KR102287418B1 - 기판에 액체 코팅을 도포하기 위한 방법 - Google Patents

기판에 액체 코팅을 도포하기 위한 방법 Download PDF

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KR102287418B1
KR102287418B1 KR1020197001751A KR20197001751A KR102287418B1 KR 102287418 B1 KR102287418 B1 KR 102287418B1 KR 1020197001751 A KR1020197001751 A KR 1020197001751A KR 20197001751 A KR20197001751 A KR 20197001751A KR 102287418 B1 KR102287418 B1 KR 102287418B1
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South Korea
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delete delete
substrate
applicator
control range
amount
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KR20190020331A (ko
Inventor
퍼 올라-젠센
패트릭 티. 호건
그레고리 엘. 하트마이어
케니쓰 에스. 에스펜쉬드
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노드슨 코포레이션
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    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B05—SPRAYING OR ATOMISING IN GENERAL; APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
    • B05C—APPARATUS FOR APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
    • B05C11/00—Component parts, details or accessories not specifically provided for in groups B05C1/00 - B05C9/00
    • B05C11/10—Storage, supply or control of liquid or other fluent material; Recovery of excess liquid or other fluent material
    • B05C11/1002—Means for controlling supply, i.e. flow or pressure, of liquid or other fluent material to the applying apparatus, e.g. valves
    • B05C11/1007—Means for controlling supply, i.e. flow or pressure, of liquid or other fluent material to the applying apparatus, e.g. valves responsive to condition of liquid or other fluent material
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B05—SPRAYING OR ATOMISING IN GENERAL; APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
    • B05B—SPRAYING APPARATUS; ATOMISING APPARATUS; NOZZLES
    • B05B1/00—Nozzles, spray heads or other outlets, with or without auxiliary devices such as valves, heating means
    • B05B1/30—Nozzles, spray heads or other outlets, with or without auxiliary devices such as valves, heating means designed to control volume of flow, e.g. with adjustable passages
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B05—SPRAYING OR ATOMISING IN GENERAL; APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
    • B05B—SPRAYING APPARATUS; ATOMISING APPARATUS; NOZZLES
    • B05B12/00—Arrangements for controlling delivery; Arrangements for controlling the spray area
    • B05B12/08—Arrangements for controlling delivery; Arrangements for controlling the spray area responsive to condition of liquid or other fluent material to be discharged, of ambient medium or of target ; responsive to condition of spray devices or of supply means, e.g. pipes, pumps or their drive means
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B05—SPRAYING OR ATOMISING IN GENERAL; APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
    • B05C—APPARATUS FOR APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
    • B05C11/00—Component parts, details or accessories not specifically provided for in groups B05C1/00 - B05C9/00
    • B05C11/10—Storage, supply or control of liquid or other fluent material; Recovery of excess liquid or other fluent material
    • B05C11/1002—Means for controlling supply, i.e. flow or pressure, of liquid or other fluent material to the applying apparatus, e.g. valves
    • B05C11/1007—Means for controlling supply, i.e. flow or pressure, of liquid or other fluent material to the applying apparatus, e.g. valves responsive to condition of liquid or other fluent material
    • B05C11/101—Means for controlling supply, i.e. flow or pressure, of liquid or other fluent material to the applying apparatus, e.g. valves responsive to condition of liquid or other fluent material responsive to weight of a container for liquid or other fluent material; responsive to level of liquid or other fluent material in a container
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B05—SPRAYING OR ATOMISING IN GENERAL; APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
    • B05C—APPARATUS FOR APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
    • B05C11/00—Component parts, details or accessories not specifically provided for in groups B05C1/00 - B05C9/00
    • B05C11/10—Storage, supply or control of liquid or other fluent material; Recovery of excess liquid or other fluent material
    • B05C11/1002—Means for controlling supply, i.e. flow or pressure, of liquid or other fluent material to the applying apparatus, e.g. valves
    • B05C11/1007—Means for controlling supply, i.e. flow or pressure, of liquid or other fluent material to the applying apparatus, e.g. valves responsive to condition of liquid or other fluent material
    • B05C11/1013—Means for controlling supply, i.e. flow or pressure, of liquid or other fluent material to the applying apparatus, e.g. valves responsive to condition of liquid or other fluent material responsive to flow or pressure of liquid or other fluent material
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B05—SPRAYING OR ATOMISING IN GENERAL; APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
    • B05C—APPARATUS FOR APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
    • B05C11/00—Component parts, details or accessories not specifically provided for in groups B05C1/00 - B05C9/00
    • B05C11/10—Storage, supply or control of liquid or other fluent material; Recovery of excess liquid or other fluent material
    • B05C11/1002—Means for controlling supply, i.e. flow or pressure, of liquid or other fluent material to the applying apparatus, e.g. valves
    • B05C11/1034—Means for controlling supply, i.e. flow or pressure, of liquid or other fluent material to the applying apparatus, e.g. valves specially designed for conducting intermittent application of small quantities, e.g. drops, of coating material
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B05—SPRAYING OR ATOMISING IN GENERAL; APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
    • B05C—APPARATUS FOR APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
    • B05C5/00—Apparatus in which liquid or other fluent material is projected, poured or allowed to flow on to the surface of the work
    • B05C5/02—Apparatus in which liquid or other fluent material is projected, poured or allowed to flow on to the surface of the work the liquid or other fluent material being discharged through an outlet orifice by pressure, e.g. from an outlet device in contact or almost in contact, with the work
    • B05C5/0208—Apparatus in which liquid or other fluent material is projected, poured or allowed to flow on to the surface of the work the liquid or other fluent material being discharged through an outlet orifice by pressure, e.g. from an outlet device in contact or almost in contact, with the work for applying liquid or other fluent material to separate articles
    • B05C5/0212—Apparatus in which liquid or other fluent material is projected, poured or allowed to flow on to the surface of the work the liquid or other fluent material being discharged through an outlet orifice by pressure, e.g. from an outlet device in contact or almost in contact, with the work for applying liquid or other fluent material to separate articles only at particular parts of the articles
    • B05C5/0216—Apparatus in which liquid or other fluent material is projected, poured or allowed to flow on to the surface of the work the liquid or other fluent material being discharged through an outlet orifice by pressure, e.g. from an outlet device in contact or almost in contact, with the work for applying liquid or other fluent material to separate articles only at particular parts of the articles by relative movement of article and outlet according to a predetermined path
    • B05C5/022—Apparatus in which liquid or other fluent material is projected, poured or allowed to flow on to the surface of the work the liquid or other fluent material being discharged through an outlet orifice by pressure, e.g. from an outlet device in contact or almost in contact, with the work for applying liquid or other fluent material to separate articles only at particular parts of the articles by relative movement of article and outlet according to a predetermined path the outlet being fixed during operation
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01F—MEASURING VOLUME, VOLUME FLOW, MASS FLOW OR LIQUID LEVEL; METERING BY VOLUME
    • G01F11/00—Apparatus requiring external operation adapted at each repeated and identical operation to measure and separate a predetermined volume of fluid or fluent solid material from a supply or container, without regard to weight, and to deliver it
    • G01F25/0046—
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01F—MEASURING VOLUME, VOLUME FLOW, MASS FLOW OR LIQUID LEVEL; METERING BY VOLUME
    • G01F25/00—Testing or calibration of apparatus for measuring volume, volume flow or liquid level or for metering by volume
    • G01F25/10—Testing or calibration of apparatus for measuring volume, volume flow or liquid level or for metering by volume of flowmeters
    • G01F25/14—Testing or calibration of apparatus for measuring volume, volume flow or liquid level or for metering by volume of flowmeters using a weighing apparatus
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01F—MEASURING VOLUME, VOLUME FLOW, MASS FLOW OR LIQUID LEVEL; METERING BY VOLUME
    • G01F9/00—Measuring volume flow relative to another variable, e.g. of liquid fuel for an engine
    • G01F9/001—Measuring volume flow relative to another variable, e.g. of liquid fuel for an engine with electric, electro-mechanic or electronic means
    • G01F9/003—Measuring volume flow relative to another variable, e.g. of liquid fuel for an engine with electric, electro-mechanic or electronic means by measuring the weight
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
    • H01L21/02104—Forming layers
    • H01L21/02107—Forming insulating materials on a substrate
    • H01L21/02296—Forming insulating materials on a substrate characterised by the treatment performed before or after the formation of the layer
    • H01L21/02318—Forming insulating materials on a substrate characterised by the treatment performed before or after the formation of the layer post-treatment
    • H01L21/02343—Forming insulating materials on a substrate characterised by the treatment performed before or after the formation of the layer post-treatment treatment by exposure to a liquid
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L24/00—Arrangements for connecting or disconnecting semiconductor or solid-state bodies; Methods or apparatus related thereto
    • H01L24/01—Means for bonding being attached to, or being formed on, the surface to be connected, e.g. chip-to-package, die-attach, "first-level" interconnects; Manufacturing methods related thereto
    • H01L24/26—Layer connectors, e.g. plate connectors, solder or adhesive layers; Manufacturing methods related thereto
    • H01L24/27—Manufacturing methods

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  • Physics & Mathematics (AREA)
  • Fluid Mechanics (AREA)
  • General Physics & Mathematics (AREA)
  • Engineering & Computer Science (AREA)
  • Manufacturing & Machinery (AREA)
  • Computer Hardware Design (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Power Engineering (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • Application Of Or Painting With Fluid Materials (AREA)
  • Coating Apparatus (AREA)
KR1020197001751A 2016-06-20 2017-06-02 기판에 액체 코팅을 도포하기 위한 방법 Active KR102287418B1 (ko)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
US15/186,926 US9789497B1 (en) 2016-06-20 2016-06-20 Systems and methods for applying a liquid coating to a substrate
US15/186,926 2016-06-20
PCT/US2017/035678 WO2017222781A1 (en) 2016-06-20 2017-06-02 Methods for applying a liquid coating to a substrate

Publications (2)

Publication Number Publication Date
KR20190020331A KR20190020331A (ko) 2019-02-28
KR102287418B1 true KR102287418B1 (ko) 2021-08-11

Family

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Family Applications (1)

Application Number Title Priority Date Filing Date
KR1020197001751A Active KR102287418B1 (ko) 2016-06-20 2017-06-02 기판에 액체 코팅을 도포하기 위한 방법

Country Status (6)

Country Link
US (2) US9789497B1 (enExample)
EP (2) EP3471895B1 (enExample)
JP (1) JP6862478B2 (enExample)
KR (1) KR102287418B1 (enExample)
CN (1) CN109328114B (enExample)
WO (1) WO2017222781A1 (enExample)

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KR102022091B1 (ko) * 2018-01-03 2019-11-05 티티앤에스 주식회사 노즐에서 분사되는 코팅액의 폭 제어 방법 및 장치
US11185879B2 (en) 2018-02-08 2021-11-30 Nordson Corporation Systems and methods for calibrating flow and for coating a substrate
US11346697B2 (en) * 2018-08-08 2022-05-31 Nordson Corporation System and method for remote metering station sensor calibration and verification
JP7426198B2 (ja) * 2019-04-17 2024-02-01 株式会社ジャノメ 塗布装置
CN110081955B (zh) * 2019-04-29 2020-09-25 新乡航空工业(集团)有限公司 可变粘度滑油微小流量计检定方法
CN111504181A (zh) * 2020-04-09 2020-08-07 深圳市运泰利自动化设备有限公司 一种点胶针管的校准补偿方法
US12214377B2 (en) 2020-12-02 2025-02-04 Precision Valve & Automation, Inc. Conformal coating process with thickness control
CN112756193B (zh) * 2020-12-19 2022-03-22 深圳市轴心自控技术有限公司 同步自动可调双阀控制系统
CN114289270B (zh) * 2022-03-11 2022-05-13 北京理工大学 一种含环氧树脂圆管浸渍液面的检测及调节方法

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JP2002203867A (ja) 1995-10-13 2002-07-19 Nordson Corp フリップチップアンダーフィル装置及び方法
JP2002542920A (ja) 1999-04-23 2002-12-17 ノードソン コーポレーション フィードバック制御を含む粘性材料分配システム及び方法
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Also Published As

Publication number Publication date
EP3471895A1 (en) 2019-04-24
KR20190020331A (ko) 2019-02-28
EP3639936A2 (en) 2020-04-22
JP6862478B2 (ja) 2021-04-21
EP3639936A3 (en) 2020-06-03
CN109328114B (zh) 2022-03-04
CN109328114A (zh) 2019-02-12
EP3639936B1 (en) 2025-04-30
JP2019520205A (ja) 2019-07-18
EP3471895B1 (en) 2022-09-28
US9789497B1 (en) 2017-10-17
WO2017222781A1 (en) 2017-12-28
US20180036747A1 (en) 2018-02-08
US10661285B2 (en) 2020-05-26

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