JP4365191B2

JP4365191B2 - Active vibration control device and system

Info

Publication number: JP4365191B2
Application number: JP2003387926A
Authority: JP
Inventors: 正志安田
Original assignee: Tokkyokiki Corp
Current assignee: Tokkyokiki Corp
Priority date: 2003-11-18
Filing date: 2003-11-18
Publication date: 2009-11-18
Anticipated expiration: 2023-11-18
Also published as: JP2005147318A

Description

本発明は、空気ばねを用いたアクティブ振動制御装置及びシステムに関するものである。 The present invention relates to an active vibration control apparatus and system using an air spring.

従来、微振動制御用のアクティブ振動制御装置では、電空変換制御弁であるノズルフラッパー型サーボ弁による空気ばね内の空気圧制御が行われてきた（例えば、特許文献１参照。）。
質量体を空気ばねにより浮上させて、この空気ばね内の空気圧を制御することにより振動制御を行うことができ、アクチュエータとしてこの空気ばねを用いた振動制御装置は他のアクチュエータを用いたものに比べて制御性能に優れ、コンパクトになるという長所を有している。また、空気圧制御用として、空気流路をオン／オフするだけの電磁弁では優れた振動制御特性が得られないため、高速動作に優れたノズルフラッパー型サーボ弁が用いられてきた。
特許第２８５７１５４号公報 Conventionally, in an active vibration control device for fine vibration control, air pressure control in an air spring has been performed by a nozzle flapper type servo valve that is an electropneumatic conversion control valve (see, for example, Patent Document 1).
Vibration control can be performed by levitating the mass body with an air spring and controlling the air pressure in the air spring. The vibration control device using this air spring as an actuator is compared with those using other actuators. It has the advantages of excellent control performance and compactness. In addition, since an excellent vibration control characteristic cannot be obtained with an electromagnetic valve that simply turns on / off an air flow path for air pressure control, a nozzle flapper type servo valve excellent in high-speed operation has been used.
Japanese Patent No. 2857154

上述した従来のアクティブ振動制御装置では、ノズルフラッパー型サーボ弁が用いられており、このノズルフラッパー型サーボ弁に関しては、その構造上、常時、圧縮空気を放出した状態で使用せざるを得ず、その放出量は弁の口径に比例する。このように、このノズルフラッパー型サーボ弁は、エネルギーを放出し続ける構造を有し、エネルギー効率の面で無駄が大きく、この無駄を小さくしようとすれば、弁の口径を小さくせざるを得ない。この弁の口径を小さくすれば、省エネルギーの要請に応えることはできても、圧縮空気の流量は絞られ、空気ばねの最大出力も低下してしまい、空気ばねを大ストロークのものにしたり、大きな負荷に耐え得るようにすることができないという問題が生じる。 In the conventional active vibration control device described above, a nozzle flapper type servo valve is used, and the nozzle flapper type servo valve must be used in a state in which compressed air is always discharged due to its structure. The amount of discharge is proportional to the diameter of the valve. As described above, this nozzle flapper type servo valve has a structure that continuously releases energy, and is wasteful in terms of energy efficiency. If this waste is to be reduced, the diameter of the valve must be reduced. . If this valve diameter is reduced, energy demands can be met, but the flow rate of compressed air will be reduced and the maximum output of the air spring will be reduced. The problem arises that it cannot be made to withstand the load.

本発明は、斯かる従来の問題をなくすことを課題としてなされたもので、省エネルギー、大型化、高速応答性の要請に応え得るアクティブ振動制御装置及びアクティブ振動制御システムを提供しようとするものである。 The present invention has been made with the object of eliminating such conventional problems, and an object of the present invention is to provide an active vibration control device and an active vibration control system that can meet demands for energy saving, an increase in size, and high-speed response. .

第１発明は、質量体とこの下方の設置部との間の３箇所に１台ずつ介在させた３台の第１のアクティブ振動制御装置と、上記質量体とこの下方の上記設置部との間の少なくとも１箇所に介在させた少なくとも１台の第２のアクティブ振動制御装置とからなる構成とした。上記第１のアクティブ振動制御装置は、上記質量体と上記設置部との間に介在し、上記質量体を支持する第１の空気ばねと、上記第１の空気ばねと圧縮空気源との間に介在し、上記第１の空気ばね内を上記圧縮空気源或いは大気に連通させ、或いはこの両者とは遮断する第１の電空変換制御弁と、上記質量体の振動状態を検出する振動センサと、上記質量体の上記設置部からの変位状態を検出する変位センサと、上記振動センサから検出された振動状態を示す信号を受け、この振動を打消す圧力変動を上記第１の空気ばね内に生じさせるように上記第１の電空変換制御弁を作動させる振動制御用駆動信号を生成する振動制御部、及び予め入力された上記質量体の目標位置と上記変位センサからの信号が示す変位状態との差を打消す圧力変動を上記第１の空気ばね内に生じさせるように上記第１の電空変換制御弁を作動させる位置制御用駆動信号を生成する位置制御部を有し、この両制御部で生成された信号を加算して得られた駆動信号を上記第１の電空変換制御弁に入力し、上記質量体の変位及び振動を抑制させる第１の演算制御器とを備え、上記第１の電空変換制御弁が、上記第１の空気ばね内に通じる第１の負荷ポート、上記圧縮空気源に通じる第１の供給ポート、及び大気に開口した第１の排気ポートを有する第１のハウジングと、それぞれ上記第１の負荷ポート、上記第１の供給ポート、及び上記第１の排気ポートを開閉するための複数の第１の弁体を有し、上記第１のハウジング内に非接触で進退可能に設けられたスプールであって、上記第１の演算制御器からの入力信号に対応して上記第１のハウジング内での直進駆動力を生じる第１の駆動部が一端部に設けられた第１のスプールとを備えたスプール弁である。上記第２のアクティブ振動制御装置は、上記質量体と上記設置部との間に介在し、上記質量体を支持する第２の空気ばねと、上記第２の空気ばねと上記圧縮空気源との間に介在し、上記第２の空気ばね内を上記圧縮空気源或いは大気に連通させ、或いはこの両者とは遮断する第２の電空変換制御弁と、上記第２の空気ばね内の圧力を検出する圧力センサと、上記圧力センサから検出圧力を示す信号を受け、予め入力された設定圧力と上記検出圧力との差を打消す圧力変動を上記第２の空気ばね内に生じさせるように上記第２の電空変換制御弁を作動させる圧力制御用駆動信号を生成する圧力制御部を有し、この圧力制御用駆動信号を上記第２の電空変換制御弁に入力し、上記第２の空気ばね内の圧力振動を抑制させる第２の演算制御器とを備え、上記第２の電空変換制御弁が、上記第２の空気ばね内に通じる第２の負荷ポート、上記圧縮空気源に通じる第２の供給ポート、及び大気に開口した第２の排気ポートを有する第２のハウジングと、それぞれ上記第２の負荷ポート、上記第２の供給ポート、及び上記第２の排気ポートを開閉するための複数の第２の弁体を有し、上記第２のハウジング内に非接触で進退可能に設けられたスプールであって、上記第２の演算制御器からの入力信号に対応して上記第２のハウジング内での直進駆動力を生じる第２の駆動部が一端部に設けられた第２のスプールとを備えたスプール弁である。
According to a first aspect of the present invention, there are provided three first active vibration control devices, each interposed at three locations between the mass body and the installation portion below the mass body, the mass body, and the installation portion below the mass body. And at least one second active vibration control device interposed at least at one location. The first active vibration control device is interposed between the mass body and the installation portion, and supports a first air spring that supports the mass body, and between the first air spring and a compressed air source. A first electro-pneumatic conversion control valve which is interposed between the first air spring and communicates with the compressed air source or the atmosphere or shuts off both, and a vibration sensor which detects a vibration state of the mass body A displacement sensor that detects a displacement state of the mass body from the installation portion, and a signal indicating the vibration state detected from the vibration sensor, and a pressure fluctuation that cancels the vibration is detected in the first air spring. A vibration control unit that generates a vibration control drive signal that activates the first electropneumatic conversion control valve so as to be generated, and a displacement indicated by a target position of the mass body input in advance and a signal from the displacement sensor Pressure fluctuation to cancel the difference with the state A position control unit for generating a position control drive signal for operating the first electropneumatic conversion control valve to be generated in the first air spring, and adding the signals generated by both the control units The first electropneumatic conversion control valve is provided with a first arithmetic controller that inputs the drive signal obtained in this manner to the first electropneumatic conversion control valve and suppresses displacement and vibration of the mass body. A first load port that communicates with the first air spring, a first supply port that communicates with the compressed air source, and a first housing that has a first exhaust port that is open to the atmosphere. A plurality of first valve bodies for opening and closing one load port, the first supply port, and the first exhaust port, and is provided in the first housing so as to be able to advance and retreat without contact. The spool is an input signal from the first arithmetic controller. In response to a spool valve having a first spool which first driver to produce linear driving force within said first housing is provided at one end. The second active vibration control device is interposed between the mass body and the installation portion, and includes a second air spring that supports the mass body, the second air spring, and the compressed air source. A second electro-pneumatic conversion control valve that is interposed between the second air spring and communicates with the compressed air source or the atmosphere, or shuts off the both, and the pressure within the second air spring. The pressure sensor to detect and a signal indicating the detected pressure from the pressure sensor, and a pressure fluctuation that cancels the difference between the preset pressure and the detected pressure that are input in advance is generated in the second air spring. A pressure control unit that generates a pressure control drive signal for operating the second electropneumatic conversion control valve, and inputs the pressure control drive signal to the second electropneumatic conversion control valve; A second arithmetic and control unit for suppressing pressure vibration in the air spring The second electropneumatic conversion control valve has a second load port communicating with the second air spring, a second supply port communicating with the compressed air source, and a second exhaust port opened to the atmosphere. A second housing having a plurality of second valve bodies for opening and closing the second load port, the second supply port, and the second exhaust port, respectively. A spool provided in a non-contact manner so as to be able to advance and retreat, and a second drive unit that generates a linear drive force in the second housing in response to an input signal from the second arithmetic controller. It is a spool valve provided with the 2nd spool provided in the one end part.

第２発明は、質量体とこの側方の設置部との間の３箇所に１台ずつ、支持方向をそれぞれ異ならせて介在させた３台の第１のアクティブ振動制御装置と、質量体とこの側方の設置部との間の上記３箇所とは異なる少なくとも１箇所に、支持方向を上記３台とは異ならせて介在させて少なくとも１台の第２のアクティブ振動制御装置とからなり、４台の上記アクティブ振動制御装置は上記質量体に同一平面内にて力を作用させ、その合力は零で、かつ、これらの力により上記質量体に生じるモーメントも零である構成とした。上記第１のアクティブ振動制御装置は、上記質量体と上記設置部との間に介在し、上記質量体を支持する第１の空気ばねと、上記第１の空気ばねと圧縮空気源との間に介在し、上記第１の空気ばね内を上記圧縮空気源或いは大気に連通させ、或いはこの両者とは遮断する第１の電空変換制御弁と、上記質量体の振動状態を検出する振動センサと、上記質量体の上記設置部からの変位状態を検出する変位センサと、上記振動センサから検出された振動状態を示す信号を受け、この振動を打消す圧力変動を上記第１の空気ばね内に生じさせるように上記第１の電空変換制御弁を作動させる振動制御用駆動信号を生成する振動制御部、及び予め入力された上記質量体の目標位置と上記変位センサからの信号が示す変位状態との差を打消す圧力変動を上記第１の空気ばね内に生じさせるように上記第１の電空変換制御弁を作動させる位置制御用駆動信号を生成する位置制御部を有し、この両制御部で生成された信号を加算して得られた駆動信号を上記第１の電空変換制御弁に入力し、上記質量体の変位及び振動を抑制させる第１の演算制御器とを備え、上記第１の電空変換制御弁が、上記第１の空気ばね内に通じる第１の負荷ポート、上記圧縮空気源に通じる第１の供給ポート、及び大気に開口した第１の排気ポートを有する第１のハウジングと、それぞれ上記第１の負荷ポート、上記第１の供給ポート、及び上記第１の排気ポートを開閉するための複数の第１の弁体を有し、上記第１のハウジング内に非接触で進退可能に設けられたスプールであって、上記第１の演算制御器からの入力信号に対応して上記第１のハウジング内での直進駆動力を生じる第１の駆動部が一端部に設けられた第１のスプールとを備えたスプール弁である。上記第２のアクティブ振動制御装置は、上記質量体と上記設置部との間に介在し、上記質量体を支持する第２の空気ばねと、上記第２の空気ばねと上記圧縮空気源との間に介在し、上記第２の空気ばね内を上記圧縮空気源或いは大気に連通させ、或いはこの両者とは遮断する第２の電空変換制御弁と、上記第２の空気ばね内の圧力を検出する圧力センサと、上記圧力センサから検出圧力を示す信号を受け、予め入力された設定圧力と上記検出圧力との差を打消す圧力変動を上記第２の空気ばね内に生じさせるように上記第２の電空変換制御弁を作動させる圧力制御用駆動信号を生成する圧力制御部を有し、この圧力制御用駆動信号を上記第２の電空変換制御弁に入力し、上記第２の空気ばね内の圧力振動を抑制させる第２の演算制御器とを備え、上記第２の電空変換制御弁が、上記第２の空気ばね内に通じる第２の負荷ポート、上記圧縮空気源に通じる第２の供給ポート、及び大気に開口した第２の排気ポートを有する第２のハウジングと、それぞれ上記第２の負荷ポート、上記第２の供給ポート、及び上記第２の排気ポートを開閉するための複数の第２の弁体を有し、上記第２のハウジング内に非接触で進退可能に設けられたスプールであって、上記第２の演算制御器からの入力信号に対応して上記第２のハウジング内での直進駆動力を生じる第２の駆動部が一端部に設けられた第２のスプールとを備えたスプール弁である。
The second invention includes three first active vibration control devices interposed at different positions in the three positions between the mass body and the side installation portion, respectively, and the mass body. It consists of at least one second active vibration control device with a support direction different from that of the above three units at least at one point different from the above three points between the side installation portions, The four active vibration control devices apply force to the mass body in the same plane, the resultant force is zero, and the moment generated in the mass body by these forces is also zero. The first active vibration control device is interposed between the mass body and the installation portion, and supports a first air spring that supports the mass body, and between the first air spring and a compressed air source. A first electro-pneumatic conversion control valve which is interposed between the first air spring and communicates with the compressed air source or the atmosphere or shuts off both, and a vibration sensor which detects a vibration state of the mass body A displacement sensor that detects a displacement state of the mass body from the installation portion, and a signal indicating the vibration state detected from the vibration sensor, and a pressure fluctuation that cancels the vibration is detected in the first air spring. A vibration control unit that generates a vibration control drive signal that activates the first electropneumatic conversion control valve so as to be generated, and a displacement indicated by a target position of the mass body input in advance and a signal from the displacement sensor Pressure fluctuation to cancel the difference with the state A position control unit for generating a position control drive signal for operating the first electropneumatic conversion control valve to be generated in the first air spring, and adding the signals generated by both the control units The first electropneumatic conversion control valve is provided with a first arithmetic controller that inputs the drive signal obtained in this manner to the first electropneumatic conversion control valve and suppresses displacement and vibration of the mass body. A first load port that communicates with the first air spring, a first supply port that communicates with the compressed air source, and a first housing that has a first exhaust port that is open to the atmosphere. A plurality of first valve bodies for opening and closing one load port, the first supply port, and the first exhaust port, and is provided in the first housing so as to be able to advance and retreat without contact. The spool is an input signal from the first arithmetic controller. In response to a spool valve having a first spool which first driver to produce linear driving force within said first housing is provided at one end. The second active vibration control device is interposed between the mass body and the installation portion, and includes a second air spring that supports the mass body, the second air spring, and the compressed air source. A second electro-pneumatic conversion control valve that is interposed between the second air spring and communicates with the compressed air source or the atmosphere, or shuts off the both, and the pressure within the second air spring. The pressure sensor to detect and a signal indicating the detected pressure from the pressure sensor, and a pressure fluctuation that cancels the difference between the preset pressure and the detected pressure that are input in advance is generated in the second air spring. A pressure control unit that generates a pressure control drive signal for operating the second electropneumatic conversion control valve, and inputs the pressure control drive signal to the second electropneumatic conversion control valve; A second arithmetic and control unit for suppressing pressure vibration in the air spring The second electropneumatic conversion control valve has a second load port communicating with the second air spring, a second supply port communicating with the compressed air source, and a second exhaust port opened to the atmosphere. A second housing having a plurality of second valve bodies for opening and closing the second load port, the second supply port, and the second exhaust port, respectively. A spool provided in a non-contact manner so as to be able to advance and retreat, and a second drive unit that generates a linear drive force in the second housing in response to an input signal from the second arithmetic controller. It is a spool valve provided with the 2nd spool provided in the one end part.

第１及び第２のアクティブ振動制御装置によれば、圧縮空気の無用な消費はなくなり省エネルギーが可能となり、圧縮空気の流量を制限する必要がなくなり、空気ばねを大ストロークにし、大きな負荷に耐え得るものにでき、空気ばね内の圧力を迅速かつ正確に所望値にすることができ、大型化、高速応答性、省エネルギーの要請に応えることができるという効果を奏する。
According to the first and second active vibration control devices, unnecessary consumption of compressed air is eliminated, energy saving is possible, there is no need to limit the flow rate of compressed air, the air spring can be made a large stroke, and can withstand a large load. The pressure in the air spring can be quickly and accurately set to a desired value, and the effect of increasing the size, high speed response, and energy saving can be achieved.

第１及び第２発明によれば、質量体が大きい場合にも、上記第１及び第２のアクティブ振動制御装置を適用でき、上述したのと同様の効果を奏する。
According to the first and second inventions, even when the mass body is large, the first and second active vibration control devices can be applied, and the same effects as described above can be obtained.

次に、本発明の実施形態を図面にしたがって説明する。
図１は本発明に係るアクティブ振動制御装置１を示し、このアクティブ振動制御装置１には、アクチュエータとして空気ばね１１が設けられている。
空気ばね１１は、振動外乱Ｄが作用する質量体Ｍと設置部Ｌとの間に介在し、質量体Ｍを支持しており、電空変換制御弁であるスプール弁１２を介して圧縮空気源１３に接続されている。 Next, embodiments of the present invention will be described with reference to the drawings.
FIG. 1 shows an active vibration control device 1 according to the present invention, and this active vibration control device 1 is provided with an air spring 11 as an actuator.
The air spring 11 is interposed between the mass body M on which the vibration disturbance D acts and the installation portion L, supports the mass body M, and supplies a compressed air source via a spool valve 12 that is an electropneumatic conversion control valve. 13 is connected.

スプール弁１２は、図２に示すように、空気ばね１１内に通じる負荷ポートＬＰ、圧縮空気源１３に通じる供給ポートＳＰ、及び大気に開口した排気ポートＥＰを有するハウジング１４と、ハウジング１４内に収容されたスプール１５とからなっている。このスプール１５は三つの鍔状の弁体１６，１７及び１８を有し、その両端部はばね２１、２２からの互いに対向する方向の力により軸方向に付勢され、他の力が作用していない状態下で、定位置に保持されるようになっている。また、スプール１５の一端部には駆動部２３が設けられている。この駆動部２３は、リニアモータの一例としてボイスコイルモータを用いたもので、スプール１５の筒状端部の外周に配設されたコイル部２４と、このコイル部２４を取巻くハウジング１４側の永久磁石２５とからなっている。そして、コイル部２４に電流を流すことにより駆動部２３からスプール１５に直進駆動力が作用し、この電流の方向を変えて、スプール１５をその軸方向に進退させることにより、スプール弁１２が負荷ポートＬＰを閉じた状態、排気ポートＥＰを閉じ、負荷ポートＬＰと供給ポートＳＰとを連通させた状態、供給ポートＳＰを閉じ、負荷ポートＬＰと排気ポートＥＰとを連通させた状態のいずれかになり得るようになっている。 As shown in FIG. 2, the spool valve 12 includes a housing 14 having a load port LP that communicates with the air spring 11, a supply port SP that communicates with the compressed air source 13, and an exhaust port EP that opens to the atmosphere. The spool 15 is housed. The spool 15 has three hook-shaped valve bodies 16, 17 and 18, and both end portions thereof are urged in the axial direction by forces in opposite directions from the springs 21 and 22, and other forces act. It is held in a fixed position under the state where it is not. In addition, a drive unit 23 is provided at one end of the spool 15. The drive unit 23 uses a voice coil motor as an example of a linear motor. The drive unit 23 has a coil unit 24 disposed on the outer periphery of the cylindrical end of the spool 15 and a permanent member on the housing 14 side surrounding the coil unit 24. It consists of a magnet 25. Then, when a current is passed through the coil portion 24, a straight driving force is applied from the drive portion 23 to the spool 15, and the direction of this current is changed to move the spool 15 forward and backward in the axial direction, whereby the spool valve 12 is loaded. Either the port LP is closed, the exhaust port EP is closed, the load port LP is connected to the supply port SP, or the supply port SP is closed, and the load port LP is connected to the exhaust port EP. Can be.

さらに、弁体１６の外周のランド部１６Ｌには、弁体１６のばね２１側の端面に達しない長溝からなる表面絞り２６が穿設されている。この表面絞り２６は、弁体１６の弁体１７に面した端面側から上記長溝内に流入した圧縮空気を上記ばね２１側に通過させることにより静圧軸受を形成するものである。また、弁体１８の外周のランド部１８Ｌには、弁体１８のばね２２側の端面に達しない長溝からなる表面絞り２７が穿設されている。この表面絞り２７は、一端が弁体１６と弁体１７との間の空間に連通し、他端が弁体１８の外周に形成した溝部２８に連通する貫通孔２９を介して、弁体１７側から弁体１８の上記長溝内に流入した圧縮空気を上記ばね２２側に通過させることにより静圧軸受を形成するものである。なお、図示するスプール１５の場合、貫通孔２９の弁体１６と弁体１７との間の空間への開口部、及び溝部２８への開口部は、それぞれ複数形成されている。そして、静圧軸受を形成する表面絞り２６及び２７によりスプール１５はハウジング１４内において、非接触で直動可能となっている。 Further, a surface restriction 26 made of a long groove that does not reach the end face on the spring 21 side of the valve body 16 is formed in the land portion 16L on the outer periphery of the valve body 16. The surface restrictor 26 forms a hydrostatic bearing by allowing compressed air that has flowed into the long groove from the end surface side of the valve body 16 facing the valve body 17 to pass through the spring 21. Further, a surface restrictor 27 made of a long groove that does not reach the end face on the spring 22 side of the valve body 18 is formed in the land portion 18L on the outer periphery of the valve body 18. One end of the surface throttle 27 communicates with the space between the valve body 16 and the valve body 17, and the other end communicates with the valve body 17 via a through hole 29 that communicates with a groove portion 28 formed on the outer periphery of the valve body 18. A hydrostatic bearing is formed by allowing compressed air flowing into the long groove of the valve body 18 from the side to pass through the spring 22 side. In the case of the illustrated spool 15, a plurality of openings to the space between the valve body 16 and the valve body 17 of the through hole 29 and openings to the groove 28 are formed. The spool 15 can be linearly moved in a non-contact manner in the housing 14 by the surface restrictors 26 and 27 forming the hydrostatic bearing.

上述した表面絞り２６及び２７に代えて、スプール１５の一方の軸端部から圧縮空気を導入する圧縮空気流路をスプール１５の軸部に穿設し、さらにこの圧縮空気流路からスプール１５の弁体１６及び１８のそれぞれの外周面に開口した細孔をそれぞれに穿設し、この圧縮空気流路及び細孔を介して弁体内から弁体の外周部に圧縮空気を流出させることにより静圧軸受を形成することもできる。しかしながら、このような構造の場合、静圧軸受を形成するためだけに、圧縮空気供給のための流路を弁の外部に設けなければならないだけでなく、圧縮空気を導入する側におけるスプール端部の支持構造が複雑になり、これがスプールの迅速な動作の妨げとなるおそれがある。また、上記細孔は目詰まりを起こし易く、目詰まりを起こす前にも、その内径が変化するのは避けられず、これにより静圧軸受により支持力のバランスが崩れ、軸受としての信頼性が乏しいという問題がある。本発明におけるスプール弁１２は、上述した表面絞り２６及び２７を採用しているため、静圧軸受を形成するためだけの圧縮空気流路を弁の外部に設ける必要はなく、上述した問題を生じることもない。 Instead of the above-described surface restrictors 26 and 27, a compressed air passage for introducing compressed air from one shaft end of the spool 15 is formed in the shaft portion of the spool 15, and further, the spool 15 Opening holes are formed in the outer peripheral surfaces of the valve bodies 16 and 18, respectively, and the compressed air flows out from the valve body to the outer periphery of the valve body through the compressed air flow path and the pores, thereby A pressure bearing can also be formed. However, in the case of such a structure, not only a flow path for supplying compressed air has to be provided outside the valve in order to form a hydrostatic bearing, but also the spool end on the side where compressed air is introduced The support structure becomes complicated, which may hinder the rapid operation of the spool. In addition, the pores are easily clogged, and it is inevitable that the inner diameter changes before clogging occurs. There is a problem of being scarce. Since the spool valve 12 according to the present invention employs the above-described surface restrictors 26 and 27, it is not necessary to provide a compressed air flow path only for forming a static pressure bearing outside the valve, causing the above-described problems. There is nothing.

質量体Ｍの振動状態は振動センサ３１により検出され、検出された振動状態を示す信号は演算制御器３２内の図示しない振動制御部に入力される。また、質量体Ｍの設置部Ｌからの変位状態は変位センサ３３により検出され、検出された変位状態を示す信号は演算制御器３２内の予め目標位置が入力された図示しない位置制御部に入力される。演算制御器３２では、上記振動制御部において、振動センサ３１からの信号が示す振動を打消す圧力変動を空気ばね１１内に生じさせるようにスプール弁１２を作動させる振動制御用駆動信号が生成され、上記位置制御部において上記目標位置と変位センサ３３からの信号が示す変位状態との差を打消す圧力変動を空気ばね１１内に生じさせるようにスプール弁１２を作動させる位置制御用駆動信号が生成される。そして、上記振動制御用駆動信号と上記位置制御用駆動信号とが加算されて得られた駆動信号がスプール弁１２に入力される。さらに詳しくは、この駆動信号がスプール弁１２のコイル部２４に入力され、スプール１５がその軸方向に進退し、これにより質量体Ｍの変位、及び振動が抑制される。 The vibration state of the mass body M is detected by the vibration sensor 31, and a signal indicating the detected vibration state is input to a vibration control unit (not shown) in the arithmetic controller 32. Further, the displacement state of the mass body M from the installation portion L is detected by the displacement sensor 33, and a signal indicating the detected displacement state is input to a position control unit (not shown) in which a target position is input in advance in the arithmetic controller 32. Is done. In the arithmetic controller 32, the vibration control unit generates a vibration control drive signal for operating the spool valve 12 so as to cause a pressure fluctuation in the air spring 11 to cancel the vibration indicated by the signal from the vibration sensor 31. A position control drive signal for operating the spool valve 12 to cause a pressure fluctuation in the air spring 11 to cancel out the difference between the target position and the displacement state indicated by the signal from the displacement sensor 33 in the position control unit. Generated. Then, a drive signal obtained by adding the vibration control drive signal and the position control drive signal is input to the spool valve 12. More specifically, this drive signal is input to the coil portion 24 of the spool valve 12, and the spool 15 moves back and forth in the axial direction, thereby suppressing the displacement and vibration of the mass body M.

このように、アクティブ振動制御装置１では、電空変換制御弁として、静圧軸受を形成することにより非接触で直動可能なスプール１５を備えたスプール弁１２を用い、しかもこの静圧軸受は弁体１６及び１８の外周のランド部１６Ｌ及び１８Ｌに穿設された表面絞り２６及び２７により供給ポートＳＰからの圧縮空気だけで形成され、単純かつ目詰まり等の不具合が生じ難い構造となっている。また、このスプール弁１２は、高速応答性にも優れるとともに、圧縮空気を放出した状態で使用されるノズルフラッパ型サーボ弁に比してより少ない量の圧縮空気で作動する故、大型化し易い。このため、アクティブ振動制御装置１についても、省エネルギー、大型化、高速応答性の要求に応えることが可能となる。 As described above, in the active vibration control device 1, the electropneumatic conversion control valve uses the spool valve 12 including the spool 15 that can move linearly in a non-contact manner by forming a static pressure bearing. The surface restrictors 26 and 27 formed in the land portions 16L and 18L on the outer periphery of the valve bodies 16 and 18 are formed only by compressed air from the supply port SP, and have a structure that is simple and hardly causes problems such as clogging. Yes. Further, the spool valve 12 is excellent in high-speed response, and is easily increased in size because it operates with a smaller amount of compressed air than a nozzle flapper type servo valve used in a state in which compressed air is released. For this reason, the active vibration control device 1 can also meet demands for energy saving, large size, and high speed response.

図３は本発明に係る別のアクティブ振動制御装置２を示し、図３において、図１に示すアクティブ振動制御装置１と互いに共通する部分については、同一番号を付して説明を省略する。
このアクティブ振動制御装置２では、空気ばね１１は、質量体Ｍと振動外乱Ｄが作用する設置部Ｌとの間に介在し、質量体Ｍを支持している。また、質量体Ｍの振動状態に代えて、設置部Ｌの振動状態が振動センサ３１により検出され、検出された振動状態を示す信号は演算制御器３２内の図示しない振動制御部に入力されるように形成されている。 FIG. 3 shows another active vibration control device 2 according to the present invention. In FIG. 3, parts common to the active vibration control device 1 shown in FIG.
In the active vibration control device 2, the air spring 11 is interposed between the mass body M and the installation portion L on which the vibration disturbance D acts, and supports the mass body M. Further, instead of the vibration state of the mass body M, the vibration state of the installation portion L is detected by the vibration sensor 31, and a signal indicating the detected vibration state is input to a vibration control unit (not shown) in the arithmetic controller 32. It is formed as follows.

演算制御器３２では、上記振動制御部において、振動センサ３１からの信号が示す振動を打消す圧力変動を空気ばね１１内に生じさせるようにスプール弁１２を作動させる振動制御用駆動信号が生成され、上記位置制御部において上記目標位置と変位センサ３３からの信号が示す変位状態との差を打消す圧力変動を空気ばね１１内に生じさせるようにスプール弁１２を作動させる位置制御用駆動信号が生成される。そして、上記振動制御用駆動信号と上記位置制御用駆動信号とが加算されて得られた駆動信号がスプール弁１２に入力される。さらに詳しくは、この駆動信号がスプール弁１２のコイル部２４に入力され、スプール１５がその軸方向に進退し、これにより設置部Ｌの変位、及び振動が抑制される。 In the arithmetic controller 32, the vibration control unit generates a vibration control drive signal for operating the spool valve 12 so as to cause a pressure fluctuation in the air spring 11 to cancel the vibration indicated by the signal from the vibration sensor 31. A position control drive signal for operating the spool valve 12 to cause a pressure fluctuation in the air spring 11 to cancel out the difference between the target position and the displacement state indicated by the signal from the displacement sensor 33 in the position control unit. Generated. Then, a drive signal obtained by adding the vibration control drive signal and the position control drive signal is input to the spool valve 12. More specifically, this drive signal is input to the coil portion 24 of the spool valve 12, and the spool 15 moves back and forth in the axial direction, thereby suppressing the displacement and vibration of the installation portion L.

図４は本発明に係るさらに別のアクティブ振動制御装置３を示し、図４において、図１に示すアクティブ振動制御装置１と互いに共通する部分については、同一番号を付して説明を省略する。
このアクティブ振動制御装置３では、空気ばね１１は、振動外乱Ｄが作用する質量体Ｍと設置部Ｌとの間に介在し、質量体Ｍを支持している。また、空気ばね１１には、空気ばね１１内の圧力を検出する圧力センサ３４が設けられ、圧力センサ３４から検出圧力を示す信号が演算制御器３２内の圧力制御部に入力される。 FIG. 4 shows still another active vibration control device 3 according to the present invention. In FIG. 4, portions common to the active vibration control device 1 shown in FIG.
In the active vibration control device 3, the air spring 11 is interposed between the mass body M on which the vibration disturbance D acts and the installation portion L, and supports the mass body M. The air spring 11 is provided with a pressure sensor 34 for detecting the pressure in the air spring 11, and a signal indicating the detected pressure is input from the pressure sensor 34 to a pressure control unit in the arithmetic controller 32.

演算制御器３２では、上記圧力制御部において、予め入力された設定圧力と上記検出圧力との差を打消す圧力変動を空気ばね１１内に生じさせるようにスプール弁１２を作動させる圧力制御用駆動信号が生成され、この圧力制御用駆動信号がスプール弁１２に入力される。そして、これによりスプール１５がその軸方向に進退し、空気ばね１１内の圧力振動が抑制される結果、質量体Ｍの変位、及び振動が抑制される。 In the arithmetic controller 32, a pressure control drive that operates the spool valve 12 so as to cause a pressure fluctuation in the air spring 11 to cancel the difference between the preset pressure inputted in advance and the detected pressure in the pressure controller. A signal is generated, and this pressure control drive signal is input to the spool valve 12. As a result, the spool 15 advances and retreats in the axial direction, and the pressure vibration in the air spring 11 is suppressed. As a result, the displacement and vibration of the mass body M are suppressed.

図５は、上述したアクティブ振動制御装置１〜３において、スプール弁１２に代えて使用される別のスプール弁１２Ａを示し、図３において図２と共通する部分については互いに同一番号が付してある。
このスプール弁１２Ａは、ばね２１及び２２に代えて、駆動部２３から離れたスプール１５の端部側に、スプール１５の変位状態を検出するスプール用変位センサ４１を設けて形成されている。そして、スプール用変位センサ４１による検出変位量を示す変位量信号を演算制御器３２に入力し、この変位量信号に基づき演算制御器３２によりスプール１５を所望の位置にする位置決め制御がなされ、スプール１５の位置決めが確実になされるようになっている。 FIG. 5 shows another spool valve 12A used in place of the spool valve 12 in the active vibration control devices 1 to 3 described above. In FIG. 3, parts common to FIG. is there.
The spool valve 12A is formed by providing a spool displacement sensor 41 for detecting the displacement state of the spool 15 on the end portion side of the spool 15 apart from the drive unit 23, instead of the springs 21 and 22. Then, a displacement amount signal indicating the displacement detected by the spool displacement sensor 41 is input to the arithmetic controller 32, and based on this displacement amount signal, the arithmetic controller 32 performs positioning control to bring the spool 15 to a desired position. The positioning of 15 is ensured.

図６は、上述したアクティブ振動制御装置１〜３において、スプール弁１２或いは１２Ａに代えて使用されるさらに別のスプール弁１２Ｂを示し、図４において図２と共通する部分については互いに同一番号が付してある。
このスプール弁１２Ｂは、駆動部２３から離れたスプール１５の端部側に、スプール１５の速度を検出する速度センサ４２を設けて形成されている。そして、速度センサ４２による検出速度を示す速度信号を演算制御器３２に入力し、この速度信号に基づき演算制御器３２により、スプール１５にその直動に対するダンパー作用を加える制御がなされるようになっている。 FIG. 6 shows still another spool valve 12B used in place of the spool valve 12 or 12A in the above-described active vibration control devices 1 to 3, and parts in FIG. 4 common to FIG. It is attached.
The spool valve 12 </ b> B is formed by providing a speed sensor 42 that detects the speed of the spool 15 on the end side of the spool 15 that is remote from the drive unit 23. Then, a speed signal indicating the speed detected by the speed sensor 42 is input to the arithmetic controller 32, and based on this speed signal, the arithmetic controller 32 controls the damper 15 to act on the linear motion of the spool 15. ing.

図７及び８は、質量体Ｍが大きい場合で、質量体Ｍを下方から支持する場合に適用されるアクティブ振動制御システム４を示し、このアクティブ振動制御システム４は、３箇所に１台ずつ配置されたアクティブ振動制御装置１と１箇所に１台だけ配置されたアクティブ振動制御装置３からなっている。 FIGS. 7 and 8 show an active vibration control system 4 applied when the mass body M is large and the mass body M is supported from below, and this active vibration control system 4 is arranged one by one at three locations. Active vibration control device 1 and only one active vibration control device 3 arranged at one place.

この場合、位置制御するアクティブ振動制御装置１の台数を増減することは質量体Ｍの安定した支持を阻害し、質量体Ｍを不安定にするため許されないが、圧力制御するアクティブ振動制御装置３の台数を２以上にしてもよい。 In this case, increasing / decreasing the number of active vibration control devices 1 for position control inhibits stable support of the mass body M, and is not allowed to make the mass body M unstable, but the active vibration control device 3 for pressure control. The number may be 2 or more.

図９は、質量体Ｍが大きい場合で、質量体Ｍを側方から支持する場合に適用されるアクティブ振動制御システム５を示し、質量体Ｍと設置部Ｌとの間の３箇所に１台ずつ、支持方向をそれぞれ異ならせて介在させた３台のアクティブ振動制御装置１と、質量体Ｍと設置部Ｌとの間の上記３箇所とは異なる１箇所に、支持方向を上記３台とは異ならせて介在させた１台のアクティブ振動制御装置３からなっている。また、このアクティブ振動制御システム５では、上述した４台のアクティブ振動制御装置１及び３は質量体Ｍに同一平面内にて力を作用させ、その合力は零で、かつ、これらの力により質量体Ｍに生じるモーメントも零となるように４台のアクティブ振動制御装置１及び３は配置されている。 FIG. 9 shows an active vibration control system 5 applied when the mass body M is large and the mass body M is supported from the side, and one system is provided at three positions between the mass body M and the installation portion L. The three active vibration control devices 1 interposed with different support directions, respectively, and the three support directions are different from the above three locations between the mass body M and the installation portion L. Consists of a single active vibration control device 3 intervening differently. In the active vibration control system 5, the four active vibration control devices 1 and 3 described above apply a force to the mass body M in the same plane, the resultant force is zero, and the mass is generated by these forces. The four active vibration control devices 1 and 3 are arranged so that the moment generated in the body M is also zero.

この場合も、位置制御するアクティブ振動制御装置１の台数を増減することは質量体Ｍの安定した支持を阻害し、質量体Ｍを不安定にするため許されないが、圧力制御するアクティブ振動制御装置３の台数を２以上にしてもよく、その支持方向もそれぞれ異なる必要はない。
なお、図７〜９において、空気ばね１１以外の構成部分は図示するのを省略しているが、正確には、図１或いは３に示す構成のものが適用される。 Also in this case, increasing / decreasing the number of active vibration control devices 1 for position control inhibits stable support of the mass body M and is not allowed to destabilize the mass body M, but the active vibration control device for pressure control The number of 3 may be two or more, and the support directions thereof do not have to be different.
7 to 9, the components other than the air spring 11 are not shown, but the configuration shown in FIG. 1 or 3 is applied precisely.

本発明に係るアクティブ振動制御装置１〜３及びアクティブ振動制御システム４，５は、例えば、半導体、ナノテクノロジー、バイオサイエンス等の分野における精密機器の微振動制御若しくは上記分野における構造物の振動制御のための利用に適している。 The active vibration control devices 1 to 3 and the active vibration control systems 4 and 5 according to the present invention are, for example, for fine vibration control of precision instruments in the fields of semiconductors, nanotechnology, bioscience, etc. or vibration control of structures in the above fields. Suitable for use.

本発明に係るアクティブ振動制御装置の全体構成を示すブロック図である。It is a block diagram which shows the whole structure of the active vibration control apparatus which concerns on this invention. 図１に示す装置におけるスプール弁の断面図である。It is sectional drawing of the spool valve in the apparatus shown in FIG. 本発明に係る別のアクティブ振動制御装置の全体構成を示すブロック図である。It is a block diagram which shows the whole structure of another active vibration control apparatus which concerns on this invention. 本発明に係るさらに別のアクティブ振動制御装置の全体構成を示すブロック図である。It is a block diagram which shows the whole structure of another active vibration control apparatus which concerns on this invention. 図２に示すスプール弁に代えて本発明に係る装置に使用される別のスプール弁の断面図である。It is sectional drawing of another spool valve used for the apparatus based on this invention instead of the spool valve shown in FIG. 図２に示すスプール弁に代えて本発明に係る装置に使用されるさらに別のスプール弁の断面図である。It is sectional drawing of another spool valve used for the apparatus based on this invention instead of the spool valve shown in FIG. 本発明に係るアクティブ振動制御システムの概略を示す平面図である。It is a top view which shows the outline of the active vibration control system which concerns on this invention. 図７に示すアクティブ振動制御システムの概略を示す部分断面側面図である。FIG. 8 is a partial cross-sectional side view schematically showing the active vibration control system shown in FIG. 7. 本発明に係る別のアクティブ振動制御システムの概略を示す部分断面平面図である。It is a fragmentary sectional top view which shows the outline of another active vibration control system which concerns on this invention.

Explanation of symbols

１〜３アクティブ振動制御装置
４，５アクティブ振動制御システム
１１空気ばね
１２スプール弁
１３圧縮空気源
１４ハウジング
１５スプール
１６，１７，１８弁体
１６Ｌ，１８Ｌランド部
２１，２２ばね
２３駆動部
２４コイル部
２５永久磁石
２６，２７表面絞り
２８溝部
２９貫通孔
３１振動センサ
３２演算制御器
３３変位センサ
３４圧力センサ
４１スプール用変位センサ
４２速度センサ
Ｄ振動外乱
Ｌ設置部
Ｍ質量体
ＬＰ負荷ポート
ＳＰ供給ポート
ＥＰ排気ポート
1-3 Active vibration control devices 4, 5 Active vibration control system 11 Air spring 12 Spool valve 13 Compressed air source 14 Housing 15 Spools 16, 17, 18 Valve bodies 16L, 18L Land portions 21, 22 Spring 23 Drive portion 24 Coil portion 25 Permanent magnets 26, 27 Surface restriction 28 Groove 29 Through-hole 31 Vibration sensor 32 Operation controller 33 Displacement sensor 34 Pressure sensor 41 Spool displacement sensor 42 Speed sensor D Vibration disturbance L Installation part M Mass body LP Load port SP Supply port EP Exhaust port

Claims

At least one location between the three first active vibration control devices interposed between the mass body and the installation portion below the mass body, and the mass body and the installation portion below the mass body. Do at least one second active vibration control device that is interposed Ri,
The first active vibration control device includes:
A first air spring interposed between the mass body and the installation portion and supporting the mass body;
A first electropneumatic conversion control valve that is interposed between the first air spring and a compressed air source and communicates the inside of the first air spring with the compressed air source or the atmosphere, or shuts off the both. When,
A vibration sensor for detecting a vibration state of the mass body;
A displacement sensor for detecting a displacement state of the mass body from the installation portion;
For vibration control that operates the first electropneumatic conversion control valve to receive a signal indicating the vibration state detected from the vibration sensor and cause a pressure fluctuation in the first air spring to cancel the vibration. A vibration control unit that generates a drive signal and a pressure fluctuation that cancels a difference between a target position of the mass body that is input in advance and a displacement state indicated by a signal from the displacement sensor are generated in the first air spring. And a position control unit that generates a position control drive signal for operating the first electropneumatic conversion control valve, and the drive signal obtained by adding the signals generated by both the control units is the first control signal. A first arithmetic controller that inputs to the electropneumatic conversion control valve of 1 and suppresses displacement and vibration of the mass body;
The first electropneumatic conversion control valve has a first load port communicating with the first air spring, a first supply port communicating with the compressed air source, and a first exhaust port opened to the atmosphere. A first housing and a plurality of first valve bodies for opening and closing the first load port, the first supply port, and the first exhaust port, respectively; A non-contact spool that is capable of advancing and retreating, and a first driving unit that generates a linear driving force in the first housing in response to an input signal from the first arithmetic controller is one end. A spool valve provided with a first spool provided in the section,
The second active vibration control device includes:
A second air spring interposed between the mass body and the installation portion and supporting the mass body;
Second electro-pneumatic conversion control that is interposed between the second air spring and the compressed air source, and communicates the inside of the second air spring with the compressed air source or the atmosphere, or blocks both of them. A valve,
A pressure sensor for detecting the pressure in the second air spring;
The second electropneumatic conversion receives a signal indicating the detected pressure from the pressure sensor and causes a pressure fluctuation in the second air spring to cancel the difference between the preset pressure input in advance and the detected pressure. A pressure control unit that generates a pressure control drive signal for activating the control valve; the pressure control drive signal is input to the second electropneumatic conversion control valve; and pressure oscillations in the second air spring A second arithmetic controller that suppresses
The second electropneumatic conversion control valve has a second load port communicating with the second air spring, a second supply port communicating with the compressed air source, and a second exhaust port opened to the atmosphere. A second housing, and a plurality of second valve bodies for opening and closing the second load port, the second supply port, and the second exhaust port, respectively, in the second housing A non-contact spool that is capable of advancing and retreating, and has a second drive unit that generates a linear drive force in the second housing in response to an input signal from the second arithmetic controller. An active vibration control device comprising a spool valve including a second spool provided in the section .

A hydrostatic bearing for guiding and passing the compressed air from the first supply port is formed in at least one outer peripheral land portion of the plurality of first valve bodies of the first aeroelectric conversion control valve. And
A hydrostatic bearing for guiding and passing the compressed air from the second supply port is formed in at least one outer peripheral land portion of the plurality of second valve bodies of the second aeroelectric conversion control valve. The active vibration control device according to claim 1, wherein

Three first active vibration control devices, one at three locations between the mass body and the side installation portion, with different support directions, and the mass body and the side installation At least one second active vibration control device with a support direction different from the above three units at least at one point different from the above three points between the unit and at least four of the above active vibration control device by applying a force in the same plane in the mass, the resultant force is zero, and by these forces Ri Ah at moments even zero occurring on the mass body,
The first active vibration control device includes:
A first air spring interposed between the mass body and the installation portion and supporting the mass body;
A first electropneumatic conversion control valve that is interposed between the first air spring and a compressed air source and communicates the inside of the first air spring with the compressed air source or the atmosphere, or shuts off the both. When,
A vibration sensor for detecting a vibration state of the mass body;
A displacement sensor for detecting a displacement state of the mass body from the installation portion;
For vibration control that operates the first electropneumatic conversion control valve to receive a signal indicating the vibration state detected from the vibration sensor and cause a pressure fluctuation in the first air spring to cancel the vibration. A vibration control unit that generates a drive signal and a pressure fluctuation that cancels a difference between a target position of the mass body that is input in advance and a displacement state indicated by a signal from the displacement sensor are generated in the first air spring. And a position control unit that generates a position control drive signal for operating the first electropneumatic conversion control valve, and the drive signal obtained by adding the signals generated by both the control units is the first control signal. A first arithmetic controller that inputs to the electropneumatic conversion control valve of 1 and suppresses displacement and vibration of the mass body;
The first electropneumatic conversion control valve has a first load port communicating with the first air spring, a first supply port communicating with the compressed air source, and a first exhaust port opened to the atmosphere. A first housing and a plurality of first valve bodies for opening and closing the first load port, the first supply port, and the first exhaust port, respectively; A non-contact spool that is capable of advancing and retreating, and a first driving unit that generates a linear driving force in the first housing in response to an input signal from the first arithmetic controller is one end. A spool valve provided with a first spool provided in the section,
The second active vibration control device includes:
A second air spring interposed between the mass body and the installation portion and supporting the mass body;
Second electro-pneumatic conversion control that is interposed between the second air spring and the compressed air source, and communicates the inside of the second air spring with the compressed air source or the atmosphere, or blocks both of them. A valve,
A pressure sensor for detecting the pressure in the second air spring;
The second electropneumatic conversion receives a signal indicating the detected pressure from the pressure sensor and causes a pressure fluctuation in the second air spring to cancel the difference between the preset pressure input in advance and the detected pressure. A pressure control unit that generates a pressure control drive signal for activating the control valve; the pressure control drive signal is input to the second electropneumatic conversion control valve; and pressure oscillations in the second air spring A second arithmetic controller that suppresses
The second electropneumatic conversion control valve has a second load port communicating with the second air spring, a second supply port communicating with the compressed air source, and a second exhaust port opened to the atmosphere. A second housing, and a plurality of second valve bodies for opening and closing the second load port, the second supply port, and the second exhaust port, respectively, in the second housing A non-contact spool that is capable of advancing and retreating, and has a second drive unit that generates a linear drive force in the second housing in response to an input signal from the second arithmetic controller. An active vibration control system comprising a spool valve including a second spool provided in the section .

A hydrostatic bearing for guiding and passing the compressed air from the first supply port is formed in at least one outer peripheral land portion of the plurality of first valve bodies of the first aeroelectric conversion control valve. And
A hydrostatic bearing for guiding and passing the compressed air from the second supply port is formed in at least one outer peripheral land portion of the plurality of second valve bodies of the second aeroelectric conversion control valve. The active vibration control device according to claim 3, wherein the active vibration control device is provided.