KR102324548B9 - 레이저 가공 시스템 및 레이저 가공 방법 - Google Patents

레이저 가공 시스템 및 레이저 가공 방법

Info

Publication number
KR102324548B9
KR102324548B9 KR1020190179976A KR20190179976A KR102324548B9 KR 102324548 B9 KR102324548 B9 KR 102324548B9 KR 1020190179976 A KR1020190179976 A KR 1020190179976A KR 20190179976 A KR20190179976 A KR 20190179976A KR 102324548 B9 KR102324548 B9 KR 102324548B9
Authority
KR
South Korea
Prior art keywords
laser machining
machining method
machining system
laser
machining
Prior art date
Application number
KR1020190179976A
Other languages
English (en)
Other versions
KR20210086199A (ko
KR102324548B1 (ko
Inventor
이준정
이대영
이봉돈
손창환
Original Assignee
(주)미래컴퍼니
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by (주)미래컴퍼니 filed Critical (주)미래컴퍼니
Priority to KR1020190179976A priority Critical patent/KR102324548B1/ko
Priority to DE112020006412.3T priority patent/DE112020006412T5/de
Priority to CN202080079628.9A priority patent/CN114728373A/zh
Priority to PCT/KR2020/018695 priority patent/WO2021137488A1/ko
Priority to JP2022527834A priority patent/JP2023502617A/ja
Publication of KR20210086199A publication Critical patent/KR20210086199A/ko
Priority to KR1020210150297A priority patent/KR102483670B1/ko
Application granted granted Critical
Publication of KR102324548B1 publication Critical patent/KR102324548B1/ko
Publication of KR102324548B9 publication Critical patent/KR102324548B9/ko

Links

Classifications

    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
    • B23K26/00—Working by laser beam, e.g. welding, cutting or boring
    • B23K26/36—Removing material
    • B23K26/362—Laser etching
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
    • B23K26/00—Working by laser beam, e.g. welding, cutting or boring
    • B23K26/02—Positioning or observing the workpiece, e.g. with respect to the point of impact; Aligning, aiming or focusing the laser beam
    • B23K26/06—Shaping the laser beam, e.g. by masks or multi-focusing
    • B23K26/064—Shaping the laser beam, e.g. by masks or multi-focusing by means of optical elements, e.g. lenses, mirrors or prisms
    • B23K26/0643—Shaping the laser beam, e.g. by masks or multi-focusing by means of optical elements, e.g. lenses, mirrors or prisms comprising mirrors
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
    • B23K26/00—Working by laser beam, e.g. welding, cutting or boring
    • B23K26/02—Positioning or observing the workpiece, e.g. with respect to the point of impact; Aligning, aiming or focusing the laser beam
    • B23K26/06—Shaping the laser beam, e.g. by masks or multi-focusing
    • B23K26/064—Shaping the laser beam, e.g. by masks or multi-focusing by means of optical elements, e.g. lenses, mirrors or prisms
    • B23K26/0648—Shaping the laser beam, e.g. by masks or multi-focusing by means of optical elements, e.g. lenses, mirrors or prisms comprising lenses
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
    • B23K26/00—Working by laser beam, e.g. welding, cutting or boring
    • B23K26/02—Positioning or observing the workpiece, e.g. with respect to the point of impact; Aligning, aiming or focusing the laser beam
    • B23K26/06—Shaping the laser beam, e.g. by masks or multi-focusing
    • B23K26/0665—Shaping the laser beam, e.g. by masks or multi-focusing by beam condensation on the workpiece, e.g. for focusing
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
    • B23K26/00—Working by laser beam, e.g. welding, cutting or boring
    • B23K26/08—Devices involving relative movement between laser beam and workpiece
    • B23K26/082—Scanning systems, i.e. devices involving movement of the laser beam relative to the laser head
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
    • B23K26/00—Working by laser beam, e.g. welding, cutting or boring
    • B23K26/08—Devices involving relative movement between laser beam and workpiece
    • B23K26/0823—Devices involving rotation of the workpiece
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
    • B23K26/00—Working by laser beam, e.g. welding, cutting or boring
    • B23K26/08—Devices involving relative movement between laser beam and workpiece
    • B23K26/083—Devices involving movement of the workpiece in at least one axial direction
    • B23K26/0853—Devices involving movement of the workpiece in at least in two axial directions, e.g. in a plane
    • B23K26/0861—Devices involving movement of the workpiece in at least in two axial directions, e.g. in a plane in at least in three axial directions
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
    • B23K26/00—Working by laser beam, e.g. welding, cutting or boring
    • B23K26/36—Removing material
    • B23K26/38—Removing material by boring or cutting
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
    • B23K26/00—Working by laser beam, e.g. welding, cutting or boring
    • B23K26/36—Removing material
    • B23K26/38—Removing material by boring or cutting
    • B23K26/382—Removing material by boring or cutting by boring
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
    • B23K26/00—Working by laser beam, e.g. welding, cutting or boring
    • B23K26/36—Removing material
    • B23K26/40—Removing material taking account of the properties of the material involved
    • B23K26/402—Removing material taking account of the properties of the material involved involving non-metallic material, e.g. isolators
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
    • B23K2101/00—Articles made by soldering, welding or cutting
    • B23K2101/36—Electric or electronic devices
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
    • B23K2101/00—Articles made by soldering, welding or cutting
    • B23K2101/36—Electric or electronic devices
    • B23K2101/40—Semiconductor devices

Landscapes

  • Physics & Mathematics (AREA)
  • Optics & Photonics (AREA)
  • Engineering & Computer Science (AREA)
  • Plasma & Fusion (AREA)
  • Mechanical Engineering (AREA)
  • Laser Beam Processing (AREA)
KR1020190179976A 2019-12-31 2019-12-31 레이저 가공 시스템 및 레이저 가공 방법 KR102324548B1 (ko)

Priority Applications (6)

Application Number Priority Date Filing Date Title
KR1020190179976A KR102324548B1 (ko) 2019-12-31 2019-12-31 레이저 가공 시스템 및 레이저 가공 방법
DE112020006412.3T DE112020006412T5 (de) 2019-12-31 2020-12-18 Laserbearbeitungssystem und Laserbearbeitungsverfahren
CN202080079628.9A CN114728373A (zh) 2019-12-31 2020-12-18 激光加工系统及激光加工方法
PCT/KR2020/018695 WO2021137488A1 (ko) 2019-12-31 2020-12-18 레이저 가공 시스템 및 레이저 가공 방법
JP2022527834A JP2023502617A (ja) 2019-12-31 2020-12-18 レーザ加工システム及びレーザ加工方法
KR1020210150297A KR102483670B1 (ko) 2019-12-31 2021-11-04 레이저 가공 시스템 및 레이저 가공 방법

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
KR1020190179976A KR102324548B1 (ko) 2019-12-31 2019-12-31 레이저 가공 시스템 및 레이저 가공 방법

Related Child Applications (1)

Application Number Title Priority Date Filing Date
KR1020210150297A Division KR102483670B1 (ko) 2019-12-31 2021-11-04 레이저 가공 시스템 및 레이저 가공 방법

Publications (3)

Publication Number Publication Date
KR20210086199A KR20210086199A (ko) 2021-07-08
KR102324548B1 KR102324548B1 (ko) 2021-11-10
KR102324548B9 true KR102324548B9 (ko) 2022-03-15

Family

ID=76686009

Family Applications (2)

Application Number Title Priority Date Filing Date
KR1020190179976A KR102324548B1 (ko) 2019-12-31 2019-12-31 레이저 가공 시스템 및 레이저 가공 방법
KR1020210150297A KR102483670B1 (ko) 2019-12-31 2021-11-04 레이저 가공 시스템 및 레이저 가공 방법

Family Applications After (1)

Application Number Title Priority Date Filing Date
KR1020210150297A KR102483670B1 (ko) 2019-12-31 2021-11-04 레이저 가공 시스템 및 레이저 가공 방법

Country Status (5)

Country Link
JP (1) JP2023502617A (ko)
KR (2) KR102324548B1 (ko)
CN (1) CN114728373A (ko)
DE (1) DE112020006412T5 (ko)
WO (1) WO2021137488A1 (ko)

Families Citing this family (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR102324548B1 (ko) * 2019-12-31 2021-11-10 (주)미래컴퍼니 레이저 가공 시스템 및 레이저 가공 방법
KR20240002660A (ko) * 2022-06-29 2024-01-05 (주)미래컴퍼니 표시 장치 제조에 사용되는 레이저 가공 장치

Family Cites Families (16)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP4459530B2 (ja) * 2000-08-29 2010-04-28 三菱電機株式会社 レーザ加工装置
JP2005262251A (ja) * 2004-03-17 2005-09-29 Shibaura Mechatronics Corp レーザ加工装置
JP4667329B2 (ja) * 2006-08-30 2011-04-13 三菱電機株式会社 レーザ加工装置
JP4386137B2 (ja) * 2008-02-29 2009-12-16 トヨタ自動車株式会社 レーザ加工装置及びレーザ加工方法
JP5288987B2 (ja) * 2008-10-21 2013-09-11 三菱電機株式会社 レーザ加工装置
JP2010227962A (ja) * 2009-03-26 2010-10-14 Fujitsu Ltd レーザ加工方法
SE0950604A1 (sv) * 2009-08-24 2010-06-22 Esab Ab Anordning och förfarande för automatisk flersträngssvetsning
FR2949618B1 (fr) * 2009-09-01 2011-10-28 Air Liquide Tete de focalisation laser pour installation laser solide
JP5994723B2 (ja) * 2013-05-09 2016-09-21 トヨタ自動車株式会社 レーザ穴あけ加工方法および装置
US10357848B2 (en) * 2015-01-19 2019-07-23 General Electric Company Laser machining systems and methods
JP6451420B2 (ja) * 2015-03-11 2019-01-16 オムロン株式会社 接合構造体の製造方法
KR101742132B1 (ko) * 2015-08-10 2017-05-31 주식회사 이오테크닉스 레이저 가공장치
DE112017004557T5 (de) * 2016-09-09 2019-05-23 Mitsubishi Electric Corporation Laserbearbeitungsvorrichtung
KR102603393B1 (ko) * 2016-12-06 2023-11-17 삼성디스플레이 주식회사 레이저 가공 장치
KR102108403B1 (ko) * 2017-04-14 2020-05-26 (주)비슬로 다축 레이저 가공기
KR102324548B1 (ko) 2019-12-31 2021-11-10 (주)미래컴퍼니 레이저 가공 시스템 및 레이저 가공 방법

Also Published As

Publication number Publication date
DE112020006412T5 (de) 2022-11-17
KR20210136946A (ko) 2021-11-17
WO2021137488A1 (ko) 2021-07-08
KR20210086199A (ko) 2021-07-08
JP2023502617A (ja) 2023-01-25
CN114728373A (zh) 2022-07-08
KR102324548B1 (ko) 2021-11-10
KR102483670B1 (ko) 2023-01-03

Similar Documents

Publication Publication Date Title
SG11202006772QA (en) System and method for decentralized-identifier creation
EP3550679A4 (en) LASER PROCESSING SYSTEM AND LASER PROCESSING METHOD
EP3504024A4 (en) METHOD AND SYSTEM FOR LASER PROCESSING OF RELATIVELY LARGE WORKPIECES
SG10202000370UA (en) System and method for automated laser ablation
IL278602A (en) Laser beams methods and systems
EP3437788A4 (en) LASER MACHINING DEVICE AND LASER MACHINING METHOD
EP3548284A4 (en) SYSTEMS AND METHODS FOR GENERATIVE LASER PROCESSING
EP3819070A4 (en) LASER MACHINING DEVICE AND LASER MACHINING PROCESS
EP3487438A4 (en) DENTAL LASER SYSTEM AND METHOD
EP3646983A4 (en) LASER PROCESSING SYSTEM AND METHOD FOR CONTROLLING A LASER PROCESSING SYSTEM
EP3308896A4 (en) Laser machining apparatus and laser cutting method
GB202016092D0 (en) Systems and methods for features engineering
GB2596770B (en) Carrier-resolved photo-hall system and method
SG11202113102PA (en) Laser source and method for forming the same
KR102375235B9 (ko) 레이저 가공 시스템 및 방법
EP3871827A4 (en) Laser machining device and laser machining method
KR102324548B9 (ko) 레이저 가공 시스템 및 레이저 가공 방법
GB2585087B (en) Positioning system and method
IL287898A (en) A method and system for inspecting work pieces
EP3718687A4 (en) WORKPIECE SUPPORT SYSTEM AND WORKPIECE SUPPORT METHOD
EP3978183A4 (en) LASER PROCESSING DEVICE AND LASER PROCESSING METHOD THEREFORE
EP4024320A4 (en) WORK PLANNING SYSTEM AND WORK PLANNING PROCEDURES
GB2586838B (en) Free-viewpoint method and system
EP3348343A4 (en) Laser machining head and origin calibration method for same
EP3646419A4 (en) FIBER LASER DEVICE AND METHOD FOR MACHINING A WORKPIECE

Legal Events

Date Code Title Description
E701 Decision to grant or registration of patent right
GRNT Written decision to grant
G170 Re-publication after modification of scope of protection [patent]