KR102272523B9 - 세라믹 히터의 제조 방법 - Google Patents

세라믹 히터의 제조 방법

Info

Publication number
KR102272523B9
KR102272523B9 KR1020170068337A KR20170068337A KR102272523B9 KR 102272523 B9 KR102272523 B9 KR 102272523B9 KR 1020170068337 A KR1020170068337 A KR 1020170068337A KR 20170068337 A KR20170068337 A KR 20170068337A KR 102272523 B9 KR102272523 B9 KR 102272523B9
Authority
KR
South Korea
Prior art keywords
ceramic heater
manufacturing ceramic
manufacturing
heater
ceramic
Prior art date
Application number
KR1020170068337A
Other languages
English (en)
Other versions
KR102272523B1 (ko
KR20180131793A (ko
Inventor
채제호
박명하
Original Assignee
주식회사 미코세라믹스
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by 주식회사 미코세라믹스 filed Critical 주식회사 미코세라믹스
Priority to KR1020170068337A priority Critical patent/KR102272523B1/ko
Priority to PCT/KR2018/005250 priority patent/WO2018221868A1/ko
Priority to TW107115714A priority patent/TWI786112B/zh
Publication of KR20180131793A publication Critical patent/KR20180131793A/ko
Application granted granted Critical
Publication of KR102272523B1 publication Critical patent/KR102272523B1/ko
Publication of KR102272523B9 publication Critical patent/KR102272523B9/ko

Links

Classifications

    • H—ELECTRICITY
    • H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05B—ELECTRIC HEATING; ELECTRIC LIGHT SOURCES NOT OTHERWISE PROVIDED FOR; CIRCUIT ARRANGEMENTS FOR ELECTRIC LIGHT SOURCES, IN GENERAL
    • H05B3/00—Ohmic-resistance heating
    • H05B3/10—Heating elements characterised by the composition or nature of the materials or by the arrangement of the conductor
    • H05B3/18—Heating elements characterised by the composition or nature of the materials or by the arrangement of the conductor the conductor being embedded in an insulating material
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B32—LAYERED PRODUCTS
    • B32B—LAYERED PRODUCTS, i.e. PRODUCTS BUILT-UP OF STRATA OF FLAT OR NON-FLAT, e.g. CELLULAR OR HONEYCOMB, FORM
    • B32B18/00—Layered products essentially comprising ceramics, e.g. refractory products
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/67005—Apparatus not specifically provided for elsewhere
    • H01L21/67011—Apparatus for manufacture or treatment
    • H01L21/67098—Apparatus for thermal treatment
    • H01L21/67103—Apparatus for thermal treatment mainly by conduction
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B32—LAYERED PRODUCTS
    • B32B—LAYERED PRODUCTS, i.e. PRODUCTS BUILT-UP OF STRATA OF FLAT OR NON-FLAT, e.g. CELLULAR OR HONEYCOMB, FORM
    • B32B2250/00—Layers arrangement
    • B32B2250/40—Symmetrical or sandwich layers, e.g. ABA, ABCBA, ABCCBA
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B32—LAYERED PRODUCTS
    • B32B—LAYERED PRODUCTS, i.e. PRODUCTS BUILT-UP OF STRATA OF FLAT OR NON-FLAT, e.g. CELLULAR OR HONEYCOMB, FORM
    • B32B2305/00—Condition, form or state of the layers or laminate
    • B32B2305/34—Inserts
    • B32B2305/345—Heating elements
    • H—ELECTRICITY
    • H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05B—ELECTRIC HEATING; ELECTRIC LIGHT SOURCES NOT OTHERWISE PROVIDED FOR; CIRCUIT ARRANGEMENTS FOR ELECTRIC LIGHT SOURCES, IN GENERAL
    • H05B2203/00—Aspects relating to Ohmic resistive heating covered by group H05B3/00
    • H05B2203/017—Manufacturing methods or apparatus for heaters

Landscapes

  • Engineering & Computer Science (AREA)
  • Physics & Mathematics (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • General Physics & Mathematics (AREA)
  • Manufacturing & Machinery (AREA)
  • Computer Hardware Design (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Power Engineering (AREA)
  • Chemical & Material Sciences (AREA)
  • Ceramic Engineering (AREA)
  • Resistance Heating (AREA)
  • Surface Heating Bodies (AREA)
KR1020170068337A 2017-06-01 2017-06-01 세라믹 히터의 제조 방법 KR102272523B1 (ko)

Priority Applications (3)

Application Number Priority Date Filing Date Title
KR1020170068337A KR102272523B1 (ko) 2017-06-01 2017-06-01 세라믹 히터의 제조 방법
PCT/KR2018/005250 WO2018221868A1 (ko) 2017-06-01 2018-05-08 세라믹 히터의 제조 방법
TW107115714A TWI786112B (zh) 2017-06-01 2018-05-09 陶瓷加熱器及其製造方法

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
KR1020170068337A KR102272523B1 (ko) 2017-06-01 2017-06-01 세라믹 히터의 제조 방법

Publications (3)

Publication Number Publication Date
KR20180131793A KR20180131793A (ko) 2018-12-11
KR102272523B1 KR102272523B1 (ko) 2021-07-05
KR102272523B9 true KR102272523B9 (ko) 2021-11-12

Family

ID=64455497

Family Applications (1)

Application Number Title Priority Date Filing Date
KR1020170068337A KR102272523B1 (ko) 2017-06-01 2017-06-01 세라믹 히터의 제조 방법

Country Status (3)

Country Link
KR (1) KR102272523B1 (ko)
TW (1) TWI786112B (ko)
WO (1) WO2018221868A1 (ko)

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN112054114B (zh) * 2020-09-17 2022-07-08 中科传感技术(青岛)研究院 一种用于压电陶瓷片的烧结方式

Family Cites Families (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP3981482B2 (ja) * 1998-12-25 2007-09-26 日本特殊陶業株式会社 窒化珪素質焼結体の製造方法及びセラミックヒータの製造方法
JP3888531B2 (ja) * 2002-03-27 2007-03-07 日本碍子株式会社 セラミックヒーター、セラミックヒーターの製造方法、および金属部材の埋設品
TWI247551B (en) * 2003-08-12 2006-01-11 Ngk Insulators Ltd Method of manufacturing electrical resistance heating element
KR101525634B1 (ko) * 2009-03-30 2015-06-03 엔지케이 인슐레이터 엘티디 세라믹 히터 및 그 제조 방법
JP5341049B2 (ja) * 2010-10-29 2013-11-13 日本発條株式会社 セラミックス焼結体の製造方法、セラミックス焼結体およびセラミックスヒータ
KR102020682B1 (ko) * 2013-05-09 2019-09-11 주식회사 미코 세라믹 히터 및 이를 제조하는 방법
KR101963521B1 (ko) * 2014-09-16 2019-03-28 엔지케이 인슐레이터 엘티디 세라믹 구조체, 기판 유지 장치용 부재 및 세라믹 구조체의 제법

Also Published As

Publication number Publication date
TW201904351A (zh) 2019-01-16
KR102272523B1 (ko) 2021-07-05
WO2018221868A1 (ko) 2018-12-06
KR20180131793A (ko) 2018-12-11
TWI786112B (zh) 2022-12-11

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Legal Events

Date Code Title Description
A201 Request for examination
N231 Notification of change of applicant
E902 Notification of reason for refusal
E701 Decision to grant or registration of patent right
GRNT Written decision to grant
G170 Re-publication after modification of scope of protection [patent]