KR102336265B1 - Contaminant intrusion prevention type mobile carrier - Google Patents

Abstract

The present invention relates to a mobile carrier for preventing contaminant intrusion, and more specifically, to a mobile carrier for preventing contaminant intrusion, wherein an enclosure space sealed from outside air is arranged therein to block the approach of outside air including foreign materials to an object to be transported in a production line requiring high purity such as the process of semiconductor devices, displays, chemical materials and pharmaceutical processes or in the step of transporting an object to be transported such as parts and finished products to each process in an automated process. For the purpose, the present invention comprises: a body having an entrance formed at one side, having an enclosure space formed therein to store a basket having a plurality of objects to be transported received therein, and including a caster for movement at a lower part; a door for opening and closing the entrance of the body; a mounting guide arranged on the inner bottom surface of the body to mount the basket; a sealing module arranged along the circumference of the entrance of the body; a sensing part for detecting the pressure, temperature and humidity of the enclosure space; and an abnormality detection part for receiving a detection value detected by the sensing part and, if the received detection value is less than a pre-stored reference value, reporting a change in the pressure of the enclosure space through a notification means.

Description

Contaminant intrusion prevention type mobile carrier

The present invention relates to a contaminant intrusion prevention type movable carrier, and more particularly, transporting parts or finished products to each process in a production line or automated process requiring high cleanliness such as semiconductor devices, displays, chemicals, and pharmaceutical processes. It relates to a contaminant intrusion prevention type movable carrier having an external air and a sealed seating space in order to block external air containing foreign substances from accessing an object to be transported in the process of transporting the object.

In general, in production lines or automated processes that require high cleanliness, such as semiconductor devices, flat panel displays, chemical substances, and pharmaceutical processes, blocking the inflow of external air containing foreign substances into parts or finished products reduces the defect rate of the final product. It is one of the most important factors for lowering.

To this end, a cleaning device for maintaining the cleanliness of the space is used in the above production line or automated process, and a foreign material removal device for removing foreign substances including dust in the process of putting in and out of parts and finished products, and workers entering and exiting is used.

Meanwhile, in the above-mentioned production line or automated process, the time required for the manufacturing process is shortened by loading and transporting parts or finished products on a transport cart. As ', it is a manual cart that the operator directly moves to increase process efficiency by transferring the wafer, which is a major component in the semiconductor field, during the manufacturing process.

Also, as another example, Republic of Korea Utility Model Registration No. 20-0463603 provides 'a handle bracket device for a folding cart and a folding cart having the same'. We provide a cart that can be moved to

In the prior art as described above, since the worker comes into contact with the outside air and the loaded product in the process of moving the product after loading it on the cart, foreign substances such as dust and moisture contained in the outside air come into contact with the product and the defect rate increases. there was.

In particular, when a small amount of dust or moisture is adsorbed or mixed with an article in a production line that requires high cleanliness such as semiconductor devices, flat panel displays, chemical substances, and pharmaceutical processes, there are problems such as malfunction or failure of the final product.

Republic of Korea Registered Utility Model No. 20-0319005 Republic of Korea Registered Utility Model No. 20-0463603

The present invention has been proposed to solve the above problems, and transports a transfer object such as parts or finished products to each process in a production line or automated process requiring high cleanliness such as semiconductor devices, displays, chemical substances, and pharmaceutical processes. An object of the present invention is to provide a contaminant intrusion prevention type movable carrier that prevents product defects due to impurities by blocking external air containing foreign substances from approaching the transfer object in the process of doing so.

In addition, the purpose of this is to provide a contaminant intrusion prevention type movable carrier that can be transported stably by increasing the efficiency of loading and unloading of the transported object, and preventing the positional displacement of the transported object placed there even by vibration or shock occurring during transport. .

In order to achieve the above object, the present invention includes a body having an entrance on one side, a seating space in which a basket in which a plurality of transfer objects are accommodated, and a caster for movement at the lower portion;

a door opening and closing the entrance of the body;

a seating guide disposed on the inner bottom surface of the body to receive the basket;

a sealing module disposed along the periphery of the entrance and exit of the body;

a sensing unit for sensing pressure, temperature, and humidity of the seating space;

and an abnormality detection unit that receives the sensed value from the sensing unit, and notifies a change in pressure in the seating space through a notification means when the received sensing value is less than a pre-stored reference value.

In addition, the sealing module, a concave-type gasket disposed along the periphery of the entrance and exit of the body, is provided on one surface of the door, the door is a flexible elastic molding that is arranged to cover the indentation-type gasket when the door is closed It is characterized in that it includes a gasket.

In addition, a plurality of the seating guides are disposed at positions spaced apart from each other, and a flat plate-shaped base on which the bottom of the basket is seated, and a post supporting the base to be positioned upward from the inner bottom surface of the body; It is characterized in that it includes a movement limiter provided on the base to limit the movement of the seated basket.

Further, the body includes a frame disposed in a grid shape, a pair of covers disposed to cover the frame, a cushioning material filled in a space between the frame and the pair of covers, and fixing the cover to the frame It is characterized in that it includes an adhesive layer for

In this case, the adhesive layer is 100 parts by weight of polyether esteramide, 20 parts by weight of styrene-butadiene-styrene elastomer (SBS), 60 parts by weight of maleic anhydride-modified polyurethane elastomer, 200 parts by weight of dimethylformamide (DMF), 40 parts by weight of toluene It is characterized in that it is formed by applying an adhesive comprising 20 parts by weight of talc having an average particle diameter of 4 to 5 μm and 15 parts by weight of a tackifier (Pencel D-125).

The present invention made as described above enables stable transport of the transported object and prevents the adsorption and mixing of foreign substances by blocking the inflow of external air into the space where the transported object is placed, thereby minimizing the defect rate of the final product. there are advantages to

In addition, the present invention detects the pressure of the seating space of the body in real time and when it does not reach the sensed reference value, it is notified to the outside through a notification means, thereby enabling rapid follow-up measures.

In addition, the present invention has an effect of maximizing the blocking rate of external air by forming an adhesive layer formed by applying an adhesive with increased sealing force between the frame and the cover constituting the body in order to isolate the seating space of the body from the outside.

1 is an exemplary view showing a contaminant intrusion prevention type removable carrier according to the present invention.
Figure 2 is an exemplary view showing a body constituting the present invention.
Figure 3 is an exemplary view showing a state in which a part of the body constituting the present invention is disassembled.
Figure 4 is an exemplary view showing an open state of the body constituting the present invention.
5 is an exemplary view showing a sealing module constituting the present invention.
6 is an exemplary view showing a seating guide constituting the present invention.
7 is a block diagram schematically showing a sensing unit and an abnormality detecting unit constituting the present invention.

Hereinafter, in addition to the above object, other objects and features of the present invention will become apparent through the description of the embodiments with reference to the accompanying drawings.

Unless defined otherwise, all terms used herein, including technical and scientific terms, have the same meaning as commonly understood by one of ordinary skill in the art to which this invention belongs. Terms such as those defined in a commonly used dictionary should be interpreted as having a meaning consistent with the meaning in the context of the related art, and should not be interpreted in an ideal or excessively formal meaning unless explicitly defined in the present application. does not

Hereinafter, a preferred embodiment of the contaminant intrusion prevention type movable carrier according to the present invention will be described with reference to the accompanying drawings.

First, in the contaminant intrusion prevention type movable carrier 1 according to the present invention, an entrance 13 is formed on one side and a basket (B) in which a plurality of transfer objects (T) are accommodated is placed in a seating space (11) This is formed and the body 10 having a caster 12 for movement at the lower portion, a door 20 for opening and closing the entrance 13 of the body 10, and the inner bottom surface 14 of the body 10 The seating guide 30 on which the basket B is placed, the sealing module 40 disposed along the periphery of the entrance 13 of the body 10, and the pressure and temperature of the seating space 11 , when the sensing unit 50 for detecting humidity and the sensing unit 50 receive the sensed value, and when the received sensing value is less than the pre-stored reference value, through the notification means 65, the seating space ( 11) includes an abnormality detection unit 60 that notifies the pressure change.

The body 10 is made in the form of an empty enclosure, and a seating space 11 in which a basket (B) in which a plurality of transfer objects (T) are accommodated (loaded) is formed in the lower part, and a caster for movement ( 12) is provided, and one or more entrances 13 communicating with the seating space 11 are formed.

In addition to the shape shown in the drawing, the body 10 can be variously changed according to the type of the transfer object T or the shape of the basket B, and is not limited to the shape shown in the drawing, of course.

And the body 10 is further provided with a gripper that can be gripped by the operator so that the operator can transfer the body 10 by gripping it, and the operation of the caster 12 for movement provided in the body 10 is performed. A transmission/reception module capable of communicating with a driving motor to control, a control panel, and an external remote controller or a server for control is provided to control the operation of the caster 12 for movement and may be configured to be movable remotely.

On the other hand, the body 10 includes an inner bottom surface 14 made of a flat plate shape and a plurality of side walls 15 vertically disposed at the edge of the inner bottom surface 14, and the inner bottom surface 14 and the side wall 15 includes a frame 16 arranged in a grid shape, a pair of covers 17 coupled from both sides with the frame 16 in the center, and the frame 16 and the pair It includes a cushioning material 18 filled in the space between the covers 17 of the and an adhesive layer 19 for fixing the cover 17 to the frame 16 .

The frame 16 is formed by arranging a plurality of metal steel materials in a grid shape and then bonding them together. it can be prevented

In addition, since a plurality of spaces are formed in the frame 16, the generation of resistance to movement due to a load is minimized in the process of manually moving the body 10 by an operator by reducing the overall weight.

Then, the plurality of spaces may be filled with the cushioning material 18 to maximize airtightness and watertightness while minimizing an increase in load.

The cover 17 is fixed to the frame 16, and a pair is arranged symmetrically from both sides with the frame 16 in the center.

This cover 17 is made of metal or synthetic resin material to prevent damage due to external impact without increasing the load on the body 10, and preferably has low thermal conductivity and excellent moisture-proofing properties, so there is no fear of corrosion. Among metals, it may be formed by using an aluminum material as a material, but the present invention is not limited thereto.

In addition, on the surface of the cover 17 , a pattern portion 171 concave in the surface for increasing the adhesion efficiency of the adhesive layer 19 to be described later may be further formed, and the pattern portion 171 is the adhesive layer 19 . By increasing the application area of the adhesive to be formed, it is possible to maximize the adhesion efficiency of the cover 17 and the frame 16 .

The cushioning material 18 is filled in the space formed in the frame 16 , and is filled between the pair of covers 17 and the space formed in the frame 16 to improve the airtightness and watertightness of the body 10 . make it

At this time, the cushioning material 18 can be used by foaming a urethane foam formed by mixing liquid polyol, isocyanate, and a foaming agent, and a rigid urethane panel cut to fit each space is placed in the space of the frame. can be placed

Of course, in addition to the urethane foam, any material having a property that is cured after a predetermined time elapses after foaming, such as an epoxy resin or foamed styrofoam, may be used.

The adhesive layer 19 is for bonding the pair of covers 17 to the frame 16. For this purpose, in the present invention, 100 parts by weight of polyetheresteramide and 20 parts by weight of styrene-butadiene-styrene elastomer (SBS) , 60 parts by weight of maleic anhydride-modified polyurethane elastomer, 200 parts by weight of dimethylformamide (DMF), 40 parts by weight of toluene, 20 parts by weight of talc having an average particle diameter of 4 to 5 μm, and 15 parts by weight of a tackifier (Pencel D-125) The adhesive layer 19 may be formed using the made adhesive.

The adhesive contains maleic anhydride-modified polyurethane elastomer to improve adhesion by increasing compatibility with urethane foam. 8 to 10 parts by weight of an acrylate selected from methyl acrylate, ethyl acrylate or butyl acrylate, 0.5 to 1 parts by weight of an initiator (PK-14, di-(t-butylperoxyisopropyl)benzene), and 300 to 350 parts by weight of a solvent It can be prepared by grafting by reacting -(t-butylperoxyisopropyl)benzene. At this time, the content of maleic anhydride of 3 to 5% showed the most preferable adhesive strength, and when it is outside the above range, compatibility with urethane foam is insufficient, so the adhesive strength varies depending on the type of metal or plastic to be adhered. appeared to be

By forming the adhesive layer 19 for bonding the cover 17 and the frame 16 using the adhesive made as described above, a gap is prevented from being generated between the cover 17 and the frame 16, and as described above, By introducing the adhesive into the pattern portion 171 formed on the cover 17 , the area of the adhesive layer 19 can be maximized to maximize airtightness and watertightness.

The door 20 is for opening and closing the doorway 13 formed in the body 10 , and is rotatably coupled to the body 10 through a hinge.

The door 20 has the same configuration as the body 10, but a part or the whole of the cover 17 is made of a transparent material such as glass, and the space of the frame 16 constituting the door 20 is It is preferable that the cushioning material 18 is not filled so that the seating space 11 inside the body 10 can be visually confirmed from the outside.

More preferably, a portion of the cushioning material 18 is disposed around the cover 17 in contact with the frame 16 so that the adhesive layer 19 is formed and airtightness and watertightness with the frame 16 can be formed. do.

A plurality of the seating guides 30 are disposed at positions spaced apart from each other on the inner bottom surface 14 of the body 10, and the basket B on which the transfer object T is loaded is seated.

A plurality of such seating guides 30 are disposed at positions spaced apart from each other, and the base 31 in the form of a flat plate on which the bottom of the basket B is seated, and the base 31 are mounted on the inside of the body 10 . It includes a post 32 supported to be positioned upward from the bottom surface 14, and a movement limiting member 33 provided on the base 31 to limit the movement of the basket B seated therein.

The base 31 is formed in the form of a plate with a flat top surface, and the bottom surface of the basket B is seated thereon. Here, an anti-slip pattern is formed on the upper surface of the base 31 to prevent sliding of the seated basket (B), or an anti-slip sheet made of rubber, urethane, silicone, or a mixture thereof to increase friction resistance is further provided. can

The post 32 is a column extending in a vertical direction to support the base 31 from below, and is integrally coupled to the base 31 using a plurality of coupling bolts.

This post 32 improves the convenience of entering and exiting the basket (B) seated on the base (31) and at the same time prevents a portion of the bottom surface of the basket (B) from directly contacting the inner bottom surface (14) of the body (10). do.

The movement limiting member 33 is disposed to protrude upward from the edge of the base 31 and abuts against and supports the side wall of the basket B seated on the base 31, thereby preventing the position displacement of the basket (B). do.

Here, in the movement limiter 33, the position of the basket B may be displaced by vibration or impact generated according to the movement of the body 10, and the movement limiter 33 is located on the side wall of the basket B. The position displacement of the basket is prevented by abutting and supporting it.

To this end, the movement limiting member 33 is made of a material having elastic restoring force such as rubber, urethane, silicone, and soft synthetic resin, and as shown in the drawing, one surface in contact with the side wall of the basket (B) is from the top to the bottom. It is made with an oblique line so that the width of the cross-section becomes larger as it goes toward the side, so that the area in contact with the side wall of the basket is reduced.

The sealing module 40 is disposed between the body 10 and the door 20 so that external air flows into the seating space 11 of the body 10 through a gap between the body 10 and the door 20 . to block it from happening.

To this end, the sealing module 40 is provided on one side of the concave-type gasket 41 disposed along the periphery of the doorway 13 of the body 10 and the door 20, so that the door 20 is and a flexible elastic gasket 42 disposed to cover the recessed gasket 41 when closing the entrance 13 .

The concave-type gasket 41 is disposed in a state of being inserted into the concave groove 111 formed in the body 10 , and the concave groove 111 is formed along the periphery of the entrance 13 of the body 10 on the surface of the body. is formed to be recessed inwardly so that a part of the recessed gasket 41 is exposed to the outside from the surface of the body in a state in which the recessed gasket 41 is inserted into the recessed groove 111 .

In addition, a plurality of the concave-type gasket 41 may be disposed at a distance from each other. In this case, the range in which the plurality of indentation-type gaskets 41 are disposed is the range covered by the flexible elastic gasket 42 .

The flexible elastic gasket 42 is provided on one surface of the door 20 so that when the door 20 closes the doorway 13, it covers the recessed gasket 41, so that the door 20 and the body (10) Close the gap between them.

Here, the flexible elastic gasket 42 extends in the width direction and is disposed to cover the indented gasket 41, and the flexible elastic gasket 42 includes a plurality of the indented gasket 41. It is formed to extend in the width direction so as to cover the entire arrangement of the concave-shaped gasket 41 in the case of the arrangement.

The sealing module 40 made as described above blocks the inflow of external air into the seating space 11 of the body 10 between the body 10 and the door 20, and in particular, the concave-type gasket 41 and the flexible elastic molding While the gasket 42 is in close contact with each other, the space between the body 10 and the door 20 is double sealed.

The sensing unit 50 is to sense the pressure of the seating space 11 of the body in real time, and a plurality of pressure sensors 51 disposed at positions spaced apart from each other in the seating space 11, and the seating space It is disposed in (11) and includes a temperature-humidity sensor 52 for detecting the temperature or humidity of the seating space.

The pressure sensor 51 is placed in the storage space 11 after the basket B loaded with the transfer object T is placed and then the door 20 is closed, that is, the seating space 11 is sealed in the seating space. (11) This is to check the airtightness of the seating space 11 by detecting the internal pressure and transmitting it to the abnormal detection unit 60 to be described later.

The pressure sensor 51 is for detecting a pressure difference generated by communicating with the outside in a closed state in which the seating space 11 is closed. It is to detect a change in the pressure of the seating space through communication.

The temperature and humidity sensor 52 detects the temperature and humidity inside the seating space 11 in real time and transmits the sensed value to the abnormality detection unit 60 .

Here, a plurality of the pressure sensor 51 and the temperature and humidity sensor 52 are spaced apart from each other and disposed in the seating space 11 to detect pressure change, temperature, and humidity due to air movement in the seating space 11 in real time. Then, the detected result value is transmitted to the abnormality detection unit 60 .

Meanwhile, the pressure sensor 51 is configured to be connected to a pressure gauge 53 provided with a gauge that displays real-time pressure values on one surface of the body 10, so that the pressure in the seating space from the outside can be checked in real time through the gauge of the pressure gauge. .(See Fig. 2)

The abnormality detection unit 60 calculates a result value by comparing each detection value with a pre-stored reference value after receiving the detection value transmitted from the sensing unit 50, and a notification value corresponding to the calculated result value. It is made to be discharged through the notification means (65).

The abnormality detection unit 60 includes a receiving module 61 that receives a detected value from the sensing unit 50, and a reference pressure value, a reference temperature value, and a reference humidity value of the seating space 11 are stored and the reception The calculation module 62 for calculating a result value by comparing the detected value received from the module 61 with the reference value, and after confirming the notification value corresponding to the result value calculated by the calculation module 62, the corresponding notification value Accordingly, it includes a notification module 64 for controlling the operation of the notification means 65, such as lighting and speaker provided outside the body 10, and a control module 64 for controlling the operation of each module.

The abnormality detection unit 60 made as described above detects the flow of air that occurs when the seating space is not sealed, detects in real time that external air flows into the seating space, and an abnormal state in which external air flows into the seating space In the event of an incident, prompt follow-up is provided.

As described above, in the present invention, specific matters such as specific components, etc., and limited embodiments and drawings have been described, but these are only provided to help a more general understanding of the present invention, and the present invention is not limited to the above embodiments. , various modifications and variations are possible from these descriptions by those of ordinary skill in the art to which the present invention pertains.

Therefore, the spirit of the present invention should not be limited to the described embodiments, and not only the claims to be described later, but also all those with equivalent or equivalent modifications to the claims will be said to belong to the scope of the spirit of the present invention. .

1: Contaminant intrusion prevention type movable carrier
10 : body
11: seating space 12: caster for movement
13: doorway 14: inner bottom surface
15: side wall 16: frame
17: cover 18: cushioning material
19: adhesive layer
20 : door
30: seating guide
31: base 32: post
33: movement restriction
40: sealing module
41: concave type gasket
42: flexible elastic gasket
50: sensing unit
51: pressure sensor 52: temperature and humidity sensor
53: pressure gauge
60: abnormality detection unit

Claims (5)

An entrance 13 is formed on one side, and a seating space 11 in which a basket (B) in which a plurality of transfer objects (T) are accommodated is formed, and a caster 12 for movement is provided at the lower body (10) ;
a door 20 for opening and closing the entrance 13 of the body 10;
a seating guide (30) disposed on the inner bottom surface (14) of the body (10) and on which the basket (B) is placed;
a sealing module 40 disposed along the periphery of the entrance 13 of the body 10;
a sensing unit 50 for sensing the pressure, temperature, and humidity of the seating space 11;
An abnormality detecting unit that receives the sensed value from the sensing unit 50 and notifies the pressure change in the seating space 11 through the notification means 65 when the received sensed value is less than the pre-stored reference value (60); including;
The sealing module 40,
A concave-type gasket 41 disposed along the periphery of the entrance 13 of the body 10,
A flexible elastic gasket 42 provided on one surface of the door 20 and extending in the width direction to cover the entire concave-shaped gasket 41 when the door 20 closes the doorway 13 ), including
The seating guide 30,
A plurality of dogs are placed in a location spaced apart from each other,
A base 31 in the form of a flat plate on which the bottom surface of the basket B is seated, and a post 32 supporting the base 31 to be positioned upward from the inner bottom surface 14 of the body 10; , It is provided on the base 31 and includes a movement limiting member 33 for limiting the movement of the seated basket (B),
The movement limiting member 33 is made of a material having an elastic restoring force, and one side in contact with the side wall of the basket (B) is formed in an oblique line so that the width of the cross-section increases from the top to the bottom. Anti-removable carrier. delete delete The method according to claim 1, The body (10),
A frame 16 arranged in a grid shape, a pair of covers 17 arranged to cover the frame 16, and a space between the frame 16 and the pair of covers 17 are filled Contaminant intrusion prevention type movable carrier comprising a cushioning material (18) and an adhesive layer (19) for fixing the cover (17) to the frame (16). The method according to claim 4, The adhesive layer (19),
100 parts by weight of polyether esteramide, 20 parts by weight of styrene-butadiene-styrene elastomer (SBS), 60 parts by weight of maleic anhydride-modified polyurethane elastomer, 200 parts by weight of dimethylformamide (DMF), 40 parts by weight of toluene, average particle diameter 4~ Contaminant intrusion prevention type movable carrier, characterized in that it is formed by applying an adhesive consisting of 20 parts by weight of 5 μm talc and 15 parts by weight of a tackifier (Pencel D-125).

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