KR102251152B1 - Carrier device for film formation coating of LCD glass - Google Patents

Abstract

Disclosed is a carrier device for a film formation coating of LCD glass. According to an embodiment, the present invention comprises: a loading rack where a plurality of frames are connected to have a plate shape and having a plurality of supporters mounted on a front surface thereof to uniformly support the glass; a clamp operation unit mounted in the outside of the loading rack and coming in contact with a surface of the glass to perform driving force and be spaced to be released. The clamp operation unit comprises: a body having a horizontal unit horizontally formed and having a first rail in a horizontal direction, a vertical unit vertically connected to one end of the horizontal unit, and a support unit connected to an upper end part of the vertical unit to be horizontally formed; a forward and backward driving unit having a forward and backward cylinder coupled to the first rail of the horizontal unit of the body to be slid, a first cylinder rod coupled to the forward and backward cylinder to be horizontally withdrawn or introduced by hydraulic pressure, enabling an end part of the first cylinder rod to be coupled to a first bolt shaft mounted in a lower end part of the vertical unit of the body, and enabling the forward and backward cylinder to be moved forward and backward by appearing and disappearing operation of the first cylinder rod; and a hook driving unit mounted in a body of the forward and backward driving unit, having a clamp hook unit hinged and coupled to be horizontally or vertically rotated, and a torsion spring coupled to a rotational shaft of the clamp hook to perform rotational force.

Description

Carrier device for film formation coating of LCD glass

Disclosed content relates to a carrier device for film formation coating of LCD glass to prevent damage and vibration of the glass in order to be transferred to the film formation process of the glass.

Unless otherwise indicated herein, the content described in this section is not prior art to the claims of this application, and inclusion in this section is not admitted to be prior art.

During the LCD or OLED manufacturing process, film formation is possible only when the entire surface of the glass is exposed to the SPUTTER equipment.

In order to supply large-sized glass (GLASS) so that both sides are visible, a carrier (CARRIER) is used that carries one glass at a time.

When glass is supplied to the carrier by attaching a leaf spring to the robot, it is fixed by pressing it with a leaf spring, and then transferred to the inside of the equipment after completing the film formation (deposition) work, and when it is transferred again, the glass is taken out by the robot.

In order to supply the glass to the carrier, a space in which the glass can be supplied is secured only when one part of the leaf spring fixed to the carrier is opened using a cylinder.

At this time, if the strength of the spring pressing the plate-shaped glass is weak, the glass may be damaged due to vibrations (shake, etc.) generated while the carrier is moving.

Also, if the strength is too high, the glass may be damaged or cracked due to its own impact.

Glass is mainly damaged due to impact or clearance (shake), but if it is fixed with a toggle clamp unit, vibration is prevented, and urethane is used in the contact part of the glass to prevent slipping by suppressing the occurrence of damage.

Korean Patent Application No. 10-2010-0092843

The disclosed content is to provide a carrier device for film formation coating of LCD glass that can be fixed to prevent damage and vibration of the glass to be transferred to the glass film formation process, and that the release operation can be accurately performed after the process is completed. There is this.

An object of the embodiment, a plurality of frames are connected to be made in the form of a plate, a plurality of supporters are mounted on the front of the carrier to support the glass evenly; Includes; a clamp operation unit mounted on the outside of the carrier and being in contact with the surface of the glass to exert a fixing force or to be released by being spaced apart, and the clamp operation unit is formed horizontally and a horizontal portion having a first rail horizontally formed on the outer surface A body having a vertical portion vertically connected to one end of the horizontal portion and a support portion horizontally formed by connecting to an upper end of the vertical portion; A forward and backward cylinder coupled to the first rail of the horizontal portion of the body and coupled to slide, and a first cylinder rod coupled to the forward and backward cylinder and horizontally drawn out or drawn in by hydraulic pressure are provided, and the end of the first cylinder rod A forward and backward driving unit coupled to the first bolt shaft mounted on the lower end of the vertical part of the body and moving the forward and backward cylinder in the forward and backward direction by the protruding and disengaging operation of the first cylinder rod; A film-forming coating of an LCD glass including a clamp hook mounted on the body of the forward/reverse driving unit, hinged to rotate horizontally or vertically, and a torsion spring coupled to a rotation axis of the clamp hook to exert a rotational force. Can be achieved by means of a carrier device.

According to an embodiment, a fixing member consisting of a horizontal bar mounted on a frame of a carrier and a vertical bar formed perpendicular to the end of the horizontal bar; A lifting cylinder mounted on a vertical bar of the fixing member, and a second cylinder rod coupled to the lifting cylinder and movable, and the cylinder rod is connected to a second bolt shaft mounted on a support portion of the body; Can include.

According to an embodiment, a guide rail is formed on the side of the vertical bar, a rail protrusion coupled with the guide rail is formed on the inner surface of the support part of the body, and the rail protrusion is coupled to the guide rail to guide the lifting operation of the body. do.

According to an embodiment, an up-down detection sensor unit comprising a height sensing bar protruding from the support portion of the body, and a sensor unit formed on a vertical bar of the fixing member and having a plurality of sensor contacts to which the height sensing bar is in contact with each other in a longitudinal direction. It is done.

According to an embodiment, a horizontal part of the body includes a forward/reverse movement detection unit for sensing length movement, and the forward/reverse movement detection unit includes a first sensor and a second sensor spaced apart from each other at a predetermined interval, and The first sensor or the second sensor and a sensing bar to be sensed are formed.

According to the disclosed embodiment, it is possible to fix the glass to prevent damage and vibration in order to transfer to the film forming process, and there is an effect that the releasing operation can be accurately performed after the process is finished.

1 is a perspective view showing a carrier device for film forming and coating of an LCD glass according to an embodiment;
Figure 2 is an enlarged view for showing the'support member' in Figure 1,
3 is an enlarged view for showing the'clamp operation unit' in FIG. 1,
4A is a perspective view of a'clamp operation unit' according to an embodiment;
4B is a perspective view of a'clamp operation unit' according to the embodiment as viewed from a different direction;
4C is an enlarged perspective view of a part of a'clamp operation unit' according to an embodiment;
5 is a front view of a'clamp operation unit' according to an embodiment;
6 is a side view of a'clamp unit' according to an embodiment;
7A, 7B, and 7C are views sequentially showing the releasing operation of the'clamp operation unit' according to the embodiment;
8A, 8B, and 8C are views sequentially showing the locking operation of the'clamp operation unit' according to the embodiment.

Hereinafter, preferred embodiments will be described in detail based on the accompanying drawings.

The embodiments to be described below are intended to be described in detail enough to allow those of ordinary skill in the art to carry out the invention easily, thereby limiting the technical spirit and scope of the present invention. I don't mean it.

In addition, the size or shape of the constituent elements shown in the drawings may be exaggerated for clarity and convenience of description, and terms specially defined in consideration of the configuration and operation of the present invention vary according to the intention or custom of users and operators. It should be noted that, and definitions for these terms should be made based on the contents throughout the present specification.

In the accompanying drawings, FIG. 1 is a perspective view showing a carrier device for film forming and coating of an LCD glass according to an embodiment, FIG. 2 is an enlarged view showing the'support member' in FIG. 1, and FIG. An enlarged view to show the'clamp operation unit', Fig. 4a is a perspective view of the'clamp operation unit' according to the embodiment, Fig. 4b is a perspective view of the'clamp operation unit' according to the embodiment from a different direction, and Fig. 4c is an implementation An enlarged perspective view of a part of the'clamp operation unit' according to an example, FIG. 5 is a front view of the'clamp operation unit' according to an embodiment, and FIG. 6 is a side view of the'clamp unit' according to the embodiment, and FIG. 7a 7B and 7C are views sequentially showing the unlocking operation of the'clamp operation unit' according to the embodiment, and FIGS. 8A, 8B, and 8C are sequentially showing the locking operation of the'clamp operation unit' according to the embodiment. It is a drawing.

As shown in FIGS. 1 and 2, the carrier device for film formation and coating of an LCD glass according to an embodiment is formed in a plate shape by connecting a plurality of frames 110, and a plurality of supporters are mounted on the front surface of the glass. A carrier 100 for evenly supporting G), and a clamp operation unit 300 mounted on the outside of the carrier 100 and in contact with the surface of the glass G to exert a fixing force or to be released by being spaced apart; Includes.

The carrier 100 is formed in a grid shape by connecting a plurality of frames 110 in the horizontal and vertical directions, and has a flat plate shape and a square shape at the front portion.

Each of the support members 120 supporting the outer circumferential surface of the glass (G) is mounted on the four sides of the carrier (100).

The support member 120 is connected to a cylinder 122 attached to the frame 110, a rod 123 that is connected to the cylinder 122 to be drawn out and inserted, and the rod 123, and the tip is connected to the glass (G). It consists of a contact portion 124 to be in contact.

The contact portion 124 has an elastic roller formed at an end thereof to exert a support force by contacting the glass G, but to prevent damage.

Accordingly, the rod 123 is pulled out and pulled in by the air pressure supplied to the cylinder 122, and interlocked therewith, the contact portion 124 moves in the front and rear direction, thereby performing a contact or separation operation with the glass G.

Meanwhile, a plurality of clamps 500 are mounted on the carrier 100 to allow opening and closing.

The clamp 500 is hinge-coupled to the frame 110 at one end, and operates to be folded in a horizontal state or unfolded in a vertical state while having an elastic force.

When the clamp 500 is opened in a vertical state, the glass G may be inserted (see FIG. 7B).

After the glass (G) is inserted, each clamp (500) is folded in a horizontal state to be closed, so that the glass (G) is evenly supported and in a fixed state, so that the glass (G) is mounted on the carrier (100). ) In the process of transporting, there is a gap between the clamp 500 and the glass G, so that shaking or slipping does not occur.

The clamp 500 is attached to the outer surface of the carrier 100 and hinge shafts 552 and 551 are provided at the upper and lower portions respectively,

A first arm 510 hinged to the lower hinge shaft 551 and rotated and having a pressure support 512 formed at one end thereof,

A link 520 that is hinged and rotated at one end to the upper hinge shaft 552,

The intermediate portion is hinged to the other end of the link 520 with a first pin 541, and one end is hinged with the first arm 510 and the second pin 542, and a third pin ( And a second arm 540 on which 543 is formed.

7A to 7C, when the second arm 540 is pulled downward while the third pin 543 is caught on the clamp hook 352, the second arm 540 is rotated downward and the second arm 540 is rotated downward. Using the first pin 541 as a rotation point, the second pin 542 and the first arm 510 rotate upward so that the thumbstick 512 is separated from the glass G.

On the contrary, as shown in FIGS. 8A to 8C, when the clamp hook 352 is separated from the third pin 543, the first arm 510 is rotated by the restoring force, so that the thumb rod 512 is made into the glass (G). ) Is supported and pressurized.

Meanwhile, the opening and closing operation of the clamp 500 may be performed by the clamp operation unit 300.

The clamp operation unit 300 will be described with reference to FIGS. 3 to 5.

The clamp operation unit 300 includes a body 320 mounted on the carrier 100, a forward and backward driving unit 340, and a hook driving unit 350.

The body 320 is assembled by arranging two metal plates of the same shape in parallel, and attaching the metal plates on both sides through a horizontal connection plate 323 or a vertical connection plate 325 therebetween.

That is, each metal plate constituting the body 320,

A horizontal portion 322 formed horizontally and having a first rail 327 horizontally formed on the outer surface, a vertical portion 324 connected vertically to one end of the horizontal portion 322, and an upper end of the vertical portion 324 It consists of including a support portion 326 formed horizontally connected to.

A horizontal connection plate 323 is interposed and attached to the horizontal portion 322 of each metal plate, and a vertical connection plate 325 is interposed and attached to the vertical portion 324.

The forward/reverse drive unit 340 includes a forward/reverse cylinder 341 and a first cylinder rod 341-2 coupled to the forward/reverse cylinder 341 and drawn in and out.

The forward and backward cylinder 341 is coupled to the first rail 327 of the horizontal portion 322 of the body 320 so as to be slid. The bracket 342 to which the forward and backward cylinder 341 is attached is inserted into the inner lower part of the body 320, the rail member 343 is formed in the bracket 342, and the rail member 343 is the first rail 327 ) And the bracket 342 may be moved while sliding in the horizontal direction by driving of the forward and backward cylinder 341.

The bracket 342 has a'┌' shape, and the rail member 343 is formed on the upper surface, and the clamp hook 352 is hingedly mounted on the front surface.

A first cylinder rod 341-2 coupled to the forward and backward cylinder 341 and horizontally drawn out or drawn in by hydraulic pressure is provided.

The end of the first cylinder rod 341-2 is coupled to the first bolt shaft 31 mounted on the lower end of the vertical portion 324 of the body 320.

Therefore, when hydraulic pressure is supplied to the forward and backward cylinder 341, the forward and backward cylinder 341 can be moved forward and backward by the protruding operation of the first cylinder rod 341-2, and is attached to the forward and backward cylinder 341. The bracket 342 and the clamp hook 352 attached thereto may be moved back and forth.

The horizontal part 322 of the body 320 is formed with a forward/reverse movement detection unit 370 for sensing length movement.

The first sensor 371 and the second sensor 372 are disposed in the forward/reverse movement detection unit 370 to be spaced apart at predetermined intervals.

The first sensor 371 or the second sensor 372 and a sensing bar 373 to be sensed are formed on the bracket 342.

The first sensor 371 detects the end point of the forward state of the bracket 342, and the second sensor 372 senses the end point of the backward state.

As shown in Fig. 4c, the hook driving unit 350 is mounted on the body 320 of the forward and backward driving unit 340, a clamp hook 352 hinged to rotate horizontally or vertically, and the clamp It is composed of a torsion spring 354 that is coupled to the rotation shaft 356 of the hook 352 to exert a rotational force.

The clamp hook 352 may be fixed by being hooked onto the third pin 543 of the second arm 540 by forming a hook.

Therefore, as the clamp hook 352 of the hook driving unit 350 descends, the second arm 540 is rotated while the hook 351 is hooked on the third pin 543, and the first arm 510 is interlocked therewith. ) Is rotated so that the release operation is performed.

On the other hand, the clamp operation unit 300 is formed with an elevation driving unit 360 so as to simultaneously elevate the body 320 and the forward/reverse driving unit 340.

As shown in FIG. 4A, the elevating driver 360 is coupled to the fixing member 600.

The fixing member 600 has a'┐' shape, and a horizontal bar 610 mounted on the frame 110 of the carrier 100 and a vertical formed perpendicular to the end of the horizontal bar 610 It consists of a bar (620).

The second cylinder rod 363 of the elevating driving unit 360 is pulled out and pulled in, thereby performing an operation of raising or lowering the body 320.

The elevating driving unit 360 includes an elevating cylinder 362 mounted on the vertical bar 620 of the fixing member 600, and a second cylinder rod 363 coupled to the elevating cylinder 362 to appear and move, The second cylinder rod 363 is connected to the second bolt shaft 32 mounted on the support part 326 of the body 320.

Preferably, a guide rail 624 is formed on the side of the vertical bar 620, and the vertical connection plate 325 attached to the inner surface of the support part 326 of the body 320 is coupled to the guide rail 624. Rail protrusion 626 is formed.

Accordingly, the rail protrusion 626 is coupled to the guide rail 624, and the lifting operation of the body 320 may be guided while riding the guide rail 624.

It includes an up-down detection sensor unit 700 so as to detect the lifting interval of the body 320.

The up-down detection sensor unit 700 includes a height sensing bar 720 protruding from the support portion 326 of the body 320 and a height sensing bar 720 formed on the vertical bar 620 of the fixing member 600. ) Consists of a plurality of sensor contacts formed in the longitudinal direction of the sensor contact 730.

As the body 320 is elevated, the hook driving unit 350 formed on the front surface thereof may also be elevated.

Accordingly, an operation in which the clamp hook 352 is coupled to or released from the clamp 500 is possible.

The operation of the embodiment configured as described above will be described as follows.

7A to 7C are views showing a release operation of the'clamp operation unit'.

As shown in FIGS. 7A and 7B, when the body 320 moves forward by the operation of the forward and backward cylinder 341, the clamp hook 352 attached to the bracket 342 at the front end moves forward and then the lifting cylinder 362 When the body 320 descends by the operation of, it is coupled to the third pin 543 of the clamp 500.

Thereafter, when the body 320 moves backward by the operation of the forward and backward cylinder 341, the clamp hook 352 pulls the third pin 543 of the clamp 500 so that the second arm 540 rotates, In connection with this, the first arm 510 rotates so that the pressure finger holder 512 is separated from the glass G to become an OPEN state.

Meanwhile, as shown in FIGS. 8A to 8C, the clamp 500 is locked.

As shown in FIG. 8A, while the clamp hook 352 is coupled to the third pin 543, the body 320 starts to move forward by the operation of the forward and backward cylinder 341 again.

As shown in FIG. 8B, when the body 320 continues to advance and the second arm 540 is in a vertical state, the first arm 510 is also rotated in connection with the body 320 so that the thumbstick 512 is attached to the glass G. Since it is supported in contact, it is in a closed state.

Thereafter, the body 320 is raised by the operation of the lifting cylinder 362, and the clamp hook 352 in the separated state starts to rise.

Thereafter, as shown in FIG. 8C, when the body 320 moves backward by the operation of the forward and backward cylinder 341, the clamp hook 352 is separated from its original state and is in a working standby state.

Although it has been described in connection with the preferred embodiment, it will be readily recognized by those skilled in the art that various modifications and variations are possible without departing from the gist and scope of the invention, and all such changes and modifications fall within the scope of the appended claims. Is self-explanatory.

100: carrier 110: frame
G: Glass 300: clamp operating part
120: support member 122: cylinder
124: contact
320: body 340: forward and backward driving unit
350: hook driving unit 352: clamp hook
354: torsion spring 360: lifting drive unit
362: lifting cylinder 363: second cylinder rod
500: clamp 512: pressure paper
510: first arm 520: link
540: second arm 541: first pin
542: second pin 543: third pin
551: lower hinge shaft 552: upper hinge shaft
600: fixing member 610: horizontal bar
620: vertical bar 700: detection sensor unit
720: height sensing bar 730: sensor contact

Claims (7)

A plurality of frames 110 are connected to each other and made in a plate shape, and the carrier 100 for supporting the glass (G);
It is mounted on the carrier 100 and is in contact with the surface of the glass G to exert a fixing force or to be released by being spaced apart, and a plurality of arms having a plurality of hinge portions are hinged to the upper and lower portions to interlock with each other A clamp 500 that rotates the first arm 510 and the second arm 540 included in the first arm 510 and the second arm 540 to be opposed to each other; And
By rotating the second arm 540 of the clamp 500 in the up and down directions, the first arm 510 is rotated in conjunction with the rotation of the second arm 540 to be in close contact with or spaced apart from the glass G. Clamp operation unit 300 for controlling the operation;
A carrier device for film-forming coating of LCD glass, comprising: a. The method of claim 1,
The clamp 500,
It is attached to the outer surface of the carrier 100 and hinge shafts 552 and 551 are provided at the upper and lower portions respectively,
A first arm 510 hingedly coupled to the lower hinge shaft 551 and rotated and having a pressure support 512 formed at one end thereof;
A link 520 that is hinged and rotated at one end to the upper hinge shaft 552;
An intermediate portion is hinged to the other end of the link 520 with a first pin 541, and one end is hinged with a first arm 510 and a second pin 542, and a third pin is at the other end. A second arm 540 on which 543 is formed;
A carrier device for film-forming coating of LCD glass, comprising: a. The method of claim 1,
The clamp operation unit 300,
A horizontal portion 322 formed horizontally and having a first rail 327 horizontally formed on the outer surface, a vertical portion 324 connected vertically to one end of the horizontal portion 322, and an upper end of the vertical portion 324 A body 320 having a support portion 326 formed horizontally in connection with the;
A forward and backward cylinder 341 coupled to the first rail 327 of the horizontal portion 322 of the body 320 so as to be slid, and the forward and backward cylinder 341 are coupled to the forward and backward cylinder 341 and are horizontally drawn out by hydraulic pressure or The first cylinder rod (341-2) that is drawn in,
The end of the first cylinder rod 341-2 is coupled to the first bolt shaft 31 mounted on the lower end of the vertical portion 324 of the body 320, and the first cylinder rod 341-2 appears and protrudes. A forward and backward driving unit 340 for moving the forward and backward cylinder 341 forward and backward by the operation;
It is mounted on the body 320 of the forward and backward driving unit 340, and is coupled to the clamp hook 352 hinged to rotate horizontally or vertically, and the rotation shaft 356 of the clamp hook 352 to exert rotational force. A hook driving unit 350 composed of a torsion spring 354 to be;
A carrier device for film-forming coating of LCD glass, comprising: a. The method of claim 1,
A fixing member 600 consisting of a horizontal bar 610 mounted on the frame 110 of the carrier 100 and a vertical bar 620 formed perpendicular to the end of the horizontal bar 610;
A lifting cylinder 362 mounted on the vertical bar 620 of the fixing member 600, and a second cylinder rod 363 coupled to the lifting cylinder 362 to appear and move, and the second cylinder rod An elevating driving part 360 made by connecting the second bolt shaft 32 mounted on the support part 326 of the body 320;
A carrier device for film-forming coating of LCD glass, comprising: a. The method of claim 4,
A guide rail 624 is formed on the side of the vertical bar 620,
A rail protrusion 626 coupled to the guide rail 624 is formed on the vertical connection plate 325 attached to the inner surface of the support part 326 of the body 320,
A carrier device for film formation coating of LCD glass, characterized in that a rail protrusion 626 is coupled to the guide rail 624 to guide the lifting operation of the body 320. The method of claim 4,
A height sensing bar 720 protruding from the support portion 326 of the body 320 and a sensor contact point formed on the vertical bar 620 of the fixing member 600 to which the height sensing bar 720 contacts ( 730) an up-down detection sensor unit consisting of a plurality of sensor units formed in the longitudinal direction;
A carrier device for film-forming coating of LCD glass, comprising: a. The method of claim 3,
The horizontal portion 322 of the body 320 includes a forward and backward movement detection unit 370 for sensing movement,
The forward and backward movement detection unit 370,
The first sensor 371 and the second sensor 372 are disposed to be spaced apart at a predetermined interval,
A carrier device for film formation coating of LCD glass, characterized in that the first sensor 371 or the second sensor 372 and the sensing bar 373 to be sensed are formed on the upper part of the bracket 342.

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