KR102504856B1 - An apparatus for inspecting a display panel using a large probe card - Google Patents

Abstract

The present invention is to provide a probe card and a supply device for lighting a large display. For this purpose, a device for inspecting a display panel using a large probe card, according to an embodiment of the present invention, comprises: a probe card supply unit on which at least two probe cards are seated; a probe card robot for loading the at least two probe cards mounted on the probe card supply unit into a probe card buffer; the probe card buffer for loading a plurality of different probe cards according to the type of a large panel; a probe card terminal buffer in which probe cards that light and inspect the large panel are seated based on the type of the large panel; a probe card loader for moving the probe cards seated on the probe card terminal buffer to a lower part of a probe card base axis; and the probe card base axis for checking vision alignment for the probe cards.

Description

Apparatus and method for inspecting a display panel using a large probe card {AN APPARATUS FOR INSPECTING A DISPLAY PANEL USING A LARGE PROBE CARD}

The present invention relates to an apparatus and method for inspecting a display panel using a large probe card.

In general, display panels are expanding in size from medium/small to large, and accordingly, changes in production and manufacturing processes are also rapidly and complexly changing. If a defect occurs in a product that has been produced through a complicated process, all costs incurred in the preceding process will be incurred as a loss cost.

In order to prevent such loss costs, display panels are produced and managed in such a way that a lighting test is performed through a probe crd after a deposition process.

A probe card is a device that connects a semiconductor chip and test equipment to test the operation of a large display panel. In this probe card, while a plurality of probe tips mounted on the probe card contact the display panel, an electrical signal is sent to the display panel, and the display panel can be inspected through the signal fed back from the display panel and the lighting of the display panel. there is

Since such a probe card is composed of hundreds to thousands of probe tips on the order of several microns, there has been a conventional structural problem in that deformation occurs depending on the assembly state and degree of thermal expansion of the structure.

In addition, in the related art, there is a need to contact a plurality of probe tips, and as various display panels are produced, there is a supply problem in that an appropriate lighting probe card needs to be replaced to fit the display panel.

Moreover, since the replacement time of the probe card greatly affects the production efficiency of the display panel, there is a problem in that the replacement of the probe card should be performed quickly but not in an actual process.

Accordingly, there is a need to develop technologies for configuring, aligning, and supplying a probe card for inspecting a large display panel (ie, smooth replacement of a probe card according to a model change of a display panel).

In addition, there is a need to provide vision alignment for a plurality of probe cards by aligning a plurality of probe cards in multiple directions, and a need to facilitate appropriate replacement of a probe card according to a model change of a display panel is raised. .

Accordingly, the present invention provides a probe card and a supply device for lighting a large display.

In addition, the present invention provides an apparatus and method for inspecting a probe card that solves problems of assembly tolerance and thermal expansion by mounting a plurality of probe cards on a shaft of a probe card base.

In addition, the present invention is a probe card inspection apparatus and method in which a plurality of probe cards can be vision-aligned by using a probe card UVW stage capable of aligning a plurality of probe cards in multiple directions, and can make precise contact within a few micrometers. is to provide

In addition, the present invention provides an apparatus and method for rapidly supplying a probe card using a probe card robot.

The objects of the present invention are not limited to the above-mentioned objects, and other objects and advantages of the present invention not mentioned above can be understood by the following description and will be more clearly understood by the embodiments of the present invention. It will also be readily apparent that the objects and advantages of the present invention may be realized by means of the instrumentalities and combinations indicated in the claims.

To achieve this object, the present invention provides an apparatus and method for inspecting a display panel using a large probe card.

To this end, an apparatus for inspecting a display panel using a large probe card according to an embodiment of the present invention includes a probe card supply unit in which at least two probe cards are seated; a probe card robot loading the at least two probe cards seated in the probe card supply unit into a probe card buffer; the probe card buffer for loading a plurality of different probe cards according to the type of the large panel; a probe card terminal buffer in which probe cards lighting and inspecting the large panel are seated based on the type of the large panel; a probe card loader for moving the probe cards seated on the probe card terminal buffer to a lower portion of a shaft of a probe card base; and the probe card base axis for inspecting the vision alignment of the probe cards.

In addition, a method of inspecting a display panel using a large probe card according to an embodiment of the present invention includes a step of loading, by a probe card robot, at least two probe cards seated in a probe card supply unit into a probe card buffer; placing, by the probe card robot, a plurality of different probe cards loaded in the probe card buffer according to the type of the large panel into a probe card terminal buffer that illuminates and inspects the large panel; moving, by a probe card loader, the probe cards seated on the probe card terminal buffer to a lower portion of a shaft of a probe card base; and examining the vision alignment of the probe card base axis with respect to the probe cards.

In the present invention, when at least the probe cards are seated in the probe card supply unit, the probe card robot loads the probe cards seated in the probe card supply unit into the probe card buffer, thereby rapidly supplying probe cards corresponding to the type of large display panel. .

In addition, according to the present invention, the vision alignment of the probe cards can be inspected at the same time by simultaneously moving the probe cards corresponding to the type of large panel to the probe card terminal buffer and then moving them to the lower part of the probe card base axis through the probe card loader. can

In addition, the present invention can solve problems of positional deviation, assembly tolerance, and thermal expansion of probe tips by mounting a plurality of probe cards on the axis of the probe card base.

In addition, according to the present invention, vision alignment of a plurality of probe cards can be inspected by mounting a plurality of probe card UVW stages below the axis of the probe card base.

In addition, the present invention can supply the probe card more quickly by arranging the probe card robot in the apparatus for inspecting the display panel using the large probe card.

In addition to the effects described above, specific effects of the present invention will be described together while explaining specific details for carrying out the present invention.

1 is a perspective view of an apparatus for inspecting a display panel using a large probe card according to an embodiment of the present invention.
2 is a side view of an apparatus for inspecting a display panel using a large probe card according to an embodiment of the present invention.
3 is an exemplary diagram illustrating a state in which a probe card robot of an apparatus for inspecting a display panel using a large probe card according to an embodiment of the present invention picks up a probe card seated in a probe card supply unit.
4 is an exemplary diagram illustrating a state in which a probe card robot moves a probe card to a probe card terminal buffer according to an embodiment of the present invention.
5 is an exemplary diagram illustrating a state in which a probe card loader moves a probe card placed as a terminal buffer to a lower portion of a shaft of a probe card base according to an embodiment of the present invention.
6 is an exemplary diagram illustrating a state in which vision alignment of probe cards is inspected using a probe card base axis and a UVW stage according to an embodiment of the present invention.
7 is a perspective view of a shaft of a probe card base according to an embodiment of the present invention.
8 is a flowchart illustrating an operation process of an apparatus for inspecting a probe card according to an embodiment of the present invention.

The above objects, features and advantages will be described later in detail with reference to the accompanying drawings, and accordingly, those skilled in the art to which the present invention belongs will be able to easily implement the technical spirit of the present invention. In describing the present invention, if it is determined that the detailed description of the known technology related to the present invention may unnecessarily obscure the subject matter of the present invention, the detailed description will be omitted. Hereinafter, preferred embodiments according to the present invention will be described in detail with reference to the accompanying drawings. In the drawings, the same reference numerals are used to indicate the same or similar components.

Although first, second, etc. are used to describe various components, these components are not limited by these terms, of course. These terms are only used to distinguish one component from another component, and unless otherwise stated, the first component may be the second component, of course.

Hereinafter, the arrangement of an arbitrary element on the "upper (or lower)" or "upper (or lower)" of a component means that an arbitrary element is placed in contact with the upper (or lower) surface of the component. In addition, it may mean that other components may be interposed between the component and any component disposed on (or under) the component.

In addition, when a component is described as "connected", "coupled" or "connected" to another component, the components may be directly connected or connected to each other, but other components may be "interposed" between each component. ", or each component may be "connected", "coupled" or "connected" through other components.

Throughout the specification, unless otherwise stated, each element may be singular or plural.

Singular expressions used herein include plural expressions unless the context clearly dictates otherwise. In this application, terms such as "consisting of" or "comprising" should not be construed as necessarily including all of the various components or steps described in the specification, and some of the components or some of the steps It should be construed that it may not be included, or may further include additional components or steps.

Throughout the specification, when "A and/or B" is used, this means A, B or A and B unless otherwise specified, and when used as "C to D", this means unless otherwise specified Unless otherwise specified, means greater than or equal to C and less than or equal to D

Hereinafter, an apparatus and method for inspecting a display panel using a large probe card according to some embodiments of the present invention will be described.

1 is a perspective view of an apparatus for inspecting a display panel using a large probe card according to an embodiment of the present invention. 2 is a side view of an apparatus for inspecting a display panel using a large probe card according to an embodiment of the present invention.

1 and 2, an apparatus 100 for inspecting a display panel using a large probe card according to an embodiment of the present invention includes probe card supply units 121 and 122 in which probe cards 111 and 112 are seated. ), the probe card robot 150 that moves the probe cards 111 and 112 seated in the probe card supply units 121 and 122, and the probe cards 111 and 112 moved by the probe card robot 150 are loaded. probe card buffers 131 and 132, probe card terminal buffers 141 and 142 in which the probe cards loaded in the probe card buffers 131 and 132 are moved and seated by the probe card robot 150, and the probe card A probe card loader (220 in FIG. 2) for moving the probe cards seated in the terminal buffers 141 and 142 to the lower part of the probe card base shaft 170, and inspecting the vision alignment of the probe card coupled to the lower part. A probe card base shaft 170 may be included.

The configuration of the device 100 for inspecting a probe card shown in FIG. 1 is according to an embodiment, and components of the device 100 for inspecting a probe card are not limited to the embodiment shown in FIG. 1 . Some components may be added, changed or deleted as needed.

According to an embodiment, the probe card is a device that connects a semiconductor chip and test equipment to test the operation of a large display panel. In the probe card, a plurality of probe tips mounted on the probe card contact the display panel to transmit electrical signals to the display panel, and the display panel can be inspected through signals fed back from the display panel.

According to an embodiment, the probe card supply unit may include a first probe card supply unit 111 in which the first probe card is seated and a second probe card supply unit 112 in which the second probe card is installed. For example, the probe card supply unit may include at least one probe card supply unit in which at least one probe card is seated.

For example, the operator 101 may place the probe card on the probe card supply unit.

According to an embodiment, when the probe cards 111 and 112 are seated in the probe card supply units 121 and 122, a reader (not shown) is placed on the probe cards 111 and 112 seated in the probe card supply units 121 and 122. You can check the identifier for each. For example, the reader (not shown) (for example, a camera) may be disposed at an appropriate location to check the identifiers of the probe cards 111 and 112 seated in the probe card supply units 121 and 122 .

According to an embodiment, when the identifiers of the probe cards 111 and 112 seated in the probe card supply units 121 and 122 are identified, the probe card robot 150 moves the probe cards seated in the probe card supply units 121 and 122. (111, 112) can be loaded into the probe card buffers (131, 132), respectively. For example, the probe card robot 150 may be a multi-axis robot.

For example, the probe card robot 150 may load the first probe card 111 seated in the first probe card supply unit 121 into the first probe card buffer 131 . Also, the probe card robot 150 may load the second probe card 112 seated in the second probe card supply unit 122 into the second probe card buffer 132 .

For example, the probe card robot 150 may load the first probe card 111 on a corresponding layer of the first probe card buffer 131 corresponding to the identifier of the first probe card 111 . In addition, the probe card robot 150 may load the second probe card 112 on a corresponding layer of the second probe card buffer 132 corresponding to the identifier of the second probe card 112 .

For example, each of the first probe card buffer 131 and the second probe card buffer 132 is formed of a plurality of layers, and one probe card may be loaded in each layer. A probe card corresponding to a model of a large display panel may be loaded in each layer of the probe card buffers 131 and 132 .

For example, the probe card robot 150 loads the first probe card 111 seated in the first probe card supply unit 121 into the first probe card buffer 131, and the second probe card supply unit 122 In order to load the second probe card 112 seated on the second probe card buffer 132, it may move in one direction (eg, ±y-axis direction).

After that, when the large display panel is supplied, the probe card inspecting device 100 checks the model of the supplied large display panel, and the corresponding probe card is loaded in the probe card buffers 131 and 132 on which layer. can determine whether there is

According to an embodiment, the probe card robot 150 transfers at least one probe card loaded on a corresponding layer of the probe card buffers 131 and 132 to the probe card terminal buffer 141, based on the confirmation of the model of the display panel. 142) can be settled.

For example, a plurality of probe cards may be seated in the probe card terminal buffers 141 and 142 .

For example, based on the confirmation of the model of the display panel, the probe card robot 150 removes the first probe card 111 loaded on the corresponding layer (eg, the fourth layer) of the first probe card buffer 131. 1 can be moved to the card terminal buffer 141. In addition, the probe card robot 150 transfers the second probe card 112 loaded on the corresponding layer (eg, the fourth layer) of the second probe card buffer 132 based on the confirmation of the display panel model. to the terminal buffer 142.

For example, the probe card robot 150 may move not only two probe cards but also three or more probe cards to the positions of the card terminal buffers 141 and 142 . Also, the probe card robot 150 may include two arms to stably move the probe card.

For example, the probe card robot 150 loads the first probe card 111 loaded in the first probe card buffer 131 into the first card terminal buffer 141, and In order to load the second probe card 112 loaded on the second card terminal buffer 142, it may move in one direction (eg, ±y-axis direction). Also, the probe card robot 150 is a multi-axis driving robot, and is capable of up and down movement as well as left and right rotation.

According to an embodiment, when the first probe card 111 is located in the first card terminal buffer 141 and the second probe card 112 is located in the second card terminal buffer 142, the probe card loader 220 ) may move the probe cards 111 and 112 located in the terminal buffers 141 and 142 to the lower part of the probe card base shaft 170.

For example, the probe card loader 220 moves in one direction (eg, -x direction) on the main system 160 and simultaneously loads the probe cards 111 and 112 located in the terminal buffers 141 and 142 ( After loading, the probe cards 111 and 112 may be simultaneously moved to the lower part of the probe card base shaft 170 by moving in another direction (eg, x direction).

According to one embodiment, the base shaft 170 moves downward (eg, -Z axis direction) to automatically mount the probe cards 111 and 112 .

For example, the probe card loader 220 moves the first probe card 111 to the bottom of the first probe card UVW stage (611 in FIG. 7) disposed below the probe card base shaft 170. The probe card loader (511 in FIG. 5) and the second probe card 112 are moved to the bottom of the second probe card UVW stage (612 in FIG. 7) disposed below the probe card base shaft 170. A probe card loader (512 in FIG. 5) may be included.

For example, each probe card loader may include two arms to stably move the probe card. For example, the first probe card loader may include two arms 431 and 432 , and the second probe card loader may include two arms 421 and 422 .

According to an embodiment, two probe card UVW stages ( 611 and 612 in FIG. 7 ) may be mounted below the probe card base shaft 170 . For example, at least one probe card UVW stage may be mounted under the probe card base shaft 170 .

According to an embodiment, the probe card base shaft 170 may perform vision alignment for the two probe cards 111 and 112 through the two probe card UVW stages (611 and 612 in FIG. 7 ). In addition, the probe card base shaft 170 may test lighting by bringing the two probe cards 111 and 112 into contact with the lighting pad of the large display panel. In this way, when the probe is mounted on the base shaft 170 and the probe base is raised, a camera (not shown) installed in the device checks the position and then aligns the probe using a UVW stage.

Then, the probe cards 111 and 112 for which the vision alignment and lighting inspection of the probe cards 111 and 112 are completed are carried out in the reverse order of the above operation sequence.

In FIGS. 1 and 2, the case of two probe card supply units has been described, but this is merely an embodiment, and the present invention may include three or more probe card supply units.

In addition, although the case of two probe card buffers has been described in FIGS. 1 and 2, this is merely an embodiment, and the present invention may include three or more probe card buffers.

Hereinafter, an operation process of an apparatus for inspecting a display panel using a large probe card will be described.

3 is an exemplary diagram illustrating a state in which a probe card robot of an apparatus for inspecting a display panel using a large probe card according to an embodiment of the present invention picks up a probe card seated in a probe card supply unit. 4 is an exemplary diagram illustrating a state in which a probe card robot moves a probe card to a probe card terminal buffer according to an embodiment of the present invention. 5 is an exemplary diagram illustrating a state in which a probe card loader moves a probe card placed as a terminal buffer to a lower portion of a shaft of a probe card base according to an embodiment of the present invention. 6 is an exemplary diagram illustrating a state in which vision alignment of probe cards is inspected using a probe card base axis and a UVW stage according to an embodiment of the present invention.

Referring to FIG. 3 , the operator 101 may place the probe card on the probe card supply unit. For example, the first probe card 111 may be seated in the first probe card supply unit 121 , and the second probe card 112 may be seated in the second probe card supply unit 122 .

According to an embodiment, when the first probe card 111 is seated in the first probe card supply unit 121 and the second probe card 112 is seated in the second probe card supply unit 122, a reader (not shown) ) can identify identifiers for the first probe card 111 seated in the first probe card supply unit 121 and the second probe card 112 seated in the second probe card supply unit 122, respectively. .

For example, the reader (not shown) may be a camera or a scanner that recognizes a code (eg, barcode or QR code). Such a camera or scanner may be disposed at an appropriate location where identifiers of the probe cards 111 and 112 seated in the probe card supply units 121 and 122 can be identified.

According to an embodiment, when the identifiers of the probe cards 111 and 112 seated in the probe card supply units 121 and 122 are identified, the probe card robot 150 moves the probe cards seated in the probe card supply units 121 and 122. (111, 112) can be loaded into the probe card buffers (131, 132), respectively.

According to one embodiment, the probe card robot 150 may be a multi-axis robot. For example, the probe card robot 150 may pick up each of the probe cards 111 and 112 seated in the probe card supply units 121 and 122 and load them into the probe card buffers 131 and 132, respectively. The probe cards 111 and 112 loaded in the card buffers 131 and 132 are not only movable in one axis (eg, ±y) direction, but also rotated so that each of the probe cards 111 and 112 can be seated in the probe card terminal buffers 141 and 142. It may be formed with a plurality of joints and a plurality of axes to enable this.

In addition, the probe card robot 150 can move in the other axis direction (eg, ±z) to pick up each of the probe cards 111 and 112 loaded at different heights of the probe card buffers 131 and 132. do.

Referring to FIG. 4 , after a large display panel is supplied and the model of the display panel is identified, the apparatus 100 for inspecting the display panel using a large probe card is a probe card corresponding to the model of the display panel. In the buffers 131 and 132, it is possible to determine which layer is loaded. In addition, the apparatus 100 for inspecting the probe card transmits a control signal including information on the display panel model, layer information on which the probe card is loaded in the probe card buffers 131 and 132, etc., to the probe card. It can be delivered to the robot 150.

According to an embodiment, the probe card robot 150 may pick up a probe card corresponding to a model of the display panel from the probe card buffers 131 and 132 based on receiving the control signal. In addition, the probe card robot 150 may seat each of the probe cards picked up by rotation into the probe card terminal buffers 141 and 142 .

For example, the probe card robot 150 includes two arms 411 and 412 to move one probe card.

According to an embodiment, when probe cards (eg, two probe cards) are seated in the probe card terminal buffers 141 and 142, the probe card loader 220 moves in one direction (eg, -x). After moving to pick up the probe cards (eg, two probe cards) seated in the probe card terminal buffers 141 and 142, move to the other side (eg, +x) direction to move the probe card base shaft 170 can be moved to the bottom of

For example, the probe card loader 220 may simultaneously move two probe cards from the probe card terminal buffers 141 and 142 to the bottom of the probe card base shaft 170 . For example, the probe card loader 220 includes four arms 421, 422, 431, and 432 to pick up one probe card.

For example, the probe card loader 220 moves the first probe card 111 from the first probe card terminal buffer 141 to the probe card base shaft using the first and second probe card loader arms 421 and 422 . 170, and the second probe card 112 is moved from the second probe card terminal buffer 142 to the probe card base shaft 170 using the third and fourth probe card loader arms 431 and 432. ) can be moved simultaneously to the lower part of

For convenience of description, the probe card base shaft 170 is omitted in FIG. 5 .

According to one embodiment, the probe card loader arms 421, 422, 431, and 432 pick up the two probe cards 111 and 112 seated in the probe card terminal buffers 141 and 142, respectively, and then pick up the picked up probe cards 111 and 112. The first and second probe cards 111 and 112 may be simultaneously moved downward of the probe card base shaft 170 .

In FIG. 5, the case where the probe card loader 220 transfers two probe cards has been described, but this is merely an embodiment, and three or more probe cards may be transferred according to the present invention. For example, the probe card loader 220 may simultaneously transfer probe cards corresponding to the number of probe card UVW stages mounted on the probe card base shaft 170 .

Referring to FIG. 6 , at least one probe card UVW stage may be mounted below the probe card base shaft 170 . In addition, the probe card mounted under the UVW stages 611 and 612 is composed of hundreds to thousands of probe tips corresponding to several microns, and can contact the display panel to inspect the display panel. .

According to one embodiment, the probe card loader arms 421, 422, 431, and 432 move the first and second probe cards 111 and 112 to the lower part of the probe card base shaft 170 so that the probe cards ( 111 and 112) are installed at the same time. At both ends (eg, ±y direction) of the base shaft 170, probe Z-axis 431 capable of moving the base shaft 170 up and down (eg, ±z direction) are configured on both sides.

For example, the probe card loader arms 421 and 422 move the first probe card 111 to the bottom of the probe card base shaft 170, and then move the first probe card 111 to the bottom of the probe card base shaft 170. The probe card is lifted on the probe Z axis 431, and the card loader arms 431 and 432 move the second probe card 111 to the lower part of the probe card base shaft 170, and then the probe card base shaft 170 It can be lifted with the second probe card probe Z-axis 431 mounted on the lower part of the probe. Of course, the first probe and the second probe may be mounted individually or simultaneously.

According to an embodiment, each of the probe card UVW stages 611 and 612 may inspect vision alignment with respect to the probe cards 111 and 112 . In addition, each of the probe card UVW stages 611 and 612 may inspect the assembled state of the probe cards 111 and 112 and deformation according to the degree of thermal expansion.

For example, the first probe card UVW stage 611 checks the vision alignment for the first probe card 111, and the second probe card UVW stage 612 checks the vision alignment for the second probe card 112. Alignment can be checked.

7 is a perspective view of a probe card base shaft 170 according to an embodiment of the present invention.

Referring to FIG. 7 , the alignment of the probe cards 111 and 112 is inspected through the probe card UVW stages 611 and 612 after vision is confirmed. Thereafter, the probe cards 111 and 112 contact the pads of the display panel through alignment, and then apply electrical signals.

Since the probe card UVW stages 611 and 612 are mounted on the probe card base shaft 170, individual alignment of the probe card is possible. Although FIG. 7 shows that only two probe card UVW stages 611 and 612 are mounted, this is merely an embodiment, and the probe card base shaft 170 according to the present invention includes one or three or more probe card UVW stages. Stages may be mounted.

In FIG. 7, the case where two probe card UVW stages are mounted on the probe card base shaft 170 has been described, but this is only an embodiment, and the present invention includes three or more probe card UVW stages on the probe card base shaft 170. can be fitted.

8 is a flowchart illustrating an operation process of an apparatus for inspecting a probe card according to an embodiment of the present invention.

Hereinafter, with reference to FIGS. 1 to 8 , an operation process of an apparatus for inspecting a probe card according to an embodiment of the present invention will be described in detail.

According to an embodiment, the apparatus 100 may identify whether the probe card is seated in the probe supply unit (S810). When the operator 101 places at least one probe card on the probe card supply unit 121 or 111, the apparatus 100 may identify whether the probe card is installed on the probe supply unit.

For example, the apparatus 100 may identify whether the first probe card 111 is seated in the first probe supply part 121 and the second probe card 112 is seated in the second probe supply part 122. there is.

According to an embodiment, the device 100 may check the ID of the installed probe card (S812). When the probe cards 111 and 112 are seated in the probe card supply units 121 and 122, respectively, a reader (not shown) identifies each of the probe cards 111 and 112 seated in the probe card supply units 121 and 122 ( identifier) can be identified.

For example, a reader (not shown) (eg, a camera or a scanner) may be disposed at an appropriate location capable of checking identifiers of the probe cards 111 and 112 seated in the probe card supply units 121 and 122 .

According to an embodiment, the probe card robot 150 of the apparatus 100 may pick up the probe card seated in the probe card supply unit and load it into the probe card buffer (S814). When the identifiers of the probe cards 111 and 112 seated in the probe card supply units 121 and 122 are identified, the probe card robot 150 moves the probe cards 111 and 112 seated in the probe card supply units 121 and 122, respectively. may be loaded into the probe card buffers 131 and 132. For example, the probe card robot 150 may load each of the probe cards 111 and 112 on a corresponding layer of the probe card buffers 131 and 132 . The probe card robot 150 may load each of the probe cards 111 and 112 into the probe card buffers 131 and 132 according to the model of the display panel.

According to an embodiment, the device 100 may check the model of the large display panel (S816). When a large display panel is supplied, the apparatus 100 may check the model of the display panel.

According to an embodiment, after the probe card robot 150 of the apparatus 100 moves to the probe card buffer to pick up the probe card, the picked-up probe card may be seated in the probe card terminal buffer (S818). When the model of the large display panel is confirmed, the apparatus 100 probes information about the model of the display panel (eg, model information of the display panel, information on the layer in which the probe card is loaded in the probe card buffers 131 and 132, etc.) It can be delivered to the card robot 150.

Thereafter, the probe card robot 150 may pick up the probe card loaded in the corresponding layer of the probe card buffer and place the picked-up probe card on the probe card terminal buffers 141 and 142 .

According to an embodiment, the probe card loader 220 of the apparatus 100 may move the probe cards to the lower part of the probe card base shaft 170 (S820). When the probe cards are seated in the probe card terminal buffers 141 and 142, the probe card loader 220 may simultaneously pick up the probe cards and move the picked up probe cards to the bottom of the probe card base shaft 170.

According to an embodiment, the probe card loader 220 of the apparatus 100 may move the probe card to the inspection position (S822). The probe card loader 220 may move the picked-up probe cards to the bottom of the probe card base shaft 170 and then lift the probe cards to the probe card UVW stage mounted on the bottom of the probe card base shaft 170. . The base shaft 170 may lift the base shaft 170 with the probe base Z-axis 431 configured at both ends (eg, ±y direction).

According to an embodiment, the probe card base shaft 170 of the device 100 may align the vision of the probe card (S824). When the probe card UVW stages 611 and 612, in which the probe cards are mounted on the lower part of the probe card base shaft 170, are lifted, the probe card UVW stages 611 and 612 provide vision for the probe cards 111 and 112. Alignment can be checked. In addition, the probe card base shaft 170 may test lighting by bringing the two probe cards 111 and 112 into contact with the lighting pad of the large display panel.

Thereafter, the probe cards 111 and 112 for which the vision alignment and lighting tests for the probe cards 111 and 112 are completed are carried out in the reverse order of the above operation process.

As described above, according to the present invention, problems of mechanical assembly tolerance and thermal expansion can be solved by mounting a plurality of (eg, two) probe cards on the probe card base shaft 170 .

In addition, the present invention can perform vision alignment for a plurality of probe cards by using a probe card UVW stage capable of aligning a plurality of probe cards mounted on the lower part of the probe card base shaft 170 in multiple directions. and precise contact within a few microns is possible.

In addition, according to the present invention, at least one probe card can be quickly supplied through a probe card robot, and various probe cards can be loaded to correspond to various display panel models.

Each step in each of the flowcharts described above may be operated regardless of the order shown, or may be performed simultaneously. In addition, at least one component of the present invention and at least one operation performed by the at least one component may be implemented by hardware and/or software.

As described above, the present invention has been described with reference to the drawings illustrated, but the present invention is not limited by the embodiments and drawings disclosed in this specification, and various modifications are made by those skilled in the art within the scope of the technical idea of the present invention. It is obvious that variations can be made. In addition, although the operational effects according to the configuration of the present invention have not been explicitly described and described while describing the embodiments of the present invention, it is natural that the effects predictable by the corresponding configuration should also be recognized.

100: probe card inspection device
111: first probe card
112: second probe card
121: first probe card supply unit
122: second probe card supply unit
131: first probe card buffer
132: second probe card buffer
141: first probe card terminal buffer
142: second probe card terminal buffer
150: probe card robot
160: main system
170: probe card base axis
220: probe card loader

Claims (11)

An apparatus for inspecting a display panel using a probe card, comprising:
a probe card supply unit in which at least two probe cards are seated;
It is disposed at the rear of the probe card supply unit and picks up a first probe card among the at least two probe cards seated in the probe card supply unit, loads it into a first probe card buffer, picks up a second probe card, and loads the second probe card into a second probe card buffer. a probe card robot that loads the probe card buffer;
A plurality of different probe cards are loaded according to the type of large panel, and the first probe card buffer disposed on the left side of the probe card robot and the second probe card buffer disposed on the right side of the probe card robot are included. probe card buffer;
Among the probe cards disposed behind the probe card robot and loaded in the first probe card buffer and the second probe card buffer, probe cards that illuminate and inspect the large panel based on the type of the large panel a probe card terminal buffer seated by the probe card robot;
a probe card loader disposed behind the probe card terminal buffer, loading the probe cards seated on the probe card terminal buffer, and moving the probe cards to a lower portion of a shaft of the probe card base; and
An apparatus for inspecting a display panel using a probe card including a probe card base axis for inspecting vision alignment of the probe cards positioned below the probe card base axis.
According to claim 1,
The probe card supply unit,
An apparatus for inspecting a display panel using a probe card configured to include a first probe card supply unit in which a first probe card is seated, and a second probe card supply unit in which a second probe card is seated.
delete According to claim 1,
The probe card robot,
Apparatus for inspecting a display panel using a large probe card for seating at least two probe cards corresponding to the model of the large panel among the plurality of probe cards loaded in the probe card buffer on the probe card terminal buffer.
According to claim 1,
The probe card terminal buffer,
An apparatus for inspecting a display panel using a large probe card including a first probe card terminal buffer and a second probe card terminal buffer.
According to claim 5,
The probe card robot,
seating the first probe card loaded in the first probe card buffer to the first probe card terminal;
An apparatus for inspecting a display panel using a probe card for seating the second probe card loaded in the second probe card buffer to the second probe card terminal.
According to claim 6,
The probe card loader,
Inspecting a display panel using a probe card that simultaneously moves the first probe card seated on the first probe card terminal and the second probe card seated on the second probe card terminal downward of the probe card base shaft. Device.
According to claim 7,
The probe card base axis is
Vision alignment of each of the plurality of first tips of the first probe card seated on the first probe card terminal and the plurality of second tips of the second probe card seated on the second probe card terminal is simultaneously inspected. A device that inspects a display panel using a probe card that
According to claim 8,
The probe card base axis,
A first probe card UVW stage inspecting the vision alignment of the first probe card, and a second probe card UVW disposed on one side of the first probe card UVW stage and inspecting the vision alignment of the second probe card. including the stage
The first probe card UVW stage and the second probe card UVW stage are disposed below the probe card base axis. An apparatus for inspecting a display panel using a probe card.
According to claim 1,
An apparatus for inspecting a display panel using a probe card in which a plurality of probe tips are configured in the probe card.
A method of operating a device for inspecting a display panel using a probe card,
A probe card robot disposed behind the probe card supply unit picks up a first probe card from among at least two probe cards seated in the probe card supply unit, loads it into a first probe card buffer, picks up a second probe card, and loading in a second probe card buffer, wherein the first probe card buffer is disposed on the left side of the probe card robot, and the second probe card buffer is disposed on the right side of the probe card robot;
A probe in which the probe card robot illuminates and inspects a plurality of different probe cards based on the type of the large panel among the probe cards loaded in the first probe card buffer and the second probe card buffer, based on the type of the large panel. a process of seating the card terminal in the buffer, wherein the probe card terminal is disposed at the rear of the probe card robot;
loading, by a probe card loader disposed behind the probe card terminal, the probe cards seated on the probe card terminal buffer and moving the probe cards to a lower portion of a shaft of the probe card base; and
and inspecting vision alignment of the probe cards, wherein the probe card base axis is positioned below the probe card base axis.

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