KR102465656B1 - Plasma device for surface treatment of powder using horizontal plate electrode - Google Patents

Abstract

A plasma device for surface treatment of powder using a horizontal electrode according to the present invention comprises a horizontal electrode disposed in a horizontal direction and having a shape of a flat plate, wherein powder is placed on the horizontal electrode and then treated with plasma to nearly prevent powder from being lost and allow more rapid and uniform surface treatment. In addition, vibration is applied to the horizontal electrode during treatment with plasma to give an effect of tapping the horizontal electrode, thereby allowing positions of powder that is relatively closer to the surface of the horizontal electrode and powder that is remote therefrom to be repeatedly switched to achieve more uniform surface treatment of the powder. Furthermore, a plurality of the horizontal electrodes are stacked in a vertical direction to enable quantity to be treated at a time to be adjusted.

Description

Plasma device for surface treatment of powder using horizontal plate electrode}

The present invention relates to a plasma device for powder surface treatment using a horizontal electrode, and more particularly, to a horizontal electrode capable of more uniform surface treatment of nano- or micro-sized powder on the horizontal electrode by applying vibration to the horizontal electrode. It relates to a plasma device for powder surface treatment using the present invention.

In general, carbon nanopowder materials such as carbon nanotubes and graphene are prone to mutual aggregation despite their excellent physical properties, so a dispersion technology that uniformly mixes them in a base material or solvent is essential for commercialization.

Conventional dispersion techniques can be divided into mechanical methods such as ultrasonic waves and milling, wet methods using chemical reactions of strong acids and surfactants, and dry methods using plasma.

The mechanical method or the wet method has problems such as complicated process, long process time, material damage, impurities remaining, and wastewater generation.

On the other hand, the dry plasma method is the preferred method when considering mass productivity or environmental friendliness, but in order to treat the nanopowder with plasma, a device for rotating and stirring the powder is essential to treat the nanopowder uniformly. As the size decreases, uniform surface treatment is very difficult, functionalization efficiency is low, and processing time is long.

Recently, a technique of mixing powder using mechanical methods such as rotation or stirring has been adopted in the eco-friendly plasma dry method, but the functionalization efficiency is low, and even if rotated or stirred, a large amount of powder floating in the chamber is uniformly processed. It has a very difficult problem.

Korean Patent Registration No. 10-1942139

An object of the present invention is to provide a plasma device for powder surface treatment using a horizontal electrode that can reduce cost and improve mass productivity.

A plasma apparatus for powder surface treatment using a horizontal electrode according to the present invention includes a chamber forming a space in which plasma is generated; a horizontal electrode installed in the chamber in a horizontal direction, formed in a flat flat plate shape so that powder is placed on the upper surface, and generating plasma when power is applied to surface-treat the powder to functionalize it; and a vibration generator for evenly surface-treating the powders by applying vibration to the horizontal electrode so that the positions of the powders are exchanged with each other on the upper surface of the horizontal electrode.

The horizontal electrode includes a porous filter electrode in which a plurality of holes are formed.

An adsorption means for adsorbing the powders on the upper surface of the filter electrode by reducing the internal pressure of the filter electrode may be further included.

The vibration generator applies vibration so that the horizontal electrode can perform at least one of vertical, horizontal, rotational, and gyro motion.

The vibration generator includes a vibration motor connected to the horizontal electrode and applying vibration to the horizontal electrode by rotational force when power is applied.

The vibration generator includes an air knocker provided below the horizontal electrode and applying vibration to the horizontal electrode by moving a piston with compressed air.

The vibration generator includes an electronic hammer provided below the horizontal electrode and applying vibration to the horizontal electrode using electromagnetic force generated when power is applied.

The vibration generator includes an ultrasonic vibrator provided below the horizontal electrode and applying vibration to the horizontal electrode using ultrasonic waves generated when power is applied.

The vibration generator includes an acoustic vibration module connected to a lower portion of the horizontal electrode by a connecting member and applying acoustic vibration to the horizontal electrode by generating and resonating sound.

A plurality of the horizontal electrodes are stacked and disposed spaced apart from each other in the vertical direction.

A powder supply unit supplying the powder to an upper surface of the horizontal electrode, and a control unit controlling vibration strength of the vibration generator according to an amount of the powder supplied from the powder supply unit.

A plasma apparatus for powder surface treatment using a horizontal electrode according to the present invention includes a chamber forming a space in which plasma is generated; It is installed in the horizontal direction inside the chamber, and a plurality of them are stacked and arranged spaced apart from each other in the vertical direction, and are formed in a flat flat plate shape so that powder is placed on each upper surface. a horizontal electrode for functionalization; a vibration generator for evenly surface-treating the powders by applying mechanical vibration to the horizontal electrode so that the powders change positions on the upper surface of the horizontal electrode; A powder supply unit supplying the powder to the upper surface of the horizontal electrode, and a control unit controlling vibration strength of the vibration generator according to an amount of the powder supplied from the powder supply unit.

Plasma device for powder surface treatment using a horizontal electrode according to the present invention is a phenomenon in which powders are separated from the surface of the horizontal electrode and float in the air by placing powders on a flat plate-shaped horizontal electrode and performing plasma treatment. Since this rarely occurs and the powders are processed in a state of being in contact with the surface of the horizontal electrode, there is an advantage in that the powders are hardly lost and the surface can be treated more quickly and uniformly.

In addition, by applying vibration to the horizontal electrode during plasma treatment to give the effect of tapping the horizontal electrode, the position of the powder located relatively closer to the surface of the horizontal electrode and the powder located farther are repeatedly exchanged with each other, resulting in a more uniform surface of the powder. There are benefits to dealing with it.

In addition, by stacking a plurality of horizontal electrodes in the vertical direction, it is possible to adjust the capacity that can be processed at one time.

1 is a schematic configuration diagram of a plasma device for powder surface treatment using a horizontal electrode according to a first embodiment of the present invention.
2 is a side view showing the horizontal electrode shown in FIG. 1;
3 is a cross-sectional view showing a horizontal electrode according to a second embodiment of the present invention.
4 is a diagram schematically showing a plasma apparatus for powder surface treatment using a horizontal electrode according to a third embodiment of the present invention.
5 is a diagram schematically showing a plasma apparatus for powder surface treatment using a horizontal electrode according to a fourth embodiment of the present invention.
6 is a diagram schematically showing a plasma device for powder surface treatment using a horizontal electrode according to a fifth embodiment of the present invention.
FIG. 7 is a side view illustrating the flat electrode shown in FIG. 6 .
8 is a graph comparing functionalization of a flat plate electrode and a filter electrode according to an embodiment of the present invention.

Hereinafter, embodiments of the present invention will be described with reference to the accompanying drawings.

1 is a schematic configuration diagram of a plasma device for powder surface treatment using a horizontal electrode according to a first embodiment of the present invention. FIG. 2 is a side view illustrating the filter electrode shown in FIG. 1 .

1 and 2, in the plasma device for powder surface treatment according to the first embodiment of the present invention, the horizontal electrode is a porous filter electrode 20 (hereinafter referred to as a filter electrode) in which a plurality of holes are formed. explain with an example.

The powder includes nano- or micro-sized powders such as carbon nanotubes and graphene.

The plasma device for powder surface treatment includes a chamber 10, a filter electrode 20, an adsorption unit 30, and a vibration generator.

The chamber 10 forms a space in which the plurality of filter electrodes 20 are accommodated and plasma is generated therein. A power supply (not shown) and a gas supply unit (not shown) supplying external gas are connected to the chamber 10 . The chamber 10 is grounded and serves as a ground electrode.

A rack 25 into which the plurality of filter electrodes 20 are inserted is provided inside the chamber 10 . However, the present invention is not limited thereto, and it is also possible to arrange the plurality of filter electrodes 20 vertically stacked at a predetermined interval apart from each other without using the rack 25 .

The rack 25 can be fixedly installed inside the chamber 10, or it can be drawn out from the chamber 10 so that the plurality of filter electrodes 20 can be inserted and then retracted. It is possible.

The filter electrode 20 is a power electrode to which power is applied from the power supply device (not shown). When power is applied from the power supply device (not shown) and gas is supplied from the gas supply unit (not shown) to the inside of the chamber 10, the filter electrode 20 generates plasma inside the chamber 10. causes In this embodiment, the chamber 10 is described as an example of a ground electrode, but is not limited thereto, and one side and the other side of the filter electrode 20 are composed of different electrodes having a potential difference to generate plasma Of course, it is also possible to configure a catalog.

Plasma generated from the filter electrode 20 functionalizes the powder by surface treatment. Functionalization of the surface of the powder can improve the interfacial bonding strength between the powder and other dissimilar materials while dispersing the powders without deterioration of existing physical properties.

The filter electrode 20 is disposed in the horizontal direction in the chamber 10 and is formed in a flat plate shape so that the powder is placed on the upper surface. The filter electrode 20 is described as having a square plate shape as an example, but is not limited thereto and may also have a disk shape.

The plurality of filter electrodes 20 are stacked and disposed so as to have a space apart from each other in a vertical or horizontal direction. In this embodiment, the plurality of filter electrodes 20 will be described as an example in which 10 are spaced apart in the vertical direction in the rack 25 . The stacked number of the filter electrodes 20 is adjustable according to the processing capacity.

The filter electrode 20 is a porous filter electrode in which a plurality of holes are formed. The filter electrode 20 includes a filter part 20a formed of a porous material or a porous mesh, and a vacuum part 20b formed under the filter part 20a and brought into a vacuum state by a vacuum pump 32 to be described later. includes Of course, it is also possible for the filter electrode 20 to be formed such that only the top surface has a porous structure. The plurality of holes are processed to a size of nano or micro units, and are preferably formed smaller than the size of the powder or formed with a nano nonwoven fabric to prevent the powder from passing through. In this embodiment, the holes will be described as having a size of about 100 to 1000 nm as an example. In addition, the filter electrode 20 will be described as being formed of stainless (SUS, Stain use stainless) so that the holes can be formed.

The adsorption means 30 is a device for adsorbing the powder on the surface of the filter electrode 20 by reducing the internal pressure of the filter electrode 20 .

The adsorbing means 30 includes a vacuum pump 32, a vacuum passage 33, and a powder blocking unit (not shown) for filtering powder.

The vacuum pump 32 is installed outside the chamber 10 to suck air from inside the plurality of filter electrodes 20 to vacuum the inside of the plurality of filter electrodes 20. form

The vacuum passage 33 is a passage connecting the vacuum pump 32 and each lower portion of the plurality of filter electrodes 20 . One end of the vacuum passage 33 is connected to lower portions of the plurality of filter electrodes 20 , and the other end is connected to the vacuum pump 32 . The vacuum passage 33 is connected to the vacuum part 20b of the filter electrode 20 .

However, the present invention is not limited thereto, and the vacuum pump 32 may be installed at each lower portion of the filter electrode 20, and may also be installed on the rack 25.

The vibration generator is a device for applying vibration to the filter electrode 20 so that the powders change positions on the upper surface of the filter electrode 20 so that the powders are evenly surface-treated. The vibration generator may generate a vibration similar to an effect of tapping the bottom of the filter electrode 20 to exchange the positions of the powder located relatively close to the surface of the filter electrode 20 and the powder located far away from each other. Therefore, the powders placed on the upper surface of the filter electrode 20 can be evenly surface treated.

The vibration generator may apply vibration to the filter electrode 20 by generating at least one of mechanical vibration, acoustic vibration, and ultrasonic vibration. In addition, the vibration generator (not shown) may apply vibration to the flat electrode 520 to perform various motions such as vertical, horizontal, rotational, and gyro motions. In addition, the vibration generator (not shown) may apply vibration non-continuously or periodically.

In this embodiment, the vibration generator will be described as being an ultrasonic vibrator 40 as an example.

Referring to FIG. 2 , the ultrasonic vibrator 40 is provided below the filter electrode 20, generates ultrasonic waves according to power applied from the power supply device (not shown), and uses the ultrasonic wave to generate the filter electrode. Apply vibration to (20).

Meanwhile, the plasma device for powder surface treatment includes a powder supply unit (not shown) supplying the powders to the upper surface of the filter electrode 20 .

The powder supply unit (not shown) is provided separately from the chamber 10, and the filter electrode 20 is disposed before disposing the filter electrode 20 in the chamber 10. After supplying the powders to the upper surface, the filter electrode 20 on which the powders are placed will be disposed in the chamber 10 as an example. However, it is not limited thereto, and the powder supply unit (not shown) is provided inside the chamber 10, so that the filter electrode 20 of the filter electrode 20 is disposed in the chamber 10. It is of course also possible to supply the powders to the upper surface. The powder supply unit (not shown) may be disposed in each spaced space between the plurality of filter electrodes 20 to collectively inject into the spaced apart spaces, and one powder injector (not shown) may move in a vertical direction. Of course, it is also possible to continuously spray each space between the filter electrodes 20 while being installed to be movable and moving. In addition, the powder injector (not shown) can, of course, inject powder into the chamber 10 .

Since the filter electrode 20 is formed in a flat plate shape, it is easy to place powders on the upper surface of the filter electrode 20 through the powder supply unit (not shown).

The operation of the plasma device according to the first embodiment of the present invention configured as described above will be described as follows.

After the powder is placed on each upper surface of the plurality of filter electrodes 20, the filter electrodes 20 are inserted into the rack 25 and stacked.

In this embodiment, an example is described in which the plurality of filter electrodes 20 are sandwiched and disposed in the rack 25, but the present embodiment is not limited thereto, and the plurality of filters without using the rack 25 It is also possible, of course, that the electrodes 20 are stacked and disposed so that they are spaced apart from each other by a predetermined distance.

In addition, it is also possible to supply powder to each of the plurality of filter electrodes 20 pre-mounted inside the chamber 10 without being limited to the above embodiment.

When the vacuum pump 32 is operated, the internal pressure of the vacuum portion 20b of the filter electrodes 20 is reduced by the suction pressure of the vacuum pump 32 .

When the inside of the vacuum part 20b of the filter electrodes 20 is in a vacuum state, the powder is adsorbed on the surface of the filter electrodes 20 . That is, the adsorption force B acts on the powders in a direction toward the surface of the filter electrodes 20 .

In addition, when the ultrasonic vibrator 40 is operated, vibration is applied to the filter electrodes 20 by the ultrasonic vibrator 40 .

When vibration is applied to the lower part of the filter electrode 20, the position of the powders on the upper surface of the filter electrode 20 is changed and evenly dispersed. Since the ultrasonic vibrator 40 generates a knocking effect on the filter electrode 20, the positions of the powder located relatively close to the surface of the filter electrode 20 and the powder located far away from each other are exchanged.

That is, referring to FIG. 2 , the powders placed on the filter electrodes 20 have an adsorption force B in the direction toward the surface of the filter electrodes 20 and a direction in which they bounce away from the surface of the filter electrodes 20. Dispersion force (A) acts. At this time, the adsorption force (B) and the dispersion force (A) can be adjusted according to the suction force of the vacuum pump 30 and the vibration intensity of the ultrasonic vibrator 40 . Optimum values of the adsorption force (B) and the dispersion force (A) can be calculated through experiments or the like. By appropriately adjusting the adsorption force (B) and the dispersion force (A), the powders can only be moved to each other without flying away from the surface of the filter electrode 20, so that the entire powder can be uniformly treated with plasma. do.

In addition, a plurality of filter electrodes 20 are stacked in a vertical direction, the filter electrodes 20 are spaced apart at a preset minimum interval, and the vibration intensity of the vibration generator (not shown) is higher than a predetermined intensity. When set to a high level, when vibration is applied to the filter electrodes 20, it is also possible that the powder bounced from the lower electrode among the filter electrodes 20 contacts the surface of the upper electrode and undergoes surface treatment.

In addition, it is possible to prevent powder from being piled up to a certain thickness or more on a specific portion of the surface of the filter electrode 20 .

In addition, by giving the effect of tapping the filter electrode 20 using the ultrasonic vibrator 40, there is no need to completely separate the powder from the surface of the filter electrode 20, float and disperse, and then adsorb the powder again. Compared to the case of floating, the processing time can be shortened.

Therefore, while the powders are adsorbed on the surface of the filter electrode 20, they can be moved and evenly mixed, so that the powders are evenly surface-treated by plasma.

The process of surface treatment by the plasma may be performed for a preset time. When the set time elapses, the plasma treatment is stopped and the powder is collected.

As described above, since powders are placed on a plurality of horizontal electrodes, the plasma device for powder surface treatment according to the first embodiment of the present invention has a simple structure and can increase the number of stacked horizontal electrodes, so that it can be processed at once. capacity can be maximized.

In addition, since the powders are placed on the surface of the horizontal electrodes, the powders that are discarded without being treated can be minimized compared to the case where the powders are suspended and then adsorbed, so the powders are completely removed from the surface of the filter electrode 20 Since there is no need for a repetitive process of repeating dispersing, the treatment efficiency can be improved.

In addition, by applying vibration to the filter electrode 20 using the vibration generator to appropriately adjust the adsorption force (B) and the dispersion force (A), the powders are not blown away from the surface of the filter electrode 20 It is possible to move the position of each other without moving, so that the entire powder can be uniformly treated with plasma.

Meanwhile, FIG. 3 is a cross-sectional view showing a horizontal electrode according to a second embodiment of the present invention.

Referring to FIG. 3, in the second embodiment of the present invention, the horizontal electrode is described as an example of a porous filter electrode 220, and the filter electrode 220 includes an upper filter unit 220a and a lower filter unit. 220b and the vacuum unit 220c are different from those of the first embodiment, and other components and operations are similar, so the different configurations will be mainly described and detailed descriptions of the similar configurations will be omitted.

The filter electrode 220 is formed to have a porous structure, and a plurality of filter electrodes 220 are stacked and arranged so as to have a space apart from each other in the vertical direction.

The upper filter part 220a and the lower filter part 220b are formed of a porous body or a porous mesh. The upper filter unit 220a and the lower filter unit 220b are processed into nano or micro unit sizes, and holes are formed smaller than the size of the powder or formed with nano nonwoven fabric to prevent the powder from passing through. desirable.

The vacuum part 220c is formed between the upper filter part 220a and the lower filter part 220b, and is brought into a vacuum state by the vacuum pump 32. A vacuum passage 33 is connected to the vacuum part 220c.

When the vacuum pump 32 is operated, the vacuum pump 32 sucks the air inside the vacuum part 220c so that the inside of the vacuum part 220c is in a vacuum state.

When the inside of the vacuum part 220c is in a vacuum state, the powder supplied to the inside of the chamber 10 or to the periphery of the filter electrode 220 moves through the upper filter part 220a and the lower filter part 220b. can be adsorbed on the surface of

Therefore, since the powders are adsorbed on both the upper and lower surfaces of the filter electrode 220 and can be subjected to plasma surface treatment, the plasma treatment capacity can be increased.

Meanwhile, FIG. 4 is a diagram schematically showing a plasma device for powder surface treatment using a horizontal electrode according to a third embodiment of the present invention.

Referring to FIG. 4, in the plasma device for powder processing using horizontal electrodes according to the third embodiment of the present invention, the horizontal electrode is described as an example of a porous filter electrode 320, and the chamber 310, the filter electrode 320, an adsorbing means 330 and a vibration generator, but the vibration generator is an acoustic vibration module 355, which is different from the first embodiment, and the rest of the configuration and operation are similar, so the different configurations are centered. , and detailed descriptions of similar configurations are omitted.

The acoustic vibration module 355 is an acoustic resonance vibrator that generates acoustic vibration in the filter electrode 320 by generating and resonating with sound.

An upper portion of the acoustic vibration module 355 is connected to the filter electrode 320 by a connecting member 352 .

In the present embodiment, it has been described that one filter electrode 320 is disposed, but is not limited thereto, and a plurality of filter electrodes 320 may be disposed spaced apart from each other at predetermined intervals in a vertical or horizontal direction. have.

A vacuum flow path 333 connected to a vacuum pump (not shown) is connected to the inside of the filter electrode 320 .

In addition, a rack is provided inside the chamber to fit the filter electrode 320 therein, and a shock is absorbed between the rack and the filter electrode 320 when the filter electrode 320 vibrates. A shock absorbing member (not shown) may be provided.

In the plasma device for powder processing according to the third embodiment of the present invention, the vibration generator has been described as an example in which the horizontal electrode is a porous filter electrode 320, but is not limited thereto, and a non-porous flat electrode may also be used. Of course it is possible. In the case of using the flat plate electrode, the adsorption means can be eliminated.

Meanwhile, FIG. 5 is a diagram schematically showing a plasma device for powder surface treatment using a horizontal electrode according to a fourth embodiment of the present invention.

Referring to FIG. 5, in the plasma apparatus for powder processing using horizontal electrodes according to the fourth embodiment of the present invention, the horizontal electrode is described as an example of a porous filter electrode 420, and the plurality of filter electrodes 420 is disposed at a predetermined interval in the vertical direction, and the filter electrodes 420 each include an upper filter part 420a, a lower filter part 420b and a vacuum part 420c. Since it is different from the example and other configurations and operations are similar, the different configurations will be mainly described and detailed descriptions of the similar configurations will be omitted.

The plurality of filter electrodes 420 are stacked and disposed so as to have a space apart from each other in the vertical direction. The stacked number of the filter electrodes 420 is adjustable according to the processing capacity.

The upper filter part 420a and the lower filter part 420b are formed of a porous body or a porous mesh. It is preferable that the upper filter part 420a and the lower filter part 420b are processed to nano or micro size, and holes are formed smaller than the size of the powder to prevent the powder from passing through.

The vacuum part 420c is formed between the upper filter part 420a and the lower filter part 420b, and is brought into a vacuum state by the vacuum pump 432. A vacuum passage 433 is connected to the vacuum part 420c.

When the vacuum pump 432 is operated, the vacuum pump 432 sucks the air inside the vacuum part 420c so that the inside of the vacuum part 420c is in a vacuum state.

When the inside of the vacuum part 420c is in a vacuum state, the powder supplied to the inside of the chamber 310 or to the periphery of the filter electrode 420 moves through the upper filter part 420a and the lower filter part 420b. can be adsorbed on the surface of

Therefore, since powders are adsorbed on both the upper and lower surfaces of the filter electrode 420 to be subjected to plasma surface treatment, the plasma treatment capacity can be increased.

In the above embodiment, it has been described that the vacuum part 420c of the plurality of filter electrodes 420 is in a vacuum state by one vacuum pump 432, but is not limited thereto, and the plurality of filters It is also possible, of course, that a vacuum channel and a vacuum pump are respectively connected to each vacuum part 420c of the electrodes 420 .

In addition, a powder sprayer (not shown) for spraying and supplying powder is provided in the spaced space between the plurality of filter electrodes 420 .

The powder injector (not shown) may be disposed in each space between the plurality of filter electrodes 420 to collectively inject into the spaced apart spaces, and one powder injector (not shown) may move upwards and downwards. Of course, it is also possible to continuously spray the filter electrodes 420 at intervals between the filter electrodes 420 while being installed so as to be movable. In addition, the powder injector (not shown) can, of course, inject powder into the chamber 310 .

In the plasma device for powder processing using a horizontal electrode according to the fourth embodiment of the present invention, the vibration generator can generate at least one of mechanical vibration, acoustic vibration, and ultrasonic vibration to apply vibration to the filter electrode 420. Anything is applicable.

Meanwhile, FIG. 6 is a diagram schematically showing a plasma apparatus for powder surface treatment using a horizontal electrode according to a fifth embodiment of the present invention. FIG. 7 is a side view illustrating the horizontal electrode shown in FIG. 6 .

In the plasma apparatus for powder surface treatment using a horizontal electrode according to the fifth embodiment of the present invention, the horizontal electrode is a panel-shaped flat panel electrode 520 without holes, and the vibration generator 540 is a mechanical vibrator. Since it is different from the first embodiment and other configurations and actions are similar, the different configurations will be described in detail below.

At least one flat electrode 520 is installed in the chamber 510 in a horizontal direction, and has a flat flat plate shape so that powders are placed on the upper surface of the flat electrode 520 . In this embodiment, the flat electrode 520 has been described as having a flat plate shape as an example, but is not limited thereto, and the flat plate electrode 520 can be applied to any shape such as a bowl or the like on which powders can be placed on the upper surface. do.

Since the flat electrode 520 does not have a porous structure, it can be made of various materials such as metal, polymer, and ceramic. The flat plate electrode 520 can be made of aluminum among metals, so it is lighter and less expensive than other metals such as stainless.

The vibration generator (not shown) is provided on the flat plate electrode 520 and is a device for evenly surface-treating the powders by changing positions of the powders on the upper surface of the flat electrode 520.

The vibration generator (not shown) will be described as an example of generating mechanical vibration when power is applied by the power supply unit. However, it is not limited thereto, and the vibration generator 540 may also use an ultrasonic vibrator or an acoustic vibration module.

The vibration generator (not shown) vibrates the flat electrode 520 by moving a piston with compressed air and a vibration motor (not shown) that applies vibration to the flat electrode 520 by rotational force when power is applied. and at least one of an air knocker (not shown) applying vibration and an electronic hammer (not shown) applying vibration to the flat electrode 520 using electromagnetic force generated when the power is applied. However, it is not limited thereto, and the vibration generator (not shown) may apply vibration so that the flat electrode 520 performs various motions such as vertical, horizontal, rotational, and gyro motions. In addition, the vibration generator (not shown) may apply vibration non-continuously or periodically.

The vibration motor is a device that generates vibration by eccentric rotation by connecting an eccentric shaft to the rotation shaft of the motor, and is connected to the flat plate electrode 520 by a connecting member.

The air knocker is a device that moves a piston forward by compressed air supplied into the housing and transmits an impact force generated by the forward movement of the piston to the flat electrode 520 to generate vibration in the horizontal electrode 520. to be. The air knocker is disposed so as to face the flat electrode 520 .

The electronic hammer includes an E-type core and an I-type core therein, and generates vibrations in the flat electrode 520 by using an electromagnetic force generated between the E-type core and the I-type core when power is applied. to be.

In addition, the plasma device for powder surface treatment controls the operation of the vibration generator (not shown) according to the amount of powder placed on the flat electrode 520, thereby increasing the strength of the vibration applied to the flat electrode 520. It includes a control unit (not shown) for adjusting.

The amount of powder placed on the flat plate electrode 520 can be measured from the amount of powder supplied from a powder supply unit (not shown). The vibration intensity of the vibration generator (not shown) may be set higher as the amount of powder placed on the flat electrode 520 increases.

A plurality of flat plate electrodes 520 are stacked in a vertical direction, the flat plate electrodes 520 are spaced apart at a preset minimum interval, and the vibration intensity of the vibration generator (not shown) is set higher than a predetermined intensity. In this case, when vibration is applied to the flat plate electrodes 520, the surface of the flat plate electrodes 520 may be surface-treated while the powder bounced from the lower electrode comes into contact with the upper electrode surface.

8 is a graph showing comparison of oxygen functionalization when the powder is a carbon nanotube and a porous filter electrode and a non-porous flat electrode are used in an oxygen functionalization experiment of the carbon nanotube.

Referring to FIG. 8 , it can be seen that the presence or absence of porosity has little effect on oxygen functionalization of carbon nanotubes.

Therefore, when a non-porous aluminum plate is used as the flat plate electrode 520, there is an advantage in that weight and manufacturing cost can be reduced compared to the case of using a filter electrode.

In addition, in the case of using the non-porous flat plate electrode 520 as described above, since a separate adsorption means is not required, the device can be more compact and the cost can be reduced.

Although the present invention has been described with reference to the embodiments shown in the drawings, this is only exemplary, and those skilled in the art will understand that various modifications and equivalent other embodiments are possible therefrom. Therefore, the true technical scope of protection of the present invention should be determined by the technical spirit of the appended claims.

10: chamber 20: filter electrode
30: adsorption means 32: vacuum pump
33: vacuum flow path 40: ultrasonic vibrator
320: filter electrode 350: acoustic vibration module
420: filter electrode 520: flat electrode

Claims (12)

a chamber forming a space in which plasma is generated;
a horizontal electrode installed in the chamber in a horizontal direction, formed in a flat flat plate shape so that powder is placed on the upper surface, and generating plasma when power is applied to surface-treat the powder to functionalize it;
A vibration generator for evenly surface-treating the powders by applying vibration to the lower portion of the horizontal electrode so that the powders are exchanged in position on the upper surface of the horizontal electrode,
The vibration generator,
Plasma device for powder surface treatment using a horizontal electrode that vibrates the horizontal electrode so that at least one of up and down, left and right, rotation, and gyro motion is possible so that the powder is evenly dispersed while moving in position on the upper surface of the horizontal electrode. The method of claim 1,
The horizontal electrode is a plasma device for powder surface treatment using a horizontal electrode including a porous filter electrode in which a plurality of holes are formed. The method of claim 2,
The plasma device for powder surface treatment using a horizontal electrode further comprising an adsorption means for adsorbing the powders on the upper surface of the filter electrode by reducing the internal pressure of the filter electrode. delete According to claim 1 or claim 2,
The vibration generator,
A plasma device for powder surface treatment using a horizontal electrode including a vibration motor connected to the horizontal electrode and applying vibration to the horizontal electrode by rotational force when power is applied. According to claim 1 or claim 2,
The vibration generator,
Plasma device for powder surface treatment using a horizontal electrode including an air knocker provided below the horizontal electrode and applying vibration to the horizontal electrode by moving a piston with compressed air. According to claim 1 or claim 2,
The vibration generator,
A plasma device for powder surface treatment using a horizontal electrode including an electronic hammer provided under the horizontal electrode and applying vibration to the horizontal electrode using electromagnetic force generated when power is applied. According to claim 1 or claim 2,
The vibration generator,
A plasma device for powder surface treatment using a horizontal electrode including an ultrasonic vibrator provided under the horizontal electrode and applying vibration to the horizontal electrode using ultrasonic waves generated when power is applied. According to claim 1 or claim 2,
The vibration generator,
A plasma device for powder surface treatment using a horizontal electrode including a sound vibration module connected to a lower portion of the horizontal electrode by a connecting member and generating and resonating sound to apply sound vibration to the horizontal electrode. According to claim 1 or claim 2,
The horizontal electrode,
Plasma device for powder surface treatment using a plurality of horizontal electrodes stacked and spaced apart from each other in the vertical direction. The method of claim 1,
A powder supply unit for supplying the powder to the upper surface of the horizontal electrode,
The plasma device for powder surface treatment using a horizontal electrode further comprising a control unit controlling the vibration intensity of the vibration generator according to the amount of the powder supplied from the powder supply unit. delete

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