A kind of modified model powder body material surface plasma processing apparatus
Technical field
The utility model relates to plasma processing apparatus, relates in particular to a kind of modified model powder body material surface plasma processing apparatus.
Background technology
Low temperature plasma surface treatment is: under negative pressure (vacuum), apply high-frequency electric field to reacting gas environment, gas ionizes under the excitation of high-frequency electric field, produces plasma.Plasma is the 4th state of material, wherein contain the various active particles such as a large amount of electronics, ion and free radical, active particle and material surface generation physical and chemical reaction, thus structure, composition and the group of material surface are changed, be met the surface of actual requirement.Plasma reaction speed is fast, treatment effeciency is high, and modification occurs over just material surface, on the not impact of the performance of material internal bulk material, is desirable surface modification means.
Powder is the fine particle that a kind of solid particle dry, that disperse forms.In prior art, plasma processing apparatus is when processing powder surface, because powder is piled up, the surface that reunion between particulate makes not to be exposed in plasma atmosphere can not get processing, be difficult to realize microparticle surfaces and all process, cause processing incomplete, inhomogeneous, poor processing effect.
Therefore, need the powder body material surface plasma processing apparatus that a kind for the treatment of effect is good badly.
Utility model content
The purpose of this utility model is to overcome the defect that prior art exists, and a kind of modified model powder body material surface plasma processing apparatus is provided.
The technical scheme that realizes the utility model object is: a kind of modified model powder body material surface plasma processing apparatus, comprise shell, electrode assemblie, plasma generator and gas distribution grid, described cover top portion is provided with the bleeding point for Exhaust Gas, described outer casing bottom is provided with for passing into the gas access of reacting gas, in described shell, be provided with reaction chamber, described electrode assemblie is arranged on described reaction chamber outer surface, described gas distribution grid is arranged in described reaction chamber, described electrode assemblie is arranged at described gas distribution grid top, on described gas distribution grid, be provided with some pores that enter for reacting gas, described electrode assemblie is electrically connected to described plasma generator.
Further, described electrode assemblie is spiral electrode.
Further, described spiral electrode is three-dimensional spiral electrode or snail shape electrode.
Further, described plasma generator comprises that described adaptation is also electrically connected to described electrode assemblie for regulating the power supply and the adaptation being connected with described power supply of described electrode assemblie power.
Further, also comprise the air pump for Exhaust Gas, described air pump is connected with described bleeding point, is also provided with filter between air pump and bleeding point.
Further, also comprise that described source of the gas is connected with described gas access for the source of the gas of reacting gas is provided.
The utlity model has positive effect: the utility model gas access passes into reacting gas, reacting gas enters in reaction chamber and blows powder body material simultaneously from the pore of gas distribution grid and moves upward, electrode assemblie energising forms high-frequency electric field reacting gas ionization is processed powder body material surface, having avoided powder body material to pile up cannot process completely uniformly, treatment effect is good, increases work efficiency.
Accompanying drawing explanation
For content of the present utility model is more easily expressly understood, according to specific embodiment also by reference to the accompanying drawings, the utility model is described in further detail below, wherein:
Fig. 1 is the structural representation of the utility model the first embodiment;
Fig. 2 is the structural representation of electrode assemblie in the utility model the first embodiment;
Fig. 3 is the structural representation of the utility model the second embodiment.
Wherein: 1, source of the gas, 2, gas access, 3, gas distribution grid, 4, electrode assemblie, 5, filter, 6, air pump, 7, adaptation, 8, power supply plasma generator, 9, bleeding point, 10, shell.
Embodiment
Embodiment 1
As shown in Figure 1 to Figure 2, the utility model the first embodiment provides a kind of modified model powder body material surface plasma processing apparatus, comprise shell 10, electrode assemblie 4, plasma generator and gas distribution grid 3, shell 10 tops are provided with the bleeding point 9 for Exhaust Gas, shell 10 bottoms are provided with for passing into the gas access 2 of reacting gas, in shell 10, be provided with reaction chamber (not shown), electrode assemblie 4 is arranged on reaction chamber outer surface, gas distribution grid 3 is arranged in reaction chamber, electrode assemblie 4 is arranged at gas distribution grid 3 tops, on gas distribution grid 3, be provided with some pore (not shown)s that enter for reacting gas, electrode assemblie 4 is snail shape electrode, plasma generator comprises for regulating the power supply 8 and the adaptation 7 being connected with power supply 8 of electrode assemblie 4 power, adaptation is also connected with electrode assemblie 4.
The present embodiment gas access 2 passes into reacting gas, reacting gas enters in reaction chamber and blows powder body material simultaneously from the pore of gas distribution grid 3 and moves upward, snail shape electrifying electrodes also forms high-frequency electric field nearby reacting gas ionization is processed powder body material surface, having avoided powder body material to pile up cannot process completely uniformly, treatment effect is good, increases work efficiency; Adaptation 7 can regulate the power of electrode assemblie 4 according to demand, thereby regulates the ionization effect of reacting gas.
Embodiment 2
As shown in Figure 2, all the other are identical with embodiment 1, difference is, the present embodiment also comprises for the air pump 6 of Exhaust Gas with for the source of the gas 1 of reacting gas is provided, air pump 6 is connected with bleeding point 9, between air pump 6 and bleeding point 9, be also provided with filter 5, source of the gas 1 is connected with gas access 2, and spiral electrode is three-dimensional spiral electrode.
The present embodiment increases filter 5 can effectively prevent that the powder body material in reaction chamber is drawn out of; Three-dimensional spiral electrode can increase high-frequency electric field space, increases work efficiency.
Above-described specific embodiment; the purpose of this utility model, technical scheme and beneficial effect are further described; institute is understood that; the foregoing is only specific embodiment of the utility model; be not limited to the utility model; all within spirit of the present utility model and principle, any modification of making, be equal to replacement, improvement etc., within all should being included in protection range of the present utility model.