GB201616285D0 - Plasma abatement - Google Patents

Plasma abatement

Info

Publication number
GB201616285D0
GB201616285D0 GBGB1616285.1A GB201616285A GB201616285D0 GB 201616285 D0 GB201616285 D0 GB 201616285D0 GB 201616285 A GB201616285 A GB 201616285A GB 201616285 D0 GB201616285 D0 GB 201616285D0
Authority
GB
United Kingdom
Prior art keywords
plasma abatement
abatement
plasma
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Ceased
Application number
GBGB1616285.1A
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Edwards Korea Ltd
Original Assignee
Edwards Korea Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Edwards Korea Ltd filed Critical Edwards Korea Ltd
Priority to GBGB1616285.1A priority Critical patent/GB201616285D0/en
Publication of GB201616285D0 publication Critical patent/GB201616285D0/en
Ceased legal-status Critical Current

Links

GBGB1616285.1A 2016-09-26 2016-09-26 Plasma abatement Ceased GB201616285D0 (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
GBGB1616285.1A GB201616285D0 (en) 2016-09-26 2016-09-26 Plasma abatement

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
GBGB1616285.1A GB201616285D0 (en) 2016-09-26 2016-09-26 Plasma abatement

Publications (1)

Publication Number Publication Date
GB201616285D0 true GB201616285D0 (en) 2016-11-09

Family

ID=57539755

Family Applications (1)

Application Number Title Priority Date Filing Date
GBGB1616285.1A Ceased GB201616285D0 (en) 2016-09-26 2016-09-26 Plasma abatement

Country Status (1)

Country Link
GB (1) GB201616285D0 (en)

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Legal Events

Date Code Title Description
AT Applications terminated before publication under section 16(1)