KR102622458B1 - System for detecting error of substrate processing system and method for detecting error of substrate processing system - Google Patents

Abstract

It is equipped with a temperature control unit that controls the temperature of the gas by allowing external gas to flow in, a humidity control unit that controls the humidity of the gas flowing in from the temperature control unit, and a blower unit that supplies the gas with the adjusted temperature and humidity to the substrate processing device. gas supply device; A system for detecting a failure of a substrate processing system including a substrate processing apparatus having an inlet through which a gas whose temperature and humidity is controlled from a gas supply device flows into the inlet from at least one wind pressure detection sensor provided in the substrate processing apparatus. A wind pressure information receiver that receives the wind pressure information of the supplied gas, a detector that detects a failure of the substrate processing system based on the received wind pressure information, a notification unit that transmits fault information about the detected fault to the control unit, and based on the fault information It includes a control unit that controls the substrate processing device.

Description

Failure detection system and failure detection method of substrate processing system {SYSTEM FOR DETECTING ERROR OF SUBSTRATE PROCESSING SYSTEM AND METHOD FOR DETECTING ERROR OF SUBSTRATE PROCESSING SYSTEM}

The present invention relates to a failure detection system for a substrate processing system and a failure detection method for a substrate processing system.

The photolithography process is performed by a substrate processing system. In this process, as the circuit pattern on the substrate becomes finer, the characteristics and production yield of the device become more sensitive to temperature and humidity. For this reason, the substrate processing system consists of a substrate processing device that performs a photolithography process on a substrate and a fluid supply device that supplies fluid to the substrate processing device so that the photolithography process is performed at an appropriate temperature and humidity.

The fluid supply device includes a gas supply unit that controls the temperature and humidity of the gas supplied from the outside and supplies it to the substrate processing device. The fluid supplied from the fluid supply device is supplied from the PVC duct extending from the fluid supply device and the substrate processing device. It is supplied to the substrate processing equipment through piping combined with an extended bellows duct.

Piping combining PVC ducts and bellows ducts can be separated due to unforeseen accidents, etc., and in the past, by continuing to operate the substrate processing device without detecting the separation between these ducts, the fluid supply device or the substrate processing device could be damaged. There were problems where the process stopped or errors occurred. In addition, after separation between ducts occurred, there was a problem that it took a lot of time to determine the location where the ducts were separated (see Korean Patent Publication No. 10-2008-0030434).

1. Republic of Korea Patent Publication No. 10-2008-0030434 (published on April 4, 2008)

The purpose of this application is to solve the problems of the prior art described above. By detecting wind pressure information of the semiconductor process main equipment in real time through a wind pressure detection sensor, the bellows duct of the semiconductor process main equipment and the PVC duct of the temperature and humidity control device are separated in real time. The goal is to provide a fault detection system, a substrate processing system, and a fault detection method that enable detection. In addition, when there is a change in the wind pressure information detected through the wind pressure detection sensor, an alarm is output indicating that an error has occurred, and a fault detection system and substrate processing system is used to prevent the occurrence of process defects by stopping the operation of the main semiconductor processing equipment. The goal is to provide a system and fault detection method. However, the technical challenges that this embodiment aims to achieve are not limited to the technical challenges described above, and other technical challenges may exist.

As a means for achieving the above-described technical problem, a temperature control unit according to an embodiment of the present invention allows external gas to flow in and controls the temperature of the gas, and a humidity control unit to control the humidity of the gas introduced from the temperature control unit. a gas supply device including a controller and a blower that supplies the gas with the temperature and humidity adjusted to the substrate processing device; A system for detecting a failure of a substrate processing system including a substrate processing apparatus having an inlet through which the temperature and humidity-controlled gas flows from the gas supply device includes at least one wind pressure detection sensor provided in the substrate processing apparatus. A wind pressure information receiving unit that receives wind pressure information of the gas supplied to the inlet from the wind pressure information, a detection unit that detects a failure of the substrate processing system based on the received wind pressure information, and a notification that transmits failure information about the detected failure to the control unit. and a control unit that controls the substrate processing device based on the failure information.

In addition, according to another embodiment of the present invention, an external gas is introduced into the temperature control unit to control the temperature of the gas, a humidity control unit to control the humidity of the gas introduced from the temperature control unit, and the temperature and humidity are controlled. a gas supply device including a blower that supplies the gas to the substrate processing device; And a method of detecting a failure of a substrate processing system including a substrate processing device having an inlet through which the temperature and humidity-controlled gas flows from the gas supply device includes at least one wind pressure detection sensor provided in the substrate processing device. Receiving wind pressure information of the gas supplied to the inlet from, detecting a failure of the substrate processing system based on the received wind pressure information, generating failure information for the detected failure, and the failure information and controlling the substrate processing device based on.

In addition, a substrate processing system including a gas supply device according to another embodiment of the present invention and a substrate processing device that receives gas from the gas supply device and processes a substrate can be provided.

The above-described means for solving the problem are merely illustrative and should not be construed as limiting the present invention. In addition to the exemplary embodiments described above, there may be additional embodiments described in the drawings and detailed description of the invention.

According to one of the means for solving the problems of the present invention described above, the present application is intended to solve the problems of the prior art described above. By detecting wind pressure information of the semiconductor process main equipment in real time through a wind pressure detection sensor, the semiconductor process main equipment It is possible to provide a fault detection system, a substrate processing system, and a fault detection method that can detect the separation of the bellows duct and the PVC duct of the temperature and humidity control device in real time. In addition, when there is a change in the wind pressure information detected through the wind pressure detection sensor, an alarm is output indicating that an error has occurred, and a fault detection system and substrate processing system is used to prevent the occurrence of process defects by stopping the operation of the main semiconductor processing equipment. Systems and fault detection methods can be provided.

The effects of the present invention are not limited to the effects mentioned above, and other effects not mentioned will be clearly understood by those skilled in the art from the description below.

1 is a diagram illustrating a substrate processing system according to an embodiment of the present invention.
Figure 2 is a perspective view of a gas supply device according to an embodiment of the present invention.
Figure 3 is a front view of a gas supply device according to an embodiment of the present invention.
Figure 4 is a configuration diagram of a failure detection system according to an embodiment of the present invention.
Figure 5 is a diagram illustrating a substrate processing system and a failure detection system according to an embodiment of the present invention.
Figure 6 is a flowchart of a method for detecting a failure in a failure detection system according to an embodiment of the present invention.

Below, with reference to the attached drawings, embodiments of the present invention will be described in detail so that those skilled in the art can easily implement the present invention. However, the present invention may be implemented in many different forms and is not limited to the embodiments described herein. In order to clearly explain the present invention in the drawings, parts that are not related to the description are omitted, and similar parts are given similar reference numerals throughout the specification.

Throughout the specification, when a part is said to be "connected" to another part, this includes not only the case where it is "directly connected," but also the case where it is "electrically connected" with another element in between. . In addition, when a part is said to "include" a certain component, this does not mean excluding other components unless specifically stated to the contrary, but may further include other components, and one or more other features. It should be understood that it does not exclude in advance the presence or addition of numbers, steps, operations, components, parts, or combinations thereof.

In this specification, 'part' includes a unit realized by hardware, a unit realized by software, and a unit realized using both. Additionally, one unit may be realized using two or more pieces of hardware, and two or more units may be realized using one piece of hardware.

In this specification, some of the operations or functions described as being performed by a terminal or device may instead be performed on a server connected to the terminal or device. Likewise, some of the operations or functions described as being performed by the server may also be performed on a terminal or device connected to the server.

Hereinafter, an embodiment of the present invention will be described in detail with reference to the attached drawings.

1 is a diagram illustrating a substrate processing system according to an embodiment of the present invention. Referring to FIG. 1, a substrate processing system 1 to which an embodiment of the present invention is applied includes a main equipment 100 that performs a specific treatment on a substrate, and a sub equipment that supplies a fluid with controlled temperature and humidity to the main equipment 100. It may include a blower 120 that supplies gas supplied from the equipment 110 and the sub-equipment 110 to the main equipment 100 through a pipe 130.

In one embodiment of the present invention, the main equipment 100 is a substrate processing device, for example, may be a device that processes a photolithography process. The main equipment 100 is provided with an inlet, and can introduce gas whose temperature and humidity are controlled from the gas supply device, which is the sub-equipment 110. However, the type of substrate processing device is not limited to this.

Additionally, the sub-equipment 110 is a fluid supply device that can supply gas with controlled temperature and humidity and liquid with controlled temperature. Referring to FIG. 1, the sub-equipment 110 may include a gas supply device 111 that supplies a gas whose temperature and humidity are controlled and a liquid supply device 112 that supplies a liquid whose temperature is adjusted. For reference, as shown in FIG. 1, the gas supply device 111 and the liquid supply device 112 may be divided into compartments, and the main equipment 100 is located above the sub equipment 110. Through this, the utilization of space can be increased.

Hereinafter, the configuration of the sub-equipment 110 according to an embodiment of the present invention will be described in detail with reference to FIG. 2. Here, the sub-equipment 110 may be a fluid supply device.

Figure 2 is a perspective view of a fluid supply device according to an embodiment of the present invention. Referring to Figures 1 and 2, the fluid supply device is a system that combines a refrigerator system and a temperature humidity controller (THC), and as shown in Figure 2, a number of devices are used to control the temperature and humidity of the gas. It may be composed of units. The fluid supply device may include a gas supply device 111 and a liquid supply device 112. The refrigeration system may include, for example, a refrigeration cycle.

The gas supply device 111 may include a temperature control unit 200, a humidity control unit 220, and a blowing unit 230.

The temperature control unit 200 may include a gas inlet 210, a refrigeration cycle (not shown), and a reheater (not shown). Here, the refrigeration cycle may refer to a cycle that performs a refrigeration function by sequentially repeating the processes of evaporation, compression, condensation, and expansion of the refrigerant to cause a change in the state of the refrigerant. When external gas flows in through the gas inlet 210, the temperature of the gas can be adjusted through a refrigeration cycle and a reheater (not shown). Here, gas may flow into the gas inlet 210 from the outside. At this time, the gas inlet 210 may be located on the left side of the temperature control unit 200, as shown in FIG. 2, but is not limited to this and may be located at least one of the lower part or the side part. .

The humidity control unit 220 includes a humidifying tank 221 and can control the humidity of the gas introduced from the temperature control unit 200.

The blower 230 may supply gas whose temperature and humidity have been adjusted supplied from the humidity control unit 220 to the substrate processing apparatus. For example, the blower 230 may include a fan and a motor, and may include a blower that uses the motor to drive the fan to form an airflow. Here, the airflow may be an airflow that flows into the gas inlet 210 and is discharged through the vent 120.

The control unit (not shown) can control the temperature control unit 200, the humidity control unit 220, and the blower 230.

In the gas supply device 111, a humidity control unit 220 may be located on the side of the temperature control unit 200, and a blowing unit 230 may be located on the side of the humidity control unit 220.

The liquid supply device 112 is located on the side of the blower 230 and can supply liquid.

Additionally, the fluid supply device may further include a pipe 130 extending upward.

Figure 3 is a front view of a fluid supply device according to an embodiment of the present invention. Referring to FIGS. 1 to 3, in the gas supply device 111, gas introduced from the outside moves upward along the arrow.

At this time, the gas introduced through the gas inlet 210 is cooled or heated through the temperature control unit 200 to adjust its temperature. And, as described above, the temperature-controlled gas passes through the upper part of the humidifying tank 221 of the humidity control unit 220 and flows into the blowing unit 230 with the humidity adjusted. The gas whose temperature and humidity have been adjusted may be discharged to the substrate processing device through the blower 120 as the blower 230 operates.

As such, the gas supply device 111 and the liquid supply device 112 may each further include a plurality of units for fluid supply in addition to the units described above, and the description of each unit is largely related to the core of the present invention. Since this is not possible, we will omit it for convenience.

Figure 4 is a diagram showing the configuration of a failure detection system according to an embodiment of the present invention. Figure 5 is a diagram illustrating a substrate processing system and a failure detection system according to an embodiment of the present invention.

Referring to Figures 4 and 5, the failure detection system 300 includes a wind pressure information receiver 310, a detection unit 320, a notification unit 330, and a control unit 340, and a gas supply device 400 and a substrate. It may operate in conjunction with a substrate processing system including the processing device 430.

The gas supply device 400 includes a temperature control unit (not shown) that allows external gas to flow in and controls the temperature of the gas, and a humidity control unit (not shown) that controls the humidity of the gas flowing in from the temperature control unit (not shown). and a blower 410 that supplies gas with controlled temperature and humidity to the substrate processing device 430. At this time, the gas supply device 400 may be located below the substrate processing device 430.

The blower 410 includes a first blower 411 and a second blower 412, and the blower 410 may extend toward the substrate processing device 430 located at the top.

The substrate processing apparatus 430 may be provided with an inlet 440 through which gas whose temperature and humidity are adjusted from the gas supply device 400 flows. At this time, the substrate processing device 430 may be located above the gas supply device 400. The inlet 440 includes a first inlet 441 and a second inlet 442, and the inlet 440 may be connected to the extended blower 410.

Here, the first blower 411 and the first inlet 441 are connected to form the first pipe 421, and the second blower 412 and the second inlet 442 are connected to form the second pipe 421. A pipe 422 may be formed.

For example, the blower 410 may be a PVC duct, and the inlet 440 may be a bellows duct. Additionally, the first pipe 421 and the second pipe 422 may be formed by combining the PVC duct of the blower 410 and the bellows duct of the inlet 440. At this time, the bellows duct and the PVC duct may be separated due to an unexpected accident, etc., and if the substrate processing device 430 is operated while the bellows duct and the PVC duct are separated, a defect may occur in the product.

The wind pressure information receiver 310 may receive wind pressure information of the gas supplied to the inlet 440 from at least one wind pressure detection sensor 450 provided in the substrate processing apparatus 430.

Here, the at least one wind pressure detection sensor 450 includes a first wind pressure detection sensor 451 and a second wind pressure detection sensor 452, and the first wind pressure detection sensor 451 is detected through the first pipe 421. It is located in the first section 461 of the substrate processing device 430 to which gas is supplied, and the second wind pressure detection sensor 452 is located in the second section 461 of the substrate processing device 430 to which gas is supplied through the second pipe 422. It may be located in section 462. For example, the first wind pressure detection sensor 451 and the second wind pressure detection sensor 452 use a first sampling port (not shown) provided in advance to detect the supply status of various gases supplied to the substrate processing device 430. city) and a second sampling port (not shown).

The wind pressure information receiver 310 may receive first wind pressure information from the first wind pressure detection sensor 451 and receive second wind pressure information from the second wind pressure detection sensor 452.

The detection unit 320 may detect a failure of the substrate processing system 1 based on the received wind pressure information. For example, when the first wind pressure information and the second wind pressure information are received from the wind pressure information receiver 310, one of the first pipe 421 and the second pipe 422 is based on the first wind pressure information and the second wind pressure information. At least one fault can be detected. Here, the detector 320 may correspond to a digital differential pressure gauge.

The blowing unit 410 may be a PVC duct, and the inlet unit 440 may be a bellows duct. Additionally, the first pipe 421 and the second pipe 422 may be formed by combining the PVC duct of the blower 410 and the bellows duct of the inlet 440. At this time, the bellows duct and the PVC duct may be separated due to an unexpected accident, etc., and if the substrate processing device 430 is operated while the bellows duct and the PVC duct are separated, a defect may occur in the product.

At this time, the detection unit 320 determines whether the wind pressure of the aircraft is within the preset wind pressure range based on the wind pressure information, and determines that it is a failure of the substrate processing system if the wind pressure of the aircraft is not within the preset wind pressure range. You can. For example, the detector 320 determines whether the wind pressure of the gas supplied through the first pipe 421 is within the preset wind pressure range and determines whether the wind pressure of the gas supplied through the first pipe 421 is within the preset wind pressure range. If it is not within the wind pressure range, it is determined that it is a failure of the first pipe 421, and it is determined whether the wind pressure of the gas supplied through the second pipe 422 is within the preset wind pressure range, and the second pipe 422 If the wind pressure of the gas supplied through ) is not within the preset wind pressure range, it may be determined that the second pipe 422 is malfunctioning.

The notification unit 330 may transmit failure information about the detected failure to the control unit 340. At this time, if the wind pressure of the aircraft is not within the preset wind pressure range, the notification unit 330 may transmit information about a failure of the substrate processing system to the control unit 340.

The notification unit 330 sends fault information to the control unit ( 340). Here, the failure information may include the type of failure, location where the failure occurred, and time of occurrence of the failure. For example, the failure information may include at least one of failure information of the first pipe 421 and failure information of the second pipe 422. Here, the failure information of the first pipe 421 and the failure information of the second pipe 422 are obtained by separating the PVC duct of the blower 410 and the bellows duct of the inlet 440 from the gas supply device 400. This may be information indicating that gas is not normally supplied to the processing device 430.

Additionally, the notification unit 330 may transmit failure information to the control unit (not shown) of the gas supply device 400. In this case, the control unit (not shown) of the gas supply device 400 may stop the supply of gas to the substrate processing device 430 based on the failure information. In contrast, the notification unit 330 may be linked to a leak sensor (not shown) of the gas supply device 400. In this case, the leak sensor (not shown) may receive failure information from the notification unit 330 and stop the supply of gas to the substrate processing apparatus 430 based on the failure information. When the failure information includes failure information of the first pipe 421, a control unit (not shown) or a leak sensor (not shown) may stop the supply of gas provided through the first pipe 421. Additionally, when the failure information includes failure information of the second pipe 422, the control unit (not shown) or the leak sensor (not shown) may stop the supply of gas provided through the second pipe 422. . In addition, when the failure information includes the failure information of the first pipe 421 and the failure information of the second pipe 422, the control unit (not shown) or the leak sensor (not shown) detects the failure information through the first pipe 421. The supply of gas provided and the supply of gas provided through the second pipe 422 can be stopped.

The control unit 340 may control the substrate processing device 430 based on failure information. For example, the control unit 340 may stop substrate processing performed in the substrate processing system 1 based on failure information.

For example, when the failure information includes failure information of the first pipe 421, the control unit 340 may stop substrate processing performed in the first section 461. Additionally, when the failure information includes failure information of the second pipe 422, the control unit 340 may stop substrate processing performed in the second section 462. In addition, when the failure information includes the failure information of the first pipe 421 and the failure information of the second pipe 422, the control unit 340 controls the substrate processing performed in the first section 461 and the second section ( All substrate processing performed in step 462) can be stopped.

Figure 6 is a flowchart of a method for detecting a failure in a failure detection system according to an embodiment of the present invention.

Referring to FIG. 6, the method for detecting a failure includes receiving wind pressure information of gas supplied to the inlet from at least one wind pressure detection sensor provided in the substrate processing apparatus (S610), and processing the substrate based on the received wind pressure information. It may include detecting a system failure (S620), generating failure information about the detected failure (S630), and controlling the substrate processing device based on the failure information (S640).

First, the at least one wind pressure sensor may include a first wind pressure sensor and a second wind pressure sensor. At this time, the first wind pressure detection sensor is located in the first section of the substrate processing device to which gas is supplied through the first pipe and measures the wind pressure, and the first wind pressure detection sensor is located in the first section of the substrate processing device to which gas is supplied through the second pipe. Located in the second section of the device, wind pressure can be measured.

In the step (S610) of receiving wind pressure information of the gas supplied to the inlet from at least one wind pressure detection sensor provided in the substrate processing apparatus, first wind pressure information data is received from the first wind pressure detection sensor, and the second wind pressure detection sensor Second wind pressure information data may be received from.

The step of detecting a failure of the substrate processing system based on the wind pressure information (S620) determines whether the wind pressure of the aircraft is within the preset wind pressure range based on the wind pressure information, and if the wind pressure of the aircraft is not included in the wind pressure range. It can be judged as a failure of the substrate processing system. For example, the detector may detect a failure in at least one of the first pipe and the second pipe based on the first wind pressure information and the second wind pressure information. At this time, the detector determines whether the wind pressure of the gas supplied through the first pipe is within the preset wind pressure range, and if the wind pressure of the gas supplied through the first pipe is not included in the wind pressure range, the detector detects whether the wind pressure of the gas supplied through the first pipe is within the wind pressure range. It is judged to be a failure, and it is determined whether the wind pressure of the gas supplied through the second pipe is within the preset wind pressure range. If the wind pressure of the gas supplied through the second pipe is not within the wind pressure range, the wind pressure of the gas supplied through the second pipe is not included in the wind pressure range. It may include the step of determining a disability.

In the step of generating failure information about a failure (S630), if the wind pressure of the aircraft is not included in the wind pressure range, failure information of the substrate processing system may be generated. At this time, in the step of generating fault information (S630), if at least one of the wind pressure of the gas supplied through the first pipe and the wind pressure of the gas supplied through the second pipe is not included in the wind pressure range, the substrate processing system It may include generating failure information. Here, the failure information may include at least one of failure information of the first pipe and failure information of the second pipe.

The step of controlling the substrate processing apparatus based on the failure information (S640) may stop substrate processing performed in the substrate processing system based on the failure information.

In the above description, steps S610 to S640 may be further divided into additional steps or combined into fewer steps, depending on the implementation of the present invention. Additionally, some steps may be omitted or the order between steps may be changed as needed.

One embodiment of the present invention may also be implemented in the form of a recording medium containing instructions executable by a computer, such as program modules executed by a computer. Computer-readable media can be any available media that can be accessed by a computer and includes both volatile and non-volatile media, removable and non-removable media. Additionally, computer-readable media may include both computer storage media and communication media. Computer storage media includes both volatile and non-volatile, removable and non-removable media implemented in any method or technology for storage of information such as computer-readable instructions, data structures, program modules or other data. Communication media typically includes computer readable instructions, data structures, program modules, or other data in a modulated data signal such as a carrier wave, or other transmission mechanism, and includes any information delivery medium.

The description of the present invention described above is for illustrative purposes, and those skilled in the art will understand that the present invention can be easily modified into other specific forms without changing the technical idea or essential features of the present invention. will be. Therefore, the embodiments described above should be understood in all respects as illustrative and not restrictive. For example, each component described as unitary may be implemented in a distributed manner, and similarly, components described as distributed may also be implemented in a combined form.

The scope of the present invention is indicated by the claims described below rather than the detailed description above, and all changes or modified forms derived from the meaning and scope of the claims and their equivalent concepts should be construed as being included in the scope of the present invention. do.

100: Main equipment
110: Sub equipment
111: gas supply device
112: liquid supply device
120: Discharge structure
130: Piping
200: Temperature control unit
210: Gas inlet
220: Humidity control unit
221: Humidifying tank
230: blowing unit
300: Fault detection system
310: Wind pressure information receiver
320: detection unit
330: Notification unit
340: Control unit
400: Gas supply device
410: blowing unit
411: first blowing unit
412: Second blowing unit
420: Plumbing
421: 1st pipe
422: Second pipe
430: Substrate processing device
440: inlet
441: first inlet
442: second inlet
450: Wind pressure detection sensor
451: First wind pressure detection sensor
452: Second wind pressure detection sensor
461: Section 1
462: Section 2

Claims (19)

A temperature control unit that controls the temperature of the gas by allowing external gas to flow in, a humidity control unit that controls the humidity of the gas flowing in from the temperature control unit, and a blower that supplies the gas with the adjusted temperature and humidity to the substrate processing device. a gas supply device having a unit; In a system for detecting a failure of a substrate processing system, including a substrate processing device having an inlet through which the temperature and humidity-controlled gas flows from the gas supply device,
a wind pressure information receiver that receives wind pressure information of gas supplied to the inlet from at least one wind pressure detection sensor provided in the substrate processing apparatus;
a detection unit that detects a failure of the substrate processing system based on the received wind pressure information;
a notification unit that transmits failure information about the detected failure to a control unit; and
A control unit that controls the substrate processing device based on the failure information,
The substrate processing device is located above the gas supply device,
The blower is a PVC duct extending toward the substrate processing device,
The inflow part is connected to the blowing part as a bellows duct,
The fault information is that the bellows duct and the PVC duct are separated,
The at least one wind pressure sensor is located at the bottom of a section in the substrate processing apparatus where substrate processing is performed and is connected to the bellows duct,
A failure detection system wherein the control unit stops supplying gas to the substrate processing apparatus based on the failure information.
delete According to claim 1,
The blowing unit includes a first blowing unit and a second blowing unit, and the inlet unit includes a first inlet unit and a second inlet unit,
The first blower and the first inlet are connected to form a first pipe, and the second blower and the second inlet are connected to form a second pipe.
According to claim 1,
The detection unit determines whether the wind pressure of the aircraft is within a preset wind pressure range based on the wind pressure information, and if the wind pressure of the aircraft is not within the wind pressure range, determines a failure of the substrate processing system,
The notification unit transmits failure information of the substrate processing system to the control unit when the wind pressure of the aircraft is not within the wind pressure range.
According to claim 4,
The control unit stops substrate processing performed in the substrate processing system based on the failure information.
According to claim 3,
The at least one wind pressure sensor includes a first wind pressure sensor and a second wind pressure sensor,
The first wind pressure sensor is located in the first section of the substrate processing device to which gas is supplied through the first pipe, and the second wind pressure sensor is located in the first section of the substrate processing device to which gas is supplied through the second pipe. A fault detection system, located in the second section.
According to claim 6,
The wind pressure information receiver receives first wind pressure information from the first wind pressure detection sensor and receives second wind pressure information from the second wind pressure detection sensor,
The detection unit detects a failure in at least one of the first pipe and the second pipe based on the first wind pressure information and the second wind pressure information.
According to claim 7,
The detector determines whether the wind pressure of the gas supplied through the first pipe is within the preset wind pressure range, and if the wind pressure of the gas supplied through the first pipe is not included in the wind pressure range, the first If it is determined to be a piping failure, and the wind pressure of the gas supplied through the second pipe is determined to be within the preset wind pressure range, and the wind pressure of the gas supplied through the second pipe is not included in the wind pressure range, It is judged to be a failure of the second pipe,
When at least one of the wind pressure of the gas supplied through the first pipe and the wind pressure of the gas supplied through the second pipe is not included in the wind pressure range, the notification unit sends failure information of the substrate processing system to the control unit. A fault detection system that transmits
According to claim 8,
The failure information includes at least one of failure information of the first pipe and failure information of the second pipe.
A temperature control unit that controls the temperature of the gas by allowing external gas to flow in, a humidity control unit that controls the humidity of the gas flowing in from the temperature control unit, and a blower that supplies the gas with the adjusted temperature and humidity to the substrate processing device. a gas supply device having a unit; In a method of detecting a failure of a substrate processing system including a substrate processing device having an inlet through which the temperature and humidity-controlled gas flows from the gas supply device,
Receiving wind pressure information of gas supplied to the inlet from at least one wind pressure sensor provided in the substrate processing apparatus;
detecting a failure of the substrate processing system based on the received wind pressure information;
generating fault information for the detected fault; and
Controlling the substrate processing device based on the failure information,
The substrate processing device is located above the gas supply device,
The blower is a PVC duct extending toward the substrate processing device,
The inflow part is connected to the blowing part as a bellows duct,
The fault information is that the bellows duct and the PVC duct are separated,
The at least one wind pressure sensor is located at the bottom of a section in the substrate processing apparatus where substrate processing is performed and is connected to the bellows duct,
Wherein controlling the substrate processing apparatus includes stopping supply of gas to the substrate processing apparatus based on the failure information.
According to claim 10,
The step of detecting a failure of the substrate processing system includes determining whether the wind pressure of the aircraft is within a preset wind pressure range based on the wind pressure information, and processing the substrate when the wind pressure of the aircraft is not included in the wind pressure range. judged to be a system failure,
The generating the fault information includes generating fault information of the substrate processing system when the wind pressure of the gas is not included in the wind pressure range.
According to claim 11,
The step of controlling the substrate processing apparatus is to stop substrate processing performed in the substrate processing system based on the failure information.
delete According to claim 10,
The blower includes a first blower and a second blower, and the inlet includes a first inlet and a second inlet,
The first blower and the first inlet are connected to form a first pipe, and the second blower and the second inlet are connected to form a second pipe.
According to claim 14,
The at least one wind pressure sensor includes a first wind pressure sensor and a second wind pressure sensor,
The first wind pressure sensor is located in the first section of the substrate processing device to which gas is supplied through the first pipe, and the second wind pressure sensor is located in the first section of the substrate processing device to which gas is supplied through the second pipe. Fault detection method, located in the second section.
According to claim 15,
Receiving wind pressure information of the aircraft includes receiving first wind pressure information from the first wind pressure detection sensor and receiving second wind pressure information from the second wind pressure detection sensor,
Detecting a failure of the substrate processing system includes detecting a failure of at least one of the first pipe and the second pipe based on the first wind pressure information and the second wind pressure information. Detection method.
According to claim 16,
The step of detecting a failure of the substrate processing system includes determining whether the wind pressure of the gas supplied through the first pipe is within a preset wind pressure range and determining whether the wind pressure of the gas supplied through the first pipe is within the wind pressure range. If it is not included, it is determined that it is a failure of the first pipe, and it is determined whether the wind pressure of the gas supplied through the second pipe is within the preset wind pressure range, and the wind pressure of the gas supplied through the second pipe is determined to be within the preset wind pressure range. If it is not within the wind pressure range, determining that the second pipe is faulty,
The step of generating the detected failure information is performed when at least one of the wind pressure of the gas supplied through the first pipe and the wind pressure of the gas supplied through the second pipe is not included in the wind pressure range, the substrate processing system A fault detection method comprising generating fault information.
According to claim 17,
The failure information includes at least one of failure information of the first pipe and failure information of the second pipe.
A substrate processing system comprising the gas supply device according to claim 1 and a substrate processing device that receives gas from the gas supply device and processes a substrate.

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