KR102201641B1 - 질량 흐름 제어기의 밸브 페데스탈을 자동으로 자가-조정하기 위한 시스템 및 방법 - Google Patents

질량 흐름 제어기의 밸브 페데스탈을 자동으로 자가-조정하기 위한 시스템 및 방법 Download PDF

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KR102201641B1
KR102201641B1 KR1020157016759A KR20157016759A KR102201641B1 KR 102201641 B1 KR102201641 B1 KR 102201641B1 KR 1020157016759 A KR1020157016759 A KR 1020157016759A KR 20157016759 A KR20157016759 A KR 20157016759A KR 102201641 B1 KR102201641 B1 KR 102201641B1
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South Korea
Prior art keywords
pedestal
mass flow
low
ped
flow controller
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Korean (ko)
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KR20150132083A (ko
Inventor
윌리엄 에스. 발렌틴
크리스토프 엘렉
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일리노이즈 툴 워크스 인코포레이티드
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    • G01F25/0007—
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01F—MEASURING VOLUME, VOLUME FLOW, MASS FLOW OR LIQUID LEVEL; METERING BY VOLUME
    • G01F25/00—Testing or calibration of apparatus for measuring volume, volume flow or liquid level or for metering by volume
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01F—MEASURING VOLUME, VOLUME FLOW, MASS FLOW OR LIQUID LEVEL; METERING BY VOLUME
    • G01F1/00—Measuring the volume flow or mass flow of fluid or fluent solid material wherein the fluid passes through a meter in a continuous flow
    • G01F1/68—Measuring the volume flow or mass flow of fluid or fluent solid material wherein the fluid passes through a meter in a continuous flow by using thermal effects
    • G01F1/684—Structural arrangements; Mounting of elements, e.g. in relation to fluid flow
    • G01F1/6847—Structural arrangements; Mounting of elements, e.g. in relation to fluid flow where sensing or heating elements are not disturbing the fluid flow, e.g. elements mounted outside the flow duct
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01F—MEASURING VOLUME, VOLUME FLOW, MASS FLOW OR LIQUID LEVEL; METERING BY VOLUME
    • G01F15/00—Details of, or accessories for, apparatus of groups G01F1/00 - G01F13/00 insofar as such details or appliances are not adapted to particular types of such apparatus
    • G01F15/005—Valves
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01F—MEASURING VOLUME, VOLUME FLOW, MASS FLOW OR LIQUID LEVEL; METERING BY VOLUME
    • G01F25/00—Testing or calibration of apparatus for measuring volume, volume flow or liquid level or for metering by volume
    • G01F25/10—Testing or calibration of apparatus for measuring volume, volume flow or liquid level or for metering by volume of flowmeters
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01F—MEASURING VOLUME, VOLUME FLOW, MASS FLOW OR LIQUID LEVEL; METERING BY VOLUME
    • G01F5/00—Measuring a proportion of the volume flow

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  • Physics & Mathematics (AREA)
  • Fluid Mechanics (AREA)
  • General Physics & Mathematics (AREA)
  • Flow Control (AREA)
KR1020157016759A 2013-03-14 2014-02-22 질량 흐름 제어기의 밸브 페데스탈을 자동으로 자가-조정하기 위한 시스템 및 방법 Active KR102201641B1 (ko)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
US201361783346P 2013-03-14 2013-03-14
US61/783,346 2013-03-14
PCT/US2014/017859 WO2014158530A1 (en) 2013-03-14 2014-02-22 System and method to automatically self-adjust a valve pedestal of a mass flow controller

Publications (2)

Publication Number Publication Date
KR20150132083A KR20150132083A (ko) 2015-11-25
KR102201641B1 true KR102201641B1 (ko) 2021-01-12

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Application Number Title Priority Date Filing Date
KR1020157016759A Active KR102201641B1 (ko) 2013-03-14 2014-02-22 질량 흐름 제어기의 밸브 페데스탈을 자동으로 자가-조정하기 위한 시스템 및 방법

Country Status (6)

Country Link
US (1) US20160003665A1 (enExample)
EP (1) EP2972138B1 (enExample)
JP (1) JP6680669B2 (enExample)
KR (1) KR102201641B1 (enExample)
CN (1) CN105051505B (enExample)
WO (1) WO2014158530A1 (enExample)

Families Citing this family (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP3356901A1 (en) * 2015-09-28 2018-08-08 Koninklijke Philips N.V. Methods and systems for controlling gas flow using a proportional flow valve
US12379238B2 (en) 2018-10-26 2025-08-05 Illinois Tool Works Inc. Mass flow controller with advanced back streaming diagnostics
US11675374B2 (en) * 2018-10-26 2023-06-13 Illinois Tool Works Inc. Mass flow controller with advanced zero trending diagnostics
JP7262745B2 (ja) * 2018-12-27 2023-04-24 株式会社フジキン マスフローコントローラ

Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2011135826A1 (en) * 2010-04-27 2011-11-03 Hitachi Metals, Ltd. Method and system of on-tool and on-site mfc optimization providing consistent response

Family Cites Families (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4877051A (en) * 1988-11-28 1989-10-31 Mks Instruments, Inc. Flow controller
US5062446A (en) * 1991-01-07 1991-11-05 Sematech, Inc. Intelligent mass flow controller
US6445980B1 (en) * 1999-07-10 2002-09-03 Mykrolis Corporation System and method for a variable gain proportional-integral (PI) controller
US6712084B2 (en) * 2002-06-24 2004-03-30 Mks Instruments, Inc. Apparatus and method for pressure fluctuation insensitive mass flow control
KR20050031109A (ko) * 2002-07-19 2005-04-01 셀레리티 그룹 아이엔씨 질량 유량 제어기 내의 압력 보상을 위한 방법 및 장치
US6845659B2 (en) * 2002-07-19 2005-01-25 Celerity Group, Inc. Variable resistance sensor with common reference leg
US8915262B2 (en) * 2011-08-09 2014-12-23 Hitachi Metals, Ltd. Mass flow controller algorithm with adaptive valve start position

Patent Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2011135826A1 (en) * 2010-04-27 2011-11-03 Hitachi Metals, Ltd. Method and system of on-tool and on-site mfc optimization providing consistent response

Also Published As

Publication number Publication date
WO2014158530A1 (en) 2014-10-02
EP2972138A1 (en) 2016-01-20
KR20150132083A (ko) 2015-11-25
CN105051505B (zh) 2020-11-06
JP6680669B2 (ja) 2020-04-15
US20160003665A1 (en) 2016-01-07
CN105051505A (zh) 2015-11-11
EP2972138B1 (en) 2022-11-23
JP2016514324A (ja) 2016-05-19

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