KR102574579B9 - Beam characteristic evaluation device using standard sample and beam characteristic evaluation method using the same - Google Patents

Beam characteristic evaluation device using standard sample and beam characteristic evaluation method using the same

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Publication number
KR102574579B9
KR102574579B9 KR1020230034415A KR20230034415A KR102574579B9 KR 102574579 B9 KR102574579 B9 KR 102574579B9 KR 1020230034415 A KR1020230034415 A KR 1020230034415A KR 20230034415 A KR20230034415 A KR 20230034415A KR 102574579 B9 KR102574579 B9 KR 102574579B9
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KR
South Korea
Prior art keywords
characteristic evaluation
beam characteristic
same
standard sample
evaluation method
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Application number
KR1020230034415A
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Korean (ko)
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KR102574579B1 (en
Inventor
김영부
김기석
우승주
김남호
배동우
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큐알티 주식회사
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Publication of KR102574579B1 publication Critical patent/KR102574579B1/en
Publication of KR102574579B9 publication Critical patent/KR102574579B9/en

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KR1020230034415A 2022-06-23 2023-03-16 Beam characteristic evaluation device using standard sample and beam characteristic evaluation method using the same KR102574579B1 (en)

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KR20220076493 2022-06-23
KR1020220076493 2022-06-23

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KR102574579B1 KR102574579B1 (en) 2023-09-06
KR102574579B9 true KR102574579B9 (en) 2024-04-08

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KR1020220137787A KR102518783B1 (en) 2022-06-23 2022-10-24 Beam controller capable of adaptive deformation, a test apparatus for semiconductor device using the same, and a test method for semiconductor device using the same
KR1020220137783A KR102547617B1 (en) 2022-06-23 2022-10-24 Semiconductor device test apparatus that provides an accelerated environment and method for testing semiconductor devices in an accelerated environment using the same
KR1020230034415A KR102574579B1 (en) 2022-06-23 2023-03-16 Beam characteristic evaluation device using standard sample and beam characteristic evaluation method using the same

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KR1020220137787A KR102518783B1 (en) 2022-06-23 2022-10-24 Beam controller capable of adaptive deformation, a test apparatus for semiconductor device using the same, and a test method for semiconductor device using the same
KR1020220137783A KR102547617B1 (en) 2022-06-23 2022-10-24 Semiconductor device test apparatus that provides an accelerated environment and method for testing semiconductor devices in an accelerated environment using the same

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* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR102591746B1 (en) * 2023-07-05 2023-10-20 큐알티 주식회사 Semiconductor test device and semiconductor test method using the same

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Also Published As

Publication number Publication date
KR102547617B1 (en) 2023-06-26
KR102518783B1 (en) 2023-04-06
KR102574579B1 (en) 2023-09-06

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