KR102586129B9 - 가스 분해를 위한 구조를 구비한 플라즈마 반응기 - Google Patents

가스 분해를 위한 구조를 구비한 플라즈마 반응기

Info

Publication number
KR102586129B9
KR102586129B9 KR1020160081397A KR20160081397A KR102586129B9 KR 102586129 B9 KR102586129 B9 KR 102586129B9 KR 1020160081397 A KR1020160081397 A KR 1020160081397A KR 20160081397 A KR20160081397 A KR 20160081397A KR 102586129 B9 KR102586129 B9 KR 102586129B9
Authority
KR
South Korea
Prior art keywords
reacator
decompositon
plasma
gas
plasma reacator
Prior art date
Application number
KR1020160081397A
Other languages
English (en)
Other versions
KR20180002209A (ko
KR102586129B1 (ko
Inventor
최대규
최장규
이국환
Original Assignee
주식회사 뉴파워 프라즈마
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by 주식회사 뉴파워 프라즈마 filed Critical 주식회사 뉴파워 프라즈마
Priority to KR1020160081397A priority Critical patent/KR102586129B1/ko
Publication of KR20180002209A publication Critical patent/KR20180002209A/ko
Application granted granted Critical
Publication of KR102586129B1 publication Critical patent/KR102586129B1/ko
Publication of KR102586129B9 publication Critical patent/KR102586129B9/ko

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/32—Gas-filled discharge tubes
    • H01J37/32431—Constructional details of the reactor
    • H01J37/3244—Gas supply means
    • H01J37/32449—Gas control, e.g. control of the gas flow
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/32—Gas-filled discharge tubes
    • H01J37/32009—Arrangements for generation of plasma specially adapted for examination or treatment of objects, e.g. plasma sources
    • H01J37/32082—Radio frequency generated discharge
    • H01J37/32174—Circuits specially adapted for controlling the RF discharge
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/32—Gas-filled discharge tubes
    • H01J37/32431—Constructional details of the reactor
    • H01J37/32458—Vessel
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/32—Gas-filled discharge tubes
    • H01J37/32431—Constructional details of the reactor
    • H01J37/32532—Electrodes
    • H—ELECTRICITY
    • H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05H—PLASMA TECHNIQUE; PRODUCTION OF ACCELERATED ELECTRICALLY-CHARGED PARTICLES OR OF NEUTRONS; PRODUCTION OR ACCELERATION OF NEUTRAL MOLECULAR OR ATOMIC BEAMS
    • H05H1/00—Generating plasma; Handling plasma
    • H05H1/24—Generating plasma
    • H05H1/46—Generating plasma using applied electromagnetic fields, e.g. high frequency or microwave energy

Landscapes

  • Physics & Mathematics (AREA)
  • Engineering & Computer Science (AREA)
  • Plasma & Fusion (AREA)
  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Electromagnetism (AREA)
  • Spectroscopy & Molecular Physics (AREA)
  • Physical Or Chemical Processes And Apparatus (AREA)
  • Plasma Technology (AREA)
KR1020160081397A 2016-06-29 2016-06-29 가스 분해를 위한 구조를 구비한 플라즈마 반응기 KR102586129B1 (ko)

Priority Applications (1)

Application Number Priority Date Filing Date Title
KR1020160081397A KR102586129B1 (ko) 2016-06-29 2016-06-29 가스 분해를 위한 구조를 구비한 플라즈마 반응기

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
KR1020160081397A KR102586129B1 (ko) 2016-06-29 2016-06-29 가스 분해를 위한 구조를 구비한 플라즈마 반응기

Publications (3)

Publication Number Publication Date
KR20180002209A KR20180002209A (ko) 2018-01-08
KR102586129B1 KR102586129B1 (ko) 2023-10-10
KR102586129B9 true KR102586129B9 (ko) 2024-01-16

Family

ID=61003508

Family Applications (1)

Application Number Title Priority Date Filing Date
KR1020160081397A KR102586129B1 (ko) 2016-06-29 2016-06-29 가스 분해를 위한 구조를 구비한 플라즈마 반응기

Country Status (1)

Country Link
KR (1) KR102586129B1 (ko)

Family Cites Families (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP5257917B2 (ja) * 2006-04-24 2013-08-07 株式会社ニューパワープラズマ 多重マグネチックコアが結合された誘導結合プラズマ反応器
KR101170926B1 (ko) * 2010-09-01 2012-08-03 (주) 엔피홀딩스 플라즈마 방전을 위한 점화 장치가 장착된 플라즈마 반응기
KR101670296B1 (ko) * 2014-10-28 2016-10-28 최도현 파티클 저감 구조를 갖는 플라즈마 챔버

Also Published As

Publication number Publication date
KR20180002209A (ko) 2018-01-08
KR102586129B1 (ko) 2023-10-10

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Legal Events

Date Code Title Description
E902 Notification of reason for refusal
E701 Decision to grant or registration of patent right
G170 Re-publication after modification of scope of protection [patent]