JP6680669B2 - 質量流量制御器のバルブペデスタルを自動的に自己調整するシステム及び方法 - Google Patents

質量流量制御器のバルブペデスタルを自動的に自己調整するシステム及び方法 Download PDF

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JP6680669B2
JP6680669B2 JP2016500345A JP2016500345A JP6680669B2 JP 6680669 B2 JP6680669 B2 JP 6680669B2 JP 2016500345 A JP2016500345 A JP 2016500345A JP 2016500345 A JP2016500345 A JP 2016500345A JP 6680669 B2 JP6680669 B2 JP 6680669B2
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Prior art keywords
mass flow
response
valve
set point
flow controller
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JP2016500345A
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Japanese (ja)
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JP2016514324A5 (enExample
JP2016514324A (ja
Inventor
エス．バレンタイン ウィリアム
エス．バレンタイン ウィリアム
エルク クリストフ
エルク クリストフ
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イリノイ トゥール ワークス インコーポレイティド
イリノイ トゥール ワークス インコーポレイティド
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    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01F—MEASURING VOLUME, VOLUME FLOW, MASS FLOW OR LIQUID LEVEL; METERING BY VOLUME
    • G01F1/00—Measuring the volume flow or mass flow of fluid or fluent solid material wherein the fluid passes through a meter in a continuous flow
    • G01F1/68—Measuring the volume flow or mass flow of fluid or fluent solid material wherein the fluid passes through a meter in a continuous flow by using thermal effects
    • G01F1/684—Structural arrangements; Mounting of elements, e.g. in relation to fluid flow
    • G01F1/6847—Structural arrangements; Mounting of elements, e.g. in relation to fluid flow where sensing or heating elements are not disturbing the fluid flow, e.g. elements mounted outside the flow duct
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01F—MEASURING VOLUME, VOLUME FLOW, MASS FLOW OR LIQUID LEVEL; METERING BY VOLUME
    • G01F25/00—Testing or calibration of apparatus for measuring volume, volume flow or liquid level or for metering by volume
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01F—MEASURING VOLUME, VOLUME FLOW, MASS FLOW OR LIQUID LEVEL; METERING BY VOLUME
    • G01F15/00—Details of, or accessories for, apparatus of groups G01F1/00 - G01F13/00 insofar as such details or appliances are not adapted to particular types of such apparatus
    • G01F15/005—Valves
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01F—MEASURING VOLUME, VOLUME FLOW, MASS FLOW OR LIQUID LEVEL; METERING BY VOLUME
    • G01F25/00—Testing or calibration of apparatus for measuring volume, volume flow or liquid level or for metering by volume
    • G01F25/10—Testing or calibration of apparatus for measuring volume, volume flow or liquid level or for metering by volume of flowmeters
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01F—MEASURING VOLUME, VOLUME FLOW, MASS FLOW OR LIQUID LEVEL; METERING BY VOLUME
    • G01F5/00—Measuring a proportion of the volume flow

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  • Physics & Mathematics (AREA)
  • Fluid Mechanics (AREA)
  • General Physics & Mathematics (AREA)
  • Flow Control (AREA)
JP2016500345A 2013-03-14 2014-02-22 質量流量制御器のバルブペデスタルを自動的に自己調整するシステム及び方法 Active JP6680669B2 (ja)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
US201361783346P 2013-03-14 2013-03-14
US61/783,346 2013-03-14
PCT/US2014/017859 WO2014158530A1 (en) 2013-03-14 2014-02-22 System and method to automatically self-adjust a valve pedestal of a mass flow controller

Publications (3)

Publication Number Publication Date
JP2016514324A JP2016514324A (ja) 2016-05-19
JP2016514324A5 JP2016514324A5 (enExample) 2017-03-30
JP6680669B2 true JP6680669B2 (ja) 2020-04-15

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ID=50240053

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JP2016500345A Active JP6680669B2 (ja) 2013-03-14 2014-02-22 質量流量制御器のバルブペデスタルを自動的に自己調整するシステム及び方法

Country Status (6)

Country Link
US (1) US20160003665A1 (enExample)
EP (1) EP2972138B1 (enExample)
JP (1) JP6680669B2 (enExample)
KR (1) KR102201641B1 (enExample)
CN (1) CN105051505B (enExample)
WO (1) WO2014158530A1 (enExample)

Families Citing this family (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP3356901A1 (en) * 2015-09-28 2018-08-08 Koninklijke Philips N.V. Methods and systems for controlling gas flow using a proportional flow valve
US12379238B2 (en) 2018-10-26 2025-08-05 Illinois Tool Works Inc. Mass flow controller with advanced back streaming diagnostics
US11675374B2 (en) * 2018-10-26 2023-06-13 Illinois Tool Works Inc. Mass flow controller with advanced zero trending diagnostics
JP7262745B2 (ja) * 2018-12-27 2023-04-24 株式会社フジキン マスフローコントローラ

Family Cites Families (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4877051A (en) * 1988-11-28 1989-10-31 Mks Instruments, Inc. Flow controller
US5062446A (en) * 1991-01-07 1991-11-05 Sematech, Inc. Intelligent mass flow controller
US6445980B1 (en) * 1999-07-10 2002-09-03 Mykrolis Corporation System and method for a variable gain proportional-integral (PI) controller
US6712084B2 (en) * 2002-06-24 2004-03-30 Mks Instruments, Inc. Apparatus and method for pressure fluctuation insensitive mass flow control
KR20050031109A (ko) * 2002-07-19 2005-04-01 셀레리티 그룹 아이엔씨 질량 유량 제어기 내의 압력 보상을 위한 방법 및 장치
US6845659B2 (en) * 2002-07-19 2005-01-25 Celerity Group, Inc. Variable resistance sensor with common reference leg
US8321060B2 (en) * 2010-04-27 2012-11-27 Hitachi Metals, Ltd Method and system of on-tool and on-site MFC optimization providing consistent response
US8915262B2 (en) * 2011-08-09 2014-12-23 Hitachi Metals, Ltd. Mass flow controller algorithm with adaptive valve start position

Also Published As

Publication number Publication date
WO2014158530A1 (en) 2014-10-02
KR102201641B1 (ko) 2021-01-12
EP2972138A1 (en) 2016-01-20
KR20150132083A (ko) 2015-11-25
CN105051505B (zh) 2020-11-06
US20160003665A1 (en) 2016-01-07
CN105051505A (zh) 2015-11-11
EP2972138B1 (en) 2022-11-23
JP2016514324A (ja) 2016-05-19

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