KR102241104B1 - Polarization alignment inspection apparatus and inspection method thereof - Google Patents

Abstract

The polarization alignment inspection device includes a light source system that uses a light emitter to irradiate a light beam to a beam expander for expansion, and the expanded light beam is irradiated to an inspection object, and the light beam transmitted through the inspection object faces the beam expander. The other side of the object is irradiated with a light detection system, the beam splitter splits the light beam into two light beams, irradiates two light beams with a polarizer for polarization, and the photodetector receives two light beams transmitted through the inspection object. , Converting the two light beams into electric signals, and transmitting the electric signals to the processing module, the processing module detects the angle between the polarized beams by processing the received electric signals, and achieves the purpose of the polarization alignment inspection.

Description

Polarization alignment inspection apparatus and inspection method thereof TECHNICAL FIELD

The present invention relates to a polarization alignment inspection apparatus, and more particularly, to an inspection apparatus capable of measuring multiple points and immediately attaching a polarizer to an inspection object, and the inspection apparatus expands a laser beam using a light source system to the inspection object. Irradiating, irradiating the laser beam to the photodetector system for splitting, irradiating the split light beam to a polarizer to perform electro-optical signal conversion, and the inspection unit can receive an electrical signal for inspection, and the inspection object and the polarizer The purpose of performing polarization alignment for can be achieved.

With the advancement and innovation of technology, many instruments in daily life progress along with the advanced science and technology, and there are many changes. For example, TV programs or movies watched in daily life through images displayed on the screen are changed from 2D images to 3D images, accumulating the viewer's experience in viewing 3D images. With the development of three-dimensional visual effects of 3D images, many companies use 3D images to develop various virtual images, allowing them to experience different atmospheres as if they were on a screen. For example, virtual image technology including VR (virtual reality) technology, AR (augmented reality) technology, MR (mixed reality) technology, and CR (cinematic reality) technology is often applied to various games, television programs, or movies. It has become a technology that has become a technology and provides visual perception of viewing 3D images.

In general, the existence of 3D images is formed by the binocular parallax effect of the viewer. In the binocular parallax effect, the positions and angles of the two eyes are different, so the two eyes see slightly different images, and the other images seen by the two eyes are finally combined in the brain to create a 3D stereoscopic image. Recently, the technology of three-dimensional image screening is classified into three-dimensional technology and automatic three-dimensional technology. Stereoscopic technology requires wearing specially designed glasses, and automatic stereoscopic technology allows you to view 3D images without the need to wear glasses. The stereoscopic 3D image viewing technology includes a type using a color filter grass, a polarization type using a polarizing grass, and an active shutter type using a shutter grass. 6 to 8, the passive polarization grass using the principle of light having various vibration directions (a) and decomposing the original image (b) is shown. First, the image (b) is divided into two images each formed of vertically polarized light (b1) and horizontally polarized light (b2), and the right and left grasses (c1, c2) of the 3D grass (c) are polarized light with different polarization directions. Executed by the grass, the left and right eyes receive two images separately through the right and left grass (c1, c2), and the two images are mixed to form a 3D image (d).

Automatic stereoscopic 3D image screening technology allows viewing of 3D images without specially made glasses. Autostereoscopic display technology, such as lenticular display technology, uses a lens to polarize multiple light beams of display information and guide it to the left and right eyes. The screening of 3D images is limited in position and angle, and thus the viewer's visual position and angle is limited. The stereoscopic 3D image screening technology only uses specially designed grass, but the 3D effect screened through the grass is better and is not easily limited to the visual position and angle, so the stereoscopic 3D image screening technology is mostly adopted by manufacturers. Has become. However, the polarization grass must be inspected and aligned, and adjust the appropriate polarization angle, polarization direction and other factors of the left and right grass, resulting in a better 3D image display effect; Otherwise, in use, the light transmission axis, which is the linear polarization axis of the unaligned polarization axis, is inclined to cause a crosstalk effect, resulting in a defect in which the brightness of the polarizing grass is changed or darkened.

9, a conventional polarization alignment method is shown. As shown in Fig. 9, the monochromatic light beam e is emitted so as to be transmitted through the polarizer f, the quarter-waveform plate g, and the sample h, and is received by the polarization detector i. The polarization detector (i) can measure the polarization of the sample (h), and can quickly measure the phase difference and the optical transmission axis at the same time. Conventional measurement accuracy for polarizer f and sample h reaches up to 0.01°. However, prior to the conventional measurement, the polarizer (f) must be cut and placed on the base measurement fixture, and a computer is used for rotation angle and performance calculations to obtain parameters such as light transmission ratio, and polarization detector (i) Performs the measurement operation using the optical transmission rate and other parameters. However, the above-described conventional measurement operation is complex, and it is only possible to perform a single point measurement on the polarizer (f) and the sample (h), and the operation of attaching the sample (h) to the polarizer (f) in mechanical equipment is not required. It is difficult to perform immediately. As a result, there is a lot of room for improvement of the prior art in practical applications.

Therefore, it is necessary to overcome the conventional problem caused by the complicated operation to obtain the parameters of the polarizer during the line inspection operation, and the conventional problem, which is an important issue in the art, that it is difficult to directly attach the polarizer to the sample during the measurement operation. .

In order to overcome the above conventional problems, the present inventors have developed a polarization alignment inspection apparatus and method according to the collected data, many tests and improvements, and experience in the art. In a polarization alignment inspection apparatus, a laser beam is expanded using a light source system to irradiate an inspection object, and the laser beam transmitted through the inspection object is received by a photodetector system, and the photodetector system divides the received laser beam at various angles. The furnace is divided into light beams, the split light beam is irradiated with a polarizer, the inspection unit can receive the light beam for alignment inspection, and the inspection object and the polarizer can be immediately attached to each other.

As an example of the present invention, the light emitter of the light source system irradiates a light beam to a beam expander for expansion, the expanded light beam is irradiated to an inspection object, and the light beam transmitted through the inspection object is of the inspection object facing the beam expander. The other side is irradiated by the light detection system, the beam splitter of the light detection system splits the light beam into two light beams, and the two light beams are irradiated with a polarizer for polarization, and the photo detector is the two light beams transmitted through the inspection object. It receives light, converts the two light beams into electric signals, transmits the electric signal to the processing module of the inspection unit, detects the angle between the inspection object and the polarization beam of the inspection unit, and achieves the purpose of polarization alignment inspection, Polarization detection is performed and the inspection object and polarizer are attached immediately.

As another example of the present invention, the light emitter of the light source system is a laser beam emitter for irradiating a green laser beam having a wavelength of 532 nm and a power of 20 mw, and the light emitter of the light source system irradiates and passes the laser beam. The beam expander is formed on one side of the light emitter hole, and is formed on the light receiving surface aligned with the light emitter hole, and on the other side, and expands the laser beam to the polarization adjustment unit to increase the inspection area of the inspection object. It has a surface, and the beam expander is a variable beam expander capable of expanding the received light by 2 to 8 times (2x to 8x).

As another example of the present invention, the beam splitter of the optical detection system is formed on one side and a beam receiving surface for receiving a light beam from an inspection object, and a beam formed on the other side and splitting the received light beam into two orthogonal polarized beams. It has a dividing plane, and the dividing angle γ between two orthogonal polarization beams is in the range of 1° (or 1° 20') to 20°; The beam splitter of the photodetection system is made of uncoated quartz, MgF2, αBBO, YVO4 or calcite based material; Beam splitters made of uncoated quartz or MgF2 have an extinction ratio higher than 100,000:1, beam splitters made of αBBO, YVO4 or calcite-based materials have an extinction ratio higher than 1,000,000:1, and beam splitters made of calcite-based materials The wavelength of is in the range of 350 nm to 700 nm, or 650 nm to 1050 nm, and the polarizer of the photodetection system is made of nanoparticle sodium silicate grass.

As another example of the present invention, the processing module of the inspection unit is a DAQ hardware composed of a signal processing circuit, an analog-to-digital converter, a computer bus, and the like.

The polarization alignment inspection apparatus of the present invention and its inspection method use the light beam of the light source system to irradiate the light beam to the beam expander, the light beam is expanded, the expanded light beam is irradiated to the inspection object, and the beam splitter of the light detection system is inspected Receives the light beam transmitted through the object, divides the received light beam into two polarized beams, irradiated with a polarizer, and the photodetector of the inspection unit can receive two light beams transmitted through the polarizer, and two light beams The optical signal is converted into an electrical signal and transmitted to the processing module to calculate the polarization direction and angle between the inspection object and the polarizer, and perform optical alignment, inspection, and attachment of the inspection object and the polarizer. It reduces the occurrence of slope and crosstalk effect. As a result, the stability of the inspection object and the polarizer can be improved in actual application.

1 is a perspective view of a polarization alignment inspection apparatus according to the present invention
2 is a schematic diagram showing a path of a light beam of a polarization alignment inspection apparatus according to the present invention
3 is a waveform diagram of the luminous intensity of the light beam of the present invention
4 is a first flowchart of a polarization alignment inspection method according to the present invention
5 is a second flowchart of a polarization alignment inspection method according to the present invention
6 is a first exploded view of a polarization direction of a light beam of a conventional polarized 3D technology
7 is a second exploded view of a polarization direction of a light beam in a conventional polarized 3D technology
8 is a schematic diagram of an operation for receiving light beams having various polarization directions in a conventional 3D polarization technology
9 is a side view of a conventional polarization alignment method

The following embodiments of the present invention will be described in detail with reference to the accompanying drawings. These figures show specific examples of embodiments of the present invention. This example is thoroughly and completely disclosed and will fully convey the scope of the invention to those skilled in the art. These examples are exemplary implementations and do not limit the scope of the present invention. Modifications to the disclosed embodiments and other embodiments are included within the scope of the claims. These examples are thoroughly and completely disclosed and will fully convey the steps of the present invention to those skilled in the art. With respect to the drawings, the related properties and ratios of components in the drawings may be exaggerated or reduced in size for clarity and convenience. These arbitrary properties are exemplary and not limiting. The same reference numerals are used in the drawings and in the detailed description of the invention for the same or similar parts.

The terms'first','second','third', and the like are used for various elements, but these elements are not limited to these terms. These terms are only used to distinguish one component from another component. Accordingly, the first component described herein may be referred to as the second component without changing the description of the present invention. The term “or” as used herein includes a combination of some and all of the items of one or more related lists.

When one component or layer is referred to as “on”, “linked to”, or “coupled to” another component or layer, “on”, “linked to” another component or layer directly, It may be “coupled to”, or there may be an intermediate component or layer. In contrast, when one component is referred to as “directly on”, “directly connected to”, or “directly bonded to” another component or layer, there is no intermediate component or layer.

Additionally, unless there is a clear description to the contrary, variations such as the words “consist of” and “include” imply the inclusion of the described component, but not the excluding of other components.

1 to 3, a perspective view, a schematic diagram showing a path of a light beam, and a waveform diagram of a luminous intensity of a light beam according to the present invention are shown. As shown in Figs. 1 to 3, the polarization alignment inspection apparatus is composed of a light source system 1, an inspection object 2, a light detection system 3, and an inspection unit 4.

The light source system 1 may be composed of a light emitter 11 and a beam expander 12. The light emitter 11 is located on one side and has a light emitter hole 110 for irradiating and passing a laser beam to the beam expander 12. The beam expander 12 is located on one side and is composed of a light receiving surface 121 that receives the laser beam irradiated from the light emitter 11, and the beam expander 12 is formed from the optical expansion surface 122 located on the other side. The received laser beam can be expanded.

As an embodiment, the inspection object 2 may be a polarizing film for polarizing natural light that has no polarity in general, and generates a polarized beam. The polarized light beam can be applied in the field of image display.

The photodetector system 3 may be composed of a beam splitter 31 and a polarizer 32. The beam splitter 31 is located on one side and the beam receiving surface 311 aligned with the inspection object 2 and the light source system 1, and the beam splitting surface 312 located on the other side and aligned with the polarizer 32. ).

The inspection unit 4 may be composed of two or more photodetectors 41 and a processing module 42 electrically connected to each of the two or more photodetectors 41. Each photodetector 41 may convert the received optical signal into an electrical signal and transmit the electrical signal to the processing module 42. In one embodiment, the processing module 42 may be DAQ hardware, such as an interface card to digitally convert the received analog signal, and facilitates the computer to perform the following compilation tasks. In one embodiment, a DAQ interface card for receiving an electrical signal may be composed of a signal processing circuit, an analog-to-digital converter, a computer bus, and the like, and the software LabView may be driven for electrical signal processing.

In actual application, the inspection object 2 is located on the outside of the optical expansion surface 122 of the beam expander 12 of the light source system 1, and the beam splitter 31 of the light detection system 3 is the inspection object. Located on the outside of (2), the processing module 42 and the photodetector 41 of the inspection unit 4 are located on the other side of the polarizer 32, and the aligned inspection object 2 and the polarizer 32 are By performing an immediate attaching operation and polarization detection, you can visualize or view 3D images.

In one embodiment, the light emitter 11 of the light source system 1 irradiates a laser beam or other kind of light beam, for example, the light emitter 11 is a green light having a wavelength of 532 nm and a power of 20 mW. It may be a laser beam or several types of laser beams. In one embodiment, the beam expander 12 may be a variable beam expander 12, and the received light irradiated from the light receiving surface 121 may be expanded by 2 to 8 times (2x to 8x), and the expansion The resulting laser beam may be expanded to the inspection object 2 through the optical expansion surface 122. The laser beam may be transmitted through the inspection object 2 and may be irradiated to the beam receiving surface 311 of the beam splitter 31 of the optical detection system 3. The beam-receiving surface 311 may receive a light beam with a larger inspection area, and the received light beam may be divided into two orthogonal polarized beams by the beam splitting surface 312. The splitting angle γ between two orthogonal polarization beams may be in the range of 1° (or 1° 20') to 20°. The photodetector 41 of the inspection unit 4 can receive two polarized light beams, and the processing module 42 is the circular polarization of the polarized light beam transmitted through the inspection object 2 and the polarizer 32. You can check the brightness accurately.

The photodetector 41 of the inspection unit 4 can receive two polarized beams from the inspection object 2 and the polarizer 32, and use different “0” signals to the inspection object 2 and the polarizer ( 32) to determine the position of the optical transmission axis. The positioning precision depends on the measured uncertainty of the other signal. When the inspection object 2 rotates with respect to the polarizer 32 at 0° to 360° (β), as shown in FIG. 3, the luminous intensity change has one of the following characteristics.

(A01): When the inspection object 2 and the polarizer 32 rotate with respect to each other by 90°, 180°, 270°, or 360°, the difference in luminous intensity between the two polarized light beams D1 and D2 is maximum. Becomes.

(A02): When the inspection object 2 and the polarizer 32 rotate with respect to each other at 45°, 135°, 225°, or 315°, the two polarized light beams D1 and D2 are shown in FIG. As shown, they have the same intensity at the intersection.

(A03): The differential signal of the luminous intensity of the two polarized light beams D1 and D2 can be used to detect the optical transmission axis of the polarizer 32, and the differential signal is limited as Id=I1-I2.

(A04): When the luminous intensity of the two polarized light beams D1 and D2 has a differential signal of zero at the intersection point, the optical transmission axis of the polarizer 32 may be determined to be 45°.

In one embodiment, the polarizer 32 of the photodetection system 3 is an electronic dictionary, MP3, MP4, AR, VR, smartphone, tablet, digital camera, computer screen, LCD screen or TV screen of 3C products such as It can be applied to display panels or panels of electronic products, instrument panels, and optical lenses. In one embodiment, the polarizer 32 may be nanoparticle sodium silicate grass.

1 to 5, a perspective view showing a path of a light beam, a waveform diagram of a light intensity of a light beam, and first and second flowcharts of a polarization alignment inspection method according to the present invention are shown. As shown in Figs. 1 to 3, in the actual application, the polarization alignment inspection apparatus of the present invention performs optical inspection on the inspection object 2 and the polarizer 32 according to the following steps (A) to (G). The light source system 1, the light detection system 3, and the inspection unit 4 can be used to perform the operation.

In step (A), the light emitter 11 of the light source system 1 irradiates a laser beam to the beam expander 12 through the light emitter hole 110.

In step (B), the beam expander 12 receives the laser beam irradiated from the light emitter 11 on the light receiving surface 121 on one side, expands the received laser beam, and expands the light expansion surface on the other side. The laser beam expanded through (122) is irradiated to the inspection object (2). The laser beam transmitted through the inspection object 2 is irradiated to the beam receiving surface 311 of the beam splitter 31 of the optical detection system 3.

In step (C), the beam splitter 31 of the light detection system 3 splits the laser beam into two laser beams through the beam splitting surface 312 on the other side, and the two laser beams are split into a beam splitter 31 ) Is irradiated to the outside through the beam splitting surface 312 and transmitted through the polarizer 32.

In step (D), the inspection unit 4 uses the photodetector 41 to receive the two laser beams transmitted through the polarizer 32, and converts the optical signal of the received laser beam into an electric signal. .

In step (E), the photodetector 41 transmits an electrical signal to the processing module 42, and the DAQ hardware (such as an interface card) of the processing module 42 can obtain the electrical signal.

In step (F), the DAQ hardware of the processing module 42 of the inspection unit 4 executes the software LabView to process the received electrical signal, and aligns the polarization rotation angle between the inspection object 2 and the polarizer 32. Perform.

In step (G), the inspection object 2 on which polarization alignment is performed is attached to the polarizer 32, and polarization alignment inspection is performed.

In one embodiment, the light emitter 11 applied to the light source system 1 of steps (A) and (B) may be a light emitter 11 for irradiating a laser beam or other type of light beam type, , Preferably, the light emitter 11 may be a green laser beam or various types of laser beams having a wavelength of 532 nm and a power of 20 mw. The light emitter 11 is formed on one side and has a light emitter hole 110 for irradiating and passing the laser beam to the outside, and the beam expander 12 is located on one side and is located on the light emitter 11. It has an aligned light receiving surface 121 and an optical expansion surface 122 located on the other side and for irradiating the expanded laser beam to the inspection object 2, and the laser beam passing through the inspection object 2 is a light detection system ( 3) can be irradiated to the beam receiving surface 311 of the beam splitter 31, the beam receiving surface 311 can receive the light beam into a larger inspection area, and the received light beam is the beam splitting surface 312 It may be divided into two orthogonal polarization beams by, and the dividing angle γ between the two orthogonal polarization beams may be in the range of 1° (or 1° 20') to 20°; The photodetector 41 of the inspection unit 4 can receive two polarized light beams, and the processing module 42 accurately inspects the circular polarization and luminous intensity of the polarized light beam transmitted through the inspection object 2. I can.

In one embodiment, the beam expander 12 of the light source system 1 of step (B) may be a variable beam expander, and the received light may be expanded by 2 to 8 times (2x to 8x).

In step (B), the inspection object 2 of step (C) may be a polarizing film for polarizing natural light that has no polarity in general, and generates a polarized beam. The polarized light beam can be applied in the field of image display. In an embodiment, the polarizer 32 of steps (C) and (D) may be nanoparticle sodium silicate grass.

In the above steps (D), (E) and (F), the photodetector 41 of each inspection unit 4 can convert the received optical signal into an electric signal, and convert the electric signal into the processing module 42 Can be transferred to. In one embodiment, the processing module 42 may be DAQ hardware, such as an interface card to digitally convert the received analog signal, and facilitates the computer to perform the following compilation tasks. An interface card for receiving an electrical signal may be composed of a signal processing circuit, an analog-to-digital converter, a computer bus, or the like. The software LabView can be driven for electrical signal processing. The software LabView can be used for electrical signal processing and can calculate the polarization rotation angle (β) between the inspection object (2) and the polarizer (32), for example 5°, 10°, 15°, 20° or 25°. Thus, the optical alignment inspection is achieved in the inspection object 2 and the polarizer 32 by this. As a result, the inspection object 2 and the polarizer 32 are set to an appropriate polarization direction and angle, and can be immediately attached to each other. In actual application, when the inspection object 2 and the polarizer 32 are aligned and attached to each other to allow the user to view or view 3D images, the inclination of the optical transmission axis and the occurrence of crosstalk effect are reduced, Improves the stability of the device.

The above-described embodiments are only preferred embodiments of the present invention, and the claims of the present invention are not limited thereto. The polarization alignment inspection apparatus of the present invention and its inspection method use the light beam of the light source system 1 to irradiate the light beam to the beam expander 12, the light beam is expanded, and the expanded light beam is irradiated to the inspection object 2 , The beam splitter 31 of the light detection system 3 receives the light beam transmitted through the inspection object 2, divides the received light beam into two polarized beams, and irradiates it with the polarizer 32, and the inspection unit The photodetector 41 of (4) can receive the two light beams transmitted through the polarizer 32, converts the optical signals of the two light beams into electrical signals, and is transmitted to the processing module 42 to be inspected. 2) Calculate the polarization direction and angle between the polarizer 32, and perform optical alignment, inspection, and attaching the inspection object 2 and the polarizer 32 to transmit light from the inspection object 2 and the polarizer 32. It reduces the inclination of the axis and the occurrence of crosstalk effects.

As a result, the stability of the inspection object 2 and the polarizer 32 can be improved in actual application. Various equivalent changes, modifications, and modifications based on the drawings and description of such technical disclosure are considered to be limited by the spirit and scope of the technical disclosure presented in the claims.

The invention disclosed herein is described by means of specific embodiments. However, many modifications, applications, and improvements can be made by those skilled in the art without departing from the spirit and scope of the technical disclosure presented in the claims.

Therefore, an important concept of the present invention is to provide a polarization alignment inspection apparatus and inspection method thereof, and the optical emitter of the light source system expands by irradiating a light beam with a beam expander, and the expanded light beam is irradiated to an inspection object. The light beam transmitted through is irradiated by a beam splitter of a light detection system, and the beam splitter divides the received light beam into two polarized beams and irradiates the two polarized beams with a polarizer. Next, the polarized light beam transmitted through the polarizer is received by the strong detector of the inspection unit, the optical signal of the light beam is converted into an electric signal, and the processing module calculates the polarization direction and angle between the inspection object and the polarizer, and receives light. Depending on the luminous intensity of the resulting light beam, the inspection object and the polarizer are immediately attached and the optical alignment test is performed, thereby reducing the inclination of the optical transmission axis and the occurrence of crosstalk effects. As a result, an appropriate polarization angle for the inspection object and the polarizer is obtained, so that improved stability has reliability. The above examples are preferred embodiments of the present invention, and the scope of the claims of the present invention is not limited to the above embodiments, and various equivalent changes, modifications, and modifications based on the drawings and description of this technical disclosure are in the scope of the claims. It is believed to be limited by the spirit and scope of the presented technical disclosure.

The invention disclosed herein is described by means of specific embodiments. However, many modifications, applications, and improvements can be made by those skilled in the art without departing from the spirit and scope of the technical disclosure presented in the claims.

1: light source system 2: inspection object
3: light detection system 4: inspection unit
11: light emitter 12: beam expander
32: polarizer 41: photodetector
42: processing module 110: optical emitter hole
121: light receiving surface 122: optical expansion surface
311: beam receiving surface 312: beam splitting surface

Claims (4)

A light source system comprising a light emitter for irradiating a light beam, and a beam expander for receiving the light beam and expanding the received light beam into an inspection object,
Consisting of a beam splitter that receives the light beam transmitted through the inspection object and divides the received light beam into two light beams, and a polarizer that polarizes two light beams from the beam splitter, the other of the inspection object facing the light source system A light detection system located on the side, and
Two or more photodetectors for receiving each of the two light beams polarized by the polarizer and converting the two light beams into an electric signal, and an electric signal that is electrically connected to the photodetector and received to detect an angle between the polarized light beams. The inspection unit is composed of a processing module that processes, and is located on the other side of the polarizer facing the light source system.
Consists of,
The beam splitter has a beam receiving surface formed on one side and for receiving light beams from an inspection object, and a beam splitting surface formed on the other side and dividing the received light beam into two orthogonal polarized beams, and two orthogonal polarized beams The dividing angle (γ) between is within the range of 1° to 20°,
The light emitter of the light source system is a laser beam emitter for irradiating a green laser beam having a wavelength of 532 nm and a power of 20 mw,
The light source system is formed on one side of the light emitter and has a light emitter hole for irradiating and passing the laser beam, and the beam expander is formed on one side and formed on the light receiving surface aligned with the light emitter hole, and the other side. It has an optical expansion surface that expands the laser beam to the polarization adjustment unit to increase the inspection area of the inspection object,
The beam expander is a variable beam expander capable of expanding the received light by 2 to 8 times (2x to 8x), and the inspection object is a polarizing film,
The beam splitter of the photodetector system is made of uncoated quartz, MgF2, αBBO, YVO4 or calcite based material,
Beam splitters made of uncoated quartz or MgF2 have an extinction ratio higher than 100,000:1, beam splitters made of αBBO, YVO4 or calcite-based materials have an extinction ratio higher than 1,000,000:1, and beam splitters made of calcite-based materials The wavelength of is in the range of 350 nm to 700 nm, or 650 nm to 1050 nm,
The polarizer of the photodetection system is made of nanoparticle sodium silicate grass,
The processing module of the inspection unit is an interface card of DAQ hardware comprising a signal processing circuit, an analog-to-digital converter, and a computer bus.
delete As a polarization alignment inspection method using a light source system, a light detection system, and an inspection unit to inspect an inspection object,
(A): A light emitter of the light source system irradiates a light beam with a beam expander,
(B): the beam expander receives and expands the light beam, and irradiates the expanded light beam to an inspection object and a light detection system;
(C): The beam splitter of the light detection system divides the light beam received from the inspection object into two light beams, transmits the two light beams through a polarizer, and the beam splitter receives the light beam from the inspection object. , Having a beam splitting surface formed on the other side and dividing the received light beam into two orthogonal polarized beams, and a splitting angle (γ) between the two orthogonal polarized beams is within a range of 1° to 20°;
(D): receiving two light beams transmitted through a polarizer using two or more photodetectors of an inspection unit, respectively, and converting an optical signal of the two light beams into an electric signal;
(E): a photodetector transmitting the electrical signal to a processing module;
(F): the processing module of the inspection unit processes the received electrical signal, and obtains a polarization rotation angle between the inspection object and the polarizer; And
(G): A step in which the inspection object is attached to the polarizer, polarization alignment is performed, and polarization alignment inspection is completed.
Consists of,
In the step (A), the light emitter 11 of the light source system 1 is a laser beam for irradiating a green laser beam with a wavelength of 532 nm and power of 20 mw, and the beam expander is located on one side and the light emitter hole Has a light-receiving surface aligned to and a light-expansion surface positioned on the other side and expands the laser beam to the polarization control unit, and increases the inspection area of the inspection object;
The beam expander of the light source system of the step (B) is a variable beam expander, and the received light can be expanded by 2 to 8 times (2x to 8x);
The beam expander of steps (B) and (C) receives the light beam and irradiates the enlarged light beam with an inspection object, a light detection system, and a polarizer, and transmits the light beam through an inspection object, a light detection system, and a polarizer. To form;
The test object is a polarizing film and the polarizer is a nanoparticle sodium silicate grass;
In the photodetection system of step (C), the beam splitter is made of uncoated quartz, MgF2, αBBO, YVO4 or calcite-based material, and the beam splitter made of uncoated quartz or MgF2 has an extinction ratio higher than 100,000:1. And a beam splitter made of αBBO, YVO4 or calcite based material has an extinction ratio higher than 1,000,000:1;
The polarizer of the photo-detection system is made of nanoparticle sodium silicate grass;
The processing module of the inspection unit is an interface card of DAQ hardware comprising a signal processing circuit, an analog-to-digital converter, and a computer bus.
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