KR102174929B1 - Laser reflow method of laser reflow apparatus - Google Patents

Abstract

The present invention relates to a laser reflow method of a laser reflow apparatus for bonding electronic components to a substrate by pressing an object to be bonded which has a plurality of electronic components arranged on a rectangular substrate with a light-transmitting pressing member and irradiating a laser beam through the pressing member. The laser reflow method of a laser reflow apparatus comprises: a) a step in which a vision unit photographs an arranged shape of predetermined electronic components located directly below a pressing surface of the light-transmitting pressing member, before the light-transmitting pressing member presses the bonding object; b) a step of determining whether the arranged shape of the photographed electronic components is positioned to correspond to the pressing surface; c) a step in which, when determined that the electronic components are positioned to correspond to the pressing surface, the light-transmitting pressing member is moved downward to press the bonding object and irradiate a laser beam to the bonding object through the light-transmitting pressing member; d) a step of stopping the irradiation of the laser beam and moving the light-transmitting pressing member upward to release the pressurized state; and e) a step of horizontally moving the light-transmitting pressing member above predetermined electronic components to be reflowed in the next order.

Description

Laser reflow method of laser reflow apparatus {Laser reflow method of laser reflow apparatus}

The present invention relates to a laser reflow method, and more particularly, to a laser reflow method of a laser reflow apparatus for bonding electronic parts by irradiating a laser in a state in which a plurality of electronic parts are pressed and pressed with a light-transmitting pressing member. .

Micro laser processing is an application field with micron (㎛) precision in industrial laser processing, and is widely used in the semiconductor industry, display industry, printed circuit board (PCB) industry, and smartphone industry. Memory chips used in all electronic devices have developed a technology that minimizes the circuit spacing in order to realize the integration, performance and ultra-high communication speed, but now the required technology level is achieved simply by reducing the circuit line width and line width interval. It is difficult to do so, so it has reached the level of stacking memory chips in a vertical direction. The stacking technology up to 128 layers has already been developed by TSMC, and the technology of stacking up to 72 layers is being applied to mass production at Samsung Electronics and SK Hynix.

In addition, technological developments for mounting memory chips, microprocessor chips, graphic processor chips, wireless processor chips, and sensor processor chips in one package are being intensively researched and developed, and a considerable level of technologies are already being applied in practice.

However, in the process of development of the aforementioned technology, since more and more electrons have to participate in the signal processing process inside the ultra-high-speed/ultra-high-capacity semiconductor chip, the power consumption increases, and the issue of cooling treatment for heat generation has been raised. In addition, a technical issue has been raised that a large amount of electrical signals must be transmitted at an ultra-high speed in order to achieve the requirements of ultra-high-speed signal processing and ultra-high frequency signal processing for more signals. In addition, since the number of signal lines must be increased, the signal interface lines to the outside of the semiconductor chip can no longer be processed with a one-dimensional lead wire method, but the Fan-In BGA method is processed in a two-dimensional manner under the semiconductor chip. Or Fan-in Wafer-Level-Package (FIWLP)), and a Signal Layout Redistribution Layer under the ultra-fine BGA layer under the chip, and a second fine BGA layer under the chip. The method (referred to as Fan-Out BGA or Fan-Out Wafer-Level-Package (FOWLP) or Fan-Out Panel-Level-Package) has been successfully applied.

Recently, in the case of semiconductor chips, products with a thickness of 200 μm or less including an EMC (Epoxy-Mold Compound) layer have appeared. In order to attach a micron-class ultra-thin semiconductor chip with a thickness of only a few hundred microns to an ultra-thin PCB, mass reflow is the same as the conventional surface mount technology (SMT) standard process, Thermal Reflow Oven technology. When applying MR) process, semiconductor chips are exposed in an air temperature environment of 100 to 300 degrees Celsius (℃) for hundreds of seconds, so chip-boundary warpage, PCB due to differences in coefficient of thermal expansion (CTE) -Various types of soldering bonding defects such as PCB-Boundary Warpage and Random-Bonding Failure by Thermal Shock may occur.

Accordingly, looking at the configuration of a laser reflow device that has recently been in the spotlight, a laser head module presses a bonding object (semiconductor chip or integrated circuit IC) for several seconds and irradiates a laser to bond. (IC) Bonding is performed by irradiating a laser in the form of a surface light source corresponding to the size.

For this pressurized laser reflow method, referring to Korean Patent No. 0662820 (hereinafter referred to as'priority document 1'), the flip chip is heated by irradiating a laser on the rear surface of the flip chip. A configuration of a flip chip heat-pressing module for compressing a chip to the carrier substrate is disclosed.

However, in the conventional pressurized laser reflow method disclosed in Prior Document 1, the pressurizing head module adsorbs the chip and moves it to the bonding position, and the rear surface of the chip is heated through a laser and the chip is simultaneously transferred to the carrier. Since it is separated by a means for compressing the substrate, in the case of bonding a plurality of semiconductor chips such as a semiconductor strip, the operation of irradiating a laser while pressing a single semiconductor chip must be repeatedly performed as many as the number of semiconductor chips, increasing the working time. I had to.

Meanwhile, referring to Korean Patent Laid-Open Publication No. 2017-0077721 (hereinafter referred to as'priority document 2'), the laser reflow method mentioned in the patent is in the horizontal direction while the pressure head presses several flip chips simultaneously. It briefly mentions that the bonding process is possible by irradiating a laser to each flip chip sequentially one by one or by irradiating a laser to several flip chips simultaneously by a single laser head.

However, according to the conventional laser pressurizing head configuration of Prior Document 2 described above, since a single laser source is used, a homogenized laser beam is irradiated and defective as the laser beam is incident on a plurality of flip chips disposed on the substrate at various angles. It is expected that a lot of technical difficulties are expected to reflow a plurality of flip chips without the need.

Therefore, conventionally, the total working time was inevitably increased by sequentially pressing and reflowing a single flip chip one by one, and a single laser was applied to a plurality of flip chips horizontally arranged on various substrate sizes for multiple processing. Even if the beams are irradiated at the same time, it is practically difficult to evenly transmit sufficient heat energy to each flip chip, and thus, there remains a problem in that it is difficult to improve the bonding defect rate.

Accordingly, the present invention was invented to solve the above problems, and the present invention is to adjust the arrangement shape of the electronic component located below the light-transmitting pressing member to be located in the center of the pressing surface of the translucent pressing member. When pressed by the member, the pressure transmitted to the electronic component can be pressed evenly without being biased to one side.

Accordingly, an object of the present invention is to provide a laser reflow method of a laser reflow apparatus in which a plurality of electronic components are simultaneously pressed and a laser beam is irradiated to reflow at a time so that mass processing is possible and a defect rate is greatly improved.

The present invention for achieving the above object is to press the bonding object on which a plurality of electronic components are disposed on a rectangular substrate with a light-transmitting pressing member, and irradiating a laser beam through the pressing member to apply the electronic component to the substrate. In the laser reflow method of a laser reflow device bonding to, a) a shape in which a predetermined range of electronic components are arranged in which the vision unit is positioned directly below the pressing surface of the translucent pressing member before the translucent pressing member presses the bonding object Photographing; b) determining whether a shape in which the photographed electronic components in a predetermined range are arranged is positioned to correspond to a pressing surface; c) if it is determined that the electronic components are positioned to correspond to the pressing surface, the translucent pressing member is moved downward to press the bonding object and irradiating a laser beam to the bonding object through the translucent pressing member; d) stopping the irradiation of the laser beam and releasing the pressurized state by moving the translucent pressurizing member upward; And e) horizontally moving the light-transmitting pressing member upwards in a predetermined range of electronic components to be reflowed in sequence.

In addition, the step b) may include: b1) determining whether the electronic components are positioned symmetrically with respect to the center line of the pressing surface of the light-transmitting pressing member when the shape in which the photographed electronic components in a predetermined range are arranged is viewed from the side; And b2) if the shape in which the photographed electronic components are arranged is positioned symmetrically with respect to the center line of the pressing surface of the light-transmitting pressing member, it is determined that they are positioned to correspond to the pressing surface. And adjusting the horizontal position of the light-transmitting pressing member so that the shape in which the parts are arranged is positioned symmetrically with respect to the center line of the pressing surface of the light-transmitting pressing member.

In addition, the laser beam is irradiated by overlapping laser beams from two or more laser modules.

In addition, each of the laser modules is arranged symmetrically with each other, and each of the laser beams has the same beam irradiation angle.

In addition, according to an embodiment, a laser beam is simultaneously irradiated from each of the laser modules.

Further, according to another embodiment, a laser beam is sequentially irradiated from each of the laser modules.

Further, prior to step c), preheating the bonding object from the bottom is further included.

In addition, in the step of preheating the bonding object from the bottom, the surface temperature of the bonding object is maintained below 200°C.

In addition, in step c), the surface temperature of the bonding object is heated to 200°C or higher by irradiating a laser beam to the bonding object through the translucent pressing member.

According to the present invention as described above, a plurality of electronic parts are pressed and pressed, and a homogenized laser beam can be irradiated at the same time, so that productivity is significantly improved by mass reflow processing.

In addition, by adjusting the position of the light-transmitting pressurizing member so that the pressure is evenly distributed so that the electronic parts do not tilt to one side, the defect rate is greatly improved as the pressure acting on a plurality of electronic parts disposed on the substrate is biased. There is.

1 is an exemplary view showing the overall configuration of a laser reflow device used in the practice of the laser reflow method of the present invention
2 is a block diagram of FIG. 1
3 is a conceptual diagram of a single laser beam module according to an embodiment of the laser reflow method of the present invention
4 is a conceptual diagram of a multi-laser beam module according to another embodiment of the laser reflow method of the present invention
5 is a block diagram of a multi-laser module according to another embodiment of the present invention laser reflow method
6 to 9 are configuration diagrams of a laser optical system applicable to a single or multiple laser module of the laser reflow method of the present invention
Figure 10 is a state diagram showing the operation relationship of each step of the process of the laser reflow method of the present invention, a) is a state in which the light-transmitting pressing member is moved upward to the center line Cn+1, b) is the light-transmitting pressing member is pressed at the center line Cn+1 and Laser irradiation, c) is a state in which the translucent pressurizing member is moved upward of the center line Cn+2, d) is a state in which the translucent pressurizing member has been corrected to the center line Cn+2′, and e) is the translucent pressurizing member is at the center line Cn Pressurized and laser irradiated at +2′

Terms used in the present specification are used only to describe specific embodiments, and are not intended to limit the present invention. Singular expressions include plural expressions unless the context clearly indicates otherwise. In the present specification, terms such as "include" or "have" to "include" are intended to designate the presence of features, numbers, steps, actions, components, parts, or a combination thereof described in the present specification. It is to be understood that the possibility of the presence or addition of other features, numbers, steps, actions, components, parts, or combinations thereof, or other features beyond that is not preliminarily excluded.

Unless otherwise defined in the specification, all terms including technical or scientific terms used herein have the same meaning as commonly understood by those of ordinary skill in the art to which the present invention belongs.

Terms such as those defined in a commonly used dictionary should be interpreted as having a meaning consistent with the meaning of the related technology, and should not be interpreted as an ideal or excessively formal meaning unless explicitly defined in this specification. Shouldn't.

Hereinafter, a reflow device according to the present invention will be described in detail with reference to FIGS. 1 and 2.

FIG. 1 is an exemplary view showing the overall configuration of a laser reflow apparatus used to implement the laser reflow method of the present invention, and FIG. 2 is a block diagram of FIG. 1.

The laser pressurizing head module 300 of the laser reflow apparatus according to the present invention, as shown in FIGS. 1 and 2, includes a porous material having a structure capable of applying heat to a lower portion or a stage 111 having a vacuum hole. ) At least one multi-laser module (310, 320) for irradiating a surface light source type laser to the bonding object 11 that is supported and transported, and is installed independently from the laser module 310, 320, and is a surface light source It is configured to include a light-transmitting pressurizing member 100 for transmitting the type of laser, and a protective film 200 for protecting the light-transmitting pressurizing member 100 from contamination.

First, the plurality of multi-laser modules 310 and 320 convert a laser generated by a laser oscillator and transmitted through an optical fiber into a surface light source to irradiate the bonding object 11. The laser modules 310 and 320 include a beam shaper that converts a spot-shaped laser into a surface light source (see FIG. 5), and a surface light source that is disposed under the beam shaper and emitted from the beam shaper is a bonding object ( 11) to be irradiated to the irradiation area of the plurality of lens modules may be implemented by including an optical unit (see FIGS. 5 to 9) mounted to be spaced apart from each other at appropriate intervals inside the barrel.

The laser modules 310 and 320 may rise or fall along the z-axis, move left or right along the x-axis, or move along the y-axis for alignment with the bonding object 11.

The pressure head 300 of the laser reflow apparatus according to the present invention includes a translucent pressure member 100 that presses the bonding object 11 and a laser module 310 and 320 that irradiates a surface light source type laser to the bonding object 11. ) Are formed to be separated from each other, and the laser modules 310 and 320 are moved to a plurality of irradiation positions of the bonding object 11 while pressing the bonding object 11 with the translucent pressing member 100 and then driven. By doing so, it is possible to shorten the tact time for one bonding object 11 and speed up the bonding operation for all of the plurality of bonding objects 11.

At this time, the light-transmitting pressing member 100 is moved to a working position or a standby position by a predetermined type of a light-transmitting pressing member conveying unit (not shown). For example, the translucent pressing member conveying unit lowers or It can be raised or moved to the left or right and then lowered or raised.

In addition, although not shown in the drawings, the laser pressure head module 300 of the laser reflow apparatus according to the present invention uses data input from a pressure sensor (not shown) and a height sensor (not shown) It further includes a control unit (not shown) for controlling the operation of the transfer unit.

The pressure sensing sensor and the height sensor may be installed on the light-transmitting pressing member 100, the light-transmitting pressing member transfer unit, and the stage 111 supporting the bonding object. For example, the controller may receive data from the pressure sensor and control the light-transmitting pressurizing member transfer unit so that the pressure reaches the target value, and also control the light-transmitting pressurization member transfer unit to receive data from the height sensor and reach the target height.

In addition, the support (not shown) supports the translucent pressing member transfer unit (not shown) to be movable. For example, the support unit may be implemented as a pair of gantry extending parallel to the stage 111, and includes a configuration that supports the translucent pressing member transfer unit to be movable in the x-axis, y-axis, or z-axis. It should be interpreted as being.

The pressure head 300 of the laser reflow device according to the present invention includes at least one actuator for applying pressure to the translucent pressurizing member 100 and at least one pressure sensing sensor that senses the pressure applied to the translucent pressurizing member 100 and a translucent It may be implemented by including one or more height sensors for detecting the height of the pressing member. As an example, the pressure sensor may be implemented with at least one load cell, and the height sensor may be implemented with a linear encoder.

By adjusting the pressure applied to the object to be bonded through the pressure sensor, in the case of a large area, it is possible to control so that the same pressure can be transmitted to the object to be bonded through a plurality of actuators and a plurality of pressure sensors. Through the height sensor, it provides technical data to check the height position value at the moment when the object to be bonded is bonded or to find a more accurate value of the bonding height. It performs a function that can be controlled.

In addition, the translucent pressing member 100 may be implemented as a base material that transmits the laser output from the laser modules 310 and 320. The base material of the light-transmitting pressing member 100 can be implemented with any beam-transmitting material.

The base material of the light-transmitting pressing member 100 may be implemented by any one of quartz, sapphire, fused silica glass, or diamond, for example. However, the physical characteristics of the light-transmitting pressing member made of quartz material are different from the physical characteristics of the light-transmitting pressing member made of sapphire. For example, when irradiating a 980nm laser, the transmittance of the translucent pressing member made of quartz material is 85% to 99%, and the temperature measured at the bonding object is 100°C. On the other hand, the transmittance of the light-transmitting pressing member made of sapphire is 80% to 90%, and the temperature measured on the object to be bonded is 60°C.

That is, in terms of light transmittance and heat loss required for bonding, quartz exhibits superior performance than sapphire. However, as a result of repeatedly testing the translucent pressurizing member 100 while developing the laser reflow device, the inventors of the present application have found that the translucent pressurizing member 100 implemented with a quartz material cracks during laser bonding. It has been found that there is a problem in that the bonding quality is defective due to the occurrence of burning on the bottom surface. It was analyzed that gases generated during laser bonding adhered to the bottom surface of the light-transmitting pressurizing member 100, and the heat source of the laser was concentrated in a portion to which the gas was adhered, thereby increasing thermal stress.

In order to prevent damage to the light-transmitting pressurizing member 100 made of a quartz material and improve durability, a thin film coating layer may be formed on the bottom surface of the light-transmitting pressurizing member made of a quartz material. The thin film coating layer formed on the bottom surface of the light-transmitting pressing member 100 may be implemented as a conventional optical coating, such as dielectric coating, SiC coating, or metallic material coating.

In the laser pressurizing head module 300 of the laser reflow apparatus according to the present invention, as shown in FIG. 1, gases generated during laser bonding are transmitted to the lower portion of the translucent pressurizing member 100. ) Is implemented to further include a protective film 200 that prevents sticking to the bottom surface of the protective film 200 and a protective film transport unit 210 for transporting the protective film 200.

The protective film transfer unit 210 may be implemented in a reel-to-reel method in which the protective film 200 wound in a roll shape is released and transferred to one side. The protective film 200 is, for example, a maximum use temperature of 300 degrees Celsius or more, and a continuous maximum use temperature of 260 degrees or more, and is preferably implemented with a material having excellent heat resistance. For example, the protective film 200 may be implemented with polytetrafluoroethylene resin (commonly referred to as Teflon resin; Polytetrafluoroethylene, PTFE) or purple alkoxy resin. Per Fluoro Alkylvinyether copolymer (PFA) is a product that improves the heat resistance of fluorinated ethylene propylene resin, and it is a high-functional resin with the highest continuous use temperature recorded at 260 degrees Celsius like polytetrafluoroethylene resin.

3 is a conceptual diagram of a single laser beam module according to an embodiment of the present invention laser reflow method, and Figure 4 is a conceptual diagram of a dual laser module according to another embodiment of the present invention laser reflow method.

Referring to FIG. 3, the present invention includes a single laser module 310 according to an embodiment, and thus a single laser beam is irradiated on the FPCB substrate. In this case, referring to FIG. 3, the laser beam irradiated by the first laser module 310 is irradiated on the substrate in a state in which the intensity of the laser beam is transformed into a uniform square beam shape.

Meanwhile, referring to FIG. 4, a multi-laser module according to another embodiment of the present invention includes, for example, a first laser module 310 and a second laser module 320, and is an electronic component of the bonding object 11. At this attachment position, the first and second laser modules are irradiated in a superimposed state to irradiate a homogenized superimposed laser beam.

In FIG. 4, the first laser beam has a square shape and the second laser beam has a circular shape, but both laser beams may have a square shape. In addition, the first laser beam and the second laser beam may be irradiated at the same time, or the second laser beam may be sequentially irradiated after preheating of the bonding object 11 by the first laser beam.

5 is a block diagram of a dual laser module according to another embodiment of the laser reflow method of the present invention.

In Figure 5, each laser module (310, 320, ... 330) is a laser oscillator (311, 321, 331), each having a cooling device (316, 326, 336), beam shaper (312, 322, 332) , Optical lens modules 313, 323, 333, driving devices 314, 324, 334, control devices 315, 325, 335, and power supply units 317, 327, 337.

Hereinafter, except for a case where necessary, the first laser module 310 of each laser module having the same configuration will be mainly described in order to avoid redundant description.

The laser oscillator 311 generates a laser beam having a wavelength and output power in a predetermined range. The laser oscillator is, for example, a diode laser (Laser Diode, LD) having a wavelength of '750nm to 1200nm' or '1400nm to 1600nm' or '1800nm to 2200nm' or '2500nm to 3200nm', or a rare earth medium fiber laser (Rare-Earth- Doped Fiber Laser) or rare-earth-doped crystal laser (Rare-Earth-Doped Crystal Laser), alternatively, a medium for emitting alexandrite laser light having a wavelength of 755 nm, or Nd Yag (Nd) having a wavelength of 1064 nm or 1320 nm. :YAG) It may be implemented including a medium for emitting laser light.

The beam shaper 312 converts a spot-shaped laser generated in a laser oscillator and transmitted through an optical fiber into an area beam having a flat top. The beam shaper 312 may be implemented by including a Square Light Pipe, a Diffractive Optical Element (DOE), or a Micro-Lens Array (MLA).

The optical lens module 313 adjusts the shape and size of the laser beam converted to the surface light source form by the beam shaper to irradiate the electronic component or the irradiation area mounted on the PCB substrate. The optical lens module constitutes an optical system by combining a plurality of lenses, and a specific configuration of such an optical system will be described later in detail with reference to FIGS. 6 to 9.

The driving device 314 moves the distance and position of the laser module with respect to the irradiation surface, and the control device 315 controls the driving device 314 to control the beam shape and the beam area size when the laser beam reaches the irradiation surface. , Adjust the beam sharpness and beam irradiation angle. The control device 315 may also integrally control the operation of each unit of the laser module 310 in addition to the driving device 314.

Meanwhile, the laser power adjustment unit 370 is supplied to each laser module from the power supply units 317, 327, 337 corresponding to each laser module 310, 320, 330 according to a program received through a user interface or a preset program. Controls the amount of power to be used. The laser output adjustment unit 370 receives information on the reflow status of each part, area, or entire reflow on the irradiation surface from one or more camera modules 350 and controls each power supply unit 317, 327, 337 based on this. In contrast, the control information from the laser output control unit 370 is transmitted to the control devices 315, 325, 335 of each laser module (310, 320, 330), and each control device (315, 325, 335) It is also possible to provide a feedback signal for controlling the corresponding power supply unit 317. In addition, unlike FIG. 6, it is possible to distribute power to each laser module through one power supply unit. In this case, the power supply unit must be controlled by the laser output adjustment unit 370.

When implementing the laser superimposition mode, the laser power adjustment unit 370 includes each laser module and the laser module so that the laser beam from each laser module 310, 320, 330 has a required beam shape, a beam area size, beam sharpness, and beam irradiation angle. Controls the power supply units 317, 327, 337. In addition to the case of preheating the area around the debonding target location using the first laser module 310 and additionally heating the narrower reflow target area using the second laser module 320, the preheating function or The additional heating function is appropriately distributed among the first, second, and third laser modules 310, 320, ... 330 to control each laser module to have a required temperature profile.

Meanwhile, when a single laser light source is distributed and input to each laser module, a function for simultaneously adjusting the output and phase of each distributed laser beam may be provided in the laser output adjusting unit 370. In this case, the beam flatness can be remarkably improved by controlling the phase to induce destructive interference between the respective laser beams, thereby further increasing energy efficiency.

On the other hand, in the case of implementing a multi-position simultaneous processing mode, the laser power adjustment unit 370 is used to ensure that some or all of the laser beams from each laser module are different. Controls one or more of the angle and beam wavelength. Even at this time, when a single laser light source is distributed and input to each laser module, a function for simultaneously adjusting the output and phase of each distributed laser beam may be provided in the laser output adjusting unit 370.

Through this function, bonding between the electronic components in the irradiation surface and the substrate can be performed or the bonding can be removed by adjusting the laser beam size and output. In particular, in the case of removing damaged electronic components on the substrate, the application of heat by the laser beam to other adjacent electronic components or normal electronic components existing on the substrate can be minimized by minimizing the area of the laser beam to the corresponding electronic component area. Thus, it is possible to remove only the damaged electronic component to be removed.

On the other hand, in the case of emitting laser beams with different wavelengths for each of the plurality of laser modules, the laser module will absorb a plurality of material layers (e.g., EMC layer, silicon layer, solder layer) included in the electronic component. It can be composed of individual laser modules with wavelengths. Accordingly, the laser debonding device according to the present invention selectively increases the temperature of the electronic component and the temperature of the intermediate bonding material such as solder, which is a connection material between the printed circuit board or the electrode of the electronic component. Bonding) or separation (detaching or debonding) process may be performed. Specifically, by transmitting both the EMC mold layer and the silicon layer of the electronic component, all the energy of each laser beam is absorbed into the solder layer, or the laser beam does not penetrate the EMC mold layer and heats the surface of the electronic component to It is also possible to conduct heat to the bonding portion of.

Meanwhile, by utilizing the above functions, a predetermined area of the electronic component to be reflowed and a predetermined area of the substrate including the periphery thereof is preheated to a predetermined preheating temperature by at least one first laser beam, and then the at least one second laser beam is applied. Accordingly, the temperature of the electronic component region to be reflowed is selectively heated up to the reflow temperature at which solder melting occurs.

6 to 9 are configuration diagrams of a laser optical system applicable to a single laser beam or a multi-laser module of the laser reflow method of the present invention.

6 is an optical system having the simplest structure applicable to the present invention. When the laser beam emitted from the beam transmission optical fiber 410 is focused through the convex lens 420 and incident on the beam shaper 430, the beam shaper 430 ), the spot-shaped laser beam is converted into a flat-top type surface light source (A1), and the square laser beam (A1) output from the beam shaper 430 is the desired size through the concave lens 440 The image-forming surface S is irradiated with the enlarged surface light source A2.

7 is a block diagram of a laser optical system according to another embodiment of the present invention.

The surface light source B1 from the beam shaper 430 is enlarged to a predetermined size through the concave lens 440 to become a surface light source B2 irradiated to the first imaging surface S1. When the surface light source (B2) is to be further enlarged and used, the boundary of the edge portion of the surface light source (B2) may become more unclear according to the additional enlargement, so that the final irradiation surface is the second imaging surface (S2). ) Also, in order to obtain irradiation light with a clear edge, a mask 450 is installed on the first imaging surface S1 to trim the edge.

The surface light source passing through the mask 450 is reduced (or enlarged) to a desired size while passing through the zoom lens module 460 composed of a combination of at least one convex lens and a concave lens, and the second imaging surface on which the electronic component is placed Square irradiation light B3 is formed in (S2).

8 is a block diagram of a laser optical system according to another embodiment of the present invention.

After the square surface light source C1 from the beam shaper 430 is enlarged to a predetermined size through the concave lens 440, it is enlarged (or reduced) in the x-axis direction while passing through at least a pair of cylindrical lenses 470 (C2) and again passing through at least a pair of cylindrical lenses 480, for example, it is reduced (or enlarged) in the y-axis direction and converted into a rectangular surface light source C3.

Here, the cylindrical lens is a shape obtained by cutting a cylindrical shape in the longitudinal direction, and functions to expand or reduce the laser beam according to the shape in which each lens is arranged in the vertical direction, and the lens on the surface on which the cylindrical lens is placed is x, y Depending on the shape arranged in the axial direction, the laser beam is adjusted in the x-axis or y-axis direction.

Subsequently, the surface light source C3 is enlarged (or reduced) to a desired size while passing through the zoom lens module 460 composed of a combination of at least one convex lens and a concave lens, and the second imaging surface S2 on which the electronic component is disposed. ) To form a rectangular irradiation light C4.

9 is a configuration diagram of a laser optical system according to another embodiment of the present invention.

It is understood that the optical system of FIG. 9 has a configuration for trimming the edge of the laser beam by applying a mask to the optical system of FIG. 8, and it is understood that a final surface light source D5 having a sharper edge can be obtained compared to the case of FIG. 8. I will be able to.

FIG. 10 is a state diagram showing an operation relationship for each step of the laser reflow method of the present invention. Hereinafter, a laser reflow method for each step will be described according to an embodiment.

First, FIG. 10A is a diagram showing a state in which the light-transmitting pressing member 100 is moved above the center line (Cn+1). When the pressing surface 102 of the light-transmitting pressing member 100 is positioned at the center line (Cn+1), the vision unit The electronic components 11b located under the pressing surface 102 of the translucent pressing member 100 are photographed by 934. At this time, in the vision unit 934, when viewed from the side as shown in FIG. 10A, the electronic components 11b are left and right symmetrical with respect to the center line (Cn+1) of the pressing surface 102 of the translucent pressing member 100. It is determined whether it is placed as

That is, whether the electronic components 11b positioned directly under the pressing surface 102 of the translucent pressing member 100 are positioned to correspond to the area of the pressing surface 102, for example, as in FIG. 10A. In a state in which the electronic components 11b are arranged in three rows, it is determined whether the electronic components 11b are arranged symmetrically by 1.5 rows by the center line (Cn+1) of the pressing surface 102. Accordingly, when the pressing surface 102 of the translucent pressing member 100 presses the range (area) in which the electronic components 11b are arranged in three rows, the pressure is pressed in a balanced manner without being biased to either side. You will be able to.

In addition, referring to the drawings, the electronic components 11b of the bonding object 11 are arranged in a position to be bonded together with the solder 11c for bonding on the upper surface of the substrate 11a. At this time, the substrate 11a The silver is vacuum-adsorbed and fixed by the vacuum chuck 940 underneath. At this time, as the heating block 942 is provided inside the vacuum chuck 940, the substrate 11a, the electronic component 11b, and the solder 11c, which are the bonding object 11, are continuously kept at a predetermined temperature. Preheat. For example, the preheating temperature is preferably set to be less than the melting temperature of the solder, and for example, even if the substrate 11a and the electronic component 11b are exposed for a certain period of time or longer, the temperature range in which thermal damage is not applied is maintained below 200°C. I can.

If the bonding object 11 is not preheated as described above, the bonding object 11 must be rapidly heated from room temperature to the melting temperature of the solder 11c only with the thermal energy of the laser beam during the laser reflow treatment. Bonding defects such as overflow may be caused in the solder 11c due to rapid heating. Therefore, as the temperature is increased stepwise from the preheating temperature to the melting temperature of the solder 11c, the solder 11c is stably melted, thereby minimizing bonding defects. For example, the melting temperature of the solder 11c may vary depending on the material of the solder, but may be 200°C or higher, which is a melting temperature of a general solder paste.

10B is a state diagram in which the light-transmitting pressing member 100 is pressed and laser irradiated at the center line (Cn+1). As shown in FIG. 10A, the pressing surface 102 of the light-transmitting pressing member 100 by the vision unit 934 When it is determined that the center line Cn+1 coincides with the center lines of the electronic components 11b to be bonded, the light-transmitting pressing member 100 moves downward and presses the electronic component 11b.

At this time, the laser beam may be irradiated simultaneously or sequentially with the pressing of the translucent pressing member 100, for example, a multi-laser module or a first laser module positioned above the translucent pressing member 100 The laser beam from 310 and the second laser module 320 may be superimposed and irradiated onto the electronic components 11b.

Accordingly, the bonding object 11 is gradually heated from the preheating temperature to the melting temperature of the solder 11c by the overlapping irradiated laser beam, and eventually the solder 11c located under the electronic components 11b is removed. As it melts, bonding of the electronic component 11b to the substrate 11a is completed. (The difference in height before bonding and after bonding is indicated by h _c in Fig. 10A)

10C is a state diagram in which the light-transmitting pressing member has been moved above the center line (Cn+2), FIG. 10D is a state in which the light-transmitting pressing member has been corrected to a new center line (Cn+2'), and FIG. It is a state diagram of pressurization and laser irradiation at the center line (Cn+2').

Referring to FIG. 10C, after the above laser reflow process is completed, the translucent pressing member 100 presses and laser reflows the electronic components 11b in the next predetermined range. It moves horizontally to the center line (Cn+2) of the parts 11b. At this time, the vision unit 934 again photographs the arrangement shape of the electronic components 11b disposed under the pressing surface 102 of the translucent pressing member 100.

However, at this time, as shown in FIG. 10C, the electronic components 11b disposed under the pressing surface 102 of the light-transmitting pressing member 100 are not arranged symmetrically with respect to the center line (Cn+2). If it is determined, pressurization and laser irradiation are not immediately performed. The reason is that when pressing the light-transmitting pressing member 100 in this state, the electronic components 11b are asymmetrically arranged based on the center line (Cn+2) of the pressing surface 102 of the light-transmitting pressing member 100. Therefore, when pressing, the pressing force is biased to one side, which causes bonding failure.

Therefore, in the present invention, in order to prevent this, the control unit (not shown) moves the translucent pressing member 100 to a new center line (Cn+2') horizontally as shown in FIG. 10D, and the corrected center line ( Cn+2'), the horizontal position of the translucent pressing member 100 is corrected. Accordingly, the horizontal position is corrected so that the electronic components 11b disposed under the light-transmitting pressing member 100 are symmetrically disposed with respect to the corrected center line (Cn+2'), and in this state, as shown in FIG. 10E. The translucent pressing member 100 moves downward to pressurize the electronic components 11b and irradiate a laser beam.

On the other hand, referring to FIG. 10E, the translucent pressing member 100 moves to the corrected center line (Cn+2') to pressurize, but at this time, the first and second laser modules 310 and 320 are the corrected center line. The laser beam is irradiated based on the center line (Cn+2) before correction without correcting the horizontal position with (Cn+2').

As described above, the reason why the laser modules 310 and 320 do not correct the horizontal position along the translucent pressing member 100 is that when the laser beam is irradiated based on the corrected center line (Cn+2'), bonding has already been completed. There is a possibility that the laser beam is irradiated to the electronic components 11b again, and when the laser beam is re-irradiated to the reflow-treated solder 11c, the solder 11c may be melted again, resulting in a bonding failure. Because it can. Therefore, in the present invention, when pressing and laser irradiating the electronic components 11b arranged asymmetrically, only the translucent pressing member 100 is corrected without correcting the position of the first or second laser modules 310 and 320. After correcting the position by moving horizontally to 2′), it is possible to minimize the occurrence of various bonding defect factors as described above by applying pressure and irradiating the laser.

In addition, the present invention is not limited only by the above-described embodiment, and since the same effect can be created even when the detailed configuration, number, and arrangement structure of devices are changed, those of ordinary skill in the art can create the present invention. It is stated that various configurations can be added, deleted, and modified within the scope of the technical idea of

11: bonding object 11a: substrate
11b: electronic component 11c: solder
100: permeable pressing member 102: pressing surface
200: protective film 210: protective film transfer unit
310: first laser module 320: second laser module
500: holder unit 934: vision unit
940: vacuum chuck 942: heating block

Claims (9)

Laser reflow method of a laser reflow apparatus for bonding electronic components to a substrate by pressing and pressing a bonding object on which a plurality of electronic components are disposed on a rectangular substrate with a translucent pressing member and irradiating a laser beam through the pressing member In,
a) before the light-transmitting pressurizing member presses the bonding object, the vision unit photographs a shape in which electronic components in a predetermined range located directly below the pressing surface of the light-transmitting pressurizing member are arranged;
b) determining whether a shape in which the photographed electronic components in a predetermined range are arranged is positioned to correspond to a pressing surface;
c) if it is determined that the electronic components are positioned to correspond to the pressing surface, the translucent pressing member is moved downward to press the bonding object and irradiating a laser beam to the bonding object through the translucent pressing member;
d) stopping the irradiation of the laser beam and releasing the pressurized state by moving the translucent pressurizing member upward; And
e) horizontally moving the light-transmitting pressing member upward in a predetermined range of electronic components to be reflowed in the next order,
Step b),
b1) determining whether the electronic components are positioned symmetrically with respect to the center line of the pressing surface of the light-transmitting pressing member when the shape in which the photographed electronic components in a predetermined range are arranged is viewed from the side; And b2) if the shape in which the photographed electronic components are arranged is positioned symmetrically with respect to the center line of the pressing surface of the light-transmitting pressing member, it is determined that they are positioned to correspond to the pressing surface. Including the step of adjusting the horizontal position of the light-transmitting pressing member so that the shape in which the parts are arranged is positioned symmetrically with respect to the center line of the pressing surface of the light-transmitting pressing member,
Laser reflow method of laser reflow device. delete The method of claim 1,
The laser beam is irradiated by overlapping laser beams from two or more laser modules,
Laser reflow method of laser reflow device. The method of claim 3,
Each of the laser modules are arranged symmetrically to each other and each of the laser beams have the same beam irradiation angle,
Laser reflow method of laser reflow device. The method of claim 3,
A laser beam is simultaneously irradiated from each of the laser modules,
Laser reflow method of laser reflow device. The method of claim 3,
The laser beam is sequentially irradiated from each of the laser modules,
Laser reflow method of laser reflow device. The method of claim 1,
Preheating the bonding object from the bottom prior to the step c) further comprising,
Laser reflow method of laser reflow device. The method of claim 7,
The step of preheating the bonding object from the bottom is to maintain the surface temperature of the bonding object below 200°C,
Laser reflow method of laser reflow device. The method of claim 1,
Heating the surface temperature of the bonding object to 200° C. or higher by irradiating a laser beam to the bonding object through the translucent pressing member in the step c)
Laser reflow method of laser reflow device.

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