CN211122503U - Wide-range imaging type birefringence distribution measuring device - Google Patents
Wide-range imaging type birefringence distribution measuring device Download PDFInfo
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- CN211122503U CN211122503U CN201922141866.5U CN201922141866U CN211122503U CN 211122503 U CN211122503 U CN 211122503U CN 201922141866 U CN201922141866 U CN 201922141866U CN 211122503 U CN211122503 U CN 211122503U
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Abstract
The utility model discloses a wide range formation of image formula birefringence distribution measuring device, this measuring device includes: the light source module receives the signals of the control and data processing module, selects and outputs light beams with wavelengths used for measurement, and transmits and illuminates the measured material sample; the imaging lens group projects the emergent light beam of the tested material sample onto the photoelectric detector; the variable polarization state generator is positioned in the light paths at two sides of the tested material sample, changes the polarization state of the light beam according to the electric signal input by the control and data processing module, and provides polarization, polarization detection or phase delay for the light beam; and the photoelectric detector converts the acquired light intensity distribution into an electric signal and outputs the electric signal to the control and data processing module for operation, and finally, a measured object birefringence distribution result is presented. The utility model provides a measuring speed that current birefringence distribution measurement technique exists slow relatively, the limited problem of phase delay volume range.
Description
Technical Field
The utility model relates to an optical detection field, in particular to a device for measuring double refraction distribution of transparent medium.
Background
The phenomenon that light is decomposed into linearly polarized light with two vibration planes perpendicular to each other when passing through an anisotropic transparent medium is called birefringence, and birefringence distribution parameters refer to the phase retardation amount and the azimuth angle θ of a measured material. Birefringence characteristics are widely present in natural mineral crystals and in synthetic materials such as mechanically stressed glass, plastics, liquid crystals, and in addition cellular materials such as nucleoproteins, spindles, myofibrils, and the like also have optical anisotropy. Measuring the birefringence properties of materials is useful to help us understand in depth and to make more rational use of optical materials.
The measurement of birefringence distribution is based on the principle of polarization optics, and the birefringence distribution can be qualitatively obtained by the conventional polarization measurement instrument through a polarizing plate polarization-analyzing mode. In recent years, with the development of scientific technology, a plurality of new birefringence distribution measuring methods are proposed, which adopt various phase delay modulation modes, overcome the defects of the traditional method, quantitatively acquire the birefringence distribution of the measured material and have important application prospects. The existing birefringence distribution measurement method mostly adopts a single-wavelength light source and is limited by the periodicity of a trigonometric function in Stokes vector calculation, and the upper limit of the measuring range of birefringence phase delay quantity does not exceed pi; secondly, the detection method obtains the two-dimensional distribution of birefringence in a point-by-point scanning mode, has relatively slow measurement speed, and cannot be applied to large-area sample or pipeline detection.
SUMMERY OF THE UTILITY MODEL
Utility model purpose: for overcoming the defect of above-mentioned prior art, the utility model discloses create and provide a polarization phase modulation method and many times area array survey under the multi-wavelength and realize wide range formation of image formula birefringence distribution measuring optical device, and then under no any mechanical transmission circumstances, realize the birefringence distribution measurement to exceeding pi phase delay sample.
In order to achieve the above purpose, the utility model adopts the following technical scheme: a wide-range imaging birefringence distribution measuring device comprises a light source module, an imaging lens group, a variable polarization state generator, a photoelectric detector and a control and data processing module; the light source module receives signals of the control and data processing module, selects and outputs light beams with wavelengths used for measurement, transmits and illuminates a measured material sample, the imaging lens group projects the emergent light beams passing through the measured material sample to the photoelectric detector, the variable polarization state generator is positioned in light paths on two sides of the measured material sample, changes the polarization state of the light beams according to electric signals input by the control and data processing module, provides polarization, polarization detection or phase delay for the light beams, the photoelectric detector converts collected light intensity distribution into electric signals to be output to the control and data processing module for operation, and finally presents a measured object birefringence distribution result.
Furthermore, the light source module comprises a multi-wavelength light source, a wavelength selection device and a light source lens group, and emergent light beams of the multi-wavelength light source in the light source module are projected to the tested material sample through the wavelength selection device and the light source lens group.
Furthermore, the multi-wavelength light source at least comprises three or more wavelength components with the wavelength interval not less than 10 nanometers; the wavelength selection device is provided with sub-pass bands in not less than three wavelength ranges, the central wavelengths of the sub-pass bands correspond to the wavelength components of the multi-wavelength light sources one by one, and the bandwidth of each sub-pass band is not more than 10 nanometers.
Furthermore, the object image conjugate plane of the light source lens group is respectively the emission end plane of the multi-wavelength light source and the sample plane of the tested material.
Furthermore, the optical path of the imaging lens group is an object space telecentric optical path.
Furthermore, the object-image conjugate surfaces of the imaging lens group are the surface of the sample of the material to be detected and the surface of the target of the photoelectric detector.
Furthermore, the variable polarization state generator comprises a linear polarizer and a liquid crystal variable retarder, the polarization state of the light beam is changed after the light beam sequentially passes through the linear polarizer and the liquid crystal variable retarder, the retardation of the liquid crystal variable retarder can be changed along with the change of an electric signal applied to the liquid crystal variable retarder, and the magnitude of the retardation corresponds to the magnitude of the electric signal one to one.
Furthermore, the number of the variable polarization state generators is at least two, and the light paths on the two sides of the measured material sample respectively comprise at least one variable polarization state generator.
Further, the photodetector is an area array detector.
The measuring method of the wide-range imaging type birefringence distribution measuring device comprises the following steps:
focusing a light source module and an imaging lens group on the surface of a tested material sample, carrying out conversion of the output light wavelength of the light source module through a control and data processing module, simultaneously switching variable polarization state generators in two side light paths of the tested material sample according to the delay amount corresponding to the wavelength, acquiring a light intensity distribution image under the delay amount of each variable polarization state generator by a photoelectric detector, calculating the delay amount and azimuth angle distribution of the acquired image under each wavelength, calculating the total delay amount order by utilizing the fractional part of the delay amount of each wavelength, and finally obtaining the absolute value and the delay azimuth angle of the delay amount distribution.
Compared with the prior art, the utility model provides a wide range formation of image formula birefringence distribution measuring device's beneficial effect includes:
(1) an imaging detection mode is adopted, a liquid crystal variable delay device is combined, and a mechanical transmission device is not arranged in a measurement system, so that the measurement stability is improved, and the measurement speed is increased;
(2) through multi-wavelength delay measurement, the detection of a large-delay material sample with phase delay larger than pi is realized, and the measuring range of a measuring system is expanded.
Drawings
FIG. 1 is a schematic diagram of an embodiment of the apparatus of the present invention;
FIG. 2 is a diagram illustrating a wavelength selection scheme for a multi-wavelength light source according to an embodiment of the present invention;
FIG. 3 is a schematic diagram of the working principle of the variable polarization state generator according to the embodiment of the present invention;
FIG. 4 shows the polarization modulation pattern of one side of the light source optical path at a single wavelength in the embodiment of the present invention;
fig. 5 shows a polarization state modulation mode of one side of the imaging optical path in the three-wavelength measurement mode according to the embodiment of the present invention;
fig. 6 is a flowchart of a wide-range birefringence distribution measurement using the present apparatus according to the embodiment of the present invention.
In the figure: 1-a multi-wavelength light source; 2-a light source lens group; 3-a wavelength selective device; 4-a variable polarization state generator I; 5, a tested material sample; 6-an imaging lens group; 7-aperture diaphragm; 8-a second variable polarization state generator; 9-a photodetector; 10-a data processing module.
The specific implementation mode is as follows:
the present invention will be further explained with reference to the accompanying drawings.
The utility model discloses a wide range formation of image formula birefringence distribution measuring device, including light source module, formation of image mirror group, variable polarization state generator, photoelectric detector and control and data processing module. The light source module receives signals of the control and data processing module, selects and outputs light beams with wavelengths used for measurement, transmits and illuminates a measured material sample, the imaging lens group projects the emergent light beams passing through the measured material sample to the photoelectric detector, the variable polarization state generator is positioned in light paths on two sides of the measured material sample, the polarization state of the light beams is changed according to electric signals input by the control and data processing module, polarization detection or phase delay of the light beams is provided, the photoelectric detector converts collected light intensity distribution into electric signals to be output to the control and data processing module for operation, and a measured object birefringence distribution result is finally presented.
FIG. 1 is a schematic diagram of a structure of an embodiment of the apparatus of the present invention, in this example, the variable polarization state generator used includes a first variable polarization state generator 4 and a second variable polarization state generator 8, both the first variable polarization state generator 4 and the second variable polarization state generator 8 are composed of a linear polarizer and a liquid crystal variable Retarder (L required crystalline variable Retarder, L CVR). The polarization state of the light beam changes after passing through the linear polarizer and the liquid crystal variable Retarder in sequence, the retardation of the liquid crystal variable Retarder changes with the change of an electric signal applied thereto, and the retardation of the liquid crystal variable Retarder corresponds to the electric signal.
In this example, the light source module is composed of a multi-wavelength light source 1, a wavelength selection device 3, and a light source lens group 2. The wavelength selection device 3 is a liquid crystal tunable filter which can allow narrow light wave transmission in a certain spectral range, the center wavelength of the transmitted light can be tuned, and the passband range of the filter used herein is matched with the emission spectrum band of the light source. The light beam emitted by the multi-wavelength light source 1 in the light source module is projected to the tested material sample through the wavelength selection device 3 and the light source lens group 2.
Preferably, the multiwavelength light source 1 comprises at least three or more wavelength components having a wavelength interval of not less than 10 nm; the wavelength selection device 3 has sub-pass bands in not less than three wavelength ranges, the central wavelengths of the sub-pass bands correspond to the wavelength components of the multi-wavelength light source 1 one by one, and the bandwidth of each sub-pass band is not more than 10 nanometers. The object-image conjugate surface of the light source lens group 2 is the emission end surface of the multi-wavelength light source 1 and the surface of the tested material sample 5 respectively.
In the embodiment, at least one first variable polarization state generator 4 is arranged in the light source module, and can output emergent light with any complete polarization by polarizing and delaying unpolarized light or partially polarized light. The broadband partial polarized light emitted by the multi-wavelength light source 1 is filtered by the wavelength selection device 3 to obtain narrow-band partial polarized light, then the narrow-band partial polarized light is converted into narrow-band completely polarized light by the variable polarization state generator 4, and finally the narrow-band completely polarized light is projected on the surface of a tested material sample 5 through the light source lens group 2.
The measured material sample 5 spatially forms a distribution of retardation amounts and azimuth angles (i.e., birefringence distribution parameters) due to its optical anisotropy, and the retardation of each point spatially modulates the fully polarized light transmitted therethrough. According to the principle of polarization optics, the tested material sample 5 is a delay device with a spatial distribution Muller matrix, and after the Stokes vector of the completely polarized light is delayed and modulated to be emitted, the Stokes vector of the emitted light beam carries delay distribution information of a tested object.
The imaging lens group 6 is generally required to be telecentric on the object side, that is, the aperture stop 7 of the imaging lens group 6 is on the image side focal plane at the front part of the lens group, the object image conjugate plane of the imaging lens group 6 is the surface of the material sample to be detected 5 and the target surface of the photoelectric detector 9, and at least one second variable polarization state generator 8 is located near the aperture stop 7. The photodetector 9 is an area array detector. Therefore, the emergent light beam of the tested material sample 5 passes through the imaging lens group 6 and the polarization state demodulation device 8 in the lens group, and is finally projected on the photoelectric detector 9.
During measurement, voltages applied to the first variable polarization state generator 4 and the second variable polarization state generator 8 are changed according to a certain rule, and the polarization state of a transmission light beam in the light path is changed accordingly. The light intensity distribution of the image received by the area array detector 9 changes with the change of the polarization state of the light beam, the polarization state data and the image are transmitted to the control and data processing module, and the Muller matrix distribution of the tested sample material 5 can be calculated through the light intensity distribution images in a plurality of polarization states, namely the birefringence distribution data of the tested sample material is obtained.
FIG. 2 shows a wavelength selection method of a multi-wavelength light source according to the present invention, the multi-wavelength light source 1 selects white light L ED, emitting visible light of 400-700 nm in typical spectrum, the wavelength selection device 3 sequentially selects wavelength components having at least three or more wavelength intervals of not less than 10nm when performing measurement, and three sets of measurements respectively select narrow-band light outputs of 460 + -5 nm, 520 + -5 nm, and 630 + -5 nm, as shown in the figure.
Fig. 3 is a schematic diagram of the working principle of the variable polarization state generator in the embodiment of the present invention, in this embodiment, the variable polarization state generator 4 is composed of a linear polarizer 4a and a pair of liquid crystal variable retarders (a first liquid crystal retarder 4b and a second liquid crystal retarder 4c), the transmission axis of the linear polarizer 4a and the fast axis directions of the first liquid crystal retarder 4b and the second liquid crystal retarder 4c are respectively 90 °, 45 °, 90 °. L ED light source 1 emit vertical linearly polarized light after passing through the linear polarizer 4a, when the retardation of the first liquid crystal retarder 4b is pi/2, the linearly polarized light transmitted therethrough is circularly polarized light, and when the retardation of the second liquid crystal retarder 4c is modulated respectively to 0, pi/2, pi, 3 pi/2, the outgoing light beam is right circularly polarized light, +/-45 °, left circularly polarized light, and-45 °.
Fig. 4 shows a polarization state modulation pattern of one side of the light source optical path at a single wavelength according to the embodiment of the present invention. According to the working principle of the variable polarization state generator, after the incident beams with different polarization states are modulated and emitted by the tested sample material 5, the Stokes vector of the emitted beam is the interaction result of the Stokes vector of the incident beam and the Muller matrix of the tested sample material 5. In order to obtain the information of the delay amount and the azimuth angle theta in the Muller matrix, the incident light in various polarization states and the signal of the corresponding emergent light are required to participate in the solution. In this embodiment, four elliptical polarized light beams are selected as the incident light as shown in fig. 4, and the four elliptical polarization states satisfy the condition that the ellipticity is the same and the direction angles are different. The effect of the Stokes vector of the beam on the Muller matrix of the sample material 5 under test can be expressed by the following equation:
where the ellipticity x and the direction angle ψ of the incident beam are modulated by the control system 10 applied to the variable polarization state generator 4, the light intensity of the outgoing beam can be solved by multi-polarization state measurement, and then the distribution of the retardation and the azimuth angle θ in the Muller matrix can be obtained by matrix inversion.
FIG. 5 shows an image light path side in a three-wavelength measurement mode according to an embodiment of the present inventionPolarization state modulation mode. The polarization state generator is usually a circular polarizer, and for the multi-wavelength measurement in this embodiment, the polarization demodulation device composed of the birefringent crystal wave plate and the linear polarizer cannot behave as a circular polarizer at each wavelength. In this embodiment, the variable polarization demodulation device 8 used is a variable retardation circular polarizer in which a birefringent crystal waveplate is replaced with a liquid crystal variable retarder in consideration of the retardation variation of different wavelengths, and if the current measurement wavelength is λ1Then the control system 10 applies the voltage of the liquid crystal variable retarder to make the retardation amount equal to λ1/4. In the multi-wavelength measurement, the retardation of the liquid crystal variable retarder is switched in accordance with the used wavelength in turn to obtain a circularly polarizing plate of the corresponding wavelength.
The measuring method of the wide-range imaging birefringence distribution measuring device comprises the following steps: focusing a light source module and an imaging lens group on the surface of a tested material sample, carrying out conversion of the output light wavelength of the light source module through a control and data processing module, simultaneously switching variable polarization state generators in two side light paths of the tested material sample according to the delay amount corresponding to the wavelength, acquiring a light intensity distribution image under the delay amount of each variable polarization state generator by a photoelectric detector, calculating the delay amount and azimuth angle distribution of the acquired image under each wavelength, calculating the total delay amount order by utilizing the fractional part of the delay amount of each wavelength, and finally obtaining the absolute value and the delay azimuth angle of the delay amount distribution.
Fig. 6 is a flowchart of a measurement method according to an embodiment of the present invention. Before the measurement is started, the number of the testing wavelengths is selected according to the estimated sample delay range and the required measurement precision, and the measuring range and the precision are positively correlated with the number of the used wavelengths. Number of measurement wavelengths N and wavelength λ to be used1、λ2、……λNThe input control and data processing module 10 controls the voltage combination of the liquid crystal device corresponding to the selected wavelength in the self-contained database of the data processing module 10. After the test is started, the control module 10 first selects the voltage of the wavelength selective device 3 to obtain the central wavelength λ1And narrow-band light output with the bandwidth not more than 10 nm. Then, the voltage of the second polarization demodulation device 8 is selected to constitute λ1Circle ofPolarizing film, and voltage V of variable polarization state generator-41(λ1) The photodetector 9 records and transmits the two-dimensional light intensity distribution to the control and data processing module 10. Sequentially obtaining I according to the modulation mode of the variable polarization state generator2(λ1)、I3(λ1) And I4(λ1). The four times of measured light intensity distribution can be used for obtaining lambda according to the Stokes vector operation formula1Retardation at wavelength1And azimuth angle theta1And (4) distribution.
According to the method, the delay amount and the azimuth angle distribution under each wavelength can be obtained2～θ2、3～θ3、……N～θN. For a measured material sample 5 that is less than the pi retardation amount,1＝2＝…＝N(ii) a And m is satisfied for the tested sample 5 with the retardation larger than pi1λ1/2+1＝m2λ2/2+2＝…＝mNλN/2+NWhere m is the delay order and is a positive integer. For example, the measured retardation amounts are 30nm (460nm), 200nm (520nm) and 90nm (630nm) for the three wavelengths employed in fig. 2, respectively, and it is not difficult to obtain 3-stage, 2-stage and 2-stage retardations for the three wavelengths, respectively, whose absolute retardation amount is 720 nm. After the operation is finished, the control and data processing module 10 outputs the measurement result of the birefringence distribution.
The foregoing is only a preferred embodiment of the present invention, and it should be noted that, for those skilled in the art, a plurality of modifications and decorations can be made without departing from the principle of the present invention, and these modifications and decorations should also be regarded as the protection scope of the present invention.
Claims (9)
1. A wide-range imaging birefringence distribution measuring device is characterized in that: the device comprises a light source module, an imaging lens group, a variable polarization state generator, a photoelectric detector and a control and data processing module; the light source module receives signals of the control and data processing module, selects and outputs light beams with wavelengths used for measurement, transmits and illuminates a measured material sample, the imaging lens group projects the emergent light beams passing through the measured material sample to the photoelectric detector, the variable polarization state generator is positioned in light paths on two sides of the measured material sample, the polarization state of the light beams is changed according to electric signals input by the control and data processing module, polarization detection or phase delay of the light beams is provided, the photoelectric detector converts collected light intensity distribution into electric signals to be output to the control and data processing module for operation, and a measured object birefringence distribution result is finally presented.
2. A wide-range imaging birefringence distribution measuring device as set forth in claim 1, wherein: the light source module comprises a multi-wavelength light source, a wavelength selection device and a light source lens group, and emergent light beams of the multi-wavelength light source in the light source module are projected to a tested material sample through the wavelength selection device and the light source lens group.
3. A wide-range imaging birefringence distribution measuring device as set forth in claim 2, wherein: the multi-wavelength light source at least comprises three or more wavelength components with the wavelength interval not less than 10 nanometers; the wavelength selection device is provided with sub-pass bands in not less than three wavelength ranges, the central wavelengths of the sub-pass bands correspond to the wavelength components of the multi-wavelength light sources one by one, and the bandwidth of each sub-pass band is not more than 10 nanometers.
4. A wide-range imaging birefringence distribution measuring device as set forth in claim 3, wherein: the object image conjugate surface of the light source lens group is respectively a multi-wavelength light source emission end surface and a tested material sample surface.
5. A wide-range imaging birefringence distribution measuring device as set forth in claim 1, wherein: the optical path of the imaging lens group is an object space telecentric optical path.
6. A wide-range imaging birefringence distribution measuring device as set forth in claim 5, wherein: the object-image conjugate surface of the imaging lens group is the surface of the tested material sample and the surface of the photoelectric detector target respectively.
7. A wide-range imaging birefringence distribution measuring device as set forth in claim 1, wherein: the variable polarization state generator comprises a linear polaroid and a liquid crystal variable retarder, the polarization state of a light beam is changed after the light beam sequentially passes through the linear polaroid and the liquid crystal variable retarder, the retardation of the liquid crystal variable retarder can be changed along with the change of an electric signal applied to the liquid crystal variable retarder, and the retardation of the liquid crystal variable retarder corresponds to the electric signal in a one-to-one mode.
8. A wide-range imaging birefringence distribution measuring device as set forth in claim 7, wherein: the number of the variable polarization state generators is at least two, and the light paths on two sides of the measured material sample respectively comprise at least one variable polarization state generator.
9. A wide-range imaging birefringence distribution measuring device as set forth in claim 1, wherein: the photoelectric detector is an area array detector.
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Address after: 210038 building a, Longgang Science Park, No.1 Hengyuan Road, Nanjing Economic and Technological Development Zone, Jiangsu Province Patentee after: NANJING INSTITUTE OF ADVANCED LASER TECHNOLOGY Patentee after: Nanjing jingcui Optical Technology Co., Ltd Address before: 210038 building a, Longgang Science Park, No.1 Hengyuan Road, Nanjing Economic and Technological Development Zone, Jiangsu Province Patentee before: NANJING INSTITUTE OF ADVANCED LASER TECHNOLOGY Patentee before: Suzhou jingcui Optical Technology Co., Ltd |
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