GB201616286D0 - Plasma abatement - Google Patents

Plasma abatement

Info

Publication number
GB201616286D0
GB201616286D0 GBGB1616286.9A GB201616286A GB201616286D0 GB 201616286 D0 GB201616286 D0 GB 201616286D0 GB 201616286 A GB201616286 A GB 201616286A GB 201616286 D0 GB201616286 D0 GB 201616286D0
Authority
GB
United Kingdom
Prior art keywords
plasma abatement
abatement
plasma
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Withdrawn
Application number
GBGB1616286.9A
Other versions
GB2554406A (en
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Edwards Korea Ltd
Original Assignee
Edwards Korea Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Edwards Korea Ltd filed Critical Edwards Korea Ltd
Priority to GB1616286.9A priority Critical patent/GB2554406A/en
Publication of GB201616286D0 publication Critical patent/GB201616286D0/en
Priority to TW106213595U priority patent/TWM561683U/en
Priority to KR2020170004992U priority patent/KR20180000936U/en
Priority to CN201721240822.2U priority patent/CN207868157U/en
Publication of GB2554406A publication Critical patent/GB2554406A/en
Withdrawn legal-status Critical Current

Links

Classifications

    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01D—SEPARATION
    • B01D53/00—Separation of gases or vapours; Recovering vapours of volatile solvents from gases; Chemical or biological purification of waste gases, e.g. engine exhaust gases, smoke, fumes, flue gases, aerosols
    • B01D53/32—Separation of gases or vapours; Recovering vapours of volatile solvents from gases; Chemical or biological purification of waste gases, e.g. engine exhaust gases, smoke, fumes, flue gases, aerosols by electrical effects other than those provided for in group B01D61/00
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F23—COMBUSTION APPARATUS; COMBUSTION PROCESSES
    • F23G—CREMATION FURNACES; CONSUMING WASTE PRODUCTS BY COMBUSTION
    • F23G7/00—Incinerators or other apparatus for consuming industrial waste, e.g. chemicals
    • F23G7/06—Incinerators or other apparatus for consuming industrial waste, e.g. chemicals of waste gases or noxious gases, e.g. exhaust gases
    • F23G7/061—Incinerators or other apparatus for consuming industrial waste, e.g. chemicals of waste gases or noxious gases, e.g. exhaust gases with supplementary heating
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F23—COMBUSTION APPARATUS; COMBUSTION PROCESSES
    • F23G—CREMATION FURNACES; CONSUMING WASTE PRODUCTS BY COMBUSTION
    • F23G7/00—Incinerators or other apparatus for consuming industrial waste, e.g. chemicals
    • F23G7/06—Incinerators or other apparatus for consuming industrial waste, e.g. chemicals of waste gases or noxious gases, e.g. exhaust gases
    • F23G7/061—Incinerators or other apparatus for consuming industrial waste, e.g. chemicals of waste gases or noxious gases, e.g. exhaust gases with supplementary heating
    • F23G7/063—Incinerators or other apparatus for consuming industrial waste, e.g. chemicals of waste gases or noxious gases, e.g. exhaust gases with supplementary heating electric heating
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F23—COMBUSTION APPARATUS; COMBUSTION PROCESSES
    • F23G—CREMATION FURNACES; CONSUMING WASTE PRODUCTS BY COMBUSTION
    • F23G7/00—Incinerators or other apparatus for consuming industrial waste, e.g. chemicals
    • F23G7/06—Incinerators or other apparatus for consuming industrial waste, e.g. chemicals of waste gases or noxious gases, e.g. exhaust gases
    • F23G7/061—Incinerators or other apparatus for consuming industrial waste, e.g. chemicals of waste gases or noxious gases, e.g. exhaust gases with supplementary heating
    • F23G7/065—Incinerators or other apparatus for consuming industrial waste, e.g. chemicals of waste gases or noxious gases, e.g. exhaust gases with supplementary heating using gaseous or liquid fuel
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F23—COMBUSTION APPARATUS; COMBUSTION PROCESSES
    • F23M—CASINGS, LININGS, WALLS OR DOORS SPECIALLY ADAPTED FOR COMBUSTION CHAMBERS, e.g. FIREBRIDGES; DEVICES FOR DEFLECTING AIR, FLAMES OR COMBUSTION PRODUCTS IN COMBUSTION CHAMBERS; SAFETY ARRANGEMENTS SPECIALLY ADAPTED FOR COMBUSTION APPARATUS; DETAILS OF COMBUSTION CHAMBERS, NOT OTHERWISE PROVIDED FOR
    • F23M5/00—Casings; Linings; Walls
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/32—Gas-filled discharge tubes
    • H01J37/32431—Constructional details of the reactor
    • H01J37/32798—Further details of plasma apparatus not provided for in groups H01J37/3244 - H01J37/32788; special provisions for cleaning or maintenance of the apparatus
    • H01J37/32816—Pressure
    • H01J37/32834—Exhausting
    • H01J37/32844—Treating effluent gases
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01D—SEPARATION
    • B01D2259/00—Type of treatment
    • B01D2259/80—Employing electric, magnetic, electromagnetic or wave energy, or particle radiation
    • B01D2259/818—Employing electrical discharges or the generation of a plasma
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F23—COMBUSTION APPARATUS; COMBUSTION PROCESSES
    • F23M—CASINGS, LININGS, WALLS OR DOORS SPECIALLY ADAPTED FOR COMBUSTION CHAMBERS, e.g. FIREBRIDGES; DEVICES FOR DEFLECTING AIR, FLAMES OR COMBUSTION PRODUCTS IN COMBUSTION CHAMBERS; SAFETY ARRANGEMENTS SPECIALLY ADAPTED FOR COMBUSTION APPARATUS; DETAILS OF COMBUSTION CHAMBERS, NOT OTHERWISE PROVIDED FOR
    • F23M2900/00—Special features of, or arrangements for combustion chambers
    • F23M2900/05001—Preventing corrosion by using special lining materials or other techniques
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F23—COMBUSTION APPARATUS; COMBUSTION PROCESSES
    • F23M—CASINGS, LININGS, WALLS OR DOORS SPECIALLY ADAPTED FOR COMBUSTION CHAMBERS, e.g. FIREBRIDGES; DEVICES FOR DEFLECTING AIR, FLAMES OR COMBUSTION PRODUCTS IN COMBUSTION CHAMBERS; SAFETY ARRANGEMENTS SPECIALLY ADAPTED FOR COMBUSTION APPARATUS; DETAILS OF COMBUSTION CHAMBERS, NOT OTHERWISE PROVIDED FOR
    • F23M2900/00—Special features of, or arrangements for combustion chambers
    • F23M2900/05004—Special materials for walls or lining
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y02—TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
    • Y02C—CAPTURE, STORAGE, SEQUESTRATION OR DISPOSAL OF GREENHOUSE GASES [GHG]
    • Y02C20/00—Capture or disposal of greenhouse gases
    • Y02C20/30—Capture or disposal of greenhouse gases of perfluorocarbons [PFC], hydrofluorocarbons [HFC] or sulfur hexafluoride [SF6]

Landscapes

  • Engineering & Computer Science (AREA)
  • Environmental & Geological Engineering (AREA)
  • Chemical & Material Sciences (AREA)
  • Mechanical Engineering (AREA)
  • General Engineering & Computer Science (AREA)
  • Analytical Chemistry (AREA)
  • Combustion & Propulsion (AREA)
  • General Chemical & Material Sciences (AREA)
  • Oil, Petroleum & Natural Gas (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Physics & Mathematics (AREA)
  • Plasma & Fusion (AREA)
  • Plasma Technology (AREA)
  • Physical Or Chemical Processes And Apparatus (AREA)
GB1616286.9A 2016-09-26 2016-09-26 Plasma abatement Withdrawn GB2554406A (en)

Priority Applications (4)

Application Number Priority Date Filing Date Title
GB1616286.9A GB2554406A (en) 2016-09-26 2016-09-26 Plasma abatement
TW106213595U TWM561683U (en) 2016-09-26 2017-09-13 Plasma torch abatement apparatus for treatment of an effluent stream from a processing tool with a plasma stream
KR2020170004992U KR20180000936U (en) 2016-09-26 2017-09-22 Plasma abatement
CN201721240822.2U CN207868157U (en) 2016-09-26 2017-09-26 Plasma torch cancellation element

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
GB1616286.9A GB2554406A (en) 2016-09-26 2016-09-26 Plasma abatement

Publications (2)

Publication Number Publication Date
GB201616286D0 true GB201616286D0 (en) 2016-11-09
GB2554406A GB2554406A (en) 2018-04-04

Family

ID=57539666

Family Applications (1)

Application Number Title Priority Date Filing Date
GB1616286.9A Withdrawn GB2554406A (en) 2016-09-26 2016-09-26 Plasma abatement

Country Status (4)

Country Link
KR (1) KR20180000936U (en)
CN (1) CN207868157U (en)
GB (1) GB2554406A (en)
TW (1) TWM561683U (en)

Family Cites Families (9)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
SE452255B (en) * 1984-10-23 1987-11-23 Skf Steel Eng Ab SET FOR PURIFICATION OF EXHAUST GAS FROM TOXIC CHLORINE COMPOUNDS AND / OR WEIGHTER THE FLASK, AND DEVICE FOR IMPLEMENTATION OF THE SET
JPH06287095A (en) * 1993-04-02 1994-10-11 Toshiba Corp Heat-resistant ceramic and its production
JP4172938B2 (en) * 2002-02-14 2008-10-29 昭和電工株式会社 Exhaust gas treatment method and treatment apparatus
CN100413564C (en) * 2002-05-08 2008-08-27 刘健安 Hazardous waste treatment method and apparatus
CN1644992A (en) * 2005-01-24 2005-07-27 真一(上海)集成电路设备有限公司 Combustion chamber structure of waste gas treating system
KR100822048B1 (en) * 2006-06-07 2008-04-15 주식회사 글로벌스탠다드테크놀로지 Apparatus using plasma torch to treat the hazadous waste gas
KR101373196B1 (en) * 2011-08-30 2014-03-18 주식회사 아이지티 Waste gas treatment apparatus using plasma
KR101475663B1 (en) * 2013-02-21 2014-12-23 주식회사 지앤비에스엔지니어링 Combustible gas scrubber
CN204063061U (en) * 2014-08-29 2014-12-31 河南中易环保科技有限公司 A kind of plasma furnace for the treatment of domestic waste incineration flue gas

Also Published As

Publication number Publication date
KR20180000936U (en) 2018-04-04
TWM561683U (en) 2018-06-11
GB2554406A (en) 2018-04-04
CN207868157U (en) 2018-09-14

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Legal Events

Date Code Title Description
WAP Application withdrawn, taken to be withdrawn or refused ** after publication under section 16(1)