KR102287418B1 - 기판에 액체 코팅을 도포하기 위한 방법 - Google Patents

기판에 액체 코팅을 도포하기 위한 방법 Download PDF

Info

Publication number
KR102287418B1
KR102287418B1 KR1020197001751A KR20197001751A KR102287418B1 KR 102287418 B1 KR102287418 B1 KR 102287418B1 KR 1020197001751 A KR1020197001751 A KR 1020197001751A KR 20197001751 A KR20197001751 A KR 20197001751A KR 102287418 B1 KR102287418 B1 KR 102287418B1
Authority
KR
South Korea
Prior art keywords
delete delete
substrate
applicator
control range
amount
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Active
Application number
KR1020197001751A
Other languages
English (en)
Korean (ko)
Other versions
KR20190020331A (ko
Inventor
퍼 올라-젠센
패트릭 티. 호건
그레고리 엘. 하트마이어
케니쓰 에스. 에스펜쉬드
Original Assignee
노드슨 코포레이션
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by 노드슨 코포레이션 filed Critical 노드슨 코포레이션
Publication of KR20190020331A publication Critical patent/KR20190020331A/ko
Application granted granted Critical
Publication of KR102287418B1 publication Critical patent/KR102287418B1/ko
Active legal-status Critical Current
Anticipated expiration legal-status Critical

Links

Images

Classifications

    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B05—SPRAYING OR ATOMISING IN GENERAL; APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
    • B05B—SPRAYING APPARATUS; ATOMISING APPARATUS; NOZZLES
    • B05B1/00—Nozzles, spray heads or other outlets, with or without auxiliary devices such as valves, heating means
    • B05B1/30—Nozzles, spray heads or other outlets, with or without auxiliary devices such as valves, heating means designed to control volume of flow, e.g. with adjustable passages
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B05—SPRAYING OR ATOMISING IN GENERAL; APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
    • B05B—SPRAYING APPARATUS; ATOMISING APPARATUS; NOZZLES
    • B05B12/00—Arrangements for controlling delivery; Arrangements for controlling the spray area
    • B05B12/08—Arrangements for controlling delivery; Arrangements for controlling the spray area responsive to condition of liquid or other fluent material to be discharged, of ambient medium or of target ; responsive to condition of spray devices or of supply means, e.g. pipes, pumps or their drive means
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B05—SPRAYING OR ATOMISING IN GENERAL; APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
    • B05C—APPARATUS FOR APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
    • B05C11/00—Component parts, details or accessories not specifically provided for in groups B05C1/00 - B05C9/00
    • B05C11/10—Storage, supply or control of liquid or other fluent material; Recovery of excess liquid or other fluent material
    • B05C11/1002—Means for controlling supply, i.e. flow or pressure, of liquid or other fluent material to the applying apparatus, e.g. valves
    • B05C11/1007—Means for controlling supply, i.e. flow or pressure, of liquid or other fluent material to the applying apparatus, e.g. valves responsive to condition of liquid or other fluent material
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B05—SPRAYING OR ATOMISING IN GENERAL; APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
    • B05C—APPARATUS FOR APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
    • B05C11/00—Component parts, details or accessories not specifically provided for in groups B05C1/00 - B05C9/00
    • B05C11/10—Storage, supply or control of liquid or other fluent material; Recovery of excess liquid or other fluent material
    • B05C11/1002—Means for controlling supply, i.e. flow or pressure, of liquid or other fluent material to the applying apparatus, e.g. valves
    • B05C11/1007—Means for controlling supply, i.e. flow or pressure, of liquid or other fluent material to the applying apparatus, e.g. valves responsive to condition of liquid or other fluent material
    • B05C11/101—Means for controlling supply, i.e. flow or pressure, of liquid or other fluent material to the applying apparatus, e.g. valves responsive to condition of liquid or other fluent material responsive to weight of a container for liquid or other fluent material; responsive to level of liquid or other fluent material in a container
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B05—SPRAYING OR ATOMISING IN GENERAL; APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
    • B05C—APPARATUS FOR APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
    • B05C11/00—Component parts, details or accessories not specifically provided for in groups B05C1/00 - B05C9/00
    • B05C11/10—Storage, supply or control of liquid or other fluent material; Recovery of excess liquid or other fluent material
    • B05C11/1002—Means for controlling supply, i.e. flow or pressure, of liquid or other fluent material to the applying apparatus, e.g. valves
    • B05C11/1007—Means for controlling supply, i.e. flow or pressure, of liquid or other fluent material to the applying apparatus, e.g. valves responsive to condition of liquid or other fluent material
    • B05C11/1013—Means for controlling supply, i.e. flow or pressure, of liquid or other fluent material to the applying apparatus, e.g. valves responsive to condition of liquid or other fluent material responsive to flow or pressure of liquid or other fluent material
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B05—SPRAYING OR ATOMISING IN GENERAL; APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
    • B05C—APPARATUS FOR APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
    • B05C11/00—Component parts, details or accessories not specifically provided for in groups B05C1/00 - B05C9/00
    • B05C11/10—Storage, supply or control of liquid or other fluent material; Recovery of excess liquid or other fluent material
    • B05C11/1002—Means for controlling supply, i.e. flow or pressure, of liquid or other fluent material to the applying apparatus, e.g. valves
    • B05C11/1034—Means for controlling supply, i.e. flow or pressure, of liquid or other fluent material to the applying apparatus, e.g. valves specially designed for conducting intermittent application of small quantities, e.g. drops, of coating material
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B05—SPRAYING OR ATOMISING IN GENERAL; APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
    • B05C—APPARATUS FOR APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
    • B05C5/00—Apparatus in which liquid or other fluent material is projected, poured or allowed to flow on to the surface of the work
    • B05C5/02—Apparatus in which liquid or other fluent material is projected, poured or allowed to flow on to the surface of the work the liquid or other fluent material being discharged through an outlet orifice by pressure, e.g. from an outlet device in contact or almost in contact, with the work
    • B05C5/0208—Apparatus in which liquid or other fluent material is projected, poured or allowed to flow on to the surface of the work the liquid or other fluent material being discharged through an outlet orifice by pressure, e.g. from an outlet device in contact or almost in contact, with the work for applying liquid or other fluent material to separate articles
    • B05C5/0212—Apparatus in which liquid or other fluent material is projected, poured or allowed to flow on to the surface of the work the liquid or other fluent material being discharged through an outlet orifice by pressure, e.g. from an outlet device in contact or almost in contact, with the work for applying liquid or other fluent material to separate articles only at particular parts of the articles
    • B05C5/0216—Apparatus in which liquid or other fluent material is projected, poured or allowed to flow on to the surface of the work the liquid or other fluent material being discharged through an outlet orifice by pressure, e.g. from an outlet device in contact or almost in contact, with the work for applying liquid or other fluent material to separate articles only at particular parts of the articles by relative movement of article and outlet according to a predetermined path
    • B05C5/022—Apparatus in which liquid or other fluent material is projected, poured or allowed to flow on to the surface of the work the liquid or other fluent material being discharged through an outlet orifice by pressure, e.g. from an outlet device in contact or almost in contact, with the work for applying liquid or other fluent material to separate articles only at particular parts of the articles by relative movement of article and outlet according to a predetermined path the outlet being fixed during operation
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01F—MEASURING VOLUME, VOLUME FLOW, MASS FLOW OR LIQUID LEVEL; METERING BY VOLUME
    • G01F11/00—Apparatus requiring external operation adapted at each repeated and identical operation to measure and separate a predetermined volume of fluid or fluent solid material from a supply or container, without regard to weight, and to deliver it
    • G01F25/0046—
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01F—MEASURING VOLUME, VOLUME FLOW, MASS FLOW OR LIQUID LEVEL; METERING BY VOLUME
    • G01F25/00—Testing or calibration of apparatus for measuring volume, volume flow or liquid level or for metering by volume
    • G01F25/10—Testing or calibration of apparatus for measuring volume, volume flow or liquid level or for metering by volume of flowmeters
    • G01F25/14—Testing or calibration of apparatus for measuring volume, volume flow or liquid level or for metering by volume of flowmeters using a weighing apparatus
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01F—MEASURING VOLUME, VOLUME FLOW, MASS FLOW OR LIQUID LEVEL; METERING BY VOLUME
    • G01F9/00—Measuring volume flow relative to another variable, e.g. of liquid fuel for an engine
    • G01F9/001—Measuring volume flow relative to another variable, e.g. of liquid fuel for an engine with electric, electro-mechanic or electronic means
    • G01F9/003—Measuring volume flow relative to another variable, e.g. of liquid fuel for an engine with electric, electro-mechanic or electronic means by measuring the weight
    • H01L21/02343—
    • H01L24/27—
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10P—GENERIC PROCESSES OR APPARATUS FOR THE MANUFACTURE OR TREATMENT OF DEVICES COVERED BY CLASS H10
    • H10P14/00—Formation of materials, e.g. in the shape of layers or pillars
    • H10P14/60—Formation of materials, e.g. in the shape of layers or pillars of insulating materials
    • H10P14/65—Formation of materials, e.g. in the shape of layers or pillars of insulating materials characterised by treatments performed before or after the formation of the materials
    • H10P14/6516—Formation of materials, e.g. in the shape of layers or pillars of insulating materials characterised by treatments performed before or after the formation of the materials of treatments performed after formation of the materials
    • H10P14/6534—Formation of materials, e.g. in the shape of layers or pillars of insulating materials characterised by treatments performed before or after the formation of the materials of treatments performed after formation of the materials by exposure to a liquid
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10W—GENERIC PACKAGES, INTERCONNECTIONS, CONNECTORS OR OTHER CONSTRUCTIONAL DETAILS OF DEVICES COVERED BY CLASS H10
    • H10W72/00—Interconnections or connectors in packages
    • H10W72/01—Manufacture or treatment
    • H10W72/013—Manufacture or treatment of die-attach connectors

Landscapes

  • Physics & Mathematics (AREA)
  • Fluid Mechanics (AREA)
  • General Physics & Mathematics (AREA)
  • Application Of Or Painting With Fluid Materials (AREA)
  • Coating Apparatus (AREA)
  • Engineering & Computer Science (AREA)
  • Manufacturing & Machinery (AREA)
KR1020197001751A 2016-06-20 2017-06-02 기판에 액체 코팅을 도포하기 위한 방법 Active KR102287418B1 (ko)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
US15/186,926 US9789497B1 (en) 2016-06-20 2016-06-20 Systems and methods for applying a liquid coating to a substrate
US15/186,926 2016-06-20
PCT/US2017/035678 WO2017222781A1 (en) 2016-06-20 2017-06-02 Methods for applying a liquid coating to a substrate

Publications (2)

Publication Number Publication Date
KR20190020331A KR20190020331A (ko) 2019-02-28
KR102287418B1 true KR102287418B1 (ko) 2021-08-11

Family

ID=59034955

Family Applications (1)

Application Number Title Priority Date Filing Date
KR1020197001751A Active KR102287418B1 (ko) 2016-06-20 2017-06-02 기판에 액체 코팅을 도포하기 위한 방법

Country Status (6)

Country Link
US (2) US9789497B1 (https=)
EP (2) EP3471895B1 (https=)
JP (1) JP6862478B2 (https=)
KR (1) KR102287418B1 (https=)
CN (1) CN109328114B (https=)
WO (1) WO2017222781A1 (https=)

Families Citing this family (12)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN115121386B (zh) * 2017-01-17 2024-01-16 固瑞克明尼苏达有限公司 用于结构的自动移动涂装的系统
EP3706920B1 (en) * 2017-11-10 2026-04-29 Nordson Corporation Systems and methods for enhanced coating dispensing controls
KR102022091B1 (ko) * 2018-01-03 2019-11-05 티티앤에스 주식회사 노즐에서 분사되는 코팅액의 폭 제어 방법 및 장치
US11185879B2 (en) 2018-02-08 2021-11-30 Nordson Corporation Systems and methods for calibrating flow and for coating a substrate
US11346697B2 (en) * 2018-08-08 2022-05-31 Nordson Corporation System and method for remote metering station sensor calibration and verification
JP7426198B2 (ja) * 2019-04-17 2024-02-01 株式会社ジャノメ 塗布装置
CN110081955B (zh) * 2019-04-29 2020-09-25 新乡航空工业(集团)有限公司 可变粘度滑油微小流量计检定方法
CN118454929A (zh) 2019-12-06 2024-08-09 固瑞克明尼苏达有限公司 自动化移动喷射器和用其将流体喷射到目标表面上的方法
CN111504181A (zh) * 2020-04-09 2020-08-07 深圳市运泰利自动化设备有限公司 一种点胶针管的校准补偿方法
US12214377B2 (en) 2020-12-02 2025-02-04 Precision Valve & Automation, Inc. Conformal coating process with thickness control
CN112756193B (zh) * 2020-12-19 2022-03-22 深圳市轴心自控技术有限公司 同步自动可调双阀控制系统
CN114289270B (zh) * 2022-03-11 2022-05-13 北京理工大学 一种含环氧树脂圆管浸渍液面的检测及调节方法

Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2002203867A (ja) 1995-10-13 2002-07-19 Nordson Corp フリップチップアンダーフィル装置及び方法
JP2002542920A (ja) 1999-04-23 2002-12-17 ノードソン コーポレーション フィードバック制御を含む粘性材料分配システム及び方法
US20160005668A1 (en) 2012-11-21 2016-01-07 Nordson Corporation Flow metering for dispense monitoring and control

Family Cites Families (21)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2565413B2 (ja) * 1990-04-13 1996-12-18 富士写真フイルム株式会社 塗布方法及び装置
JP2910032B2 (ja) * 1996-08-09 1999-06-23 日本電気株式会社 自動塗布装置
US6692572B1 (en) * 1999-09-13 2004-02-17 Precision Valve & Automation, Inc. Active compensation metering system
US7032324B2 (en) * 2000-09-24 2006-04-25 3M Innovative Properties Company Coating process and apparatus
US6546927B2 (en) * 2001-03-13 2003-04-15 Aerogen, Inc. Methods and apparatus for controlling piezoelectric vibration
US20050001869A1 (en) * 2003-05-23 2005-01-06 Nordson Corporation Viscous material noncontact jetting system
US7028867B2 (en) 2003-10-30 2006-04-18 Nordson Corporation Conformal coating applicator and method
US20050095366A1 (en) * 2003-10-31 2005-05-05 Liang Fang Method of conformal coating using noncontact dispensing
CN100478967C (zh) * 2004-04-30 2009-04-15 诺信公司 调节从敷涂器施放到工件上的流体的布置的方法
US7575633B2 (en) * 2005-05-17 2009-08-18 Nordson Corporation Fluid dispenser with positive displacement pump
TW200800411A (en) * 2006-06-28 2008-01-01 Nordson Corp Conformal coating system with closed loop control
JP2008145625A (ja) * 2006-12-08 2008-06-26 Seiko Epson Corp 描画システム、液状体の描画方法、カラーフィルタの製造方法、有機ｅｌ素子の製造方法
JP5154879B2 (ja) * 2007-10-01 2013-02-27 武蔵エンジニアリング株式会社 液体材料の塗布装置、塗布方法およびプログラム
BRPI0820814A2 (pt) * 2007-12-21 2015-06-16 Fuel Tech Inc Método e aparelho de controle de fluxo
JP2010103131A (ja) * 2008-10-21 2010-05-06 Tokyo Electron Ltd 液処理装置及び液処理方法
DE102009029821A1 (de) * 2009-06-18 2010-12-23 Focke & Co.(Gmbh & Co. Kg) Verfahren zum Betreiben eines Beleimungssystems
KR20120128901A (ko) * 2011-05-18 2012-11-28 엘지디스플레이 주식회사 액정표시장치의 배향막 인쇄 장치 및 그 방법과, 배향막을 포함하는 액정표시장치 및 그 제조방법
US20140060144A1 (en) * 2012-08-30 2014-03-06 Illnois Tool Works Inc. Method and apparatus for calibrating dispensed deposits
JP6260980B2 (ja) * 2012-09-07 2018-01-17 国立大学法人名古屋大学 成膜装置、成膜方法および成膜プログラム
CN104858106B (zh) * 2015-06-01 2018-01-26 合肥京东方光电科技有限公司 涂布系统和涂布方法
EP3370885B1 (en) 2015-11-04 2020-12-30 Nordson Corporation Method and system for controlling a fluid pattern of a dispensed fluid

Patent Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2002203867A (ja) 1995-10-13 2002-07-19 Nordson Corp フリップチップアンダーフィル装置及び方法
JP2002542920A (ja) 1999-04-23 2002-12-17 ノードソン コーポレーション フィードバック制御を含む粘性材料分配システム及び方法
US20160005668A1 (en) 2012-11-21 2016-01-07 Nordson Corporation Flow metering for dispense monitoring and control

Also Published As

Publication number Publication date
US9789497B1 (en) 2017-10-17
WO2017222781A1 (en) 2017-12-28
JP2019520205A (ja) 2019-07-18
JP6862478B2 (ja) 2021-04-21
EP3639936A3 (en) 2020-06-03
EP3471895A1 (en) 2019-04-24
US20180036747A1 (en) 2018-02-08
EP3471895B1 (en) 2022-09-28
EP3639936B1 (en) 2025-04-30
CN109328114A (zh) 2019-02-12
US10661285B2 (en) 2020-05-26
KR20190020331A (ko) 2019-02-28
EP3639936A2 (en) 2020-04-22
CN109328114B (zh) 2022-03-04

Similar Documents

Publication Publication Date Title
KR102287418B1 (ko) 기판에 액체 코팅을 도포하기 위한 방법
JP7275153B2 (ja) 流量較正方法及び基材コーティング方法
KR101454351B1 (ko) 기판에 액체 코팅 물질을 도포하는 시스템 및 방법
EP3706920B1 (en) Systems and methods for enhanced coating dispensing controls
JP2018069237A (ja) 接着剤塗布を制御するシステム及び方法
US10881005B2 (en) Methods for dispensing a liquid or viscous material onto a substrate
US20190240688A1 (en) Systems and methods for calibrating flow and for coating a substrate

Legal Events

Date Code Title Description
PA0105 International application

St.27 status event code: A-0-1-A10-A15-nap-PA0105

PG1501 Laying open of application

St.27 status event code: A-1-1-Q10-Q12-nap-PG1501

A201 Request for examination
E13-X000 Pre-grant limitation requested

St.27 status event code: A-2-3-E10-E13-lim-X000

P11-X000 Amendment of application requested

St.27 status event code: A-2-2-P10-P11-nap-X000

P13-X000 Application amended

St.27 status event code: A-2-2-P10-P13-nap-X000

PA0201 Request for examination

St.27 status event code: A-1-2-D10-D11-exm-PA0201

D13-X000 Search requested

St.27 status event code: A-1-2-D10-D13-srh-X000

D14-X000 Search report completed

St.27 status event code: A-1-2-D10-D14-srh-X000

E701 Decision to grant or registration of patent right
PE0701 Decision of registration

St.27 status event code: A-1-2-D10-D22-exm-PE0701

GRNT Written decision to grant
PR0701 Registration of establishment

St.27 status event code: A-2-4-F10-F11-exm-PR0701

PR1002 Payment of registration fee

St.27 status event code: A-2-2-U10-U12-oth-PR1002

Fee payment year number: 1

PG1601 Publication of registration

St.27 status event code: A-4-4-Q10-Q13-nap-PG1601

P22-X000 Classification modified

St.27 status event code: A-4-4-P10-P22-nap-X000

PR1001 Payment of annual fee

St.27 status event code: A-4-4-U10-U11-oth-PR1001

Fee payment year number: 4

P22-X000 Classification modified

St.27 status event code: A-4-4-P10-P22-nap-X000