KR102447015B1 - Robot drive with isolated optical encoder - Google Patents

Abstract

A device comprising a frame, an optical sensor connected to the frame, and an environmental isolation barrier. An opening extending through the housing near the frame is configured to attach to the housing of the motor assembly. The light detection method includes a camera. An environmental isolation barrier is configured to connect to the housing at the opening, wherein the environmental isolation barrier is at least partially transparent to a camera to allow the camera to view images through the environmental isolation barrier and the opening and into the housing and is located

Description

Robot drive with isolated optical encoder

Illustrative and non-limiting embodiments relate generally to position sensing and, more particularly, to a robot driven position sensor having an optical encoder.

U.S. Patent Publication Nos. 2009/0243413 A1 and 2015/0303764 A1 disclose a barrier between a non-optical encoder read-head and an encoder disk, which are incorporated herein by reference in their entirety.

The following summary is merely exemplary. The abstract is not intended to limit the scope of the claims.

According to one aspect, there is provided an apparatus according to an exemplary embodiment, the apparatus comprising: a frame configured to be attached to the housing proximate to an aperture extending through a housing of a motor assembly; an optical sensor coupled to the frame, including a camera; and an environment separation barrier configured to couple to the housing at the opening, the environmental separation barrier being at least partially transparent and allowing the camera to image the environment separation barrier and the interior of the housing through the opening is positioned relative to the camera so that it can be viewed.

According to another aspect, an exemplary method includes providing a read-head comprising a frame and a camera coupled to the frame; coupling the read-head to a housing of a motor assembly, wherein a frame of the read-head is coupled to the housing proximate to an aperture extending through the housing; and disposing an environmental isolating barrier in the opening to isolate a first environmental region inside the housing from a second environmental region in which the camera is disposed, wherein the environmental isolating barrier is at least partially transparent; The camera is positioned relative to the camera to view an image inside the housing through the environmental isolation barrier and the opening.

According to another aspect, an exemplary method comprises illuminating a reference member disposed inside a housing of a motor assembly by a light emitter of a read-head, the read-head comprising: - the head is at least partially disposed outside the housing; viewing an image of the reference member with a camera of the read-head, the camera being at least partially disposed outside of the housing, the image being disposed through and in an aperture of the housing viewed by the camera through a transparent environmental isolation barrier, the transparent environmental isolation barrier sealing a first environment inside the housing from a second environment having a sensor disposed therein, the camera being external to the first environment disposed, wherein the transparent environment separation barrier permits the camera to view images originating from inside the housing while the camera is outside the first environment.

The above aspects and other features are described in connection with the accompanying drawings in the description below.
1 is a schematic diagram of a substrate processing apparatus;
Fig. 2 is a diagram illustrating some of the components of the apparatus shown in Fig. 1;
Fig. 3 is a schematic diagram illustrating some of the components shown in Figs. 1-2;
3A is a diagram illustrating another exemplary embodiment of the components shown in FIGS. 1-2;
Fig. 4 is a schematic diagram showing some of the components shown in Fig. 3;
Fig. 4a is a schematic diagram showing an example of the read-head shown in Fig. 4;
Fig. 4B is a schematic diagram showing an example of multiple read-heads of the read-head shown in Fig. 4;
5 is a diagram illustrating an exemplary type of connection configuration within the sensor shown in FIGS. 3-4;
Fig. 6 is a diagram illustrating an exemplary type of coupling a sensor to the housing shown in Figs. 3-4;
Fig. 7 is a view similar to Fig. 4 showing another exemplary embodiment;
Fig. 8 is a view similar to Fig. 4 showing another exemplary embodiment;
Fig. 9 is a view similar to Fig. 4 showing another exemplary embodiment;
Fig. 10 is a view similar to Fig. 4 showing another exemplary embodiment;
Fig. 11 is a view similar to Fig. 4 showing another exemplary embodiment;
Fig. 12 is a view similar to Fig. 4 showing another exemplary embodiment;
Fig. 13 is a view similar to Fig. 4 showing another exemplary embodiment;
Fig. 14 is a view similar to Fig. 4 showing another exemplary embodiment;
Fig. 15 is a view similar to Fig. 4 showing another exemplary embodiment;

Referring to FIG. 1 , a schematic top view of an exemplary substrate processing apparatus 10 having a substrate transport apparatus 12 is shown. Although the invention has been described with reference to the embodiments shown in the drawings, it should be understood that the invention may be embodied in many forms of alternative embodiments. Also, any suitable size, shape or type of materials or elements may be used.

In addition to the substrate transport apparatus 12 , the substrate processing apparatus 10 includes multiple substrate processing chambers 14 connected to a vacuum chamber 15 and substrate cassette elevators 16 . The transfer device 12 is disposed, at least in part, within the chamber 15 and is configured to transfer flat substrates, such as semiconductor wafers or flat panel displays, between the chambers 14 and elevators 16 . In alternative embodiments, the transfer apparatus 12 may be used in any suitable type of substrate processing apparatus.

A conventional vacuum environment robotic manipulator generally includes a drive unit, which includes all active components of the robotic manipulator, e.g., actuators and sensors, and as discussed above. As such, it houses one or more arms driven by the drive unit. The arm(s) are generally passive mechanisms, ie, the arm(s) do not include any active elements such as actuators and sensors. This is mainly due to the difficulties of degassing, power distribution and heat removal in a vacuum environment.

Referring to FIG. 2 , the substrate transfer device 12 (or vacuum compatible robot system) includes a drive unit 18 and an arm 20 . The driving unit 18 has two rotation axes. The arm 20 is coupled to a drive 18 . In this exemplary embodiment, the arm 20 includes a first link 22 , a second link 24 and an end-effector 26 . The first link 22 is directly attached to the first rotation shaft of the driving unit 18 . The second link 24 is coupled to the first link 22 via a first rotary joint 28 . The end-effector 26 is coupled to the second link 24 via a second rotary joint 30 . In the embodiment shown, the arm 20 has three axes of rotation 90 , 92 , 94 formed in the drive 18 and joints 28 , 30 . In this embodiment, the second link 24 is attached to a first pulley, a first belt/band attached to a second axis of rotation of the drive unit 18 and a second link 24 of the arm 20 . It is driven through a belt/band drive including a second pulley. The end-effector 26 is forced to face approximately radially relative to the drive 18 via another belt/band arrangement, which is pivotally coupled to the first link 22 . a first pulley, a second belt/band, and a fourth pulley attached to the end-effector 26 . In various other exemplary embodiments, any suitable drive, actuator, sensor or otherwise, in any combination and/or U.S. Pat. Patent No. 9,202,733 and U.S. Pat. may provide the features disclosed herein, as disclosed in Patent No. 8,716,909, all of which are incorporated herein by reference in their entirety.

Although the substrate transfer apparatus 12 has been described with respect to a vacuum robot, any suitable substrate transfer apparatus having the features as disclosed; Atmospheric or otherwise may be provided. The substrate transfer apparatus 12 has a controller 54 , a drive unit 18 , and an arm 20 , and is configured to transfer a substrate S. The controller 54 may have at least one processor 32 , at least one memory 34 and software or computer code 36 configured to control process inputs from the drive unit 18 and sensors. can Arm 20 is shown as a SCARA type arm and driven by drive unit 18 , although any suitable arm may be provided in alternative embodiments. Although the substrate transport apparatus 12 is described with reference to two link arms, any suitable number of links may be provided. Also, any suitable number of arms may be provided. Further, any combination of rotary and/or linear axes may be provided on any suitable arm.

The drive 18 forms a robot motor assembly. In this example, the robotic motor assembly comprising stators and rotors is configured to drive the first link 22 and shafts connected to one of the pulleys of the first link. Referring to FIG. 3, the driving unit 18 includes a housing that separates an environmental area 40 inside the driving unit 18 and inside the chamber 15 from the driving unit and an environmental area 42 outside the chamber ( 38). A position encoder reference member or disk is connected to each of the rotors or shafts of the drive 18 . 3 shows an example in which the position encoder reference member disk 44 is attached to the shaft/rotor 46 . The housing 38 of the motor assembly has an aperture 48 therethrough. The opening 48 is aligned with the position encoder reference member disk 44 . A positioning read-head 50 is attached to the housing 38 . When the rotor/shaft 46 rotates while the position encoder reference member disk 44 rotates, the read-head 50 reads the position, so that the read-head 50 senses the location or position of the disk 44 . - the head 50 is arranged in an opening 48 through the housing 38 . The output from the read-head 50 is supplied to the controller 54 . Another example is shown in Figure 3a, which is described in U.S. Pat. It schematically shows a direct-drive module of a robot, such as the exemplary robot depicted in FIG. 1 of Patent Application Publication No. 2014/0077637 , with shaft 46a , stator and rotor of motor 47 , direct drive module housing 38a, the encoder track or reference member 44a, bearing 49 and encoder sensor 60a.

Referring to FIG. 4 , in this embodiment, the position read-head 50 as a whole comprises a frame 56 , a light emitter 58 , a photosensor 60 , an environmental isolation barrier 62 and electrons. circuit 59 . In one type of exemplary embodiment, the sensor 60 is a plurality of photosensors arranged as an array for viewing at least one image, and the light emitter 58 includes a plurality of light emitters. An example of this is shown in Figure 4a as read-head 50'. As shown in FIG. 4B , in another alternative, as shown in FIG. 4B , the device may include multiple read-heads 50", 50'", which may contain different light emitter and photosensor configurations. It has but is attached to the housing 38 for reading the same reference member 44 .

Referring to FIG. 5 , in this exemplary embodiment, a first connection 64 is provided between the sensor 60 and the frame 56 , and between the separation barrier 62 and the frame 56 . is provided with a second connection 66 . However, as shown in FIG. 6 , the sensor 60 and separation barrier 62 may be a unitary assembly with the sensor frame having a single type of connection 68 to the housing 38 . The connections 64 , 66 , 68 may be statically fixed or adjustable. In the example shown in FIG. 4 , the connection portion 64 is statically fixed, the connection portion 66 is an elastically deflectable connection portion, and the connection portion 68 is adjustable.

In this exemplary embodiment, the environmental isolation barrier 62 is a transparent window and the photosensor 60 is a camera. A holder 70 is provided for holding the transparent window 62 . The holder 70 is biased in the direction of the opening 48 by a connection 66 to press the transparent window 62 against a seal 72 . Thus, the sealant 72 and the window 62 seal the opening 48 , forming an optically transparent barrier between the two environmental regions 40 , 42 in the opening 48 . Because the barrier 62 is optically transparent, the camera 60 can still see the image from the reference member 44 . Since the components of the read-head 50 including the camera 60 , the light emitter 58 and the electronic circuit 59 are all outside the environment area 40 , the There is no risk of outgassing from these components. Since the components of the read-head 50, including the camera 60, the light emitter 58 and the electronic circuit 59, are all outside the environment area 40, the read-head 50 Or, no special design or encasement of its components is required.

Having the features as described herein, a position encoder is integrated into a robot direct-drive module, for example a drive 18 or one of a number of drive modules assembled to form a drive 18 . can be For example, a position encoder track, on disk 44 , may be coupled to a driven part 46 of a direct-drive module, for example as in the exemplary embodiments shown in the figures. , the position read-head may be provided outside the housing 38 of the direct-drive module.

In one exemplary embodiment, as schematically depicted in FIG. 4 , the housing 38 of the direct-drive module may feature an opening (slot) 48 , the opening 48 being the arranged to provide an optical path (field of view) from the exterior of the housing of the direct-drive module to the position encoder track. The opening 48 may feature a separation barrier 62 for isolating the vacuum or other non-atmospheric environment inside the housing of the direct-drive module from the environment outside the housing of the direct-drive module. The separation barrier 62 may be made of, for example, a substantially transparent material such as glass or acrylic. The separation barrier 62 may be sealed against the housing of the direct-actuation module using, for example, an O-ring or bonded joint, or using any other suitable method.

The encoder track at reference number 44 may include features that can be used to sense the position of the encoder track. By way of example, the features may form an incremental track, which in some cases may be supplemented by an absolute track. As another example, the features can form a pattern that can be read using image processing techniques.

As shown in Fig. 4, the read-head 50 may be provided on the outside of the direct-drive module, so that the read-head 50 can position the encoder track through an opening in the housing of the direct-drive module. can detect The read-head may be attached in a substantially fixed manner to the housing of the direct-drive module, or in a movable manner to the housing of the direct-drive module to allow adjustment of the read-head relative to the encoder track. can be combined. The adjustment may include the distance between the read-head and the encoder track, and the orientation of the read-head with respect to the encoder track. Alternatively, the read-head may be held in any suitable manner proximate to the opening.

Still referring to FIG. 4 , the read-head may include an enclosure 56 and an optical system (including a sensor 60 ). The read-head may further include other components, for example, electronic components for controlling the read-head, processing data, and facilitating communication.

The optical system may be configured to detect the position of the encoder track relative to the read-head. By way of example, the optical system may include one or more light emitters, one or more light receivers, and other optical components such as lenses, mirrors and masks. The light emitter(s) and receiver(s) may be arranged to detect features on the encoder track. For example, the receiver(s) may detect the characteristics based on reflection of light generated by the emitter(s).

As another example, the optical system may include one or more light source(s), one or more digital camera(s), and other optical components such as lenses, mirrors and masks. The light source(s) may be arranged to provide illumination of the encoder track within the field of view of the digital camera(s). The digital camera(s) may be configured to periodically take pictures (images) of the encoder tracks. In order to determine the position of the encoder track relative to the encoder read-head, pictures may be processed by the encoder read-head and/or external to the encoder read-head, eg in the controller 54 . can be

In another exemplary embodiment, as schematically depicted in FIG. 7 , the housing 38 of the direct-drive module provides an optical path (field of view) of the position encoder track 44 from the outside of the housing of the direct-drive module. It may feature an opening (slot) 48 arranged to provide. The read-head 50a may be provided on the outside of the direct-drive module to sense the position of the encoder track 44 through an opening in the housing of the direct-drive module.

The encoder track 44 may include features that can be used to sense the position of the encoder track. By way of example, the features may form an incremental track, which in some cases may be supplemented by an absolute track. As another example, the features can form a pattern that can be read using image processing techniques.

The read-head 50a may include an enclosure 56a , a window 62 , and an optical system including a light emitter 58 and a photosensor 60 . The read-head 50a may further include other components, for example, electronic components for controlling the read-head, processing data, and facilitating communication.

7, the window 62 is disposed within the enclosure of the read-head, such that the optical system 58, 60 and the encoder track through an opening 48 in the housing 38 of the direct-drive module. A light path (field of view) can be provided between (44). The window 62 may be made of a substantially transparent material, for example glass or acrylic.

The optical system may be configured to detect the position of the encoder track 44 relative to the read-head. By way of example, the optical system may include one or more light emitter(s), one or more light receiver(s), and other optical components such as lenses, mirrors and masks. The light emitter(s) and receiver(s) may be arranged to detect features on the encoder track. For example, the receiver(s) may detect the characteristics based on reflection of light generated by the emitter(s). Light source(s) may be arranged to provide illumination of the encoder track within the field of view of the digital camera(s). The digital camera(s) 60 may be configured to periodically take pictures (images) of the encoder tracks. Pictures may be processed by the encoder read-head to determine the position of the encoder track relative to the encoder read-head.

The read-head 50a is connected to the housing 38 of the direct-drive module such that the window 62 of the read-head is sealed around the opening 48 of the direct-drive module relative to the housing 38 of the direct-drive module. ), thus separating the vacuum or other non-atmospheric environment inside the housing of the direct-actuation module from the environment outside the housing of the direct-actuation module. As a result, the components inside the enclosure of the read-head 50a are not exposed to the vacuum or other non-atmospheric environment inside the housing of the direct-drive module.

7, the read-head may be attached in a substantially fixed manner to the housing of the direct-drive module, and the window 62 may be attached using an O-ring or any other suitable sealant. It can be sealed in the housing 38 of the direct-drive module. Additional examples of sealant constructions are schematically depicted in FIGS. 8, 9 (seals compressed in a direction perpendicular to the installation direction of the read-head), and FIG. 10 (O-rings compressed along the installation direction of the read-head) . 8 shows a housing 38b having an opening 48b, and a read-head 50b comprising a frame 56b, a sealant 72b, a window 62b, and a light It has optical components including an emitter 58 and a sensor 60 . 9 shows a housing 38c having an opening 48c, and a read-head 50c comprising a frame 56c, a sealant 72b, a window 62b, and a light It has optical components including an emitter 58 and a sensor 60 . 10 shows a housing 38b having an opening 48b, and a read-head 50d comprising a frame 56c, a sealant 72d, a window 62d, and a light It has optical components including an emitter 58 and a sensor 60 . The window 62 provides adequate space for the sealant and, at the same time, can be shaped to allow for desirable proximal placement of the components of the sensor relative to the encoder track, as shown in FIG. 11 . 11 shows a housing 38b having an opening 48b, and a read-head 50e comprising a frame 56c, a sealant 72d, a window 62e, and a light It has optical components including an emitter 58 and a sensor 60 .

7-11 , the window 62 may simply be mechanically secured to the sensor's enclosure 56 , but need not be sealed, the sealing being directly-with the window 62 . It should be noted that between the housing 38 of the drive module. It should be noted that in the examples of Figures 7-11, the window 62 is not necessarily a separate part. The window 62 may conveniently be formed by a component of the optical system of the read-head, such as a lens, or any other suitable component.

As an alternative, the read-head may be coupled in a movable manner to the housing of the direct-drive module to allow adjustment of the sensor relative to the encoder track. The adjustment may include the distance between the read-head and the encoder track, and the orientation of the read-head relative to the encoder track (eg, pitch, roll and yaw). The window of the sensor may be sealed to the housing of the direct-actuation module by an O-ring, bellows, flexure, or any other suitable sealant that provides sufficient movement for the sensor while maintaining the seal.

In another exemplary embodiment, as schematically depicted in FIG. 12 , the housing of the direct-actuation module has an opening arranged to provide an optical path (field of view) of the position encoder track from outside the housing of the direct-drive module ( slots) can be characterized. A read-head may be provided on the outside of the direct-drive module to sense the position of the encoder track through an opening in the housing of the direct-drive module. 12 shows a housing 38 with an opening 48 and a read-head 50f comprising a frame 56f, a sealant 72, a window 62f, and a sealant 72f. ), and optical components including a light emitter 58 and a sensor 60 .

The encoder track contains features that can be used to sense the position of the encoder track. By way of example, the features may form an incremental track, which in some cases may be supplemented by an absolute track. As another example, the features can form a pattern that can be read using image processing techniques.

The read-head may include an enclosure, a window and an optical system. The read-head may further include other components, for example, electronic components for controlling the read-head, processing data, and facilitating communication.

As depicted in FIG. 12 , the window may be disposed within the enclosure of the read-head to provide an optical path (field of view) between the optical system and the encoder track through an opening in the housing of the direct-drive module. The window may be made of a substantially transparent material, for example glass or acrylic. The window may be sealed to the enclosure of the sensor using, for example, an O-ring or a bonded joint.

The optical system may be configured to detect the position of the encoder track relative to the read-head. By way of example, the optical system may include one or more light emitters, one or more light receivers, and other optical components such as lenses, mirrors and masks. The light emitter(s) and receiver(s) may be arranged to detect features on the encoder track. For example, the receiver(s) may detect the characteristics based on reflection of light generated by the emitter(s).

As another example, the optical system may include one or more light source(s), one or more digital camera(s), and other optical components such as lenses, mirrors and masks. The light source(s) may be arranged to provide illumination of the encoder track within the field of view of the digital camera(s). The digital camera(s) may be configured to periodically take pictures (images) of the encoder tracks. Pictures may be processed by the encoder read-head to determine the position of the encoder track relative to the encoder read-head.

the read-head may be attached to the housing of the direct-actuation module, such that the enclosure of the sensor is sealed around the opening of the direct-actuation module relative to the housing of the direct-actuation module and around the window of the read-head; Thus, the vacuum or other non-atmospheric environment inside the housing of the direct-drive module can be separated from the environment outside the direct-drive module, and also components inside the enclosure of the read-head can be separated from the vacuum inside the housing of the direct-drive module. or from the non-atmospheric environment. This prevents the components inside the enclosure of the read-head from being exposed to the vacuum or non-atmospheric environment inside the housing of the direct-drive module.

12 , the read-head may be attached in a substantially fixed manner to the housing of the direct-drive module, and the enclosure of the sensor may be directly attached using an O-ring or any other suitable sealant. - Can be sealed in the housing of the drive module. Further exemplary embodiments in which the window is sealed to the enclosure of the read-head and the enclosure of the read-head is sealed to the housing of the direct-drive module are schematically depicted in FIGS. 14 and 15 . 14 shows a housing 38h having an opening 48h, and a read-head 50h comprising a frame 56h, sealants 72h1, 72h2, and a window 62h. , and optical components including a light emitter 58 and a sensor 60 . 15 shows a housing 38h with an opening 48h, and a read-head 50i comprising a frame 56h, sealants 72h1, 72h2, and a window 62h. , and optical components including a light emitter 58 and a sensor 60 .

It should be noted that in the example of Figure 12, the window need not necessarily be a separate part. The window may conveniently be formed by a component of the optical system of the sensor, such as a lens, or by any other suitable component.

As an alternative, the read-head may be coupled in a movable manner to the housing of the direct-drive module to allow adjustment of the sensor relative to the encoder track. The adjustment may include the distance between the read-head and the encoder track, and the orientation of the read-head relative to the encoder track (eg, pitch, roll and yaw). The enclosure of the read-head may be sealed to the housing of the direct-drive module by an O-ring, bellows, flexure, or any other suitable sealant that provides sufficient movement to the read-head while maintaining a seal. can

In another exemplary embodiment, as schematically depicted in FIG. 13 , the housing of the direct-drive module has an opening arranged to provide an optical path (field of view) of the position encoder track from outside the housing of the direct-drive module. (slot) can be characterized. 13 shows a housing 38g and a read-head 50g having an opening 48g, the read-head 50g comprising frame members 56g1, 56g2, sealants 72g1, 72g2, a window 62g , and optical components including a light emitter 58 and a sensor 60 . Said sensor may be provided on the outside of the direct-drive module so as to be able to sense the position of the encoder track through an opening in the housing of the direct-drive module.

The encoder track may include features that can be used to sense the position of the encoder track. By way of example, the features may form an incremental track, and in some cases the incremental track may be supplemented by an absolute track. As another example, the features can form a pattern that can be read using image processing techniques.

The read-head may include a first enclosure, a window and an optical system. The read-head may further include other components, for example, electronic components for controlling the read-head, processing data, and facilitating communication.

13 , the window may be disposed within the first enclosure of the read-head, thereby providing an optical path (field of view) between the optical system and the encoder track through an opening in the housing of the direct-drive module. . The window may be mechanically secured to a first enclosure of the read-head and sealed to a second enclosure (window sealant in FIG. 13), neither of the first and second enclosures being a housing of a direct drive module . The second enclosure is then sealed to the housing of the direct-drive module (enclosure sealant in FIG. 13 ). This allows read-head housings that are never intended to act as a barrier between atmospheric and non-atmospheric environments to be used.

The window may be made of a substantially transparent material, for example glass or acrylic. Alternatively, as described with respect to the examples of FIGS. 6 to 12 , the window may conveniently be a component of the optical system of the read-head, eg a lens, other optical element affecting light, or any other It can be formed by suitable parts.

The window may be sealed to the first enclosure of the read-head using, for example, an O-ring or a bonded joint. If desired, the sealing may be achieved by the addition of a feature such as a flange to the window. Alternatively, the sealing may be achieved by use. This can be achieved by using features available in commercially available read-heads.

The optical system may be configured to detect the position of the encoder track relative to the read-head. By way of example, the optical system may include one or more light emitters, one or more light receivers, and other optical components such as lenses, mirrors and masks. The light emitter(s) and receiver(s) may be arranged to detect features on the encoder track. For example, the receiver(s) may detect the characteristics based on reflection of light generated by the emitter(s).

As another example, the optical system may include one or more light source(s), one or more digital camera(s), and other optical components such as lenses, mirrors and masks. The light source(s) may be arranged to provide illumination of the encoder track within the field of view of the digital camera(s). The digital camera(s) may be configured to periodically take pictures (images) of the encoder tracks. Pictures may be processed by the encoder read-head to determine the position of the encoder track relative to the encoder read-head.

The read-head may be attached to the housing of the direct-drive module such that the second enclosure is sealed against the housing of the direct-drive module. The second enclosure is then sealed to the window of the read-head, thereby isolating the vacuum or other non-atmospheric environment inside the housing of the direct-drive module from the environment outside the direct-drive module, and 2 It is possible to isolate the components inside the enclosure from the vacuum or non-atmospheric environment inside the housing of the direct-drive module. This prevents the components inside the second enclosure from being exposed to the vacuum or non-atmospheric environment inside the housing of the direct-drive module.

As an alternative, the second enclosure may be coupled in a movable manner to the housing of the direct-drive module to allow adjustment of the read-head relative to the encoder track. The adjustment may include the distance between the read-head and the encoder track, and the orientation of the read-head relative to the encoder track (eg, pitch, roll and yaw). The second enclosure may be sealed to the housing of the direct-drive module by an O-ring, bellows, flexure, or any other suitable sealant that provides sufficient movement for the read-head while maintaining the seal. .

Although the above exemplary embodiments show the read-head looking radially inward, the read-head may be configured to look radially outward, for example, to face the cylindrical surface of the interior of the disk, or to look upward or downward in the axial direction, for example to face one of the flat sides of the disk.

The features described herein are such that the disk of the optical encoder is in one environment (eg, a vacuum environment), and the components including the optical system and control electronics of the read-head of the optical encoder are in another environment (eg, the atmospheric environment). may be used to provide a drive device (eg, a robot drive device) having an optical encoder in the interior and there is a substantially transparent barrier between the disk and read-head components.

Although the exemplary embodiments show a read-head looking radially inward, the sensor may be configured to view the inner cylindrical surface of the disk radially outward, or in the axial direction (up or down) of the disk. It can be configured to look at one of the flat faces of 44 . Such a configuration is, for example, in U.S. It may be extended to linear applications including the exemplary linear robots described in Patent Publication Nos. 2015/0214086 A1, 2016/0229296 A1, and 2017/0036358 A1, which are incorporated herein by reference in their entirety. do.

An exemplary apparatus includes a frame configured to attach to the housing proximate to an aperture extending through the housing of a motor assembly; a position sensor coupled to the frame, including a camera; an environment separation barrier configured to couple to the housing at the opening, the environmental separation barrier being at least partially transparent, wherein the camera allows the camera to image the environment separation barrier and the interior of the housing through the opening is positioned relative to the camera so that it can be viewed. The environmental isolating barrier may be connected directly to the housing at the opening or indirectly connected to the housing, for example through a frame of the device, but the environmental isolating barrier may be connected to the opening providing an optical path through the housing. form at least part of its environmental closure.

The apparatus may include a seal configured to be disposed directly between the environmental isolation barrier and the housing of the motor assembly. The device may include a first sealant coupled directly between the environmental isolation barrier and the frame. The apparatus may include a second sealant configured to be disposed directly between the frame and the housing of the motor assembly. The apparatus may include a sealant and a barrier holder configured to press the environmental isolation barrier against the sealant, the barrier holder configured to be pressed towards the opening by the frame. The device may include, between the barrier holder and the frame, a connection resilient to allow the barrier holder to move relative to the frame, wherein when the frame is connected to the housing, the connection may be connected to the barrier. Deflect the holder towards the opening. The environmental isolation barrier may include a transparent window in direct contact with the frame and configured to be pressed towards the opening by the frame when the frame is coupled to the housing. The apparatus may include the housing, a rotor within the housing having a position reference member configured to be imaged by the camera, and at least one seal, and , the frame is connected to the housing with the at least one sealant and an environmental isolation barrier sealing the opening to isolate a first environmental region inside the housing from a second environmental region external to the housing. The frame may not be exposed to the first environment area inside the housing.

An exemplary method includes providing a read-head comprising a frame and a camera coupled to the frame; coupling the read-head to a housing of a motor assembly, wherein a frame of the read-head is coupled to the housing proximate to an aperture extending through the housing; and disposing an environmental isolating barrier in the opening to isolate a first environmental region inside the housing from a second environmental region in which the camera is disposed, wherein the environmental isolating barrier is at least partially transparent and positioned relative to the camera such that the camera can view an image inside the housing through the environmental isolation barrier and the opening.

The method may include placing a seal directly between the environmental isolation barrier and the housing of the motor assembly. The method may include connecting a first sealant directly between the environmental isolation barrier and the frame. The method may include disposing a second sealant directly between the frame and the housing of the motor assembly. The method may include a barrier holder biasing the environmental isolation barrier relative to a sealant, the barrier holder being pressed towards the opening by the frame. The method may include providing, between the barrier holder and the frame, a connection that is resilient to allow the barrier holder to move relative to the frame, wherein when the frame is connected to the housing, the The connection biases the barrier holder towards the opening. The environmental isolation barrier may include a transparent window that is in direct contact with the frame and is pressed towards the opening by the frame when the frame is connected to the housing. The method may include a rotor within the housing and a position reference member configured to be imaged by the camera, wherein the frame comprises the at least one sealant and the connected to the housing with an environmental isolation barrier for sealing the opening to isolate a first environmental region inside the housing from a second environmental region external to the housing. The frame may not be exposed to the first environment area inside the housing.

An exemplary method comprises illuminating a reference member disposed inside a housing of a motor assembly by a light emitter of a sensor, wherein the sensor is disposed at least partially outside of the housing; ; viewing an image of the reference member by a camera of the sensor, the camera disposed on an exterior of the housing, the image passing through and through an aperture of the housing and a transparent environmental separation barrier disposed in the aperture viewed by the camera through, the transparent environmental isolation barrier sealing a first environment inside the housing from a second environment having a sensor disposed therein, the camera disposed outside the first environment, the transparent an environmental separation barrier permitting the camera to view images originating from inside the housing while the camera is outside the first environment.

The example of FIG. 4 shows the housing of a direct-drive module. The examples of Figures 7-11 show the sealant disposed directly between the window and the housing of the direct-drive module. 12 and 14-15 show a seal between the window and the enclosure of the read-head, and another seal between the enclosure of the read-head and the housing of the direct-drive module. The example of FIG. 13 shows two enclosures.

Exemplary embodiments provide an apparatus comprising: a frame configured to attach to the housing proximate to an aperture extending through a housing of a motor assembly; at least one light emitter coupled to the frame; an array of photosensors coupled to the frame; and an environment separation barrier configured to couple to the housing at the opening, the environmental separation barrier being at least partially transparent and allowing the array of photosensors to pass through the environmental separation barrier and the opening into the housing It is positioned relative to the array of photosensors so that an image of the interior can be viewed.

An exemplary method is provided, the method comprising: providing a read-head comprising a frame, at least one light emitter coupled to the frame, and an array of photosensors coupled to the frame; coupling the read-head to a housing of a motor assembly, wherein a frame of the read-head is coupled to the housing proximate to an aperture extending through the housing; and disposing an environmental isolating barrier in the opening to isolate a first environmental region within the housing from a second environmental region having the array of photosensors disposed therein; wherein the environmental isolating barrier is at least partially is transparent and positioned relative to the array of photosensors such that the array of photosensors can view images inside the housing through the environmental isolation barrier and the opening.

An exemplary method is provided, the method comprising: illuminating a reference member disposed inside a housing of a motor assembly by at least one light emitter of a read-head; , wherein the read-head is at least partially disposed outside of the housing; and viewing at least one image of the reference member with an array of photosensors of the read-head, wherein the array of photosensors is disposed at least in part outside of the housing, the at least one image comprising: seen by the array of photosensors through an aperture of and through a transparent environmental isolating barrier disposed in the aperture, wherein the transparent environmental isolating barrier provides a first environment within the housing to which the array of photosensors is internal. seal from a second environment disposed in a second environment, wherein the array of photosensors is disposed outside of the first environment, and wherein the transparent environmental isolation barrier comprises the photosensor while the array of photosensors is outside of the first environment. allowing the array of devices to view at least one image originating from inside the housing.

It should be understood that the foregoing description is exemplary only. Various alternatives and modifications can be devised by those skilled in the art. For example, the features recited in the various dependent claims may be combined with each other in any suitable combination(s). Also, features of different embodiments described above may be selectively combined into a new embodiment. Accordingly, this description is intended to embrace all alternatives, modifications and variations included within the scope of the appended claims.

Claims (21)

a frame configured to attach to the housing proximate to an aperture extending through the housing of the motor assembly;
at least one light emitter coupled to the frame;
an array of photosensors coupled to the frame; and
an environment separation barrier configured to couple to the housing at the opening;
wherein said environmental isolation barrier is at least partially transparent and is disposed relative to said array of photosensors such that said array of photosensors can view an image inside said housing through said environmental isolation barrier and said opening;
and a seal, and a barrier holder adapted to press the environmental isolation barrier against the seal. The method of claim 1,
and the sealant is adapted to be disposed directly between the environmental isolation barrier and the housing of the motor assembly. The method of claim 1,
and the sealant comprises a first sealant coupled directly between the environmental isolation barrier and the frame. 4. The method of claim 3,
wherein the seal further comprises a second seal configured to be disposed directly between the frame and the housing of the motor assembly. The method of claim 1,
and the barrier holder is adapted to be pressed towards the opening by the frame. 6. The method of claim 5,
and a connection between the barrier holder and the frame that is resilient to allow the barrier holder to move with respect to the frame, wherein when the frame is connected to the housing, the connection engages the barrier holder with the opening. deflecting towards, the device. The method of claim 1,
wherein the environmental isolation barrier comprises a transparent window in direct contact with the frame and configured to be pressed towards the opening by the frame when the frame is coupled to the housing. The method of claim 1,
further comprising: the housing, a rotor within the housing having a position reference member configured to be imaged by the array of photosensors, and at least one seal; a frame connected to the housing with the at least one sealant and an environmental isolation barrier sealing the opening to isolate a first environmental region inside the housing from a second environmental region external to the housing. 9. The method of claim 8,
and the frame is not exposed to the first environmental area inside the housing. The method of claim 1,
wherein the array of photosensors comprises an array of cameras. providing a read-head comprising a frame, at least one light emitter coupled to the frame, and an array of photosensors coupled to the frame;
coupling the read-head to a housing of a motor assembly, wherein a frame of the read-head is coupled to the housing proximate to an aperture extending through the housing; and
disposing an environmental isolation barrier in the opening to isolate a first environmental region within the housing from a second environmental region having the array of photosensors disposed therein;
wherein said environmental isolation barrier is at least partially transparent and is disposed relative to said array of photosensors such that said array of photosensors can view an image inside said housing through said environmental isolation barrier and said opening;
wherein the environmental isolation barrier is biased relative to the seal by a barrier holder. 12. The method of claim 11,
and placing a seal directly between the environmental isolation barrier and the housing of the motor assembly. 12. The method of claim 11,
and connecting a first sealant directly between the environmental isolation barrier and the frame. 14. The method of claim 13,
and placing a second sealant directly between the frame and the housing of the motor assembly. 12. The method of claim 11,
wherein the barrier holder is pressed towards the opening by the frame. 16. The method of claim 15,
and providing, between the barrier holder and the frame, a resilient connection such that the barrier holder can move relative to the frame, wherein when the frame is connected to the housing, the connection is connected to the barrier holder. bias towards the opening. 12. The method of claim 11,
wherein the environmental isolation barrier comprises a transparent window that is in direct contact with the frame and is pressed towards the opening by the frame when the frame is connected to the housing. 12. The method of claim 11,
A rotor is within the housing and has a position reference member configured to be imaged by the array of photosensors, wherein the frame comprises the at least one sealant and a second member within the housing. connected to the housing with an environmental isolation barrier for sealing the opening to isolate one environmental region from a second environmental region external to the housing. 19. The method of claim 18,
wherein the frame is not exposed to the first environmental area inside the housing. 12. The method of claim 11,
wherein the array of photosensors comprises at least one camera. illuminating a reference member disposed within a housing of a motor assembly by at least one light emitter of a read-head, the read-head at least partially comprising the housing disposed on the outside of the;
viewing at least one image of the reference member by an array of photosensors of the read-head, wherein the array of photosensors is at least partially disposed outside of the housing, the at least one image of the housing seen by the array of photosensors through an aperture and through a transparent environmental isolating barrier disposed in the aperture, the transparent environmental isolating barrier facilitating a first environment within the housing into which the array of photosensors is disposed sealing from a disposed second environment, the array of photosensors disposed outside of the first environment, and wherein the transparent environmental isolation barrier protects the photosensors from the array of photosensors while the array of photosensors is outside of the first environment. allowing an array to view at least one image originating from inside the housing;
wherein the environmental isolation barrier is biased relative to the seal by a barrier holder.

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