JP7455794B2 - Robot drive with isolated optical encoder - Google Patents

Description

FIELD OF THE INVENTION Exemplary and non-limiting embodiments relate generally to position sensing, and more specifically to robot drive position sensors that include optical encoders.

Brief explanation of advanced technology

A septum between a non-optical encoder read head and an encoder disk is disclosed in US Patent Application Publication Nos. 2009/0243413 and 2015/0303764, which are incorporated herein by reference in their entirety.

Abstract

The following summary is given by way of example only. This abstract does not limit the scope of the claims.

In one aspect, an exemplary embodiment of an apparatus is provided. The apparatus includes: a frame configured to be mounted to a housing of a motor assembly proximate an opening extending through the housing; an optical sensor including a camera connected to the frame; an environmental separation wall configured to connect to the housing at an opening. The environmental separation wall is at least partially transparent and positioned relative to the camera such that the camera can view an image within the housing through the environmental separation wall and the opening.

In another aspect, a method is provided as follows. The method includes providing a readhead that includes a frame and a camera connected to the frame, and connecting the readhead to a housing of a motor assembly. wherein the frame of the readhead is connected to the housing proximate an opening extending through the housing. The method further includes disposing an environmental separation wall in the opening to separate a first environmental area within the housing from a second environmental area within which the camera is disposed. The environmental separation wall is at least partially transparent and positioned relative to the camera such that the camera can view an image within the housing through the environmental separation wall and the opening.

In another aspect, a method is provided as follows. The method includes: illuminating a reference member located within the housing by at least one light emitter of a readhead located at least partially outside a housing of a motor assembly; and by a light sensor array of the readhead. , projecting at least one image of the reference member. the optical sensor array is disposed at least partially outside the housing, and the image is projected by the optical sensor array through an opening in the housing and through a transparent environmental separation wall disposed in the opening. . The transparent environmental separation wall seals a first environment inside the housing from a second environment within which the optical sensor array is disposed. The photosensor array is located outside the first environment, and the transparent environment separation wall allows the at least one image arriving from inside the housing through the environment separation wall and the opening to be connected to the photosensor array. allows the image to be reflected.

The foregoing aspects and other features will be explained in the following description, with reference to the following accompanying drawings.

FIG. 1 is a schematic diagram of a substrate processing apparatus.

FIG. 2 is a diagram showing some of the components of the apparatus shown in FIG.

FIG. 3 is a schematic diagram showing some of the components shown in FIGS. 1 and 2.

3A is a diagram illustrating another exemplary embodiment of the components shown in FIGS. 1 and 2. FIG.

FIG. 4 is a schematic diagram showing some of the components shown in FIG. 3.

FIG. 4A is a schematic diagram illustrating an example of the read head shown in FIG. 4.

FIG. 4B is a schematic diagram showing an example in which there are a plurality of reading heads shown in FIG. 4.

FIG. 5 is a diagram showing an example of the connection configuration type of the sensor shown in FIGS. 3 and 4. In FIG.

FIG. 6 is a diagram illustrating an example of the type of connection of the sensor to the housing shown in FIGS. 3 and 4.

FIG. 7 is a diagram similar to FIG. 4 showing another exemplary embodiment.

FIG. 8 is a diagram similar to FIG. 4 showing another exemplary embodiment.

FIG. 9 is a diagram similar to FIG. 4 showing another exemplary embodiment.

FIG. 10 is a diagram similar to FIG. 4 showing another exemplary embodiment.

FIG. 11 is a diagram similar to FIG. 4 showing another exemplary embodiment.

FIG. 12 is a diagram similar to FIG. 4 showing another exemplary embodiment.

FIG. 13 is a diagram similar to FIG. 4 showing another exemplary embodiment.

FIG. 14 is a diagram similar to FIG. 4 showing another exemplary embodiment.

FIG. 15 is a diagram similar to FIG. 4 showing another exemplary embodiment.

Detailed explanation of examples

Referring to FIG. 1, a top plan schematic view of an exemplary substrate processing apparatus 10 including a substrate transport apparatus 12 is shown. Although the invention will be described with reference to embodiments shown in the drawings, it will be understood that it may be implemented with various other aspects of the embodiments. Also, any suitable size, shape, or type of elements or materials can be used.

The substrate processing apparatus 10 includes, in addition to a substrate transfer apparatus 12, a plurality of substrate processing chambers 14 connected to a vacuum chamber 15 and a substrate cassette elevator 16. The transport device 12 is disposed at least partially within the chamber 15 and is configured to transport a flat substrate, such as a semiconductor wafer or a flat display, between the chamber 14 and the elevator 16. In other embodiments, transport apparatus 12 may be used with any suitable type of substrate processing equipment.

Conventional vacuum environment robot manipulators typically include a drive that houses all the active parts of the robot manipulator, such as actuators and sensors, and one or more arms driven by the drive. Arms are usually passive mechanisms. That is, the arm does not include active parts such as actuators or sensors. This is primarily due to the difficulty of outgassing, power distribution, and heat removal in a vacuum environment.

Referring also to FIG. 2, the substrate transfer device 12 (or vacuum compatible robot system) includes a drive unit 18 and an arm 20. The drive unit 18 includes two rotating shafts. Arm 20 is coupled to drive portion 18 . In the exemplary embodiment, arm 20 includes a first link 22, a second link 24, and an end effector 26. The first link 22 is directly attached to the first rotating shaft of the drive unit 18 . The second link 24 is coupled to the first link 22 via a first revolute joint 28 . End effector 26 is coupled to second link 24 via a second revolute joint 30. In the embodiment shown, the arm 20 comprises three axes of rotation 90, 92, 94 formed at the drive part 18 and the joints 28, 30, respectively. In this embodiment, the second link 24 is driven via a belt/band drive. The belt/band drive may include a first pulley, a first belt/band, and a second pulley. The first pulley is attached to the second rotation axis of the drive unit 18 and the second pulley is attached to the second link 24 of the arm 20. End effector 26 is constrained to point generally radially with respect to drive 18 via another belt/band mechanism. Another belt/band mechanism may include a third pulley, a second belt/band, and a fourth pulley. A third pulley is pivotally connected to the first link 22 and a fourth pulley is attached to the end effector 26. In various exemplary embodiments, any suitable drive, actuator, sensor, etc. may have the features disclosed herein and described in U.S. Pat. Nos. 9,202,733 and 8,716. ,909 and/or with features as disclosed in that patent. All of these references are incorporated herein by reference in their entirety.

Although substrate transfer apparatus 12 is described in connection with a vacuum robot, any suitable substrate transfer apparatus, atmospheric or otherwise, may be provided with features as described in this disclosure. The substrate transport device 12 includes a controller 54, a drive unit 18, and an arm 20, and is configured to transport the substrate S. Controller 54 may include at least one processor 32, at least one memory 34, and software or computer code 36 configured to control drive 18 and process input from the sensors. Arm 20 is shown as a SCARA (Selective Compliance Assembly Robot Arm) arm and is driven by drive 18, but in alternative embodiments any suitable arm may be provided. be able to. Although substrate transport apparatus 12 is shown with a two-link arm, any suitable number of links may be provided. Also, any suitable number of arms may be provided. Additionally, any combination of rotary and/or linear axes may be provided on any suitable arm.

Drive 18 forms a robot motor assembly. In this example, the robot motor assembly includes a stator and a rotor. These stators and rotors are configured to drive a shaft connected to the first link 22 and a shaft connected to one of the pulleys within the first link. Referring also to FIG. 3, the drive portion 18 includes a housing 38. As shown in FIG. Housing 38 separates an environmental area 40 inside the drive 18 and chamber 15 from an environmental area 42 outside the drive and chamber. A position encoder reference member or disk is connected to each of the rotors or shafts of the drive 18. An example of this is shown in FIG. Here, a position encoder reference member disk 44 is attached to a shaft/rotor 46. Motor assembly housing 38 has an opening 48 therethrough. Opening 48 is aligned with position encoder reference member disk 44 . A position reading head 50 is attached to the housing 38 . A position read head 50 is mounted in an opening 48 through the housing 38 to sense the location or position of the position encoder reference member disk 44 as it rotates in response to rotation of the rotor/shaft 46. Placed. Output from read head 50 is provided to controller 54 . Another example is shown in Figure 3A. FIG. 3A schematically depicts a direct drive module of a robot, such as the exemplary robot as shown in FIG. 1, in US Patent Application Publication No. 2014/0077637. Shown in this view are shaft 46a, stator and rotor of motor 47, direct drive module housing 38a, encoder track or reference member 44a, bearing 49, and encoder sensor 60a.

Referring also to FIG. 4, in this embodiment, the position read head 50 generally includes a frame 56, a light emitter 58, a light sensor 60, an environmental separation wall 62, and an electronic circuit 59. In one type of exemplary embodiment, sensor 60 is a plurality of light sensors arranged in an array to project at least one image, and light emitter 58 includes a plurality of light emitters. An example of this is shown in FIG. 4A with a read head 50'. In another embodiment, as shown in FIG. 4B, the device includes multiple read heads 50'', 50'' mounted on the housing 38 and reading the same reference member 44, but with different emitter and light sensor configurations. ' may also be provided.

Referring also to FIG. 5, the exemplary embodiment provides a first connection 64 between the sensor 60 and the frame 56 and a second connection 66 between the separation wall 62 and the frame 56. However, as shown in FIG. 6, the sensor 60 and separation wall 62 may be an integral assembly with the sensor frame and may include one type of connection 68 to the housing 38. Connections 64, 66, 68 may be fixedly attached or adjustable. In the example shown in Figure 4, connection 64 is fixedly attached, connection 66 is a resiliently deflectable connection, and connection 68 is adjustable.

In this exemplary embodiment, environmental separation wall 62 is a transparent window and optical sensor 60 is a camera. A holding portion 70 is provided to hold the transparent window 62. The holding part 70 is connected to the frame 56 by a connecting part 66. The holding portion 70 is biased toward the opening 48 by the connecting portion 66 and presses the transparent window 62 against the seal 72. This seals the opening 48 with the seal 72 and window 62 and forms an optically transparent partition between the two environmental regions 40, 42 at the opening 48. Because septum 62 is optically transparent, camera 60 can capture images from reference member 44 . All components of readhead 50 including camera 60, emitter 58, and electronics 59 are outside environmental region 40, so there is no risk of outgassing from these components within region 40. All components of readhead 50, including camera 60, emitter 58, and electronics 59, are outside of environmental area 40, so no special design or storage of readhead 50 or its components is required.

Position encoders may be incorporated into robot direct drive modules with the features described herein. The robot direct drive module is, for example, the drive section 18 or one of a plurality of drive modules that are assembled to form the drive section 18 . For example, as shown in the exemplary embodiment shown in the drawings, a position encoder track, such as on a disk 44, may be coupled to the driven portion 46 of the direct drive module, with a position read head external to the housing 38 of the direct drive module. may be provided.

In an exemplary embodiment, as shown schematically in FIG. 4, the direct drive module housing 38 is arranged to provide an optical path for the position encoder track from outside the direct drive module housing. An opening (slot) 48 may also be a feature. Opening 48 may feature a separation wall 62 that separates a vacuum or other non-atmospheric environment inside the housing of the direct drive module from an environment outside the housing of the direct drive module. Separation wall 62 may be made of a substantially transparent material, such as glass or acrylic. The separation wall 62 may be sealed to the housing of the direct drive module using, for example, an O-ring, a mating fitting, or the like, or in any other suitable manner.

The encoder track on the reference member 44 may have features that can be used for sensing the location of the encoder track. By way of example, these features may be incremental tracks, and in some cases the incremental tracks may be supplemented by absolute tracks. As another example, these features may be patterns that can be decoded using image processing techniques.

As shown in FIG. 4, a read head 50 may be provided on the outside of the direct drive module so that the location of the encoder track can be sensed through an opening in the housing of the direct drive module. The read head may be substantially fixedly mounted to the housing of the direct drive module or may be movably coupled to the housing of the direct drive module to allow adjustment of the read head relative to the encoder track. good. This adjustment may include the distance between the read head and the encoder track, and the orientation of the read head relative to the encoder track (eg, pitch, roll, and yaw). Alternatively, the readhead may be held in the vicinity of the aperture in any suitable manner.

Still referring to FIG. 4, the readhead may include an enclosure 56 and an optical system (including a sensor 60). The readhead may further include other components such as electronic components for controlling the readhead, processing data, and facilitating communication.

The optical system may be configured to detect the position of the encoder track relative to the read head. By way of example, an optical system may include one or more emitters, one or more receivers, and other optical elements such as lenses, mirrors, masks, etc. The emitter and receiver may be arranged to detect features on the encoder track. For example, a light receiver may detect a feature based on the reflection of light produced by a light emitter.

As another example, an optical system may include one or more light sources, one or more digital cameras, and other optical elements such as lenses, mirrors, masks, etc. The light source may be arranged to provide illumination of the encoder track in the field of view of the digital camera. A digital camera may be arranged to periodically take pictures (images) of the encoder track. These photographs may be processed by the encoder read head and/or external to the encoder read head, such as controller 54, to identify the location of the encoder track relative to the encoder read head.

In another exemplary embodiment, as shown schematically in FIG. 7, the direct drive module housing 38 is arranged to provide an optical path (field of view) for the position encoder track 44 from outside the direct drive module housing. It may also be characterized by an opening (slot) 48. The read head 50a may be provided on the outside of the direct drive module so that the location of the encoder track 44 can be sensed through an opening in the housing of the direct drive module.

Encoder track 44 may have features that can be used for sensing the location of the encoder track. By way of example, these features may be incremental tracks, and in some cases the incremental tracks may be supplemented by absolute tracks. As another example, these features may be patterns that can be decoded using image processing techniques.

Read head 50a may include an enclosure 56a, a window 62, and an optical system including 58,60. Readhead 50a may further include other components such as electronic components for controlling the readhead, processing data, and facilitating communications.

As shown in FIG. 7, a window is provided in the readhead enclosure to provide an optical path (field of view) between the optics 58, 60 and the encoder track 44 through the opening 48 in the housing 38 of the direct drive module. 62 may be provided. Window 62 may be comprised of a substantially transparent material such as glass or acrylic.

The optical system may be configured to detect the position of encoder track 44 relative to the read head. By way of example, an optical system may include one or more emitters, one or more receivers, and other optical elements such as lenses, mirrors, masks, etc. The emitter and receiver may be arranged to detect features on the encoder track. For example, a light receiver may detect a feature based on the reflection of light produced by a light emitter. The light source may be arranged to provide illumination of the encoder track in the field of view of the digital camera. Digital camera 60 may be arranged to periodically take pictures (images) of the encoder track. These photographs may be processed by the encoder read head to identify the location of the encoder track relative to the encoder read head.

The read head 50a is attached to the direct drive module housing 38 and the read head window 62 is sealed to the direct drive module housing 38 around the direct drive module opening 48, thereby reducing the vacuum inside the direct drive module housing. or other non-atmospheric environment may be isolated from the environment outside the direct drive module. This ensures that the components inside the enclosure of the read head 50a are not exposed to the vacuum or other non-atmospheric environment inside the housing of the direct drive module.

As shown in FIG. 7, the read head may be substantially fixedly attached to the housing of the direct drive module, and the window 62 may be attached to the housing 38 of the direct drive module using an O-ring or any other suitable seal. It may be sealed. Further examples of seal configurations are schematically shown in Figures 8, 9 (seal compressed perpendicular to the readhead installation direction) and Figure 10 (O-ring compressed along the readhead installation direction). It shows. FIG. 8 shows housing 38b and read head 50b. Housing 38b includes an opening 48b, and readhead 50b includes a frame 56b, a seal 72b, a window 62b, and optical elements including a light emitter 58 and a sensor 60. FIG. 9 shows housing 38c and read head 50c. Housing 38c includes an opening 48c, and readhead 50c includes a frame 56c, a seal 72b, a window 62b, and optical elements including a light emitter 58 and a sensor 60. FIG. 10 shows housing 38b and read head 50d. Housing 38b includes an opening 48b, and readhead 50d includes a frame 56c, a seal 72d, a window 62d, and optical elements including a light emitter 58 and a sensor 60. The window 62 may be shaped to provide sufficient space for sealing while still bringing the sensor components into the desired proximity to the encoder track, as shown in FIG. FIG. 11 shows housing 38b and read head 50e. Housing 38b includes an opening 48b, and readhead 50e includes a frame 56c, a seal 72d, a window 62e, and optical elements including a light emitter 58 and a sensor 60.

In all of the exemplary configurations of FIGS. 7-11, the window 62 is not necessarily sealed to the sensor enclosure 56, but may only be mechanically secured; Note that this occurs between the housing 38 of the direct drive module. Note that the window 62 in the examples of FIGS. 7-11 does not have to be a separate component. The window 62 may be conveniently formed by a component such as a lens of the readhead optics, or by any other suitable component.

Alternatively, the readhead may be movably coupled to the housing of the direct drive module to allow adjustment of the sensor relative to the encoder track. This adjustment may include the distance between the read head and the encoder track, and the orientation of the read head relative to the encoder track (eg, pitch, roll, and yaw). The sensor window may be sealed to the direct drive module housing by an O-ring, bellows, flexure, or any other suitable seal that provides sufficient range of motion for the sensor while maintaining a seal.

In yet another exemplary embodiment, as schematically shown in FIG. 12, the housing of the direct drive module is arranged to provide an optical path (field of view) for the position encoder track from outside the housing of the direct drive module. It may also be characterized by an opening (slot). The read head may be provided on the outside of the direct drive module so that the location of the encoder track can be sensed through an opening in the housing of the direct drive module. FIG. 12 shows the housing 38 and read head 50f. Housing 38 includes an opening 48 and readhead 50f includes a frame 56f, a seal 72, a window 62f, a seal 72f, and optical elements including a light emitter 58 and a sensor 60.

The encoder track may have features that can be used for sensing the location of the encoder track. By way of example, these features may be incremental tracks, and in some cases the incremental tracks may be supplemented by absolute tracks. As another example, these features may be patterns that can be decoded using image processing techniques.

The readhead may include an enclosure, a window, and an optical system. The readhead may further include other components such as electronic components for controlling the readhead, processing data, and facilitating communications.

As shown in FIG. 12, a window may be provided in the readhead enclosure to provide an optical path (field of view) between the optics and the encoder track through an opening in the housing of the direct drive module. The window may be made of a substantially transparent material such as glass or acrylic. The window may be sealed to the sensor enclosure using, for example, an O-ring or a mating fitting.

The optical system may be configured to detect the position of the encoder track relative to the read head. By way of example, an optical system may include one or more emitters, one or more receivers, and other optical elements such as lenses, mirrors, masks, etc. The emitter and receiver may be arranged to detect features on the encoder track. For example, a light receiver may detect a feature based on the reflection of light produced by a light emitter.

As another example, an optical system may include one or more light sources, one or more digital cameras, and other optical elements such as lenses, mirrors, masks, etc. The light source may be arranged to provide illumination of the encoder track in the field of view of the digital camera. A digital camera may be arranged to periodically take pictures (images) of the encoder track. These photographs may be processed by the encoder read head to identify the location of the encoder track relative to the encoder read head.

Attach the readhead to the direct-drive module housing and seal the sensor enclosure to the direct-drive module housing around the direct-drive module opening and around the readhead window to reduce the vacuum inside the direct-drive module housing. or other non-atmospheric environment may be isolated from the environment outside the direct drive module, and components within the readhead enclosure may be further isolated from the vacuum or other non-atmospheric environment within the housing of the direct drive module. This prevents components inside the readhead enclosure from being exposed to the vacuum or other non-atmospheric environment inside the direct drive module housing.

As shown in FIG. 12, the read head may be substantially fixedly attached to the housing of the direct drive module, and the sensor enclosure may be attached to the housing of the direct drive module using an O-ring or any other suitable seal. It may be sealed. Further exemplary embodiments are shown in FIGS. 14 and 15. Here, a window is sealed to a readhead enclosure, and the readhead enclosure is sealed to a housing of a direct drive module. FIG. 14 shows the housing 38h and the read head 50h. Housing 38h includes an opening 48h, and readhead 50h includes a frame 56h, seals 72h1, 72h2, a window 62h, and optical elements including a light emitter 58 and a sensor 60. FIG. 15 shows the housing 38h and the read head 50i. The housing 38h includes an opening 48h, and the readhead 50i includes a frame 56i, seals 72h1, 72h2, a window 62h, and optical elements including a light emitter 58 and a sensor 60.

The window in the example of FIG. 12 need not be a separate component. The window may conveniently be formed by a component such as a lens of the optical system of the sensor, or by any other suitable component.

Alternatively, the read head may be movably coupled to the housing of the direct drive module to allow adjustment of the read head relative to the encoder track. This adjustment may include the distance between the read head and the encoder track, and the orientation of the read head relative to the encoder track (eg, pitch, roll, and yaw). The read head enclosure may be sealed to the direct drive module housing by an O-ring, bellows, flexure, or any other suitable seal that provides sufficient range of motion for the read head while maintaining a seal. .

In yet another exemplary embodiment, as schematically shown in FIG. 13, the housing of the direct drive module is arranged to provide an optical path (field of view) for the position encoder track from outside the housing of the direct drive module. It may also be characterized by an opening (slot). Figure 13 shows housing 38g and read head 50g. The housing 38g includes an opening 48g, and the readhead 50g includes frame members 56g1, 56g2, seals 72g1, 72g2, a window 62g, and optical elements including a light emitter 58 and a sensor 60. A sensor may be provided on the outside of the direct drive module so that the location of the encoder track can be sensed through an opening in the housing of the direct drive module.

The encoder track may have features that can be used for sensing the location of the encoder track. By way of example, these features may be incremental tracks, and in some cases the incremental tracks may be supplemented by absolute tracks. As another example, these features may be patterns that can be decoded using image processing techniques.

The readhead may include a first enclosure, a window, and an optical system. The sensor may further include other components such as electronic components for controlling the readhead, processing data, and facilitating communication.

As shown in Figure 13, a window may be provided in the first enclosure of the read head to provide an optical path (field of view) between the optics and the encoder track through an opening in the housing of the direct drive module. good. The window may be mechanically secured to the first enclosure of the readhead and sealed to the second enclosure (window seal in Figure 13), where neither enclosure is the housing of the direct drive module. . Thereafter, a second enclosure may be sealed to the housing of the direct drive module (enclosure seal of FIG. 13). This ensures that the readhead enclosure is not intended to act as a barrier between the atmospheric environment and the non-atmospheric environment in which it is used.

The window may be made of a substantially transparent material such as glass or acrylic. Alternatively, as described in the examples of FIGS. 6 to 12, the window may be provided by a component such as a lens of the readhead optics, another optical component that affects the light, or any other suitable component. It may be formed as desired.

The window may be sealed to the first enclosure of the readhead using, for example, an O-ring or a mating fitting. If desired, sealing may be accomplished by adding features such as flanges to the window. Alternatively, the sealing may be achieved using features available in commercially available readheads.

The optical system may be configured to detect the position of the encoder track relative to the read head. By way of example, an optical system may include one or more emitters, one or more receivers, and other optical elements such as lenses, mirrors, masks, etc. The emitter and receiver may be arranged to detect features on the encoder track. For example, a light receiver may detect a feature based on the reflection of light produced by a light emitter.

As another example, an optical system may include one or more light sources, one or more digital cameras, and other optical elements such as lenses, mirrors, masks, etc. The light source may be arranged to provide illumination of the encoder track in the field of view of the digital camera. A digital camera may be arranged to periodically take pictures (images) of the encoder track. These photographs may be processed by the encoder read head to identify the location of the encoder track relative to the encoder read head.

The read head may be attached to the direct drive module housing and the second enclosure may be sealed to the direct drive module housing. A second enclosure is then sealed to the readhead window to isolate the vacuum or other non-atmospheric environment inside the housing of the direct drive module from the environment outside the direct drive module; The components may be isolated from the vacuum or other non-atmospheric environment inside the housing of the direct drive module. This prevents components inside the second enclosure from being exposed to the vacuum or other non-atmospheric environment inside the housing of the direct drive module.

Alternatively, a second enclosure may be movably coupled to the housing of the direct drive module to allow adjustment of the read head relative to the encoder track. This adjustment may include the distance between the read head and the encoder track, and the orientation of the read head relative to the encoder track (eg, pitch, roll, and yaw). The second enclosure may be sealed to the direct drive module housing by an O-ring, bellows, flexure, or any other suitable seal that provides sufficient range of motion for the readhead while maintaining a seal. .

In the exemplary embodiments described above, the read head is oriented radially inwardly, but may also be oriented radially outwardly, e.g., pointing toward the cylindrical inner surface of the disk, or axially upwardly or downwardly. For example, it may be arranged to point to one of the planes of the disc.

The features described herein may be used to provide a drive mechanism (eg, a robot drive mechanism) that includes an optical encoder. where the disk of this optical encoder is in one environment (e.g. a vacuum environment) and the components of the read head of the optical encoder, including optics and control electronics, are in another environment (e.g. an atmospheric environment) and the disk and , there is a substantially transparent partition between the components of the readhead.

In the exemplary embodiment, the read head is oriented radially inwardly, but the sensor is oriented radially outwardly to the cylindrical inner surface of the disk or axially to one of the planes of the disk 44. It may be arranged so as to face the direction (upward or downward). This arrangement may be extended to linear applications, including, for example, the exemplary linear robots described in U.S. Patent Application Publication Nos. 2015/0214086, 2016/0229296, and 2017/0036358. . These references are incorporated herein by reference in their entirety.

An example apparatus includes: a frame configured to be mounted to a housing of a motor assembly proximate an opening extending through the housing; and a position sensor including a camera connected to the frame. an environmental separation wall configured to connect to the housing at the opening. The environmental separation wall is at least partially transparent and positioned relative to the camera such that the camera can view an image within the housing through the environmental separation wall and the opening. The environmental separation wall may be directly connected to the housing at the opening or indirectly connected to the housing, for example via the frame of the device. However, the environmental separation wall at least partially constitutes an environmental seal of the opening through the housing and also provides an optical path.

The apparatus may include a seal configured to be placed directly between the environmental separation wall and the housing of the motor assembly. The device may include a first seal connected directly between the environmental separation wall and the frame. The device may include a second seal configured to be placed directly between the frame and the housing of the motor assembly. The apparatus may include a seal and a septum retainer configured to press the environmental separation wall against the seal. The partition wall holder is configured to be pressed toward the opening by the frame. The device may include an elastic connection between the bulkhead retainer and the frame so that the bulkhead retainer can move relative to the frame, and the frame is connected to the housing. The connecting portion urges the partition wall holding portion toward the opening. The environmental separation wall may be a transparent window, the transparent window being in direct contact with the frame, such that when the frame is connected to the housing, the transparent window is pressed by the frame into the opening. It is composed of The apparatus may include the housing, a rotor within the housing and comprising a position reference member configured to be imaged by the camera, and at least one seal. The frame is connected to the housing by the at least one seal, and the environmental separation wall seals the opening, thereby separating a first environmental area inside the housing from a second environmental area outside the housing. Separate from. The frame may not be exposed to the first environmental region inside the housing.

An example method may include providing a readhead that includes a frame and a camera connected to the frame, and connecting the readhead to a housing of a motor assembly. wherein the frame of the readhead is connected to the housing proximate an opening extending through the housing. The method may further include disposing an environmental separation wall in the opening to separate a first environmental area within the housing from a second environmental area within which the camera is disposed. The environmental separation wall is at least partially transparent and positioned relative to the camera such that the camera can view an image within the housing through the environmental separation wall and the opening.

The method may include disposing a seal directly between the environmental separation wall and the housing of the motor assembly. The method may include connecting a first seal directly between the environmental separation wall and the frame. The method may include disposing a second seal directly between the frame and the housing of the motor assembly. The method may include providing a septum retainer that urges the environmental separation wall against a seal, the septum retainer being urged by the frame toward the opening. The method may include providing an elastic connection between the bulkhead retainer and the frame so that the bulkhead retainer is movable relative to the frame, and the frame is connected to the housing. Then, the connecting portion urges the partition wall holding portion toward the opening. The environmental separation wall may be a transparent window, the transparent window being in direct contact with the frame, and when the frame is connected to the housing, the transparent window is pressed by the frame into the opening. There may be a rotor within the housing, the rotor may include a position reference member configured to be imaged by the camera, and the frame is connected to the housing by at least one seal. and the environmental separation wall seals the opening, thereby isolating a first environmental area inside the housing from a second environmental area outside the housing. The frame may not be exposed to the first environmental region inside the housing.

An exemplary method includes: illuminating a reference member located within the housing with a light emitter of a sensor located outside the housing of a motor assembly; and a camera located outside the housing of the sensor; and projecting an image of the reference member. The image is viewed by the camera through an opening in the housing and through a transparent environmental separation wall disposed in the opening, the transparent environmental separation wall defining a first environment inside the housing. The sensor is sealed from a second environment within which the camera is located, and the transparent environment separation wall seals the camera from a second environment within which the camera is located. The camera can also capture the image from inside the housing.

The example of FIG. 4 shows a viewing window in the housing of the direct drive module. The examples of Figures 7 to 11 show a seal placed directly between the window and the housing of the direct drive module. The examples of FIGS. 12, 14, and 15 include a seal between the window and the read head enclosure and another seal between the read head enclosure and the housing of the direct drive module. It shows. The example in Figure 13 shows two enclosures.

Exemplary embodiments of devices may be provided. The apparatus includes: a frame configured to be mounted to a housing of a motor assembly proximate an opening extending through the housing; at least one light emitter connected to the frame; an environmental separation wall configured to connect to the housing at the opening. the environmental separation wall is at least partially transparent and positioned relative to the optical sensor array such that the optical sensor array can project an image within the housing through the environmental separation wall and the opening; be done.

An example method may be provided. The method includes providing a readhead comprising a frame, at least one light emitter connected to the frame, and a light sensor array connected to the frame, and connecting the readhead to a housing of a motor assembly. Including. wherein the frame of the readhead is connected to the housing proximate an opening extending through the housing. The method further includes disposing an environmental separation wall in the opening to separate a first environmental region within the housing from a second environmental region within which the optical sensor array is disposed. the environmental separation wall is at least partially transparent and positioned relative to the optical sensor array such that the optical sensor array can project an image within the housing through the environmental separation wall and the opening; be done.

An example method may be provided. The method includes: illuminating a reference member located within the housing with at least one light emitter of a readhead located at least partially outside a housing of a motor assembly; projecting at least one image of the reference member by a photosensor array located at least partially externally. The at least one image is viewed by the optical sensor array through an opening in the housing and through a transparent environmental separation wall disposed in the opening, the transparent environmental separation wall 1 environment from a second environment within which the optical sensor array is disposed, the optical sensor array is positioned external to the first environment, and the transparent environmental separation wall seals the Even though the photosensor array is outside the first environment, the photosensor array can project the at least one image from inside the housing.

It should also be noted that the above description is merely an example. Various variations and modifications will occur to those skilled in the art. For example, the features recited in the various dependent claims may be combined with each other in any suitable combination. In addition, features from the various embodiments described above may be selectively combined into new embodiments. Accordingly, this specification is intended to include all changes, modifications, and variations that fall within the scope of the appended claims.

Claims (10)

illuminating a reference member located inside the housing by a plurality of individual light emitters of a readhead located at least partially outside the housing of the motor assembly;
projecting at least one image of the reference member by a photosensor array of a plurality of individual photosensors of the readhead;
including;
the optical sensor array is located at least partially external to the housing;
the image is projected by the optical sensor array through an opening in the housing and through a transparent environmental separation wall disposed in the opening;
the transparent environmental separation wall seals a first environment inside the housing from a second environment in which the optical sensor array is disposed;
The optical sensor array is located outside the first environment, and the transparent environmental separation wall allows the at least one image arriving from the interior of the housing through the environmental separation wall and the opening to be connected to the optical sensor. allows arrays to be mirrored,
A method,
a septum retainer presses the environmental separation wall against a seal;
the partition wall holding portion is pressed against the opening by a frame;
the frame is mounted proximate to the opening;
A method using a resilient connection between the septum retainer and the frame to allow the septum retainer to move relative to the frame . A method,
applying electromagnetic radiation by at least one radiator of a readhead located at least partially outside a housing of a motor assembly to a reference member located inside said housing;
observing at least one reflection of the electromagnetic radiation from the reference member by at least one sensor of the readhead;
including;
the sensor is located at least partially external to the housing;
the at least one reflection is observed by the at least one sensor through an opening in the housing and through an at least partially transparent environmental separation wall disposed in the opening;
the at least partially transparent environmental isolation wall at least partially seals a first environment inside the housing from a second environment in which at least a portion of the sensor is disposed;
At least a portion of the sensor is disposed external to the first environment, and the at least partially transparent environmental separation wall is arranged such that the at least one sensor is located outside the first environment, and the at least one transparent enabling at least a portion of the sensor to observe a reflection;
a septum retainer presses the environmental separation wall against the seal;
the partition wall holding portion is pressed against the opening by a frame;
the frame is mounted proximate to the opening;
the septum retainer biases the environmental separation wall against the seal;
The method further includes using a resilient connection between the septum retainer and the frame to allow the septum retainer to move relative to the frame.
Method. 3. The method of claim 2 , wherein the electromagnetic radiation comprises visible light. 3. The method of claim 2 , wherein the at least one emitter comprises a light emitter. 3. The method of claim 2 , wherein the at least one sensor includes multiple sensors. 3. The method of claim 2 , wherein the at least one sensor includes at least one camera. 7. The method of claim 6 , wherein the at least one sensor includes multiple cameras. 3. The method of claim 2 , wherein the at least one sensor comprises a sensor array. irradiating a reference member located inside the housing with a plurality of individual electromagnetic wave emitters of the readhead located at least partially outside the housing of the motor assembly;
projecting at least one image of the reference member by a plurality of individual electromagnetic sensors of the readhead;
including;
the electromagnetic wave sensor is located at least partially outside the housing;
the at least one image is imaged by the electromagnetic wave sensor through an opening in the housing and through an at least partially transparent environmental separation wall disposed in the opening;
the at least partially transparent environmental isolation wall at least partially seals a first environment inside the housing from a second environment in which the electromagnetic wave sensor is disposed;
the electromagnetic wave sensor is placed outside the first environment,
wherein the at least partially transparent environmental separation wall allows the electromagnetic wave sensor to image the at least one image arriving from the interior of the housing through the environmental separation wall and the opening;
the electromagnetic wave sensor has at least one camera;
A method,
a septum retainer presses the at least partially transparent environmental separation wall against a seal;
the partition wall holding portion is pressed against the opening by a frame;
the frame is mounted proximate the opening;
The method further includes: the septum retainer biasing the environmental separation wall against the seal; and using a resilient connection between the septum retainer and the frame to bias the septum retainer against the seal. allowing a part to move relative to the frame. Apparatus comprising means for performing a method according to any of claims 1 to 9 .

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