KR102629367B1 - Magnetic sensor for vehicle - Google Patents

Abstract

We provide a magnetic sensor for vehicles with a simplified manufacturing process compared to conventional technology.
A magnetic sensor according to an embodiment of the present invention includes a housing, a terminal coupled by insert injection into the housing and including a terminal portion, and a magnetic element disposed within the housing and connected to one end of the terminal portion by welding. It is characterized by

Description

Magnetic sensor for vehicles {MAGNETIC SENSOR FOR VEHICLE}

The present invention relates to a magnetic sensor for a vehicle, and more specifically, to a magnetic sensor for a vehicle with a simplified manufacturing process.

Vehicles such as cars are adding various functions that go beyond their function as a means of transportation and provide users with a more stable and comfortable driving condition. Various configurations, including electronic control of the engine and transmission, which are the core driving elements of the vehicle, are included. The elements are either electronic or are in the process of becoming electronic.

To achieve such electronic control, vehicles are equipped with various types of sensors. In particular, the use of magnetic sensors, which measure the operating status of a sensing object by detecting changes in the magnetic field according to the movement of the sensing object, is increasing.

The magnetic sensor is a method of detecting changes in the magnetic field that occurs due to the movement of a magnetic material through a magnet and a Hall sensor. In vehicles, it is used as a shift operation detection sensor to detect the shift operation state of the transmission or to measure the vehicle's wheel speed. It is used as a wheel speed sensor to measure speed.

These magnetic sensors are installed in a specific location on the vehicle depending on the intended use. When the magnetic sensor is used as a shift operation detection sensor, the control finger is used to detect changes in the magnetic field due to the position movement of the control finger that moves according to the operation of the shift lever. It can be mounted adjacent to, and when a magnetic sensor is used as a wheel speed sensor, it is mounted adjacent to the tone wheel to detect changes in the magnetic field due to the rotational movement of the tone wheel, which rotates integrally with the vehicle wheel.

In the case of the prior art, the magnet and terminal were inserted into a separate holder, then the Hall sensor was welded and assembled into the housing. This conventional magnetic sensor manufacturing method has the disadvantage of complicating the process and increasing manufacturing costs.

Japanese Patent Publication No. 2005-043160

The purpose of the present invention is to provide a magnetic sensor for vehicles with a simplified manufacturing process compared to the prior art.

A magnetic sensor according to an embodiment of the present invention includes a housing, a terminal coupled by insert injection into the housing and including a terminal portion, and a magnetic element disposed within the housing and connected to one end of the terminal portion by welding. It is characterized by

Preferably, the housing is formed along a vertical direction and includes a terminal arrangement part where the terminal is inserted and injected and coupled, and an element arrangement part arranged adjacent to the terminal arrangement part in the vertical direction and on which the magnetic element is arranged. It is characterized by:

Preferably, the element arrangement part is formed to face the magnet arrangement part into which the magnetic part of the magnetic element is inserted in the first direction with one end of the terminal part interposed in a vertical direction, and the support part of the magnetic element is formed to be opposed to the first direction. It is characterized in that it includes a support arrangement part inserted in the direction.

Preferably, the magnetic element further includes a connection terminal connecting the magnetic part and the support part in a vertical direction, and one end of the terminal part is connected to the connection terminal by welding.

Preferably, the magnet placement unit is provided on one side of the magnet placement unit in the vertical direction, with a first groove formed by being recessed in a second direction perpendicular to the first direction, and at a position opposite to the first groove in the vertical direction. It is formed to protrude from the inside of the magnet arrangement part in the first direction, and includes an element fixing part that fixes one side of the connection terminal in the second direction between protrusions formed on the front surface.

Preferably, the magnet arrangement part further includes second grooves formed on both sides of the device fixing part in the second direction and recessed in the first direction.

Preferably, the magnet placement unit is formed on one side of the magnet placement unit in the vertical direction and extends in the first direction along the inside of the magnet placement unit, and further includes a protrusion protruding in the vertical direction. .

Preferably, when the magnetic part is inserted into the magnet arrangement part in the first direction, the protrusion comes into contact with the magnetic part in a vertical direction.

Preferably, the support arrangement part is provided between a pair of terminal arrangement parts on which the other side of the connection terminal is disposed and the terminal arrangement part with respect to the second direction, and further includes a recessed part formed by being recessed in the first direction. It is characterized by including.

Preferably, the terminal arrangement part and the device arrangement part are provided along a first direction, and the sealing part is partially inserted into the first groove part, the second groove part, and the recessed part.

Preferably, the housing further includes a bushing coupled in the vertical direction to the bushing arrangement portion formed along the first direction at the lower part of the housing.

Preferably, the terminal further includes a first molding part formed by molding one end of the terminal part and a second molding part formed by molding the other end of the terminal part, and the first molding part and the second molding part are It is characterized in that the insert is injected and coupled to the terminal arrangement part.

Preferably, the housing is formed below the support portion in the vertical direction and further includes a substrate portion connected to the other end of the terminal portion disposed along the vertical direction and the first direction. do.

Preferably, the cover is inserted into the substrate arrangement part in the first direction and further includes a cover that fixes the substrate part in the first direction and the vertical direction.

Preferably, the cover is connected to the first part and a first support part that supports the first part of the substrate part disposed along the vertical direction in the substrate arrangement part in the first direction and is connected to the first part and is attached to the substrate arrangement part. It further includes a second support portion disposed along a first direction and supporting the second portion of the substrate portion in a vertical direction, wherein the first support portion and the second support portion protrude from the cover in the first direction. It is characterized in that it is formed and arranged opposite to the vertical direction.

Preferably, the other end of the terminal portion is connected to the first portion in the first direction.

Preferably, the substrate placement portion is formed to protrude in the first direction, and includes a first cover support portion that abuts the first support portion in a vertical direction, a first cover support portion that protrudes in the first direction, and the second support portion. It includes a second cover support part abutting in the vertical direction, and the first cover support part and the second cover support part are arranged to face each other in the vertical direction.

Preferably, the cover further includes a third support part inserted in the first direction into the third cover support part of the substrate placement unit formed by being recessed in the second direction perpendicular to the first direction, and the third support part is located between the first support part and the second support part in the vertical direction and is formed to protrude with respect to the first direction.

Preferably, the third cover support part is positioned between the first cover support part and the second cover support part in a vertical direction on the substrate placement part.

According to the magnetic sensor of the present invention, the terminal can be formed to fit the size of the magnetic element, so a terminal of an appropriate size can be used regardless of the shape or size of the housing, and it is possible to reduce costs when producing the magnetic sensor. .

In addition, according to the manufacturing process of the magnetic sensor of the present invention, the terminal is inserted into the housing and joined, and the magnetic element is welded to the terminal, and then a sealing portion is formed to prevent the terminal and the magnetic element arranged from being exposed to the external environment. , the entire manufacturing process can be simplified.

1 is a diagram showing the overall shape of a magnetic sensor according to an embodiment of the present invention.
Figure 2 is a partially exploded perspective view of a magnetic sensor according to an embodiment of the present invention.
3 to 6 are diagrams showing the detailed shape of the housing provided in the magnetic sensor.
Figure 7 is a diagram showing the manufacturing process of a magnetic sensor according to an embodiment of the present invention.
Figure 8 is a diagram showing a state in which a magnetic element is connected to a terminal.
Figure 9 is a diagram showing a state in which a sealing portion is formed in a housing provided in a magnetic sensor.
Figure 10 is a diagram showing a state in which a cover is coupled to the lower part of a housing provided in a magnetic sensor.

Hereinafter, preferred embodiments of the present invention will be described in detail with reference to the attached drawings. First, when adding reference signs to components in each drawing, it should be noted that the same components are given the same reference numerals as much as possible even if they are shown in different drawings. Additionally, in describing the present invention, if it is determined that a detailed description of a related known configuration or function may obscure the gist of the present invention, the detailed description will be omitted. In addition, preferred embodiments of the present invention will be described below, but the technical idea of the present invention is not limited or restricted thereto, and of course, it can be modified and implemented in various ways by those skilled in the art.

FIG. 1 is a diagram showing the overall shape of the magnetic sensor 100 according to an embodiment of the present invention, and FIG. 2 is a partially exploded perspective view of the magnetic sensor 100 according to an embodiment of the present invention. At this time, FIG. 1(a) in FIG. 1 is a diagram showing the shape of the magnetic sensor 100 viewed from the front, and FIG. 1(b) in FIG. 1 is a perspective view of the magnetic sensor 100 viewed obliquely from the rear.

In addition, illustration of the sealing portion 40, which will be described later in FIG. 1, will be omitted, and illustration of the substrate portion 60 and the cover 70, which will be described later in FIG. 2, will be omitted.

In the drawings for explaining an embodiment of the present invention, the X-axis direction (first direction) represents the front-back direction, the Y-axis direction (second direction) represents the left-right direction perpendicular to the Vertical direction) refers to a direction perpendicular to both the X-axis direction and the Y-axis direction.

1 and 2, the magnetic sensor 100 according to an embodiment of the present invention includes a housing 10, a terminal 20, a magnetic element 30, a sealing portion 40, a bushing 50, It includes a substrate portion 60 and a cover 70. As an example, the magnetic sensor 100 may be mounted adjacent to a control finger that moves according to the operation of the vehicle's shift lever, or may be mounted adjacent to a tone wheel that rotates integrally with the vehicle wheel.

The housing 10 may be integrally formed by injection molding and may be formed of a material such as plastic with low thermal conductivity.

The terminal 20 may be combined by insert injection molding into the housing 10 and may include a terminal portion 22. Additionally, the terminal 20 may be formed by molding (eg, overmolding) the terminal portion 22 in advance.

In one embodiment, the first molding part 24a may be molded to one end of the terminal part 22, and the second molding part 24b may be molded to the other end of the terminal part 22.

The magnetic element 30 may be disposed within the housing 10 and connected to one end of the terminal portion 22 by welding. As an example, the magnetic element 30 may be a Hall IC sensor and may detect the movement of a magnetic material such as the control finger or tone wheel described above.

Referring to Figures 1 and 2, the magnetic element 30 includes a magnetic part 32 (e.g., equipped with a magnet and a Hall sensor inside), a support part 34, and a magnetic part 32 and the support part 34 in a vertical direction. It includes a pair of connection terminals (36, e.g. lead wire) connected to . As an example, the support part 34 may be an injection molded product for fixing the magnetic part 32 and the connection terminal 36 to the housing 10.

3 to 6 are diagrams showing the detailed shape of the housing 10 provided in the magnetic sensor 100. In detail, FIG. 3 is an enlarged view of part A of FIG. 1, FIG. 4 is an enlarged view of part C of FIG. 3, FIG. 5 is an enlarged view of part D of FIG. 3, and FIG. 6 is an enlarged view of part E of FIG. 4. am.

Additionally, illustration of the magnetic element 30 described above in FIGS. 4 to 6 will be omitted.

Referring to FIGS. 1 to 6, the housing 10 is formed along the vertical direction, and the terminal 22 is inserted and injection-molded and connected to the terminal arrangement 12 and the terminal arrangement 12 in the vertical direction. It is disposed adjacently and includes an element placement portion 14 on which a magnetic element 30 is disposed.

At this time, the first molding part 24a and the second molding part 24b may be joined to the terminal arrangement part 12 by insert injection molding.

The element arrangement portion 14 is formed to face the magnet arrangement portion 142 into which the magnetic portion 32 of the magnetic element 30 is inserted in the first direction and one end of the terminal portion 22 in the vertical direction. and includes a support arrangement portion 144 into which the support portion 34 of the magnetic element 30 is inserted in the first direction.

In detail, the magnet placement unit 142 includes a first groove 142a and a first groove 142a formed by being recessed in a second direction perpendicular to the first direction on one side of the magnet placement unit 142 in the vertical direction. and an element fixing part 142b provided at a position opposite to the vertical direction.

The device fixing portion 142b is formed to protrude from the inside of the magnet placement portion 142 in the first direction, and can fix one side of the connection terminal 36 in the second direction between the protrusions 142b1 formed on the front surface. there is. Accordingly, the magnetic element 30 can be prevented from being separated from the element placement portion 14 until the magnetic element 30 is welded to one end of the terminal portion 22.

The magnet placement portion 142 further includes second groove portions 142c formed by being recessed in the first direction on both sides of the device fixing portion 142b in the second direction.

In addition, the magnet placement unit 142 is formed on one side of the magnet placement unit 142 in the vertical direction, extending in a first direction along the inside of the magnet placement unit 142, and has a protrusion 142d that protrudes in the vertical direction. ) further includes.

The protrusion 142d may contact the magnetic portion 32 in a vertical direction when the magnetic portion 32 is inserted into the magnet placement portion 142 in the first direction. At this time, the protrusion 142d may be damaged, and thus the magnetic portion 32 may be press-fitted and fixed to the magnet placement portion 142. When the magnetic element 30 is coupled to the housing 10 by the configuration of the protrusion 142d, the magnetic element 30 can be easily fixed to the housing 10.

The support arrangement portion 144 is provided between a pair of terminal arrangement portions 144a on which the other side of the connection terminal 36 is disposed and the terminal arrangement portion 144a with respect to the second direction, and is recessed in the first direction. It further includes a recessed portion 144b formed.

The sealing part 40 described above may be provided (formed) in the terminal arrangement part 12 and the element arrangement part 14 along the first direction, as shown in FIG. 2 . As an example, the sealing part 40 may be made of epoxy, and may be cured at a certain temperature after being applied to the terminal arrangement part 12 and the element arrangement part 14.

When the sealing portion 40 is formed in the terminal arrangement portion 12 and the element arrangement portion 14 along the first direction, a portion of the sealing portion 40 includes the above-described first groove portion 142a and the second groove portion ( It can be inserted into 142c) and recessed portion 144b.

When the sealing part 40 is disposed on the terminal arrangement part 12 and the element arrangement part 14, a part of the sealing part 40 is formed into the first groove part 142a, the second groove part 142c, and the recessed part ( By being inserted into 144b), when the sealing part 40 is made of epoxy, it is possible to minimize the generation of air bubbles in the sealing part 40 by facilitating the release of air bubbles, and also to minimize the generation of air bubbles in the sealing part 40 until the sealing part 40 is hardened. Flow within (12) and the element arrangement section 14 can be facilitated.

Additionally, the sealing part 40 can protect the terminal 20 arranged in the terminal arrangement part 12 and the magnetic element 30 arranged in the element arrangement part 14 from the external environment.

Figure 7 is a diagram showing the manufacturing process of the magnetic sensor 100 according to an embodiment of the present invention, Figure 8 is a diagram showing the state in which the magnetic element 30 is connected to the terminal portion 22, and Figure 9 is a diagram showing the magnetic element 30 connected to the terminal 22. This is a diagram showing the state in which the sealing portion 40 is formed in the housing 10 provided in the sensor 100. At this time, Figure 9(a) of Figure 9 is a diagram showing the state before the sealing part 40 is formed on the housing 10, and Figure 9(b) of Figure 9 shows the sealing part 40 on the housing 10. ) is a diagram showing the state after it was formed.

Additionally, the process of assembling the cover 70 in FIG. 7 is omitted.

Referring to (a) of FIG. 7, the terminal 20 may be formed by molding the terminal portion 22 in advance. As an example, as described above, the first molding portion 24a may be molded at one end of the terminal portion 22, and the second molding portion 24b may be molded at the other end of the terminal portion 22. .

As shown in (a) of FIG. 7, the pre-molded terminal 20 can be combined by insert injection into the housing 10, which is formed by injection into one piece.

In addition, a bushing arrangement part 16 may be formed in the lower part of the housing 10 along the first direction, and the bushing 50 may be coupled to the bushing arrangement part 16 in the vertical direction (e.g., press method). there is.

According to the magnetic sensor 100 of the present invention, the terminal 20 can be formed to fit the size of the magnetic element 30, so the terminal 20 of an appropriate size can be installed regardless of the shape or size of the housing 10. It can be used and cost reduction is possible when producing the magnetic sensor 100.

Referring to Figures 7(b) and 8, after the terminal 20 and the bushing 50 are coupled to the housing 10, the magnetic element 30 is placed within the housing 10 and is attached to one end of the terminal portion 22. It can be connected by welding. At this time, the connection terminal 36 of the magnetic element 30 may be connected to one end of the terminal portion 22 by welding.

As an example, the connection terminal 36 may be connected by welding to one end of the terminal portion 22 at a plurality of welding points P as shown in FIG. 8, and may be welded to one end of the terminal portion 22 by spot laser welding. can be connected.

Referring to Figure 7(c) and Figure 9, after the magnetic element 30 is placed in the housing 10 and connected by welding to one end of the terminal part 22, the sealing part 40 is connected to the terminal 20 and the magnetic element. The portion where the element 30 is disposed may be formed along the first direction so that it is not exposed to the external environment. As an example, the sealing part 40 may be epoxy as described above, and may be cured at a certain temperature after being applied to the terminal arrangement part 12 and the element arrangement part 14.

According to the manufacturing process of the magnetic sensor 100 of the present invention, the terminal 20 is inserted and combined into the housing 10, the magnetic element 30 is welded to the terminal 20, and then the terminal 20 and the magnetic Since the sealing portion 40 is formed so that the portion where the element 30 is disposed is not exposed to the external environment, the entire manufacturing process can be simplified.

FIG. 10 is a diagram showing a state in which the cover 70 is coupled to the lower part of the housing 10 provided in the magnetic sensor 100 (FIG. 10 is a cross-sectional view taken in the B-B' direction of FIG. 1). At this time, FIG. 10(a) of FIG. 10 is a cross-sectional view seen from the side showing the cover 70 coupled to the lower part of the housing 10, and FIG. 10(b) of FIG. 10 is a cross-sectional view of the cover 70 coupled to the lower part of the housing 10. This is a partially enlarged view showing the cover 70 in a combined state.

Referring to FIGS. 1, 2, and 10, the housing 10 is formed in the lower part of the support portion 144 in the vertical direction, and the substrate portion 60 connected to the other end of the terminal portion 22 is oriented in the vertical direction. and a substrate placement unit 18 disposed along the first direction.

At this time, the substrate portion 60 is connected to the first portion 62 and the first portion 62 disposed along the vertical direction of the substrate placement portion 18, and is oriented in the first direction to the substrate placement portion 18. It includes a second portion 64 disposed along. As an example, the substrate unit 60 may be a flexible electronic circuit (Flexible Printed Circuit).

As shown in FIG. 10, the other end of the terminal unit 22 may be connected to the first part 62 in the first direction, and the second part 64 may be connected to an external connector (not shown).

The cover 70 is inserted into the substrate placement unit 18 in the first direction and can fix the substrate unit 60 in the first direction and the vertical direction.

In detail, the cover 70 vertically supports the first support portion 72 that supports the first portion 62 of the substrate portion 60 in the first direction and the second portion 64 of the substrate portion 60. It includes a second support portion 74 that supports the direction.

At this time, the first support part 72 and the second support part 74 may be formed to protrude from the cover 70 in the first direction and may be arranged to face each other in the vertical direction.

The substrate placement portion 18 is formed to protrude in the first direction, includes a first cover support portion 182 that contacts the first support portion 72 in the vertical direction, and a second support portion that protrudes in the first direction. It includes a second cover support portion 184 that abuts (74) in the vertical direction.

At this time, the first cover support part 182 and the second cover support part 184 may be arranged to face each other in the vertical direction.

In addition, the cover 70 further includes a third support portion 76 inserted in the first direction into the third cover support portion 186 of the substrate placement portion 18, which is formed by being recessed in a second direction perpendicular to the first direction. Includes.

The third support part 76 may be positioned between the first support part 72 and the second support part 74 in the vertical direction and may be formed to protrude from the cover 70 in the first direction.

Additionally, the third cover support 186 of the substrate placement unit 18 may be located between the first cover support 182 and the second cover support 184 in the vertical direction on the substrate placement unit 18. .

According to the magnetic sensor 100 of the present invention, the substrate portion 60 disposed at the lower portion of the housing 10 is moved in the first direction through a fixing structure between the cover 70 and the substrate arrangement portion 18 of the housing 10. And by fixing it in the vertical direction, it is possible to prevent the substrate portion 60 from being damaged by vibration and thermal deformation.

The above description is merely an illustrative explanation of the technical idea of the present invention, and various modifications, changes, and substitutions can be made by those skilled in the art without departing from the essential characteristics of the present invention. will be. Accordingly, the embodiments disclosed in the present invention and the attached drawings are not intended to limit the technical idea of the present invention, but are for illustrative purposes, and the scope of the technical idea of the present invention is not limited by these embodiments and the attached drawings. . The scope of protection of the present invention should be interpreted in accordance with the claims below, and all technical ideas within the equivalent scope should be construed as being included in the scope of rights of the present invention.

100: magnetic sensor
10: housing
20: terminal
30: magnetic element
40: Sealing part
50: Bushing
60: substrate part
70: cover

Claims (19)

housing;
a terminal coupled to the housing by insert injection and including a terminal portion; and
It includes a magnetic element disposed in the housing and connected to one end of the terminal by welding,
The housing is formed along a vertical direction and includes a terminal arrangement part where the terminal is inserted and injection-molded, and an element arrangement part arranged adjacent to the terminal arrangement part in the vertical direction and on which the magnetic element is disposed,
The element arrangement part includes a magnet arrangement part into which the magnetic part of the magnetic element is inserted in the first direction, and a vertical direction formed to face each other with one end of the terminal part in between, and the support part of the magnetic element is inserted into the first direction. It includes a support arrangement portion that is,
The magnetic element further includes a connection terminal connecting the magnetic part and the support part in a vertical direction, and one end of the terminal part is welded and connected to the connection terminal. delete delete delete According to clause 1,
The magnet arrangement part,
A first groove formed on one side of the magnet placement portion in the vertical direction and recessed in a second direction perpendicular to the first direction, and
It is provided at a position opposite to the first groove in the vertical direction, is formed to protrude from the inside of the magnet placement portion in the first direction, and has one side of the connection terminal between protrusions formed on the front surface with respect to the second direction. A magnetic sensor comprising a device fixing part for fixing the device. According to clause 5,
The magnet arrangement part,
The magnetic sensor further includes second grooves formed on both sides of the element fixing part in the second direction and recessed in the first direction. According to clause 5,
The magnet arrangement part,
The magnetic sensor further includes a protrusion formed on one side of the magnet placement unit in the vertical direction, extending along the inside of the magnet placement unit in the first direction, and protruding in the vertical direction. According to clause 7,
A magnetic sensor, wherein when the magnetic portion is inserted into the magnet arrangement portion in the first direction, the protrusion contacts the magnetic portion in a vertical direction. According to clause 6,
The support arrangement part,
A pair of terminal placement portions on which the other side of the connection terminal is disposed, and
The magnetic sensor further includes a recessed portion provided between the terminal arrangement portions in the second direction and recessed in the first direction. According to clause 9,
A magnetic sensor further comprising a sealing part provided along a first direction in the terminal arrangement part and the element arrangement part, a portion of which is inserted into the first groove part, the second groove part, and the recessed part. According to clause 1,
A magnetic sensor further comprising a bushing coupled in a vertical direction to a bushing arrangement portion formed along a first direction at a lower portion of the housing. According to clause 1,
The terminal is,
A first molding portion formed by molding one end of the terminal portion and
It further includes a second molding portion formed by molding the other end of the terminal portion,
A magnetic sensor, wherein the first molding part and the second molding part are coupled to the terminal arrangement part by insert injection. According to clause 1,
The housing is formed below the support portion in the vertical direction, and further includes a substrate portion connected to the other end of the terminal portion disposed along the vertical direction and the first direction. According to clause 13,
A magnetic sensor further comprising a cover inserted into the substrate arrangement portion in the first direction and fixing the substrate portion in the first direction and the vertical direction. According to clause 14,
The cover is,
a first support portion supporting the first portion of the substrate portion disposed along a vertical direction in the substrate placement portion with respect to the first direction;
It further includes a second support part connected to the first part and disposed on the substrate arrangement part along the first direction, for supporting the second part of the substrate part with respect to the vertical direction,
The first support part and the second support part are formed to protrude from the cover in the first direction and are arranged to face each other in a vertical direction. According to claim 15,
The other end of the terminal portion is connected to the first portion in the first direction. According to clause 15,
The substrate arrangement part,
a first cover support part that protrudes in the first direction and abuts the first support part in a vertical direction; and
A second cover support portion is formed to protrude in the first direction and abuts the second support portion in a vertical direction,
A magnetic sensor, wherein the first cover support part and the second cover support part are arranged to face each other in a vertical direction. According to clause 17,
The cover is,
Further comprising a third support part inserted in the first direction into the third cover support part of the substrate arrangement part formed by being recessed in the second direction perpendicular to the first direction,
The third support part is located between the first support part and the second support part in the vertical direction and is formed to protrude in the first direction. According to clause 18,
The third cover support part,
A magnetic sensor, characterized in that it is located between the first cover support part and the second cover support part with respect to the vertical direction on the substrate placement part.

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