KR102382339B1 - Device that measures the state of the load port module - Google Patents

Abstract

Provided is a device for measuring the state of a load port module, capable of measuring the state of the load port module within a short time. The device for measuring the state of a load port module according to one embodiment of the present invention comprises: a stage-side frame seated on a stage of the load port module and fixedly coupled to the stage through at least one fitting portion formed on a lower side surface; a door-side frame disposed perpendicular to an upper side surface of the stage-side frame and facing a door of the load port module; a 2D leveler disposed on the upper side surface of the stage-side frame and measuring a displacement of the stage in the direction of gravity; at least one door-side laser measuring device arranged so that measuring light scans from a side surface of the stage-side frame toward the door and configured to measure a distance to a door frame in contact with the door using the measuring light; a forward protruding frame disposed to protrude from the stage-side frame in a direction opposite to the door; a floor-side laser measuring device coupled to the forward protruding frame, disposed to have the measurement light scan toward the floor, and measuring a distance to the floor using the measurement light; and multiple digital meters coupled to the door-side frame and measuring the distance to the door.

Description

Device that measures the state of the load port module {DEVICE THAT MEASURES THE STATE OF THE LOAD PORT MODULE}

This embodiment relates to a technique for measuring the state of a load port module (LPM) of a wafer processing apparatus for a semiconductor process.

The load port module is a device to which a semiconductor wafer storage device called FOUP (Front Opening Unified Pod) is combined. A plurality of semiconductor wafers may be loaded in the FOUP, and the transfer device sequentially transfers the semiconductor wafers loaded in the FOUP to the semiconductor processing device. Although processing of semiconductor wafers is performed in a clean room with a high degree of cleanliness, semiconductor wafers can be loaded into the FOUP to provide a higher degree of cleanliness than this.

When the FOUP is positioned on the stage of the load port module, one side of the FOUP faces the door of the load port module. And, in the loading state, one side of the FOUP is brought into close contact with the door of the load port module, and as the door of the load port module is opened, the semiconductor wafers loaded in the FOUP are sequentially transferred. At this time, if the loading state of the semiconductor wafer is not suitable, a problem in transport may occur or damage to the semiconductor wafer may occur. The loading state of the semiconductor wafer may be determined according to the state of the load port module in which the FOUP is located, in particular, the state of the stage of the load port module. Accordingly, the process operator needs to measure and manage the state of the load port module.

Meanwhile, in order to further increase the cleanliness in the FOUP, a load port module capable of purging the FOUP with N2 is being developed, and the existing load port module is being converted to a version capable of purging with N2. When the load port module is remodeled, the stage of the load port module is replaced or the plate is additionally installed. At this time, the state of the load port module may be changed.

As described above, since the state of the load port module affects the transfer of semiconductor wafers, the remodeling operator controls the state before/after the remodeling of the load port module, respectively, so that the condition before/after remodeling of the load port module can be maintained the same. It measures and adjusts the load port module so that there is no change in state. However, according to the method currently used, it takes 40 minutes to 1 hour to measure and adjust the condition before/after the modification of the load port module, which is a problem.

In the currently used method, because the operator measures the condition before/after remodeling using a manual measuring device (eg, ruler, tape measure, vernier caliper, etc.), it takes 20 minutes to measure before remodeling and 40 minutes to measure after remodeling. is becoming If the operator is not skilled, this measurement time may increase further depending on individual skills.

For the modification of the load port module, the semiconductor production facility must be stopped, and as described above, excessive time is required for measurement before and after the modification, resulting in a large industrial loss.

Against this background, an object of the present embodiment, in one aspect, is to provide a technique for reducing the time for measuring the state of the load port module. In another aspect, an object of the present embodiment is to provide a technique for preventing a measurement error according to the skill level of an operator and improving the accuracy of measurement.

In order to achieve the above object, one embodiment is seated on the stage of the load port module, the stage side frame fixedly coupled to the stage through at least one fitting portion formed on the lower side; a door-side frame perpendicular to an upper surface of the stage-side frame and disposed to face the door of the load port module; a 2D leveler disposed on the upper surface of the stage-side frame and measuring a shift in the direction of gravity of the stage; at least one door-side laser measuring device arranged to scan a measurement light from a side surface of the stage-side frame toward the door and measuring a distance to a door frame in contact with the door by using the measurement light; a front protrusion frame disposed to protrude from the stage side frame in a direction opposite to the door; a bottom-side laser measuring device coupled to the front protrusion frame and arranged to scan the measurement light in the direction of the floor, and measuring a distance to the floor by using the measurement light; and a plurality of digital meters coupled to the door-side frame and measuring a distance to the door.

The three fitting portions are formed in the stage-side frame, and an elongated groove is formed in the fitting portion, and the longitudinal direction of the grooves may be toward the center of a triangle formed by the three fitting portions.

The four digital meters may be disposed on the upper left, lower left, upper right and lower right sides of the door-side frame.

A first opening through which a part of the door can be observed from the front side may be formed in the door-side frame, and a second opening through which a part of the stage may be observed from an upper surface of the stage-side frame may be formed.

and a master jig including a lower reference frame coupled to a lower side of the stage-side frame and a door-side reference frame facing the door-side frame, wherein the plurality of digital meters are set to a value of 0 with respect to the master jig can be

Two cross holes having a cross (+) shape are formed in the door-side frame, and the positions of the cross holes may correspond to the latch key positions on the door.

Two observation holes are formed in the door-side frame, and suction pins on the door can be observed from the front direction by the observation holes.

As described above, according to this embodiment, the state of the load port module can be measured within a short time. And, according to this embodiment, it is possible to increase the uniformity of measurement for all workers without deviation according to the skill of the operator.

1 is a perspective view of a load port module according to an embodiment.
2 is a diagram illustrating a state in which a measuring device according to an embodiment is coupled to a load port module.
3 is a perspective view of a measuring device according to an exemplary embodiment.
4 is a top view of a measuring device according to an exemplary embodiment.
5 is a bottom view of a measuring device according to an exemplary embodiment.
6 is a left side view of a measuring device according to an exemplary embodiment.
7 is a right side view of a measuring device according to an exemplary embodiment.
8 is a front view of a measuring device according to an exemplary embodiment.
9 is a rear view of a measuring device according to an exemplary embodiment.
10 is a perspective view of a master jig according to an embodiment.
11 is a view showing a state in which the measuring device is seated on the master jig according to an embodiment.

Hereinafter, some embodiments of the present invention will be described in detail with reference to exemplary drawings. In adding reference numerals to the components of each drawing, it should be noted that the same components are given the same reference numerals as much as possible even though they are indicated on different drawings. In addition, in describing the present invention, if it is determined that a detailed description of a related known configuration or function may obscure the gist of the present invention, the detailed description thereof will be omitted.

In addition, in describing the components of the present invention, terms such as first, second, A, B, (a), (b), etc. may be used. These terms are only for distinguishing the elements from other elements, and the essence, order, or order of the elements are not limited by the terms. When it is described that a component is “connected”, “coupled” or “connected” to another component, the component may be directly connected or connected to the other component, but another component is formed between each component. It should be understood that elements may also be “connected,” “coupled,” or “connected.”

1 is a perspective view of a load port module according to an embodiment.

Referring to FIG. 1 , the load port module 10 may include a body frame 15 , a door frame 16 , a door 12 , a stage 11 , and the like.

The body frame 15 may be disposed while standing upright from the bottom surface. A control device for controlling the movement of the door 12 and/or the stage 11 may be built in the body frame 15 . The body frame 15 may provide support to the door frame 16 , the door 12 , and the stage 11 while being in contact with the floor surface.

The stage 11 may be disposed to protrude from the body frame 15 in the front direction. The stage 11 may have a main plane parallel to the bottom surface. The stage 11 supports and fixes a Front Opening Unified Pod (FOUP) positioned upward, and may move the FOUP toward the door 12 .

As the stage 11 moves, the FOUP located on the upper side can approach the door 12, and when the FOUP approaches the door 12, the door 12 is opened and the semiconductor wafers loaded in the FOUP, such as semiconductors It can be transferred to the process equipment.

In the stage 11 , a plurality of structures may protrude from the upper surface or may be built in a recessed portion.

A plurality of fixing pins 13 may be formed to protrude from the upper surface of the stage 11 . The plurality of fixing pins 13 may be disposed in three places, two of which are disposed in parallel with the door 12, and the other one may be disposed at the position of the vertical bisector of the line formed by these two fixing pins 13. . The fixing pin 13 performs a function of fixing the measuring device to be described later and can fix the measuring device while being fitted into a fitting portion formed on the lower surface of the measuring device. The fixing pin 13 may be formed in a streamlined upper side.

A plurality of dividing pins 21 may be formed to protrude from the upper surface of the stage 11 . The division pin 21 may perform a function of recognizing the type of FOUP. The load port module 10 may identify a pin that contacts the FOUP or is pressed by the FOUP among the plurality of identification pins 21 and recognizes the type of the FOUP according to the positions of the pins.

A clamp structure 20 capable of clamping the FOUP may be formed on the stage 11 . If the fixing pin 13 is a structure that limits the movement of the FOUP in a plane parallel to the bottom, that is, in a plane parallel to the upper surface of the stage 11, the clamp structure 20 restricts the vertical movement of the FOUP. It may be a structure. The clamp structure 20 may protrude or be depressed depending on the type of the load port module 10 .

An N2 purge connector 14 may be formed on the stage 11 . The N2 purge connector 14 may inject N2 into the FOUP while being connected to the FOUP. This N2 purge connector 14 may be formed in a modified stage.

The door 12 is surrounded by the door frame 16 and can be opened and closed while moving in the vertical direction.

A plurality of structures may be disposed on the door 12 .

Latch keys 17 may be disposed on the left and right sides of the door 12 . The latch key 17 can recognize contact with an external device by being pressed. When the latch key 17 is pressed while the FOUP moves, the load port module 10 comes into contact with the door 12 while the FOUP moves. you can recognize that you are doing it. The latch key 17 may have a long rod shape in one direction. For example, the latch key 17 may have a long rod shape in the vertical direction, or may have a long rod shape in the left and right directions.

A suction pin 18 is disposed on the door 12 , and air suction (suction) for forming a vacuum state may be performed through the suction pin 18 . The suction pin 18 may be fixed at a specific position in the door 12 .

The door 12 may have a sensor portion 19 having a built-in detection sensor or the like. When a FOUP or the like approaches the sensor part 19 , the load port module 10 may recognize it through the detection sensor.

In the load port module 10, the N2 purge related structure was not installed on the conventional stage, but this conventional stage includes the N2 purge related structure - for example, the N2 purge connector 14 - The stage 11 can be replaced with At this time, if the position of the FOUP disposed on the replaced stage 11 is shifted, coupling with the suction pin 18 may be difficult, the latch key 17 may not be properly pressed, and the door 12 position A problem such as a collision with the door frame 16 may occur.

In order to prevent this problem, the state before/after the modification of the load port module is measured, and the position of the stage after the modification can be adjusted so that the state before and after the modification is the same. The measuring device according to an embodiment minimizes the dormant process time by quickly and easily measuring the state of the load port module, and allows even a low-skilled person to more accurately measure the state of the load port module.

2 is a diagram illustrating a state in which a measuring device according to an embodiment is coupled to a load port module.

Referring to FIG. 2 , the measuring device 100 may be seated on the stage 11 like a FOUP, and may move in the load port module 10 according to the movement of the stage 11 . In this case, the measuring device 100 includes a plurality of measuring tools and can quickly and accurately measure the state of the load port module 10 by using these measuring tools.

3 is a perspective view of a measuring device according to an embodiment, FIG. 4 is a top view of the measuring device according to an embodiment, FIG. 5 is a bottom view of the measuring device according to an embodiment, and FIG. 6 is an embodiment is a left side view of a measuring device according to , FIG. 7 is a right side view of a measuring device according to an embodiment, FIG. 8 is a front view of a measuring device according to an embodiment, and FIG. 9 is a measuring device according to an embodiment This is the rear view.

3 to 9 , the measuring device 100 includes a stage side frame 110 , a door side frame 120 , a 2D (dimension) leveler 160 , a laser measuring device 140a to 140c , and a digital meter 150a ~150d) and the like.

The stage-side frame 110 may be disposed such that a lower surface thereof is in contact with an upper surface of the stage. Three fitting portions 118a to 118c may be formed on the lower surface of the stage-side frame 110, and the measuring device 100 is loaded while the fixing pins of the stage are fitted to these fitting portions 118a to 118c. It can be fixed to the port module.

An elongated groove 211 may be formed in the fitting portions 118a to 118c , and a tapered surface 212 may be formed around the long groove 211 . Accordingly, the fitting portions 118a to 118c may have a gradually narrower shape as they enter the inside.

The longitudinal direction of the long groove 211 in the fitting portions 118a to 118c may face the center of a triangle formed by the three fitting portions 118a to 118c. A line formed by the second fitting portion 118b and the third fitting portion 118c among the three fitting portions 118a to 118c may be a line parallel to the door. And, the first fitting portion 118a may be located on the perpendicular bisector of this line. Due to this positional relationship and the shape of the long groove 211 , the measuring device 100 may be fixed in one position without moving on the stage.

A cross-sectional area of a portion fitted in the fixing pin of the stage may be smaller than a cross-sectional area of the long groove 211 of the fitting portions 118a to 118c. Despite the difference in cross-sectional area, flow does not occur in the measuring device 100 and the measuring device 100 can be fixed in one position due to the above-described positional relationship and the shape of the long groove 211 .

Four corresponding holes 116 may be formed in the stage-side frame 110 . The corresponding hole 116 may be formed to correspond to the position of the dividing pin protruding from the stage. Four corresponding holes 116 may be formed, and the measurement device can be used regardless of the type of FOUP by these corresponding holes 116 .

A second opening 113 may be formed in the stage-side frame 110 . The weight of the stage side frame 110 can be reduced by the second opening 113 , and interference with the protruding clamp structure can be avoided depending on the type of the load port module. The second opening 113 may be formed to correspond to the position of the clamp structure on the stage.

A lower surface of the stage-side frame 110 may be positioned to be in contact with the stage, and an upper surface may be formed to be parallel to the lower surface. The lower surface and the upper surface of the stage-side frame 110 are parallel to each other, and accordingly, the main plane of the stage and the upper surface of the stage-side frame 110 may be parallel to each other.

The 2D leveler 160 may be positioned on the upper surface of the stage-side frame 110 . The 2D leveler 160 can measure the shift in the direction of gravity of the upper surface of the stage-side frame 110, and since the upper surface of the stage-side frame 110 is parallel to the main plane of the stage, the stage is performed by the 2D leveler 160 The shift in the direction of gravity can be measured. Since a position adjuster is disposed on the stage, when a deviation in the direction of gravity is observed, the deviation may be corrected according to the measurement value of the 2D leveler 160 .

Auxiliary fixing plates 112a and 112b having a plane in a direction perpendicular to the stage side frame 110 and perpendicular to the door may be attached to the side surface of the stage side frame 110 . In addition, the door-side laser measuring instruments 140a and 140b may be attached to the surface of the auxiliary fixing plates 112a and 112b in a direction away from the stage-side frame 110 . The auxiliary fixing plates 112a and 112b may be bolted to the stage side frame 110 , and the door laser measuring instruments 140a and 140b may be bolted to the auxiliary fixing plates 112a and 112b.

The stage-side frame 110 has a rectangular shape, and the auxiliary fixing plates 112a and 112b may be attached to corners extending in the front-rear direction in the aforementioned rectangular shape. In addition, the door-side laser measuring devices 140a and 140b may scan the measurement light toward the door frame of the load port module in a direction parallel to the corners extending in the front-rear direction.

The first door-side laser measuring device 140a may be disposed on the left side of the stage side frame 110 , and the second door-side laser measuring device 140b may be disposed on the right side of the stage side frame 110 . According to this arrangement, it is possible to compare the distance between the stage and the door frame before/after the remodeling, and also to observe the left-right deviation to check the deviation on the main plane of the stage.

The front protrusion frame 111 may be disposed to protrude from the stage side frame 110 in a direction opposite to the door. The front protrusion frame 111 includes a first protruding frame 115 having a 'C' shape or a 'C' shape and a second protruding frame 114 extending forward from the first protruding frame 115 and protruding. can do.

The first protruding frame 115 may be coupled to the stage-side frame 110 while having a 'C' or 'C' shape to avoid the position of the corresponding hole 116 formed in the stage-side frame 110 . there is. In addition, the first protruding frame 115 may be bolted to the stage-side frame 110 .

The second protruding frame 114 may be elongated so that the load port module is not located in a portion directly below the end of the second protruding frame 114 while protruding forward. An auxiliary fixing structure 117 may be coupled to an end of the second protruding frame 114 . The auxiliary fixing structure 117 is 'a' so that the bottom-side laser measuring device 140c disposed in a direction perpendicular to the top and bottom of the second protruding frame 114 forming a plane parallel to the bottom can be fixed from both sides. It may have a 'shape' or 'L' shape.

The bottom-side laser measuring device 140c may scan the measurement light in the direction of the bottom while bolting to the auxiliary fixing structure 117 . And, the bottom-side laser measuring device 140c can measure the distance to the bottom by using the measurement light. The operator can adjust the height of the stage before/after remodeling by using the distance to the floor.

The door-side frame 120 may be disposed so as to face the door of the load port module while being perpendicular to the upper surface of the stage-side frame 110 .

The door-side frame 120 may be coupled to the stage-side frame 110 by the fixing frame 130 . The fixing frame 130 may have a shape of a right-angled triangle, and a triangular opening may be formed inwardly. In addition, one corner forming a right angle to each other in the fixing frame 130 may be bolted to the side surface of the stage side frame 110 , and the other corner may be bolted to the side surface of the door side frame 120 . The fixing frame 130 may be disposed on both left and right sides.

Four through-holes 124 are formed in the lower left, upper left, upper right, and lower right of the door frame 120, and the measuring parts of the digital meters 150a to 150d are formed so as to protrude rearward through the through-holes 124 from the front. 151 may be disposed.

The digital meters 150a to 150d may measure the distance to the object according to the degree of pressing of the measuring unit 151 . The digital meters 150a to 150d can precisely measure the distance to the door.

The digital meters 150a to 150d can measure the distance to the door in four places: lower left, upper left, upper right, and lower right. In the door frame 120, a first digital meter 150a is disposed on the lower left, a second digital meter 150b is disposed on the left, a third digital meter 150c is disposed on the upper right, and a fourth digital meter 150c is disposed on the right. A digital meter 150d may be disposed.

The line formed by the first digital meter 150a and the second digital meter 150b, and the line formed by the third digital meter 150c and the fourth digital meter 150d are parallel to the door and the stage side frame 110 can be perpendicular to And, the line formed by the first digital meter 150a and the fourth digital meter 150d, and the line formed by the second digital meter 150b and the third digital meter 150c are parallel to the door and the stage side frame ( 110) and may be parallel.

According to this arrangement, the digital meters 150a to 150d can accurately measure the distortion of the stage and the distance relationship between the stage and the door.

A support structure 123 having a through hole 124 and a continuous extension hole may be further attached to the door frame 120 . In order to reduce the weight, the thickness of the door-side frame 120 may be formed thin. Accordingly, it may not be possible to transmit sufficient support force to the measuring unit 151 of the digital meters 150a to 150d only with the through hole 124 . To compensate for this, a support structure 123 may be further attached to the door-side frame 120 . The support structure 123 has an extension hole therein, and may be attached to the front of the door-side frame 120 . In addition, the measuring units 151 of the digital meters 150a to 150d may be disposed to continuously penetrate the extension hole and the through hole 124 .

A first opening part 125 and a third opening part 221 may be formed in the door-side frame 120 so that a part of the door is observed from the front side. The first opening part 125 and the third opening part 221 may support an operator to observe a part of the door with the naked eye. In addition, as the first opening 125 and the third opening 221 are formed, the weight of the door-side frame 120 may be reduced.

In addition, the position of the third opening part 221 may correspond to the position of the sensor part formed on the door. By the third opening part 221 , the door is opened according to the movement of the measuring device 100 during measurement. problems can be avoided.

Two cross holes 122a and 122b having a cross (+) shape may be formed in the door-side frame 120 . The positions of the cross holes 122a and 122b may correspond to the positions of the latch keys on the door. The latch key on the door may be pressed and the door opened according to the movement of the measuring device 100 during measurement, but the latch key is not pressed by the cross holes 122a and 122b to prevent the problem of opening the door during measurement can do.

As described above, the latch key may have a long rod shape in the vertical direction or a long rod shape in the left and rear directions. Since the cross holes 122a and 122b are opened in both horizontal and vertical directions, all types of load port modules to be able to respond to

Two observation holes 121a and 121b may be formed in the door-side frame 120 . The suction pins on the door can be observed from the front direction by these observation holes 121a and 121b. Alternatively, the suction pin may protrude to the front through these observation holes 121a and 121b. The suction pin is disposed at a designated position on the door, and the operator can adjust the position of the load port module by looking at the position of the suction pin observed from the observation holes 121a and 121b.

For zero-point adjustment, the measuring device may further include a master jig.

10 is a perspective view of a master jig according to an embodiment.

Referring to FIG. 10 , the master jig 1000 may include a lower reference frame 1010 , a door-side reference frame 1020 , and a fixing frame 1030 .

The lower reference frame 1010 is a frame corresponding to the stage and is a portion coupled to the lower side of the stage-side frame. A plurality of fixing pins 1040 may protrude from the lower reference frame 1010 , and the stage-side frame may be fixed to the lower reference frame 1010 by fitting with the fixing pins 1040 .

The door-side reference frame 1020 may be disposed to be perpendicular to the lower reference frame 1010 and to face the door-side frame. In addition, the door-side reference frame 1020 may be coupled to the lower reference frame 1010 by the fixing frame 1030 .

A distance reference unit 1050 may be formed in the door-side reference frame 1020 at a portion corresponding to the position of the digital meter, and the measuring unit of the digital meter may adjust the zero point while in contact with the distance reference unit 1050. .

11 is a view showing a state in which the measuring device is seated on the master jig according to an embodiment.

10 and 11 together, the measuring device 100 may calibrate the digital meter and the door-side laser measuring device in a state coupled to the master jig 1000 .

The digital meter can calibrate the distance measurement value while in contact with the door-side reference frame 1020 of the master jig 1000, and the door-side laser meter measures the distance measured by the door-side reference frame 1020. values can be corrected.

In the above, the measuring device according to an embodiment and devices around it have been described. According to this embodiment, it is possible to measure the state of the load port module within a short time. And, according to this embodiment, it is possible to increase the uniformity of measurement for all workers without deviation according to the skill of the operator.

Terms such as "include", "comprise" or "have" described above mean that the corresponding component may be embedded, unless otherwise stated, and does not exclude other components. It should be construed as being able to further include other components. All terms, including technical and scientific terms, have the same meaning as commonly understood by one of ordinary skill in the art to which the present invention belongs, unless otherwise defined. Terms commonly used, such as those defined in the dictionary, should be interpreted as being consistent with the meaning of the context of the related art, and should not be interpreted in an ideal or excessively formal meaning unless explicitly defined in the present invention.

The above description is merely illustrative of the technical spirit of the present invention, and various modifications and variations will be possible without departing from the essential characteristics of the present invention by those skilled in the art to which the present invention pertains. Accordingly, the embodiments disclosed in the present invention are not intended to limit the technical spirit of the present invention, but to explain, and the scope of the technical spirit of the present invention is not limited by these embodiments. The protection scope of the present invention should be construed by the following claims, and all technical ideas within the scope equivalent thereto should be construed as being included in the scope of the present invention.

Claims (7)

a stage side frame seated on the stage of the load port module and fixedly coupled to the stage through at least one fitting portion formed on a lower side thereof;
a door-side frame perpendicular to an upper surface of the stage-side frame and disposed to face the door of the load port module;
a 2D leveler disposed on the upper surface of the stage-side frame and measuring a shift in the direction of gravity of the stage;
at least one door-side laser measuring device arranged to scan a measurement light from a side surface of the stage-side frame toward the door and measuring a distance to a door frame in contact with the door by using the measurement light;
a front protrusion frame disposed to protrude from the stage side frame in a direction opposite to the door;
a bottom-side laser measuring device coupled to the front protrusion frame and arranged to scan the measurement light in the direction of the floor, and measuring a distance to the floor by using the measurement light; and
A plurality of digital meters coupled to the door-side frame and measuring the distance to the door
A device for measuring the state of the load port module comprising a. The method of claim 1,
The three fitting portions are formed on the stage side frame,
A thin and long groove is formed in the fitting part,
The longitudinal direction of the groove is a device for measuring the state of the load port module toward the center of the triangle formed by the three fitting parts. The method of claim 1,
A device for measuring the state of the load port module in which the four digital meters are disposed on the upper left, lower left, upper right and lower right sides of the door-side frame. The method of claim 1,
A first opening portion is formed in the door-side frame to allow a part of the door to be observed from the front side,
A device for measuring the state of a load port module in which a second opening portion is formed in the stage-side frame to allow a portion of the stage to be observed from an upper surface. The method of claim 1,
Further comprising a master jig comprising a lower reference frame coupled to the lower side of the stage-side frame and a door-side reference frame facing the door-side frame,
The plurality of digital meters is a device for measuring the state of the load port module set to a value of 0 with respect to the master jig. The method of claim 1,
Two cross holes having a cross (+) shape are formed in the door-side frame,
The position of the cross hole is a device for measuring the state of the load port module corresponding to the position of the latch key on the door. The method of claim 1,
Two observation holes are formed in the door-side frame,
A device for measuring the state of the load port module in which the suction pin on the door is observed from the front direction by the observation hole.

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