KR102297750B9 - 고품질 SiC 단결정 성장방법 - Google Patents

고품질 SiC 단결정 성장방법

Info

Publication number
KR102297750B9
KR102297750B9 KR1020190119631A KR20190119631A KR102297750B9 KR 102297750 B9 KR102297750 B9 KR 102297750B9 KR 1020190119631 A KR1020190119631 A KR 1020190119631A KR 20190119631 A KR20190119631 A KR 20190119631A KR 102297750 B9 KR102297750 B9 KR 102297750B9
Authority
KR
South Korea
Prior art keywords
silicon carbide
high quality
crystal growth
carbide crystal
quality silicon
Prior art date
Application number
KR1020190119631A
Other languages
English (en)
Other versions
KR102297750B1 (ko
KR20210037789A (ko
Inventor
은태희
전명철
여임규
김장열
이승석
서한석
Original Assignee
주식회사 포스코
재단법인 포항산업과학연구원
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by 주식회사 포스코, 재단법인 포항산업과학연구원 filed Critical 주식회사 포스코
Priority to KR1020190119631A priority Critical patent/KR102297750B1/ko
Publication of KR20210037789A publication Critical patent/KR20210037789A/ko
Application granted granted Critical
Publication of KR102297750B1 publication Critical patent/KR102297750B1/ko
Publication of KR102297750B9 publication Critical patent/KR102297750B9/ko

Links

Classifications

    • C—CHEMISTRY; METALLURGY
    • C30—CRYSTAL GROWTH
    • C30B—SINGLE-CRYSTAL GROWTH; UNIDIRECTIONAL SOLIDIFICATION OF EUTECTIC MATERIAL OR UNIDIRECTIONAL DEMIXING OF EUTECTOID MATERIAL; REFINING BY ZONE-MELTING OF MATERIAL; PRODUCTION OF A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; SINGLE CRYSTALS OR HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; AFTER-TREATMENT OF SINGLE CRYSTALS OR A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; APPARATUS THEREFOR
    • C30B23/00—Single-crystal growth by condensing evaporated or sublimed materials
    • C30B23/02—Epitaxial-layer growth
    • C—CHEMISTRY; METALLURGY
    • C30—CRYSTAL GROWTH
    • C30B—SINGLE-CRYSTAL GROWTH; UNIDIRECTIONAL SOLIDIFICATION OF EUTECTIC MATERIAL OR UNIDIRECTIONAL DEMIXING OF EUTECTOID MATERIAL; REFINING BY ZONE-MELTING OF MATERIAL; PRODUCTION OF A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; SINGLE CRYSTALS OR HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; AFTER-TREATMENT OF SINGLE CRYSTALS OR A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; APPARATUS THEREFOR
    • C30B23/00—Single-crystal growth by condensing evaporated or sublimed materials
    • C30B23/002—Controlling or regulating
    • C30B23/005—Controlling or regulating flux or flow of depositing species or vapour
    • C—CHEMISTRY; METALLURGY
    • C30—CRYSTAL GROWTH
    • C30B—SINGLE-CRYSTAL GROWTH; UNIDIRECTIONAL SOLIDIFICATION OF EUTECTIC MATERIAL OR UNIDIRECTIONAL DEMIXING OF EUTECTOID MATERIAL; REFINING BY ZONE-MELTING OF MATERIAL; PRODUCTION OF A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; SINGLE CRYSTALS OR HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; AFTER-TREATMENT OF SINGLE CRYSTALS OR A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; APPARATUS THEREFOR
    • C30B29/00—Single crystals or homogeneous polycrystalline material with defined structure characterised by the material or by their shape
    • C30B29/10—Inorganic compounds or compositions
    • C30B29/36—Carbides
KR1020190119631A 2019-09-27 2019-09-27 고품질 SiC 단결정 성장방법 KR102297750B1 (ko)

Priority Applications (1)

Application Number Priority Date Filing Date Title
KR1020190119631A KR102297750B1 (ko) 2019-09-27 2019-09-27 고품질 SiC 단결정 성장방법

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
KR1020190119631A KR102297750B1 (ko) 2019-09-27 2019-09-27 고품질 SiC 단결정 성장방법

Publications (3)

Publication Number Publication Date
KR20210037789A KR20210037789A (ko) 2021-04-07
KR102297750B1 KR102297750B1 (ko) 2021-09-03
KR102297750B9 true KR102297750B9 (ko) 2022-05-10

Family

ID=75469705

Family Applications (1)

Application Number Title Priority Date Filing Date
KR1020190119631A KR102297750B1 (ko) 2019-09-27 2019-09-27 고품질 SiC 단결정 성장방법

Country Status (1)

Country Link
KR (1) KR102297750B1 (ko)

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN114232095B (zh) * 2021-11-22 2023-03-03 浙江大学杭州国际科创中心 一种优化碳化硅籽晶表面初期成核的方法

Family Cites Families (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN103620095B (zh) * 2011-08-29 2017-02-15 新日铁住金株式会社 碳化硅单晶基板及其制造方法
JP2014205593A (ja) * 2013-04-12 2014-10-30 住友電気工業株式会社 炭化珪素単結晶およびその製造方法
KR101537385B1 (ko) * 2013-12-05 2015-07-17 재단법인 포항산업과학연구원 탄화규소(SiC) 단결정 성장 방법
JP6334253B2 (ja) * 2014-05-15 2018-05-30 昭和電工株式会社 炭化珪素単結晶インゴットの加工方法

Also Published As

Publication number Publication date
KR102297750B1 (ko) 2021-09-03
KR20210037789A (ko) 2021-04-07

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E601 Decision to refuse application
X091 Application refused [patent]
AMND Amendment
X701 Decision to grant (after re-examination)
GRNT Written decision to grant
G170 Re-publication after modification of scope of protection [patent]