KR102312242B1 - 컨볼루션 뉴럴 네트워크 기반 결함 검사를 위한 데이터 증강 - Google Patents

컨볼루션 뉴럴 네트워크 기반 결함 검사를 위한 데이터 증강 Download PDF

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KR102312242B1
KR102312242B1 KR1020197019610A KR20197019610A KR102312242B1 KR 102312242 B1 KR102312242 B1 KR 102312242B1 KR 1020197019610 A KR1020197019610 A KR 1020197019610A KR 20197019610 A KR20197019610 A KR 20197019610A KR 102312242 B1 KR102312242 B1 KR 102312242B1
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뵈른 브라우어
비자야쿠마르 라마찬드란
포드 리차드 월링
스캇 에이. 영
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    • H01L22/00—Testing or measuring during manufacture or treatment; Reliability measurements, i.e. testing of parts without further processing to modify the parts as such; Structural arrangements therefor
    • H01L22/20—Sequence of activities consisting of a plurality of measurements, corrections, marking or sorting steps
    • H01L22/24—Optical enhancement of defects or not directly visible states, e.g. selective electrolytic deposition, bubbles in liquids, light emission, colour change
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    • H01L22/00—Testing or measuring during manufacture or treatment; Reliability measurements, i.e. testing of parts without further processing to modify the parts as such; Structural arrangements therefor
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    • G06V—IMAGE OR VIDEO RECOGNITION OR UNDERSTANDING
    • G06V2201/00—Indexing scheme relating to image or video recognition or understanding
    • G06V2201/06—Recognition of objects for industrial automation

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KR1020197019610A 2016-12-07 2017-12-06 컨볼루션 뉴럴 네트워크 기반 결함 검사를 위한 데이터 증강 Active KR102312242B1 (ko)

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US201662430925P 2016-12-07 2016-12-07
US62/430,925 2016-12-07
US15/720,272 2017-09-29
US15/720,272 US10402688B2 (en) 2016-12-07 2017-09-29 Data augmentation for convolutional neural network-based defect inspection
PCT/US2017/064947 WO2018106827A1 (en) 2016-12-07 2017-12-06 Data augmentation for convolutional neural network-based defect inspection

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KR20190085159A KR20190085159A (ko) 2019-07-17
KR102312242B1 true KR102312242B1 (ko) 2021-10-12

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US (1) US10402688B2 (enExample)
JP (1) JP6845327B2 (enExample)
KR (1) KR102312242B1 (enExample)
CN (1) CN110168710B (enExample)
IL (1) IL267040B (enExample)
TW (1) TWI731198B (enExample)
WO (1) WO2018106827A1 (enExample)

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