CN105051505B - 用于自动自调节质量流量控制器的阀基准的系统和方法 - Google Patents

用于自动自调节质量流量控制器的阀基准的系统和方法 Download PDF

Info

Publication number
CN105051505B
CN105051505B CN201480015233.7A CN201480015233A CN105051505B CN 105051505 B CN105051505 B CN 105051505B CN 201480015233 A CN201480015233 A CN 201480015233A CN 105051505 B CN105051505 B CN 105051505B
Authority
CN
China
Prior art keywords
mass flow
valve
set point
ped
response
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Active
Application number
CN201480015233.7A
Other languages
English (en)
Chinese (zh)
Other versions
CN105051505A (zh
Inventor
威廉·S.·瓦伦丁
克里斯托夫·伊莱克
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Illinois Tool Works Inc
Original Assignee
Illinois Tool Works Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Illinois Tool Works Inc filed Critical Illinois Tool Works Inc
Publication of CN105051505A publication Critical patent/CN105051505A/zh
Application granted granted Critical
Publication of CN105051505B publication Critical patent/CN105051505B/zh
Active legal-status Critical Current
Anticipated expiration legal-status Critical

Links

Images

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01F—MEASURING VOLUME, VOLUME FLOW, MASS FLOW OR LIQUID LEVEL; METERING BY VOLUME
    • G01F25/00—Testing or calibration of apparatus for measuring volume, volume flow or liquid level or for metering by volume
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01F—MEASURING VOLUME, VOLUME FLOW, MASS FLOW OR LIQUID LEVEL; METERING BY VOLUME
    • G01F1/00—Measuring the volume flow or mass flow of fluid or fluent solid material wherein the fluid passes through a meter in a continuous flow
    • G01F1/68—Measuring the volume flow or mass flow of fluid or fluent solid material wherein the fluid passes through a meter in a continuous flow by using thermal effects
    • G01F1/684—Structural arrangements; Mounting of elements, e.g. in relation to fluid flow
    • G01F1/6847—Structural arrangements; Mounting of elements, e.g. in relation to fluid flow where sensing or heating elements are not disturbing the fluid flow, e.g. elements mounted outside the flow duct
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01F—MEASURING VOLUME, VOLUME FLOW, MASS FLOW OR LIQUID LEVEL; METERING BY VOLUME
    • G01F15/00—Details of, or accessories for, apparatus of groups G01F1/00 - G01F13/00 insofar as such details or appliances are not adapted to particular types of such apparatus
    • G01F15/005—Valves
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01F—MEASURING VOLUME, VOLUME FLOW, MASS FLOW OR LIQUID LEVEL; METERING BY VOLUME
    • G01F25/00—Testing or calibration of apparatus for measuring volume, volume flow or liquid level or for metering by volume
    • G01F25/10—Testing or calibration of apparatus for measuring volume, volume flow or liquid level or for metering by volume of flowmeters
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01F—MEASURING VOLUME, VOLUME FLOW, MASS FLOW OR LIQUID LEVEL; METERING BY VOLUME
    • G01F5/00—Measuring a proportion of the volume flow

Landscapes

  • Physics & Mathematics (AREA)
  • Fluid Mechanics (AREA)
  • General Physics & Mathematics (AREA)
  • Flow Control (AREA)
CN201480015233.7A 2013-03-14 2014-02-22 用于自动自调节质量流量控制器的阀基准的系统和方法 Active CN105051505B (zh)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
US201361783346P 2013-03-14 2013-03-14
US61/783,346 2013-03-14
PCT/US2014/017859 WO2014158530A1 (en) 2013-03-14 2014-02-22 System and method to automatically self-adjust a valve pedestal of a mass flow controller

Publications (2)

Publication Number Publication Date
CN105051505A CN105051505A (zh) 2015-11-11
CN105051505B true CN105051505B (zh) 2020-11-06

Family

ID=50240053

Family Applications (1)

Application Number Title Priority Date Filing Date
CN201480015233.7A Active CN105051505B (zh) 2013-03-14 2014-02-22 用于自动自调节质量流量控制器的阀基准的系统和方法

Country Status (6)

Country Link
US (1) US20160003665A1 (enExample)
EP (1) EP2972138B1 (enExample)
JP (1) JP6680669B2 (enExample)
KR (1) KR102201641B1 (enExample)
CN (1) CN105051505B (enExample)
WO (1) WO2014158530A1 (enExample)

Families Citing this family (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP3356901A1 (en) * 2015-09-28 2018-08-08 Koninklijke Philips N.V. Methods and systems for controlling gas flow using a proportional flow valve
US12379238B2 (en) 2018-10-26 2025-08-05 Illinois Tool Works Inc. Mass flow controller with advanced back streaming diagnostics
US11675374B2 (en) * 2018-10-26 2023-06-13 Illinois Tool Works Inc. Mass flow controller with advanced zero trending diagnostics
JP7262745B2 (ja) * 2018-12-27 2023-04-24 株式会社フジキン マスフローコントローラ

Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5062446A (en) * 1991-01-07 1991-11-05 Sematech, Inc. Intelligent mass flow controller
CN1371490A (zh) * 1999-07-10 2002-09-25 米克罗利斯公司 可变增益比例积分控制器的系统和方法
CN1688948A (zh) * 2002-07-19 2005-10-26 迅捷集团公司 在质量流动控制器中用于压力补偿的方法和装置

Family Cites Families (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4877051A (en) * 1988-11-28 1989-10-31 Mks Instruments, Inc. Flow controller
US6712084B2 (en) * 2002-06-24 2004-03-30 Mks Instruments, Inc. Apparatus and method for pressure fluctuation insensitive mass flow control
US6845659B2 (en) * 2002-07-19 2005-01-25 Celerity Group, Inc. Variable resistance sensor with common reference leg
US8321060B2 (en) * 2010-04-27 2012-11-27 Hitachi Metals, Ltd Method and system of on-tool and on-site MFC optimization providing consistent response
US8915262B2 (en) * 2011-08-09 2014-12-23 Hitachi Metals, Ltd. Mass flow controller algorithm with adaptive valve start position

Patent Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5062446A (en) * 1991-01-07 1991-11-05 Sematech, Inc. Intelligent mass flow controller
CN1371490A (zh) * 1999-07-10 2002-09-25 米克罗利斯公司 可变增益比例积分控制器的系统和方法
CN1688948A (zh) * 2002-07-19 2005-10-26 迅捷集团公司 在质量流动控制器中用于压力补偿的方法和装置

Also Published As

Publication number Publication date
WO2014158530A1 (en) 2014-10-02
KR102201641B1 (ko) 2021-01-12
EP2972138A1 (en) 2016-01-20
KR20150132083A (ko) 2015-11-25
JP6680669B2 (ja) 2020-04-15
US20160003665A1 (en) 2016-01-07
CN105051505A (zh) 2015-11-11
EP2972138B1 (en) 2022-11-23
JP2016514324A (ja) 2016-05-19

Similar Documents

Publication Publication Date Title
US9739655B2 (en) System and method for using a rate of decay measurement for real time measurement and correction of zero offset and zero drift of a mass flow controller or mass flow meter
US10048105B2 (en) System and method for providing a self validating mass flow controller and mass flow meter
KR101323503B1 (ko) 유동 모니터링 및 제어 시스템과 그 방법
KR102106825B1 (ko) 질량 유량 컨트롤러 및 유체 유형에 걸쳐 개선된 성능을 위한 방법
JP6691167B2 (ja) 流体の流量を制御するための質量流量制御器及び方法
CN105051505B (zh) 用于自动自调节质量流量控制器的阀基准的系统和方法
KR102519482B1 (ko) 가스 유량 감시 방법 및 가스 유량 감시 장치
US20120197446A1 (en) Advanced feed-forward valve-control for a mass flow controller
WO2013134150A1 (en) System and method for improving the accuracy of a rate of decay measurement for real time correction in a mass flow controller or mass flow meter by using a thermal model to minimize thermally induced error in the rod measurement
US20240183702A1 (en) Mass flow control device and zero point calibration method for the same
WO2016178739A1 (en) Nonlinear control of mass flow controller devices using sliding mode
JP6659692B2 (ja) ワイヤレス流量制限器
WO2006017116A2 (en) Method and system for flow measurement and validation of a mass flow controller
TW202522148A (zh) 用於質量流量控制器之自動自校準之方法及設備
JP2016514324A5 (enExample)
KR101889379B1 (ko) 유량제어시스템
US20150122054A1 (en) System and method for providing a self validating mass flow controller or a mass flow meter utilizing a software protocol

Legal Events

Date Code Title Description
C06 Publication
PB01 Publication
C10 Entry into substantive examination
SE01 Entry into force of request for substantive examination
GR01 Patent grant
GR01 Patent grant