KR102174254B1 - Manifold assembly and chemical sampling apparatus having the same - Google Patents

Abstract

An embodiment relates to a manifold assembly, which includes: a body in which a common chamber is formed; a first chemical flow path connected to the common chamber and supplying a first chemical; a first valve selectively opening and closing the first chemical flow path; a second chemical flow path connected to the common chamber and supplying a second chemical; a second valve selectively opening and closing the second chemical flow path; and a discharge flow path connected to the common chamber and discharging the first chemical or the second chemical introduced into the common chamber to the outside of the body, thereby simplifying processes of discharging, cleaning, and sampling the chemicals and improving stability and reliability.

Description

Manifold assembly and chemical sampling device having the same {MANIFOLD ASSEMBLY AND CHEMICAL SAMPLING APPARATUS HAVING THE SAME}

The embodiment relates to a manifold assembly and a chemical sampling apparatus having the same, and to a manifold assembly capable of simplifying a chemical discharge, cleaning, and sampling process and improving stability and reliability, and a chemical sampling apparatus having the same.

Companies that handle chemicals that are harmful to the human body, for example, companies that manufacture semiconductors, LCDs, OLEDs, pharmaceuticals, etc., or companies that manufacture chemicals such as paint companies, use various types of chemicals in one or more unit processes. have.

In general, chemicals are supplied to the main storage tank through a tank lorry, and some of the chemicals stored in the main storage tank are divided and stored in a plurality of sub storage tanks, so that they are sequentially supplied to one unit process or individually to a plurality of unit processes. Can be supplied.

As another example, if the chemical is small or if the tank lorry cannot be used due to the characteristics of the chemical itself, it may be directly supplied to the sub storage tank through a drum or a bottle.

On the other hand, if chemicals are contaminated in tank lorries, drums, bottles, storage tanks, piping, etc., defects are caused in the unit process receiving them, so chemical contamination is managed at an appropriate level at each major location such as tank lorries, drums, bottles, storage tanks, and piping It should be possible.

Accordingly, recently, a sampling device for sampling chemicals at key locations such as tank lorries, drums, bottles, storage tanks, and pipes has been developed.

However, conventionally, in order to discharge, clean, and sample chemicals at key locations, the operator must place the sampling bottle exactly at the nozzle position of the desired drug among the nozzle positions of several drugs. In addition, since it is necessary to accurately manipulate a desired valve among several valves of the connected sampling line to discharge, clean, and sample the chemical, there is a problem of cumbersome and inconvenient processes of discharging, cleaning and sampling the chemical.

In addition, if the sampling bottle is placed in the wrong position or the wrong valve is operated due to an operator's mistake when placing the sampling bottle at the nozzle position of the desired chemical, the chemical is exposed to the bottom of the sampling bottle or There is a problem in that an operator is exposed to chemicals while moving the sampling bottle.

In addition, in order to solve this problem, if the rear end pipes of several valves are tied together to make the location where the sampling bottle is placed into one, the residual chemicals are accumulated in the space from the rear end of each valve to the bundled pipes, so the contamination level when sampling different chemicals is performed. And there is a problem that affects the component analysis results.

Accordingly, in recent years, various reviews have been made to simplify the chemical sampling process and to improve stability and reliability, but development thereof is urgently required because it is still insufficient.

An object of the embodiment is to provide a manifold assembly capable of simplifying a chemical discharge, cleaning and sampling process and improving stability and reliability, and a chemical sampling apparatus having the same.

In particular, the embodiment aims to enable a chemical supplied from a plurality of sampling lines to be discharged, cleaned, and sampled in one place.

In addition, the embodiment aims to minimize contamination and purity of chemicals and errors in analysis results in discharging, cleaning, and sampling chemicals supplied from different sampling lines.

In addition, the embodiment aims to improve the accuracy of chemical contamination and component analysis.

In addition, the embodiment aims to simplify the structure and improve space utilization.

The problems to be solved in the examples are not limited thereto, and the objectives and effects that can be grasped from the solutions or embodiments of the problems described below are also included.

The manifold assembly according to a preferred embodiment of the present invention for achieving the above-described objects of the present invention includes: a body having a common chamber formed therein; A first chemical passage connected to the common chamber and supplying the first chemical; A first valve selectively opening and closing the first chemical flow path; A second chemical flow channel connected to the common chamber and supplying a second chemical; A second valve selectively opening and closing the second chemical flow path; And a discharge passage communicating with the common chamber and discharging the first chemical or the second chemical introduced into the common chamber to the outside of the body.

This is to simplify the chemical discharge, cleaning and sampling process, and to improve stability and reliability.

In the embodiment, since it is not necessary to move the sampling bottle containing the chemical in each major position, it is possible to obtain an advantageous effect of minimizing chemical exposure to an operator and improving stability and reliability.

The first chemical flow path may be formed in a variety of structures capable of supplying the first chemical to the common chamber.

As an example, the first chemical passage is formed in the body and is a first supply passage through which the first chemical is supplied, a first inflow passage formed on the side of the body in communication with the common chamber, and the first supply passage and the first inflow passage It is formed on the side of the body to communicate with and includes a first guide passage for guiding the first chemical to the first inflow passage.

Preferably, the first supply passage includes a first vertical passage formed on an upper surface of the body, and a first horizontal passage formed on a side surface of the body in communication with the first vertical passage.

The first valve may be formed in various structures capable of selectively opening and closing the first chemical flow path, and the present invention is not limited or limited by the type and structure of the first valve.

For example, the first valve is a valve body disposed to cover the first guide channel, a cylinder member provided to be linearly movable on the valve body in a direction approaching and spaced apart from the wall surface of the first guide channel, and pressurized by the cylinder member. And optionally a diaphragm in close contact with the wall surface of the first guide channel.

The second chemical flow path may be formed in a variety of structures capable of supplying the second chemical to the common chamber.

As an example, the second chemical passage is formed in the body and is a second supply passage through which the second chemical is supplied, a second inflow passage formed on the side of the body in communication with a common chamber, and a second supply passage and a second inflow passage It is formed on the side of the body to communicate with and includes a second guide passage for guiding the second chemical to the second inflow passage.

Preferably, the second supply passage includes a second vertical passage formed on the upper surface of the body, and a second horizontal passage formed on the side of the body in communication with the second vertical passage.

The second valve may be formed in a variety of structures capable of selectively opening and closing the second chemical flow path, and the present invention is not limited or limited by the type and structure of the second valve.

As an example, the second valve is a valve body disposed to cover the second guide channel, a cylinder member provided to be linearly moved to the valve body in a direction approaching and spaced apart from the wall surface of the second guide channel, and pressurized by the cylinder member. And optionally a diaphragm in close contact with the wall surface of the second guide channel.

According to a preferred embodiment of the present invention, the manifold assembly may include a third chemical passage connected to the common chamber and supplying the third chemical, and a third valve selectively opening and closing the third chemical passage.

The third chemical flow path may be formed in a variety of structures capable of supplying the third chemical to the common chamber.

As an example, the third chemical passage is formed in the body, and the third supply passage through which the third chemical is supplied, a third inflow passage formed on the side of the body in communication with the common chamber, and the third supply passage and the third inflow passage It is formed on the side of the body to communicate with and includes a third guide passage for guiding the third chemical to the third inflow passage.

Preferably, the third supply passage includes a third vertical passage formed on the upper surface of the body, and a third horizontal passage formed on the side of the body so as to communicate with the third vertical passage.

The third valve may be formed in various structures capable of selectively opening and closing the third chemical flow path, and the present invention is not limited or limited by the type and structure of the third valve.

For example, the third valve is a valve body disposed to cover the third guide channel, a cylinder member provided to be linearly movable on the valve body in a direction approaching and spaced apart from the wall surface of the third guide channel, and pressurized by the cylinder member. And optionally a diaphragm in close contact with the wall of the third guide channel.

According to a preferred embodiment of the present invention, a first inclined guide surface is formed on the wall surface of the first inflow channel, and the first inclined guide surface allows the first chemical flowing into the first inflow channel to pass through the center of the common chamber. You can guide it in an inclined way.

In addition, a second inclined guide surface is formed on the wall surface of the second inflow passage, and the second inclined guide surface may guide the second chemical flowing into the second inflow passage inclined with respect to the reference line passing through the center of the common chamber.

In addition, a third inclined guide surface is formed on the wall surface of the third inflow passage, and the third inclined guide surface may guide the third chemical flowing into the third inflow passage inclined with respect to the reference line passing through the center of the common chamber.

In this way, the first to third chemicals flowing into the first inflow passage, the second inflow passage, and the third inflow passage pass through the center of the common chamber along the first inclined guide surface, the second inclined guide surface, and the third inclined guide surface. Since the chemical introduced into the common chamber can forcibly form a vortex-shaped vortex by guiding it obliquely with respect to the reference line, it has an advantageous effect of more effectively removing residual chemicals that may remain in the common chamber and the inflow passage. Can be obtained.

In other words, by allowing the chemical introduced into the common chamber to form a vortex in the form of a vortex, it is possible to minimize the phenomenon that the chemical is discharged in a state that is concentrated to a specific area in the common chamber, so that it will remain in the common chamber and the inlet flow path. It is possible to obtain an advantageous effect of removing possible residual chemicals more effectively.

According to another preferred field of the present invention, a chemical sampling device includes: a first sampling line for supplying a first chemical; A second sampling line supplying a second chemical; And a body having a common chamber formed therein, a first sampling line is connected, a first chemical flow channel supplying a first chemical to the common chamber, a first valve selectively opening and closing the first chemical flow channel, and a second sampling line are connected. A second chemical flow path that supplies a second chemical to the common chamber, a second valve that selectively opens and closes the second chemical flow path, and the first chemical or the second chemical flowing into the common chamber through communication with the common chamber to the outside of the body. It includes; a manifold assembly including a discharge passage to discharge.

According to a preferred embodiment of the present invention, the first chemical passage is formed in the body and the first supply passage through which the first chemical is supplied; A first inflow passage formed on the side of the body to communicate with the common chamber; And a first guide passage formed on the side of the body so as to be in communication with the first supply passage and the first inflow passage, and guiding the first chemical to the first inflow passage, wherein the first valve is an outlet of the first supply passage And selectively opening and closing the inlet of the first inflow passage, the second chemical passage, a second supply passage formed in the body and supplied with the second chemical; A second inflow passage formed on the side of the body to communicate with the common chamber; And a second guide passage formed on the side of the body so as to be in communication with the second supply passage and the second inlet passage, and guiding the second chemical to the second inlet passage, wherein the second valve is an outlet of the second supply passage And the entrance of the second inflow passage are selectively opened and closed.

According to a preferred embodiment of the present invention, the first supply flow path includes: a first vertical flow path formed on an upper surface of the body; And a first horizontal passage formed on the wall surface of the first guide passage in communication with the first vertical passage, wherein an end of the first horizontal passage forms an outlet of the first supply passage on the wall surface of the first guide passage, The second supply passage may include a second vertical passage formed on an upper surface of the body; And a second horizontal passage formed on the wall surface of the second guide passage so as to be in communication with the second vertical passage, wherein the end of the second horizontal passage forms an outlet of the second supply passage on the wall surface of the second guide passage.

According to a preferred embodiment of the present invention, after sampling the first chemical, before sampling the second chemical, the second chemical is drained through the common chamber.

In this way, after the first chemical is sampled, the second chemical is not immediately sampled, and the second chemical is drained through the common chamber for a predetermined time (or by a predetermined flow rate), thereby remaining remaining in the common chamber. It is possible to obtain advantageous effects of minimizing contamination of the second chemical due to the chemical (the first chemical) and reduction of purity, errors in analysis results, and improving the reliability of chemical contamination and component analysis.

As described above, according to the embodiment of the present invention, it is possible to obtain advantageous effects of simplifying chemical discharge, cleaning, and sampling processes, and improving stability and reliability.

In particular, according to the embodiment of the present invention, it is possible to obtain an advantageous effect of discharging, cleaning and sampling chemicals supplied from a plurality of sampling lines in one place.

In addition, according to an embodiment of the present invention, in discharging, cleaning and sampling chemicals supplied from different sampling lines, it is possible to obtain an advantageous effect of minimizing contamination and purity of chemicals and errors in analysis results.

In addition, according to the embodiment of the present invention, it is possible to obtain an advantageous effect of improving the degree of chemical contamination and the accuracy of the component analysis operation.

In addition, according to the embodiment of the present invention, advantageous effects of simplifying the structure and improving space utilization can be obtained.

1 is a view for explaining a chemical storage facility according to an embodiment of the present invention.
2 is a view for explaining a manifold assembly according to an embodiment of the present invention.
3 is a view for explaining a discharge passage as a manifold assembly according to an embodiment of the present invention.
4 is a view for explaining a guide passage as a manifold assembly according to an embodiment of the present invention.
5A is a cross-sectional view illustrating a first chemical flow path as a manifold assembly according to an embodiment of the present invention.
5B is a view showing a conventional structure in which a plurality of sampling lines are connected to one discharge channel.
6 is a cross-sectional view illustrating a second chemical flow path as a manifold assembly according to an embodiment of the present invention.
7 is a cross-sectional view illustrating a third chemical flow path as a manifold assembly according to an embodiment of the present invention.
8 and 9 are views for explaining an operation structure of a valve as a manifold assembly according to an embodiment of the present invention.
10 is a view for explaining an inclined guide surface as a manifold assembly according to an embodiment of the present invention.

Hereinafter, exemplary embodiments of the present invention will be described in detail with reference to the accompanying drawings.

However, the technical idea of the present invention is not limited to some embodiments to be described, but may be implemented in a variety of different forms, and within the scope of the technical idea of the present invention, one or more of the components may be selectively selected between the embodiments. It can be combined with and substituted for use.

In addition, terms (including technical and scientific terms) used in the embodiments of the present invention are generally understood by those of ordinary skill in the art, unless explicitly defined and described. It can be interpreted as a meaning, and terms generally used, such as terms defined in a dictionary, may be interpreted in consideration of the meaning in the context of the related technology.

In addition, terms used in the embodiments of the present invention are for describing the embodiments and are not intended to limit the present invention.

In the present specification, the singular form may include the plural form unless specifically stated in the phrase, and when described as "at least one (or more than one) of A and (and) B and C", it is combined with A, B, and C. It may contain one or more of all possible combinations.

In addition, in describing the constituent elements of an embodiment of the present invention, terms such as first, second, A, B, (a), and (b) may be used.

These terms are only for distinguishing the component from other components, and are not limited to the nature, order, or order of the component by the term.

And, when a component is described as being'connected','coupled' or'connected' to another component, the component is not only directly connected, coupled or connected to the other component, but also the component and It may also include a case of being'connected','coupled' or'connected' due to another element between the other elements.

In addition, when it is described as being formed or disposed on the "top (top) or bottom (bottom)" of each component, the top (top) or bottom (bottom) is not only when the two components are in direct contact with each other, but also one It includes a case in which the above other component is formed or disposed between the two components. In addition, when expressed as "upper (upper) or lower (lower)", the meaning of not only an upward direction but also a downward direction based on one component may be included.

Referring to Figures 1 to 9, the manifold assembly 100 according to an embodiment of the present invention, a body 110 in which the common chamber 112 is formed; A first chemical passage 120 connected to the common chamber 112 and supplying a first chemical; A first valve 152 for selectively opening and closing the first chemical flow path 120; A second chemical passage 130 connected to the common chamber 112 and supplying a second chemical; A second valve 154 selectively opening and closing the second chemical flow path 130; And a discharge channel 114 communicating with the common chamber 112 and discharging the first chemical or the second chemical introduced into the common chamber 112 to the outside of the body 110.

For reference, the manifold assembly 100 according to an embodiment of the present invention is provided to collect chemicals supplied from the sampling lines L1, L2, and L3. As an example, the manifold assembly 100 may be mounted on the chemical storage facility 1 to constitute a chemical sampling device 10 for sampling chemicals at key locations such as tank lorries, drums, bottles, storage tanks, and pipes. have.

Referring to FIG. 1, the chemical storage facility 1 includes an ACQC unit 2, a first chemical storage tank 3, a chemical distribution device 4, and a plurality of second chemical storage tanks 5 and 6 can do.

The ACQC unit (Automatic Clean Quick Coupler Unit) (2) delivers the chemicals supplied from the tank lorry to the first chemical storage tank (3), and the chemical distribution device (4) is among the chemicals stored in the first chemical storage tank (3). A part is divided and supplied to a plurality of second chemical storage tanks (5,6).

For example, the chemical sampling device 10 is connected to each chemical storage tank 3, 5, 6 through a plurality of sampling lines (L1, L2, L3), and each sampling line (L1, L2, L3) has a chemical An on-off valve (V) and a pump (P) for controlling the transfer may be provided.

According to another embodiment of the present invention, it is possible to supply a gas (for example, nitrogen or air) to the chemical source so that the chemical of the chemical source is transferred through the sampling line.

In the embodiment of the present invention, an example in which the sampling lines (L1, L2, L3) are connected to a chemical storage tank is described, but according to another embodiment of the present invention, the sampling line is a tank lorry, a drum, a bottle, a storage tank, and a pipe. The present invention is not limited or limited by the object or location to which the sampling line is connected, and may be connected to all kinds of chemical supply sources for supplying, storing or transferring chemicals, such as.

According to a preferred embodiment of the present invention, the manifold assembly 100 independently opens and closes a plurality of chemical passages 120, 130 and 140 to which a plurality of sampling lines L1, L2, and L3 are individually connected, and each chemical passage 120, 130, 140 It includes a plurality of valves (152, 154, 156).

Hereinafter, an example in which three chemical passages are formed in the manifold assembly 100 and three sampling lines L1, L2, and L3 are connected to each chemical passage will be described. According to another embodiment of the present invention, two or four or more sampling lines may be connected to the manifold assembly, and the present invention is not limited or limited by the number of sampling lines (the number of chemical channels).

More specifically, referring to FIGS. 2 to 9, the manifold assembly 100 is connected to the body 110 and the common chamber 112 in which the common chamber 112 is formed, and supplies the first chemical. 1 chemical channel 120, the first valve 152 for selectively opening and closing the first chemical channel 120, the second chemical channel 130 connected to the common chamber 112 and supplying the second chemical, the second The second valve 154 selectively opening and closing the guide passage 136, the third chemical passage 140 connected to the common chamber 112 and supplying the third chemical, and the third chemical passage 140 selectively open and close The third valve 156 that communicates with the common chamber 112 and the chemical (one of the first chemical, the second chemical, and the third chemical) flowing into the common chamber 112 is transferred to the outside of the body 110. It includes a discharge passage 114 to discharge.

A common chamber 112 in which a chemical (one of a first chemical, a second chemical, and a third chemical) is accommodated is formed inside the body 110.

The body 110 may be formed in various structures having a common chamber 112 therein, and the present invention is not limited or limited by the shape and structure of the body 110. For example, the body 110 may be formed to have an approximately triangular cross-sectional shape.

The common chamber 112 is provided to form a closed accommodation space in which chemicals are accommodated in the body 110.

The common chamber 112 may be formed in a variety of structures capable of accommodating chemicals, and the present invention is not limited or limited by the structure and shape of the common chamber 112.

For example, the common chamber 112 may be formed to have an approximately circular block shape and may be disposed at the center of the body 110. According to another embodiment of the present invention, it is also possible to form the common chamber to have a square block shape or other shape.

Preferably, the inner wall surface of the common chamber 112 is formed in a curved shape. Here, that the inner wall of the common chamber 112 is formed in a curved shape, it is understood that the common chamber 112 is formed in a circular block shape or an elliptical block shape.

In this way, by forming the inner wall surface of the common chamber 112 in a curved shape, the chemical introduced into the common chamber 112 is prevented from remaining on the inner wall surface (for example, a corner portion) of the common chamber 112 Advantageous effects of minimizing can be obtained.

The first chemical flow path 120 is connected to the common chamber 112 and is provided to supply the first chemical to the common chamber 112.

The first chemical passage 120 may be formed in various structures capable of supplying the first chemical to the common chamber 112.

For example, referring to FIG. 5A, the first chemical passage 120 is formed in the body 110 and communicates with the first supply passage 122 and the common chamber 112 through which the first chemical is supplied. ) Formed on the side of the body 110 to communicate with the first inflow passage 124, and the first supply passage 122 and the first inflow passage 124, and the first chemical into the first inflow passage It includes a first guide passage 126 that guides to 124.

Preferably, the first supply passage 122 is in communication with the first vertical passage 122a formed on the upper surface of the body 110 (as shown in FIG. 2), and the first vertical passage 122a. It is formed in an approximately "L" shape including the first horizontal flow path 122b formed on the side surface. According to another embodiment of the present invention, it is possible to form a first horizontal passage on the side of the body and to form a first vertical passage on the upper surface (or bottom) of the body.

The first inflow passage 124 communicates with the side of the common chamber 112 so as to pass through the side of the body 110. That is, one end of the first inflow passage 124 communicates with the side of the common chamber 112, and the other end of the first inflow passage 124 is exposed on the side of the body 110. For example, the first inflow passage 124 may be formed to face the center of the common chamber 112 along a reference line passing through the center of the common chamber 112.

The first guide passage 126 is formed on the outer surface (for example, the side) of the body 110 to communicate the first supply passage 122 and the first inflow passage 124, and the first supply passage 122 ) To guide the first chemical supplied to the first inflow passage 124.

More specifically, the first guide passage 126 is formed in a concave dome shape on one side of the body 110 so as to be disposed between the side surface of the body 110 and the first valve 152 to be described later, The outlet of the first supply passage 122 (the outlet of the first horizontal passage 122b) and the inlet of the first inflow passage 124 are located on the first guide passage 126.

Here, that the outlet of the first horizontal passage 122b and the inlet of the first inflow passage 124 are located on the first guide passage 126 means that the outlet of the first horizontal passage 122b and the first inflow passage It is defined that the inlet of 124 is exposed to the wall surface of the first guide passage 126 facing the first valve 152.

The first valve 152 is provided to selectively open and close the first chemical flow path 120.

Preferably, the first valve 152 is provided to selectively open and close the outlet of the first supply passage 122 and the inlet of the first inflow passage 124.

For reference, when the first valve 152 blocks the outlet of the first supply passage 122 and the inlet of the first inflow passage 124, the first supply passage 122 and the first inflow passage 124 Can be completely separated spatially. The first valve 152 may block an outlet of the first supply passage 122 and/or an inlet of the first inflow passage 124.

Accordingly, the supply of the first chemical through the first sampling line L1 may be stopped by blocking the first chemical from flowing into the first inflow passage 124 by the first valve 152. Accordingly, it is possible to block the first chemical from flowing into the common chamber 112 any more.

The first chemical remaining in the common chamber 112, the discharge passage 114, and the first inflow passage 124 may be cleaned using other chemicals. For example, when the supply of the first chemical through the first sampling line (L1) is stopped, and the second chemical (or the third chemical through the third sampling line) is supplied through the second sampling line (L2). By discharging a certain amount of the second chemical (or the third chemical), the first chemical remaining in the common chamber 112, the discharge passage 114, and the first inflow passage 124 may be cleaned. The second and third chemicals remaining in the common chamber 112, the discharge passage 114, and the first inlet passage 124 may be cleaned in the same manner.

However, the present invention is not limited thereto, and chemicals remaining in the common chamber 112 and the discharge passage 114 may be cleaned using washing water. Exemplarily, when washing water is connected to the third sampling line L3, the washing water is ejected through the third sampling line L3 immediately after use of the first chemical, and the common chamber 112, the discharge passage 114, and Chemicals remaining in the first inflow passage 124 may be cleaned. You can then sample other chemicals.

When the first chemical, the second chemical, and the third chemical are discharged through each independent discharge passage 114, the discharge passage through which the first chemical is discharged cannot be cleaned using other chemicals.

In addition, even when one discharge passage L4 is formed by connecting the sampling lines L1, L2, and L3 of the first chemical, the second chemical, and the third chemical as shown in FIG. 5B, the sampling lines L1, L2, and Chemicals remaining between the valves (V1, V2, V3) connected to L3) and the discharge passage (L4) cannot be cleaned using other chemicals. For example, the first chemical C1 remaining between the first valve V1 of the first sampling line L1 and the discharge passage L4 cannot be removed using the second chemical or the third chemical.

However, according to the embodiment, there is an advantage in that the area between the valve and the discharge passage can be cleaned using a different chemical. That is, the first to third inflow passages, the common chamber and the discharge passage are disposed adjacent to each other to clean the remaining chemicals using other chemicals. Accordingly, it is possible to prevent contamination of chemicals, decrease in purity, and errors in analysis results, and advantageous effects of improving the reliability of chemical contamination analysis can be obtained.

According to an embodiment, the first valve 152 may block the outlet of the first supply passage 122 and/or the inlet of the first inflow passage 124. Therefore, when the supply of the first chemical through the first sampling line (L1) is stopped, the first chemical of the first supply passage (122) is blocked from entering the common chamber 112 through the first inflow passage (124). I can.

The supply of the first chemical to the first inflow passage 124 is immediately stopped by the first valve 152, and the second chemical (or the third chemical through the third sampling line) is stopped. ) Can be supplied. At this time, the configuration of cleaning before sampling other chemicals is as described above. Thereafter, when the first chemical is sampled again, the first uncontaminated chemical may be sampled by opening the first valve and discharging the first chemical in the first sampling line and the first inflow passage before sampling. That is, according to the embodiment, since the discharge of the first chemical is controlled by the first valve, another valve may not be provided in the sampling line. However, it is not necessarily limited thereto, and a separate valve may be further provided if necessary.

The first valve 152 may be formed in various structures capable of selectively opening and closing the first chemical flow path 120, and the present invention is not limited or limited by the type and structure of the first valve 152. .

Preferably, the first valve 152 opens and closes the outlet of the first supply passage 122 and the inlet of the first inflow passage 124 together (for example, at the same time), thereby selectively opening and closing the first chemical passage 120 Can be opened and closed. According to another embodiment of the present invention, it is also possible to configure the first valve to open and close only the inlet of the first inflow passage.

More specifically, referring to FIGS. 8 and 9, the first valve 152 approaches a valve body 150a disposed to cover the first guide passage 126 and the wall surface of the first guide passage 126 and The diaphragm 150c is pressed by the cylinder member 150b provided to be linearly movable to the valve body 150a in a spaced apart direction, and the diaphragm 150c selectively adheres to the wall surface of the first guide passage 126 ).

The valve body 150a of the first valve 152 is coupled to the outer surface of the body 110 to cover the first guide channel 126, and the first guide channel 126 is a valve body of the first valve 152 It is formed between (150a) and the outer surface of the body 110.

The cylinder member 150b of the first valve 152 approaches the wall surface (the side of the body 110) of the first guide passage 126 and is separated from the valve body 150a of the first valve 152. It is provided to be able to move linearly inside.

The cylinder member 150b of the first valve 152 may be configured to move linearly on the valve body 150a of the first valve 152 by hydraulic or pneumatic pressure, and the cylinder member 150b of the first valve 152 The present invention is not limited or limited by the linear movement method of ). In some cases, it is also possible to configure the cylinder member 150b to move linearly by a motor or other driving source.

The diaphragm 150c may be formed of a flexible material, pressurized by the cylinder member 150b, and selectively adhere to the wall surface of the first guide passage 126. When the diaphragm 150c is separated from the wall surface of the first guide passage 126, the first supply passage 122 and the first inflow passage 124 communicate (see FIG. 8), and the diaphragm 150c is When the first guide passage 126 is in close contact with the wall surface, the first supply passage 122 and the first inflow passage 124 are spatially blocked (see FIG. 9).

Referring to FIG. 6, the second chemical flow path 130 is connected to the common chamber 112 and is provided to supply the second chemical to the common chamber 112.

The second chemical flow path 130 may be formed in a variety of structures capable of supplying the second chemical to the common chamber 112.

For example, the second chemical passage 130 is formed on the body 110 and is formed on the side of the body 110 to communicate with the second supply passage 132 and the common chamber 112 to which the second chemical is supplied. It is formed on the side of the body 110 to communicate with the second inflow passage 134, the second supply passage 132 and the second inflow passage 134, and guides the second chemical to the second inflow passage 134 It includes a second guide passage (136).

Preferably, the second supply passage 132 is in communication with the second vertical passage 132a and the second vertical passage 132a formed on the upper surface of the body 110 (see FIG. 2 ). It is formed in an approximately "L" shape including the second horizontal flow path 132b formed on the side surface. According to another embodiment of the present invention, it is possible to form a second horizontal passage on the side of the body and to form a second vertical passage on the upper surface (or bottom) of the body.

The second inflow passage 134 communicates with the side of the common chamber 112 so as to penetrate the side of the body 110. That is, one end of the second inflow passage 134 communicates with the side of the common chamber 112, and the other end of the second inflow passage 134 is exposed on the side of the body 110.

The second guide passage 136 is formed on the outer surface (eg, side surface) of the body 110 so as to communicate the second supply passage 132 and the second inflow passage 134, and the second supply passage 132 ) To guide the second chemical supplied to the second inflow passage 134. For example, the second inflow passage 134 may be formed to face the center of the common chamber 112 along a reference line passing through the center of the common chamber 112.

More specifically, the second guide passage 136 is formed in a concave dome shape on the other side of the body 110 so as to be disposed between the side of the body 110 and the second valve 154 to be described later, and the second The outlet of the supply passage 132 (the outlet of the second horizontal passage 132b) and the inlet of the second inflow passage 134 are located on the second guide passage 136.

Here, that the outlet of the second horizontal passage 132b and the entrance of the second inflow passage 134 are located on the second guide passage 136, the outlet of the second horizontal passage 132b and the second inflow passage It is defined that the inlet of 134 is exposed on the wall surface of the second guide passage 136 facing the second valve 154.

The second valve 154 is provided to selectively open and close the second chemical flow path 130.

Preferably, the second valve 154 is provided to open and close the outlet of the second supply passage 132 and/or the inlet of the second inflow passage 134.

When the second valve 154 blocks the outlet of the second supply passage 132 and the inlet of the second inflow passage 134, the second supply passage 132 and the second inflow passage 134 are spatially It can be completely separated.

Accordingly, the supply of the second chemical through the second sampling line L2 may be stopped by blocking the second chemical from flowing into the second inflow passage 134 by the second valve 154. Accordingly, it is possible to block the second chemical from flowing into the common chamber 112.

The second chemical remaining in the common chamber 112, the inlet passage 134, and the discharge passage 114 may be cleaned using other chemicals or washing water as described above. The function of the second valve 154 may be the same as that of the first valve.

The second valve 154 may be formed in various structures capable of selectively opening and closing the second chemical passage 130, and the present invention is not limited or limited by the type and structure of the second valve 154. .

Preferably, the second valve 154 opens and closes the outlet of the second supply passage 132 and the inlet of the second inflow passage 134 together (for example, at the same time), thereby selectively opening and closing the second chemical passage 130 Can be opened and closed. According to another embodiment of the present invention, it is also possible to configure the second valve to open and close only the inlet of the second inflow passage.

More specifically, the second valve 154 is a valve body 150a disposed to cover the second guide passage 136, and the valve body 150a in a direction approaching and spaced apart from the wall surface of the second guide passage 136. It includes a cylinder member 150b provided to be linearly movable to the cylinder member 150b, and a diaphragm 150c which is pressed by the cylinder member 150b and selectively adheres to the wall surface of the second guide passage 136. 9)

The valve body 150a of the second valve 154 is coupled to the outer surface of the body 110 to cover the second guide channel 136, and the second guide channel 136 is a valve body of the second valve 154 It is formed between (150a) and the outer surface of the body (110).

The cylinder member 150b of the second valve 154 approaches the wall surface (the side of the body 110) of the second guide passage 136 and is separated from the valve body 150a of the second valve 154. It is provided to be able to move linearly inside.

The cylinder member 150b of the second valve 154 may be configured to move linearly on the valve body 150a of the second valve 154 by hydraulic or pneumatic pressure, and the cylinder member 150b of the second valve 154 The present invention is not limited or limited by the linear movement method of ). In some cases, it is also possible to configure the cylinder member 150b to move linearly by a motor or other driving source.

The diaphragm 150c may be formed of a flexible material, pressurized by the cylinder member 150b, and selectively adhere to the wall surface of the second guide passage 136. When the diaphragm 150c is separated from the wall surface of the second guide channel 136, the second supply channel 132 and the second inflow channel 134 communicate, and the diaphragm 150c is connected to the second guide channel ( In a state in close contact with the wall surface of the 136, the second supply passage 132 and the second inflow passage 134 are spatially blocked.

Referring to FIG. 7, the third chemical flow path 140 is connected to the common chamber 112 and is provided to supply the third chemical to the common chamber 112.

The third chemical flow path 140 may be formed in a variety of structures capable of supplying the third chemical to the common chamber 112.

The third chemical passage 140 is formed in the body 110 and is formed on the side of the body 110 so as to communicate with the third supply passage 142 through which the third chemical is supplied, and the common chamber 112 A third guide formed on the side of the body 110 to communicate with the flow path 144 and the third supply flow path 142 and the third inflow channel 144 and guide the third chemical to the third inflow channel 144 It includes a flow path 146.

Preferably, the third supply passage 142 is in communication with the third vertical passage 142a and the third vertical passage 142a formed on the upper surface of the body 110 (see FIG. 2). It is formed in an approximately "L" shape including the third horizontal channel 142b formed on the side surface. According to another embodiment of the present invention, it is possible to form a third horizontal flow path on the side of the body and a third vertical flow path on the upper surface (or bottom) of the body.

The third inflow passage 144 communicates with the side of the common chamber 112 so as to penetrate the side of the body 110. That is, one end of the third inflow passage 144 communicates with the side of the common chamber 112, and the other end of the third inflow passage 144 is exposed to the side of the body 110. For example, the third inflow passage 144 may be formed to face the center of the common chamber 112 along a reference line passing through the center of the common chamber 112.

The third guide passage 146 is formed on the outer surface (eg, side surface) of the body 110 so as to communicate the third supply passage 142 and the third inflow passage 144, and the third supply passage 142 ) To guide the third chemical supplied to the third inflow passage 144.

More specifically, the third guide passage 146 is formed in a concave dome shape on another side of the body 110 so as to be disposed between the side of the body 110 and the third valve 156 to be described later. The outlet of the 3 supply passage 142 (the outlet of the third horizontal passage 142b) and the inlet of the third inflow passage 144 are located on the third guide passage 146.

Here, that the outlet of the third horizontal passage 142b and the entrance of the third inflow passage 144 are located on the third guide passage 146, the outlet of the third horizontal passage 142b and the third inflow passage It is defined that the inlet of 144 is exposed on the wall of the third guide passage 146 facing the third valve 156.

The third valve 156 is provided to selectively open and close the third chemical flow path 140.

Preferably, the third valve 156 is provided to open and close the outlet of the third supply passage 142 and/or the inlet of the third inflow passage 144.

For reference, in a state where the third valve 156 blocks the outlet of the third supply passage 142 and the inlet of the third inflow passage 144, the third supply passage 142 and the third inflow passage 144 Can be completely separated spatially.

Accordingly, supply of the third chemical through the third sampling line L3 may be stopped by blocking the third chemical from flowing into the third inflow passage 144 by the third valve 156. Accordingly, it is possible to block the third chemical from flowing into the common chamber 112.

The third chemical remaining in the common chamber 112, the third inflow passage 144, and the discharge passage 114 may be cleaned using other chemicals or washing water as described above.

The third valve 156 may be formed in various structures capable of selectively opening and closing the third chemical passage 140, and the present invention is not limited or limited by the type and structure of the third valve 156. .

Preferably, the third valve 156 opens and closes the outlet of the third supply passage 142 and the inlet of the third inflow passage 144 together (for example, at the same time), thereby selectively opening and closing the third chemical passage 140 Can be opened and closed. According to another embodiment of the present invention, it is also possible to configure the third valve to open and close only the inlet of the third inflow passage.

More specifically, the third valve 156 is a valve body 150a disposed to cover the third guide passage 146, and the valve body 150a in a direction approaching and spaced apart from the wall surface of the third guide passage 146. It includes a cylinder member 150b provided to be linearly movable to the cylinder member 150b, and a diaphragm 150c which is pressed by the cylinder member 150b and selectively adheres to the wall surface of the third guide passage 146 (FIG. 8 and 9)

The valve body 150a of the third valve 156 is coupled to the outer surface of the body 110 to cover the third guide channel 146, and the third guide channel 146 is a valve body of the third valve 156 It is formed between (150a) and the outer surface of the body 110.

The cylinder member 150b of the third valve 156 approaches the wall surface (the side of the body 110) of the third guide passage 146 and is separated from the valve body 150a of the third valve 156. It is provided to be able to move linearly inside.

The cylinder member 150b of the third valve 156 may be configured to move linearly on the valve body 150a of the third valve 156 by hydraulic or pneumatic pressure, and the cylinder member 150b of the third valve 156 ) The present invention is not limited or limited by the linear movement method. In some cases, it is also possible to configure the cylinder member 150b to move linearly by a motor or other driving source.

The diaphragm 150c may be formed of a flexible material, is pressed by the cylinder member 150b, and selectively adheres to the wall surface of the third guide passage 146. When the diaphragm 150c is spaced apart from the wall of the third guide channel 146, the third supply channel 142 and the third inflow channel 144 communicate, and the diaphragm 150c is connected to the third guide channel ( In a state in close contact with the wall surface of the 146, the third supply passage 142 and the third inflow passage 144 are spatially blocked.

Preferably, the first valve 152 to the third valve 156 are disposed on the side of the body 110 at equal intervals along the circumferential direction of the common chamber 112.

In the embodiment of the present invention, the inlet of the first supply passage 122 to the third supply passage 142 is formed on the upper surface of the body 110, and the first valves 152 to the third are formed on the side of the body 110. By allowing the valve 156 to be mounted, each sampling line is connected to the inlet of the first supply passage 122 to the third supply passage 142 without interference by the first valve 152 to the third valve 156. An advantageous effect of easily mounting can be obtained.

The discharge passage 114 is formed on the bottom of the body 110 so as to communicate with the common chamber 112, and the first chemical or the second chemical or the third chemical introduced into the common chamber 112 is in the discharge passage 114. It may be discharged to the outside of the body 110 through a connected discharge line.

For reference, the chemical discharged through the discharge line may be accommodated in a container (not shown), and the container filled with the chemical may be transported to a pollution level and component analysis place after fastening the lid.

As the container, chemicals may be accommodated, and various storage means having a selectively detachable lid may be used, and the present invention is not limited or limited by the structure and shape of the container.

As an example, a sampling bottle in which chemicals can be accommodated may be used as the container, and the lid may be fastened or separated while rotating along a thread formed in an inlet of the container.

Preferably, the residual chemical remaining in the common chamber 112 before discharging the chemical through the discharge passage 114 may be collected through a drain facility (not shown).

In other words, after discharging the first chemical, a small amount of the first chemical may remain in the common chamber 112, and the chemical remaining in the common chamber 112 may stagnate after a certain period of time, resulting in the occurrence of sediment or contamination. have. In this situation, if the second chemical (or the third chemical) is immediately discharged through the common chamber 112, the purity of the second chemical decreases as a small amount of the first chemical is included in the second chemical sampled in the sampling bottle. There is a problem of contamination, and there is a problem that the degree of chemical contamination and the reliability of component analysis are deteriorated.

However, in the embodiment, after sampling the first chemical, the second chemical is not immediately sampled, and the second chemical passes through the common chamber 112 for a predetermined time (or by a predetermined flow rate) and is discharged to the drain facility. Thereby, it is possible to obtain an advantageous effect of minimizing contamination of the second chemical and deterioration of purity due to residual chemicals (first chemical) remaining in the common chamber 112 and improving the reliability of chemical contamination and component analysis.

In addition, according to a preferred embodiment of the present invention, by making the first inflow passage 124, the second inflow passage 134 and the third inflow passage 144 all communicate with the common chamber 112, the second When the chemical is drained, the outer surface of the diaphragm 150c and other chemicals that may remain in the first inflow passage 124 and the third inflow passage 144 by the second chemical flowing into the common chamber 112 Since other chemicals on the common chamber 112) can also be removed (drained), it is possible to obtain an advantageous effect of more effectively suppressing contamination of the second chemical and reduction of purity.

Meanwhile, FIG. 10 is a view for explaining an inclined guide surface as a manifold assembly 100 according to an embodiment of the present invention. In addition, the same or the same equivalent reference numerals are assigned to the same or the same equivalent parts as the above-described configuration, and detailed description thereof will be omitted.

In the above-described and illustrated embodiments of the present invention, an example in which the first inflow passage 124, the second inflow passage 134 and the third inflow passage 144 are formed toward the center of the common chamber 112 will be described. However, according to another embodiment of the present invention, the first inflow passage 124, the second inflow passage 134 and the third inflow passage 144 pass through the center (x) of the common chamber 112 (CL). It is also possible to form inclined to ).

Referring to FIG. 10, a first inclined guide surface 124a is formed on the wall surface of the first inflow passage 124, and the first inclined guide surface 124a shares the first chemical flowing into the first inflow passage 124. The guide may be inclined with respect to the reference line CL passing through the center x of the chamber 112.

In addition, a second inclined guide surface is formed on the wall surface of the second inflow channel 134, and the second inclined guide surface uses the second chemical flowing into the second inflow channel 134 to the center (x) of the common chamber 112. It is possible to guide obliquely with respect to the passing reference line CL.

Similarly, a third inclined guide surface 144a is formed on the wall surface of the third inflow passage 144, and the third inclined guide surface 144a uses the third chemical flowing into the third inflow passage 144 in the common chamber 112. It is possible to guide inclined with respect to the reference line (CL) passing through the center (x) of.

The inclination angle θ of the first inclined guide surface 124a, the second inclined guide surface, and the third inclined guide surface 144a is varied within the range that can forcibly form a vortex-shaped vortex inside the common chamber 112. It may be changed, and the present invention is not limited or limited by the inclination angle θ of the first inclined guide surface 124a, the second inclined guide surface, and the third inclined guide surface 144a.

In this way, the first to third chemicals introduced into the first inflow passage 124, the second inflow passage 134 and the third inflow passage 144 are the first inclined guide surface 124a, the second inclined guide surface, By being guided obliquely with respect to the reference line CL passing through the center (x) of the common chamber 112 along the third inclined guide surface (144a), the chemical introduced into the common chamber 112 prevents a vortex in the form of a vortex. Since it can be formed forcibly, it is possible to obtain an advantageous effect of more effectively removing residual chemicals that may remain in the common chamber 112 and the first to third inflow passages 124, 134, and 144.

That is, by allowing the chemical introduced into the common chamber 112 to form a vortex in the form of a vortex, it is possible to minimize the phenomenon that the chemical is discharged in a state in which the chemical is drawn to a specific area in the common chamber 112, so that the common chamber (112) It is possible to obtain an advantageous effect of more effectively removing residual chemicals that may remain in the inflow passage.

The embodiments have been described above, but these are only examples and do not limit the present invention, and those of ordinary skill in the field to which the present invention belongs are not illustrated above within the scope not departing from the essential characteristics of the present embodiment. It will be seen that various modifications and applications are possible. For example, each component specifically shown in the embodiment can be modified and implemented. And differences related to these modifications and applications should be construed as being included in the scope of the present invention defined in the appended claims.

1: chemical storage facility 2: ACQC unit
3,5,6: chemical storage tank 4: chemical distribution device
10: chemical sampling device 100: manifold assembly
110: body 112: common chamber
114: discharge passage 120: first chemical passage
122: first supply passage 122a: first vertical passage
122b: first horizontal passage 124: first inflow passage
124a: first slope guide surface 126: first guide passage
130: 2nd chemical channel 132: 2nd supply channel
132a: second vertical passage 132b: second horizontal passage
134: 2nd inflow channel 136: 2nd guide channel
140: 3rd chemical flow 142: 3rd supply flow
142a: 3rd vertical channel 142b: 3rd horizontal channel
144: 3rd inflow route 144a: 3rd slope guide surface
146: 3rd guide channel 152: 1st valve
154: second valve 156: third valve
150a: valve body 150b: cylinder member
150c: diaphragm L1,L2,L3: sampling line

Claims (19)

A body having a common chamber formed therein;
A first chemical passage connected to the common chamber and supplying a first chemical;
A first valve selectively opening and closing the first chemical flow path;
A second chemical channel connected to the common chamber and supplying a second chemical;
A second valve selectively opening and closing the second chemical flow path; And
A discharge passage communicating with the common chamber and discharging the first chemical or the second chemical introduced into the common chamber to the outside of the body,
The first chemical flow path,
A first supply passage formed in the body and through which the first chemical is supplied;
A first inflow passage in communication with the common chamber; And
A first guide passage connecting the first supply passage and the first inflow passage to guide the first chemical to the first inflow passage; and
The first valve is a manifold assembly for opening and closing the outlet of the first supply passage or the first inlet passage.
delete The method of claim 1,
The first guide passage is a manifold assembly formed on a side surface of the body.
The method of claim 3,
The first supply flow path,
A first vertical flow path formed on the upper surface of the body; And
Including; a first horizontal passage formed on the wall surface of the first guide passage so as to communicate with the first vertical passage,
An end of the first horizontal flow passage forms an outlet of the first supply passage on a wall surface of the first guide passage, and an inlet of the first inflow passage is formed on a wall surface of the first guide passage.
The method of claim 4,
The first valve,
A valve body disposed to cover the first guide passage;
A cylinder member provided to be linearly movable on the valve body in a direction approaching and spaced apart from the wall surface of the first guide passage; And
A manifold assembly including a diaphragm pressed by the cylinder member and selectively in close contact with the wall surface of the first guide passage.
The method of claim 1,
A first inclined guide surface is formed on the wall surface of the first inflow passage,
The first inclined guide surface obliquely guides the first chemical flowing into the first inflow passage with respect to a reference line passing through the center of the common chamber.
The method of claim 1,
The second chemical flow path,
A second supply passage formed in the body and through which the second chemical is supplied;
A second inflow passage formed on a side surface of the body to communicate with the common chamber; And
And a second guide passage formed on a side surface of the body to communicate with the second supply passage and the second inlet passage and guide the second chemical to the second inlet passage.
The method of claim 7,
The second valve is a manifold assembly for opening and closing an outlet of the second supply passage or an inlet of the second inflow passage.
The method of claim 8,
The second supply flow path,
A second vertical flow path formed on the upper surface of the body; And
Including; a second horizontal passage formed on the wall surface of the second guide passage so as to communicate with the second vertical passage,
An end of the second horizontal flow passage forms an outlet of the second supply passage on a wall surface of the second guide passage, and an inlet of the second inflow passage is formed on a wall surface of the second guide passage.
The method of claim 9,
The second valve,
A valve body disposed to cover the second guide passage;
A cylinder member provided to be linearly movable on the valve body in a direction approaching and spaced apart from the wall surface of the second guide passage; And
A diaphragm pressed by the cylinder member and selectively in close contact with the wall surface of the second guide passage;
Manifold assembly comprising a.
The method of claim 9,
A second inclined guide surface is formed on the wall surface of the second inflow passage,
The second inclined guide surface obliquely guides the second chemical flowing into the second inflow passage with respect to a reference line passing through the center of the common chamber.
The method of claim 1,
A third chemical channel connected to the common chamber and supplying a third chemical; And
A manifold assembly including a third valve selectively opening and closing the third chemical flow path.
The method of claim 12,
The third chemical flow path,
A third supply passage formed in the body and through which a third chemical is supplied;
A third inflow passage formed on a side of the body to communicate with the common chamber; And
A manifold assembly comprising: a third guide channel formed on a side surface of the body to communicate with the third supply channel and the third inflow channel, and guide the third chemical to the third inflow channel.
The method of claim 13,
The third valve is a manifold assembly for opening and closing an outlet of the third supply passage or an inlet of the third inflow passage.
The method of claim 14,
The third supply flow path,
A third vertical flow path formed on the upper surface of the body; And
Including; a third horizontal passage formed on the wall surface of the third guide passage so as to communicate with the third vertical passage,
An end of the third horizontal flow passage forms an outlet of the third supply passage on a wall surface of the third guide passage, and an inlet of the third inflow passage is formed on a wall surface of the third guide passage.
The method of claim 15,
The third valve,
A valve body disposed to cover the third guide passage;
A cylinder member provided to be linearly movable on the valve body in a direction approaching and spaced apart from a wall surface of the third guide passage; And
A manifold assembly comprising a diaphragm pressed by the cylinder member and selectively in close contact with the wall surface of the third guide passage.
The method of claim 14,
A third inclined guide surface is formed on the wall surface of the third inflow passage,
The third inclined guide surface obliquely guides the third chemical flowing into the third inflow passage with respect to a reference line passing through the center of the common chamber.
A first sampling line supplying a first chemical;
A second sampling line supplying a second chemical; And
The manifold assembly according to any one of claims 1, 3 to 17;
Chemical sampling device comprising a.
The method of claim 18,
After sampling the first chemical, before sampling the second chemical, the second chemical is drained through the common chamber.

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