment, the performance evaluation system may be installed in a test chamber to comprehensively evaluate the performance of the electrostatic chuck 100. Within this test chamber, the performance evaluation system can evaluate the resistance component, capacitor component, inductance, temperature distribution, degree of helium gas leakage, or electrostatic power abnormality of the heating electrode resistance.

Below, we will look at the evaluation process.

After a number of deposition processes, etc. are performed within the chamber, the electrostatic chuck 100 may be taken out of the chamber in order to evaluate its performance.

Next, the measuring device 110 is placed on the electrostatic chuck 100 so that the measuring terminal 302 and the measuring point are matched, and the electrostatic chuck 100 and the measuring device 110 are attached to the upper fixing device 112 and the lower fixing device ( 114) to fix it.

Subsequently, the measurement device 500 may measure indicators of the electrostatic chuck 100, such as resistance, capacitance, and inductance, through the measurement device 110.

Subsequently, the data collector 502 may collect measurement data from the measurement device 500 and evaluate the performance of the electrostatic chuck 100 by analyzing the collected measurement data.

Meanwhile, the components of the above-described embodiment can be easily understood from a process perspective. In other words, each component can be understood as a separate process. Additionally, the processes of the above-described embodiments can be easily understood from the perspective of the components of the device.

The above-described embodiments of the present invention have been disclosed for illustrative purposes, and those skilled in the art will be able to make various modifications, changes, and additions within the spirit and scope of the present invention, and such modifications, changes, and additions will be possible. should be regarded as falling within the scope of the patent claims below.

100: pidgin body (electrostatic chuck) 110: measuring device
112: upper fixing device 114: lower fixing device
120: protrusion 210: lower back
220: Fastening member 222: Support member
300: circuit board 302: measurement terminal
310: connection part 312: trigger part
314: control unit 316: power supply unit
318: Multiplexer 500: Measurement device
502: data collector

Claims (16)

Measuring devices for measuring the performance of pidgin organizations; and
It includes a fixing device for fixing the piston body and the measuring device,
A plurality of measuring terminals are formed in the measuring device, the measuring terminals are in contact with the piston body, and the contact state between the measuring terminals and the piston body is maintained by the fixing device during performance measurement. system. The evaluation system according to claim 1, wherein the piston unit is an electrostatic chuck, and performance is evaluated while the electrostatic chuck is separated from the chamber. The evaluation system according to claim 1, wherein the performance of the piston body is measured by selecting measurement terminals while the measurement terminals and measurement points of the piston body are aligned. According to paragraph 1,
a measuring device that measures the performance of the pijin body through the measuring device; and
An evaluation system further comprising a data collector that collects data measured by the measuring device. The method of claim 4, wherein the measuring device,
circuit board;
Electronic components formed on one side of the circuit board and having at least one sensor;
the measurement terminals formed on the other side of the circuit board; and
An evaluation system comprising a connection part to which the measuring device is electrically connected. The evaluation system according to claim 5, wherein the remaining areas of the circuit board except for the measurement terminals are coated with an insulating material. The method of claim 1, wherein the fixing device is:
a lower fixing device supporting an electrostatic chuck as the pushing unit;
an upper fixing device that applies pressure to secure the measuring device placed on the electrostatic chuck; and
A support member arranged on the outside of the electrostatic chuck between the lower fixing device and the upper fixing device,
As the fastening device is inserted into the hole of the lower fixture through the hole of the upper fixture and the hole of the support member, the upper fixture and the lower fixture fix the electrostatic chuck and the measuring device. Evaluation system. The evaluation system according to claim 1, wherein the measuring device includes a heater or cooler for controlling the temperature of the irradiated body. In the measuring device used in the evaluation system,
circuit board;
At least one electronic component formed on one side of the circuit board;
a connection portion additionally formed on one surface of the circuit board; and
Including measurement terminals formed on the other side of the circuit board,
In order to evaluate the performance of the oscillating entity, the measuring terminals are in contact with the oscillating entity, and a measuring device is electrically connected to the connection to measure the performance of the oscillating entity. The method of claim 9, wherein the pidgin unit is an electrostatic chuck,
The electronic component has at least one sensor, and the sensor detects a temperature distribution of the electrostatic chuck, an abnormal electrostatic power state, or a degree of helium gas leakage. The measuring device according to claim 9, wherein the measuring terminals and the measuring points of the pidgin body are matched one-to-one. The method of claim 9, wherein the electronic component includes a multiplexer,
A measurement device, characterized in that some of the measurement terminals are selected through the multiplexer to evaluate the performance of the pidgin body. In the fixture used in the evaluation system,
A lower fixing device that supports the pidgin body; and
It includes an upper fixing device that supports the piston body and a measuring device placed on the piston body,
A fixing device characterized in that the upper fixing device and the lower fixing device fix the pulled object and the measuring device while the terminal of the measuring device is in contact with the pulled object. The method of claim 13, wherein a hole is formed in the center of the lower fixing device and a step is formed in the lower fixing device,
The lower part of the piston body is inserted into the hole of the lower fixing device, and the outer portion of the lower part of the piston body is placed on the main part of the lower fixing device, so that the piston body is stably supported by the lower fixing device. A fixing device made of. The method of claim 13, wherein a hole is formed in the center of the upper fixing device,
The connection portion of the measuring device is exposed to the outside through the hole, the connecting portion is electrically connected to the measuring device, and a protrusion is formed in a portion of the upper fixing device facing the hole toward the center of the upper fixing device. , A fixing device characterized in that the piston body and the measuring device are supported by the protrusion. According to clause 13,
It further includes a support member arranged outside the piston body between the upper fixing device and the lower fixing device,
The upper fixing device and the lower fixing device are coupled by inserting the fastening device into the hole of the lower fixing device through the hole of the upper fixing device and the hole of the support member, and the coupling causes the piston body and the measurement. A fixation device, characterized in that the device is fixed.