KR102375235B9 - 레이저 가공 시스템 및 방법 - Google Patents

레이저 가공 시스템 및 방법

Info

Publication number
KR102375235B9
KR102375235B9 KR1020200114708A KR20200114708A KR102375235B9 KR 102375235 B9 KR102375235 B9 KR 102375235B9 KR 1020200114708 A KR1020200114708 A KR 1020200114708A KR 20200114708 A KR20200114708 A KR 20200114708A KR 102375235 B9 KR102375235 B9 KR 102375235B9
Authority
KR
South Korea
Prior art keywords
laser processing
processing system
processing method
laser
processing
Prior art date
Application number
KR1020200114708A
Other languages
English (en)
Other versions
KR102375235B1 (ko
KR20220032862A (ko
Inventor
심상원
황도연
남유진
류상길
유성주
최민환
Original Assignee
주식회사 필옵틱스
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by 주식회사 필옵틱스 filed Critical 주식회사 필옵틱스
Priority to KR1020200114708A priority Critical patent/KR102375235B1/ko
Priority to EP21783385.4A priority patent/EP3991905A4/en
Priority to US17/595,764 priority patent/US20220314364A1/en
Priority to CN202180003139.XA priority patent/CN114667196A/zh
Priority to PCT/KR2021/004300 priority patent/WO2022055062A1/ko
Priority to JP2023515646A priority patent/JP2023552942A/ja
Priority to TW110129516A priority patent/TWI803934B/zh
Publication of KR20220032862A publication Critical patent/KR20220032862A/ko
Application granted granted Critical
Publication of KR102375235B1 publication Critical patent/KR102375235B1/ko
Publication of KR102375235B9 publication Critical patent/KR102375235B9/ko

Links

Classifications

    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
    • B23K26/00—Working by laser beam, e.g. welding, cutting or boring
    • B23K26/08—Devices involving relative movement between laser beam and workpiece
    • B23K26/082—Scanning systems, i.e. devices involving movement of the laser beam relative to the laser head
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
    • B23K26/00—Working by laser beam, e.g. welding, cutting or boring
    • B23K26/02—Positioning or observing the workpiece, e.g. with respect to the point of impact; Aligning, aiming or focusing the laser beam
    • B23K26/04—Automatically aligning, aiming or focusing the laser beam, e.g. using the back-scattered light
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
    • B23K26/00—Working by laser beam, e.g. welding, cutting or boring
    • B23K26/02—Positioning or observing the workpiece, e.g. with respect to the point of impact; Aligning, aiming or focusing the laser beam
    • B23K26/04—Automatically aligning, aiming or focusing the laser beam, e.g. using the back-scattered light
    • B23K26/046—Automatically focusing the laser beam
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
    • B23K26/00—Working by laser beam, e.g. welding, cutting or boring
    • B23K26/02—Positioning or observing the workpiece, e.g. with respect to the point of impact; Aligning, aiming or focusing the laser beam
    • B23K26/06—Shaping the laser beam, e.g. by masks or multi-focusing
    • B23K26/062—Shaping the laser beam, e.g. by masks or multi-focusing by direct control of the laser beam
    • B23K26/0622—Shaping the laser beam, e.g. by masks or multi-focusing by direct control of the laser beam by shaping pulses
    • B23K26/0624—Shaping the laser beam, e.g. by masks or multi-focusing by direct control of the laser beam by shaping pulses using ultrashort pulses, i.e. pulses of 1ns or less
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
    • B23K26/00—Working by laser beam, e.g. welding, cutting or boring
    • B23K26/02—Positioning or observing the workpiece, e.g. with respect to the point of impact; Aligning, aiming or focusing the laser beam
    • B23K26/06—Shaping the laser beam, e.g. by masks or multi-focusing
    • B23K26/064—Shaping the laser beam, e.g. by masks or multi-focusing by means of optical elements, e.g. lenses, mirrors or prisms
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
    • B23K26/00—Working by laser beam, e.g. welding, cutting or boring
    • B23K26/02—Positioning or observing the workpiece, e.g. with respect to the point of impact; Aligning, aiming or focusing the laser beam
    • B23K26/06—Shaping the laser beam, e.g. by masks or multi-focusing
    • B23K26/064—Shaping the laser beam, e.g. by masks or multi-focusing by means of optical elements, e.g. lenses, mirrors or prisms
    • B23K26/0643—Shaping the laser beam, e.g. by masks or multi-focusing by means of optical elements, e.g. lenses, mirrors or prisms comprising mirrors
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
    • B23K26/00—Working by laser beam, e.g. welding, cutting or boring
    • B23K26/02—Positioning or observing the workpiece, e.g. with respect to the point of impact; Aligning, aiming or focusing the laser beam
    • B23K26/06—Shaping the laser beam, e.g. by masks or multi-focusing
    • B23K26/064—Shaping the laser beam, e.g. by masks or multi-focusing by means of optical elements, e.g. lenses, mirrors or prisms
    • B23K26/0648—Shaping the laser beam, e.g. by masks or multi-focusing by means of optical elements, e.g. lenses, mirrors or prisms comprising lenses
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
    • B23K26/00—Working by laser beam, e.g. welding, cutting or boring
    • B23K26/02—Positioning or observing the workpiece, e.g. with respect to the point of impact; Aligning, aiming or focusing the laser beam
    • B23K26/06—Shaping the laser beam, e.g. by masks or multi-focusing
    • B23K26/064—Shaping the laser beam, e.g. by masks or multi-focusing by means of optical elements, e.g. lenses, mirrors or prisms
    • B23K26/0652—Shaping the laser beam, e.g. by masks or multi-focusing by means of optical elements, e.g. lenses, mirrors or prisms comprising prisms
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
    • B23K26/00—Working by laser beam, e.g. welding, cutting or boring
    • B23K26/02—Positioning or observing the workpiece, e.g. with respect to the point of impact; Aligning, aiming or focusing the laser beam
    • B23K26/06—Shaping the laser beam, e.g. by masks or multi-focusing
    • B23K26/0665—Shaping the laser beam, e.g. by masks or multi-focusing by beam condensation on the workpiece, e.g. for focusing
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
    • B23K26/00—Working by laser beam, e.g. welding, cutting or boring
    • B23K26/02—Positioning or observing the workpiece, e.g. with respect to the point of impact; Aligning, aiming or focusing the laser beam
    • B23K26/06—Shaping the laser beam, e.g. by masks or multi-focusing
    • B23K26/067—Dividing the beam into multiple beams, e.g. multifocusing
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
    • B23K26/00—Working by laser beam, e.g. welding, cutting or boring
    • B23K26/02—Positioning or observing the workpiece, e.g. with respect to the point of impact; Aligning, aiming or focusing the laser beam
    • B23K26/06—Shaping the laser beam, e.g. by masks or multi-focusing
    • B23K26/073—Shaping the laser spot
    • B23K26/0734—Shaping the laser spot into an annular shape
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
    • B23K26/00—Working by laser beam, e.g. welding, cutting or boring
    • B23K26/08—Devices involving relative movement between laser beam and workpiece
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
    • B23K26/00—Working by laser beam, e.g. welding, cutting or boring
    • B23K26/08—Devices involving relative movement between laser beam and workpiece
    • B23K26/082—Scanning systems, i.e. devices involving movement of the laser beam relative to the laser head
    • B23K26/0821—Scanning systems, i.e. devices involving movement of the laser beam relative to the laser head using multifaceted mirrors, e.g. polygonal mirror
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
    • B23K26/00—Working by laser beam, e.g. welding, cutting or boring
    • B23K26/08—Devices involving relative movement between laser beam and workpiece
    • B23K26/083—Devices involving movement of the workpiece in at least one axial direction
    • B23K26/0853—Devices involving movement of the workpiece in at least in two axial directions, e.g. in a plane
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
    • B23K26/00—Working by laser beam, e.g. welding, cutting or boring
    • B23K26/36—Removing material
    • B23K26/38—Removing material by boring or cutting
    • B23K26/382—Removing material by boring or cutting by boring
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
    • B23K26/00—Working by laser beam, e.g. welding, cutting or boring
    • B23K26/36—Removing material
    • B23K26/40—Removing material taking account of the properties of the material involved
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
    • B23K26/00—Working by laser beam, e.g. welding, cutting or boring
    • B23K26/36—Removing material
    • B23K26/40—Removing material taking account of the properties of the material involved
    • B23K26/402—Removing material taking account of the properties of the material involved involving non-metallic material, e.g. isolators
    • C—CHEMISTRY; METALLURGY
    • C03—GLASS; MINERAL OR SLAG WOOL
    • C03B—MANUFACTURE, SHAPING, OR SUPPLEMENTARY PROCESSES
    • C03B33/00—Severing cooled glass
    • C03B33/02—Cutting or splitting sheet glass or ribbons; Apparatus or machines therefor
    • C03B33/023—Cutting or splitting sheet glass or ribbons; Apparatus or machines therefor the sheet or ribbon being in a horizontal position
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
    • B23K2101/00—Articles made by soldering, welding or cutting
    • B23K2101/36—Electric or electronic devices
    • B23K2101/40—Semiconductor devices
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
    • B23K2103/00—Materials to be soldered, welded or cut
    • B23K2103/50—Inorganic material, e.g. metals, not provided for in B23K2103/02 – B23K2103/26
    • B23K2103/54—Glass
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
    • B23K2103/00—Materials to be soldered, welded or cut
    • B23K2103/50—Inorganic material, e.g. metals, not provided for in B23K2103/02 – B23K2103/26
    • B23K2103/56—Inorganic material, e.g. metals, not provided for in B23K2103/02 – B23K2103/26 semiconducting
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
    • B23K26/00—Working by laser beam, e.g. welding, cutting or boring
    • B23K26/36—Removing material
    • B23K26/38—Removing material by boring or cutting
KR1020200114708A 2020-09-08 2020-09-08 레이저 가공 시스템 및 방법 KR102375235B1 (ko)

Priority Applications (7)

Application Number Priority Date Filing Date Title
KR1020200114708A KR102375235B1 (ko) 2020-09-08 2020-09-08 레이저 가공 시스템 및 방법
EP21783385.4A EP3991905A4 (en) 2020-09-08 2021-04-06 LASER TREATMENT SYSTEM AND METHOD
US17/595,764 US20220314364A1 (en) 2020-09-08 2021-04-06 Laser processing system and method thereof
CN202180003139.XA CN114667196A (zh) 2020-09-08 2021-04-06 激光加工系统及其方法
PCT/KR2021/004300 WO2022055062A1 (ko) 2020-09-08 2021-04-06 레이저 가공 시스템 및 방법
JP2023515646A JP2023552942A (ja) 2020-09-08 2021-04-06 レーザ加工システムおよび方法
TW110129516A TWI803934B (zh) 2020-09-08 2021-08-10 雷射處理系統及其方法

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
KR1020200114708A KR102375235B1 (ko) 2020-09-08 2020-09-08 레이저 가공 시스템 및 방법

Publications (3)

Publication Number Publication Date
KR20220032862A KR20220032862A (ko) 2022-03-15
KR102375235B1 KR102375235B1 (ko) 2022-03-16
KR102375235B9 true KR102375235B9 (ko) 2022-09-06

Family

ID=80631871

Family Applications (1)

Application Number Title Priority Date Filing Date
KR1020200114708A KR102375235B1 (ko) 2020-09-08 2020-09-08 레이저 가공 시스템 및 방법

Country Status (7)

Country Link
US (1) US20220314364A1 (ko)
EP (1) EP3991905A4 (ko)
JP (1) JP2023552942A (ko)
KR (1) KR102375235B1 (ko)
CN (1) CN114667196A (ko)
TW (1) TWI803934B (ko)
WO (1) WO2022055062A1 (ko)

Families Citing this family (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2023219213A1 (ko) * 2022-05-10 2023-11-16 주식회사 필옵틱스 적외선 레이저를 이용한 고속 정밀 관통홀 형성 방법
CN115463905B (zh) * 2022-10-25 2023-11-24 武汉锐科光纤激光技术股份有限公司 一种激光清洗控制系统及方法

Family Cites Families (13)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP0627643B1 (en) * 1993-06-03 1999-05-06 Hamamatsu Photonics K.K. Laser scanning optical system using axicon
JP4467633B2 (ja) * 2008-03-24 2010-05-26 丸文株式会社 ビーム加工装置、ビーム加工方法およびビーム加工基板
KR101607226B1 (ko) * 2014-04-14 2016-03-29 주식회사 레이저앱스 레이저 절단 및 가공장치와 그 방법
DE102014116957A1 (de) * 2014-11-19 2016-05-19 Trumpf Laser- Und Systemtechnik Gmbh Optisches System zur Strahlformung
CN105081586B (zh) * 2015-09-14 2017-11-21 郑州轻工业学院 一种激光加工方法和装置
LT6428B (lt) * 2015-10-02 2017-07-25 Uab "Altechna R&D" Skaidrių medžiagų lazerinis apdirbimo būdas ir įrenginys
WO2018042414A1 (en) * 2016-08-28 2018-03-08 ACS Motion Control Ltd. Method and system for laser machining of relatively large workpieces
KR102603393B1 (ko) * 2016-12-06 2023-11-17 삼성디스플레이 주식회사 레이저 가공 장치
CN106994564B (zh) * 2017-04-27 2019-11-26 东莞市盛雄激光先进装备股份有限公司 一种激光切割装置及其切割方法
US10707130B2 (en) * 2018-03-05 2020-07-07 The Chinese University Of Hong Kong Systems and methods for dicing samples using a bessel beam matrix
JP2022503883A (ja) * 2018-09-28 2022-01-12 コーニング インコーポレイテッド 基板の修正に利用される回転式光源
CN111151873A (zh) * 2018-11-06 2020-05-15 大族激光科技产业集团股份有限公司 一种脆性材料激光切割装置及方法
CN111505831B (zh) * 2020-04-01 2021-06-22 中国科学院西安光学精密机械研究所 一种焦斑焦深可变贝塞尔光束激光加工系统及方法

Also Published As

Publication number Publication date
TWI803934B (zh) 2023-06-01
US20220314364A1 (en) 2022-10-06
JP2023552942A (ja) 2023-12-20
EP3991905A4 (en) 2023-01-04
EP3991905A1 (en) 2022-05-04
TW202212036A (zh) 2022-04-01
WO2022055062A1 (ko) 2022-03-17
KR102375235B1 (ko) 2022-03-16
KR20220032862A (ko) 2022-03-15
CN114667196A (zh) 2022-06-24

Similar Documents

Publication Publication Date Title
GB2602353B (en) Optical system and method
GB202014825D0 (en) Blockchain-based system and method
KR102375235B9 (ko) 레이저 가공 시스템 및 방법
GB2610953B (en) System and method for dimensioning objects
EP4261804A4 (en) INFORMATION PROCESSING PROCEDURES AND INFORMATION PROCESSING SYSTEM
EP4187229A4 (en) INFORMATION PROCESSING SYSTEM AND INFORMATION PROCESSING METHOD
EP4202803A4 (en) INFORMATION PROCESSING METHOD AND INFORMATION PROCESSING SYSTEM
EP4135330A4 (en) DATA PROCESSING PROCEDURES AND SYSTEM
GB202202448D0 (en) Information processing system and information processing method
GB2605392B (en) Optical system and method
GB2598563B (en) System and method for speech processing
SG10202104230VA (en) Laser processing method
SG10202008649VA (en) Laser processing method and laser processing apparatus
GB202210788D0 (en) Sheet-providing method and sheet-providing system
GB202004378D0 (en) System and method
GB202000063D0 (en) Method and system for geotracking objects
GB202020476D0 (en) Processing system and method
EP4155929A4 (en) PROCESSING SYSTEM AND PROCESSING METHODS
EP4238686A4 (en) LASER TREATMENT DEVICE AND METHOD
EP4112220A4 (en) LASER PROCESSING APPARATUS AND LASER PROCESSING METHOD
GB2613931B (en) Systems and methods for order processing
GB202207808D0 (en) Secure processing system and method
EP4131125A4 (en) LOAN PROCESSING SYSTEM AND METHOD
GB202114723D0 (en) System and methods for order processing
EP4207129A4 (en) INFORMATION PROCESSING METHOD AND INFORMATION PROCESSING SYSTEM

Legal Events

Date Code Title Description
E701 Decision to grant or registration of patent right
GRNT Written decision to grant
G170 Re-publication after modification of scope of protection [patent]