CN210269282U - Silicon tetrachloride sampling device - Google Patents
Silicon tetrachloride sampling device Download PDFInfo
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- CN210269282U CN210269282U CN201921260524.9U CN201921260524U CN210269282U CN 210269282 U CN210269282 U CN 210269282U CN 201921260524 U CN201921260524 U CN 201921260524U CN 210269282 U CN210269282 U CN 210269282U
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- connecting pipe
- switch
- purging
- silicon tetrachloride
- emptying
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- VXEGSRKPIUDPQT-UHFFFAOYSA-N 4-[4-(4-methoxyphenyl)piperazin-1-yl]aniline Chemical compound C1=CC(OC)=CC=C1N1CCN(C=2C=CC(N)=CC=2)CC1 VXEGSRKPIUDPQT-UHFFFAOYSA-N 0.000 title claims abstract description 57
- 239000005049 silicon tetrachloride Substances 0.000 title claims abstract description 57
- 238000005070 sampling Methods 0.000 title claims abstract description 53
- 238000010926 purge Methods 0.000 claims abstract description 98
- 239000000463 material Substances 0.000 claims abstract description 22
- 238000007599 discharging Methods 0.000 claims abstract description 14
- 238000002347 injection Methods 0.000 claims description 9
- 239000007924 injection Substances 0.000 claims description 9
- 238000010408 sweeping Methods 0.000 claims description 6
- -1 polytetrafluoroethylene Polymers 0.000 claims description 3
- 229920001343 polytetrafluoroethylene Polymers 0.000 claims description 3
- 239000004810 polytetrafluoroethylene Substances 0.000 claims description 3
- 229910001220 stainless steel Inorganic materials 0.000 claims description 3
- 239000010935 stainless steel Substances 0.000 claims description 3
- 238000012360 testing method Methods 0.000 abstract description 5
- 238000000034 method Methods 0.000 description 16
- 238000001514 detection method Methods 0.000 description 14
- 230000008569 process Effects 0.000 description 14
- 239000003344 environmental pollutant Substances 0.000 description 4
- 231100000719 pollutant Toxicity 0.000 description 4
- 230000008859 change Effects 0.000 description 3
- 238000004140 cleaning Methods 0.000 description 3
- IJGRMHOSHXDMSA-UHFFFAOYSA-N Atomic nitrogen Chemical compound N#N IJGRMHOSHXDMSA-UHFFFAOYSA-N 0.000 description 2
- VEXZGXHMUGYJMC-UHFFFAOYSA-N Hydrochloric acid Chemical compound Cl VEXZGXHMUGYJMC-UHFFFAOYSA-N 0.000 description 2
- 238000006460 hydrolysis reaction Methods 0.000 description 2
- 239000000126 substance Substances 0.000 description 2
- BOTDANWDWHJENH-UHFFFAOYSA-N Tetraethyl orthosilicate Chemical compound CCO[Si](OCC)(OCC)OCC BOTDANWDWHJENH-UHFFFAOYSA-N 0.000 description 1
- 230000008901 benefit Effects 0.000 description 1
- 238000007664 blowing Methods 0.000 description 1
- 238000004891 communication Methods 0.000 description 1
- 238000005520 cutting process Methods 0.000 description 1
- 238000010586 diagram Methods 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 230000007062 hydrolysis Effects 0.000 description 1
- 239000012535 impurity Substances 0.000 description 1
- 238000007689 inspection Methods 0.000 description 1
- 239000011810 insulating material Substances 0.000 description 1
- 239000007788 liquid Substances 0.000 description 1
- 239000007791 liquid phase Substances 0.000 description 1
- 238000012986 modification Methods 0.000 description 1
- 230000004048 modification Effects 0.000 description 1
- 229910052757 nitrogen Inorganic materials 0.000 description 1
- 239000013307 optical fiber Substances 0.000 description 1
- 239000012071 phase Substances 0.000 description 1
- 238000002360 preparation method Methods 0.000 description 1
- 239000002994 raw material Substances 0.000 description 1
- 238000007789 sealing Methods 0.000 description 1
- RMAQACBXLXPBSY-UHFFFAOYSA-N silicic acid Chemical compound O[Si](O)(O)O RMAQACBXLXPBSY-UHFFFAOYSA-N 0.000 description 1
- 229910021332 silicide Inorganic materials 0.000 description 1
- FVBUAEGBCNSCDD-UHFFFAOYSA-N silicide(4-) Chemical compound [Si-4] FVBUAEGBCNSCDD-UHFFFAOYSA-N 0.000 description 1
- 229910052710 silicon Inorganic materials 0.000 description 1
- 239000010703 silicon Substances 0.000 description 1
- 235000012239 silicon dioxide Nutrition 0.000 description 1
- FDNAPBUWERUEDA-UHFFFAOYSA-N silicon tetrachloride Chemical compound Cl[Si](Cl)(Cl)Cl FDNAPBUWERUEDA-UHFFFAOYSA-N 0.000 description 1
- 229920002545 silicone oil Polymers 0.000 description 1
- 238000001228 spectrum Methods 0.000 description 1
- 238000003860 storage Methods 0.000 description 1
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Abstract
The utility model provides a silicon tetrachloride sampling device, include: the device comprises a box body, a material connecting pipe, a change-over switch and a purging switch. The material is taken over and is included: the device comprises a feeding connecting pipe, an emptying connecting pipe, a purging connecting pipe, an outflow connecting pipe and an inflow connecting pipe, wherein the outflow connecting pipe and the inflow connecting pipe are used for being connected with a flow cell, and the inflow connecting pipe is communicated with the emptying connecting pipe. The change-over switch is used for controlling materials entering the flow cell, the feeding end of the change-over switch is connected with the feeding connecting pipe and the purging connecting pipe at the same time, and the discharging end of the change-over switch is connected with the outflow connecting pipe. The purging switch is used for switching purging paths in the device, the feeding end of the purging switch is connected with the purging connecting pipe, and the discharging end of the purging switch is connected with the feeding connecting pipe and the emptying connecting pipe simultaneously. A silicon tetrachloride sampling device, can sweep the device around the sample, avoid silicon tetrachloride to receive the pollution when the sample to the error of sampling test has been reduced.
Description
Technical Field
The utility model belongs to the sampling test equipment field especially relates to a silicon tetrachloride sampling device.
Background
Silicon tetrachloride, also called as silicon chloride, is a common organic silicide raw material and is widely applied to the preparation process of materials such as pure silicon, ethyl silicate, organic silicone oil, high-temperature insulating materials, communication optical fibers and the like at present. High-purity silicon tetrachloride is colorless and transparent liquid at normal temperature and normal pressure, but when moisture exists in the air, the silicon tetrachloride undergoes a violent hydrolysis reaction to generate corrosive hydrochloric acid and silicic acid, so that the storage and sampling processes of the silicon tetrachloride are carried out in a dry and sealed environment.
In the prior art, silicon tetrachloride needs to be sampled and detected before being used, so that the purity of the silicon tetrachloride product is judged, and the internal impurity components of the silicon tetrachloride product are analyzed. The existing sampling device cannot guarantee cleanness and sealing in the sampling process, so that silicon tetrachloride can be hydrolyzed or contacted with other pollutants in the sampling process, and the final detection result is deviated.
SUMMERY OF THE UTILITY MODEL
In view of this, the utility model aims at providing a silicon tetrachloride sampling device to realize reducing the purpose of silicon tetrachloride detection error.
In order to achieve the above purpose, the technical scheme of the utility model is realized like this:
a silicon tetrachloride sampling device, comprising: the device comprises a box body, a material connecting pipe, a change-over switch and a purging switch;
the setting is taken over to the material on the box for with the leading-in or derive this device of material, include: the device comprises a feeding connecting pipe, an emptying connecting pipe, a purging connecting pipe, an outflow connecting pipe and an inflow connecting pipe, wherein the outflow connecting pipe and the inflow connecting pipe are used for being connected with a flow cell, and the inflow connecting pipe is communicated with the emptying connecting pipe;
the change-over switch is arranged in the box body and used for controlling materials entering the flow cell, the feeding end of the change-over switch is connected with the feeding connecting pipe and the purging connecting pipe at the same time, and the discharging end of the change-over switch is connected with the outflow connecting pipe;
the purging switch is arranged inside the box body and used for switching purging paths in the device, the feeding end of the purging switch is connected with the purging connecting pipe, and the discharging end of the purging switch is connected with the feeding connecting pipe and the emptying connecting pipe simultaneously.
Furthermore, the change-over switch is a confluence three-way valve, a first feed inlet of the confluence three-way valve is connected with a feeding connecting pipe through a first pipeline, a second feed inlet is connected with a purging connecting pipe through a pipeline, and a discharge outlet is connected with an outflow connecting pipe through a second pipeline.
Furthermore, the purging switch is a shunt three-way valve, a feed inlet of the purging switch is connected with the purging connecting pipe through a pipeline, a first discharge outlet is communicated with the first pipeline, and a second discharge outlet is connected with the emptying connecting pipe through a third pipeline.
Further, the sampling device comprises a sample injection switch and an emptying switch; the sampling switch is arranged on the second pipeline, and the on-off between the selector switch and the outflow connecting pipe can be controlled through the sampling switch; one end of the emptying switch is connected with the inflow connecting pipe through a pipeline, and the other end of the emptying switch is connected with the third pipeline.
Furthermore, the sampling switch and the emptying switch are two-way valves.
Furthermore, the change-over switch, the purging switch, the sample injection switch and the emptying switch are all made of 316L stainless steel.
Furthermore, all pipelines used in the device are made of polytetrafluoroethylene.
Compared with the prior art, a silicon tetrachloride sampling device have following advantage:
(1) a silicon tetrachloride sampling device, can avoid silicon tetrachloride to examine time measuring and air contact in the sample to reduce silicon tetrachloride's detection error. Before utilizing this device to take a sample, accessible change over switch switches over the material that gets into this device for the medium that sweeps gets into this device. Can clean this device inside through sweeping the medium to with the inside remaining air-out device of device, avoid silicon tetrachloride to suffer pollution or take place hydrolysis in the sampling process. After the blowing process is finished, the materials entering the device are switched by rotating the change-over switch, so that the silicon tetrachloride sample to be detected enters the flow cell through the device. After the sampling process is finished, the purging medium enters the device again, the silicon tetrachloride remained in the device is cleaned by the purging medium, and interference to the subsequent sampling process is avoided. In addition, can switch through the purge switch and sweep the flow path of medium in this device inside, consequently this device can also be swept the appearance pipeline or the evacuation pipeline of this device alone except carrying out whole sweeping, avoids silicon tetrachloride to take place to remain in the local of this device.
(2) A silicon tetrachloride sampling device, can carry out silicon tetrachloride's off-line measuring work. When the silicon tetrachloride to be detected and the spectrum detector are positioned at different positions, offline detection sampling can be performed through the device, the silicon tetrachloride can be prevented from being polluted during offline detection through the device, and the accuracy of a detection result is ensured. When carrying out the off-line inspection, at first utilize to sweep the medium and sweep this device inside, will await measuring the sample through inside this device leading-in flow cell (off-line sample in-process flow cell keeps being connected with this device all the time), after the sample gets into the flow cell, enable the both ends of flow cell and seal through advancing kind switch and evacuation switch, make the sample that awaits measuring preserve inside this device, conveniently carry the sample to near the detector. In addition, can adjust the route of sweeping through the switch that sweeps, clean appearance pipeline and evacuation pipeline to advancing after the off-line sample, avoid remaining the sample in the pipeline and take place to leak at the removal in-process of this device.
Drawings
The accompanying drawings, which form a part hereof, are included to provide a further understanding of the invention, and are incorporated in and constitute a part of this specification, illustrate embodiments of the invention and together with the description serve to explain the invention without undue limitation. In the drawings:
fig. 1 is a schematic structural diagram of a sampling device according to an embodiment of the present invention;
fig. 2 is a schematic view of a pipeline layout of a sampling device according to an embodiment of the present invention.
Description of reference numerals:
1-sample introduction switch; 2-an emptying switch; 3-outflow connecting pipe; 4-inflow connection pipe; 5-feeding connecting pipe; 6-emptying the connecting pipe; 7-a diverter switch; 8-a purge switch; 9-purging connecting pipes; 10-a flow-through cell; 11-a first conduit; 12-a second conduit; 13-a third conduit; 14-a box body.
Detailed Description
It should be noted that, in the present invention, the embodiments and features of the embodiments may be combined with each other without conflict.
In the description of the present invention, it is to be understood that the terms "center", "longitudinal", "lateral", "up", "down", "front", "back", "left", "right", "vertical", "horizontal", "top", "bottom", "inner", "outer", and the like, indicate orientations or positional relationships based on the orientations or positional relationships shown in the drawings, and are used merely for convenience of description and for simplicity of description, and do not indicate or imply that the device or element being referred to must have a particular orientation, be constructed and operated in a particular orientation, and therefore, should not be construed as limiting the present invention. Furthermore, the terms "first", "second", etc. are used for descriptive purposes only and are not to be construed as indicating or implying relative importance or implicitly indicating the number of technical features indicated. Thus, a feature defined as "first," "second," etc. may explicitly or implicitly include one or more of that feature. In the description of the present invention, "a plurality" means two or more unless otherwise specified.
In the description of the present invention, it is to be noted that, unless otherwise explicitly specified or limited, the terms "mounted," "connected," and "connected" are to be construed broadly, and may be, for example, fixedly connected, detachably connected, or integrally connected; can be mechanically or electrically connected; they may be connected directly or indirectly through intervening media, or they may be interconnected between two elements. The specific meaning of the above terms in the present invention can be understood by those of ordinary skill in the art through specific situations.
The present invention will be described in detail below with reference to the accompanying drawings in conjunction with embodiments.
A silicon tetrachloride sampling device, the structure of which can be illustrated by figures 1 and 2, as shown in the figure, the device comprises: the device comprises a box body 14, a material connecting pipe, a change-over switch 7 and a purging switch 8.
The setting is taken over on box 14 to the material, takes over through the material and can derive the material or leading-in this device, includes: feed connection 5, evacuation connection 6, purge connection 9, outflow connection 3 and inflow connection 4. The device comprises a feeding connecting pipe 5, an outflow connecting pipe 3, an exhaust connecting pipe 6 and a purging connecting pipe 9, wherein the feeding connecting pipe 5 is used for guiding a silicon tetrachloride sample to be detected into the device, the outflow connecting pipe 3 is used for guiding materials in the device to a flow cell 10, the outflow connecting pipe 4 is used for guiding the materials flowing out of the flow cell 10 into the device, the evacuation connecting pipe 6 is used for outwards discharging the materials in the device, and the purging connecting pipe 9 is used for guiding purging media into the device.
The purging medium is used for purging the interior of the device, so that the pollution of residual foreign matters in the interior of the device to a sample to be tested is avoided, air in the device can be discharged through the purging medium, and the silicon tetrachloride is prevented from being hydrolyzed after entering the device. Illustratively, the purging medium can be dry nitrogen or other gas-phase or liquid-phase substances which do not contain moisture and do not react with silicon tetrachloride.
The change-over switch 7 is arranged in the box body 14, the feeding end of the change-over switch 7 is simultaneously connected with the feeding connecting pipe 5 and the purging connecting pipe 9, the discharging end is connected with the outflow connecting pipe 3, and materials entering the flow cell 10 and the device can be controlled through the change-over switch 7. Specifically, before sampling, the purging connecting pipe 9 is communicated with the outflow connecting pipe 3 through the change-over switch 7, and at the moment, a purging medium enters the device to clean the device through the flow cell 10. When sampling work is carried out, the feeding connecting pipe 5 is communicated with the outflow connecting pipe 3 through the change-over switch 7, and a silicon tetrachloride sample to be detected enters the inside of the flow cell 10 through the device so as to carry out purity and component detection on the silicon tetrachloride sample. After the sampling work is finished, the purging connecting pipe 9 is communicated with the outflow connecting pipe 3 through the change-over switch 7 again, the inside and the flow cell of the device are cleaned by the purging medium, and the influence of residual substances on subsequent sampling detection is avoided.
Optionally, the switch 7 may be a confluence three-way valve, and it should be noted that the confluence three-way valve has two feed inlets and one discharge outlet, in this embodiment, the first feed inlet of the switch 7 is connected to the feed connection pipe 5 through a first pipeline 11, the second feed inlet is connected to the purge connection pipe 9 through a pipeline, and the discharge outlet is connected to the outflow connection pipe 3 through a second pipeline 12. When the purging operation before and after sampling is performed, the second feeding hole of the change-over switch 7 is communicated with the discharging hole, and when the sampling operation is performed, the first feeding hole of the change-over switch 7 is communicated with the discharging hole.
The purging switch 8 is also arranged in the box body 14, and the purging path in the device can be switched through the purging switch 8, so that the device can purge different positions according to use requirements. The feeding end of the purging switch 8 is connected with the purging connecting pipe 9, and the discharging end is simultaneously connected with the feeding connecting pipe 5 and the emptying connecting pipe 6. Specifically, when the inside of the device needs to be purged integrally, the purging switch 8 is kept closed, and the switch 7 introduces a purging medium into the inside of the device, so as to purge the pipeline and the flow cell 10 inside the device; when the feeding pipeline needs to be purged, the change-over switch 7 is closed, the purging connecting pipe 9 is communicated with the feeding connecting pipe 5 through the purging switch 8, and the feeding pipeline is cleaned by using a purging medium; when the emptying pipeline needs to be purged, the change-over switch 7 is closed, the purging connecting pipe 9 is communicated with the feeding connecting pipe 5 through the purging switch 8, and the emptying pipeline is cleaned by using a purging medium.
Optionally, the purging switch 8 is a shunt three-way valve, and it should be noted that the shunt three-way valve has one feeding port and two discharging ports, in this embodiment, the feeding port of the purging switch 8 is connected to the purging connection pipe 9 through a pipeline, the first discharging port is communicated with the first pipeline 11, and the second discharging port is communicated with the emptying connection pipe 6 through a third pipeline 13.
When the device is subjected to integral purging, the purging connecting pipe 9 is communicated with the outflow connecting pipe 3 through the change-over switch 7, the purging switch 8 is closed, and purging media entering the device flow along the purging connecting pipe 9, the change-over switch 7, the outflow connecting pipe 3, the flow cell 10, the inflow connecting pipe 4 and the evacuation connecting pipe 6. When the feeding pipeline of the device is purged, the switch 7 is closed, the purge switch 8 is communicated with the purge connecting pipe 9 and the feeding connecting pipe 5, and purge media entering the device flow along the purge connecting pipe 9, the purge switch 8 and the feeding connecting pipe 5. When the evacuation pipeline of the device is purged, the switch 7 is closed, the purge switch 8 is communicated with the purge connecting pipe 9 and the evacuation connecting pipe 6, and the purge medium entering the device flows along the purge connecting pipe 9, the purge switch 8 and the evacuation connecting pipe 6.
When the device is used for carrying out online detection and sampling of silicon tetrachloride, firstly, a sample inlet and a sample outlet of the flow cell 10 are respectively connected with an outflow connecting pipe and an inflow connecting pipe of the device. Then, a purging medium is injected into the device through the purging connecting pipe 9, the purging medium is used for cleaning the device and the inside of the flow cell 10, and the silicon tetrachloride is prevented from contacting with air, moisture or other pollutants in the sampling process. Then, a silicon tetrachloride sample is injected into the device through the feeding connecting pipe 5, and when about 100ml of silicon tetrachloride is discharged from the emptying connecting pipe 6, the supply of the sample can be cut off, so that the sampling process is completed. After the sampling and detecting process is finished, the purging medium is reused to clean the device and the flow cell 10, the silicon tetrachloride sample is discharged, and the residue in the device is cleaned.
The sampling device in the embodiment also has an off-line detection and sampling function because the detection device and the silicon tetrachloride sample may be placed at different places. Optionally, in order to adapt to the offline detection task, the sampling device further comprises a sample injection switch 1 and an emptying switch 2, wherein the sample injection switch 1 and the emptying switch 2 can be two-way valves. The sampling switch 1 is arranged on the second pipeline 12, the on-off between the change-over switch 7 and the outflow connecting pipe 3 can be controlled through the sampling switch 1, one end of the emptying switch 2 is connected with the inflow connecting pipe 4 through a pipeline, and the other end of the emptying switch is connected with the third pipeline 13.
When performing offline sampling detection, first, the sample inlet and the sample outlet of the flow cell 10 need to be connected to the outflow connection tube and the inflow connection tube of the device, respectively. Then, a purging medium is injected into the device through the purging connecting pipe 9, the purging medium is used for cleaning the device and the inside of the flow cell 10, and the silicon tetrachloride is prevented from contacting with air, moisture or other pollutants in the sampling process. Next, injecting a silicon tetrachloride sample into the device through the feeding connecting pipe 5, cutting off the supply of the sample when the emptying connecting pipe 6 discharges about 100ml of silicon tetrachloride, and closing the sample feeding switch 1 and the emptying switch 2, wherein the silicon tetrachloride sample to be detected is stored in the device. And then, a purging path is selected by using a purging switch 8, and a sample feeding pipeline and an emptying pipeline of the device are purged to prevent residual silicon tetrachloride in the pipelines from leaking in the moving process. After this device removes detection device place, can begin the testing process, after the testing process, open and advance appearance switch 1 and evacuation switch 2, utilize to sweep the medium and clean this device and flow-through cell 10, discharge the silicon tetrachloride sample to the inside residue of cleaning device.
In addition, for the life of extension this device, avoid silicon tetrachloride to cause the corruption to this device, optionally, change over switch 7, sweep switch 8, advance kind switch 1 and evacuation switch 2 and all adopt 316L stainless steel to make, and the inside pipeline of this device all adopts polytetrafluoroethylene to make.
The following explains the effects of the above scheme:
this embodiment provides a silicon tetrachloride sampling device, can adjust the flow path of sweeping the medium in this device through change over switch 7 and the cooperation of sweeping switch 8 for silicon tetrachloride sample can not take place to contact with air, moisture or other pollutants after getting into this device, thereby has promoted sample test result's accuracy. In addition, this device can store the sample that awaits measuring in the device through setting up advance kind switch 1 and evacuation switch 2, consequently makes this device have two kinds of functions of on-line measuring sample and off-line measuring sample, has promoted the application scope of this device.
The above description is only a preferred embodiment of the present invention, and should not be taken as limiting the invention, and any modifications, equivalent replacements, improvements, etc. made within the spirit and principle of the present invention should be included in the protection scope of the present invention.
Claims (7)
1. A silicon tetrachloride sampling device is characterized by comprising: the device comprises a box body (14), a material connecting pipe, a change-over switch (7) and a purging switch (8);
the material is taken over and is set up on box (14) for leading-in or derive this device with the material, includes: the device comprises a feeding connecting pipe (5), an emptying connecting pipe (6), a purging connecting pipe (9), an outflow connecting pipe (3) and an inflow connecting pipe (4), wherein the outflow connecting pipe (3) and the inflow connecting pipe (4) are used for being connected with a flow cell (10), and the inflow connecting pipe (4) is communicated with the emptying connecting pipe (6);
the change-over switch (7) is arranged in the box body (14) and used for controlling materials entering the flow cell (10), the feeding end of the change-over switch (7) is connected with the feeding connecting pipe (5) and the purging connecting pipe (9) at the same time, and the discharging end is connected with the outflow connecting pipe (3);
the purging switch (8) is arranged inside the box body (14) and used for switching purging paths in the device, the feeding end of the purging switch (8) is connected with the purging connecting pipe (9), and the discharging end of the purging switch is connected with the feeding connecting pipe (5) and the emptying connecting pipe (6) simultaneously.
2. A silicon tetrachloride sampling apparatus as claimed in claim 1, wherein: the change-over switch (7) is a confluence three-way valve, a first feed inlet of the confluence three-way valve is connected with a feeding connecting pipe (5) through a first pipeline (11), a second feed inlet is connected with a sweeping connecting pipe (9) through a pipeline, and a discharge outlet is connected with an outflow connecting pipe (3) through a second pipeline (12).
3. A silicon tetrachloride sampling apparatus as claimed in claim 2, wherein: the purging switch (8) is a shunt three-way valve, a feed inlet of the purging switch is connected with the purging connecting pipe (9) through a pipeline, a first discharge outlet of the purging switch is communicated with a first pipeline (11), and a second discharge outlet of the purging switch is connected with the emptying connecting pipe (6) through a third pipeline (13).
4. A silicon tetrachloride sampling apparatus according to claim 3, wherein: the sampling device comprises a sample injection switch (1) and an emptying switch (2); the sample injection switch (1) is arranged on the second pipeline (12), and the on-off between the selector switch (7) and the outflow connecting pipe (3) can be controlled through the sample injection switch (1); one end of the emptying switch (2) is connected with the inflow connecting pipe (4) through a pipeline, and the other end of the emptying switch is connected with the third pipeline (13).
5. A silicon tetrachloride sampling apparatus according to claim 4, wherein: the sample injection switch (1) and the emptying switch (2) are both two-way valves.
6. A silicon tetrachloride sampling apparatus according to claim 4, wherein: the change-over switch (7), the purging switch (8), the sample injection switch (1) and the emptying switch (2) are all made of 316L stainless steel.
7. A silicon tetrachloride sampling apparatus according to any one of claims 1 to 4, wherein: the pipelines used in the device are all made of polytetrafluoroethylene.
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| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201921260524.9U CN210269282U (en) | 2019-08-05 | 2019-08-05 | Silicon tetrachloride sampling device |
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| CN201921260524.9U CN210269282U (en) | 2019-08-05 | 2019-08-05 | Silicon tetrachloride sampling device |
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Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN113516882A (en) * | 2021-07-01 | 2021-10-19 | 山西虹安科技股份有限公司 | Multi-state well control practical training device, method and system |
| CN114184709A (en) * | 2021-12-22 | 2022-03-15 | 新疆新特晶体硅高科技有限公司 | Online chlorosilane detection device and method |
-
2019
- 2019-08-05 CN CN201921260524.9U patent/CN210269282U/en active Active
Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN113516882A (en) * | 2021-07-01 | 2021-10-19 | 山西虹安科技股份有限公司 | Multi-state well control practical training device, method and system |
| CN114184709A (en) * | 2021-12-22 | 2022-03-15 | 新疆新特晶体硅高科技有限公司 | Online chlorosilane detection device and method |
| CN114184709B (en) * | 2021-12-22 | 2024-01-26 | 新疆新特晶体硅高科技有限公司 | Chlorosilane on-line detection device and method |
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