KR102287002B1 - actuator - Google Patents

Abstract

An actuator that generates thrust by supplying gas, comprising: a cylinder into which gas is supplied; a piston reciprocating in the cylinder; and a gas chamber formed in the cylinder, the gas chamber comprising: a first gas chamber capable of maintaining a vacuum; , gas is supplied, and it has a second gas chamber and a third gas chamber for reciprocating the piston according to the supply, and a communication passage is formed in the piston to communicate the distal end of the piston and the first gas chamber.

Description

actuator

The present invention relates to an actuator.

Conventionally, as shown in, for example, Patent Document 1, as an actuator used in a precision positioning device or the like, a gas pressure actuator having a cylinder having a gas chamber and a piston and generating thrust by supplying gas to the gas chamber is known. there is.

Patent Document 1: Japanese Patent Application Laid-Open No. 2004-144196

When a semiconductor chip etc. are adsorbed using the conventional actuator as described in the said patent document 1, it is necessary to provide separately an adsorption|suction mechanism at the front-end|tip part of a piston. For example, in order to adsorb the semiconductor chip during bonding of the semiconductor chip, it is necessary to provide an adsorption mechanism for the semiconductor chip at the tip of the piston separately from the mechanism for pressing the semiconductor chip. Therefore, in the conventional actuator, it is difficult to realize adsorption|suction of a to-be-adsorbed component, such as a semiconductor chip, with a compact structure.

Accordingly, an object of the present invention is to provide an actuator capable of realizing adsorption of a part to be adsorbed with a compact configuration.

In order to solve the above problems, an actuator according to an aspect of the present invention is an actuator that generates thrust by supplying gas, a cylinder to which gas is supplied, a piston reciprocating in the cylinder, and a cylinder formed in the cylinder It has a gas chamber, and the gas chamber has a first gas chamber that can be maintained in a vacuum, a second gas chamber to which gas is supplied, and a second gas chamber and a third gas chamber for reciprocating the piston according to the supply, and in the piston, A communication passage is formed for communicating the front end with the first gas chamber.

Further, the actuator is an actuator that generates thrust by supplying gas, and a cylinder into which gas is supplied, a piston reciprocating in the cylinder, a gas chamber formed in the cylinder, and the gas supplied into the cylinder are released to the atmosphere. The gas chamber has a first gas chamber capable of maintaining a vacuum, and a second gas chamber to which gas is supplied and reciprocating the piston according to the supply, and in the piston, the front end of the piston and the first A communication passage for communicating with the gas chamber is formed, and the atmospheric opening portion is formed so as to communicate between the first gas chamber and the second gas chamber.

In the actuator, the front-end|tip part of the piston and the 1st gas chamber which can hold|maintain in a vacuum are communicated by the communication flow path formed in the piston. Therefore, when the first gas chamber is maintained in a vacuum, the communication passage in the piston communicating with the first gas chamber is vacuum sucked, and a negative pressure is generated at the tip of the piston. As a result, the adsorption target part can be adsorbed at the distal end of the piston. As described above, in this actuator, the part to be adsorbed can be adsorbed by the communication flow path formed in the piston without separately providing an adsorption mechanism at the distal end of the piston. Therefore, the adsorption|suction of a to-be-adsorbed part can be implement|achieved with a compact structure.

Further, the actuator is formed so as to communicate with at least one of between the first gas chamber and the second gas chamber and between the first gas chamber and the third gas chamber, and has an atmospheric opening part for releasing the gas supplied into the cylinder to the atmosphere. You may be equipped. In this case, the gas supplied into the cylinder is opened to the atmosphere from at least one of between the first gas chamber and the second gas chamber and between the first gas chamber and the second gas chamber by the atmospheric release part. Thereby, leakage of the gas from at least one side of the 2nd gas chamber and the 3rd gas chamber to the 1st gas chamber side can be suppressed, and the vacuum in the 1st gas chamber can fully be maintained.

Further, in the actuator, the gas chamber is supplied with gas, and further has a third gas chamber that reciprocates the piston in response to the supply, and the atmosphere opening portion is formed so as to communicate also between the first gas chamber and the third gas chamber. do. In this case, the gas supplied into the cylinder is opened to the atmosphere from between the first gas chamber and the third gas chamber by the atmospheric release part. Thereby, leakage of the gas from the 2nd gas chamber side to the 1st gas chamber side can be suppressed, and the vacuum in the 1st gas chamber can fully be maintained.

Moreover, the atmospheric release part may be an atmospheric release flow path formed in the piston. In this case, since the atmospheric release portion is configured as an atmospheric release flow passage formed in the piston, the gas can be released to the atmosphere regardless of the arrangement relationship between the piston and the cylinder, and a more compact configuration can be realized.

Moreover, the 1st gas chamber may be maintainable also with a positive pressure. In this case, when the first gas chamber is maintained at a positive pressure, the gas is delivered to the communication passage in the piston communicating with the first gas chamber, and a positive pressure is generated at the tip of the piston. As a result, the adsorption target part can be detached from the front end of the piston. As described above, in this case, by the communication passage formed in the piston, the adsorption target part can be detached without separately providing a detachment mechanism at the front end of the piston. Therefore, it is also possible to realize detachment of the adsorption target part with a compact structure.

Moreover, a filter may be provided in the front-end|tip part of a piston. In this case, the filter can prevent foreign matter from entering from the distal end of the piston when adsorbing the part to be adsorbed at the distal end of the piston. As a result, it is possible to prevent malfunction of the actuator due to foreign matter contamination.

ADVANTAGE OF THE INVENTION According to this invention, the actuator which can implement|achieve adsorption|suction of a to-be-adsorbed part with a compact structure is provided.

BRIEF DESCRIPTION OF THE DRAWINGS It is a schematic sectional drawing which shows the actuator which concerns on 1st Embodiment of this invention.
Fig. 2 is a schematic cross-sectional view showing an actuator according to a second embodiment of the present invention.
3 is a schematic cross-sectional view showing an actuator according to a third embodiment of the present invention.
4 is a schematic cross-sectional view showing an actuator according to a fourth embodiment of the present invention.

EMBODIMENT OF THE INVENTION Hereinafter, embodiment of the actuator which concerns on this invention is described, referring an accompanying drawing. However, in the following description, the same code|symbol is attached|subjected to the same or equivalent element, and overlapping description is abbreviate|omitted.

(First embodiment)

BRIEF DESCRIPTION OF THE DRAWINGS It is a schematic sectional drawing which shows the actuator which concerns on 1st Embodiment of this invention. As shown in Fig. 1, the actuator 10 according to the present embodiment is a drive mechanism for performing positioning control and load control, for example, in a die bonder and a web conveying apparatus used in a post-process of semiconductor manufacturing. It is used for tension control of rolls of The actuator 10 is a gas pressure actuator which generates thrust by supplying gas. However, the gas may be, for example, compressed air or various other gases. Moreover, the actuator 10 which concerns on this embodiment is used in order to adsorb|suck to-be-adsorbed components, such as a semiconductor chip, a wafer, and the glass plate for liquid crystals, for example.

The actuator 10 includes a cylinder 11 into which gas is supplied, a piston 12 reciprocating within the cylinder 11 , a control pressure chamber 20A which is a gas chamber formed in the cylinder 11 , and a constant pressure chamber. 20B, and a vacuum control chamber 20C. However, although the details will be described later, the vacuum control chamber 20C is located between the control pressure chamber 20A and the constant pressure chamber 20B. Hereinafter, the direction from the constant pressure chamber 20B side to the control pressure chamber 20A side is also referred to as a "regression direction", and the direction from the control pressure chamber 20A side to the constant pressure chamber 20B side is also referred to as a "advance direction".

The cylinder 11 has a substantially cylindrical or polygonal cylindrical shape, and accommodates the piston 12 therein. The cylinder 11 is formed with an opening hole 11c penetrating from the inner wall surface 11a to the outer wall surface 11b. The opening hole 11c is located corresponding to the vacuum control chamber 20C (details will be described later) in the cylinder 11, and communicates with the vacuum control chamber 20C. The opening hole 11c is connected to the vacuum generating unit 41 and the gas supplying unit 42 via the switching unit 22 . The vacuum generating unit 41 is a vacuum holding unit for maintaining the vacuum control chamber 20C in a vacuum by depressurizing the vacuum control chamber 20C. As the vacuum generating unit 41, for example, a vacuum pump or an air ejector is used. The gas supply part 42 is a static pressure holding part which maintains the vacuum control chamber 20C at a positive pressure by supplying gas to the vacuum control chamber 20C.

The switching unit 22 switches the connection between the opening hole 11c and the vacuum generating unit 41 and the connection between the opening hole 11c and the gas supply unit 42 . The switching unit 22 is, for example, a three-way valve. However, as for the switching part 22, the switching may be controlled by the control part (not shown), and may be switched manually.

The piston 12 includes a piston body part 13, head parts 14 and 15 formed on both ends of the piston body part 13, a rod part 16 connected to the head part 15, and the piston It has partitions 17 and 18 formed on the outer peripheral surface 13a of the main body 13 . The head part 14 and the partition part 17 are located on the regression direction side, and the head part 15 and the partition part 18 are located on the advancing direction side. Moreover, the rod part 16 protrudes toward the advancing direction side. Hereinafter, the piston body part 13, the head parts 14 and 15, the rod part 16, and the partition parts 17 and 18 are demonstrated in detail.

The piston body 13 has a substantially cylindrical or polygonal tubular shape, and extends along the axial direction of the cylinder 11 . The piston body (13) is accommodated in the cylinder (11) so as to move forward and backward. The head portions 14 and 15 are enlarged diameter portions in which the outer diameter of the piston body portion 13 is enlarged. The heads 14 and 15 are substantially disk-shaped, and protrude outward from the outer peripheral surface 13a of the piston body 13 . The head portion 14 is located at an end of the piston body 13 on the retraction direction side, and the head portion 15 is located at an end portion of the piston body portion 13 on the advancing direction side.

The rod part 16 is connected to the end face 15f of the head part 15 (end face opposite to the piston body part 13). The rod portion 16 extends in the traveling direction from the end face 15f of the head portion 15 . The rod part 16 passes through the cylinder 11 and protrudes to the outside of the cylinder 11 . The rod portion 16 has a substantially cylindrical shape and has an outer diameter slightly smaller than that of the piston body portion 13 . The distal end 16f of the rod 16 is exposed to the outside of the cylinder 11, and constitutes a distal end 12f of the piston 12 for adsorbing a part to be adsorbed, which will be described later. A cap portion 19 is provided at the tip portion 16f of the rod portion 16 .

The cap portion 19 is a cylindrical member having a small diameter and a large diameter, and has a substantially T-shaped cross section. The cap portion 19 is formed with a through hole 19a communicating with a communication passage 23 (detailed to be described later) formed in the piston 12 . A filter 27 is disposed in the through hole 19a of the cap portion 19 . That is, the filter 27 is provided in the front-end|tip part 12f of the piston 12. As shown in FIG.

The filter 27 has a function of preventing foreign matter from entering from the distal end 12f of the piston 12 when adsorbing the adsorbed part at the distal end 12f of the piston 12 . The filter 27 traps foreign matter in the air, suppresses foreign matter from entering the communication passage 23 from the tip 12f of the piston 12, and further passes through the communication passage 23 to the cylinder 11 ) to prevent foreign matter from entering the The filter 27 is, for example, a substantially cylindrical member in which a through hole smaller than a foreign material was formed, and is accommodated in the through hole 19a.

The partitions 17 and 18 are formed between the head 14 and the head 15 . The partition portions 17 and 18 are enlarged diameter portions in which the outer diameter of the piston body portion 13 is enlarged. The partitions 17 and 18 are substantially disk-shaped, and protrude from the outer peripheral surface 13a of the piston body 13 . In the axial direction of the piston 12 , the width of the partitions 17 , 18 is smaller than the width of the head portions 14 , 15 .

The partition part 17 is located on the regression direction side in the piston body part 13 . Concretely, the dividing part 17 is located on the head 14 side rather than the dividing part 18, and has a predetermined space|interval with the head part 14, and is located. As a result, the piston body portion 13 has a partition portion 17 and a portion fitted to the head portion 14 . Since the outer diameters of the partition portion 17 and the head portion 14 are larger than the outer diameters of the piston body portion 13 , the fitted portion is dug inward than the partition portion 17 and the head portion 14 . That is, between the dividing part 17 and the head part 14 in the piston 12, the groove part 12a is formed.

The partition part 18 is located on the advancing direction side in the piston body part 13 . Concretely, the dividing part 18 is located at the head part 15 side rather than the dividing part 17, and it has a predetermined space|interval with the head part 15, and is located. Accordingly, the piston body portion 13 has a partition portion 18 and a portion fitted to the head portion 15 . Since the outer diameters of the partitioning portion 18 and the head portion 15 are larger than the outer diameters of the piston body portion 13 , the fitted portion is dug inward than the partitioning portion 18 and the head portion 15 . That is, between the partition part 18 and the head part 15 in the piston 12, the groove part 12b is formed.

Between the inner wall surface 11a of the cylinder 11 and the piston 12, for example, a static pressure bearing (air bearing) not shown is provided. A gas layer is formed in the gap between the inner wall surface 11a of the cylinder 11 and the piston 12 by supplying gas from a supply source (a gas supply unit 40 to be described later) to the static pressure bearing.

In the present embodiment, between the head portion 14 of the piston 12 and the inner wall surface 11a of the cylinder 11 , and between the head portion 15 of the piston 12 and the inner wall surface 11a of the cylinder 11 . ) between the static pressure bearings. Accordingly, between the head portion 14 of the piston 12 and the inner wall surface 11a of the cylinder 11, gas from the control pressure chamber 20A (to be described in detail later) flows in the direction of the arrow A1. That is, a gas layer is formed between the head portion 14 of the piston 12 and the inner wall surface 11a of the cylinder 11 . Further, between the head portion 15 of the piston 12 and the inner wall surface 11a of the cylinder 11, gas from the constant pressure chamber 20B (to be described later in detail) flows in the direction of the arrow A2. That is, a gas layer is formed between the head portion 15 of the piston 12 and the inner wall surface 11a of the cylinder 11 . As a result, the piston 12 is in a non-contact state with respect to the inner wall surface 11a of the cylinder 11 .

The piston 12 repeats a forward movement and a backward movement in a state in which it is not in contact with the inner wall surface 11a of the cylinder 11 . The advancing movement is a movement (hereinafter simply referred to as "advancing movement") in the advancing direction (the direction from the control pressure chamber 20A side to the constant pressure chamber 20B side). The regression movement is a movement in the regression direction (the direction from the positive pressure chamber 20B side to the control pressure chamber 20A side) (hereinafter also simply referred to as "regressive movement").

In the piston 12, a communication passage 23 is formed for communicating the distal end 12f of the piston 12 and the vacuum control chamber 20C. One end of the communication passage 23 passes through the tip portion 12f of the piston 12 to communicate with the atmosphere. The other end of the communication passage 23 passes through the outer peripheral surface 13a of the piston body 13 between the partition 17 and the partition 18 to communicate with the vacuum control chamber 20C. The communication passage 23 extends in a substantially L-shape.

Specifically, the communication passage 23 has an atmospheric communication portion 23a and a vacuum communication portion 23b communicating with the atmospheric communication portion 23a. The atmospheric communication part 23a extends along the axial direction of the piston body part 13 at a position approximately centered in the radial direction of the piston body part 13 . The atmospheric communication portion 23a is connected to the piston 12 from between the partition 17 and the partition 18 in the piston body 13 (that is, a position corresponding to a vacuum control chamber 20C to be described later). It extends until it penetrates the tip portion 12f of the , and is in communication with the atmosphere.

The vacuum communicating portion 23b is bent in the radial direction of the piston body 13 from an end of the air communicating portion 23a opposite to the side communicating with the atmosphere. The vacuum communication part 23b extends along the radial direction of the piston body 13 until it penetrates the outer peripheral surface 13a of the piston body 13, and communicates with the vacuum control chamber 20C.

In addition, in the piston 12, an atmospheric release flow passage 24 is formed. The atmosphere opening passage 24 is an atmospheric opening portion for opening the gas supplied into the cylinder 11 to the atmosphere. Details of the atmospheric release passage 24 will be described later.

Next, the control pressure chamber 20A, the constant pressure chamber 20B, and the vacuum control chamber 20C are demonstrated in detail.

Gas is supplied to the control pressure chamber 20A (second gas chamber) and the constant pressure chamber 20B (third gas chamber) from the gas supply unit 40 as a supply source, and the piston 12 reciprocates according to the gas supply. move it That is, according to the supply of gas to the control pressure chamber 20A and the constant pressure chamber 20B, a difference between the pressure in the control pressure chamber 20A and the pressure in the constant pressure chamber 20B occurs, and the piston 12 moves according to this difference. and retrograde movement is performed.

The control pressure chamber 20A is formed between the head portion 14 and the cylinder 11 . The control pressure chamber 20A is divided into an end face 14f of the head 14 (an end face opposite to the piston body 13) and an inner wall face 11a of the cylinder 11 . In the control pressure chamber 20A, the gas from the gas supply unit 40 is supplied at a controlled supply amount.

Specifically, the control pressure chamber 20A is connected to the gas supply unit 40 by the control flow path 31 . The gas supply unit 40 supplies gas in a state adjusted to a constant pressure, for example, through a regulator (not shown). The control flow path 31 is provided with a servo valve 30 . The servovalve 30 controls the amount of gas supplied to the control pressure chamber 20A. The servovalve 30 controls the supply amount of this gas with high precision and high response according to the electric signal input to the servovalve 30, and supplies the gas to the control pressure chamber 20A at the controlled supply amount. do.

The servovalve 30 receives, for example, each pressure in the control pressure chamber 20A and the constant pressure chamber 20B detected by pressure sensors (not shown) provided in the control pressure chamber 20A and the constant pressure chamber 20B, respectively. When the indicated signal is input, the amount of gas supplied from the gas supply unit 40 is controlled so that the respective pressures in the control pressure chamber 20A and the constant pressure chamber 20B indicated by the signal are in an appropriate state. Here, the appropriate state is, for example, a state in which the thrust of the actuator 10 output as a difference between the pressure in the control pressure chamber 20A and the pressure in the constant pressure chamber 20B becomes a desired size. The servovalve 30 may control the gas supply amount based on, for example, a preset flow rate characteristic (eg, a supply amount corresponding to the pressure in the control pressure chamber 20A required to generate a thrust of a desired size). do.

The servovalve 30 includes a supply port Ps to which gas is supplied from the gas supply unit 40, a control port Pc to supply gas to the control pressure chamber 20A at a controlled supply amount, and exhaust gas to the atmosphere. It has an exhaust port (Ex). The servovalve 30 is a three-way valve having an inlet and outlet of gas in three directions of a supply port Ps, a control port Pc, and an exhaust port Ex.

However, as the servovalve 30, for example, a servovalve of a spool type or a nozzle flapper type may be used. When, for example, a spool-type servovalve is used as the servovalve 30, gas can flow in a large capacity. Moreover, when, for example, a nozzle flapper type servovalve is used as the servovalve 30, the responsiveness can be increased.

The positive pressure chamber 20B (third gas chamber) is formed between the head portion 15 and the cylinder 11 . The constant pressure chamber 20B is divided into an end face 15f of the head portion 15 and an inner wall face 11a of the cylinder 11 . In the constant pressure chamber 20B, the gas from the gas supply unit 40 is supplied at a constant pressure.

Specifically, the positive pressure chamber 20B is connected to a position on the upstream side of the servovalve 30 in the control flow passage 31 by the positive pressure passage 32 . As a result, the gas from the gas supply unit 40 is supplied to the constant pressure chamber 20B at a constant pressure without passing through the servo valve 30 .

The vacuum control chamber 20C (first gas chamber) is formed between the partition 17 , the partition 18 , and the cylinder 11 . That is, the vacuum control chamber 20C is located between the control pressure chamber 20A and the constant pressure chamber 20B. The vacuum control chamber 20C has an end face 17e of the partition 17 (end face opposite to the head 14) and an end face 18e of the partition 18 (opposite to the head 15). end face) and the inner wall face 11a of the cylinder 11 . The vacuum control chamber 20C can be maintained in a vacuum.

Specifically, the opening hole 11c and the vacuum generating unit 41 are connected by the switching of the switching unit 22, so that the vacuum generating unit 41 is formed through the opening hole 11c of the cylinder 11. The gas in the vacuum control chamber 20C is sucked. Thereby, the vacuum control chamber 20C is maintained in a vacuum. However, the vacuum is not limited to an absolute vacuum in which the pressure is 0, and includes, for example, a negative pressure state where the pressure is lower than atmospheric pressure.

When the vacuum control chamber 20C is maintained in a vacuum, the communication passage 23 in the piston 12 communicating with the vacuum control chamber 20C is vacuum sucked, and a negative pressure is generated in the tip portion 12f of the piston 12 . Here, the negative pressure means a pressure lower than atmospheric pressure. Thereby, air is sucked in the direction of the arrow L1 into the through hole 19a of the cap part 19 provided in the front-end|tip part 12f of the piston 12. As shown in FIG. As a result, the part to be adsorbed is adsorbed to the front end surface 19f of the cap portion 19 . That is, the part to be adsorbed is adsorbed to the tip portion 12f of the piston 12 through the cap portion 19 .

Further, the vacuum control chamber 20C can be maintained even at a positive pressure. A positive pressure is a pressure higher than atmospheric pressure. Specifically, the opening hole 11c and the gas supply part 42 are connected by switching of the switching part 22, so that the vacuum control chamber is operated by the gas supply part 42 through the opening hole 11c of the cylinder 11. Gas is supplied into (20C). As a result, the vacuum control chamber 20C is not in a vacuum, and is maintained at a positive pressure.

When the vacuum control chamber 20C is maintained at a positive pressure, gas is delivered to the communication passage 23 in the piston 12 communicating with the vacuum control chamber 20C, and a positive pressure is generated at the tip portion 12f of the piston 12. . Here, the static pressure means a pressure higher than atmospheric pressure. Thereby, gas is ejected from the through-hole 19a of the cap part 19 provided in the front-end|tip part 12f of the piston 12 in the direction of the arrow L2. As a result, the part to be adsorbed is detached from the front end surface 19f of the cap portion 19 . That is, the part to be adsorbed is detached from the tip portion 12f of the piston 12 through the through hole 19a of the cap portion 19 .

Next, the atmospheric release flow path 24 formed in the piston 12 will be described in detail.

The atmospheric release passage 24 releases a part of the gas that exists between the vacuum control chamber 20C, the control pressure chamber 20A, and the positive pressure chamber 20B among the gases supplied into the cylinder 11 to the atmosphere. Thereby, the atmospheric release flow path 24 suppresses the gas leakage from the control pressure chamber 20A and the positive pressure chamber 20B side to the vacuum control chamber 20C side, and connects the vacuum control chamber 20C to the control pressure chamber 20A and the positive pressure chamber. It has a function to make a space sufficiently independent with respect to the chamber 20B.

The atmospheric release passage 24 is formed independently so as not to intersect and communicate with the communication passage 23 . The atmospheric release flow path 24 extends along the axial direction of the piston body 13 at a position outside the communication flow path 23 in the radial direction of the piston body 13 . One end of the atmospheric release passage 24 passes through the tip 12f of the piston 12 to communicate with the atmosphere. Further, the atmospheric release flow passage 24 is formed so as to communicate both between the vacuum control chamber 20C and the control pressure chamber 20A and between the vacuum control chamber 20C and the constant pressure chamber 20B.

Specifically, the atmospheric release flow passage 24 has an atmospheric communication portion 24a and space communication portions 24b and 24c communicating with the atmospheric communication portion 24a. The atmospheric communication portion 24a extends along the axial direction of the piston body 13 substantially parallel to the atmospheric communication portion 23a of the communication passage 23 . The atmospheric communication portion 24a extends from a position corresponding to the groove portion 12a of the piston 12 until it penetrates the tip portion 12f of the piston 12, and communicates with the atmosphere.

The space communicating portion 24b is bent in the radial direction of the piston body 13 from an end of the air communicating portion 24a opposite to the side communicating with the atmosphere. The space communicating portion 24b extends along the radial direction of the piston body 13 until it penetrates the outer circumferential surface 13a of the piston body 13, and a partition 17 in the groove portion 12a. It communicates with the space between the head 14 and the space between the vacuum control chamber 20C and the control pressure chamber 20A.

The space communicating part 24c is bent in the radial direction of the piston body part 13 from the intermediate part located corresponding to the groove part 12b in the atmospheric|atmosphere communicating part 24a. The space communicating portion 24c extends along the radial direction of the piston body 13 until it penetrates the outer circumferential surface 13a of the piston body 13, and a partition 18 in the groove portion 12b. It communicates with the space between the head portion 15 and the space between the vacuum control chamber 20C and the constant pressure chamber 20B.

By forming such an atmospheric release flow path 24, between the head 14 of the piston 12 and the inner wall surface 11a of the cylinder 11 in the direction of the arrow A1 (that is, in the direction of travel) The gas flowing into the void flows into the space communicating portion 24b in the groove portion 12a while the intrusion into the vacuum control chamber 20C is blocked by the partition portion 17 . Then, the gas flowing into the space communicating portion 24b is released to the atmosphere through the air communicating portion 24a communicating with the space communicating portion 24b. Thereby, leakage of gas from the control pressure chamber 20A side to the vacuum control chamber 20C side is suppressed.

Further, between the head portion 15 of the piston 12 and the inner wall surface 11a of the cylinder 11 , the gas flowing in the direction of the arrow A2 (that is, the regression direction) is caused by the partitioning portion 18 . It flows into the space communicating part 24c in the groove part 12b while the penetration into the vacuum control chamber 20C is blocked. Then, the gas flowing into the space communicating portion 24c is released to the atmosphere through the air communicating portion 24a communicating with the space communicating portion 24c. Thereby, leakage of gas from the static pressure chamber 20B side to the vacuum control chamber 20C side is suppressed.

Accordingly, when the vacuum control chamber 20C is maintained in a vacuum, it is possible to suppress the vacuum breakage due to leakage of gas from the control pressure chamber 20A and the constant pressure chamber 20B to the vacuum control chamber 20C side. That is, the vacuum of the vacuum control chamber 20C can be sufficiently maintained.

As mentioned above, according to the actuator 10 which concerns on this embodiment, the front-end|tip part 12f of the piston 12 and the vacuum control chamber 20C which can hold|maintain in a vacuum communicate with the communication flow path 23 formed in the piston 12. has been Accordingly, when the vacuum control chamber 20C is maintained in a vacuum, the communication passage 23 in the piston 12 communicating with the vacuum control chamber 20C is vacuum sucked, and a negative pressure is generated in the distal end portion 12f of the piston 12 . do. As a result, the adsorption target part can be adsorbed at the distal end 12f of the piston 12 . As described above, in this actuator 10, by means of the communication passage 23 formed in the piston 12, the adsorption target part can be adsorbed without separately providing an adsorption mechanism at the distal end portion 12f of the piston 12. can Therefore, the adsorption|suction of a to-be-adsorbed part can be implement|achieved with a compact structure.

Further, according to the actuator 10 according to the present embodiment, the gas supplied into the cylinder 11 is transferred between the vacuum control chamber 20C and the control pressure chamber 20A through the atmospheric release passage 24, and the vacuum control chamber. It opens to the atmosphere from between (20C) and the constant pressure chamber. Thereby, leakage of gas from both sides of the control pressure chamber 20A and the positive pressure chamber 20B to the vacuum control chamber 20C side can be suppressed, and the vacuum in the vacuum control chamber 20C can be sufficiently maintained.

Further, according to the actuator 10 according to the present embodiment, since the atmospheric release portion is configured as the atmospheric release flow passage 24 formed in the piston 12, the arrangement relationship between the piston 12 and the cylinder 11 is correlated. It is possible to release the gas to the atmosphere without any need, and it becomes possible to realize a more compact configuration.

For example, in the axial direction of the piston 12, the position of the static pressure bearing in the head portions 14 and 15 (that is, the gas formed between the inner wall surface 11a of the cylinder 11 and the piston 12) The position of the layer of ) is moved by the reciprocating movement of the piston 12 . According to this embodiment, since the atmospheric release part is formed in the piston 12, even if the piston 12 reciprocates, the static pressure bearing and the atmospheric release part do not interfere. Therefore, it is possible to realize a more compact configuration because it is sufficient to secure a space for the static pressure bearing based only on the reciprocating movement distance of the piston 12 irrespective of the formation position of the atmospheric release portion.

Further, according to the actuator 10 according to the present embodiment, when the vacuum control chamber 20C is maintained at a positive pressure, the gas is sent to the communication passage 23 in the piston 12 communicating with the vacuum control chamber 20C, A positive pressure is generated in the tip portion 12f of the piston 12 . As a result, the adsorption target component can be detached from the distal end 12f of the piston 12 . As described above, according to the present embodiment, by means of the communication passage 23 formed in the piston 12, the adsorption target part can be detached without separately providing a detachment mechanism at the distal end portion 12f of the piston 12. there is. Therefore, it is also possible to realize detachment of the adsorption target part with a compact structure.

Further, according to the actuator 10 according to the present embodiment, when the adsorption target part is adsorbed at the distal end 12f of the piston 12, the filter ( 27) can be prevented. As a result, it is possible to prevent failure of the actuator 10 due to foreign matter mixing.

(Second embodiment)

Next, with reference to FIG. 2, the actuator 10A which concerns on 2nd Embodiment is demonstrated. However, the actuator 10A is provided with the element and structure similar to the actuator 10 which concerns on 1st Embodiment. For this reason, the same code|symbol is attached|subjected to the same element and structure as the actuator 10 which concerns on 1st Embodiment, detailed description is abbreviate|omitted, and the part different from 1st Embodiment is demonstrated.

2 is a schematic cross-sectional view showing an actuator 10A according to the second embodiment. As shown in FIG. 2 , the actuator 10A according to the present embodiment is provided with an atmospheric release portion 26 formed in the cylinder 11 instead of the atmospheric release flow path 24 formed in the piston 12 . , which is different from the actuator 10 according to the first embodiment. The atmospheric release portion 26 opens the gas supplied into the cylinder 11 to the atmosphere.

The atmospheric release part 26 releases a part of the gas which exists between the control pressure chamber 20A, the positive pressure chamber 20B, and the vacuum control chamber 20C among the gas supplied into the cylinder 11 to atmosphere. Thereby, the atmospheric release part 26 suppresses the gas leakage from the control pressure chamber 20A and the static pressure chamber 20B side to the vacuum control chamber 20C side, and connects the vacuum control chamber 20C to the control pressure chamber 20A and the positive pressure chamber 20C. It has a function to make a space sufficiently independent with respect to the chamber 20B.

The atmospheric release portion 26 is formed so as to communicate both between the vacuum control chamber 20C and the control pressure chamber 20A and between the vacuum control chamber 20C and the positive pressure chamber 20B. Specifically, the atmospheric release portion 26 is formed between the first atmospheric release portion 26a formed between the vacuum control chamber 20C and the control pressure chamber 20A, and between the vacuum control chamber 20C and the constant pressure chamber 20B. It has the formed 2nd atmospheric|atmosphere opening part 26b.

The first atmospheric release portion 26a is formed in a position corresponding to the groove portion 12a of the piston 12 in the cylinder 11 . The 1st atmospheric|atmosphere opening part 26a is a through-hole which penetrates from the inner wall surface 11a of the cylinder 11 to the outer wall surface 11b, and is communicated with the atmosphere. Accordingly, the gas flowing in the direction of the arrow A1 (that is, the advancing direction) between the head portion 14 of the piston 12 and the inner wall surface 11a of the cylinder 11 is caused by the partitioning portion 17 . It flows in the 1st atmospheric|atmosphere opening part 26a in the groove part 12a while penetration into the vacuum control chamber 20C is interrupted|blocked. Then, the atmosphere is opened to the outside of the cylinder 11 from the first atmospheric release portion 26a.

The second atmospheric release portion 26b is formed in a position corresponding to the groove portion 12b of the piston 12 in the cylinder 11 . The 2nd atmospheric|atmosphere opening part 26b is a through-hole which penetrates from the inner wall surface 11a of the cylinder 11 to the outer wall surface 11b, and it communicates with the atmosphere. Accordingly, the gas flowing in the direction of the arrow A2 (that is, the regression direction) between the head portion 15 of the piston 12 and the inner wall surface 11a of the cylinder 11 is caused by the partition portion 18 It flows in the 2nd atmospheric|atmosphere opening part 26b in the groove part 12b, while penetration into the vacuum control chamber 20C is blocked|blocked. Then, the atmosphere is released to the outside of the cylinder 11 from the second atmospheric release portion 26b.

However, in this embodiment, compared with the first embodiment, the axial length in the groove portion 12a of the piston body 13, that is, the distance between the partition portion 17 and the head portion 14 becomes longer. there is. Moreover, the axial length of the groove part 12b of the piston body part 13, ie, the distance between the partition part 18 and the head part 15, is long. That is, the static pressure bearing and the atmospheric release portion 26 are located apart in the axial direction of the piston 12 . This is to ensure that the space for the static pressure bearing does not interfere with the atmospheric release portion 26 even when the piston 12 reciprocates, so that the space for the static pressure bearing is sufficiently secured.

As mentioned above, also in the actuator 10A according to the present embodiment, as in the actuator 10 according to the first embodiment, by the communication passage 23 formed in the piston 12, the distal end portion 12f of the piston 12 is ), the adsorption target can be adsorbed without separately providing an adsorption mechanism. Therefore, the adsorption|suction of a to-be-adsorbed part can be implement|achieved with a compact structure.

Further, according to the actuator 10A according to the present embodiment, the gas supplied into the cylinder 11 is supplied to the atmosphere opening portion 26 between the vacuum control chamber 20C and the control pressure chamber 20A and the vacuum control chamber. It opens to the atmosphere from between (20C) and the constant pressure chamber. Thereby, leakage of gas from both sides of the control pressure chamber 20A and the positive pressure chamber 20B to the vacuum control chamber 20C side can be suppressed, and the vacuum in the vacuum control chamber 20C can be sufficiently maintained.

(Third embodiment)

Next, with reference to FIG. 3, the actuator 10B which concerns on 3rd Embodiment is demonstrated. However, the actuator 10B is provided with the element and structure similar to the actuator 10 which concerns on 1st Embodiment. For this reason, the same code|symbol is attached|subjected to the same element and structure as the actuator 10 which concerns on 1st Embodiment, detailed description is abbreviate|omitted, and the part different from 1st Embodiment is demonstrated.

3 is a schematic cross-sectional view showing an actuator 10B according to the third embodiment. As shown in Fig. 3, the actuator 10B according to the present embodiment does not include the constant pressure chamber 20B, and the elastic member 50 is provided in a space corresponding to the constant pressure chamber 20B. It is different from the actuator 10 which concerns on 1 Embodiment.

While the actuator 10B is provided with the control pressure chamber 20A and the vacuum control chamber 20C similarly to 1st Embodiment, unlike 1st Embodiment, the constant pressure chamber 20B is not provided. That is, on the head portion 15 side of the piston 12 , gas is not supplied from the gas supply unit 40 into the cylinder 11 . Corresponding to this, in the present embodiment, a static pressure bearing is not provided between the head portion 15 of the piston 12 and the inner wall surface 11a of the cylinder 11, but the head portion 15 and the inner wall surface 11a. ) and the air layer is not formed between the piston (12). Moreover, the piston 12 does not have the partition part 18 and the groove part 12b.

Moreover, in the actuator 10B which concerns on this embodiment, since the constant pressure chamber 20B is not provided, it is not necessary to release the gas from the constant pressure chamber 20B to atmosphere. For this reason, the atmospheric|atmosphere opening flow path 24 which concerns on this embodiment does not have the space communication part 24c. That is, in the present embodiment, the atmospheric release flow path 24 is formed so as to communicate between the vacuum control chamber 20C and the control pressure chamber 20A, and between the vacuum control chamber 20C and the constant pressure chamber 20B. It is not formed to communicate.

The elastic member (50) is provided between the head part (15) and the cylinder (11). The elastic member 50 is arranged in a space partitioned by an end face 15f of the head portion 15 and an inner wall face 11a of the cylinder 11 . The elastic member 50 is, for example, a coil spring, rubber, artificial muscle, or the like. The elastic member 50 expands and contracts in the axial direction of the piston 12 according to the supply of gas from the gas supply unit 40 to the control pressure chamber 20A, thereby reciprocating the piston 12 .

As mentioned above, also in the actuator 10B which concerns on this embodiment, the front-end|tip part 12f of the piston 12 by the communication flow path 23 formed in the piston 12 similarly to the actuator 10 which concerns on the said 1st Embodiment. ), the adsorption target can be adsorbed without separately providing an adsorption mechanism. Therefore, the adsorption|suction of a to-be-adsorbed part can be implement|achieved with a compact structure.

Also in the actuator 10B according to the present embodiment, the gas supplied into the cylinder 11 is released to the atmosphere from between the vacuum control chamber 20C and the control pressure chamber 20A by the atmospheric release passage 24 . do. Thereby, gas leakage from the control pressure chamber 20A side to the vacuum control chamber 20C side can be suppressed, and the vacuum in the vacuum control chamber 20C can be sufficiently maintained.

(Fourth embodiment)

Next, with reference to FIG. 4, the actuator 10C which concerns on 4th Embodiment is demonstrated. However, the actuator 10C is provided with the element and structure similar to the actuator 10 which concerns on 1st Embodiment. For this reason, the same code|symbol is attached|subjected to the same element and structure as the actuator 10 which concerns on 1st Embodiment, detailed description is abbreviate|omitted, and the part different from 1st Embodiment is demonstrated.

4 is a schematic cross-sectional view showing an actuator 10C according to the fourth embodiment. As shown in Fig. 4, in the actuator 10C according to the present embodiment, the shape of the piston 12 and the position of the static pressure bearing are different. Instead of the constant pressure chamber 20B, two constant pressure chambers 20D and 20E are provided. It is different from the actuator 10 according to the first embodiment in the point that it has and the configuration of the atmospheric release flow passage 24 in the piston 12 is different.

In this embodiment, in the axial direction of the piston 12, the widths of the heads 14 and 15 are smaller than in the first embodiment, and are substantially equal to the widths of the partitions 17 and 18. there is. The piston (12) has a main body extension (25) protruding from the end face (15f) side of the head portion (15), and head portions (28, 29) formed in the main body extension part (25). The body extension part 25 is disposed between the piston body part 13 and the rod part 16 . The main body extension part 25 has a substantially cylindrical shape and extends from the end face 15f side of the head part 15 along the axial direction of the cylinder 11 . The main body extension part 25 is integrally formed with the piston main body part 13, and has an outer diameter substantially equal to the outer diameter of the piston main body part 13. As shown in FIG. The body extension part 25 is connected to the rod part 16 on the end face 29f of the head part 29 (end face opposite to the piston body part 13).

The head portions 28 and 29 are enlarged diameter portions in which the outer diameter of the main body extension portion 25 is enlarged. The heads 28 and 29 are substantially disk-shaped, and protrude outward from the outer peripheral surface 25a of the body extension part 25 . Further, in the axial direction of the piston 12 , the width of the head portions 28 and 29 is greater than the width of the partition portions 17 and 18 .

The head part 28 is located in the middle part of the main body extension part 25, and the head part 29 is located at the end of the main body extension part 25 (the end opposite to the end surface 15f). The head part 28 and the head part 29 have a predetermined space|interval and are located. Thereby, the main body extension part 25 has the head part 28 and the part fitted with the head part 29. As shown in FIG. Since the outer diameter of the head portions 28 and 29 is larger than the outer diameter of the main body extension portion 25, the fitted portion is dug inward from the head portions 28 and 29. As shown in FIG. That is, between the head part 28 and the head part 29 in the piston 12, the groove part 12e is formed.

In the present embodiment, a static pressure bearing is provided between the head portions 28 and 29 of the piston 12 and the inner wall surface 11a of the cylinder 11 . Accordingly, between the head portion 28 of the piston 12 and the inner wall surface 11a of the cylinder 11, gas from the constant pressure chamber 20D (to be described later in detail) flows in the direction of the arrow A3. That is, a gas layer is formed between the head portion 28 of the piston 12 and the inner wall surface 11a of the cylinder 11 . Further, between the head portion 29 of the piston 12 and the inner wall surface 11a of the cylinder 11, gas from the static pressure chamber 20E (to be described later in detail) flows in the direction of the arrow A4. That is, a gas layer is formed between the head portion 29 of the piston 12 and the inner wall surface 11a of the cylinder 11 . As a result, the piston 12 is in a non-contact state with respect to the inner wall surface 11a of the cylinder 11 .

However, in this embodiment, the static pressure bearing is not provided between the head parts 14 and 15 of the piston 12 and the inner wall surface 11a of the cylinder 11. As shown in FIG. Therefore, the gas layer by the static pressure bearing is not formed between the head portions 14 and 15 of the piston 12 and the inner wall surface 11a of the cylinder 11, but the control pressure chamber 20A and the constant pressure chamber 20D ) and the vacuum control chamber 20C, gas flows in the direction of the arrow A1 between the head 14 and the inner wall 11a, and between the head 15 and the inner wall 11a Gas flows in the direction of arrow A2.

The positive pressure chamber 20D (third gas chamber) is formed between the head portion 15 , the head portion 28 , and the cylinder 11 . The positive pressure chamber 20D includes an end face 15f of the head 15 , an end face 28f of the head 28 (end face on the piston body 13 side), and a cylinder 11 . It is partitioned by the inner wall surface 11a. In the constant pressure chamber 20D, the gas from the gas supply unit 40 is supplied at a constant pressure. Specifically, the positive pressure chamber 20D is connected to a branch flow path 32a branching from the positive pressure flow path 32 . Thereby, the gas from the gas supply part 40 is supplied to the constant pressure chamber 20D in the state of a constant pressure.

The positive pressure chamber 20E (third gas chamber) is formed between the head portion 29 and the cylinder 11 . The positive pressure chamber 20E is divided into an end face 29f of the head portion 29 and an inner wall face 11a of the cylinder 11 . In the constant pressure chamber 20E, the gas from the gas supply unit 40 is supplied at a constant pressure. Specifically, the positive pressure chamber 20E is connected to a branch flow path 32b branching from the positive pressure flow path 32 . Thereby, the gas from the gas supply part 40 is supplied to the constant pressure chamber 20E in the state of a constant pressure.

In addition, in the present embodiment, the atmospheric release flow passage 24 in the piston 12 communicates with the atmospheric communication portion 24a in addition to the atmospheric communication portion 24a and the space communication portions 24b and 24c. It has a part 24d.

The space communicating part 24d is bent in the radial direction of the piston body part 13 from the intermediate part located corresponding to the groove part 12e in the atmospheric|atmosphere communicating part 24a. The space communicating portion 24d extends along the radial direction of the piston body 13 until it penetrates the outer peripheral surface 13a of the piston body 13, and the head portion 28 in the groove portion 12e. It communicates with the space between and the head part 29 (that is, between the constant pressure chamber 20D and the constant pressure chamber 20E).

The gas flowing in the direction of the arrow A3 (that is, the advancing direction) between the head portion 28 of the piston 12 and the inner wall surface 11a of the cylinder 11 communicates with the space in the groove portion 12e. It flows into the part 24d. Then, the gas flowing into the space communicating portion 24d is released to the atmosphere through the air communicating portion 24a communicating with the space communicating portion 24d. Moreover, between the head part 29 of the piston 12 and the inner wall surface 11a of the cylinder 11, the gas flowing in the direction of the arrow A4 (that is, the regression direction) in the groove part 12e It flows into the space communicating part 24d. Then, the gas flowing into the space communicating portion 24d is released to the atmosphere through the air communicating portion 24a communicating with the space communicating portion 24d. As described above, the gas is also released to the atmosphere from between the constant pressure chamber 20D and the constant pressure chamber 20E. Thereby, since the gas leakage from the static pressure chamber 20D and 20E side to the vacuum control chamber 20C side is suppressed, when the vacuum control chamber 20C is maintained in a vacuum, vacuum breakage due to the leakage of the gas can be suppressed. . That is, the vacuum of the vacuum control chamber 20C can be sufficiently maintained.

In the present embodiment, the control pressure chamber 20A and the constant pressure chamber 20E reciprocate the piston 12 in response to the supply of gas from the gas supply unit 40 serving as a supply source. That is, according to the supply of gas to the control pressure chamber 20A and the constant pressure chamber 20E, a difference between the pressure in the control pressure chamber 20A and the pressure in the constant pressure chamber 20E occurs, and the piston 12 moves forward according to this difference. and retrograde movement is performed. However, in the constant pressure chamber 20D, since the area of the end face 15f of the head part 15 and the end face 28f of the head part 28 are the same, it acts in the regression direction with respect to the end face 15f. The force acting on the end face 28f and the force acting in the advancing direction cancel each other out, so that no force is generated to move the piston 12 in the advancing direction and the retracting direction. For this reason, the forward movement and the backward movement of the piston 12 are performed due to the pressure difference between the control pressure chamber 20A and the constant pressure chamber 20E as described above, irrespective of the pressure in the constant pressure chamber 20D.

As described above, also in the actuator 10C according to the present embodiment, as in the actuator 10 according to the first embodiment, by the communication passage 23 formed in the piston 12, the distal end portion 12f of the piston 12 is ), the adsorption target can be adsorbed without separately providing an adsorption mechanism. Therefore, the adsorption|suction of a to-be-adsorbed part can be implement|achieved with a compact structure.

As mentioned above, although various embodiment of this invention was described, this invention is not limited to the said embodiment, You may deform|transform or apply otherwise in the range which does not change the summary described in each claim.

In said 1st, 3rd, and 4th embodiment, so that an atmospheric|atmosphere opening part may communicate with either one, not between the 1st gas chamber and the 2nd gas chamber, and between the 1st gas chamber and the 3rd gas chamber. may be formed. That is, the atmospheric release flow path 24 may have either one of the space communicating part 24b and the space communicating part 24c instead of both of the space communicating part 24b and the space communicating part 24c. In addition, the atmospheric release part 26 is not both of the 1st atmospheric|atmosphere opening part 26a and the 2nd atmospheric|atmosphere opening part 26b, but among the 1st atmospheric|atmosphere opening part 26a and the 2nd atmospheric|atmosphere opening part 26b. You may have either one. Further, in the fourth embodiment, the atmospheric release passage 24 does not need to have the space communicating portion 24d.

Moreover, like the said 1st, 2nd, and 4th embodiment, when the gas chamber has the 2nd gas chamber and the 3rd gas chamber which reciprocate the piston 12 according to gas supply, the standby It is not necessary to have an opening part. That is, the atmosphere opening passage 24 does not need to be formed in the piston 12 , and the atmosphere opening portion 26 does not need to be formed in the cylinder 11 .

Further, in the third embodiment, although the constant pressure chamber 20B is not provided in the gas chamber, the present invention is not limited thereto, and the control pressure chamber 20A in the gas chamber may not be provided. In the third embodiment, although the elastic member is provided in the space corresponding to the constant pressure chamber 20B, the present invention is not limited thereto, and a linear motor or the like is provided in the space corresponding to the control pressure chamber 20A or the constant pressure chamber 20B. This may be provided.

In addition, the vacuum control chamber 20C does not need to be maintained at a positive pressure. The vacuum control chamber 20C may be directly connected to the vacuum generating unit 41 without passing through the switching unit 22 .

In addition, the cap part 19 does not need to be provided in the front-end|tip part 16f of the rod part 16. As shown in FIG. The filter 27 may be provided directly in the front-end|tip part 12f of the piston 12 instead of the inside of the through-hole 19a of the cap part 19. As shown in FIG. In addition, the filter 27 does not need to be provided.

In the above embodiment, although it is stated that the vacuum control chamber 20C is located between the control pressure chamber 20A and the constant pressure chamber 20B, it is not limited thereto. For example, the vacuum control chamber 20C may be located further away from the rod portion 16 than the control pressure chamber 20A and the constant pressure chamber 20B.

10, 10A, 10B, 10C… actuator
11… cylinder
12… piston
20A… Control pressure chamber (second gas chamber)
20B… Static pressure chamber (3rd gas chamber)
20C… Vacuum control room (first gas chamber)
20D, 20E… Static pressure chamber (3rd gas chamber)
23… fuel flow
24… Atmospheric release path (atmospheric open department)
26… open air department
27… filter

Claims (7)

As an actuator that generates thrust by supplying gas,
a cylinder into which the gas is supplied; and
a piston reciprocating in the cylinder;
a gas chamber formed in the cylinder
to provide
The gas chamber has a first gas chamber that can be maintained in a vacuum, a second gas chamber to which the gas is supplied, and a third gas chamber to reciprocate the piston according to the supply,
A communication passage is formed in the piston to communicate with the distal end of the piston and the first gas chamber,
It is formed so as to communicate with at least one of between the first gas chamber and the second gas chamber and between the first gas chamber and the third gas chamber, and the gas supplied into the cylinder is opened to the atmosphere. to have wealth,
The air opening part is an air opening passage formed in the piston, the actuator. As an actuator that generates thrust by supplying gas,
a cylinder into which the gas is supplied; and
a piston reciprocating in the cylinder;
a gas chamber formed in the cylinder;
Atmospheric opening part for opening the gas supplied into the cylinder to the atmosphere
to provide
The gas chamber has a first gas chamber that can be maintained in a vacuum, and a second gas chamber to which the gas is supplied and to which the piston reciprocates according to the supply,
A communication passage is formed in the piston to communicate with the distal end of the piston and the first gas chamber,
The atmosphere opening portion is formed to communicate between the first gas chamber and the second gas chamber,
The air opening part is an air opening passage formed in the piston, the actuator. 3. The method according to claim 2,
The gas chamber further has a third gas chamber to which the gas is supplied and reciprocating the piston according to the supply,
The said atmospheric release part is formed so that it may communicate also between the said 1st gas chamber and the said 3rd gas chamber, The actuator. 4. The method according to any one of claims 1 to 3,
The first gas chamber is an actuator that can be maintained even at a static pressure. 4. The method according to any one of claims 1 to 3,
An actuator provided with a filter at the distal end of the piston. delete delete

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