KR102370083B1 - Applications, Methods and Systems for Laser Delivery Addressable Arrays - Google Patents

Abstract

An assembly is provided for combining a group of laser sources into a combined laser beam. Blue diode laser array combining laser beams from an assembly of blue laser diodes
is also provided. Laser processing operations and applications using a combined blue laser beam from a laser diode array and module are provided.

Description

Applications, Methods and Systems for Laser Delivery Addressable Arrays

This application is entitled to 35 U.S.C. §119(e)(1), the entire disclosure of which is incorporated herein by reference.

The present invention relates to an array assembly for combining laser beams, particularly an array capable of providing a high intensity laser beam for use in systems and applications in the fields of fabrication, manufacturing, entertainment, graphics, imaging, analysis, monitoring, assembly, dental and medical fields. It's about assembly.

Many lasers, particularly semiconductor lasers such as laser diodes, provide laser beams with highly desirable wavelengths and beam qualities, including luminance. These lasers can have wavelengths in the visible range, UV range, IR range, and combinations thereof, as well as higher and lower wavelengths. The technology of semiconductor lasers as well as other laser sources, eg, fiber lasers, is advancing rapidly as new laser sources are continuously developed and offer both existing and new laser wavelengths. Although having desirable beam quality, many of these lasers have lower laser power than desirable or are necessary for certain applications. Therefore, due to their low power, these laser sources have not found greater utility and commercial application.

In addition, prior efforts to combine these types of lasers have led to difficulties in beam alignment, difficulties in maintaining beam alignment during application, loss of beam quality, and special placement of the laser source, to name but a few among other reasons. It was generally insufficient for reasons of difficulty, size considerations, and output management.

As used herein, unless otherwise specified, the terms "blue laser beam", "blue laser" and "blue" provide a laser beam or light having a wavelength between about 400 nm and about 500 nm; For example, propagating laser beams, laser sources, such as lasers and diode lasers, should be given their broad meaning and generally refer to systems providing such.

In general, the term "about" as used herein, unless otherwise specified, includes a deviation or range of ±10%, preferably the greater of ±10%, which is the experimental or instrumental error associated with obtaining the stated value. it means to

This background portion of the present invention is intended to introduce various aspects of the art that may relate to embodiments of the present invention. Accordingly, the foregoing discussion in this section provides a basis for a better understanding of the present invention and is not considered an admission of prior art.

There has been a long unmet need for assemblies and systems that combine multiple laser beam sources into single or multiple laser beams while maintaining and improving desired beam qualities, such as brightness and output, among other things. The inventors address these needs by providing, among other things, articles of manufacture, apparatus and processes taught and disclosed herein.

Accordingly, a laser system for performing laser operation is provided, the system comprising: a plurality of laser diode assemblies; each laser diode assembly having a plurality of laser diodes capable of generating a respective blue laser beam along the laser beam path; means for spatially combining the individual blue laser beams to create a combined laser beam having a single spot in a far field that can be coupled to an optical fiber for delivery to a target material; and means for spatially combining the individual blue laser beams on the laser beam path and optically associated with each laser diode.

Also provided are methods and systems having one or more of the following features, comprising: an assembly of at least three laser diodes; each laser diode assembly includes at least 30 laser diodes; the laser diode assembly is capable of propagating a laser beam having a total power of at least about 30 watts and a beam parameter characteristic of less than 20 mm mrad; Beam parameter properties are less than 15 mm mrad; Beam parameter properties are less than 10 mm mrad; the spatially combining means produces a combined laser beam N times the luminance of the individual laser beams, where N is the number of laser diodes in the laser diode assembly; The spatially combining means increases the output of the laser beam while preserving the luminance of the combined laser beam; the combined laser beam has an output that is at least 50 times the power of the individual laser beams and the beam parameter product of the combined laser beam is no more than twice the beam parameter product of the individual laser beams; the beam parameter product of the combined laser beams is not more than 1.5 times the beam parameter product of the individual laser beams; the beam parameter product of the combined laser beam is less than or equal to 1 times the beam parameter product of the individual laser beams; The spatially combining means increases the output of the laser beams while preserving the luminance of the individual laser beams; the combined laser beam has an output that is at least 100 times the power of the individual laser beams and the beam parameter product of the combined laser beam is no more than twice the beam parameter product of the individual laser beams; the beam parameter product of the combined laser beams is not more than 1.5 times the beam parameter product of the individual laser beams; the beam parameter product of the combined laser beam is less than or equal to 1 times the beam parameter product of the individual laser beams; Optical fibers are solarization resistant; the spatially combining means has an assembly selected from the group consisting of parallel alignment plates and wedges for correcting at least one of a positional error or a directing error of the laser diode; The spatially combining means has a deflecting beam combiner capable of increasing the effective luminance of the combined laser beam over individual laser beams; The laser diode assembly defines individual laser beam paths with respect to the space between the respective paths so that the individual laser beams have a space between each beam, and the spatially combining means directs the individual laser beams to the high speed axis of the laser diode. a periodic mirror for combining the collimated laser beam and a collimator for collimating, the periodic mirror reflecting a first laser beam from a first diode in the laser diode assembly and a second laser from a second diode in the laser diode assembly configured to deliver the beam, so that the space between the individual laser beams is filled in a high-speed direction; The spatially combining means has a patterned mirror on the glass substrate; The glass substrate is thick enough to shift the vertical position of the laser beam from the laser diode to fill the empty space between the laser diodes; It has a stepped heat sink.

Also provided is a laser system for providing a high-brightness, high-power laser beam, the system comprising a plurality of laser diode assemblies, each laser diode having a plurality of laser diodes capable of generating a blue laser beam having an initial brightness an assembly, and means for spatially combining the blue laser beam to produce a combined laser beam having a final luminance and forming a single spot in a far field that can be coupled to an optical fiber, each laser diode being the combined laser beam fixed by external cavities at different wavelengths to substantially increase the luminance of the combined laser beam so that the final luminance of the combined laser beam is approximately equal to the initial luminance of the laser beam from the laser diode.

Also provided is a method and system having one or more of the following features, wherein each laser diode is fixed to a single wavelength using an external cavity based grating and each laser diode assembly comprises a narrowly spaced optical filter and combined into a combined beam using combining means selected from the group consisting of gratings; The Raman transducer is an optical fiber having a pure fused silica core and a fluorinated outer core containing blue pump light to create a high brightness source; Raman transducers are used to pump Raman transducers, such as optical fibers, having a GeO ₂ doped central core with an outer core and an outer core larger than the central core containing blue pump light to create a high brightness source; A Raman transducer is an optical fiber having a P ₂ O ₂ doped core to create a high brightness source and an outer core larger than the central core to contain blue pump light; A Raman transducer is an optical fiber having a graded index core to create a high brightness source and an outer core larger than the central core to contain blue pump light; The Raman transducer is a graded GeO ₂ doped core and an external stepped index core; A Raman transducer is used to pump a Raman transducer fiber that is a graded P ₂ O ₂ doped core and an outer stepped index core; A Raman transducer is used to pump a Raman transducer fiber that is a graded GeO ₂ doped core; The Raman transducer is a graded index P ₂ O ₂ doped core and an outer stepped index core; The Raman transducer is a diamond generating a high-brightness laser source; The Raman transducer is a KGW generating a high-brightness laser source; The Raman transducer is a YVO ₄ generating a high intensity laser source; The Raman transducer is Ba(NO ₃ ) ₂ , which produces a high intensity laser source; A Raman transducer is a high-pressure gas that creates a high-brightness laser source.

Also provided is a laser system for performing laser operation, the system comprising: a plurality of laser diode assemblies, each laser diode assembly having a plurality of laser diodes capable of generating a blue laser beam along a laser beam path; and means for spatially combining the blue laser beam to create a combined laser beam having a single spot in the far field that can be optically coupled to the Raman transducer, pump to the Raman transducer, and increase the brightness of the combined laser beam. includes

Also provided is a method of manufacturing a combined laser beam, the method comprising an array of Raman converted lasers to generate a blue laser beam and a combined laser beam at respective different wavelengths to create a high power source while preserving the spatial luminance of the original source. has steps to operate it.

Still further, there is provided a laser system for performing laser operation, the system comprising: a plurality of laser diode assemblies, each laser diode assembly having a plurality of laser diodes capable of generating a blue laser beam along a laser beam path; It has beam collimating and combining optics along the laser beam path, from which an integrated laser beam can be provided, and optical fibers for receiving the combined laser beam.

Also provided are methods and systems having one or more of the following features, wherein an optical filter is in optical communication with the rare earth doped fiber such that the combined laser beam uses the rare earth doped fiber to produce a high intensity laser source. can be pumped; The optical fiber is in optical communication with the outer core of the high brightness converter so that the combined laser beam can pump the outer core of the brightness converter to produce a higher rate of brightness enhancement.

Still also, a dual core, one of which is a high-brightness central core; and means for suppressing the secondary Raman signal at the high luminance central core selected from the group consisting of a filter, a fiber Bragg grating, first and second order Raman signals of order V, and a micron bend loss difference.

Also provided is a second harmonic generating system, the system comprising a Raman converter of the first wavelength for generating light at half the wavelength of the first wavelength, and an external resonance configured to prevent the half-wavelength light from propagating through the optical fiber. It has double crystals.

Also provided are methods and systems having one or more of the following features, wherein the first wavelength is about 460 nm, the extrinsic resonant double crystal is KTP, and the non-Raman converter is structured to improve Raman conversion efficiency. It has a circular outer core.

Also provided is a third harmonic generating system, the system comprising a Raman converter of a first wavelength to generate light at a second wavelength lower than the first wavelength, and to prevent lower wavelength light from propagating through the optical fiber. It has an external resonant double crystal that is constructed.

Also provided is a fourth harmonic generating system, the system having a Raman converter that generates light at 57.5 nm using an external resonant double crystal configured to prevent 57.5 nm wavelength light from propagating through the optical fiber.

Also provided is a second harmonic generating system, wherein the system does not allow short wavelength light to propagate through the optical fiber but uses an external resonant double crystal to generate light at half wavelength of the source laser or at 236.5 nm at 450 nm. It has a rare earth doped luminance converter containing thulium that fires a laser at 473 nm when pumped by an array of blue laser diodes.

Also provided is a third harmonic generating system, which system does not allow short wavelength light to propagate through the optical fiber but in an array of blue laser diodes at 450 nm to generate light at 118.25 nm using an external resonant double crystal. It has a rare earth doped luminance converter containing thulium that fires a laser at 473 nm when pumped by

Also provided is a fourth harmonic generating system, which system does not allow short wavelength light to propagate through the optical fiber, but in an array of blue laser diodes at 450 nm to generate light at 59.1 nm using an external resonant double crystal. It has a rare earth doped luminance converter with thulium that fires a laser at 473 nm when pumped by

Still further, there is provided a laser system for performing laser operation, the system comprising: an assembly of at least three laser diodes; at least a laser diode assembly having at least 10 laser diodes each, wherein each of the at least 10 laser diodes generates a blue laser beam having a power of at least about 2 watts and a beam parameter product of less than 8 mm-mrad along a laser beam path. at least a laser diode assembly; and means for spatially combining and preserving the luminance of a blue laser beam, all positioned in at least 30 laser beam paths, comprising: aiming optics for a first axis of the laser beam, a vertical prism array for a second axis of the laser beam, and means, including a telescope, for providing a combined laser beam with a power of at least about 600 watts and a beam parameter product of less than 40 mm-mrad by filling a space between the laser beams with laser energy.

Still further, an addressable array laser processing system is provided, the addressable array laser processing system having at least three laser systems of the type described herein and a control system, each of the at least three laser systems having their combination in a single optical fiber configured to couple each of the laser beams so that each of the at least three combined laser beams can be transmitted along its coupled optical fiber, the at least three optical fibers being optically associated with the laser head, and wherein the control system is configured to operate on the target material. having a program having a predetermined order for delivering each of the combined laser beams to a predetermined location.

Also provided is a method and system for an addressable array having one or more of the following features, wherein a predetermined order for delivering a target having powder by having a laser beam from the laser head turn on and off individually imaging on a bed of powder to melt the material and fuse it into parts; the fibers in the laser head are configured in an arrangement selected from the group consisting of linear, non-linear, circular, rhomboid, square, triangular, and hexagonal; the fibers in the laser head are configured in an arrangement selected from the group consisting of 2 x 5, 5 x 2, 4 x 5, at least 5 x at least 5, 10 x 5, 5 x 10 and 3 x 4; The target material has a bed of powder, an xy motion system that melts and fuses the bed of powder by being able to move a laser head across the bed of powder, and a powder delivery system that is positioned behind the laser source to provide a new layer of powder behind the layer of fusing. has; having a z-motion system capable of transporting the laser head to increase and decrease the height of the laser head above the surface of the powder bed; having a bidirectional powder placement device capable of placing the powder directly behind the transmitted laser beam as it travels in the positive or negative x direction; having a powder supply system coaxial with the plurality of laser beam paths; It has a gravity-fed powder system; having a powder supply system in which the powder is entrained in an inert gas flow; having a powder feeding system transverse to the N(N≧1) laser beam, wherein the powder is placed by gravity in front of the laser beam; It has a powder feeding system transverse to the N (N≧1) laser beam, in which the powder is entrained in an inert gas flow that intersects the laser beam.

Still further, a method is provided for providing a combined blue laser beam having a high brightness, the method comprising operating a plurality of Raman transform lasers to provide a plurality of individual blue laser beams, and preserving the spatial brightness of the original source and combining the individual blue laser beams to produce a high power source, wherein the plurality of individual laser beams have different wavelengths.

Also provided is a method for laser processing a target material, the method comprising: an addressable array laser processing system having at least three laser systems of the type described herein for generating individual laser beams combined into three individual optical fibers directing each combined laser beam to a laser head along its optical fiber, and directing the combined three individual laser beams from the laser head in a predetermined order to a predetermined location on a target material. have steps

1 is a graph showing the laser performance of an embodiment according to the present invention.
2a is a schematic diagram of a laser diode and an axial focus lens according to the present invention;
Figure 2b is a schematic diagram of an embodiment of a laser diode spot after fast and slow axis focusing in accordance with the present invention;
2C is a perspective view of an embodiment of a laser diode assembly according to the present invention;
2D is a perspective view of an embodiment of a laser diode module according to the present invention;
Fig. 2e is a partial view of the embodiment of Fig. 2c showing the laser beam, the laser beam path and the space between the laser beams according to the present invention;
FIG. 2F is a cross-sectional view of a laser beam, a laser beam path and space between the laser beams of FIG. 2E ;
2G is a perspective view of an embodiment of a laser beam, a laser beam path and an optical system according to the present invention;
2H is a diagram of a combined laser diode beam after a patterned mirror in accordance with the present invention;
Fig. 2i is a diagram of a laser diode beam after a beam folder with an even splitting of the beam according to the present invention;
2j is a diagram of a laser diode beam after a beam folder with 3-2 column division according to the present invention;
3 is a schematic diagram illustrating a scanning embodiment of an embodiment of a laser diode array on a starting material or a target material according to the present invention;
4 is a table providing processing parameters according to the present invention.
5 is a schematic diagram of an embodiment of a laser array system and process in accordance with the present invention.
6 is a schematic diagram of an embodiment of a laser array system and process in accordance with the present invention.
7 is a schematic diagram of an embodiment of a laser array system and process in accordance with the present invention.
8 is a schematic diagram of an embodiment of a laser fiber bundle arrangement for use in an embodiment of a laser array system according to the present invention.
9 is a schematic diagram of an embodiment of a laser fiber bundle arrangement for use in an embodiment of a laser array system according to the present invention.
10 is a schematic diagram of an embodiment of a laser fiber bundle arrangement for use in an embodiment of a laser array system according to the present invention;
11 is a schematic diagram of an embodiment of a laser fiber bundle arrangement for use in an embodiment of a laser array system according to the present invention.
12 is a schematic diagram of an embodiment of a laser fiber bundle arrangement for use in an embodiment of a laser array system according to the present invention;
13 is a schematic diagram of an embodiment of a laser fiber bundle arrangement for use in an embodiment of a laser array system according to the present invention;
14A is a schematic diagram of an embodiment of a laser fiber bundle arrangement for use in an embodiment of a laser array system according to the present invention;
14B is a schematic diagram of an embodiment of a laser fiber bundle arrangement for use in an embodiment of a laser array system according to the present invention.
14C is a schematic diagram of an embodiment of a laser fiber bundle arrangement for use in an embodiment of a laser array system according to the present invention.
15A is a schematic diagram of an embodiment of a laser fiber bundle arrangement for use in an embodiment of a laser array system according to the present invention;
15B is a schematic diagram of an embodiment of a laser fiber bundle arrangement for use in an embodiment of a laser array system according to the present invention.
16A is a schematic diagram of an embodiment of a laser fiber bundle arrangement for use in an embodiment of a laser array system according to the present invention.
16B is a schematic diagram of an embodiment of a laser fiber bundle arrangement for use in an embodiment of a laser array system according to the present invention.
16C is a schematic diagram of an embodiment of a laser fiber bundle arrangement for use in an embodiment of a laser array system according to the present invention.
16D is a schematic diagram of an embodiment of a laser fiber bundle arrangement for use in an embodiment of a laser array system according to the present invention.

In general, the present invention relates to combinations of laser beams, systems for making these combinations, and processes using the combined beams. In particular, the present invention relates to arrays, assemblies and apparatus for combining laser beams into one or more combined laser beams from several laser beam sources. These combined laser beams preferably preserve the improved, various aspects and characteristics of laser beams from individual sources.

Embodiments of the array assemblies of the present invention and the combined laser beams they provide may find a wide range of applications. Embodiments of the array assembly of the present invention are compact and durable. Array assemblies of the present invention can be used in welding, additive manufacturing including 3-D printing, additive manufacturing-milling systems, such as additive and cutting fabrication, astronomy, meteorology, imaging, projection including entertainment, dental, to name a few. It has applications in medicine, including

Although the focus herein is on a blue laser diode array, it should be understood that this embodiment is merely illustrative of the types of array assemblies, systems, processes and combined laser beams contemplated by the present invention. Accordingly, embodiments of the present invention include array assemblies for combining laser beams from a variety of laser beam sources, such as solid state lasers, fiber lasers, semiconductor lasers, as well as other types of lasers and combinations and variations thereof. Embodiments of the present invention include all wavelengths, such as from about 380 nm to 800 nm (eg, visible light), from about 400 nm to about 880 nm, from about 100 nm to about 400 nm, from 700 nm to 1 mm, and these It includes combinations of specific wavelengths within various ranges and combinations of laser beams across variations. Embodiments of the arrays of the present invention may also find use in microwave coherent radiation (eg, wavelengths greater than about 1 mm). Embodiments of the inventive array may combine beams from one, two, three, tens or hundreds of laser sources. These laser beams can range from a few milliwatts to watts or kilowatts.

Embodiments of the present invention preferably consist of an array of blue laser diodes combined in a configuration to create a high intensity laser source. This high-brightness laser source can be used to directly process materials: marking, cutting, welding, brazing, heat treating, annealing. The material to be processed, such as a starting material or a target material, may include any material or component or composition, including but not limited to semiconductor components such as, but not limited to, TFTs (Thin Film Transistors); 3-D printing starting material; metals including gold, silver, platinum, aluminum and copper; plastic; tissue; and semiconductor wafers. Direct processing may include the removal of gold from electronics, projection displays and laser light shows, to name a few.

Embodiments of the high intensity laser source of the present invention may also be used to pump Raman lasers or Anti-Stokes lasers. The Raman medium is an optical fiber; or crystals such as diamond, KGW (potassium gadolinium tungstate, KGd(WO ₄ ) ₂ ), YVO ₄ and Ba(NO ₃ ) ₂ . In an embodiment, the high intensity laser source is a blue laser diode source that is a semiconductor device operating in a wavelength range of 400 nm to 500 nm. The Raman medium is a luminance converter and can increase the luminance of the blue laser diode source. Brightness enhancement is a single-mode, diffraction-limited source, i.e., any beam that produces a beam having an M ² of about 1 and 1.5 with beam parameter products of less than 1, less than 0.7, less than 0.5, less than 0.2, and less than 0.13 mm-mrad depending on the wavelength. method can be extended.

In embodiments, “n” or “N” (eg, 2, 3, 4, etc., tens, hundreds or more) laser diode sources may be used in several laser operations and procedures, eg, marking, melting of material. , welding, ablation, annealing, heat treatment, cutting, and combinations and transformations thereof.

An array of blue laser diodes can be combined with an optical assembly to create a high brightness direct diode laser system, which can provide a high brightness combined laser beam. 1 shows laser performance (beam parameter product versus W (watts)) for an embodiment of a range of beam parameter products when using fiber combiner technology with a luminance range of 8 mm-mrad at 200 watts to 45 mm-mrad at 4000 watts. A table 100 for units of laser power) is shown. Line 101 represents the performance for an embodiment of a laser diode array. Line 102 represents the performance of the high-density wavelength beam combination array. Line 103 represents the performance of the luminance conversion technique when scaled using a fiber combiner technique. Line 104 represents the performance of the luminance conversion technique when using the high-density wavelength combination of the output of the luminance converter. This allows the combined beam to maintain a single spatial mode or a near single spatial mode as the output level is scaled. High-density wavelength combining uses a grating to control the wavelength of each individual luminance converting laser, and then uses a grating to combine the beams into a single beam. The grating may be a regular grating, a holographic grating, a Fiber Bragg Grating (FBG), or a Volume Bragg Grating (VBG). A preferred embodiment is to use a grating, but it is also possible to use a prism.

2A is a schematic diagram of a laser diode 200 propagating a laser beam along a laser beam path to a fast axis collimating lens (FAC) 201 . A cylindrical aspherical lens of 1.1, 1.2, 1.5, 2 or even 4 mm captures the high-speed axis output and creates a diffraction-limited beam on the high-speed axis at the correct height to preserve luminance and further lower the optical chain to allow for beam combination. The collimating lens 202 is for collimating the slow axis of the laser diode (an axis with a smaller divergence angle, typically the x axis). Cylindrical aspherical lenses with 15, 16, 17, 18 or 21 mm focal lengths capture the output of the slow axis and aim the slow axis to preserve the luminance of the laser source. The focal length of the slow axis collimator results in an optimal combination of laser beamlets by the optical system with the target fiber diameter. In a preferred embodiment of the array, slow axis and fast axis collimating lenses are positioned along each laser beam path and used to shape the individual laser beams.

2B is a schematic diagram of a laser beam spot 203 formed by a laser beam from a laser diode passing through both a high speed and a low focus lens. This simulation considers the maximum divergence of the source over the entire hole of the source. It is understood that laser beam spots of many different shapes can be created, such as square, rectangular, circular, elliptical, linear, and combinations and variations of these and other shapes. For example, the combined laser beam produces a spot 203 with blue laser light focused at a NA of 0.18 with a spot size of 100 μm for a 100 mm focal length lens.

2C and 2D , having a laser diode subassembly 210 (eg, diode module, bar, plate, multi-die package) and four laser diode assemblies 210 , 210a , 210b , 210c An embodiment of a laser diode module 220 is shown.

2E is a detailed view showing portions of several laser beams 250a , 251a , 252a along their respective laser beam paths 250 , 251 , 252 . FIG. 2F is a cross-sectional view of the laser beam of FIG. 2E showing open space horizontal 260 and vertical 261 (based on the orientation of the drawing). The beam combining optics spatially close the beams together to eliminate open space (eg, 260 , 261 ) in the final spot 203 ( FIG. 2B ).

The laser diode module 220 is capable of generating a combined laser beam, preferably a combined blue laser beam, having the performance of curve 101 of FIG. 1 . The laser diode assembly 210 is a thermally conductive material, such as copper, having a power lead (eg, wire) (eg, 212 ) that enters to power the diode (eg, 213 ). It has a base plate (211). In this embodiment of a multi-die package, there are 20 laser diodes (eg, 213 ) arranged in a 5×4 configuration behind the cover plate. Other configurations for providing n × n diodes in an assembly, such as 4 × 4, 4 × 6, 5 × 6, 10 × 20, 30 × 5 and currently under development, etc., and combinations and variations thereof This is considered Each diode can have parallel plates for translating the position of the beam in the slow axis (e.g., 214) when using a single slow axis collimating (SAC) lens across multiple rows (e.g., 216). there is. Parallel plates are not required when using a separate slow axis lens for each laser diode, which is the preferred embodiment. The parallel plates correct the position of the laser beam path in the slow axis as it propagates from each individual laser diode, which may be the result of the assembly process. If a separate FAC/SAC lens pair is used for each laser diode then parallel plates are not needed. The SAC location compensates for any assembly errors in the package. The result of all these approaches is that individual FAC/parallel plates followed by aligning the beamlets to be parallel when using individual lens pairs (FAC/SAC) or shared SAC lenses, resulting in parallel and spaced laser beams (e.g., 251a, 252a , 250a) and beam paths (eg, 251 , 252 , 250 ).

The composite beams from each of the laser diode sub-assemblies 210, 210a, 210b, 210c are patterned mirrors used to redirect and combine the beams from the four laser diode sub-assemblies into a single beam, as shown in FIG. 2G . (eg 225). The four rows of collimating laser diodes are interlaced with the four rows of the other three packages generating the composite beam. 2H shows the position of a beam (eg, 230 ) from laser subassembly 210 . Aperture stop 235 clips unwanted scattered light from the combined beamlets, which reduces the thermal load on the fiber input face. Polarizing beam folding assembly 227 folds the beam in half in the slow axis to double the luminance of the composite laser diode beam (FIG. 2I). The beam can be folded by splitting the central emitter at the center resulting in the pattern shown in FIG. 2i , where beam 231 is the superposition of two beamlets in the slow axial direction with polarization and beam 232 is arbitrary It is a split beamlet that does not overlap with other emitters of If the beam is split between the second and third beamlets (Fig. 2J), the beam folder is more efficient and two of the columns of beams (e.g. 233) overlap, whereas the third column of beams (e.g. , 234) simply pass through a straight line. The telescope assembly 228 expands the combined laser beam on the slow axis or compresses the fast axis to allow the use of smaller lenses. The telescope assembly 228 shown in this example ( FIG. 2G ) expands the beam by a factor of 2.6×, increasing its size from 11 mm to 28.6 mm while reducing the divergence of the slow axis by the same factor of 2.6×. When the telescope assembly compresses the high-speed axis, it shortens the high-speed axis from a 22 mm high (full composite beam) to an 11 mm high, resulting in a 2x telescope providing a composite beam measuring 11 mm x 11 mm. This is a preferred embodiment because of its lower cost. An aspherical lens 229 focuses the composite beam onto an optical fiber 245 having a diameter of at least 50, 100, 150 or 200 μm. The fiber output of multiple laser diode module 220 is combined with a fiber combiner to produce a high power level laser according to FIG. 1 (line 101 ). The laser diode module is combined using an optical combining method in which an aspherical lens 229 and fiber combiner 240 are replaced with a set of shear mirrors that are coupled into a composite beam fired into the end of the aspherical lens and optical fiber. In this way, one, two, three, tens and hundreds of laser diode modules can be optically related and their laser beams combined. In this way, the combined laser beams themselves may additionally or additionally be combined to form multiple combined laser beams.

2c and 2d, the configuration makes it possible to fire a single 50, 100, 150 or 200 μm core optical fiber, for example, with a laser beam output of up to 200 watts. 2c and 2d are typical configurations for making eg 200 W diode array assemblies, eg 200 W combination modules, using up to four 50 watt discrete diode assemblies, eg 50 watt modules. shows the elements.

It is understood that the configuration, output and number of beams combined are feasible. 2C and 2D minimize the electrical connection from the power source to the laser diode.

Accordingly, individual modules, combination modules, and both may be configured to provide a single combined laser beam or multiple combined laser beams, for example two, three, four, tens, hundreds or more beams. Each of these laser beams can be fired with a single fiber, and they can be further combined to fire with fewer fibers. Thus, as an example, 12 combined laser beams can be fired at 12 fibers, or 12 beams can be combined and fired at less than 12 fibers, for example 10, 8, 6, 4 or 3 fibers. there is. It should be understood that this combination may be different output beams or may be beams with different wavelengths or the same wavelength to create a balance or imbalance in the distribution of power between individual optical fibers.

In embodiments, the brightness of an array of laser diodes may be improved by operating each array at a different wavelength and then combining them with a grating or series of narrowband dichroic filters. The luminance scaling of this technique is shown in FIG. 1 as a near straight line 102 . The starting point is the same luminance that can be achieved by a single module, and since each module spatially overlaps with the previous module in a linear manner, the fiber diameter does not change, but the emitted output produces a higher luminance from the wavelength-beam combining module. cause

In an embodiment, the array of blue laser diodes can be converted to a near single mode or single mode output with the aid of a luminance converter. The luminance converter may be an optical fiber, a crystal or a gas. The conversion process proceeds via Stimulated Raman Scattering, which is achieved by firing the output from an array of blue laser diodes by a resonator cavity into an optical fiber or crystal or gas. The blue laser diode output is converted to gain through induced Raman scattering, and the laser resonator oscillates at a first Stokes Raman line offset from the pump wavelength by a Stokes shift. See, for example, the embodiment shown in FIG. 3 and the related disclosure in the specification of US Patent Application Serial No. 14/787,393 based on WO 2014/179345, the entire disclosure of which is incorporated herein by reference. The performance characteristics of this technique are shown on line 103 of Figure 1, where the luminance is 2 at 0.3 mm-mrad for a 200 W laser and 2 for a 4000 W laser when using a fiber combiner to combine multiple high-intensity laser beams. Start at mm-mrad.

The luminance of the blue laser source can be further increased by combining the output of the luminance conversion source. The performance of this type of embodiment is illustrated by line 104 in FIG. 1 . Here the luminance is defined by the starting module at 0.3 mm-mrad. The gain bandwidth of a Raman line is substantially wider than that of a laser diode, so more lasers can be combined across wavelengths other than using laser diode technology alone. The result is a 4 kW laser with the same luminance as a 200 W laser or 0.3 mm-mrad. This is indicated by straight line 104 in FIG. 1 .

The techniques of the present invention described herein can be applied to lasers for a wide range of applications, ranging from welding, cutting, brazing, heat treating, shaping, shaping, forming, bonding, annealing and ablation, and combinations thereof and a variety of other material processing operations. It can be used to configure the system. Although preferred laser sources are relatively high luminance, the present invention provides the ability to configure the system to meet lower luminance requirements. Also, these laser groups can be combined into long lines, which can be used to perform laser operation on large area target materials, such as, for example, annealing large area semiconductor devices such as TFTs in flat panel displays.

The outputs of laser diodes, laser diode arrays, wavelength combination laser diode arrays, luminance conversion laser diode arrays, and wavelength combination laser diode arrays can be used to create unique individually addressable printing machines. Because the laser output from each module is sufficient to melt and fuse metal powders as well as plastics, these sources are ideal for additive-cutting as well as additive-manufacturing applications (i.e., current laser additive-manufacturing systems are not designed for CNC machines). or in combination with laser ablation or ablation, as well as conventional ablation fabrication techniques such as other types of milling machines). Because of their ability to provide small spot sizes, precision, and other factors, the systems and laser configurations of the present invention may also find application in micro and nano additive, ablation and additive-cutting fabrication techniques. Individually coupled laser arrays can be imaged on the powder surface to create objects at n times the speed of a single scanned laser source. The speed can be further increased by using a higher power laser for each of the n-spots. When using a luminance-converted laser, near-diffraction-limited spots can be obtained for n spots, making it possible to create high-resolution parts due to the sub-micron properties of individual spots formed by the blue high-intensity laser source. This smaller spot size of the inventive construction and system provides significant improvements in printing speed and resolution of the printing process compared to prior art 3D printing techniques. When combined with a portable powder feeder, embodiments of the system of the present invention are capable of continuously printing layer after layer at speeds in excess of 100 times the print speed of prior art additive manufacturing machines. By causing the system to deposit powder as the positioning device moves in the positive or negative direction immediately behind the laser fusion spot (eg, FIG. 5 , powder device 508, powder device 508b), the system then Print continuously without stopping to apply or level the required powder in layers.

3, a schematic diagram of a laser process with a laser system having two rows of staggered spots (eg, 303a and 303b) is shown. The laser spot (eg, 303a, 303b) is moved, eg, scanned, in the direction of arrow 301 across the target material. The target material may be in an output form 302 , which is then melted by a laser spot 304 and then solidified generally along a transition line 305 to form as a fused material 306 . The power of the beam, the firing time of the beam, the speed of movement, and combinations thereof may be varied in a predetermined manner to result in a predetermined shape of the melt transition line 305 . The distance at which the beams may be staggered may be 0, 0.1, 0.5, 1, 2 mm spacing as needed by the fixtures required to hold the fibers and their optical components. A stagger may also be a monotonically increasing or decreasing position in a set stagger step-size or a variable step-size. The exact speed advantage will depend on the target material and configuration of the part being fabricated.

Figure 4 summarizes the performance that can be achieved for an embodiment of a laser system and configuration such as that shown in Figures 5-7 for a 20 beam system whose velocity increases with each additional beam added to the system; .

5 , a schematic diagram of an embodiment of a laser system having an addressable laser delivery configuration is provided. The system has an addressable laser diode system 501 . System 501 provides independently addressable laser beams to a plurality of fibers 502a, 502b, 502c (more and fewer fibers and laser beams are contemplated). Fibers 502a, 502b, 502c are combined into a fiber bundle 504 contained in a protective tube 503 or cover. The fibers 502a, 502b, 502c in the fiber bundle 504 are fused together to form a print head 505 comprising an optical assembly 506 that focuses and directs a laser beam along a beam path to a target material 507 . do. The print head and powder hopper move with movement of the print head in a positive direction according to 510 . Additional material 509 may be placed on top of fusing material 507 with each pass of the print head or hopper. The print head is bi-directional and fuses material in both directions as the print head moves, so a powder hopper operates behind the print head to provide laminated material to be fused to the next pass of the laser printing head.

"Addressable array" means one or more of the following: an output; ignition period; ignition sequence; ignition location; beam output; The shape of the beam spot, as well as the focal length, e.g. depth of penetration in the z-direction, can be independently varied, controlled and predetermined or each laser beam within each fiber can be separated from the target material into a very precise final product (e.g. For example, it means providing a precise and predetermined transfer pattern that can create build materials.Embodiments of addressable arrays are also capable of performing various, predetermined and precise laser operations such as annealing, ablation and melting. It can have the capability for individual beams and the laser stops produced by these beams.

6 , a schematic diagram of an embodiment of a laser system having an addressable laser delivery configuration is provided. The laser system may be a laser diode array system, a luminance conversion system, or a high power fiber laser system. The system has an addressable laser system 601 . System 601 provides independently addressable laser beams to a plurality of fibers 602a, 602b, 602c (more and fewer fibers and laser beams are contemplated). Fibers 602a, 602b, 602c are combined into a fiber bundle 604 contained within a protective tube 603 or cover. The fibers 602a, 602b, 602c in the fiber bundle 604 are fused together to form a printing head 605 that includes an optical assembly 606 that focuses and directs a laser beam along a beam path to a target material 607 . do. Target material 607 is annealed to form annealed material 609 . The direction of movement of the laser head is indicated by arrow 610 .

7 , a schematic diagram of an embodiment of a laser system having an addressable laser delivery configuration is provided. The system has an addressable laser diode system 701 . The system 701 provides independently addressable laser beams to a plurality of fibers 702a, 702b, 702c (more and fewer fibers and laser beams are contemplated). Fibers 702a, 702b, 702c are combined into a fiber bundle 704 contained within a protective tube 703 or cover. The fibers 702a , 702b , 702c in the fiber bundle 704 are fused together to form a print head powder dispensing head 720 . The powder dispensing head 720 may have powder delivered coaxial to the laser beam or transverse to the laser beam. The powder dispensing head 720 provides an additional material layer 709 that is fused to and on top of the target material 707 . The direction of movement of the laser head is indicated by arrow 710 .

FIG. 8 shows the configuration of a bundle 800 of fibers (eg, 801 ) fused together and used in a laser head of a system such as the system shown in FIGS. 5-7 . The configuration will deliver a laser spot configured similar to the fiber arrangement. In this embodiment, there are 5 fibers in a single linear row, i.e. 1 x 5 linear configuration. A 1 x n linear row of fibers is the final laser printhead. where n depends on the physical extent of the product to be printed.

9 shows the configuration of a fiber (eg, 901) bundle 900 fused together and used in a laser head of a system such as the system shown in FIGS. 5-8. The configuration has two linear rows 902 , 903 of fibers arranged in a staggered and rhomboid arrangement. The fiber will deliver a laser spot configured similar to the fiber arrangement. In this example, there are two rows of 5 fibers in each linear row, i.e., a 2 x 5 linear configuration.

10 shows the configuration of a fiber (eg, 1001) bundle 1000 fused together and used in a laser head of a system such as the system shown in FIGS. 5-8. This configuration has three linear rows 1002 , 1003 , 1004 of fibers arranged in a staggered and rhomboidal arrangement. The fiber will deliver a laser spot configured similar to the fiber arrangement. In this embodiment, there are 3 rows of 5 fibers in each linear row, i.e., a 3 x 5 linear configuration.

11 shows the configuration of a fiber (eg, 1101) bundle 1100 fused together and used in a laser head of a system such as the system shown in FIGS. 5-8. This configuration has three linear rows 1102 , 1103 , 1104 of fibers arranged in a staggered and triangular arrangement. The fiber will deliver a laser spot configured similar to the fiber arrangement. In this embodiment, there are 3 rows of 5 fibers in each linear row, i.e., a 3 x 5 linear configuration.

FIG. 12 shows the configuration of a fiber (eg, 1201) bundle 1200 fused together and used in a laser head of a system such as the system shown in FIGS. 5-8. This configuration has four linear rows 1202 , 1203 , 1204 , 1205 of fibers arranged in a non-staggered and square arrangement. The fiber will deliver a laser spot configured similar to the fiber arrangement. In this example, there are 4 rows of 4 fibers in each linear row, i.e., a 4 x 4 linear configuration.

13 shows the configuration of a fiber (eg, 1301) bundle 1300 fused together and used in a laser head of a system such as the system shown in FIGS. 5-8. This configuration has 5 linear columns (eg 1302). The fibers are not staggered but arranged in a square arrangement. The fiber will deliver a laser spot configured similar to the fiber arrangement. In this example, there are 5 rows of 4 fibers in each linear row, i.e., a 5 x 5 linear configuration.

14A shows the configuration of a bundle 1401 of five (n=5) fibers (eg, 1401 ) arranged in a circular configuration.

14B shows the configuration of a bundle 1402 of nine (n=9) fibers (eg, 1402a ) arranged in a circular configuration with the fiber 1402b positioned at the center of the circle. The central fibers 1402b may be held in place by a medium or holding device or fused together.

14C shows the configuration of a bundle 1403 of 19 (n=19) fibers (eg, 1403a ) with an inner circle of fibers 1405 and a central fiber 1403b .

15A shows a bundle 1501 of seven (n=7) fibers (eg, 1501a) in a hexagonal arrangement with triangular spacing.

15B shows a bundle 1502 of 19 (n = 19) fibers (eg, 1502a) in a hexagonal arrangement with triangular spacing.

16A, 16B and 16C show the configuration of fiber bundles arranged in arbitrary geometrical arrangements. These configurations provide different levels of fiber density in the construction. 16A is an n=16 bundle 1601 of fibers (eg, 1601a) in a quadrant configuration. 16B shows n = 8 bundles 1602 of fibers (eg 1602b) in a square configuration. 16C shows n = 6 bundles 1604 of fibers (eg, 1604a) in a triangular configuration. 16D is an n=9 bundle 1603 of fibers (eg, 1603a) in a semicircular configuration.

The following examples are provided to illustrate various embodiments of the laser array, system, apparatus, and method of the present invention. These examples are for the purpose of illustration and should not be considered as the scope of the present invention, nor do they otherwise limit the scope of the present invention.

Example 1

An array of blue laser diodes spatially combined to create a single spot in a far field, which can be coupled to a solarization resistant optical fiber for delivery to a workpiece.

Example 2

An array of blue laser diodes as described in Example 1, wherein the polarizing beams are combined to increase the effective luminance of the laser beam.

Example 3

at the high speed axis of the laser diode later combined with the periodic plate, reflecting the first laser diode(s) and passing the second laser diode(s) to fill the space between the laser diodes in the high speed direction of the first array An array of blue laser diodes with a space between each collimated beam.

Example 4

A patterned mirror on a glass substrate, used to achieve the space fill of Example 3.

Example 5

A patterned mirror on one side of a glass substrate to achieve the space filling of Example 3, the glass substrate being thick enough to shift the vertical position of each laser diode to fill the void space between the individual laser diodes.

Example 6

A stepped heat sink that achieves the space fill of Example 3 and is a patterned mirror as described in Example 4.

Example 7

An array of blue laser diodes as described in Example 1, wherein each individual laser is held at a different wavelength by an external cavity to substantially increase the brightness of the array to the equivalent brightness of a single laser diode source.

Example 8

An array of blue laser diodes as described in Example 1, wherein the individual arrays of laser diodes are fixed to a single wavelength using an external cavity based grating and each array of laser diodes is a single array using a narrowly spaced optical filter or grating. combined with a beam.

Example 9

An array of blue laser diodes as described in Example 1, which is used to pump a Raman transducer, such as an optical fiber, having a pure fused silica core to create a high brightness source and a fluorinated outer core to contain the blue pump light.

Example 10

An array of blue laser diodes as described in Example 1, comprising an optical fiber having a GeO ₂ doped central core for an outer core to produce a high brightness source and an outer core larger than the central core to contain blue pump light; The same Raman transducer is used to pump.

Example 11

An array of blue laser diodes as described in Example 1, which is a Raman, such as an optical fiber, having a P ₂ O ₅ doped central core to produce a high luminance source and an outer core larger than the central core to contain blue pump light. Used to pump the transducer.

Example 12

An array of blue laser diodes as described in Example 1, which pumps a Raman transducer, such as an optical fiber, having a graded index core to produce a high brightness source and an outer core larger than the central core to contain blue pump light. used to do

Example 13

An array of blue laser diodes as described in Example 1, which is used to pump a Raman transducer that is a graded index GeO ₂ doped core and an outer stepped index core.

Example 14

An array of blue laser diodes as described in Example 1, which is used to pump a Raman transducer that is a graded index P ₂ O ₅ doped core and an outer stepped index core.

Example 15

An array of blue laser diodes as described in Example 1, which is used to pump a Raman transducer that is a graded index GeO ₂ doped core.

Example 16

An array of blue laser diodes as described in Example 1, which is used to pump a Raman transducer fiber that is a graded index P ₂ O ₅ doped core and an outer stepped index core.

Example 17

Other embodiments and variations of the embodiment of Example 1 are contemplated. An array of blue laser diodes as described in Example 1 is used to pump a Raman transducer, such as a diamond, to create a high intensity laser source. An array of blue laser diodes as described in Example 1 is used to pump a Raman transducer, such as a KGW, to create a high brightness laser source. An array of blue laser diodes as described in Example 1 is used to pump a Raman transducer, such as YVO ₄ , to create a high-brightness laser source. An array of blue laser diodes as described in Example 1 is used to pump a Raman transducer, such as Ba(NO ₃ ) ₂ , to create a high-brightness laser source. An array of blue laser diodes as described in Example 1 is used to pump a Raman transducer, a high pressure gas to create a high intensity laser source. An array of blue laser diodes as described in Example 1 is used to pump rare earth doped crystals to create a high intensity laser source. An array of blue laser diodes as described in Example 1 is used to pump rare earth doped fibers to create a high intensity laser source. An array of blue laser diodes as described in Example 1 is used to pump the outer core of the brightness converter to produce a higher rate of brightness enhancement.

Example 18

An array of Raman transforming lasers operated at individual wavelengths and combined to create a high power source while preserving the spatial luminance of the original source.

Example 19

dual core; and means for suppressing the secondary Raman signal in the high luminance central core using a filter, a fiber Bragg grating, a V order 1st and 2nd order Raman signal, or a micro bend loss difference.

Example 20

N (N≥ 1) laser diodes that can be turned on and off individually and imaged on a powder bed to melt the powder and fuse it into a unique part.

Example 21

The array of N (N≧1) laser diodes of Example 1, the output of which can be fiber coupled and each fiber is imaged or focused on a powder to melt the powder and fuse it into a unique layer-by-layer shape of a high-power laser beam may be arranged in a linear or non-linear manner to create an addressable array of

Example 22

An array of one or more laser diodes combined via a Raman transducer, the output of which can be fiber coupled, each fiber being imaged or focused on a powder to melt the powder and fuse it into a unique layer-by-layer shape with N (N≥ 1) ) can be arranged in a linear or non-linear manner to create an addressable array of high power laser beams.

Example 23

An xy motion system capable of transporting N (N≥ 1) blue laser sources across a powder bed while melting and fusing the powder bed, wherein the powder delivery system is positioned behind the laser source to provide a new powder layer behind the fusing layer. do.

Example 24

A z-motion system capable of increasing/decreasing the height of the part/powder bed of Example 20 after a new layer of powder has been placed.

Example 25

The z-motion system can increase/decrease the height of the part/powder bed of Example 20 after the powder layers are fused by the laser source.

Example 26

The bidirectional powder placement performance for Example 20 is placed immediately behind the laser spot(s) as the powder travels in the positive or negative x direction.

Example 27

The bidirectional powder placement performance for Example 20 is placed directly behind the laser spot(s) as the powder moves in the positive or negative y direction.

Example 28

Powder feeding system coaxial with N (N≥ 1) laser beams.

Example 29

Powder feeding system in which the powder is fed by gravity.

Example 30

A powder supply system in which the powder is entrained in an inert gas flow.

Example 31

A powder feeding system transverse to N (N≧1) laser beams, in which the powder is placed by gravity directly in front of the laser beam.

Example 32

A powder feeding system transverse to N (N≧1) laser beams, in which the powder is entrained in an inert gas intersecting the laser beam.

Example 33

Use the output of a Raman transducer, e.g. at 460 nm, to generate light at 230 nm or at half the wavelength of a source laser made of an externally resonant crystal such as KTP, but not allow short-wavelength light to propagate through the optical fiber. 2nd harmonic generation system.

Example 34

A third harmonic generation system using an externally resonating double crystal to generate light at 115 nm, but not allowing short-wavelength light to propagate through the optical fiber, using, for example, the output of a Raman transducer at 460 nm.

Example 35

A fourth harmonic generation system using an externally resonant double crystal to generate light at 57.5 nm, but not allowing short-wavelength light to propagate through the optical fiber, using, for example, the output of a Raman transducer at 460 nm.

Example 36

It uses an externally resonant double crystal to generate light at half the wavelength of the source laser or at 236.5 nm, but when pumped by an array of blue laser diodes at 450 nm to not allow the short wavelength light to propagate through the optical fiber. A second harmonic generation system using the output of a rare earth doped luminance converter such as thulium that fires a laser at 473 nm.

Example 37

Thulium uses an externally resonant double crystal to generate light at 118.25 nm, but fires a laser at 473 nm when pumped by an array of blue laser diodes at 450 nm to not allow short-wavelength light to propagate through the fiber. A third harmonic generation system using the output of a rare earth doped luminance converter such as

Example 38

Thulium uses an externally resonant double crystal to generate light at 59.1 nm, but fires a laser at 473 nm when pumped by an array of blue laser diodes at 450 nm to not allow short-wavelength light to propagate through the fiber. A fourth harmonic generation system using the output of a rare earth doped luminance converter such as

Example 39

All other rare earth doped fibers and crystals that can be pumped by a high power 450 nm source to generate visible or near-visible light output can be used in Examples 34-38.

Example 40

Firing of high power visible light into a non-circular outer core or clad to pump the inner core of a Raman or rare earth doped core fiber.

Example 41

Use of a polarization maintaining fiber to improve the gain of a Raman fiber by aligning the polarization of a pump with that of a Raman oscillator.

Example 42

An array of blue laser diodes as described in Example 1, which is used to pump a Raman transducer, such as an optical fiber, structured to produce a higher luminance source of a specific polarization.

Example 43

An array of blue laser diodes as described in Example 1, which is used to generate a higher luminance source of a particular polarization and to pump a Raman transducer, such as an optical fiber, structured to maintain the polarization state of the pumping source.

Example 44

An array of blue laser diodes as described in Example 1, which is used to pump a Raman transducer, such as an optical fiber, to create a higher luminance source with a non-circular outer core structured to improve Raman conversion efficiency.

Example 45

Embodiments of Examples 1-44 also include one or more of the following components or assemblies: an apparatus for planarizing powder at the end of each pass before the laser is scanned over the bed of powder; a device for scaling the power of a laser by combining multiple low power laser modules through a fiber combiner to produce a high power beam; a device for scaling the output power of a blue laser module by combining multiple low power laser modules through free space to produce a high power beam; It may include devices that combine multiple laser modules on a single baseplate using embedded cooling.

It should be noted that it is not necessary to provide or cover the theory underlying the subject matter of the embodiments of the present invention or novel and innovative performance or other beneficial features and characteristics related thereto. Nevertheless, various theories are provided herein to further advance the technology in this important area, particularly in the important areas of lasers, laser processing, and laser applications. These theories are presented herein and in no way limit, limit or narrow the scope of protection afforded by the claimed invention unless otherwise specified. These theories may or may not be practiced in order to use the invention. This invention may lead to novel and heretofore unknown theories for describing the operation, function, and features of embodiments of the methods, articles, materials, devices and systems of the present invention, and such recently developed theories provide that the present invention It is further understood that it does not limit the scope of protection it provides.

The various embodiments of lasers, diodes, arrays, modules, assemblies, acts and operations described herein may be used in the fields identified above and in various other fields. In addition, these embodiments may include, for example, existing lasers, additive manufacturing systems, operations and behaviors, as well as other existing equipment; Future lasers, additive manufacturing systems, operation and behavior; and with such articles as may be modified in part based on the teachings herein. In addition, the various embodiments described herein can be used with each other in different and various combinations. Thus, for example, the configurations provided in the various embodiments herein may be used in conjunction with each other, and the protection scope provided by the present invention is the specific embodiment, configuration or arrangement described in the specific embodiment, example, or embodiment in specific drawings. should not be limited to

The present invention may be embodied in other forms than those specifically disclosed herein without departing from the spirit or essential characteristics of the present invention. The described embodiments are to be considered in all respects only as illustrative and non-limiting.

Claims (62)

A laser system for performing laser operation, comprising:
a. a plurality of laser diode assemblies;
b. a plurality of laser diodes capable of generating individual blue laser beamlets along the laser beamlet path; and means for aligning and spacing the laser beamlets, wherein the laser beamlet path from each laser diode is parallel to the other laser beamlet path and does not coincide with the other laser beamlet path at a first predetermined distance. each laser diode assembly defining a spaced apart first parallel beamlet path; and
c. means for spatially combining individual blue laser beamlets from each of a plurality of laser diode assemblies to produce a combined laser beam having a single spot in a far field that can be coupled to an optical fiber for delivery to a target material;
d. means for spatially combining individual blue laser beamlets interlace beamlets from each of a plurality of laser diode assemblies on a parallel laser beamlet path, and means for spatially combining are optically associated with each laser diode; , define a second parallel beamlet path spaced apart at a second predetermined distance, the second predetermined distance being less than the first predetermined distance;
e. The combined laser beam has a power greater than 500 watts and a beam parameter product less than 20 mm mrad.
A laser system for performing laser operations. The method of claim 1,
at least three laser diode assemblies; each laser diode assembly includes at least 30 laser diodes; The laser diode assembly is capable of propagating a laser beam having an overall power of at least 30 watts.
A laser system for performing laser operations. 3. The method of claim 2,
the beam parameter product is less than 15 mm mrad
A laser system for performing laser operations. 3. The method of claim 2,
the beam parameter product is less than 10 mm mrad
A laser system for performing laser operations. The method of claim 1,
The spatially combining means generates a combined laser beam of N times the luminance of the individual laser beamlets, where N is the number of laser diodes in the laser diode assembly.
A laser system for performing laser operations. 6. The method of claim 5,
the spatially combining means increases the output while preserving the luminance of the combined laser beam; wherein the combined laser beam has an output that is at least 50 times the power of the individual laser beamlets, and wherein the beam parameter product of the combined laser beam is no more than twice the beam parameter product of the individual laser beamlets.
A laser system for performing laser operations. 7. The method of claim 6,
wherein the beam parameter product of the combined laser beam is not more than 1.5 times the beam parameter product of the individual laser beamlets.
A laser system for performing laser operations. 7. The method of claim 6,
wherein the beam parameter product of the combined laser beam is less than or equal to 1 times the beam parameter product of the individual laser beamlets.
A laser system for performing laser operations. 6. The method of claim 5,
The spatially combining means increases the output of the laser beam while preserving the luminance of the individual laser beamlets; wherein the combined laser beam has an output that is at least 100 times the power of the individual laser beamlets and the beam parameter product of the combined laser beam is no more than twice the beam parameter product of the individual laser beamlets.
A laser system for performing laser operations. 10. The method of claim 9,
wherein the beam parameter product of the combined laser beam is not more than 1.5 times the beam parameter product of the individual laser beamlets.
A laser system for performing laser operations. 8. The method of claim 7,
wherein the beam parameter product of the combined laser beam is less than or equal to 1 times the beam parameter product of the individual laser beamlets.
A laser system for performing laser operations. 7. The method of claim 1, 2 or 6,
The optical fiber is solarization resistant.
A laser system for performing laser operations. 7. The method of claim 1, 2 or 6,
wherein said spatially combining means comprises an assembly selected from the group consisting of parallel alignment plates and wedges for correcting at least one of a positioning error or a directing error of the laser diode.
A laser system for performing laser operations. 7. The method of claim 1, 2 or 6,
The spatially combining means comprises a deflecting beam combiner capable of increasing the effective brightness of the combined laser beam over individual laser beamlets.
A laser system for performing laser operations. 7. The method of claim 1, 2 or 6,
The laser diode assembly defines individual laser beamlet paths having a high speed direction and having a space between the respective paths in the high speed direction, wherein the spatially combining means is configured to aim the individual laser beamlets on a high speed axis of the laser diode. a periodic mirror for combining the collimator and the collimated laser beamlet, the periodic mirror reflecting a first laser beamlet from a first diode in the laser diode assembly and a second laser beamlet from a second diode in the laser diode assembly configured to deliver, wherein the space in the high-speed direction is filled with the laser beamlets.
A laser system for performing laser operations. The method of claim 1,
The spatially combining means comprises a patterned mirror on a glass substrate.
A laser system for performing laser operations. 17. The method of claim 16,
wherein the glass substrate is thick enough to divert the vertical position of the laser beamlet from the laser diode to fill the void space between the laser diodes.
A laser system for performing laser operations. The method of claim 1,
with stepped heat sink
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