KR102599035B1 - Explosion-proof block heater - Google Patents

Abstract

The present invention includes a plurality of piping assembly layers; A plurality of heater layers alternately stacked with piping assembly layers; And a top heater layer and a bottom heater layer are laminated on the top of the piping assembly layer, respectively, and an upper plate and a lower plate are laminated on the highest heater layer and the lowest heater layer, respectively, and the piping assembly layer is a layer through which gas is transported. piping layer; Disclosed is an explosion-proof block heater including an upper heating plate and a lower heating plate that are closely coupled to the piping layer at the top and bottom of the piping layer. According to the present invention, heating efficiency can be increased and the risk of pipe explosion can be reduced through the heating plate and heating element in contact with the front of the pipe.

Description

Explosion-proof block heater {EXPLOSION-PROOF BLOCK HEATER}

The present invention relates to an explosion-proof block heater, and more specifically, to a block heater that can heat the entire pipe and has explosion-proof performance.

A jacket heater is an electric heater used to heat the gas line of equipment that supplies high-purity gas supplied during semiconductor manufacturing. The jacket heater includes a heating element that heats the gas pipe and an insulating material surrounding the heating element and the gas pipe.

However, the jacket heater attached to the gas pipe has an unsuitable structure for the explosion-proof function that protects the gas pipe from explosion causes.

As a technology related to the present invention, a fluid heating device for semiconductor manufacturing disclosed in the Korean Patent Publication discloses a device including a ceramic heating element, a fluid heating element, and an insulating material. This related technology has a configuration having a spiral-shaped ceramic heating element and a spiral-shaped fluid heating tube, and the present invention has a configuration having explosion-proof performance in the form of a flat plate, so the configuration and effects of the two inventions are distinct from each other.

Republic of Korea Patent No. 10-1134570 (announced on April 13, 2012)

One problem that the present invention seeks to solve is to provide a block heater for gas pipes with high thermal efficiency.

One problem that the present invention seeks to solve is to provide a block heater for gas pipes with a low risk of explosion.

One problem that the present invention seeks to solve is to provide a block heater equipped with a heating plate having a groove in which a temperature sensitive part can be accommodated.

The problem to be solved by the present invention is not limited to the problems mentioned above, and other problems not mentioned will be clearly understood by those skilled in the art from the description below.

In order to achieve the above object, according to an embodiment according to the technical idea of the present invention, a plurality of piping assembly layers; A plurality of heater layers alternately stacked with piping assembly layers; And a top heater layer and a bottom heater layer are laminated on the top of the piping assembly layer, and an upper plate and a lower plate are laminated on the top heater layer and the lowest heater layer, and the piping assembly layer is a gas transporter. piping layer; An explosion-proof block heater is disclosed, which is configured to include an upper heating plate and a lower heating plate that are in close contact with the piping layer at the top and bottom of the piping layer.

In addition, the explosion-proof block heater has a contact surface in contact with the piping layer and an outer surface opposing the contact surface on the upper and lower heating plates, the contact surface is formed with a concave groove corresponding to the shape of the piping, and the outer surface is formed to be flat. It can be configured.

In addition, the explosion-proof block heater includes a plurality of straight pipes in the piping layer; And it may be configured to include a plurality of elbow guards connecting the pipes to each other.

Additionally, in the explosion-proof block heater, a plurality of elbow guards may be formed at one end and the other end of the square-shaped upper heating plate and the lower heating plate so that they are exposed and not covered by the upper heating plate and the lower heating plate.

In addition, in the explosion-proof block heater, the heater layer includes a heating element; A plurality of packaging layers surrounding the heating element; And it may be configured to include a cable electrically connected to the heating element.

In addition, the explosion-proof block heater may be configured to have grooves formed on the outer surfaces of the upper and lower heating plates and the inner surfaces of the upper and lower plates, which are in contact with the heater layer, to accommodate a temperature sensitive part that senses the temperature of the piping assembly.

In addition, the explosion-proof block heater may be configured to have cable holes formed on the outer surfaces of the upper and lower heating plates and the inner surfaces of the upper and lower plates, which are in contact with the heater layer, through which cables included in the heater layer are drawn out.

In addition, the explosion-proof block heater further includes a cover coupled to one side of the stacked assembly in which the piping assembly, the heater layer, and the upper and lower plates are stacked, and the cover may be configured to have a draw-out hole formed at a position corresponding to the cable hole. there is.

Additionally, in the explosion-proof block heater, the piping assembly, upper plate, lower plate, and cover may be configured to be coupled to each other through a combination body.

Specific details of other embodiments are included in “Specific Details for Carrying Out the Invention” and the attached “Drawings.”

The advantages and/or features of the present invention and methods for achieving them will become clear by referring to the various embodiments described in detail below along with the accompanying drawings.

However, the present invention is not limited to the configuration of each embodiment disclosed below, but may also be implemented in various different forms. However, each embodiment disclosed in this specification ensures that the disclosure of the present invention is complete, and the present invention It is provided to fully inform those skilled in the art of the present invention, and it should be noted that the present invention is only defined by the scope of each claim.

According to the present invention, heat generation efficiency can be increased through the heating plate and heating element in contact with the front of the pipe.

Additionally, the risk of explosion can be reduced by protecting the piping through the upper plate, lower plate, and cover.

In addition, it is easy to connect the heating element and cable, and the temperature sensitive part can be stored inside the heating plate.

Figure 1 is an exemplary diagram of an explosion-proof block heater according to a first embodiment of the present invention.
Figure 2 is an exploded view of an explosion-proof block heater according to the first embodiment of the present invention.
Figure 3 is a left side view of an explosion-proof block heater according to the first embodiment of the present invention.
Figure 4 is a front view of an explosion-proof block heater according to the first embodiment of the present invention.
Figure 5 is an exploded view of the heating layer according to the first embodiment of the present invention.
Figure 6 is a plan view of an explosion-proof block heater according to the first embodiment of the present invention.
Figure 7 is an exemplary diagram of piping included in the explosion-proof block heater according to the first embodiment of the present invention.
Figure 8 is an exemplary diagram of a heating plate included in the explosion-proof block heater according to the first embodiment of the present invention.
Figure 9 is an exploded view of an explosion-proof block heater according to a second embodiment of the present invention.
Figure 10 is a block diagram of an explosion-proof block heater according to a second embodiment of the present invention.

Before explaining the present invention in detail, the terms or words used in this specification should not be construed as unconditionally limited to their ordinary or dictionary meanings, and the inventor of the present invention should not use the terms or words in order to explain his invention in the best way. It should be noted that the concepts of various terms can be appropriately defined and used, and furthermore, that these terms and words should be interpreted with meanings and concepts consistent with the technical idea of the present invention.

That is, the terms used in this specification are only used to describe preferred embodiments of the present invention, and are not used with the intention of specifically limiting the content of the present invention, and these terms refer to various possibilities of the present invention. It is important to note that this is a term defined with consideration in mind.

In addition, it should be noted that in this specification, singular expressions may include plural expressions, unless the context clearly indicates a different meaning, and may include singular meanings even if similarly expressed in plural. .

Throughout this specification, when a component is described as “including” another component, it does not exclude any other component, but includes any other component, unless specifically stated to the contrary. It could mean that you can do it.

Furthermore, if a component is described as being "installed within or connected to" another component, it means that this component may be installed in direct connection or contact with the other component and may be installed in contact with the other component and It may be installed at a certain distance, and in the case where it is installed at a certain distance, there may be a third component or means for fixing or connecting the component to another component. It should be noted that the description of the components or means of 3 may be omitted.

On the other hand, when a component is described as being “directly connected” or “directly connected” to another component, it should be understood that no third component or means is present.

Likewise, other expressions that describe the relationship between components, such as "between" and "immediately between", or "neighboring" and "directly neighboring", have the same meaning. It should be interpreted as

In addition, in this specification, terms such as "one side", "other side", "one side", "the other side", "first", "second", etc., if used, refer to one component. It is used to clearly distinguish it from other components, and it should be noted that the meaning of the component is not limited by this term.

In addition, in this specification, terms related to position such as "top", "bottom", "left", "right", etc., if used, should be understood as indicating the relative position of the corresponding component in the corresponding drawing. Unless the absolute location is specified, these location-related terms should not be understood as referring to the absolute location.

In addition, in this specification, when specifying the reference numeral for each component in each drawing, the same component has the same reference number even if the component is shown in different drawings, that is, the same reference is made throughout the specification. The symbols indicate the same component.

In the drawings attached to this specification, the size, position, connection relationship, etc. of each component constituting the present invention is exaggerated, reduced, or omitted in order to convey the idea of the present invention sufficiently clearly or for convenience of explanation. It may be described, and therefore its proportions or scale may not be exact.

In addition, hereinafter, in describing the present invention, detailed descriptions of configurations that are judged to unnecessarily obscure the gist of the present invention, for example, known technologies including prior art, may be omitted.

Hereinafter, embodiments of the present invention will be described in detail with reference to the related drawings.

Figure 1 is an exemplary diagram of an explosion-proof block heater according to a first embodiment of the present invention.

Referring to FIG. 1, the explosion-proof block heater 100 includes a plurality of piping assembly layers 110, a heater layer 150 (not shown) stacked between the piping assembly layers 110, and an exterior of the explosion-proof block heater 100. It may be configured to include an upper plate 160, a lower plate 170, and a cover 180 that surround the. The exterior of the explosion-proof block heater 100 may be surrounded by a cover 180, an upper plate 160, and a lower plate 170.

Figure 2 is an exploded view of an explosion-proof block heater according to the first embodiment of the present invention.

Referring to FIG. 2, a plurality of pipe assembly layers 110 and heater layers may be alternately stacked. And the highest heater layer 151 and the lowest heater layer 152 may be stacked, respectively. The heater layer 151 has the function of heating the pipe assembly layer 110. That is, the heater layer 151 has the function of heating the pipe assembly layer 110 that is in contact with one or both sides.

An upper plate 160 and a lower plate 170 may be provided on the highest and lowest heater layers 151 and 152, respectively. The upper plate 160 and lower plate 170 have an explosion-proof housing function.

The piping assembly layer 110 includes a piping layer 120 through which gas is transported, an upper heating plate 130 and a lower heating plate 140 that are in close contact with the piping layer 120 at the top and bottom of the piping layer 120. It can be configured to include:

Figure 3 is a left side view of an explosion-proof block heater according to the first embodiment of the present invention.

Figure 4 is a front view of an explosion-proof block heater according to the first embodiment of the present invention.

Referring to Figures 3 and 4, the heater layer 150 is on the outer surfaces of the upper heating plate 130 and the lower heating plate 140 and the inner surfaces of the upper plate 160 and lower plate 170, which are in contact with the heater layer 150. It may be configured to form cable holes 136 and 146 through which the cable (not shown) included in is pulled out.

Figure 5 is an exploded view of the heater layer 150 according to the first embodiment of the present invention.

Referring to FIG. 5, the heater layer 150 may be configured to include a heating element 153, a plurality of packaging layers 154 surrounding the heating element 153, and a cable 155 electrically connected to the heating element 153. there is.

The heater layer 150 may be composed of a so-called silicon rubber heater. Silicone rubber heaters are manufactured by pressing the upper and lower two packaging layers (154), for example, silicon sheets, and are thin, light in weight, strong in strength, good in flexibility, and conduct heat quickly and effectively to the heated object. Heat can be heated evenly. Silicone rubber heaters have strong resistance even when exposed to the outdoors, in humid places, at low temperatures, and under harmful influences such as chemicals. They also withstand repeated mechanical shocks, vibrations, and bending, and do not tear or loosen, making them highly durable. It has reliability and long service life.

It may be configured to include a cover 180 coupled to one side of the stacked assembly in which the piping assembly layer 110, the heater layer 150, and the upper plate 160 and lower plate 170 are stacked. The piping assembly layer 110, the upper plate 160, the lower plate 170, and the cover 180 may be configured to be coupled to each other through a coupling body (not shown), for example, a screw.

Referring again to FIG. 2, the cover 180 may be configured to have a draw-out hole 183 formed at a position corresponding to the cable hole 136 and 146. That is, the lead-out hole 183 may be formed to communicate with a plurality of cable holes 136 and 146.

On the outer surfaces of the upper heating plate 130 and lower heating plate 140 and the inner surfaces of the upper plate 160 and lower plate 170, which are in contact with the heater layer 150, a temperature sensitive unit detects the temperature of the piping assembly layer 110. A groove 137 in which (not shown) is accommodated may be formed. The groove 137 is composed of an upper groove 138 and a lower groove 139. The upper groove 138 may be formed on the lower heating plate 140, and the lower groove 139 may be formed on the upper heating plate 130. there is. A temperature sensitive part may be provided in a space where the upper groove 138 and the lower groove 139 are overlapped. That is, the temperature sensitive unit can be sealed and stored inside by the upper heating plate 130 and the lower heating plate 140.

The temperature sensitive unit 190 may include a temperature sensor 191 and a bimetal switch 192.

PT100, a platinum thermal resistor used as the temperature sensor 191, can be used to measure the temperature of the heating element 153. In addition, the bimetal switch 192 serves to prevent fire and thermal runaway as the temperature continues to rise when there is a problem in controlling the temperature of the heating element 153.

Figure 6 is a plan view of an explosion-proof block heater according to the first embodiment of the present invention.

Referring to FIG. 6, the explosion-proof block heater 100 may be implemented in a rectangular parallelepiped shape with width (X1, X2), length (Y1, Y2), and height.

Exposed parts 129a and 129b of the piping layer 120 may be disposed at one end and the other end in the longitudinal direction of the explosion-proof block heater 100. The exposed parts 129a and 129b may include an elbow 126. The exposed parts 129a and 129b may include an inlet 127 and an outlet 128 of the pipe. The inlet 127 and outlet 128 of the pipe may be combined with an extending pipe.

The elbow 126 serves as an elbow connecting the pipes 123 to each other in the section of the curved piping layer 120 and has a function of preventing gas leakage between the pipes 123 connected to each other.

Figure 7 is an exemplary diagram of piping included in the explosion-proof block heater according to the first embodiment of the present invention.

Referring to FIG. 7 , the piping layer 120 may be configured to include a plurality of straight pipes 123 and a plurality of elbows 126 connecting the pipes 123 to each other. The elbow 126 may be made of an aluminum alloy material and has an explosion-proof function for the pipe by preventing gas leakage.

Referring again to FIG. 6, the plurality of elbows 126 are covered by the upper heating plate 130 and the lower heating plate 140 at one end and the other end of the square-shaped upper heating plate 130 and lower heating plate 140. It can be formed to be exposed without being exposed.

Figure 8 is an exemplary diagram of a heating plate included in the explosion-proof block heater according to the first embodiment of the present invention.

Referring to FIG. 8, the upper heating plate 130 and the lower heating plate 140 have contact surfaces 131 and 141 in contact with the piping layer 120 and outer surfaces 132 and 142 opposite the contact surfaces 131 and 141. The contact surfaces 131 and 141 may have concave valleys 134 and 144 corresponding to the shape of the piping layer 120, and the outer surfaces 132 and 142 may be formed to be flat. The upper heating plate 130 and the lower heating plate 140 can be coupled in close contact with the piping layer 120 through the concave groove, and thus thermal efficiency can be increased. The outer surfaces 132 and 142 of the upper heating plate 130 and the lower heating plate 140 in contact with the heater layer 150 are formed flat and can be in close contact with the heater layer 150.

A groove 135 in which the heater layer 150 is provided is formed on the outer surfaces of the lower heating plate 140, upper plate 160, and lower plate 170, including the outer surface 132 of the upper heating plate 130 shown in FIG. 8. It can be. Since the heater layer 150 is disposed inside the upper groove 135 and the lower groove 135, it is connected to the outside and the outside by the upper heating plate 130, lower heating plate 140, upper plate 160, and lower plate 170. It can be arranged to be 100% closed.

A rubber material is placed between the upper heating plate 130 and the lower heating plate 140 on which the heater layer 150 is laminated, between the upper heating plate 130 and the upper plate 160, and between the lower heating plate 140 and the lower plate 170. The airtightness can be improved by finishing using sealing (156). Additionally, the cable hole 136 can be finished with an insulating compound to improve airtightness.

The piping layer 120, which constitutes the explosion-proof block heater 100, may be made of stainless steel, for example, SUS material. The upper heating plate 130, lower heating plate 140, upper plate 160, lower plate 170, and cover 180 may be made of aluminum alloy material.

The explosion-proof block heater 100 according to the first embodiment of the present invention has a heater layer 150 implemented as a highly durable silicon rubber heater and an upper heating plate 130 and a lower heating plate 140 made of an aluminum alloy material with high thermal conductivity. It is a structure that heats. The upper heating plate 130 and the lower heating plate 140 are structured to heat the pipe 123 while being in close contact with the front surface of the piping layer 120.

The explosion-proof block heater 100 according to the first embodiment of the present invention is surrounded on the outside by an upper plate 160, a lower plate 170, and a cover 180, and has an exposed part ( In 129a, 129b), the elbow 126 has an explosion-proof function with respect to the pipe 123. On the left side where the cover 180 is not formed, the upper heating plate 130, lower heating plate 140, upper plate 160, and lower plate 170 made of aluminum alloy are closely coupled to each other to form an explosion-proof wall. Therefore, the entire exterior of the explosion-proof block heater 100 has an explosion-proof structure surrounded by aluminum alloy.

Figure 9 is an exploded view of an explosion-proof block heater according to a second embodiment of the present invention.

Figure 10 is a block diagram of an explosion-proof block heater according to a second embodiment of the present invention.

Referring to Figures 9 and 10, the temperature sensitive part 190 installed in the explosion-proof block heater 100 is depicted. The temperature sensitive part 190 may be configured to include a temperature sensor 191, a bimetal switch 192, and a bracket 193.

The temperature sensor 191 may be provided between the upper heating plate 130 and the lower heating plate 140. The temperature sensor 191 has the function of measuring the temperature of the heating plates 130 and 140. The temperature sensor 191 measures the temperature value of the heating plates 130 and 140, and the control unit 101 controls the ON/OFF operation of the heating element 153 based on the temperature value measured through the temperature sensor 191. You can.

Compared to the first embodiment depicted in FIG. 4, the temperature sensitive part 190 can be sealed and stored inside by the upper mouth heating 130, the lower heating plate 140, and the cover 180.

The bimetal switch 192 is coupled to the groove 137 formed between the upper heating plate 130 and the lower heating plate 140, and additionally, the bracket 193 has the function of fixing the bimetal switch 192. The bimetal switch 192 has the function of preventing thermal runaway of the heater layer 150. A temperature sensor 191, for example, PT100, a platinum heat resistor, can be used to control the temperature of the heating element 153, and the bimetal switch 192 is used to control the temperature of the heating element 153 when there is a problem in controlling the temperature. By dropping the contact point and cutting off the current supply, the temperature continues to rise, preventing fire and thermal runaway. That is, the bimetal switch 192 has the function of automatically turning off the electric circuit of the heater layer 150 when the temperature of the heater layer 150 reaches the critical temperature.

The explosion-proof block heater 100 according to the first and second embodiments of the present invention seals the heater layer 150 from the piping layer 120 using a rubber seal 156 and an insulating compound treatment, thereby sealing the heater layer 150 from the piping layer 120. Explosion-proof performance can be improved by preventing contact between electrical sparks that may be generated in (150) and leaking gas.

In this way, according to an embodiment of the present invention, heat generation efficiency can be increased through the heating plate and heating element in contact with the front of the pipe.

Additionally, the risk of explosion can be reduced by protecting the piping through the upper plate, lower plate, rubber seal, and cover.

In addition, it is easy to connect the heating element and cable, and the temperature sensitive part can be stored inside the heating plate.

Above, various preferred embodiments of the present invention have been described by giving some examples, but the description of the various embodiments described in the "Detailed Contents for Carrying out the Invention" section is merely illustrative and the present invention Those skilled in the art will understand from the above description that the present invention can be implemented with various modifications or equivalent implementations of the present invention.

In addition, since the present invention can be implemented in various other forms, the present invention is not limited by the above description, and the above description is intended to make the disclosure of the present invention complete and is commonly used in the technical field to which the present invention pertains. It is provided only to fully inform those with knowledge of the scope of the present invention, and it should be noted that the present invention is only defined by each claim in the claims.

100: Explosion-proof block heater
110: Piping assembly layer
120: Piping layer
130: Upper heating plate
140: Lower heating plate
150: heater layer
160: top plate
170: lower plate

Claims (9)

A plurality of piping assembly layers;
a plurality of heater layers alternately stacked with the piping assembly layer; and
The highest heater layer is stacked on top of the piping assembly layer and the lowest heater layer is stacked on the bottom, respectively,
It includes an upper plate and a lower plate respectively laminated on the highest heater layer and the lowest heater layer,
The piping assembly layer is,
A piping layer through which gas is transported;
Configured to include an upper heating plate and a lower heating plate that are in close contact with the piping layer at the top and bottom of the piping layer,
Explosion proof block heater. The method according to claim 1, wherein the upper heating plate and the lower heating plate,
A contact surface in contact with the piping layer and an outer surface opposing the contact surface are formed,
The contact surface is formed with a concave groove corresponding to the shape of the piping layer,
The outer surface is configured to be flat,
Explosion proof block heater. The method of claim 2, wherein the piping layer is,
a plurality of straight pipes; and
Configured to include a plurality of elbow guards connecting the pipes to each other,
Explosion proof block heater. The method of claim 3, wherein the plurality of elbow guards,
At one end and the other end of the square-shaped upper heating plate and the lower heating plate,
Formed to be exposed and not covered by the upper heating plate and the lower heating plate,
Explosion proof block heater. The method of claim 4, wherein the heater layer,
heating element;
A plurality of packaging layers surrounding the heating element; and
Configured to include a cable electrically connected to the heating element,
Explosion proof block heater. In claim 5,
On the outer surfaces of the upper heating plate and the lower heating plate and the inner surfaces of the upper plate and the lower plate, which are in contact with the heater layer,
A groove is formed in which a temperature sensitive part that senses the temperature of the piping assembly is accommodated,
Explosion proof block heater. In claim 5,
On the outer surfaces of the upper heating plate and the lower heating plate and the inner surfaces of the upper plate and the lower plate, which are in contact with the heater layer,
Configured to form a cable hole through which the cable included in the heater layer is pulled out,
Explosion proof block heater. In claim 7,
Further comprising a cover coupled to one side of the stacked assembly in which the piping assembly, the heater layer, and the upper and lower plates are stacked,
The cover is configured to have a draw-out hole formed at a position corresponding to the cable hole,
Explosion proof block heater. In claim 8,
The piping assembly, the upper plate, the lower plate, and the cover,
Consisting of being bonded to each other through a conjugate,
Explosion proof block heater.

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