KR102574579B9 - Beam characteristic evaluation device using standard sample and beam characteristic evaluation method using the same - Google Patents
Beam characteristic evaluation device using standard sample and beam characteristic evaluation method using the sameInfo
- Publication number
- KR102574579B9 KR102574579B9 KR1020230034415A KR20230034415A KR102574579B9 KR 102574579 B9 KR102574579 B9 KR 102574579B9 KR 1020230034415 A KR1020230034415 A KR 1020230034415A KR 20230034415 A KR20230034415 A KR 20230034415A KR 102574579 B9 KR102574579 B9 KR 102574579B9
- Authority
- KR
- South Korea
- Prior art keywords
- characteristic evaluation
- beam characteristic
- same
- standard sample
- evaluation method
- Prior art date
Links
- 238000011156 evaluation Methods 0.000 title 2
Applications Claiming Priority (2)
Application Number | Priority Date | Filing Date | Title |
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KR20220076493 | 2022-06-23 | ||
KR1020220076493 | 2022-06-23 |
Publications (2)
Publication Number | Publication Date |
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KR102574579B1 KR102574579B1 (en) | 2023-09-06 |
KR102574579B9 true KR102574579B9 (en) | 2024-04-08 |
Family
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Family Applications (3)
Application Number | Title | Priority Date | Filing Date |
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KR1020220137787A KR102518783B1 (en) | 2022-06-23 | 2022-10-24 | Beam controller capable of adaptive deformation, a test apparatus for semiconductor device using the same, and a test method for semiconductor device using the same |
KR1020220137783A KR102547617B1 (en) | 2022-06-23 | 2022-10-24 | Semiconductor device test apparatus that provides an accelerated environment and method for testing semiconductor devices in an accelerated environment using the same |
KR1020230034415A KR102574579B1 (en) | 2022-06-23 | 2023-03-16 | Beam characteristic evaluation device using standard sample and beam characteristic evaluation method using the same |
Family Applications Before (2)
Application Number | Title | Priority Date | Filing Date |
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KR1020220137787A KR102518783B1 (en) | 2022-06-23 | 2022-10-24 | Beam controller capable of adaptive deformation, a test apparatus for semiconductor device using the same, and a test method for semiconductor device using the same |
KR1020220137783A KR102547617B1 (en) | 2022-06-23 | 2022-10-24 | Semiconductor device test apparatus that provides an accelerated environment and method for testing semiconductor devices in an accelerated environment using the same |
Country Status (1)
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KR (3) | KR102518783B1 (en) |
Families Citing this family (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
KR102591746B1 (en) * | 2023-07-05 | 2023-10-20 | 큐알티 주식회사 | Semiconductor test device and semiconductor test method using the same |
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JP2004125633A (en) * | 2002-10-03 | 2004-04-22 | Renesas Technology Corp | Cosmic rays neutron software error resistance evaluation method for semiconductor device |
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-
2022
- 2022-10-24 KR KR1020220137787A patent/KR102518783B1/en active IP Right Grant
- 2022-10-24 KR KR1020220137783A patent/KR102547617B1/en active IP Right Grant
-
2023
- 2023-03-16 KR KR1020230034415A patent/KR102574579B1/en active IP Right Grant
Also Published As
Publication number | Publication date |
---|---|
KR102547617B1 (en) | 2023-06-26 |
KR102518783B1 (en) | 2023-04-06 |
KR102574579B1 (en) | 2023-09-06 |
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